CN107520973B

CN107520973B - Scribing device and holder unit

Info

Publication number: CN107520973B
Application number: CN201710477963.4A
Authority: CN
Inventors: 地主贵裕; 中垣智贵; 阪口良太
Original assignee: Mitsuboshi Diamond Industrial Co Ltd
Current assignee: Mitsuboshi Diamond Industrial Co Ltd
Priority date: 2016-06-21
Filing date: 2017-06-21
Publication date: 2021-01-22
Anticipated expiration: 2037-06-21
Also published as: KR20170143433A; CN107520973A; TWI717514B; KR102359869B1; JP6736156B2; TW201811525A; JP2017226108A

Abstract

The invention provides a scribing device and a holder unit capable of stabilizing the forming position of a scribing line. A scribing device (1) is provided with a holder unit (30) and a scribing head for holding the holder unit (30). The holder unit (30) is provided with a holding groove (63), pin holes (64a, 64b), and a pin shaft (50) that is inserted into the through hole (41) and the pin holes (62a, 62b) of the scribing wheel (40). The play between the through hole (41) and the pin shaft (50), the play between the inner side surfaces (65a, 65b) of the holding groove (63) and the side surfaces of the scribing wheel (40), and the inclination angle of the pin shaft (50) with respect to the inner side surfaces (65a, 65b) of the holding groove (63) are set such that, when the scribing wheel (40) is pressed against the substrate surface, the both side surfaces of the scribing wheel (40) are respectively pressed against the inner side surfaces (65a, 65b) of the holding groove (63) which face each other.

Description

Scribing device and holder unit

Technical Field

The present invention relates to a scribing device and a holder unit for forming a scribe line on a substrate.

Background

Conventionally, a brittle material substrate such as a glass substrate is cut by a scribing step of forming a scribe line on a surface of the substrate and a breaking step of applying a predetermined force to the surface of the substrate along the formed scribe line. In the scribing step, the cutting edge of the scribing wheel moves along a predetermined line while being pressed against the surface of the substrate. A scribing apparatus including a scribing head is used to form the scribe lines.

Patent document 1 below discloses a scribing apparatus in which a scribing wheel is rotated and moved on a substrate surface to form a scribe line on the substrate surface. In this scribing apparatus, the scribing wheel is rotatably held by the holder by inserting the pin shaft into both the hole formed in the holder and the hole formed in the scribing wheel in a state where the scribing wheel is inserted into the holding groove formed in the holder.

Prior art documents

Patent document

Patent document 1: WO2007/063979 publication

Problems to be solved by the invention

The scribing wheel attached to the holder needs to rotate in the holding groove to form a scribing line. Therefore, the width of the holding groove is slightly larger than the thickness of the scribing wheel, and a play is ensured between the scribing wheel and the holding part. Under the action of the play, the scribing wheel is in a state of being capable of moving along the pin shaft in the holder groove. However, when the scribing wheel moves in the pin axis direction at the time of forming the scribe line, the forming position of the scribe line becomes unstable. Therefore, the conventional scribing apparatus has a problem that the scribe line is displaced from a desired position.

Disclosure of Invention

In view of the above problem, an object of the present invention is to provide a scribing device and a holder unit capable of stabilizing a scribe line forming position.

Means for solving the problems

A first aspect of the present invention relates to a scribing apparatus for forming a scribe line on a surface of a substrate. The scribing device of this scheme possesses: a holder unit that holds the scribing wheel; and a scribing head which holds the holder unit to be rotatable about an axis perpendicular to the substrate surface. The holder unit includes: a holding groove into which the scribing wheel is inserted; a pin hole formed to cross the holding groove; and a pin shaft inserted into the through hole and the pin hole of the scribing wheel inserted into the holding groove. The play between the through hole and the pin shaft, the play between the inner side surface of the holding groove and the side surface of the scribing wheel, and the inclination angle of the pin shaft with respect to the inner side surface of the holding groove are set so that the both side surfaces of the scribing wheel are respectively pressed against the mutually opposed inner side surfaces of the holding groove when the scribing wheel is pressed against the substrate surface.

According to the scribing device of the present aspect, when the scribing wheel is pressed against the substrate surface, both side surfaces of the scribing wheel are respectively pressed against the inner side surfaces of the holding grooves that face each other. Therefore, when the scribe line is formed, the movement of the scribe wheel in the pin axis direction can be suppressed. Therefore, the formation position of the scribe line can be stabilized.

In the scribing device according to the aspect, the pin hole may be formed to be inclined at least in a direction parallel to the substrate surface with respect to a direction perpendicular to the inner surface of the holding groove, and the pin inserted into the pin hole and the through hole may be inclined at least in a direction parallel to the substrate surface with respect to a direction perpendicular to the inner surface of the holding groove. According to this configuration, as demonstrated in the following embodiments, the formation position of the scribe line can be stabilized.

In this case, it is preferable that an inclination angle of the pin shaft in a direction parallel to the substrate surface with respect to a direction perpendicular to the inner side surface of the holding groove is set to 2 ° or less. This can more effectively stabilize the scribe line formation position.

In the scribing device according to the aspect of the invention, the pin hole may be formed to be inclined in a direction perpendicular to the substrate surface with respect to a direction perpendicular to the inner surface of the holding groove, and the pin inserted into the pin hole and the through hole may be formed to be inclined in a direction perpendicular to the substrate surface with respect to a direction perpendicular to the inner surface of the holding groove. According to this configuration, as demonstrated in the following embodiments, the formation position of the scribe line can be further stabilized.

In this case, it is preferable that an inclination angle of the pin shaft in a direction perpendicular to the substrate surface with respect to a direction perpendicular to the inner side surface of the holding groove is set to 1.5 degrees or less. This can further effectively stabilize the formation position of the scribe line.

