TW201000415A - Holder joint, holder unit, scribe head and scribe device - Google Patents

Holder joint, holder unit, scribe head and scribe device Download PDF

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Publication number
TW201000415A
TW201000415A TW098118341A TW98118341A TW201000415A TW 201000415 A TW201000415 A TW 201000415A TW 098118341 A TW098118341 A TW 098118341A TW 98118341 A TW98118341 A TW 98118341A TW 201000415 A TW201000415 A TW 201000415A
Authority
TW
Taiwan
Prior art keywords
holder
pin
joint
opening
scribing
Prior art date
Application number
TW098118341A
Other languages
Chinese (zh)
Other versions
TWI422544B (en
Inventor
Masao Yamamoto
Original Assignee
Mitsuboshi Diamond Ind Co Ltd
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Filing date
Publication date
Application filed by Mitsuboshi Diamond Ind Co Ltd filed Critical Mitsuboshi Diamond Ind Co Ltd
Publication of TW201000415A publication Critical patent/TW201000415A/en
Application granted granted Critical
Publication of TWI422544B publication Critical patent/TWI422544B/en

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Classifications

    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B33/00Severing cooled glass
    • C03B33/02Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor
    • C03B33/023Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor the sheet or ribbon being in a horizontal position
    • C03B33/027Scoring tool holders; Driving mechanisms therefor
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B33/00Severing cooled glass
    • C03B33/02Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor
    • C03B33/023Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor the sheet or ribbon being in a horizontal position
    • C03B33/033Apparatus for opening score lines in glass sheets
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B33/00Severing cooled glass
    • C03B33/02Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor
    • C03B33/023Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor the sheet or ribbon being in a horizontal position
    • C03B33/03Glass cutting tables; Apparatus for transporting or handling sheet glass during the cutting or breaking operations
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B33/00Severing cooled glass
    • C03B33/02Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor
    • C03B33/023Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor the sheet or ribbon being in a horizontal position
    • C03B33/037Controlling or regulating
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B33/00Severing cooled glass
    • C03B33/10Glass-cutting tools, e.g. scoring tools
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P40/00Technologies relating to the processing of minerals
    • Y02P40/50Glass production, e.g. reusing waste heat during processing or shaping
    • Y02P40/57Improving the yield, e-g- reduction of reject rates

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Processing Of Stones Or Stones Resemblance Materials (AREA)
  • Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)

Abstract

This invention is to position a holder having a scribe wheel accurately at a holder joint, and to make the holder be unloaded easily. Arrange a through hole 22a at side of an opening 23 of the holder joint 20, keeping a pin 25 in the through hole 22a in a way that the pin 25 is rotatable within a specified angle range. The pin 25 has a first plane section 25a in parallel to the axis and a second plane section 25c having a different angle with respect to the first plane section 25a. Insert the holder 10 into the opening 23 in a way that an incline section 16a thereof contacts the plane section 25a of the pin 25 so as to constitute a holder unit 30. Therefore, the holder may be accurately positioned, and the holder unit and scribe head that may be freely loaded or unloaded can be accomplished.

