JP2020037196A - Holder unit and pin - Google Patents

Abstract

To provide a holder unit that can stably maintain a posture of a scribing wheel and form a scribe line on a surface of a substrate, and a pin provided in the holder unit.SOLUTION: A holder unit 30, which holds a scribing wheel 40 for forming a scribe line on a surface H of a substrate 15, comprises: a holding groove 63 into which the scribing wheel 40 is inserted; pin holes 64a and 64b formed to stride across the holding groove 63; and supporting members 51 and 52 which are inserted into a through-hole 41 of the scribing wheel 40 inserted into the holding groove 63 and the pin holes 64a and 64b and support the scribing wheel 40 inserted into the holding groove 63 rotatably, where the supporting members 51 and 52 contact an inner peripheral surface 41a of the through-hole 41 at least in two places.SELECTED DRAWING: Figure 3

Description

  The present invention relates to a holder unit including a scribing wheel for forming a scribe line on a surface of a substrate, and a pin provided in such a holder unit.

  Conventionally, cutting of a brittle material substrate such as a glass substrate is performed by a scribing step of forming a scribe line on the surface of the substrate and a breaking step of applying a predetermined force to the surface of the substrate along the formed scribe line. . In the scribing step, the cutting edge of the scribing wheel is moved along a predetermined line while being pressed against the surface of the substrate.

  Patent Document 1 below discloses a holder configured to perform a scribe operation in a stable posture in order to form a desired scribe line. In Patent Literature 1, a holder for holding a scribing wheel is inserted through an opening provided in a lower portion of a holder joint. Inside the opening hole, a V-shaped flat surface in a plan view is formed along the direction perpendicular to the substrate. A pin of a positioning member is provided above the opening hole, and a magnet is provided above the pin.

  The pin inserted into the holder joint is positioned by the pin being in contact with the inclined surface formed on the upper part of the holder, and the upper end of the holder is attracted and held by the magnet. At this time, the holder is pulled up by the magnet, and the inclined surface is pressed against the pin. Further, since the rear side of the inclined surface is pressed against the V-shaped flat surface, the holder is attached to the holder joint with the orientation of the holder automatically oriented in a certain direction. Therefore, a scribe line can be formed stably.

JP 2017-119348 A

  Patent Document 1 discloses a configuration for stably maintaining the posture of a holder. However, since the scribing wheel is in contact with the substrate, even if the posture of the holder is kept stable, if the posture of the scribing wheel is not in a stable state, the scribing wheel fluctuates and a meandering scribe line is formed. You.

  In view of such a problem, an object of the present invention is to provide a holder unit capable of forming a scribe line on the surface of a substrate while maintaining the posture of a scribing wheel stably, and a pin provided in such a holder unit. And

  The main aspect of the present invention relates to a holder unit that holds a scribing wheel for forming a scribe line on a surface of a substrate. The holder unit according to this aspect has a holding groove into which a scribing wheel is inserted, a pin hole formed to straddle the holding groove, a through hole of the scribing wheel inserted into the holding groove, and the pin hole. And a support member rotatably supporting the scribing wheel inserted into the holding groove. The support member is configured to contact the inner peripheral surface of the through hole at at least two places.

  According to the holder unit according to this aspect, the support member contacts the inner peripheral surface of the through hole at at least two places. For this reason, the scribing wheel becomes difficult to move with respect to the pin, and the scribing wheel is easily maintained in a posture parallel to the scribe direction. Therefore, the scribing wheel can perform the scribe operation in a stable posture without meandering. As a result, the quality of the scribe line can be improved.

  In the holder unit according to this aspect, the support member includes at least two pins, and the pins are arranged in parallel with each other, and are installed so as to be in contact with the inner peripheral surface of the through hole. Can be done.

  According to this configuration, at least two pins are in contact with the inner peripheral surface of the through hole in a state of being arranged in parallel with each other. Thereby, the scribing wheel can be maintained in a posture parallel to the scribe direction. Therefore, the scribing wheel can perform the scribe operation more stably.

  In the holder unit according to this aspect, the support member includes two pins, and among the pins, a pin installed on the front side in a scribe direction has a height position in a direction perpendicular to the substrate. It can be configured to be installed higher than the other pin.

  According to this configuration, one of the two pins is positioned on the front side in the scribe direction, and the other is positioned on the rear side in the scribe direction. As a result, the line connecting the contact point between the through hole of the scribing wheel and the pin approaches perpendicularly to the force received by the scribing wheel during scribing. Actions can be taken.

  In this case, the two pins may be arranged such that the angle formed by each line segment connecting the contact point between each pin and the through hole is 5 to 30 degrees.

  With this configuration, the line connecting the contact point between the through-hole of the scribing wheel and the pin approaches perpendicularly to the force received by the scribing wheel during scribing. Therefore, the posture of the scribing wheel is easily stabilized, and the scribing wheel can perform the scribe operation in a stable state.

  In the holder unit according to the present aspect, the pin holes may be provided in a number equal to the number of the pins such that the pins are held in a state of being separated from each other.

  With this configuration, the pins can be securely held parallel to and separated from each other. Therefore, the pins are prevented from contacting each other or being twisted during scribing, and the stability of the scribing wheel can be maintained.

  In the holder unit according to this aspect, both ends of the pins may be fitted, and a pin holder may be provided to hold the pins in a state where they are separated from each other. With this configuration, the pins can be easily installed in the through holes in a state where they are parallel to each other.

In the holder unit according to this aspect, the support member is formed of one pin, and a shape of a cross section orthogonal to the longitudinal direction of the pin is a shape in which two circles are overlapped so that their center positions are shifted from each other. If the cross section of the pin can be configured as described above, the pin can contact the inner peripheral surface of the through hole at at least two places on the outer peripheral surface of the pin. Therefore, the scribing wheel can be easily maintained in a posture parallel to the scribe direction, and can perform the scribe operation more stably. In addition, since there is only one pin, it is easy to perform positioning in the through hole.

  A second aspect of the present invention is a pin that is inserted into a through hole of a scribing wheel to rotatably support the scribing wheel, wherein a shape of a cross section orthogonal to a longitudinal direction of the pin is two circles. Are superimposed so that their center positions are shifted from each other.

  When the pin having such a configuration is inserted into the through-hole and the scribing wheel is supported, the scribing wheel is easily maintained in a posture parallel to the scribe direction. Thereby, the scribe operation can be performed more stably, and the quality of the scribe line can be improved.

