KR102577831B1 - Scribing apparatus and holder unit - Google Patents

Abstract

[Task] Stabilize the formation position of the scribe line while rotating the scribing wheel smoothly.
[Solution] The holder unit 30 includes a retaining groove 63, pin holes 64a, 64b, a scribing wheel 40, and a pin shaft 50. When the scribing wheel 40 is pressed against the substrate surface, the through hole 41 and the pin shaft 50 are pressed so that both sides of the scribing wheel 40 are pressed against the opposing inner surfaces of the retaining groove 63. The angular clearance between the inner surface of the retaining groove 63 and the side surface of the scribing wheel 40 and the inclination angle of the pin shaft 50 with respect to the inner surface of the retaining groove 63 are set. The inner peripheral surface 41C forming the through hole of the scribing wheel 40 includes a curved surface forming the central portion of the through hole in the thickness direction of the scribing wheel, and the curved surface forms the through hole in the thickness direction. The diameter of the central portion of the hole 41 becomes smaller than the diameter of the end portion of the through hole.

Description

Scribing device and holder unit {SCRIBING APPARATUS AND HOLDER UNIT}

The present invention relates to a scribing device and a holder unit for forming a scribe line on a substrate.

Conventionally, brittle material substrates such as glass substrates are divided by a scribing process in which a scribe line is formed on the surface of the substrate, and a break process in which a predetermined force is applied to the substrate surface along the formed scribe line. In the scribing process, the blade tip of the scribing wheel moves along a predetermined line while being pressed against the surface of the substrate. To form the scribe line, a scribing device equipped with a scribe head is used.

Patent Document 1 below discloses a scribing device that forms a scribe line on the surface of a substrate by rotating a scribing wheel on the surface of the substrate. In this scribing device, with the scribing wheel inserted into the retaining groove formed in the holder, the scribing wheel can be rotated in the holder by inserting the pin shaft into both the hole formed in the holder and the hole formed in the scribing wheel. It is maintained.

Publication No. WO2007/063979

The scribing wheel mounted on the holder needs to rotate within the retaining groove to form the scribe line. For this reason, the width of the retaining groove is slightly wider than the thickness of the scribing wheel, and a clearance is secured between the scribing wheel and the retaining portion. Due to this clearance, the scribing wheel is in a state where it can move along the pin axis within the holder groove. However, when forming a scribe line, if the scribing wheel moves in the pin axis direction, the formation position of the scribe line becomes unstable. For this reason, in conventional scribing devices, it has been a problem that the scribe line deviates from the desired position.

In view of these problems, the purpose of the present invention is to provide a scribing device and a holder unit that can stabilize the formation position of the scribing line without impeding the rotation of the scribing wheel.

A first aspect of the present invention relates to a scribing device for forming a scribe line on a substrate surface. A scribing device related to this aspect has a holder unit holding a scribing wheel and a scribing head holding the holder unit rotatable about an axis perpendicular to the substrate surface. The holder unit includes a retaining groove into which the scribing wheel is inserted, a pin hole formed to span the retaining groove, a through hole of the scribing wheel inserted into the retaining groove, and a pin shaft inserted into the pin hole. . When the scribing wheel is pressed against the surface of the substrate, the clearance between the through hole and the pin shaft and the holding groove are so that both sides of the scribing wheel are pressed against the opposing inner surfaces of the holding groove. A clearance between the inner surface and a side surface of the scribing wheel and an inclination angle of the pin shaft with respect to the inner surface of the retaining groove are set, and the inner peripheral surface forming the through hole of the scribing wheel is at least the swivel surface. and a curved surface forming a central portion of the through hole in the thickness direction of the scribing wheel, wherein the curved surface has a diameter of the central portion of the through hole in the thickness direction of the through hole in the thickness direction. It is formed to be smaller than the diameter of the end.