Description

201000415 六、發明說明: 【發明所屬之技術領域】 本發明係關於用於對脆性材料基板形成劃線之劃線裝 置與其劃線頭、保持具單元、保持具接頭。 【先前技術】 以在’在液晶顯示面板或液晶投影機基板等平面顯示 器等’係母玻璃基板於製造過程被貼合後被分斷為特定大 小之單個面板。於此母玻璃基板等之脆性材料基板之分斷 有劃線步驟與折斷步驟’在劃線步驟係使用劃線裝置。 圖1為顯示揭示於專利文獻1之劃線裝置之立體圖。 此劃線裝置100係移動台101沿一對之導引軌道1〇2a、i〇2b 於y軸方向被保持為可移動。滾珠螺桿103係與移動台1〇1 螺合。滾珠螺桿103係由馬達丨〇4之驅動而旋轉,使移動 台1〇1沿導引軌道102a、l〇2b於y軸方向移動。於移動台 101之上面設有馬達1〇^馬達1〇5係使平台1〇6在平 面旋轉以定位於既定角度。脆性材料基板1〇7係載置於此 " 平台106上,受未圖示之真空吸引手段等保持。於劃線裝 置1之上部設有拍攝脆性材料基板1〇7之對準標記之2台 之CCD攝影機108。 於劃線裝置1〇〇沿x軸方向以支柱llla、mb架設有 橋no跨越移動台101與其上部之平台ι〇6。劃線頭ιΐ2可 沿設於橋11〇之導引部113於χ軸方向移動。馬達ιι4係 使劃線頭112沿X軸方向移動。 於劃線裝置之劃線頭112透過保持具接頭12〇安裝有 3 201000415 刀輪保持具(以下僅稱為「保持具」)1〇。圖2為顯示根據 專利文獻1之保持具之圖,圖3為其立體圖。如此等圖所 示"保持/、10係大致圓筒形之構件,其一端大致正方形狀 之平坦部1 la、1 lb皆被設為平行於中心軸。保持具1〇於此 平坦部之間具有沿中心軸之缺口 12,於平坦部Ua、111?之 下端具有垂直於其面之方向之銷槽13。劃線 Μ具有例如輪徑2.5麵、厚度0.5麵程度之圓板狀之形) 狀’圓周部分之剖面係形成為圓錐形,於中心具有貫通孔 之圓盤狀或環狀。劃線輪14係藉由使被插入銷槽13之銷 15貫通中心之貫通孔保持為可旋轉。在將銷15插入銷槽 13保持劃線輪14後,即使需要劃線輪之交換時亦不取下劃 ㈣而與保持具—起交換。另外,保持具Μ之另一端設有 定位用之安裝部16。安裝部16係切除保持具10而形成, ::傾斜部l6a及平坦部16b。平坦部⑽係與保持具之轴 —與下方之平坦部1 la、Ub為垂直。保持具10係其 部之安裝部16為以磁性體金屬構成。 s'J線頭112係於其内部母右蚀曰 、I又有使保持具10之升降動作為 馬心例如使用空氣壓控制之氣壓虹或利用線性 ㈣降部H㈣置係由升降部將_輪14以 適虽^重壓接於脆性材料基板之表面上轉動,形成劃線。 圖為顯不以往之保持具接頭120 將保持具i 0择人+扣灿 圖圖5為顯不 等圖所/ 具接頭12G之狀態之立體圖。如此 不’保持具接頭120於上部具有軸承121a、121b, 為保持保持具10之保持部122。於保持具2 4 201000415 保持部122,如圖示形成㈣形之開口 i23,其内側埋設有 、 又於此開口 123之内部於從中心軸離開之位置 設置與中心轴垂直之平行銷125。平行銷125係圓柱之構 1,接觸保持具1G之傾斜部16a以定位保持具Μ。將此保 才、具10安裝於保持具接頭120時,係如圖5所示將保持具 2從其安裝部16插人保持具接頭⑶之開p 123。如此保 銷⑵而被定位固定 及引’且傾斜部…接觸平行 圖6為顯示於保持具接頭12〇安裝有保持具1〇之狀態 :局^面圖,圖7為顯示安裝有保持 =…部之圖。由於保持具1〇僅受磁石124吸引畫丨 故女裝極谷易,被固定於植… 1〇以卸下。 :特叱之位置。更換時係拉保持具 【專利文獻1]國際公開W〇2GG7/G63979 【發明内容】 單元13G 具Μ係安裝於保持具接頭12G構成保持具 係將割線輪=寺具單元130安 弯曲:=:Γ材料基板並使其移動。此時若劃線 因此-二=:持一 °亦有扭力作用。 線之位置精度亦會低會有即使直線劃線之狀況劃 持具接頭120之開σ 123,缺點。、又,由於保持具係壓入保 手臂等自動工I亡她 故難以卸下。特別是在使用機械 困難之缺點。換器交換保持具時,有保持具之卸下變 5 201000415 尽發明係著眼於此種問題201000415 VI. Description of the Invention: [Technical Field] The present invention relates to a scribing device for forming a scribe line for a brittle material substrate, a scribing head, a holder unit, and a holder joint. [Prior Art] A single mother panel in which a mother glass substrate such as a flat panel display such as a liquid crystal display panel or a liquid crystal projector substrate is bonded to a manufacturing process is divided into a specific size. The breaking of the brittle material substrate such as the mother glass substrate is performed by a scribing step and a breaking step. In the scribing step, a scribing device is used. Fig. 1 is a perspective view showing a scribing apparatus disclosed in Patent Document 1. The scribing device 100 is such that the moving table 101 is held movable in the y-axis direction along the pair of guiding tracks 1〇2a, i〇2b. The ball screw 103 is screwed to the moving table 1〇1. The ball screw 103 is rotated by the driving of the motor C4, and the moving table 1〇1 is moved in the y-axis direction along the guide rails 102a and 102b. A motor 1 is mounted on the top of the mobile station 101. The motor 1〇5 is used to rotate the platform 1〇6 in a plane to be positioned at a predetermined angle. The brittle material substrate 1〇7 is placed on the "platform 106, and is held by a vacuum suction means or the like (not shown). Two CCD cameras 108 for photographing the alignment marks of the brittle material substrate 1〇7 are provided on the upper portion of the scribing device 1. In the scribing device 1A, the bridges 11a and mb are bridged in the x-axis direction so as to bridge the mobile station 101 and the upper platform ι6 thereof. The scribing head ιΐ2 is movable in the z-axis direction along the guiding portion 113 provided on the bridge 11〇. The motor ιι4 moves the scribing head 112 in the X-axis direction. A 2010-0815 cutter wheel holder (hereinafter simply referred to as "holding member") is attached to the scribing head 112 of the scribing device through the holder joint 12A. Fig. 2 is a view showing a holder according to Patent Document 1, and Fig. 3 is a perspective view thereof. As shown in the figure, the "maintenance" of the 10 series is a substantially cylindrical member, and the flat portions 1 la and 1 lb having one end substantially square are arranged parallel to the central axis. The holder has a notch 12 along the central axis between the flat portions, and a pin groove 13 perpendicular to the surface of the flat portion Ua, 111?. The scribe line Μ has a disk-shaped shape of, for example, a surface having a diameter of 2.5 and a thickness of 0.5. The section of the circumferential portion is formed in a conical shape, and has a disk shape or a ring shape having a through hole at the center. The scribing wheel 14 is rotatably held by a through hole penetrating the pin 15 inserted into the pin groove 13 through the center. After the pin 15 is inserted into the pin groove 13 to hold the scribing wheel 14, even if the exchange of the scribing wheel is required, the stroke (4) is not removed and exchanged with the holder. Further, the other end of the holding member is provided with a mounting portion 16 for positioning. The mounting portion 16 is formed by cutting the holder 10, and the following: the inclined portion 16a and the flat portion 16b. The flat portion (10) is perpendicular to the axis of the holder - to the lower flat portions 1 la, Ub. The mounting portion 16 of the holder 10 is made of a magnetic metal. The s'J wire head 112 is attached to the inner female eclipse, and the I has the lifting action of the holding device 10 as the horse heart, for example, the air pressure control using the air pressure control or the linear (four) descending portion H (four) is set by the lifting portion _ The wheel 14 is rotated by a surface that is pressure-bonded to the substrate of the brittle material to form a scribe line. The figure shows that the retainer connector 120 will remain in the same position as the retainer. The figure 5 shows a perspective view of the state of the connector 12G. Thus, the holder joint 120 has bearings 121a and 121b at the upper portion to hold the holding portion 122 of the holder 10. The holding portion 122 of the holder 2 4 201000415 has an opening i23 formed in a (four) shape as shown in the figure, and is embedded therein, and a parallel pin 125 perpendicular to the central axis is provided inside the opening 123 at a position apart from the central axis. The parallel pin 125 is a cylindrical structure 1, and the inclined portion 16a of the holder 1G is contacted to position the holding member. When the retainer 10 is attached to the holder joint 120, the holder 2 is inserted from the mounting portion 16 into the opening p 123 of the holder joint (3) as shown in Fig. 5 . In this way, the pin is fixed (2) and positioned and fixed, and the inclined portion is in contact with each other. FIG. 6 shows the state in which the holder 1 is mounted on the holder joint 12〇: a surface view, and FIG. 7 shows that the mounting is maintained=... Department of the map. Since the holder 1 is only attracted by the magnet 124, the women's clothing is very easy to be fixed in the plant... 1〇 to remove. : The location of the special. [Tension Document 1] International Publication W〇2GG7/G63979 [Summary of the Invention] The unit 13G is attached to the holder joint 12G to form a holder system. The secant wheel = temple unit 130 is bent: =:Γ The substrate of the material is moved and moved. At this time, if the line is crossed, then - two =: one ° also has a torsional effect. The positional accuracy of the line is also low, and there is a disadvantage that even if the condition of the straight line is drawn, the opening σ 123 of the joint 120 is obtained. Moreover, it is difficult to remove the automatic work such as keeping the arm in the arm. Especially in the shortcomings of using mechanical difficulties. When the converter exchanges the holder, there is a removal of the holder. 5 201000415 The invention is based on this problem.