  As described above, according to the present invention, it is possible to provide a holder unit capable of forming a scribe line on the surface of a substrate while stably maintaining a posture of a scribing wheel, and a pin provided in such a holder unit. it can.

  The effects and significance of the present invention will become more apparent from the following description of the embodiments. However, the embodiment described below is merely an example when embodying the present invention, and the present invention is not limited to those described in the following embodiment.

FIG. 1 is a diagram schematically illustrating a configuration of a scribe device including the holder unit according to the first embodiment. FIG. 2A is a view of the holder unit according to the first embodiment as viewed from the X axis positive side. FIG. 2B is a view of the holder unit viewed from the Y axis positive side. FIGS. 3A and 3B are diagrams for explaining that the posture of the scribing wheel is stably maintained by the support member. FIGS. 4A and 4B are views of the support member arranged in the through hole of the scribing wheel according to the first embodiment as viewed from the Y axis positive side. FIGS. 5A and 5B are views of the support member arranged in the through hole of the scribing wheel according to the first embodiment as viewed from the Y axis positive side. FIGS. 6A and 6B are diagrams illustrating the configuration of the pin holes of the holder unit according to the first embodiment. FIGS. 7A to 7D are views of the support member arranged in the through hole of the scribing wheel according to the second embodiment as viewed from the Y axis positive side. FIGS. 8A and 8B are diagrams illustrating a configuration of a pin holding unit according to a second modification. FIGS. 9A to 9C are diagrams illustrating a cross-sectional shape of a support member according to a third modification. FIG. 9 is a diagram for explaining the configuration of the pin holding unit according to the fourth modification.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings. In each drawing, an X axis, a Y axis, and a Z axis, which are orthogonal to each other, are added for convenience. The Z axis is perpendicular to the center axis of the scribing wheel, and indicates upward and downward in the vertical direction. Hereinafter, the terms “upper” and “lower” mean the positive side of the Z axis and the negative side of the Z axis, respectively.

<First embodiment>
FIG. 1 is a diagram schematically illustrating a configuration of a scribe device 1 according to the first embodiment. The scribe device 1 includes a moving table 10. The moving table 10 is screwed with a ball screw 11. The movable table 10 is supported by a pair of guide rails 12 so as to be movable in the Y-axis direction. The rotation of the ball screw 11 by the driving of the motor causes the moving table 10 to move in the Y-axis direction along the pair of guide rails 12.

  On the upper surface of the moving base 10, a motor 13 is installed. The motor 13 rotates the table 14 located on the upper side in the XY plane to position the table 14 at a predetermined angle. The table 14 that can be rotated horizontally by the motor 13 has a vacuum suction unit (not shown). The substrate 15 placed on the table 14 is held on the table 14 by the vacuum suction means.

  The substrate 15 is a glass substrate, a ceramic substrate made of low-temperature fired ceramics or high-temperature fired ceramics, a silicon substrate, a compound semiconductor substrate, a sapphire substrate, a quartz substrate, or the like. In addition, the substrate 15 may have a thin film or a semiconductor material that does not correspond to a brittle material attached or included on the surface or inside of the substrate.

  The scribe device 1 is provided with two cameras 16 above the substrate 15 placed on the table 14 for imaging the alignment marks formed on the substrate 15. Further, a bridge 17 is provided on the columns 18a and 18b so as to straddle the movable table 10 and the table 14 above the movable table 10.

  A guide 19 is attached to the bridge 17. The scribe head 20 is installed so as to be guided by the guide 19 and move in the X-axis direction. The scribe head 20 has a holder joint 21 at the lower end. The holder unit 30 in which the scribing wheel 40 is held by the holder 60 is attached to the scribe head 20 via a holder joint 21.

  When forming a scribe line on the surface H of the substrate 15 using the scribe device 1, first, the holder unit 30 to which the scribing wheel 40 is attached is attached to the scribe head 20. Next, the scribe device 1 positions the substrate 15 with the pair of cameras 16. Then, the scribe device 1 moves the scribe head 20 to a predetermined position, applies a predetermined load to the scribing wheel 40, and brings the scribing wheel 40 into contact with the substrate 15. Thereafter, the scribe device 1 forms a predetermined scribe line on the surface of the substrate 15 by moving the scribe head 20 in the X-axis direction. The scribe device 1 rotates the table 14 or moves in the Y-axis direction as necessary, and forms a scribe line in the same manner as in the above case.

  As described above, in this embodiment, the scribe head 20 moves in the X-axis direction, and the table 14 moves in the Y-axis direction, and the scribe device that rotates is described. What is necessary is just that the 20 and the table 14 move relatively. For example, the scribe device 1 may be a scribe device 1 in which the scribe head 20 is fixed, the table 14 moves in the X-axis and Y-axis directions, and rotates. In this case, the camera 16 may be fixed to the scribe head 20.

  FIG. 2A is a front view of the holder unit 30 as viewed from the X-axis positive side, and FIG. 2B is a side view of the holder unit 30 as viewed from the Y-axis positive side. 2A and 2B also show a holder joint 21 to which the holder unit 30 is directly attached.

  The holder unit 30 includes a scribing wheel 40, a support member 50, and a holder 60. The holder unit 30 is attached to the holder joint 21 by an attachment screw 31 as shown in FIG. The holder joint 21 includes a mounting part 22, a rotating shaft 23, and two bearings 24a and 24b. The mounting portion 22 has an inverted L-shaped cross section. The mounting portion 22 includes a wall 22a extending in a vertical direction and a wall 22b extending in a horizontal direction. The rotation shaft 23 extends vertically from the top surface side of the wall 22 b of the mounting portion 22. The rotating shaft 23 is inserted through the bearings 24a and 24b.

  When the holder unit 30 is mounted on the holder joint 21, the side surface of the holder unit 30 comes into contact with the wall 22a of the mounting portion 22, and the upper surface of the holder unit 30 comes into contact with the wall 22b. Further, a screw hole 25 into which the mounting screw 31 is inserted is formed in the wall 22a as shown in FIG.