According to the scribing device related to this aspect, when the scribing wheel is pressed against the surface of the substrate, both sides of the scribing wheel are respectively pressed against the opposing inner surfaces of the retaining grooves. For this reason, when forming a scribe line, movement of the scribing wheel in the pin axis direction is suppressed. On the other hand, the inner peripheral surface of the through hole of the scribing wheel has a curved surface formed so that the diameter of the central portion of the through hole in the thickness direction is smaller than the diameter of the end portion of the through hole in the thickness direction, so that the inner peripheral surface constituting the through hole and the outer peripheral surface of the pin shaft are in line contact. As a result, the inner peripheral surface 41C of the through hole can easily slide relative to the pin axis, so that the scribing wheel 40 can be rotated smoothly. Additionally, since the contact area between the inner peripheral surface 41C of the through hole 41 and the outer peripheral surface of the pin shaft 50 is small, glass cullet or foreign matter generated when forming a scribe line on the substrate 15 is not present in the through hole 41. Even if it is inserted between the inner peripheral surface (41C) of the pin shaft (50) and the outer peripheral surface of the pin shaft (50), it is not easily affected by the rotation of the scribing wheel (40). As a result, rotation of the scribing wheel 40 with respect to the pin shaft 50 can be prevented from being inhibited. Therefore, the formation position of the scribe line can be stabilized without impeding the rotation of the scribe line.

In the scribing device according to this aspect, the pin hole is formed to be inclined at least in a direction parallel to the surface of the substrate with respect to a direction perpendicular to the inner surface of the retaining groove, and the pin hole and the through hole are inserted. The pin axis may be inclined at least in a direction parallel to the substrate surface with respect to a direction perpendicular to the inner surface of the retaining groove. According to this configuration, the formation position of the scribe line can be stabilized, as will be explained in the embodiment below.

In the scribing device according to this aspect, the pin hole is formed to be inclined in a direction perpendicular to the surface of the substrate with respect to the direction perpendicular to the inner surface of the retaining groove, and the pin hole inserted into the pin hole and the through hole The pin axis may be inclined in a direction perpendicular to the surface of the substrate with respect to a direction perpendicular to the inner surface of the retaining groove. According to this configuration, the formation position of the scribe line can be further stabilized.

A second aspect of the invention relates to a holder unit holding a scribing wheel for forming a scribe line. A holder unit related to this aspect includes a retaining groove into which the scribing wheel is inserted, a pin hole formed to span the retaining groove, a through hole of the scribing wheel inserted into the retaining groove, and a pin inserted into the pin hole. Equipped with an axis. When the scribing wheel is pressed against the surface of the substrate, the clearance between the through hole and the pin shaft and the holding groove are so that both sides of the scribing wheel are pressed against the opposing inner surfaces of the holding groove. A clearance between the inner surface and a side surface of the scribing wheel and an inclination angle of the pin shaft with respect to the inner surface of the retaining groove are set, and the inner peripheral surface forming the through hole of the scribing wheel is at least the swivel surface. and a curved surface forming a central portion of the through hole in the thickness direction of the scribing wheel, wherein the curved surface has a diameter of the central portion of the through hole in the thickness direction of the through hole in the thickness direction. It is formed to be smaller than the diameter of the end.

By holding the holder unit related to this aspect to the scribe head rotatably around an axis perpendicular to the substrate surface, the same effect as the first aspect can be achieved.

As described above, according to the present invention, it is possible to provide a scribing device and a holder unit capable of stabilizing the formation position of the scribing line without impeding the rotation of the scribing wheel.

The effect and significance of the present invention will become clearer through description of the embodiments shown below. However, the embodiment shown below is only an example when implementing the present invention, and the present invention is not limited to what is described in the embodiment below.

1 is a diagram schematically showing the configuration of a scribing device according to an embodiment.
2(a) and 2(b) are front and side views, respectively, of the holder unit according to the embodiment.
Fig. 3 is a longitudinal cross-sectional view of a part of the holder unit according to the embodiment.
4(a) to 4(d) are cross-sectional views schematically showing the operation of the holder according to the embodiment, respectively.
5(a) and 5(b) are diagrams illustrating the operation when the pin axis according to the embodiment is inclined in the vertical direction, respectively.

EMBODIMENT OF THE INVENTION Hereinafter, embodiment of this invention will be described with reference to the drawings. In addition, in each drawing, for convenience, the X-axis, Y-axis, and Z-axis that are orthogonal to each other are indicated. The X-Y plane is parallel to the horizontal plane, and the Z axis direction is vertical.

1 is a diagram schematically showing the configuration of the scribing device 1.

The scribing device 1 is provided with a moving table 10. The moving table 10 is screwed together with the ball screw 11. The moving table 10 is supported by a pair of guide rails 12 so as to be movable in the Y-axis direction. When the ball screw 11 is rotated by driving the motor, the moving table 10 moves in the Y-axis direction along the pair of guide rails 12.