實保持於保持具接頭並使劃線之:置:==確 ::持―含此與保持具之保持具單元或KG 為解決此課題,本發明之保持 端之開口、埋設於前述開口之内侧之磁::備.設於- 述開口之貫通孔、具有平行於 則方貫通前 >.· , 、乐1平面部且被插Λ ‘ 述貝通孔且被保持為至少在一定角度範圍自由旋動之插入則 通孔在此本發明之保持具接頭,可更具傷:連結於前述賞 之側方而設之窪部、被插人前述 旋動角度限制於特定範圍之限制手段。 將“銷之 在此前述限制手段可係被保持為 之鋼球等球體。 定範圍自由移動 在此前述銷可係具有至少一端被 1平面部相異之角度 /、有興則述第 2 . . + ^ 第2平面部之圓柱狀構件,以前述第 2+面與前述窪部保持前述球體。 ㈣第 在此前述銷可係剖面為多角形狀之柱體。 接頭為==本發明之保持具單元係具備:保持具 之保持具之保持具=保頭之劃線形成用之劃線輪 之開口、埋設於前述開持具接頭具有:設於—端 開口之貫通孔、I有平"側之磁石、由側方貫通前述 切除而具有與前述第二二;第1平面部及至少-端被 被插人前述貫…被:部且 乂社疋角度範圍自由旋 6 201000415 動之銷,前述保持具具有:以磁性體金 ^述保持具接頭之前述銷之第〗平面之傾斜,、有接觸 自由旋動地設於下端之劃線輪,前述保持且係养:!部、 之第1平面與前述保持具之安裝部之傾斜面之㈣=銷 位而被安裝於前述保持具接頭。 自接觸被定 在此前述保持具接頭可更具備:連結 側方而設之蓬部、被插入前述座部内且將前述:::孔之 度限制於特定範圍之限制手段。 動角 開口包含:比前述保持具之圓筒之外徑大碩之 圓周之外徑小之圓周部分。 d 〇刀、比 蟪解、此課題,本發明之劃線頭係用於劃線裝置之*f 線碩,具有將前述之保持且 ,裝置之d 部。 肖,、早⑽持為自由上下動之升降 為解決此課題,本發明劃 板之劃線之劃線裝置,具有:申:線專裝 畫J線碩、於脆性材料基板與 項己載之 移動前述劃線頭之相對移動部。材料基板之平面方向相對 利用具有此種特徵之本發 部安定保持保持具,故可使形持具接頭在第1平面 可容县%使形成劃線時之精度提升。又, 了合易從保持具接頭安裝或 用機械手臂或自動工具交換器而之因二可獲得使 果β '卡持具之裝卸為自由之效 【實施方式】 7 201000415 圖8為顯示使用本發明之實施形態之劃線頭之劃線褒 置之立體圖。於此劃線裝置中’與前述之習知例相同部份 給予相同符號。本實施形態之劃線裝置1係移動台1〇1 > 一對之導引軌道l〇2a、i〇2b於y軸方向被保持為可移動。 滚珠螺桿103係與移動台1 〇 1螺合。滾珠螺桿j 〇3係由焉 達104之驅動而旋轉,使移動台1〇1沿導引軌道1〇2心1〇孔 於y軸方向移動。於移動台101之上面設有馬達1〇5。馬達 105係使平台丨〇6在xy平面旋轉以定位於既定角度。脆性 材料基板107係載置於此平台1〇6上,受未圖示之真空吸 引手段等保持。於劃線裝置丨之上部設有拍攝脆性材料基 板107之對準標記之2台CCD攝影機1〇8。 於劃線裝置1沿X軸方向以支柱1Ua、1Ub架設有橋 ho跨越移動台1〇1與其上部之平台106。劃線頭ιΐ2可凡 設於橋m之導引部⑴於χ轴方向移動。馬達114係= 劃線頭軸方向移動。於劃線頭ιΐ2之前端部透過 保持具接頭20安裝有後述之保持具10。在此馬達104與導 引軌道102a、1 〇2b、滾玦嫂垣,τ , 农珠螺桿103係使平台於y軸方向移 動之移動部,橋11 〇、Φ妊!,, ,, . 支柱1 Ua、11 b、導引部1 13係使劃 、'頭於X轴方向移動之銘氣 移動。P,馬達105係使平台旋轉之 疋轉部,此等構成相對移動部。 其次說明安裝於劃線頭 错一 只心保得具早兀之構成。保持且 早几30雖係由保持具接 接碩20與保持具10構成,但保持具 1 〇之構成與前述之習知例 、 # j相冋,名略詳細說明。保持具10 係如圖2、圖3所示為大致圓铃^ 圓湾形之構件’於其下端將劃線 201000415 輪14保持為可旋轉,於另一端設 _ 疋位用之安裝部16。 八:人說明本實施形態之料具接頭2g。圖9 實施形態之保持具接頭20之圖。如圖 w & κ 圖9所示,保持具接頭 20係於上部具有軸承21a、2 卜方為保持保持具之保持 邛22。於保持具接頭2〇之保 如圖不由下方 圓形之開口 23’於其内側埋設有磁石24。於保持具接頭2〇 之保持部22設有貫通圓形之開口 23之貫通孔山。又,於 保持部22於左右分別設置中心軸與貫通孔22卜致且淺圓 形之窪部22b、22c。於—方之窪部⑽之内部如圖$所示 設有小圓形之窪部22d。此窪部咖係用於保持小鋼球等球 體。又’於此開口 23之内部於從中心軸離開之位置設置與 中心軸垂直之銷25。銷乃係接觸保持纟10之傾斜部— 以定位保持具1 〇。 更詳細說明本實施形態之保持具接頭之銷25。銷25係 例如於圖10顯不立體圖為大致圓柱形狀,具有於長度方向 沿銷25之軸被切除之第1平面部25a。又,於銷25之一端 形成缺口 25b,設置垂直於平面部25a之第2平面部2化。 銷25之平面部25a與平面部25c不必一定要為直角。 其次說明開口 23之形狀與保持具丨〇之徑。使開口 23 之徑非與保持具〗〇之外徑相同而稍大,且設有2個相同徑 4分之形狀。亦即如圖丨! A所示,開口 23之外周中區 域11為比保持具1〇之外周大之徑,此外L2、L3係與保持 具1 〇之外周同徑,區域L2、L3之間之區域L4比保持具 1 〇小徑。如此即使於保持具】〇與開口 23之間有尺寸上之 9 201000415 誤差,至少在圖中會以2點(L4之兩端)接觸。實際上,此 系保持具1 〇在沿紙面垂直之2條線上與開口 2 3之内壁接It is held in the holder joint and the scribe line is set: == YES:: holding the holder unit or KG containing the holder and the holder to solve the problem, the opening of the holding end of the present invention is buried in the opening Magnetic inside:: provided. - The through hole of the opening, having a plane parallel to the front of the section >., , and the plane of the music 1 and being inserted into the shell hole and kept at least at a certain angle The insertion of the range freely rotatable is the through hole of the holder of the present invention, which can be more injurious: the crotch portion connected to the side of the above-mentioned tour, and the restriction means that the insertion angle is limited to a specific range . The above-mentioned restriction means can be held as a sphere such as a steel ball. The range can be freely moved. Here, the pin can have an angle at least one end which is different by one plane portion, and the second is preferred. + ^ The cylindrical member of the second planar portion holds the spherical body with the 2+th surface and the crotch portion. (4) The pin may be a column having a polygonal cross section. The joint is == the retention of the present invention. The unit has a holder for the holder of the holder = an opening of the scribing wheel for forming the underline of the head, and the connector for the opening of the holder has a through hole provided at the end opening, and I has a flat The magnet of the side is separated from the side by the side cut, and has the second and second sides; the first plane portion and the at least one end are inserted into the above-mentioned portion: the portion and the angle of the circle are freely rotated 6 201000415 The holder has a tilting of a plane of the pin of the holder of the holder of the magnetic body, and a scribing wheel provided at a lower end with a freely rotative contact, and the holding and the:: An inclined surface of the first plane and the mounting portion of the holder (4) The pin holder is attached to the holder joint. The holder of the holder is further provided with the holder portion that is connected to the side and is inserted into the seat portion and has the degree of the following::: Limiting means for a specific range. The moving angle opening includes: a circumferential portion having a smaller outer diameter than the outer diameter of the cylinder of the holder. d boring tool, specific solution, this problem, the drawing of the present invention The thread head is used for the *f line of the scribing device, and has the d portion of the device which is held as described above. Xiao, and early (10) are held up and down freely to solve this problem, and the scribe line of the present invention The scribing device has the following components: a J-line master, a brittle material substrate, and a relative moving portion of the scribing head. The planar direction of the material substrate