  The holder joint 21 is fixed inside the scribe head 20 so that the holder unit 30 attached to the attachment portion 22 is exposed from the lower end of the scribe head 20. At this time, the holder unit 30 is rotatable about the rotation shaft 23 of the holder joint 21. Note that the two-dot chain line indicates the axis center F of the rotation shaft 23, and the broken line indicates the surface H of the substrate 15. The surface H is parallel to the horizontal plane and perpendicular to the rotation axis 23.

  When a scribe line is formed on the surface H of the substrate 15 using the scribe device 1, the scribing wheel 40 rotates so as to advance in the direction of the arrow R (X-axis positive direction) shown in FIG. 2B. Note that the scribe device 1 may have a configuration in which the holder unit 30 itself includes the rotating shaft 23 and the bearings 24a and 24b without using the holder joint 21.

  The scribing wheel 40 is a disk-shaped member made of, for example, sintered diamond or cemented carbide. A through hole 41 is formed in the thickness direction of the scribing wheel 40. A support member 50 for stably maintaining the posture of the scribing wheel is inserted into the through hole 41. In the first embodiment, the support member 50 includes two columnar pins 51 and 52.

  In the scribing wheel 40, a V-shaped blade forming a ridge is formed on an outer peripheral portion. The scribing wheel 40 has, for example, a thickness of about 0.4 to 1.1 mm and an outer diameter of about 1.0 to 5.0 mm. The diameter of the through hole 41 is, for example, about 0.6 to 1.0 mm, and the included angle of the blade is about 90 to 150 °.

  The pins 51 and 52 are columnar members made of, for example, sintered diamond or cemented carbide. The diameter of the pins 51 and 52 is designed to be smaller than the diameter of the through hole 41 of the scribing wheel 40. The diameter of the pins 51 and 52 is, for example, about 0.3 to 0.4 mm when the diameter of the through hole 41 is 0.8 mm, and the interval (distance between centers) of the pins 51 and 52 is 0.5 mm or less. You. The outer diameter of the pin and the interval between the pins are set such that a gap (clearance) required for rotation is generated between the pins 51 and 52 and the through hole 41 when the pins 51 and 52 are inserted into the through hole 41. Is set. Further, in FIG. 2A, both ends of the pins 51 and 52 are flat surfaces, but for example, the positive or negative end of the Y axis may have a pointed shape. The pins 51 and 52 that are the support members 50 will be described later in detail.

The holder 60 is made of stainless steel or carbon tool steel. As shown in FIG. 2B, the holder 60 has a trapezoidal shape in which the lower portion becomes narrower toward the lower end in a side view. Further, holding portions 62a and 62b are formed in the trapezoidal portion of the holder 60, and a holding groove 63 is formed between the holding portions 62a and 62b. The inner surfaces of the holding grooves 63 facing each other are perpendicular to a horizontal plane (XY plane). Also,
In the configuration of FIGS. 2A and 2B, the holder 60 is formed of a single base material. For example, the holder 60 is fixed by fixing two base materials having the holding portions 62a and 62b, respectively. 60 may be formed.

  In the holding portions 62a and 62b, pin holes 64a and 64b into which the pin 51 is inserted and pin holes 64c and 64d into which the pin 52 is inserted are formed so as to straddle the holding groove 63. The diameter of the pin holes 64a and 64b is approximately the same as the diameter of the pin 51, and the diameter of the pin holes 64c and 64d is approximately the same as the diameter of the pin 52. With the scribing wheel 40 inserted into the holding groove 63, the pin 51 is inserted into the through hole 41 and the pin holes 64a, 64b of the scribing wheel 40, and the pin 52 is inserted into the through hole 41 and the pin holes 64c, 64d. . The pin 52 and the pin holes 64c and 64d are not shown in FIG. 2A, but are shown in FIG. A screw hole 65 into which the mounting screw 31 is inserted is formed in an upper portion of the holder 60.

  Next, an operation of stabilizing the posture of the scribing wheel 40 by the pins 51 and 52 that are the support members 50 will be described with reference to FIGS.

  FIG. 3A is a schematic diagram when the support member 50 according to the present embodiment is inserted into the through hole 41 of the scribing wheel 40. FIG. 3B is a schematic diagram when the support member 100 according to the comparative example is inserted into the through hole 41 of the scribing wheel 40. 3A and 3B are cross-sectional views of the scribing wheel 40 when the scribing wheel 40 is cut at a predetermined diameter position.

  As shown in FIG. 3B, when the support member 100 is inserted into the through hole 41 and the scribing wheel 40 starts scribing operation, the support member 100 comes into line contact with the inner peripheral surface 41 a of the through hole 41. At this time, since there is a clearance between the through hole 41 and the support member 100, the scribing wheel 40 is easily moved in a direction parallel to the scribe direction, and the posture is unstable. As described above, when the inner peripheral surface 41a of the through hole 41 and one support member 100 are in line contact with each other at only one position, the posture of the scribing wheel 40 is difficult to be stably maintained.

  On the other hand, as shown in FIG. 3A, when the two pins 51 and 52 are inserted into the through hole 41 of the scribing wheel 40 as the support member 50 and the scribing operation is started, the pins 51 and 52 respectively become Are in line contact with the inner peripheral surface 41a of the through hole 41 at the tangent lines 51a and 52a. 3A, unlike the case of FIG. 3B, the inner peripheral surface 41a of the through hole 41 and the support member 50 are in line contact at two places. Therefore, even if there is a clearance between the through hole 41 and the support member 50, the scribing wheel 40 is less likely to move in a direction parallel to the scribe direction. Thereby, the fluctuation of the scribing wheel 40 is suppressed, and the posture of the scribing wheel 40 can be stably maintained. Therefore, the quality of the scribe lines formed on the substrate 15 is improved.

  As described above, when the inner peripheral surface 41a of the through hole 41 is supported by the support member 50 at at least two places, the posture of the scribing wheel 40 is stably maintained.

  Next, a method of arranging the pins 51 and 52 with respect to the through hole 41 will be described.

  FIGS. 4A to 5B are views of the pins 51 and 52 in the through hole 41 as viewed from the Y axis positive side. 4A to 5B, the scribe direction is a direction from the X axis negative side to the positive side. 4 (a) to 5 (b) show a state during the non-scribe operation, that is, a state where the scribing wheel 40 is not in contact with the substrate 15. FIG. The lower part of FIGS. 4A to 5B shows a state during the scribing operation, that is, a state in which the scribing wheel 40 is pressed against the substrate 15.