A second aspect of the present invention relates to a holder unit that holds a scribing wheel for forming a scribing line. The retainer unit of this embodiment includes: a holding groove into which the scribing wheel is inserted; a pin hole formed to cross the holding groove; and a pin shaft inserted into the through hole of the scribing wheel inserted into the holding groove and the pin hole. The play between the through hole and the pin shaft, the play between the inner side surface of the holding groove and the side surface of the scribing wheel, and the inclination angle of the pin shaft with respect to the inner side surface of the holding groove are set so that, when the scribing wheel is pressed against the surface of the substrate, the two side surfaces of the scribing wheel are respectively pressed against the mutually opposed inner side surfaces of the holding groove.

The holder unit according to this aspect is held by the scribing head so as to be rotatable about an axis perpendicular to the substrate surface, and thereby the same effects as those of the first aspect can be obtained.

Effects of the invention

As described above, according to the present invention, it is possible to provide a scribing device and a holder unit capable of stabilizing the formation position of a scribe line.

The effects and significance of the present invention will be more apparent from the following description of the embodiments. However, the embodiments described below are merely examples for carrying out the present invention, and the present invention is not limited to the contents described in the embodiments below.

Drawings

Fig. 1 is a diagram schematically illustrating the structure of a scribing apparatus according to an embodiment.

Fig. 2 (a) and (b) are a front view and a side view of the holder unit according to the embodiment, respectively.

Fig. 3 (a) to (d) are cross-sectional views schematically showing the operation of the retainer according to the embodiment.

Fig. 4 is a graph showing the measurement result of the misalignment of the scribing wheel of the comparative example in the verification 1.

Fig. 5 (a) to (d) are graphs each showing the measurement results of the misalignment of the scribing wheel of the comparative example in verification 1.

Fig. 6 is a graph showing the measurement result of the shift of the scribing wheel of the example in the verification 1.

Fig. 7 (a) to (d) are diagrams showing the measurement results of the misalignment of the scribing wheel of the example in the verification 1.

Fig. 8 is a graph showing the measurement result of the misalignment of the scribing wheel of the comparative example in the verification 2.

Fig. 9 is a graph showing the measurement result of the misalignment of the scribing wheel of the comparative example in the verification 2.

Fig. 10 (a) to (f) are graphs each showing the measurement results of the misalignment of the scribing wheel of the comparative example in verification 2.

Fig. 11 is a graph showing the measurement result of the shift of the scribing wheel of the example in the verification 2.

Fig. 12 is a graph showing the measurement result of the shift of the scribing wheel of the example in the verification 2.

Fig. 13 (a) to (f) are graphs each showing the measurement results of the misalignment of the scribing wheel of the comparative example in verification 2.

Fig. 14 (a) is a diagram showing various parameters in the scribing wheel and the holding groove of the present embodiment. Fig. 14 (b) and (d) are views showing the gap of the standard holding groove and the thickness of the scribing wheel, respectively. Fig. 14 (c) and (e) are graphs showing calculation results of the maximum inclination angle of the scribing wheel for each diameter.

Fig. 15 is a graph showing the measurement result of the shift of the scribing wheel of the example in verification 3.

Fig. 16 is a graph showing the measurement result of the shift of the scribing wheel of the example in the verification 3.

Fig. 17 (a) and (b) are diagrams illustrating the operation of the embodiment in the case where the pin shaft is inclined in the vertical direction.

Description of the reference numerals

1 … scoring device;

15 … a substrate;

20 … scribing the head;

30 … cage unit;

40 … scoring wheel;

41 … through holes;

42a, 42b … side;

50 … pin shaft;

a 60 … cage;

63 … holding grooves;

64a, 64b … pin holes;

65a, 65b …;

h … surface.

Detailed Description

Hereinafter, embodiments of the present invention will be described with reference to the drawings. In the drawings, for convenience, X, Y, and Z axes orthogonal to each other are denoted. The X-Y plane is parallel to the horizontal plane, and the Z-axis direction is the vertical direction.

Fig. 1 is a diagram schematically showing the structure of the scribing device 1.

The scribing apparatus 1 includes a mobile station 10. The moving table 10 is screwed to the ball screw 11. The moving table 10 is supported by a pair of guide rails 12 so as to be movable in the Y-axis direction. The ball screw 11 is rotated by driving of the motor, and thereby the moving table 10 moves in the Y-axis direction along the pair of guide rails 12.

A motor 13 is provided on the upper surface of the mobile station 10. The motor 13 rotates the table 14 located at the upper portion in the XY plane and positions the table at a predetermined angle. The table 14, which is horizontally rotatable by the motor 13, includes a vacuum suction mechanism, not shown. The substrate 15 placed on the table 14 is held on the table 14 by the vacuum suction mechanism.

The substrate 15 is a glass substrate, a ceramic substrate made of low-temperature sintered ceramics or high-temperature sintered ceramics, a silicon substrate, a compound semiconductor substrate, a sapphire substrate, a quartz substrate, or the like. The substrate 15 may have a structure in which a thin film or a semiconductor material is attached to or included in a surface or an interior of the substrate. Further, a thin film or the like which is not a brittle material may be attached to the surface of the substrate 15.

The scribing apparatus 1 includes two cameras 16 for imaging alignment marks formed on the surface of a substrate 15 placed on a table 14 above the substrate 15. Further, a bridge 17 is bridged between the

support columns

18a and 18b so as to straddle the mobile station 10 and the table 14 above the mobile station.

A guide 19 is attached to the bridge 17. The scribing head 20 is provided to move in the X-axis direction while being guided by the guide 19. The scribing head 20 includes a holder joint 21 at a lower end. The holder unit 30 holding the scribing wheel 40 in the holder 60 is attached to the scribing head 20 via the holder joint 21.