is relative to the present invention having such a feature. The stability of the retaining device keeps the retaining device, so that the accuracy of the forming of the connector can be increased in the first plane, and the accuracy of forming the scribing is improved. In addition, the easy to install from the retainer joint or the robot arm or automatic tool exchanger The second cause The loading and unloading of the β' card holder is free of charge. [Embodiment] 7 201000415 Fig. 8 is a perspective view showing a scribing device using a scribing head according to an embodiment of the present invention. The same portions are given the same reference numerals. The scribing device 1 of the present embodiment is a moving table 1〇1 > The pair of guiding tracks 10a, 2a, and 2b are held movable in the y-axis direction. The 103 series is screwed into the moving table 1 〇 1. The ball screw j 〇 3 is rotated by the driving of the Tida 104, so that the moving table 1〇1 moves along the guiding track 1〇2 and the pupil 1 in the y-axis direction. A motor 1〇5 is disposed on the upper surface of the mobile station 101. The motor 105 rotates the platform 丨〇6 in the xy plane to be positioned at a predetermined angle. The brittle material substrate 107 is placed on the platform 1〇6, and is not shown. Vacuum suction means are maintained. Two CCD cameras 1 to 8 for photographing the alignment marks of the brittle material substrate 107 are provided on the upper portion of the scribing device. The scribing device 1 is provided with a bridge 106 that spans the mobile station 1〇1 and its upper portion with the pillars 1Ua and 1Ub in the X-axis direction. The scribing head ιΐ2 can be moved in the direction of the x-axis of the guide portion (1) of the bridge m. Motor 114 system = movement in the direction of the scoring axis. A holder 10 to be described later is attached to the end portion of the scribing head ιΐ2 through the holder joint 20. Here, the motor 104 and the guide rails 102a, 1 〇 2b, the roll, τ, and the bead screw 103 are moving parts in which the platform is moved in the y-axis direction, and the bridge 11 〇, Φ pregnancy! , , , , . . . The pillars 1 Ua and 11 b and the guides 1 13 move the movement of the stroke and the head in the X-axis direction. P, the motor 105 is a slewing portion that rotates the platform, and these constitute a relative moving portion. Secondly, it is explained that it is installed on the scribing head. Although it is composed of the holder 20 and the holder 10, the configuration of the holding member 30 is the same as the conventional example and #j, and the names are slightly described in detail. The holder 10 is a member of a substantially round bell-shaped bay shape as shown in Fig. 2 and Fig. 3, and the wheel 14 is kept rotatable at the lower end thereof, and the mounting portion 16 for the 疋 position is provided at the other end. Eight: A description will be given of the material joint 2g of this embodiment. Figure 9 is a view of the holder joint 20 of the embodiment. As shown in Fig. 9 and Fig. 9, the holder joint 20 has bearings 21a and 2 on the upper portion to hold the holder 22 of the holder. In the holder of the holder 2, the magnet 24 is embedded in the circular opening 23'. The holding portion 22 of the holder joint 2 is provided with a through-hole mountain penetrating through the circular opening 23. Further, on the left and right sides of the holding portion 22, the crotch portions 22b and 22c having the central axis and the through hole 22 and having a shallow circular shape are provided. Inside the inside of the square (10), as shown in Fig. $, a small rounded portion 22d is provided. This crotch is used to hold balls such as small steel balls. Further, the inside of the opening 23 is provided with a pin 25 perpendicular to the central axis at a position apart from the central axis. The pin is the inclined portion of the contact retaining — 10 - to position the retainer 1 〇. The pin 25 of the holder joint of the present embodiment will be described in more detail. The pin 25 is, for example, a substantially cylindrical shape in the perspective view of Fig. 10, and has a first flat portion 25a which is cut along the axis of the pin 25 in the longitudinal direction. Further, a notch 25b is formed at one end of the pin 25, and a second flat portion perpendicular to the flat portion 25a is provided. The flat portion 25a of the pin 25 and the flat portion 25c do not have to be at right angles. Next, the shape of the opening 23 and the diameter of the retaining body will be described. The diameter of the opening 23 is not slightly the same as the outer diameter of the holder, and is provided with two shapes having the same diameter and four minutes. That is to say! As shown in A, the outer peripheral region 11 of the opening 23 is larger than the outer circumference of the holder 1 ,, and the L2 and L3 are the same diameter as the holder 1 ,, and the region L4 between the regions L2 and L3 is larger than the holder. 1 〇 trail. Thus, even if there is a dimensional difference between the holder 〇 and the opening 23 in the size of 201000415, at least in the figure, it will be contacted at 2 points (both ends of L4). In fact, this system holds 1 〇 on the 2 lines perpendicular to the paper surface and the inner wall of the opening 2 3