  4A to 5B, a point P on the pin 51 indicates that the pin 51 comes into contact with the through hole 41, and the point P of the pin 51 corresponds to the point P in FIG. This corresponds to the tangent 51a. Similarly, a point Q on the pin 52 indicates that the pin 52 contacts the through hole 41, and the point Q on the pin 52 corresponds to a tangent line 52a in FIG. 4A to 5B, the line segment L1 is a line segment parallel to the substrate 15. The line segment L3 is a line segment connecting the point P and the point Q described above. Further, D1 is a distance between the point P and the point Q.

  FIG. 4A shows a case where the height of the pin 52 arranged on the X axis positive side is higher in the direction perpendicular to the substrate 15 than the pin 51 arranged on the X axis negative side. Is shown.

  As shown in the upper part of FIG. 4A, the pins 51 and 52 both contact the inner peripheral surface 41 a of the through hole 41 due to the weight of the scribing wheel 40 during the non-scribe operation. Therefore, as described with reference to FIG. 3A, during the non-scribe operation, the scribing wheel 40 can maintain a stable posture parallel to the scribe direction.

  On the other hand, during the scribe operation, the scribing wheel 40 is rolled on the substrate 15 at a predetermined scribe load and speed. At this time, as shown in the lower part of FIG. 4A, the scribing wheel 40 is located above the pins 51 and 52 by the reaction force of the substrate 15 and is located rearward in the scribe direction. Therefore, the position of the inner peripheral surface 41a of the through-hole 41 that comes into contact with the pins 51 and 52 is located entirely lower than in the non-scribe operation.

  Even during the scribe operation, the pins 51 and 52 both come into contact with the inner peripheral surface 41a of the through hole 41 due to the load. Therefore, as described with reference to FIG. 3A, even during the scribe operation, the scribing wheel 40 can maintain a stable posture parallel to the scribe direction.

  Further, the pins 52 arranged on the positive side of the X axis are arranged higher in height in the direction perpendicular to the substrate 15 than the pins 51 arranged on the negative side of the X axis. In operation, the direction of the line segment L2 connecting the point P and the point Q and the direction of the force applied to the scribing wheel at the time of scribing become closer to vertical. Therefore, the effect of suppressing the movement of the scribing wheel 40 during scribing is enhanced.

  FIG. 4B shows a case where the height of the pin 52 arranged on the positive side of the X axis is lower in the direction perpendicular to the substrate 15 than the pin 51 arranged on the negative side of the X axis. Is shown.

  As shown in the upper part of FIG. 4B, the pins 51 and 52 both contact the inner peripheral surface 41 a of the through hole 41 due to the weight of the scribing wheel 40 during the non-scribe operation. Therefore, as described with reference to FIG. 3A, the scribing wheel 40 maintains a stable posture during the non-scribe operation.

  As shown in the lower part of FIG. 4B, at the time of the scribe operation, the scribing wheel 40 is located above the pins 51 and 52 and at the rear in the scribe direction for the same reason as the lower part of FIG. Will be located.

  Even during the scribe operation, the pins 51 and 52 both come into contact with the inner peripheral surface 41a of the through hole 41 due to the load. Therefore, as described with reference to FIG. 3A, even during the scribe operation, the scribing wheel 40 can maintain a stable posture parallel to the scribe direction.

  However, during the scribe operation, the angle between the line segment L2 and the direction of the force applied to the scribing wheel during the scribe operation becomes smaller than in the case of FIG. For this reason, the effect of suppressing the movement of the scribing wheel 40 during scribing is reduced as compared with FIG.

  Therefore, in order to more stably support the scribing wheel 40, it can be said that the arrangement of the pins 51 and 52 in FIG. 4A is more preferable.

  FIG. 5A shows a case where the pins 51 and 52 are arranged by reducing the distance D1 between the point P and the point Q as compared with FIG. 4A.

  As shown in the upper part of FIG. 5A, during the non-scribe operation, the pins 51 and 52 both come into contact with the inner peripheral surface 41 a of the through hole 41 due to the weight of the scribing wheel 40. Therefore, as described with reference to FIG. 3A, the scribing wheel 40 maintains a stable posture during the non-scribe operation.

  As shown in the lower part of FIG. 5A, during the scribe operation, the scribing wheel 40 is located above and behind the scribe direction for the same reason as in FIG. 4A.

  Also in the case of FIG. 5A, the pins 51 and 52 both contact the inner peripheral surface 41 a of the through hole 41 during the scribe operation. Therefore, scribing wheel 40 is maintained in a stable posture.

  In the case of FIG. 5B, the portion of the through hole 41 where the pins 51 and 52 are in contact is located on the substrate 15 side with respect to the point O, and the distance of D1 is smaller than that in FIG. Become. Therefore, the effect of suppressing the movement of the scribing wheel 40 during scribing is small, and the support state of the scribing wheel 40 tends to be slightly unstable. Therefore, in order to more stably support the scribing wheel 40, as shown in FIG. 4A, the distance D1 between the point P and the point Q, that is, the pins 51 and 52 and the through holes 41 contact each other. It can be said that it is more preferable to arrange so that the distance between the portions to be formed is large.

  FIG. 5B shows a case where the pins 51 and 52 have the same height position in the through hole 41 in the direction perpendicular to the substrate 15.

  As shown in the upper part of FIG. 5B, during the non-scribe operation, the pins 51 and 52 both contact the inner peripheral surface 41 a of the through hole 41 due to the weight of the scribing wheel 40. Therefore, as described with reference to FIG. 3A, the scribing wheel 40 maintains a stable posture during the non-scribe operation.

  As shown in the lower part of FIG. 5B, at the time of the scribe operation, the scribing wheel 40 moves upward for the same reason as in the lower part of FIG. 4A.

  Also in the case of FIG. 5B, during the scribe operation, the pins 51 and 52 both contact the inner peripheral surface 41a of the through hole 41, so that the scribing wheel 40 is maintained in a stable posture. In the case of FIG. 5B, even if the scribe direction is reversed, the angle between the line segment L2 and the direction of the force applied to the scribing wheel during the scribe does not change. Therefore, in the case of FIG. 5B, even when the scribe direction changes, the effect of suppressing the movement of the scribing wheel 40 does not change, and the scribing wheel 40 can be maintained in a stable posture.