A motor 13 is installed on the upper surface of the moving table 10. The motor 13 rotates the table 14 located at the top in the XY plane and positions it at a predetermined angle. The table 14, which can be horizontally rotated by the motor 13, is equipped with a vacuum suction means (not shown). The substrate 15 placed on the table 14 is held on the table 14 by this vacuum suction means.

The substrate 15 is a glass substrate, a ceramic substrate made of low-temperature fired ceramics or high-temperature fired ceramics, a silicon substrate, a compound semiconductor substrate, a sapphire substrate, a quartz substrate, or the like. Additionally, the substrate 15 may have a thin film or semiconductor material attached to or included on the surface or inside of the substrate. Additionally, the substrate 15 may have a thin film or the like that does not correspond to a brittle material attached to its surface.

The scribe device 1 is provided above the substrate 15 placed on the table 14 with two cameras 16 that capture images of alignment marks formed on the surface of the substrate 15. Additionally, a bridge 17 is erected on the supports 18a and 18b so as to span the moving table 10 and the table 14 above it.

A guide 19 is mounted on the bridge 17. The scribe head 20 is guided by this guide 19 and is installed to move in the X-axis direction. The scribe head 20 is provided with a holder joint 21 at its lower end. A holder unit (30) in which a scribing wheel (40) is held in a holder (60) is mounted on the scribe head (20) via a holder joint (21).

When forming a scribe line on a substrate 15 using the scribing device 1, first, a holder 60 equipped with a scribing wheel 40 is mounted on the scribe head 20. Next, the scribe device 1 positions the substrate 15 using a pair of cameras 16. Then, the scribing device 1 moves the scribing head 20 to a predetermined position, applies a predetermined load to the scribing wheel 40, and brings it into contact with the substrate 15. After that, the scribe device 1 moves the scribe head 20 in the X-axis direction to form a predetermined scribe line on the surface of the substrate 15. Additionally, the scribe device 1 rotates the table 14 as needed or moves it in the Y-axis direction to form a scribe line in the same manner as in the above case.

In the above embodiment, a scribing device is shown in which the scribing head moves in the Anything you do is fine. For example, a scribing device may be used in which the scribing head is fixed and the table moves and rotates in the X-axis and Y-axis directions. Additionally, in this case, the camera 16 may be fixed to the scribe head 20.

Next, the configuration of the holder unit 30 will be described with reference to FIGS. 2(a) and 2(b). FIG. 2(a) is a front view of the holder unit 30 viewed from the X-axis positive side, and FIG. 2(b) is a side view of the holder unit 30 viewed from the Y-axis positive side. In addition, in Figures 2(a) and (b), the holder joint 21 on which the holder unit 30 is directly mounted is shown.

The holder unit 30 is one in which the scribing wheel 40, the pin shaft 50, and the holder 60 are integrated. The holder unit 30 is attached to the holder joint 21 with a mounting screw 31, as shown in FIG. 2(b). The holder joint 21 is composed of a mounting portion 22, a rotating shaft 23, and two bearings 24a and 24b. The mounting portion 22 has a cross-sectional shape of an inverted L shape. The mounting portion 22 consists of a wall 22a extending in the vertical direction and a wall 22b extending in the horizontal direction. The rotation axis 23 extends in the vertical direction from the upper surface side of the wall 22b of the mounting portion 22. A rotating shaft 23 is inserted into the bearings 24a and 24b.

When the holder unit 30 is mounted on the holder joint 21, the side surface of the holder unit 30 is in contact with the wall 22a of the mounting portion 22, and the upper surface of the holder unit 30 is in contact with the wall 22b. do. Additionally, as shown in Fig. 2(a), a threaded hole 25 into which the mounting screw 31 is inserted is formed in the wall 22a.

The holder joint 21 is fixed to the inside of the scribe head 20 so that the holder unit 30 mounted on the mounting portion 22 is exposed from the lower end of the scribe head 20. At this time, the holder unit 30 can freely rotate around the rotation axis 23 of the holder joint 21. In addition, the dashed line represents the axial center S of the rotation axis 23, and the broken line represents the surface H of the substrate 15. Surface H is parallel to the horizontal plane and perpendicular to the rotation axis 23.

When forming a scribe line on the surface H of the substrate 15 using the scribing device 1, the scribing wheel 40 is oriented in the direction of the arrow R shown in Fig. 2(b) (X axis direction) and rotates to proceed. In addition, the scribe device 1 may be configured so that the holder joint 21 is not used and the holder unit 30 itself is provided with a rotating shaft 23 and bearings 24a and 24b.