觸可使保持確實且使交換容易。另外,亦可僅為區域U 與Μ。若僅考慮裝却之容易度時,可如圖11 Β所示僅為比 保持具之外形稍大之外形。 一於保持具接頭20之組裝時,如圖12所示先將銷25從 方之窪部22b插入貫通孔22a。此時將平面部2化保持為 對保持具接頭之開口幻之方向約45度之程度,再使第2 平面部25c對向於窪部22d。之後將鋼球%收納於以窪部 d與缺口 25b形成之空間内。再使一對之圓板形之蓋 覆蓋並接著於窪部22b '瓜以免銷25從貫通孔❿脫 洛。如此鋼球26即被封閉於以銷25之缺口 25b、小徑之窪 部22d、蓋27a形成之Λ L " 仏成之二間内,可在鋼球26移動之範圍内 使銷25以—^角度旋動。在此鋼球26、窪部22d、蓋27a 構成限制銷25之旋動範圍之限制手段。於銷^之旋動角 闽門你便弟1 +面部25a與保持具1〇之安裝部之傾 斜面16a為包含平行之角度。 士上述構成保持具接頭2G後,將前述之保持具安 裝於保持具接帛20。於安裝時係如圖i3 a所示將保持具 1 〇從其安裝部16如箭頭所-把 負所不插入保持具接頭20之開口 23。逐漸插入後安裝部1 之傾斜面16a與銷25之平面部 25a接觸,如圖13 B所示雜人 、銷25會稍微旋動,故可容易使平 面部25a面接觸安裝部μ夕缸 t傾斜面16a,可以磁石24固定 保持具1 0。由於保持具1 〇 < 、ιυ僅跫磁石24吸引,故安裝極容 10 201000415 易,被固定於特定之位置。 係在劃線頭之立體圖。劃線頭112之词服馬達41 、^往下側突出之倒立狀態下透過載置板42安裝 於安裝板43。於伺服馬违奴W女裝 旋轉之圓筒凸輪44。圓= 之旋轉轴安裝有與旋轉軸-體 斜狀態之凸一輪44之下面係對水平狀態為傾 又’劃線頭112係於下部具有線性轴承45,保持具構 件6於此線性軸承45被保持為可於上下方向滑動。於線 f軸承45與保持具構件46 _體設有抵接於圓筒凸輪44之 凸輪面44a之凸輪從動件47。凸輪從動件47係可 輪形狀。於保持具構件46與安裝板43之間 構件46相對於安裝柘’休符具 女裝板43彺上方彈壓之彈性體,例如線圈 k 彈n線圈彈簧48將保持具構件46往上方彈 輪從動件47壓接於凸輪面44a。在此飼服馬達、圓筒凸 輪44、線性軸承45、保持具構件私、凸輪從動件/ 圈彈簧48構成使保持具單元%升降之升降部。 〃 於如上述構成之劃線裝置丨中,由升降部以適當之疒 ^將劃線輪丨4壓接於脆性材料基板之表面上並轉動,形^ 劃線。在本實施形態由於前述之保持具接頭2〇與銷幻之 平面部25a係與保持具1〇之傾斜部16a以面接觸故可保 持保持位置,即使形成彎曲之劃線安裝位置亦不會變動。'、 在劃線特定時間後,會需要交換保持具丨〇。此時以 械手臂等將保持具1G如圖13 c所示向m由於此㈣ 25為可旋動,故即使於劃線時有橫向之力作用亦可容易卸 11 201000415 ’可無礙使用自動 除保持具ίο。因此保持具10之交換容易 交換器等。 另外’在本實施形態,銷25雖係圓柱狀且於長度方向 切除-部形成平面部25a,但亦可使用多角柱例如四角柱之 構件構成。此時至少兩端…角落加工為圓形,使在貫 通孔22a内可旋動。又’亦可僅使㈣部為圓柱形以使可旋 動0 在本實施形態雖於銷25設第2平面部仏,以鋼球^ 限制銷之旋動範圍,但此僅為1,亦可使心限制銷之 旋動範圍之其他方法。例如於銷25之一端設突起,以此突 起在窪β 22d内運動之範圍為銷25之旋動範圍,以限 動範圍。 又,在本實施形態雖於銷25設第2平面部&,但只 要保持鋼球26以使接觸第}平面部25a旋動範圍便受限, 故不必-定要設缺口 25b或平面部25c。又,在本實施形態 雖係使用鋼球26,但亦可使用任意材料之球體。 本發明係關於用於對跪性材料基板形成劃線之劃線裝 置且使保持具之交換容易之保持具接頭、保持具單元,; 使保持具之安裝位置安定化,可使交換自動化。因此可 泛利用於劃線裝置。 【圖式簡單說明】 圖1為顯示以往之劃線裝置之全體構成之立體圖。 圖2為顯示保持具之構成之圖。 圖3為顯示保持具之立體圖。 12 201000415 圖4為顯示以往之保持具接頭之圖。 圖5為將保持具插 m 6 άμ - 符具接頭時之立體圖。 為顯不已插入保持具之狀態 剖面圖。 你待具接碩之局部 圖7為顯示將保持具接頭 圖8為顯示本 」線碩之狀態之圖。 之立體圖。本發月之實施形態之劃線裝置之全體構成The touch can be made true and the exchange is easy. In addition, it is only possible to use the area U and Μ. If only the ease of loading is considered, it can be slightly larger than the shape of the holder as shown in Fig. 11A. When the holder 20 is assembled, the pin 25 is first inserted into the through hole 22a from the square portion 22b as shown in Fig. 12 . At this time, the flat portion 2 is held to the extent that the direction of the opening of the holder joint is about 45 degrees, and the second flat portion 25c is opposed to the crotch portion 22d. Thereafter, the steel ball % is housed in a space formed by the crotch portion d and the notch 25b. A pair of circular plate-shaped covers are then covered and then placed on the crotch portion 22b to prevent the pin 25 from being detached from the through hole. Thus, the steel ball 26 is enclosed in the two sides of the notch 25b of the pin 25, the small diameter portion 22d, and the cover 27a, and the pin 25 can be made within the range in which the steel ball 26 moves. —^ Angle rotation. Here, the steel ball 26, the crotch portion 22d, and the cover 27a constitute a means for restricting the range of the rotation of the pin 25. The angle of rotation of the pin ^ 你 你 你 便 + + + + + + + + + + + + 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 After the holder 2G is constructed as described above, the holder is attached to the holder 20 . At the time of installation, as shown in Fig. i3a, the holder 1 is not inserted into the opening 23 of the holder joint 20 from the mounting portion 16 as indicated by the arrow. The inclined surface 16a of the mounting portion 1 is gradually inserted into contact with the flat portion 25a of the pin 25. As shown in Fig. 13B, the miscellaneous person and the pin 25 are slightly rotated, so that the flat portion 25a can be easily brought into contact with the mounting portion. The inclined surface 16a can hold the holder 10 by the magnet 24. Since the holder 1 〇 < ιυ is only attracted by the magnet 24, the installation is easy to be fixed at a specific position. Attached to the perspective view of the scribing head. The scribe head 112 is attached to the mounting plate 43 through the mounting plate 42 in an inverted state in which the motor 41 and the lower side protrude. Serve the horse against