  4A to 5B, the arrangement of the pins 51 and 52 in the through hole 41 for stably supporting the scribing wheel 40 is different from each other in the height position in the direction perpendicular to the substrate 15. This is considered to be the case where the pin with the higher height position is located in front of the scribe direction.

  In this case, it is preferable that the angle α1 between the line segment L1 parallel to the substrate 15 and the line segment L2 is set to 5 to 30 degrees. Thereby, the angle between the line segment L2 and the direction of the force applied to the scribing wheel 40 during the scribe operation becomes nearly vertical, and the scribing wheel 40 can be more stably supported.

<Effect of Embodiment 1>
As shown in FIG. 3A, when the pins 51 and 52 are in line contact with the inner peripheral surface 41a of the through hole 41 at two places, the scribing wheel 40 can be stably maintained during the scribe operation.

  As shown in FIGS. 4A to 5B, a parallel line segment L1 of the substrate H, a point P which is a contact point between the pin 51 and the through hole 41, and a contact point between the pin 52 and the through hole 41 are shown. It is preferable that the angle α1 between the line segment L2 connecting the point Q and the line segment L2 is 5 to 30 degrees, and the distance D1 between the point P and the point Q be located as far as possible.

  FIG. 6 is a diagram for explaining the holding of the pins 51 and 52 according to the first embodiment, and is a diagram viewed from the negative side of the Z axis. In FIG. 6, the arrangement of the pins 51 and 52 shown in FIG.

  As shown in FIG. 6, with the scribing wheel 40 inserted into the holding groove 63, the pin 51 is inserted into the through hole 41 and the pin holes 64a, 64b of the scribing wheel 40, and the through hole 41 and the pin holes 64c, 64d. The pin 52 is inserted into the.

  After inserting the pins 51 and 52 into the pin holes 64a and 64b, the pin holes 64 and 64b are closed with lids 70a and 70b, respectively. Similarly, the pin holes 64c and 64d are closed by the lids 70c and 70d. This prevents the pins 51 and 52 from falling out of the pin holes 64 and 64b and the pin holes 64c and 64d and the through hole 41.

<Embodiment 2>
In the first embodiment, the support members 50 that support the scribing wheel 40 are the pins 51 and 52. On the other hand, in the holder unit 30 according to the second embodiment, the support member 50 is configured by one pin 53 having a feature in a cross section orthogonal to the longitudinal direction.

  FIGS. 7A to 7D are views of the pins 53 installed in the through holes 41 during the scribe operation, as viewed from the Y axis positive side. 7A to 7D, the scribe direction is a direction from the X axis negative side to the positive side.

  As shown in FIG. 7A, the shape of a cross section orthogonal to the longitudinal direction of the pin 53 (hereinafter simply referred to as “cross-sectional shape”) is two circles 53a and 53b having the same diameter. Are overlapped so as to deviate from each other, that is, a so-called daruma shape. Because of such a shape, the support member 50 has only one pin. However, as described with reference to FIGS. 3A and 3B in the first embodiment, the through hole is formed at the two tangents of the pin 53. 41 contacts the inner peripheral surface 41a. Therefore, the pin 53 can maintain the scribing wheel 40 in a stable posture parallel to the scribe direction.

  Therefore, in the second embodiment, the arrangement of the pins 53 in the through hole 41 can be determined as the arrangement of the circles 53a and 53b in the through hole 41. 7A to 7D, a point M on the circle 53a indicates that the pin 53 comes into contact with the through hole 41, and the point M of the pin 53 corresponds to the tangent line 51a in FIG. Is equivalent to Similarly, a point N in the circle 53b indicates that the pin 53 contacts the through hole 41, and the point N of the pin 53 corresponds to the tangent line 52a in FIG. 7A to 7D, a line segment L1 is a line segment parallel to the substrate 15. The line segment L3 is a line segment connecting the point M and the point N described above. Further, D2 is a distance between the point M and the point N.

  FIG. 7A shows that the height of the circle 53b located on the positive side of the X-axis of the pins 53 in the direction perpendicular to the substrate 15 during the scribe operation is greater than that of the circle 53a located on the negative side of the X-axis. Indicates a case where is high.

  FIG. 7A corresponds to FIG. 4A of the first embodiment. In FIG. 7A, as in the state at the time of the non-scribe operation in FIG. 4A, the pin 53 is provided at two places (point M and point M) on the inner peripheral surface 41a of the through hole 41 by the weight of the scribing wheel 40. N). Therefore, as described with reference to FIG. 3A, during the non-scribe operation, the scribing wheel 40 can maintain a stable posture parallel to the scribe direction.

  As shown in FIG. 7A, at the time of the scribe operation, the scribing wheel 40 is pressed against the substrate 15 and moves upward by the reaction force of the substrate 15. Further, a force is applied to the scribing wheel 40 in a direction opposite to the scribe direction, and the scribing wheel 40 also moves backward in the scribe direction. Therefore, the position of the inner peripheral surface 41a of the through hole 41 that contacts the pin 53 moves downward as a whole as compared with the non-scribe operation.

  Also during the scribe operation, both the pins 53 come into contact with the inner peripheral surface 41 a of the through hole 41 due to the load. Therefore, as described with reference to FIG. 3A, even during the scribe operation, the scribing wheel 40 can maintain a stable posture parallel to the scribe direction.

  During the scribing operation, a downward force and a force in the scribe direction are applied to the through hole 41 of the scribing wheel 40 from the pin 53, and the through hole 41 is pressed obliquely rearward and upward in the scribe direction. At this time, the direction of the line segment L3 and the direction of the force applied to the scribing wheel during the scribe operation become closer to the vertical. Therefore, the effect of suppressing the movement of the scribing wheel 40 during the scribe operation is enhanced.

  FIG. 7B shows that, during the scribe operation, of the pins 53, the circle 53b located on the positive side of the X axis is more perpendicular to the substrate 15 than the circle 53a located on the negative side of the X axis. The case where the height position is low is shown.

  FIG. 7B corresponds to FIG. 4B of the first embodiment. In FIG. 7B, as in the state at the time of the non-scribe operation in FIG. 4B, the pin 53 has two points (point M and point M) on the inner peripheral surface 41a of the through hole 41 due to the weight of the scribing wheel 40. N) Make contact. Therefore, as described with reference to FIG. 3A, during the non-scribe operation, the scribing wheel 40 can maintain a stable posture parallel to the scribe direction.