When forming a scribe line on the substrate 15 using the scribing apparatus 1, first, the holder 60 on which the scribing wheel 40 is mounted is attached to the scribing head 20. Next, the scribing apparatus 1 performs positioning of the substrate 15 by the pair of cameras 16. Then, the scribing apparatus 1 moves the scribing head 20 to a predetermined position, and applies a predetermined load to the scribing wheel 40 so as to contact the substrate 15. Thereafter, the scribing apparatus 1 moves the scribing head 20 in the X-axis direction to form a predetermined scribing line on the surface of the substrate 15. The scribing device 1 rotates or moves the table 14 in the Y-axis direction as necessary to form a scribe line in the same manner as in the above case.

In the above-described embodiment, the scribing device in which the scribing head moves in the X-axis direction and the table 14 moves in the Y-axis direction and rotates has been described, but the scribing device may be configured so that the scribing head and the table move relative to each other. For example, a scribing apparatus in which a scribing head is fixed and a table is moved and rotated in the X-axis and Y-axis directions may be used. In this case, the camera 16 may be fixed to the scribing head 20.

Next, the structure of the holder unit 30 will be described with reference to (a) and (b) of fig. 2. Fig. 2 (a) is a front view of the holder unit 30 as viewed from the X-axis positive side, and fig. 2 (b) is a side view of the holder unit 30 as viewed from the Y-axis positive side. Fig. 2 (a) and (b) also illustrate the holder joint 21 to which the holder unit 30 is directly attached.

The holder unit 30 is a unit in which the scribing wheel 40, the pin 50, and the holder 60 are integrated. As shown in fig. 2 (b), the holder unit 30 is attached to the holder joint 21 by an attachment screw 31. The holder joint 21 is composed of a mounting portion 22, a rotating shaft 23, and two

bearings

24a and 24 b. The cross-sectional shape of the mounting portion 22 is an inverted L-shape. The mounting portion 22 is constituted by a wall 22a extending in the vertical direction and a wall 22b extending in the horizontal direction. The rotation shaft 23 extends in the vertical direction from the top surface side of the wall 22b of the mounting portion 22. The rotating shaft 23 passes through the

bearings

24a, 24 b.

When the holder unit 30 is attached to the holder joint 21, the side surface of the holder unit 30 contacts the wall 22a of the attachment portion 22, and the upper surface of the holder unit 30 contacts the wall 22 b. As shown in fig. 2 (a), a screw hole 25 into which a mounting screw 31 is inserted is formed in the wall 22 a.

The holder joint 21 is fixed inside the scribing head 20 so that the holder unit 30 attached to the attachment portion 22 is exposed from the lower end of the scribing head 20. At this time, the holder unit 30 is rotatable about the rotation shaft 23 of the holder joint 21. The one-dot chain line shows the axial center S of the rotation shaft 23, and the broken line shows the surface H of the substrate 15. The surface H is parallel to the horizontal plane and perpendicular with respect to the rotation axis 23.

When a scribing line is formed on the surface H of the substrate 15 using the scribing apparatus 1, the scribing wheel 40 rotates so as to travel in the direction of the arrow R (X-axis direction) shown in fig. 2 (b). The scribing device 1 may be configured such that the holder unit 30 itself includes the rotary shaft 23 and the

bearings

24a and 24b without using the holder joint 21.

The scribing wheel 40 is, for example, a disk-shaped member formed of sintered diamond, cemented carbide, or the like. The scribing wheel 40 is formed with a through hole 41 into which the pin shaft 50 is inserted. The through hole 41 is formed to penetrate the center of both side surfaces of the scribing wheel 40. Further, a V-shaped blade having a ridge line is formed on the outer peripheral portion of the scribing wheel 40. The thickness of the scribing wheel 40 is, for example, about 0.4 to 1.1mm, and the outer diameter is, for example, about 1.0 to 5.0 mm. The diameter of the through hole 41 is, for example, about 0.4 to 1.5mm, and the cutting edge angle of the cutting edge is, for example, about 90 to 150 °.

The pin 50 is, for example, a cylindrical member formed of sintered diamond, cemented carbide, or the like, and has a pointed portion 51 having a pointed shape at one end or both ends. The diameter of the pin 50 is slightly smaller than the diameter of the through hole 41 of the scribing wheel 40. For example, when the diameter of the through hole 41 is 0.8mm, the diameter of the pin 50 is, for example, about 0.77 mm. In a state where the pin 50 is inserted into the through hole 41, a gap (play) is generated between the pin 50 and the through hole 41.

The holder 60 is constructed of stainless steel or carbon tool steel. As shown in fig. 2 (b), the holder 60 has a trapezoidal shape in which the lower portion is narrower toward the lower end in a side view. In addition, holding

portions

62a and 62b are formed at the trapezoidal portions of the holder 60, respectively, and a holding groove 63 is formed between the holding portion 62a and the holding portion 62 b. The

inner surfaces

65a and 65b of the holding groove 63 facing each other are perpendicular to a horizontal plane (XY plane).

In the configuration of fig. 2 (a) and (b), the holder 60 is formed of one base material, but the holder 60 may be formed by fixing two base materials having the holding

portions

62a and 62b, respectively, for example.

Pin holes

64a and 64b into which the pin shaft 50 is inserted are formed in the holding

portions

62a and 62b so as to straddle the holding groove 63. The diameter of the

pin holes

64a, 64b is slightly larger than the diameter of the pin shaft 50. The pin holes 64a and 64b are formed to be inclined at least in a direction parallel to the surface H of the substrate 15 (a direction parallel to the XY plane) with respect to a direction perpendicular to the

inner surfaces

65a and 65b of the holding groove 63. The pin holes 64a and 64b may be formed to be inclined also in a direction perpendicular to the surface H of the substrate 15 (a direction parallel to the YZ plane) with respect to a direction perpendicular to the inner surface of the holding groove 63.