the slave W women's rotating cylinder cam 44. The rotation axis of the circle = is mounted with the lower side of the convex shaft 44 of the rotating shaft-body oblique state, and the horizontal state is tilted. The scribe head 112 has a linear bearing 45 at the lower portion, and the holder member 6 is held by the linear bearing 45. Keep it slidable in the up and down direction. The wire follower 45 and the holder member 46_ are provided with a cam follower 47 that abuts against the cam surface 44a of the cylindrical cam 44. The cam follower 47 is in the shape of a wheel. The elastic member of the member 46 between the holder member 46 and the mounting plate 43 is biased against the mounting armor plate 43. For example, the coil k-elastic coil spring 48 moves the holder member 46 upwardly from the upper pulley. The movable member 47 is crimped to the cam surface 44a. Here, the feeding motor, the cylindrical cam 44, the linear bearing 45, the holder member, and the cam follower/ring spring 48 constitute a lifting portion for raising and lowering the holder unit %. In the scribing apparatus 上述 constructed as described above, the scribing rim 4 is press-bonded to the surface of the brittle material substrate by the elevating portion and rotated to form a scribe line. In the present embodiment, since the holder joint 2' and the pin-shaped flat portion 25a are in surface contact with the inclined portion 16a of the holder 1b, the holding position can be maintained, and the position of the curved line is not changed even if the curved line is formed. . ', after the specified time of the line, you will need to exchange the hold. At this time, the holder 1G is held by the arm or the like as shown in FIG. 13c to m. Since the (4) 25 is rotatable, even if there is a lateral force acting on the scribing, it can be easily unloaded. 11 201000415 In addition to keeping ίο. Therefore, it is easy to exchange the switch 10 and the like. Further, in the present embodiment, the pin 25 has a cylindrical shape and is cut in the longitudinal direction to form the flat portion 25a. However, it may be formed of a polygonal post such as a quadrangular prism. At this time, at least both ends of the corners are rounded to be rotatable in the through hole 22a. Further, it is also possible to make only the (four) portion cylindrical so that the rotation can be made. In the present embodiment, although the second flat portion is provided on the pin 25, the rotation range of the pin is restricted by the steel ball ^, but this is only 1, Other methods that allow the heart to limit the range of rotation of the pin. For example, a projection is provided at one end of the pin 25, so that the range of movement in the 洼β 22d is the range of the rotation of the pin 25 to limit the range. Further, in the present embodiment, the second flat portion & the pin 25 is provided. However, as long as the steel ball 26 is held so as to restrict the range of the contact of the flat portion 25a, it is not necessary to provide the notch 25b or the flat portion. 25c. Further, in the present embodiment, the steel ball 26 is used, but a spherical body of any material may be used. The present invention relates to a retainer joint and a holder unit for forming a scribing line for a substrate of an inert material and for facilitating exchange of the holder; and securing the mounting position of the holder to automate the exchange. Therefore, it can be widely used in the scribing device. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a perspective view showing the overall configuration of a conventional scribing apparatus. Fig. 2 is a view showing the constitution of the holder. Figure 3 is a perspective view showing the holder. 12 201000415 Figure 4 is a diagram showing the conventional holder joint. Figure 5 is a perspective view of the holder with the m 6 άμ - symbol connector. In order to show the state of the holder, the profile is inserted. The part that you are going to receive is shown in Figure 7. The figure shows the holder of the holder. Figure 8 shows the state of the line. Stereo view. The overall composition of the scribing device of the embodiment of this month