  As shown in FIG. 7B, at the time of the scribe operation, the scribing wheel 40 is pressed against the substrate 15 and moves upward by the reaction force of the substrate 15. Therefore, the position of the inner peripheral surface 41a of the through hole 41 that contacts the pin 53 moves downward as a whole as compared with the non-scribe operation.

  Also during the scribe operation, both the pins 53 come into contact with the inner peripheral surface 41 a of the through hole 41 due to the load. Therefore, as described with reference to FIG. 3A, even during the scribe operation, the scribing wheel 40 can maintain a stable posture parallel to the scribe direction.

  However, during the scribe operation, the angle between the line segment L3 and the direction of the force applied to the scribing wheel during the scribe becomes smaller. For this reason, the effect of suppressing the movement of the scribing wheel 40 during scribing is reduced as compared with FIG.

  For this reason, in order to more stably support the scribing wheel 40, it can be said that the arrangement of the pins 53 in FIG. 7A is more preferable.

  FIG. 7C shows a case where the pins 53 are arranged in the through holes 41 so as to shorten the distance D2 as compared with FIG. 7A. FIG. 7C corresponds to FIG. 5A of the first embodiment. 7C, the pin 53 comes into contact with the inner peripheral surface 41a of the through hole 41 at two places due to the weight of the scribing wheel 40, as in the non-scribe operation state of FIG. 5A. Therefore, as described with reference to FIG. 3A, during the non-scribe operation, the scribing wheel 40 can maintain a stable posture parallel to the scribe direction.

  As shown in FIG. 7C, at the time of the scribe operation, the scribing wheel 40 is pressed against the substrate 15 and moves upward by the reaction force of the substrate 15. Therefore, the position of the inner peripheral surface 41a of the through hole 41 that contacts the pin 53 moves downward as a whole as compared with the non-scribe operation.

  Even during the scribe operation, the two tangent lines 53c and 53d of the pin 53 both contact the inner peripheral surface 41a of the through hole 41 due to the load. Therefore, as described with reference to FIG. 3A, even during the scribe operation, the scribing wheel 40 can maintain a stable posture parallel to the scribe direction.

  In the case of FIG. 7C, the points M and N, which are the places where the pins 53 are in contact with the through holes 41, are located on the substrate 15 side with respect to the point O, and the distance D2 is the distance D2 in FIG. It is smaller than a). Therefore, the effect of suppressing the movement of the scribing wheel 40 during the scribe operation is small, and the support state of the scribing wheel 40 tends to be slightly unstable. For this reason, in order to more stably support the scribing wheel 40, it can be said that it is more preferable to arrange the pin 53 and the through-hole 41 so that the tangential distance is increased as shown in FIG. .

  FIG. 7D shows a case where the pins 53 are arranged in the through holes 41 such that the heights of the circles 53 a and 53 b in the direction perpendicular to the substrate 15 are the same in the through holes 41. FIG. 7D corresponds to FIG. 5B of the first embodiment.

  In FIG. 7D, as in the state at the time of the non-scribe operation in FIG. 5B, the pin 53 is provided at two places (point M and point M) on the inner peripheral surface 41a of the through hole 41 by the weight of the scribing wheel 40. N). Therefore, as described with reference to FIG. 3A, during the non-scribe operation, the scribing wheel 40 can maintain a stable posture parallel to the scribe direction.

  As shown in FIG. 7D, at the time of the scribe operation, the scribing wheel 40 is pressed against the substrate 15 and moves upward by the reaction force of the substrate 15. Therefore, the position of the inner peripheral surface 41a of the through hole 41 that contacts the pin 53 moves downward as a whole as compared with the non-scribe operation.

  Also during the scribe operation, both the pins 53 come into contact with the inner peripheral surface 41 a of the through hole 41 due to the load. Therefore, as described with reference to FIG. 3A, even during the scribe operation, the scribing wheel 40 can maintain a stable posture parallel to the scribe direction.

  In the case of FIG. 7D, the scribing wheel 40 is supported by the pins 53 regardless of the scribing direction of the scribing wheel 40. Further, at the time of the scribe operation, the scribing wheel 40 is maintained in a stable posture because the two places of the pin 53 contact the inner peripheral surface 41a of the through hole 41.

  In the case of FIG. 7D, even if the scribing direction is reversed, the angle between the line segment L2 and the direction of the force received by the scribing wheel 40 during the scribing operation does not change. For this reason, if the pins 53 are arranged as shown in FIG. 7D, even when the scribe direction changes, the effect of suppressing the movement of the scribing wheel 40 does not change, and the scribing wheel 40 has a stable posture. Can be maintained.

  In this case, it is preferable that the angle α2 between the line segment L1 parallel to the substrate 15 and the line segment L3 connecting the tangent line of the pin 53 is set to 5 to 30 degrees. Accordingly, the angle between the line segment L3 and the direction of the force received by the scribing wheel 40 during the scribe operation becomes nearly vertical, and the scribing wheel 40 can be more stably supported.

  The pin 53 according to the second embodiment is also held by the pin hole as in the first embodiment. Here, since the pin 53 is one supporting member, it is sufficient that one pin hole is formed.

  Further, the shape of the pin hole in a side view may be any shape as long as the pin 53 can be inserted and the pin 53 can be held so as not to rotate. For example, the pin 53 may be formed in a ball shape according to the cross-sectional shape of the pin 53. In order to accommodate the cross-sectional shape of the pin 54, a rectangular hole having substantially the same length as the through hole 41, slightly wider than the diameter of the circle 53, and inclined by 5 to 30 degrees in the Z-axis direction may be used. Good.

  In this manner, by inserting the pin 53 into the pin hole, the pin 53 can be held at a predetermined position and angle of the through hole 41. Further, similarly to the first embodiment, by providing the lids for closing the pin holes on the holding portions 62a and 62b, the pins can be reliably prevented from dropping out of the through holes 41 and the pin holes.

<Effect of Embodiment 2>
As shown in FIGS. 7A to 7D, when the pin 53 contacts the inner peripheral surface 41a of the through hole 41, the scribing wheel 40 can be stably maintained during the scribe operation.