In a state where the scribing wheel 40 is inserted into the holding groove 63, the pin shaft 50 is inserted into the through hole 41 and the pin holes 64a and 64b of the scribing wheel 40. As described above, the pin holes 64a and 64b are formed so as to be inclined with respect to the direction perpendicular to the inner side surfaces 65a and 65b of the holding groove 63, and therefore, the pin shaft 50 inserted into the pin holes 64a and 64b and the through hole 41 is inclined at least in the direction parallel to the surface H of the substrate 15 (the direction parallel to the XY plane) with respect to the direction perpendicular to the inner side surfaces 65a and 65b of the holding groove 63.

Screw holes 66 into which the mounting screws 31 are inserted are formed in the upper portion of the holder 60. A stopper 67a is attached to the Y-axis positive side surface of the holding portion 62a via a screw 68a, and a stopper 67b is attached to the Y-axis negative side surface of the holding portion 62b via a screw 68 b. The

stoppers

67a, 67b are used to block the

pin holes

64a, 64 b.

In the scribing apparatus 1 having the above configuration, when the scribing wheel 40 is pressed against the surface H of the substrate 15 in the scribing line forming operation, both side surfaces of the scribing wheel 40 are pressed against the inner side surfaces 65a and 65b of the holding groove 63, which face each other. Therefore, during the scribe line forming operation, the movement of the scribe wheel 40 along the pin shaft 50 can be suppressed, and thus the scribe line forming position can be stabilized.

The operation in which both side surfaces of the scribing wheel 40 are pressed against the inner side surfaces 65a and 65b of the holding groove 63 facing each other will be described below with reference to (a) to (d) of fig. 3.

Fig. 3 (a) to (d) are cross-sectional views schematically showing the operation of the holder 60. Fig. 3 (a) to (d) are cross-sectional views of the holder 60 shown in fig. 2 (a) and (b) taken along a plane parallel to the XY plane at the center position of the pin 50 in the Z-axis direction, respectively, as viewed from the Z-axis front side. For convenience, the illustration of a part of the structure of the retainer 60 is omitted in fig. 3 (a) to (d). The single-dot chain line shows the ridge of the edge of the scribing wheel 40.

Fig. 3 (a) shows a state before the scribing wheel 40 is pressed against the surface H of the substrate 15. In this state, the ridge line of the scribing wheel 40 is substantially parallel to the XZ plane, and a gap (play) is generated between the side surfaces 42a and 42b on both sides of the scribing wheel 40 and the inner side surfaces 65a and 65b of the holding groove 63. The pin 50 is inclined in a direction parallel to the XY plane with respect to a direction perpendicular to the

inner side surfaces

65a, 65b of the holding groove 63.

When the scribing wheel 40 is pressed against the surface H of the substrate 15 from this state, a torque is generated in the scribing wheel 40 so that the through hole 41 of the scribing wheel 40 is parallel to the pin shaft 50. As described above, since the diameter of the through hole 41 is larger than the diameter of the pin 50, the scribing wheel 40 can rotate in the direction parallel to the XY plane within the range allowed by the play between the through hole 41 and the pin 50. Therefore, when the scribing wheel 40 generates the torque as described above, the scribing wheel 40 rotates clockwise as shown in fig. 3 (b) by the torque, and the side surfaces 42a and 42b of the scribing wheel 40 are pressed against the inner side surfaces 65a and 65b of the holding groove 63, respectively.

Then, when the holder 60 moves in the X-axis direction (the direction of the arrow R) in accordance with the movement of the scribing head 20, a torque is generated to make the ridge line of the scribing wheel 40 parallel to the scribing direction (the direction of the arrow R). Since the holder 60 is rotatable about the rotation shaft 23 as shown in fig. 2 (a) and (b), the holder 60 is rotated counterclockwise by the torque so that the ridge line of the scribing wheel 40 is parallel to the scribing direction (the direction of arrow R) as shown in fig. 3 (c).

Thereafter, as shown in fig. 3 d, the scribing operation is performed in a state where the holder 60 is slightly rotated around the rotation shaft 23 (see fig. 2a and b). In this case, the scribing wheel 40 is also in a state where the side surfaces 42a and 42b on both sides are pressed against the inner side surfaces 65a and 65b of the holding groove 63 by the load applied to the surface H of the substrate 15. In this state, the scribing wheel 40 rotates around the pin 50.

As described above, in the present embodiment, since the both side surfaces of the scribing wheel 40 are pressed against the inner side surfaces 65a and 65b of the holding groove 63 facing each other during the scribing line forming operation, the scribing wheel 40 can be prevented from moving along the pin shaft 50 during the scribing line forming operation. This stabilizes the formation position of the scribe line.

The following describes the verification performed by the present inventors and the results thereof.

< verification 1 >

The conditions for this verification are as follows.

(1) Substrate … glass substrate (OA-10G), thickness 3mm (t3)

(2) Scribing load … 5N

(3) Scribing speed … 300mm/sec

(4) Three kinds of scribing wheel diameters of … 3mm, 2mm and 2.5mm

(5) The diameter of the pin shaft is … 0.80.80 mm

The diameter of the through hole of the scribing wheel is slightly larger than the diameter of the pin shaft, and the clearance of the through hole is 0.035-0.065 mu m. In addition, the thickness (measured value) of the scribing wheel was 0.639mm for a scribing wheel having a diameter of 3mm, 0.641mm for a scribing wheel having a diameter of 2mm, and 0.642mm for a scribing wheel having a diameter of 2.5 mm. As described later, verification was performed using two scribing wheels different from each other for a scribing wheel having a diameter of 2.5 mm. The clearance (measured value) of the holding groove of the holder was 0.651mm in a comparative example described later, and was 0.653mm in an example described later.