FIG. 3 is a longitudinal cross-sectional view of a portion of the holder 60 of FIG. 2. For convenience, illustration of a portion of the structure of the holder 60 is omitted in FIG. 3 . The scribing wheel 40 is a disc-shaped member made of, for example, sintered diamond or cemented carbide. A through hole 41 into which the pin shaft 50 is inserted is formed in the scribing wheel 40. The through hole 41 is formed to penetrate the centers of both sides of the scribing wheel 40. Details of the shape of the through hole 41 will be described later.

In addition, the scribing wheel 40 has a V-shaped blade tip 44 forming a ridge formed on the outer periphery. The scribing wheel 40 has a thickness of approximately 0.4 to 1.1 mm and an outer diameter of approximately 1.0 to 5.0 mm, for example. Additionally, the minimum inner diameter of the through hole 41 is, for example, about 0.4 to 1.5 mm, and the edge angle of the blade is about 90 to 150 degrees.

The pin shaft 50 is a cylindrical member made of, for example, sintered diamond or cemented carbide, and has one or both ends with pointed peaks 51 (see Fig. 2(a)). The diameter of the pin shaft 50 is slightly smaller than the minimum inner diameter of the through hole 41 of the scribing wheel 40. The diameter of the pin shaft 50 is, for example, about 0.77 mm when the minimum inner diameter of the through hole 41 is 0.82 mm. When the pin shaft 50 is inserted into the through hole 41, a gap (clearance) occurs between the pin shaft 50 and the through hole 41.

As shown in FIG. 3, the tip of the blade tip 44 and the minimum diameter portion 41 It is formed on the center of the scribing wheel 40. That is, in the thickness direction DT, the center position of the scribing wheel 40 in the thickness direction DT, the tip position of the blade tip 44, and the minimum diameter portion 41X of the through hole 41. The positions of are equal to each other.

The through hole 41 has a drum shape. In detail, the through hole 41 is formed in a curved shape with an inner diameter gradually decreasing from the first side 42a and the second side 42b toward the center of the main body 41 in the thickness direction DT. It is done. As shown in Fig. 3, in the cross section of the scribing wheel 40 cut in a plane perpendicular to the thickness direction DT, the inner peripheral surface 41C of the through hole 41 in the scribing wheel 40 includes a curved surface that forms the central portion of the through hole 41 at least in the thickness direction DT. This curved surface is formed so that the diameter of the central portion of the through hole 41 in the thickness direction DT is smaller than the diameter of the end portion of the through hole 41 in the thickness direction DT.

More specifically, the inner peripheral surface 41C of the through hole 41 is axially symmetrical about the central axis of the through hole 41. However, for the sake of explanation, the inner peripheral surface 41C on the upper side is shown in the cross section along the thickness direction DT. The upper inner circumferential surface is set as (41CU), and the lower inner circumferential surface is set as the lower inner circumferential surface (41CL). The upper inner peripheral surface 41CU extends curvedly toward the lower inner peripheral surface 41CL from the end on the first side 42a side in the thickness direction DT of the through hole 41 toward the center, and has a through hole ( It extends curvedly away from the lower inner peripheral surface 41CL from the center of the thickness direction DT of the through hole 41 toward the end of the second side 42b side in the thickness direction DT of the through hole 41. . A shape from the end to the center of the first side 42a in the thickness direction DT in the upper inner peripheral surface 41CU, and a thickness direction DT from the center of the thickness direction DT in the through hole 41. ) The shape up to the end of the second side 42b side is line symmetrical around the line segment CL. The lower inner peripheral surface 41CL extends curvedly toward the upper inner peripheral surface 41CU along the center from the end on the first side 42a side in the thickness direction DT of the through hole 41, and has a through hole ( It extends curvedly away from the upper inner peripheral surface 41CU from the center of the thickness direction DT of the through hole 41 toward the end of the second side 42b side in the thickness direction DT of the through hole 41. . A shape from the end to the center of the first side 42a side in the thickness direction DT in the lower inner peripheral surface 41CL, and a thickness direction DT from the center of the thickness direction DT in the through hole 41. ) The shape up to the end of the second side 42b side is line symmetrical around the line segment CL. All of the inner peripheral surfaces 41C, including the upper inner peripheral surface 41CU and the lower inner peripheral surface 41CL, of the through hole 41 of the present embodiment are each formed with a single or multiple curvature radii.