二為顯示本發明之實施形態之保持具接頭之圖。 圖為顯示本發明之實施形態之銷之立體圖。 圖以為顯示本發明之實施形態之保持具接頭之開口 圖ΗΒ為顯示保持具接頭之開口之其他形態之圖。 立體^12為顯示本發明之實施形態之保持具接頭之組裳之 圖13Α為顯示於本發明之實施形態即將將保持具 *疋於保持具接頭之狀態之局部剖面圖。 圖13Β為顯示於本發明之實施形態將保持具插、 於保持具接頭後之狀態之局部刹面圖。 又 圖13C為顯示於本發明之實施形態從保持具接頭 保持具後之狀態之局部剖面圖。 圖14為顯示本發明之實施形態之劃線頭之立體圖。 【主要元件符號說明】 1 :劃線裝置 10 :保持具 13 201000415 1 la、lib、16b :平坦部 12 :缺口 1 3 :銷槽 14 :劃線輪 1 5 :劃線輪用銷 1 6 :安裝部 16a :傾斜部 20 :保持具接頭 21a、21b :軸承 22 :保持部 22a :貫通扎 22b ' 22c ' 22d :窪部 23 :開口 24 :磁石 25 :銷 25a、25c :平面部 25b :缺口 26 :鋼球 1 1 2 :劃線頭 14The second is a view showing a holder joint of an embodiment of the present invention. The figure is a perspective view showing a pin of an embodiment of the present invention. The figure shows the opening of the holder joint showing the embodiment of the present invention. Fig. 图 is a view showing another form of the opening of the holder joint. Fig. 13 is a partial cross-sectional view showing a state in which the holder is attached to the holder of the holder in the embodiment of the present invention. Fig. 13 is a partial brake plan view showing a state in which the holder is inserted into the holder after the holder of the embodiment of the present invention. Fig. 13C is a partial cross-sectional view showing the state in which the retainer of the retainer is held in the embodiment of the present invention. Fig. 14 is a perspective view showing a scribing head according to an embodiment of the present invention. [Description of main component symbols] 1 : scribing device 10 : holder 13 201000415 1 la, lib, 16b : flat portion 12 : notch 1 3 : pin groove 14 : scribing wheel 1 5 : scribing wheel pin 1 6 : Mounting portion 16a: inclined portion 20: holder joints 21a, 21b: bearing 22: holding portion 22a: through bar 22b '22c' 22d: crotch portion 23: opening 24: magnet 25: pin 25a, 25c: flat portion 25b: notch 26: steel ball 1 1 2 : scribing head 14