Based on the above conditions, the scribing wheels of the three diameters shown in the above condition (4) were attached to the holder (comparative example) having the pin shaft provided perpendicularly to the inner surface of the holding groove, and scribing was performed. Similarly, based on the above conditions, scribing wheels of three diameters shown in the above condition (4) were attached to the holder (example) provided with the pin shafts inclined by 1 ° in the horizontal direction with respect to the direction perpendicular to the inner side surfaces of the holding grooves, and scribing was performed. In the holder adjustment according to the embodiment, the pin shaft is provided so as to be inclined by 0.5 ° in the vertical direction with respect to the direction perpendicular to the inner surface of the holding groove.

In this scribing operation, the scribe line is imaged by a camera provided so that the imaging direction is directed in a direction parallel to the scribing direction, and based on the captured image, the inclination of the scribe line, that is, the displacement in the horizontal direction (direction parallel to the pin axis) of the contact portion of the scribe wheel with the substrate during the scribing operation is measured. The measurement was performed 166 times at intervals of 2mm from the end of the scribe line.

In the comparative examples and examples, the thickness of the three types of scribing wheels is smaller than the gap of the holding groove as described above, and therefore, the scribing wheels can move within the range of the play along the pin shaft regardless of which type of scribing wheel is mounted.

First, fig. 4 and fig. 5 (a) to (d) show the measurement results of the comparative example. In each figure, the horizontal axis represents the number of measurements, and the vertical axis represents the displacement (μm) of the scribe wheel. The amount of shift on the vertical axis indicates the amount of shift of the scribing wheel in the horizontal direction from the reference position, which is the measurement start position (scribing operation end position). Fig. 4 shows the results of four measurements. In the context of figure 4 of the drawings,

the graphs show the measurement results in the case of using scribing wheels having diameters of 2mm and 3mm, respectively. In addition, the first and second substrates are,

the graph of (a) shows the measurement results in the case of using two scribing wheels of the same kind each having a diameter of 2.5 mm.

FIGS. 5 (a) to (d) are extracted from the measurement results of FIG. 4

And

the measurement results of (a) are shown. In fig. 5, (a) to (d) show approximate curves indicating the transition of the position of the scribing wheel together with a thick line.

As can be seen from fig. 4 and fig. 5 (a) to (d), a sudden large offset occurs in the scribing wheel of each diameter. Especially in

In the measurement result of (2), a large displacement occurs in the position of the scribing wheel in a predetermined period before the end of the scribing operation.

Referring to fig. 4 and 5 (a) to (d), in each graph, a periodic fine wave is generated by the ridge line of the edge of the scribing wheel swinging in the thickness direction due to a tolerance while the outer circumference of the scribing wheel makes one turn. In the comparative example, it is found that the amplitude of the wave is not uniform and fluctuates.

Next, fig. 6 and fig. 7 (a) to (d) show the measurement results of the examples. The horizontal axis and the vertical axis of each figure represent the number of measurements and the amount of offset, respectively, as in (a) to (d) of fig. 4 and 5. In addition, in fig. 6,

the graphs of (A) show the results of measurement in the case of using scribing wheels having diameters of 2mm and 3mm,

the diagram shows the use of two identical types of scribing wheel each having a diameter of 2.5mmThe measurement results in the case. The relationships (a) to (d) in fig. 6 and 7 are the same as those in fig. 4 and 5.

Referring to fig. 6 and (a) to (d) of fig. 7, sudden large misalignment does not occur in any of the scribing wheels of the respective diameters. In addition, in

In the measurement result of (2), the position of the scribing wheel was not largely deviated, and the same measurement result as that of the other scribing wheel was obtained. The amplitude of the fine wave is also suppressed as compared with the case of the comparative example. Therefore, it is understood that when the holder according to the embodiment is used, variations in the case of using different scribing wheels can be suppressed, and the scribing line can be formed with very good precision.

< verification 2 >

Next, verification was performed for the shift of the scribing wheel when the load to the scribing wheel was changed. The conditions of the verification are the same as those of the verification 1 except that the load is changed. Note that, in this verification, a scribing wheel having a diameter of 3mm was used.

In the comparative example, as in the case of the verification 1, the scribing operation was performed by attaching the scribing wheel to the holder in which the pin shaft was provided perpendicularly to the inner surface of the holding groove. In the embodiment, the scribing wheel was attached to the holder, in which the pin shaft was provided so as to be inclined by 1 ° in the horizontal direction and 0.5 ° in the vertical direction with respect to the direction perpendicular to the inner surface of the holding groove, and the scribing operation was performed. The load changes are six types of 4N, 6N, 8N, 10N, 12N, and 14N. Similarly to the verification 1, the amount of shift of the scribing wheel when the scribing operation is performed with each load is measured based on the image of the scribe line captured by the camera.

First, (a) to (e) of fig. 8, 9 and 10 show the measurement results of the comparative example. The horizontal axis and the vertical axis of each figure represent the number of measurements and the amount of offset, respectively, as in fig. 4 and (a) to (d) of fig. 5. Fig. 8 shows the measurement results for loads of 4N, 6N, and 8N, and fig. 9 shows the measurement results for loads of 10N, 12N, and 14N. Fig. 10 (a) to (e) show measurement results of the

loads

4N, 6N, 8N, 10N, 12N, and 14N extracted from the measurement results of fig. 8 and 9. In fig. 10, (a) to (e) show approximate curves indicating the transition of the position of the scribing wheel together with a thick line.

Referring to fig. 8, 9 and (a) to (e) of fig. 10, it is understood that the position of the scribing wheel in the horizontal direction is unstable and the positional deviation is large as the load is small. From the measurement results, it is found that when the holder of the comparative example is used, if the load during the scribing operation is set to be small, the scribing wheel moves along the pin shaft in the holding groove, and the accuracy of forming the scribe line is lowered.