The radius of curvature of the inner peripheral surface 41C of the through hole 41 is preferably larger than the distance DX between the position of the minimum diameter portion 41X of the through hole 41 and the leading edge of the blade tip portion 44. Tapered portions 41a and 41b are formed at both ends of the through hole 41 in the thickness direction DT. The tapered portion 41a is enlarged toward the first side 42a, and the tapered portion 41b is enlarged toward the second side 42b. The minimum inner diameter (diameter of the minimum diameter portion 41X) on the inner peripheral surface 41C of the through hole 41 is larger than the outer diameter of the pin shaft 50.

The minimum inner diameter (diameter of the minimum diameter portion 41X) of the through hole 41 of this embodiment is ϕ0.82 mm. In the through hole 41, the length LH in the thickness direction DT of the drum-shaped portion located between the tapered portions 41a and 41b in the thickness direction DT is 0.44 mm or more and 0.6 mm or less. It is desirable to have a range. As the length LH becomes longer, the inclination of the scribing wheel 40 with respect to the pin axis 50 becomes smaller. The distance (DW) between both ends of the drum-shaped portion in the through hole 41 in the thickness direction (DT) and the tip edge of the blade tip 44, and the minimum diameter portion 41X of the through hole 41. The elevation difference (DY) (DY = DX - DW), which is the difference between the position of and the distance (DX) between the tip edge of the blade tip portion 44, is preferably 0.1 μm or more and 0.5 μm or less. As the elevation difference DY decreases, the inclination of the scribing wheel 40 with respect to the pin axis 50 decreases.

The holder 60 is made of stainless steel or carbon tool steel. As shown in Fig. 2(b), the holder 60 has a trapezoidal shape with its lower portion narrowing toward the bottom when viewed from the side. Additionally, holding portions 62a and 62b are formed in the trapezoidal portion of the holder 60, respectively, and a holding groove 63 is formed between the holding portions 62a and 62b. The opposing inner surfaces 65a and 65b of the holding groove 63 are perpendicular to the horizontal plane (XY plane).

In addition, in the configuration of FIGS. 2(a) and 2(b), the holder 60 is composed of one base material, for example, by fixing two base materials each having holding portions 62a and 62b, the holder ( 60) may be formed.

In the holding portions 62a and 62b, pin holes 64a and 64b into which the pin shaft 50 is inserted are formed so as to span the holding groove 63. The diameter of the pin holes 64a and 64b is slightly larger than the diameter of the pin shaft 50. The pin holes 64a, 64b are oriented at least in a direction parallel to the surface H of the substrate 15 with respect to the direction perpendicular to the inner surface 65a, 65b of the retaining groove 63 (direction parallel to the XY plane) It is formed to be inclined. The pin holes 64a, 64b are tilted in a direction perpendicular to the inner surface of the retaining groove 63 and in a direction perpendicular to the surface H of the substrate 15 (direction parallel to the YZ plane). It may be formed.

With the scribing wheel 40 inserted into the holding groove 63, the pin shaft 50 is inserted into the through hole 41 and the pin holes 64a and 64b of the scribing wheel 40. As described above, the pin holes (64a, 64b) are formed to be inclined with respect to the direction perpendicular to the inner surfaces (65a, 65b) of the retaining grooves (63), so the pin holes (64a, 64b) and through holes (41) The pin shaft 50 inserted in is oriented at least in a direction parallel to the surface H of the substrate 15 (direction parallel to the ) is inclined.

A threaded hole 66 into which the mounting screw 31 is inserted is formed in the upper part of the holder 60. Additionally, a pawl 67a is attached to the Y-axis positive side of the holding portion 62a with a screw 68a, and a pawl 67b is attached to the Y-axis negative side of the holding portion 62b with a screw ( 68b) is installed. The detents 67a and 67b are for blocking the pin holes 64a and 64b.

In the scribing device 1 having the above configuration, when the scribing wheel 40 is pressed against the surface H of the substrate 15 during the scribing line forming operation, both sides of the scribing wheel 40 These are pressed against the opposing inner surfaces 65a and 65b of the holding groove 63, respectively. For this reason, in the operation of forming the scribe line, movement of the scribing wheel 40 along the pin shaft 50 is suppressed, and thus the formation position of the scribe line can be stabilized.

Hereinafter, refer to FIGS. 4(a) to 4(d) for the operation in which both sides of the scribing wheel 40 are pressed against the opposing inner surfaces 65a and 65b of the retaining groove 63, respectively. This explains.