  Further, at the time of the scribe operation, the pin 53 comes into contact with the inner peripheral surface 41a of the through hole 41 at two places (point M and point N). Thereby, scribing wheel 40 can maintain a stable posture parallel to the scribe direction. At this time, when the angle α2 between the line segment L1 and the line segment L3 is 5 to 30 degrees, and the scribing wheel 40 is positioned as far as possible from the scribing wheel 40, the scribing wheel 40 is more stably maintained. it can.

  Further, since the support member 50 is constituted by one pin 53, it is easy to perform positioning in the through hole 41.

<Modification>
[Modification 1]
Next, a description will be given of pin holding portions 80a and 80b, which are modifications of the configuration for positioning the pins 51 and 52 at predetermined positions of the through hole 41.

  FIGS. 8A and 8B are diagrams for explaining the pin holding portions 80a and 80b, respectively, as viewed from the negative side of the Z axis. For convenience of description, only the scribing wheel 40, the holding portions 62a and 62b, the pins 51 and 52, and the pin holding portions 80a and 80b are illustrated. Also, in FIGS. 8A and 8B, as in FIG. 6, the arrangement of the pins 51 and 52 in FIG.

  As shown in FIG. 8A, unlike the embodiment, only the pin holes 64a and 64b having substantially the same diameter as the through holes of the scribing wheel are provided in the holding portions 62a and 62b of the holder 60. The pin holding portion 80a is provided in the holding portion 62a on the Y axis positive side, closes the pin hole 64a in the holding portion 62a, and covers the end 51b of the pin 51 and the end 51c of the pin 51.

  The pin holding portion 80a is provided with stepped holes 81a and 81b for fitting the end 51b of the pin 51 and the end 52b of the pin 52. The stepped hole 81a includes a hole 82a and a hole 83a, and the stepped hole 81b includes a hole 82b and a hole 83b. The holes 83a and 83b communicate with the holes 82a and 82b, respectively, and have a diameter smaller than the diameters of the holes 82a and 82b and smaller than the diameters of the pins 51 and 52. The end 51b of the pin 51 is fitted into the hole 82a of the stepped hole 81a. The end 52b of the pin 52 is fitted into the hole 82b of the stepped hole 81b.

  The pin holding portion 80b is provided on the holding portion 62b on the Y axis negative side, closes the pin hole 64b in the holding portion 62b, and covers the end 51c of the pin 51 and the end 52c of the pin 51.

  The pin holding portion 80b is provided with concave portions 84a and 78b for fitting the end portion 51c of the pin 50 and the end portion 52c of the pin 52.

  The pin holding portion 80a and the holding portion 62a, and the pin holding portion 80b and the holding portion 62b can be connected to be openable and closable by screwing or the like.

  By providing the pin holding portions 80a and 80b in this way, the pins 51 and 52 can be installed in the through-hole 41 at, for example, the positions shown in FIGS. 4A to 5B. In addition, it is possible to reliably prevent the pins 51 and 52 from dropping out of the through hole 41.

  Further, by providing the stepped holes 81a and 81b in the pin holding portion 80a, for example, when the scribing wheel 40 and the pins 51 and 52 are to be replaced, the pin holding portion 80b is first removed from the holding portion 62b. Then, as shown in FIG. 8B, when the thin shaft-like members 85a and 85b are inserted into the holes 83a and 83b of the pin holding portion 80a and the pins 51 and 52 are pushed toward the Y axis negative side, 51 and 52 can be easily taken out of the holding portions 62a and 62b.

[Effect of Modification Example 1]
As shown in FIGS. 8A and 8B, by attaching the pin holding portions 80a and 80b to the holding portions 62a and 62b, the pins 51 and 52 are positioned at predetermined positions of the through hole 41. Movement within is regulated. Thus, the scribing wheel 40 can be reliably supported by the pins 51 and 52. Therefore, scribing wheel 40 can perform a scribe operation while maintaining a stable posture.

  Since the pin holding portions 80a and 80b cover both ends of the pins 51 and 52, the pins 51 and 52 are reliably prevented from dropping out of the through holes 41 and the pin holes 64a and 64b.

  Further, as shown in FIGS. 8A and 8B, since the stepped holes 81a and 81b are formed in the pin holding portion 80a, the members 85a and 85b are inserted into the holes 83a and 83b, By pushing out the pin 52, the pins 51 and 52 can be easily taken out from the through hole 41 and the pin holes 64a and 64b.

[Modification 2]
Similarly to the first embodiment, the pin 53 according to the second embodiment may be held by a pin holding portion 80a having a stepped hole and a pin holding portion 80b having a recess as a modification. Here, since the pin 53 is one supporting member, one stepped hole of the pin holding portion 80a and one concave portion of the pin holding portion 80b may be formed.

  The shape of the stepped hole of the pin holding portion 80a and the shape of the concave portion of the pin holding portion 80b in a side view may be any shape as long as the pin 53 can be fitted therein. For example, the pin 53 may be formed in a ball shape according to the cross-sectional shape of the pin 53.

  As described above, by fitting both ends of the pin 53 into the pin holding portions 80a and 80b, the pin 53 is set at a predetermined position of the through hole 41, and the pin 53 is dropped from the through hole 41 and the pin holes 64a and 64b. To prevent.

  Further, similarly to the first modification, the pin 53 can be easily taken out from the through hole 41 and the pin holes 64a and 64b by using the small diameter hole among the stepped holes.

[Modification 3]
In the second embodiment, the support member 50 is configured by one pin 53. The cross-sectional shape of the pin 53 was such that two circles 53a and 53b having the same diameter were overlapped with their center positions shifted. As a modified example, the cross-sectional shape of the pin 54 may be such that two circles 54a and 54b having different diameters overlap each other with their centers shifted.

  9A to 9C are diagrams for explaining the cross-sectional shape of the pin 54 according to the third modification. As shown in FIG. 9A, the cross-sectional shape of the pin 54 is a shape in which two circles 54a and 54b having different diameters are overlapped so that their center positions are shifted from each other. Because of such a shape, the number of the support members 50 is only one. Therefore, the scribing wheel 40 can be stably supported.

  9A, the point S of the circle 54a indicates that the pin 54 contacts the through-hole 41, and the point S of the pin 54 is the same as in the second embodiment. 3A corresponds to the tangent line 51a in FIG. Similarly, a point T in the circle 54b indicates that the pin 54 comes into contact with the through hole 41, and the point T of the pin 54 corresponds to the tangent line 52a in FIG. In FIG. 9A, a line segment L1 is a line segment parallel to the substrate 15. The line segment L4 is a line segment connecting the points S and T described above. Further, D3 is a distance between the point S and the point T.