Next, (a) to (e) of fig. 11, 12 and 13 show the measurement results of the examples. The horizontal axis and the vertical axis of each figure are the same as those in fig. 8 and 9 and (a) to (e) of fig. 10 of the comparative example. In the examples, the load was changed to six types of 4N, 6N, 8N, 10N, 12N, and 14N as in the comparative examples.

As can be seen from fig. 11 and 12 and (a) to (e) of fig. 13, the position of the scribing wheel in the horizontal direction is stable regardless of the magnitude of the load, and the positional deviation can be suppressed. From the measurement results, it was found that, when the holder according to the example was used, the movement of the scribing wheel in the holding groove was suppressed regardless of the load during the scribing operation, and the accuracy of forming the scribe line could be significantly improved.

< study of Tilt Angle >

Next, as shown in fig. 3 (a) to (d), the inclination angle of the pin shaft 50 in the horizontal direction, which is required to press the side surfaces 42a and 42b on both sides of the scribing wheel 40 against the inner side surfaces 65a and 65b of the holding groove 63 by a load, is examined.

Fig. 14 (a) is a diagram showing various parameters in the scribing wheel 40 and the holding groove 63.

In fig. 14 (a), T is the clearance of the holding groove 63, T is the thickness of the scribing wheel 40, Δ T is the play between the holding groove 63 and the scribing wheel 40,

in order to be able to determine the diameter of the scribing wheel 40,d1 is the height of the blade edge of the scribing wheel, D2 is the distance in the radial direction from the center C1 of the scribing wheel 40 to the intersection of the side surface of the blade edge and the inclined surface, P1 is the boundary portion between the blade edge and the right side surface of the scribing wheel 40 that comes into contact with the left inner side surface of the holding groove 63 when the scribing wheel 40 rotates counterclockwise around the center C1 of the scribing wheel 40 from the state of fig. 14 (a), X is the distance from the center of the scribing wheel 40 to the boundary portion P1, θ is the angle of the blade edge, and α is the maximum inclination angle of the scribing wheel 40 when the scribing wheel 40 rotates around the center C1 (the angle between the boundary portion P1 and the left inner side surface of the holding groove 63).

As is apparent from fig. 14 (a), the maximum inclination angle α of the scribing wheel 40 until the boundary portion P1 comes into contact with the inner surface of the holding groove 63 increases as the thickness T decreases and the gap T increases. Since the distance X is smaller as the angle of the blade edge is smaller as the height D1 of the blade edge is larger, the maximum inclination angle α of the scribing wheel 40 until the boundary portion P1 comes into contact with the inner surface of the holding groove 63 is larger. Therefore, the smaller the thickness T, the larger the clearance T, and the smaller the angle θ of the blade edge, the larger the maximum inclination angle α.

Fig. 14 (b) is a diagram showing the standard dimensions of the thickness T of the scribing wheel 40 and the clearance T of the holding groove 63 in the case of using the scribing wheel 40 having the diameters of 3.0mm, 2.5mm, 2.0mm, and 1.8 mm. Here, the gap T is the maximum value of the gap when the tolerance is estimated, and the thickness T is the minimum value of the thickness of the scribing wheel 40 when the tolerance is estimated.

Fig. 14 (c) is a value obtained by calculating the maximum inclination angle α of the scribing wheel 40 for each diameter when the gap T and the thickness T are the values shown in fig. 14 (b). Here, the maximum inclination angle α is calculated by setting the angle θ of the blade edge to 90 ° which is the minimum value of 90 to 150 ° as a standard angle.

Fig. 14 (d) is a diagram showing the thickness T of the scribing wheel 40 and the standard size of the gap T of the holding groove 63 in the case of using the scribing wheel 40 having a diameter of 1.5mm or 1.0 mm. As described above, the gap T is the maximum gap when the tolerance is estimated to be in, and the thickness T is the minimum thickness of the scribing wheel 40 when the tolerance is estimated to be in.

Fig. 14 (e) is a value obtained by calculating the maximum inclination angle α of the scribing wheel 40 for each diameter when the gap T and the thickness T are the values shown in fig. 14 (d). Here, the maximum inclination angle α is calculated by setting the angle θ of the blade edge to 90 ° which is the minimum value of 90 to 150 ° as the standard angle, as described above.

As shown in fig. 14 (c) and (e), the maximum inclination angle α between the scribing wheel 40 and the left and right side surfaces of the holding groove 63 differs depending on the type of the scribing wheel 40 even when the gap T is the same. Here, since the maximum inclination angle α is 1.88 ° in the case of using the scribing wheel 40 having a diameter of 1.0, in order to press both side surfaces of the scribing wheel 40 against the inner surface of the holding groove 63, the inclination angle of the pin shaft 50 in the horizontal direction with respect to the direction perpendicular to the inner surface of the holding groove 63 needs to be set to a value at least exceeding 1.88 °.

On the other hand, the larger the inclination angle of the pin shaft 50 in the horizontal direction with respect to the direction perpendicular to the inner surface of the holding groove 63, the larger the force pressing both side surfaces of the scribing wheel 40 against the inner surface of the holding groove 63, the easier the rotation of the scribing wheel 40 is braked at the time of scribing operation. Further, the friction generated by the braking tends to cause wear on the side surface of the scribing wheel 40. Therefore, it can be said that the inclination angle of the pin shaft 50 in the horizontal direction with respect to the direction perpendicular to the inner side surface of the holding groove 63 is preferably limited as much as possible.

From the above, it is desirable that the inclination angle of the pin shaft 50 in the horizontal direction with respect to the direction perpendicular to the inner side surface of the holding groove 63 is set to about 2.0 ° or less which slightly exceeds 1.88 ° when the clearance between the holding groove 63 and the side surface of the scribing wheel is 0.020mm or less. When the scribing wheel 40 of each diameter is used, the inclination angle of the pin shaft 50 in the horizontal direction with respect to the direction perpendicular to the inner surface of the holding groove 63 may be set to an optimum angle for each diameter of the scribing wheel 40, depending on the thickness T of the scribing wheel 40 and the value of the clearance T of the holding groove 63.