4(a) to 4(d) are cross-sectional views schematically showing the operation of the holder 60, respectively. 4(a) to 4(d) show the holder 60 shown in FIGS. 2(a) and 2(b), respectively, in a plane parallel to the XY plane at the central position of the pin axis 50 in the Z-axis direction. This is a cross-sectional view of the cut cross-section viewed from the positive side of the Z-axis. For convenience, illustration of a part of the structure of the holder 60 is omitted in FIGS. 4(a) to 4(d). The dashed and dotted line indicates the ridge of the blade of the scribing wheel 40.

FIG. 4(a) shows the state before the scribing wheel 40 is pressed against the surface H of the substrate 15. In this state, the scribing wheel 40 has a ridge line that is approximately parallel to the ) A gap (clearance) is generated between the inner surfaces 65a and 65b. The pin shaft 50 is inclined in a direction parallel to the XY plane with respect to the direction perpendicular to the inner surfaces 65a and 65b of the retaining groove 63.

From this state, when the scribing wheel 40 is pressed against the surface H of the substrate 15, the central axis of the through hole 41 of the scribing wheel 40 is parallel to the pin axis 50. So that torque is generated in the scribing wheel 40. As described above, since the diameter of the through hole 41 is larger than the diameter of the pin shaft 50, the scribing wheel 40 has a clearance between the through hole 41 and the pin shaft 50 in the allowable range. , it can rotate in a direction parallel to the XY plane. Therefore, when torque is generated in the scribing wheel 40 as described above, as shown in FIG. 4(b), the scribing wheel 40 rotates clockwise due to this torque, and scribing The side surfaces 42a and 42b of the wheel 40 are pressed against the inner surfaces 65a and 65b of the retaining groove 63, respectively.

Thereafter, with the movement of the scribing head 20, when the holder 60 is moved in the A torque parallel to the direction is generated. As shown in Fig. 2(a) and (b), the holder 60 can rotate around the rotation axis 23, and this torque causes the scribing wheel to rotate as shown in Fig. 4(c). The holder 60 rotates counterclockwise so that the ridge line of 40 is parallel to the scribing direction (direction of arrow R).

After that, as shown in Fig. 4(d), the scribing operation is performed with the holder 60 slightly rotated around the rotation axis 23 (see Figs. 2(a) and (b)). In this case as well, the scribing wheel 40 has the first and second side surfaces 42a and 42b aligned with the inner surface 65a of the retaining groove 63 due to the load on the surface H of the substrate 15. , 65b) is in a pressurized state. In this state, the scribing wheel 40 rotates around the pin shaft 50.

Here, the first and second side surfaces (42a, 42b) of the scribing wheel (40) are pressed against the inner surfaces (65a, 65b) of the retaining groove (63), and the scribing wheel (40) is pressed against the pin shaft (50). ) Even if it is inclined with respect to The moment at which the wheel (40) presses the retaining groove (63) becomes smaller. Therefore, even if the scribing wheel 40 rotates while the scribing wheel 40 is inclined and in contact with the inner surfaces (65a, 65b) of the retaining groove 63, the scribing wheel 40 and the retaining groove (63) The friction force is small.

In this way, in the present embodiment, in the operation of forming the scribe line, both sides of the scribing wheel 40 are pressed against the opposing inner surfaces 65a and 65b of the holding groove 63, respectively. , in the forming operation of the scribe line, the scribing wheel 40 is suppressed from moving along the pin axis 50. Additionally, the inner peripheral surface of the scribing wheel is formed in a curved shape in which the inner diameter gradually decreases from the side toward the center of the main body portion 41 in the thickness direction DT. For this reason, even if the scribing wheel 40 rotates while the scribing wheel 40 is inclined and in contact with the retaining groove 63, the inner peripheral surface 41C of the through hole 41 and the pin shaft 50 are not in contact. The position is near the center position of the scribing wheel 40 in the thickness direction DT, and the friction between the scribing wheel 40 and the retaining groove 63 can be reduced. As a result, the scribing wheel can be rotated smoothly and the formation position of the scribe line can be stabilized.

＜Modification example＞

Next, a modification of the above embodiment will be described. In this modification, in addition to changing the inclination angle of the horizontal pin axis 50 with respect to the direction perpendicular to the inner surface of the retaining groove 63, the vertical direction with respect to the direction perpendicular to the inner surface of the retaining groove 63 The inclination angle of the pin shaft 50 was changed.