Claims (1)

201000415 七、申請專利範圍·· 1、一種保持具接頭,具備·· 端之開口、埋設於前述開口内側之磁 側 二之貫通“及具有平行於轴之第1乎面 邛且插入則述貫通孔被保持為至少 動之銷。 你疋角度範圍自由旋 備遠二如申請專利範圍第1項之保持具接頭1中,更且 備連,、D於前述貫通孔之側方而設之 - 部内將箭 £ '以及插入前述窪 ?之旋動角度限制於特定範圍之限制手段。 、如申請專利範圍第2項之保持 限制手段係被保持為在一定範圍自#中,則述 疋靶圍自由移動之球體。 銷…請專利範圍第3項之保持具接頭,其中,前过 麟係具有至少—端被其中别迷 角度之第2平面部之圓柱狀構:=;2平面部相異之 窪部保持前述球體。 W述第2平面與前述 5、 如申請專利範圍第丨 錦係剖面為多角形狀之柱體。持具接頭,其中,前述 6、 一種保持具單元,且 前述保持具接頭之持具接頭、具備安裝於 在於:接…線形成用之劃線輪之保持具,其特徵 前述保持具接頭具有·· 設於—端之開口、掠讯 a 側方貫通前述開口之貫^别迷開口之内側之磁石、由 面部及至少-端被切除=有:Ϊ具有平行於轴之… 具有與則述第1平面部相異之角 15 201000415 面部且插入前述貫通孔被保持為至少在-定角 度範圍自由旋動之銷; 勺王V隹疋角 前述保持具具有: 以磁性體金屬構成且具有接 銷之第1平面之倾It 疋保持具接頭之前述 禾1十面之傾斜面之安裝部、以 端之劃線輪; 自由鉍動地設於下 月IJ述保持具係藉由前述銷之第i平 安裝部之傾斜面之面接觸 、肖,h、、具之 頭。 職(位^裝於料保持具接 7、 如申請專利範圍第6項之保持 保持具接頭更具備:連結於前述貫通孔、',前述 部、被插入前述窪部内且將前述銷 而设之窪 範圍之限制手段。 動角度限制於特定 8、 如申請專利範圍第6項之保持具單— 保持具為圓柱狀構件; ’、 則述 月|J述保持具接頭之開口包 a 外和大,11用却v 比則述保持具之圓筒之 圓周B、比圓周之外徑小之圓周部分。 9、-種用於劃線裝置之劃線頭,其特徵在於: 自由上下動之升園第6項記載之保持具單元保持為 微在:具有一種用於脆性材料―裝置,其特 申請專利範圍第9 jf A番· & L…. 載之劃線頭、以及於脆性材料 基板與脆性材料基板之平面方 ’ 乃句相對移動則述劃線頭之相 16 201000415 對移動部。201000415 VII. Patent application scope · 1. A holder joint, which has an opening of the end, a magnetic side of the inner side of the opening, and a first side surface parallel to the axis, and the insertion is described. The hole is kept at least as a pin. You can freely rotate the angle range. For example, in the holder 1 of the patent application range 1, it is more connected, and D is located on the side of the through hole - In the Ministry, the arrow and the direction of the rotation of the arrow are limited to a specific range. If the means for retaining the second item of the patent application is kept within a certain range from #, then the target range is described. The freely moving sphere. Pin... Please retain the joint of the third item of the patent scope, wherein the front lining has a cylindrical structure of at least the second plane portion of which the angle is different: =; 2 planes are different The ridge portion holds the spherical body. The second plane and the above-mentioned 5, as in the patent application, the 丨 系 剖面 剖面 剖面 剖面 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 A holder having a joint and a holder for attaching to a scribing wheel for forming a wire, wherein the holder joint has an opening provided at the end and a side passing through the opening The magnet on the inner side of the opening is cut off from the face and at least the end = there is: Ϊ has parallel to the axis... has an angle different from that of the first flat portion 15 201000415 The face is inserted and the through hole is held a pin that is freely rotatable at least in a range of angles; a spoon holder of the V-corner has the following: a body made of a magnetic metal and having a first plane of the pin; The mounting portion of the inclined surface and the scribing wheel at the end; freely swayed to be placed next to the next month, the holder of the holder is contacted by the surface of the inclined surface of the ith flat mounting portion of the pin, XI, h, In the position of the holder, the holder of the retaining device of the sixth aspect of the patent application is further provided: the connecting portion is connected to the through hole, 'the aforementioned portion is inserted into the abutting portion and the pin is inserted Scope of design Restriction means. The dynamic angle is limited to a specific 8. The holder of the sixth item of the patent application scope - the holder is a cylindrical member; ', the month of the month|J said the opening of the joint of the holder is a large and large, 11 However, the ratio V is the circumference of the cylinder B of the holder, which is smaller than the outer diameter of the circumference. 9. A type of scribing head for the scribing device, which is characterized in that: The holder unit described in the item is kept in a microscopic manner: it has a slash head for the brittle material-device, and the patent application scope is 9 jf A &L; and the brittle material substrate and the brittle material The plane of the substrate is the relative movement of the sentence, and the phase of the scribe head is 16 201000415 for the moving part.
TW098118341A 2008-06-23 2009-06-03 Keep the connector, retainer unit, scribe head and scribing device TWI422544B (en)

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TW201206851A (en) 2012-02-16
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CN102390924A (en) 2012-03-28
TWI422544B (en) 2014-01-11
JP2010000744A (en) 2010-01-07
CN101613179B (en) 2013-06-19
KR20090133081A (en) 2009-12-31
KR101075840B1 (en) 2011-10-25
KR101075839B1 (en) 2011-10-25
TWI372737B (en) 2012-09-21
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CN101613179A (en) 2009-12-30
JP5353085B2 (en) 2013-11-27

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