As shown in fig. 3 (a) to (d), in order to press the side surfaces 42a and 42b on both sides of the scribing wheel 40 against the inner side surfaces 65a and 65b of the holding groove 63 by a load, the diameter of the through hole 41 of the scribing wheel 40 needs to be larger than the diameter of the pin shaft 50, and the scribing wheel 40 can be rotated in the horizontal direction with respect to the pin shaft 50 so that the side surfaces 42a and 42b on both sides of the scribing wheel 40 can abut against the inner side surfaces 65a and 65b of the holding groove 63.

Therefore, in order to obtain the effects shown in verification 1 and verification 2, it is necessary to adjust the play between the inner side surfaces 65a and 65b of the holding groove 63 and the side surfaces 42a and 42b of the scribing wheel 40 and the inclination angle of the pin shaft 50 with respect to the inner side surfaces 65a and 65b of the holding groove 63, and also to set a play between the through hole 41 and the pin shaft 50 so that both side surfaces of the scribing wheel 40 are pressed against the inner side surfaces 65a and 65b of the holding groove 63 facing each other by a load. Normally, a play of about 0.005 to 0.065 μm is provided between the through hole 41 and the pin shaft 50, but may be set as appropriate according to the play between the

inner side surfaces

65a, 65b of the holding groove 63 and the side surfaces 42a, 42b of the scribing wheel 40.

< verification 3 >

Next, the misalignment of the scribing wheel in the case where the inclination angles of the pin shaft 50 in the horizontal direction and the vertical direction with respect to the direction perpendicular to the inner surface of the holding groove 63 were changed respectively was verified. In this validation, a scribing wheel with a diameter of 2mm was used. The inclination angle of the pin shaft 50 in the horizontal direction with respect to the direction perpendicular to the inner surface of the holding groove 63 was set to 1.5 °, and the inclination angle of the pin shaft 50 in the vertical direction with respect to the direction perpendicular to the inner surface of the holding groove 63 was set to 1 °. The clearance of the holding groove 63 was 0.653mm, and the thickness of the scribing wheel was 0.639 mm. Other verification conditions are the same as those in verification 1.

Fig. 15 is a diagram showing the verification result. Here, three scribe lines were formed on the substrate, and the amount of horizontal shift of the scribe wheel was measured every 2mm from the terminal end side of each scribe line. As in the case of verification 1, measurement was performed using a camera.

In fig. 15, the horizontal axis represents the number of measurements, and the vertical axis represents the offset (μm). In the measurement of the present verification, since the imaging center of the camera and the scribe line forming position are horizontally offset, the offset amounts at the start of the three scribe lines are values reflecting the offset amounts between the imaging center of the camera and the scribe line forming position.

In fig. 15, the thick solid line, the thin solid line, and the broken line are measurement results when the first, second, and third scribe lines are formed, respectively. Referring to fig. 15, when any scribe line is formed, sudden large displacement does not occur in the scribe wheel, and the amplitude of the fine wave is significantly suppressed. When compared with the verification result of verification 1 shown in fig. 7b (verification result using a scribing wheel having a diameter of 2 mm), the measurement result of fig. 15 can suppress large undulation of the waveform. Therefore, it is understood from the measurement results that the scribe line can be formed with higher accuracy than in the case of verification 1.

Fig. 16 shows the measurement result in the case where the scribing wheel is attached to the holder with the front and back thereof reversed as compared with the case of fig. 15 and the same measurement is performed. In this case as well, as in the case of fig. 15, it is possible to suppress large undulations in the waveform as compared with the verification result of verification 1 (verification result using a scribing wheel having a diameter of 2 mm). Therefore, it was found that even when the scribing wheel was assembled with the front and back sides reversed, the scribe line could be formed with very good accuracy.

From the above verification, it was confirmed that the movement of the scribing wheel 40 in the horizontal direction during the scribing operation can be effectively suppressed and the formation of the scribe line can be significantly stabilized by adjusting the inclination angle of the pin shaft 50 with respect to the direction perpendicular to the inner surface of the holding groove 63 not only in the horizontal direction but also in the vertical direction.

When the pin shaft 50 is inclined in the vertical direction with respect to the direction perpendicular to the inner side surface of the holding groove 63, the scribing wheel 40 is rotated in the vertical direction so that the through hole 41 of the scribing wheel 40 is along the pin shaft 50 by the load applied at the time of scribing operation. That is, when the scribing wheel 40 is pressed against the surface H of the substrate 15 by a load in the state of fig. 17 (a), the scribing wheel 40 is inclined as shown in fig. 17 (b). By this inclination, the side surfaces 42a and 42b of the scribing wheel 40 are pressed against the inner side surfaces 65a and 65b of the holding groove 63, and the movement of the scribing wheel 40 is restricted.

When the pin 50 is inclined not only in the horizontal direction but also in the vertical direction with respect to the direction perpendicular to the inner side surface of the holding groove 63, the effect of restricting the movement of the scribing wheel 40 by inclining the pin 50 in the horizontal direction and the effect of restricting the movement of the scribing wheel 40 by inclining the pin 50 in the vertical direction are superimposed. Thus, as in the measurement results of the present verification, it is estimated that the movement of the scribing wheel 40 in the axial direction during the scribing operation can be significantly suppressed, and the scribing line forming accuracy can be further improved.

The inclination angle of the pin 50 in the vertical direction with respect to the direction perpendicular to the inner surface of the holding groove 63 was set to 1 ° in this verification, and 0.5 ° in the verification 1. From these verification results, it is estimated that even when the inclination angle with respect to the direction perpendicular to the inner surface of the holding groove 63 in the vertical direction of the pin shaft 50 is set to further exceed 1 °, the same or better effect as that in the case of 1 ° can be obtained. From the results of the verification of the inclination angle of the pin shaft 50 in the horizontal direction with respect to the direction perpendicular to the inner surface of the holding groove 63, it can be estimated that the smaller the diameter of the scribing wheel is, the larger the optimum angle for suppressing the movement of the scribing wheel 40 in the axial direction is.