When the pin shaft 50 is tilted in the vertical direction with respect to the direction perpendicular to the inner surface of the retaining groove 63, the through hole 41 of the scribing wheel 40 is moved by the pin shaft due to the load applied during the scribing operation. The scribing wheel 40 rotates in the vertical direction so as to follow (50). That is, when the scribing wheel 40 is pressed against the surface H of the substrate 15 by a load in the state of FIG. 5(a), the scribing wheel 40 as shown in FIG. 5(b) ) is inclined. By this inclination, the side surfaces 42a, 42b of the scribing wheel 40 are pressed against the inner surfaces 65a, 65b of the retaining groove 63, and the movement of the scribing wheel 40 is regulated.

When the pin shaft 50 is tilted not only in the horizontal direction but also in the vertical direction with respect to the direction perpendicular to the inner surface of the retaining groove 63, the movement of the scribing wheel 40 is achieved by tilting the pin shaft 50 in the horizontal direction. The effect of being regulated and the effect of regulating the movement of the scribing wheel 40 by tilting the pin shaft 50 in the vertical direction are combined. As a result, movement in the axial direction of the scribing wheel 40 during the scribing operation is significantly suppressed, and the formation accuracy of the scribe line can be further improved.

Here, when the pin shaft 50 is tilted in the vertical direction, the scribing wheel 40 is pressed in an inclined state with respect to the surface H of the substrate 15, as shown in FIG. 5(b). At this time, the inclination angle of the scribing wheel 40 with respect to the surface H is such that the inclination angle of the vertical direction of the pin shaft 50 with respect to the direction perpendicular to the inner surfaces 65a, 65b of the retaining groove 63 increases. It gets bigger. In this case, there is a risk that the rotational resistance of the scribing wheel during scribing may increase because the movement of the scribing wheel in the holder groove is suppressed. However, since the inner peripheral surface of the through hole 41 of the scribing wheel 40 is drum-shaped, the position where the lower inner peripheral surface 41CL and the pin shaft 50 contact is in the thickness direction (DT) of the scribing wheel 40. ) near the center position, and the moment at which the scribing wheel 40 presses the retaining groove 63 becomes small. Therefore, even if the scribing wheel 40 rotates while the scribing wheel 40 is inclined and in contact with the retaining groove 63, the friction between the scribing wheel 40 and the retaining groove 63 can be reduced. You can.

＜Effects of the embodiment＞

According to this embodiment, the following effects appear.

4(a) to 4(d), since the pin shaft 50 is inclined in the horizontal direction with respect to the direction perpendicular to the inner surfaces 65a and 65b of the retaining groove 63, the scribing wheel When (40) is pressed against the surface (H) of the substrate (15), the side surfaces (42a, 42b) of the scribing wheel (40) are placed on the opposing inner surfaces (65a, 65b) of the retaining groove (63), respectively. It is pressurized. For this reason, when forming a scribe line, the scribing wheel 40 is suppressed from moving in a direction parallel to the pin axis 50. Therefore, the formation position of the scribe line can be stabilized.

Additionally, the through hole 41 of the scribing wheel gradually decreases in inner diameter from the first side 42a and the second side 42b toward the center of the main body 41 in the thickness direction DT. Because it is formed in a curved shape, even if the scribing wheel 40 is inclined with respect to the pin shaft 50, the position where the inner peripheral surface 41C of the through hole 41 and the pin shaft 50 contact is the scribing wheel ( 40) is near the center position of the thickness direction (DT). As a result, the moment at which the scribing wheel 40 presses the retaining groove 63 is reduced, and the scribing wheel 40 rotates while the scribing wheel 40 is inclined and in contact with the retaining groove 63. Even so, the friction between the scribing wheel 40 and the retaining groove 63 can be reduced.

In addition, the pin axis 50 is inclined in a direction perpendicular to the surface H of the substrate 15 (vertical direction) with respect to the direction perpendicular to the inner surfaces 65a and 65b of the retaining groove 63. desirable. In this way, the formation position of the scribe line can be further stabilized.

Although the embodiment of the present invention has been described above, the present invention is not limited to the above embodiment at all, and various changes to the embodiment of the present invention are possible in addition to the above.

For example, in Embodiment 1 above, the scribing wheel 40 in which grooves are not formed on the ridge of the blade tip is used, but a scribing wheel in which grooves are formed on the ridge at regular intervals may be used.