  Also in the third modification, it is preferable that the angle α3 between the line segment L1 and the line segment L4 is positioned in the through hole 41 such that the angle α3 is 5 to 30 degrees. Further, it is preferable that the distance D3 is as far as possible. If the pin 54 is positioned on the inner peripheral surface 41a of the through hole 41 in consideration of these, the scribing wheel 40 can be appropriately supported.

  In the third modification as well, similarly to FIGS. 7A to 7D of the second embodiment, the scribing wheel 40 can be supported by inserting the pin 54 into the through hole 41. FIG. 9A corresponds to FIG. 7A of the second embodiment.

  Further, as in the second embodiment, the shape of the pin hole in a side view may be any shape as long as the pin 54 can be inserted and the pin 54 can be held so as not to rotate. For example, it may be formed in a ball shape according to the cross-sectional shape of the pin 54. Alternatively, the pin 54 may have a rectangular shape as shown by a broken line in FIG. Further, as shown by a broken line in FIG. 9C, a rectangular hole that covers the larger circle 54a and a rectangular hole that covers the smaller circle 54b are combined. It may be formed.

[Modification 4]
FIG. 10 is a diagram for explaining the pin holding units 80a and 80b according to the fourth modification.

  The pin holding portions 80b according to the first and second modifications have recesses 84a and 84b into which the ends of the pins on the Y axis negative side are fitted. In Modification 4, as shown in FIG. 10, the pin holding portion 80b has holes 86a and 86b for holding the ends 51c and 52c on the Y axis negative side of the pins 51 and 52. A cover 87 may be provided to cover 86b and to restrict the movement of the ends of the pins 51 and 52 on the Y axis negative side.

  In this case, the pins 51 and 52 are inserted into the through holes 41 and the pin holes 64a and 64b, and the ends 51c and 52c of the pins 51 and 52 are fitted into the holes 86a and 86b, respectively. Then, the holes 86a and 86b are covered with the lid 87. Thereby, the movement of the pins 51 and 52 in the through hole 41 is restricted. Also, the pins 51 and 52 are prevented from dropping out of the through hole 41 and the pin holes 64a and 64b.

  When the pins 51 and 52 are taken out of the through-hole 41 and the pin holes 64a and 64b for replacement or the like, the pins 51 and 52 can be taken out by removing the lid 87 in the same manner as in the first embodiment. Therefore, it is not necessary to remove the pin holding portion 80b itself from the holding portion 62b, so that convenience is improved.

  In the fourth modification, as in the third modification, the shapes of the holes 86a and 86b in a side view may be formed according to the cross-sectional shape of the pin.

[Modification 5]
In the second embodiment, the pin 53 may be fitted into the pin holes 64a and 64b by press fitting or the like. Also in this case, it is preferable to provide the pin holding portions 80a and 80b so that the pins 53 do not fall out of the pin holes 64a and 64b.

[Other Modifications]
In the above embodiments and modifications, the pins of the support member have a circular shape or a shape in which two circles are superimposed so as to be offset from each other. The shape of the cross section of the pin is not limited to these as long as the pins are installed so as to be in contact with each other. It may be polygonal or elliptical.

  When the support member is a plurality of pins as in the first embodiment and the first modification, the areas of the cross sections orthogonal to the longitudinal direction of the pins may be formed to be different from each other.

  In the first embodiment, the smaller diameter holes 83a and 83b of the stepped holes 81a and 81b of the pin holding portion 80a do not close the opening on the Y axis negative side. Instead of providing the holes 83a and 83b, a lid that can be further opened and closed may be provided at the openings of the holes 82a and 82b.

  Various changes can be made to the embodiments of the present invention as appropriate within the scope of the technical idea described in the claims.

DESCRIPTION OF SYMBOLS 1 ... Scribe apparatus 15 ... Substrate 30 ... Holder unit 40 ... Scribing wheel 41 ... Through hole 41a ... Inner peripheral surface of a through hole 50 ... Support members 51, 52, 53, 54 ... Pins 51b, 51c ... Ends 52b, 52c ... Ends 52a, 52b, 53a, 53b ... Circles 62a, 62b ... Holding section 63 ... Holding grooves 64a, 64b ... Pin holes 64c, 64d ... Pin holes 70a, 70b ... Lids 80a, 80b ... Pin holding sections 81a, 81b ... Steps Holes M, N ... Contact points between pins and through holes P, Q ... Contact points between pins and through holes S, T ... Contact points between pins and through holes H ... Surface of substrate

Claims (8)

A holder unit for holding a scribing wheel for forming a scribe line on the surface of the substrate,
A holding groove into which the scribing wheel is inserted,
A pin hole formed so as to straddle the holding groove,
A support member inserted into the through hole and the pin hole of the scribing wheel inserted into the holding groove, and rotatably supporting the scribing wheel inserted into the holding groove,
The holder unit, wherein the support member contacts an inner peripheral surface of the through hole at at least two places. The holder unit according to claim 1,
The support member comprises at least two pins;
The holder unit, wherein the pins are arranged in parallel with each other and are installed so as to be in contact with the inner peripheral surface of the through hole. The holder unit according to claim 2,
The support member comprises two pins;
A holder unit, wherein, among the pins, a pin installed on a front side in a scribe direction is installed at a height position higher in a direction perpendicular to the substrate than the other pin. The holder unit according to claim 3,
The holder unit, wherein the two pins are installed such that an angle formed by a line segment connecting the contact points between the pins and the through holes is 5 to 30 degrees. The holder unit according to claim 2,
The holder unit according to claim 1, wherein the pin holes are provided by the number of pins so that the pins are held apart from each other. The holder unit according to claim 2,
A holder unit, comprising: a pin holding portion in which both ends of the pin are fitted, and holding the pins in a state of being separated from each other. The holder unit according to claim 1,
The support member is formed of one pin,
The holder unit according to claim 1, wherein a shape of a cross section orthogonal to a longitudinal direction of the pin is a shape in which two circles overlap each other so as to shift their center positions. A pin inserted in a through hole of the scribing wheel to rotatably support the scribing wheel,
A pin having a cross section orthogonal to a longitudinal direction of the pin, wherein two circles are overlapped so that their center positions are shifted from each other.

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