Moreover, in the above-mentioned Embodiment 1, the pin axis is inclined by tilting the pin hole in the horizontal or vertical direction with respect to the direction perpendicular to the inner surface (65a, 65b) of the retaining groove (63). However, the pin shaft and the retaining groove are It just needs to be relatively inclined. Specifically, the pin holes 64a, 64b are oriented in a direction parallel to the surface H of the substrate 15 (direction parallel to the XY plane) and in a direction perpendicular to the scribing direction R (direction parallel to the YZ plane). is formed, and the inner surfaces 65a, 65b of the retaining grooves 63 are oriented at least in a direction (XY plane) parallel to the surface H of the substrate 15 with respect to the direction perpendicular to the pin holes 64a, 64b. It may be formed to be inclined in a direction parallel to . The inner surfaces 65a, 65b of the retaining grooves 63 are in a direction perpendicular to the pin holes 64a, 64b and further perpendicular to the surface H of the substrate 15 (direction parallel to the YZ plane). ) may also be formed to be inclined.

Additionally, the configuration of the scribe head 20 and the configuration of the scribing device 1 can also be changed as appropriate. Although FIG. 1 shows a scribing device that forms a scribe line on only one side of the substrate 15, the present invention is also applicable to a scribing device that forms scribe lines in parallel on both sides of the substrate 15.

The embodiments of the present invention can be modified in various ways as appropriate within the scope of the technical idea expressed in the claims.

1: Scribing device
15: substrate
20: scribe head
30: Holder unit
40: Scribing wheel
41: Through hole
42a, 42b: side
50: pin axis
60: Holder
63: Maintenance groove
64a, 64b: pin ball
65a, 65b: medial side
H: surface

Claims (4)

A scribing device that forms a scribe line on the surface of a substrate, comprising:
a holder unit holding the scribing wheel,
a scribe head that holds the holder unit rotatable about an axis perpendicular to the substrate surface;
The holder unit is,
a retaining groove into which the scribing wheel is inserted;
A pin hole formed to span the retaining groove,
Provided with a through hole of the scribing wheel inserted into the holding groove and a pin shaft inserted into the pin hole,
When the scribing wheel is pressed against the surface of the substrate, the clearance between the through hole and the pin shaft and the holding groove are so that both sides of the scribing wheel are pressed against the opposing inner surfaces of the holding groove. A clearance between the inner surface and the side surface of the scribing wheel and an inclination angle of the pin shaft with respect to the inner surface of the retaining groove are set,
The inner peripheral surface forming the through hole of the scribing wheel includes at least a curved surface forming a central portion of the through hole in the thickness direction of the scribing wheel,
The scribing device characterized in that the curved surface is formed so that the diameter of the central portion of the through hole in the thickness direction is smaller than the diameter of the end portion of the through hole in the thickness direction. According to claim 1,
The pin hole is formed to be inclined at least in a direction parallel to the surface of the substrate with respect to a direction perpendicular to the inner surface of the retaining groove,
A scribing device, wherein the pin axis inserted into the pin hole and the through hole is inclined at least in a direction parallel to the surface of the substrate with respect to a direction perpendicular to the inner surface of the retaining groove. The method of claim 1 or 2,
The pin hole is formed to be inclined in a direction perpendicular to the surface of the substrate with respect to a direction perpendicular to the inner surface of the retaining groove,
The scribe device is characterized in that the pin axis inserted into the pin hole and the through hole is inclined in a direction perpendicular to the surface of the substrate with respect to a direction perpendicular to the inner surface of the retaining groove. A holder unit holding a scribing wheel for forming a scribe line,
a retaining groove into which the scribing wheel is inserted;
A pin hole formed to span the retaining groove,
Provided with a through hole of the scribing wheel inserted into the holding groove and a pin shaft inserted into the pin hole,
When the scribing wheel is pressed against the surface of the substrate, the clearance between the through hole and the pin shaft and the inside of the holding groove are pressed so that both sides of the scribing wheel are pressed against the opposing inner surfaces of the holding groove. A clearance between the side surface and the side surface of the scribing wheel and an inclination angle of the pin shaft with respect to the inner surface of the retaining groove are set,
The inner peripheral surface forming the through hole of the scribing wheel includes at least a curved surface forming a central portion of the through hole in the thickness direction of the scribing wheel,
The holder unit characterized in that the curved surface is formed so that the diameter of the central portion of the through hole in the thickness direction is smaller than the diameter of the end portion of the through hole in the thickness direction.

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