On the other hand, when the pin shaft 50 is tilted in the vertical direction, the scribing wheel 40 is pressed in a state of being tilted with respect to the surface H of the substrate 15 as shown in fig. 17 (b). The inclination angle of the scribing wheel 40 with respect to the surface H at this time is increased as the inclination angle of the pin shaft 50 in the vertical direction with respect to the direction perpendicular to the inner side surfaces 65a and 65b of the holding groove 63 is increased. In this case, if the inclination angle of the scribing wheel 40 with respect to the surface H is too large, the accuracy of forming the scribe line may be lowered. In addition, by suppressing the movement of the scribing wheel in the holder groove, the rotational resistance of the scribing wheel at the time of scribing may become large. Therefore, it is preferable to suppress the inclination angle of the pin 50 in the vertical direction with respect to the direction perpendicular to the inner side surfaces 65a and 65b of the holding groove 63 as small as possible.

From the above, it can be said that the inclination angle of the pin shaft 50 in the vertical direction with respect to the direction perpendicular to the

inner side surfaces

65a, 65b of the holding groove 63 is desirably set to about 1.5 ° or less which slightly exceeds 1 ° set in the present verification. When the scribing wheel 40 having another diameter is used, the angle of inclination of the pin shaft 50 in the vertical direction with respect to the direction perpendicular to the inner surface of the holding groove 63 may be set to an optimum angle in the scribing wheel 40 having each diameter within a range of 1.5 ° or less.

< effects of the embodiment >

According to the present embodiment, the following effects are obtained.

As shown in fig. 3 (a) to (d), since the pin shaft 50 is inclined in the horizontal direction with respect to the direction perpendicular to the inner side surfaces 65a and 65b of the holding groove 63, when the scribing wheel 40 is pressed against the surface H of the substrate 15, the side surfaces 42a and 42b of the scribing wheel 40 are pressed against the inner side surfaces 65a and 65b of the holding groove 63 facing each other, respectively. Therefore, when forming the scribe line, the movement of the scribing wheel 40 in the direction parallel to the pin shaft 50 can be suppressed. Therefore, the formation position of the scribe line can be stabilized.

As described in the item of "study of tilt angle", the tilt angle of the pin shaft 50 in the direction parallel to the surface H of the substrate 15 (horizontal direction) with respect to the direction perpendicular to the inner surface of the holding groove 63 is preferably set to 2 ° or less. This can more effectively stabilize the scribe line formation position.

As verified in verifications 1 to 3 above, the pin 50 is preferably inclined in a direction (vertical direction) perpendicular to the surface H of the substrate 15 with respect to a direction perpendicular to the

inner surfaces

65a and 65b of the holding groove 63. Thus, as verified in verifications 1 to 3, the formation position of the scribe line can be further stabilized.

As described above, the inclination angle of the pin shaft 50 in the direction perpendicular to the surface H of the substrate 15 (vertical direction) with respect to the direction perpendicular to the

inner surfaces

65a and 65b of the holding groove 63 is preferably set to 1.5 degrees or less. This can more effectively stabilize the scribe line formation position.

While the embodiments of the present invention have been described above, the present invention is not limited to the above embodiments, and various modifications other than the above embodiments are possible.

For example, in the experiment of embodiment 1, the scribing wheel 40 in which no groove is formed in the ridge line of the blade edge was used, but a scribing wheel in which grooves are formed at regular intervals on the ridge line may be used.

The configuration of the scribing head 20 and the configuration of the scribing apparatus 1 can be appropriately changed. Fig. 1 shows a scribing apparatus in which scribe lines are formed only on one surface of a substrate 15, but the present invention can also be applied to a scribing apparatus in which scribe lines are formed simultaneously on both surfaces of a substrate 15.

The embodiments of the present invention can be modified in various ways as appropriate within the scope of the technical idea shown in the claims.

Claims

1. A scribing apparatus for forming a scribe line on a surface of a substrate,

the scribing means is characterized in that,

the scribing device is provided with:

a holder unit that holds the scribing wheel; and

a scribing head holding the holder unit to be rotatable around an axis perpendicular to the substrate surface,

the holder unit includes:

a holding groove into which the scribing wheel is inserted;

a pin hole formed to cross the holding groove; and

a pin shaft inserted into the through hole of the scribing wheel inserted into the holding groove and the pin hole,

setting a clearance between the through hole and the pin shaft, a clearance between an inner side surface of the holding groove and a side surface of the scribing wheel, and an inclination angle of the pin shaft with respect to the inner side surface of the holding groove to press the both side surfaces of the scribing wheel against the mutually opposed inner side surfaces of the holding groove, respectively, when the scribing wheel is pressed against the surface of the substrate,

the pin hole is formed to be inclined at least in a direction parallel to the substrate surface with respect to a direction perpendicular to the inner side surface of the holding groove,

the pin shaft inserted into the pin hole and the through hole is inclined at least in a direction parallel to the substrate surface with respect to a direction perpendicular to the inner side surface of the holding groove.

2. The scribing device of claim 1,

an inclination angle of the pin shaft in a direction parallel to the substrate surface with respect to a direction perpendicular to the inner side surface of the holding groove is set to 2 ° or less.

3. The scribing device according to claim 1 or 2,

the pin hole is formed so as to be inclined in a direction perpendicular to the substrate surface with respect to a direction perpendicular to the inner surface of the holding groove,

the pin shaft inserted into the pin hole and the through hole is also inclined in a direction perpendicular to the substrate surface with respect to a direction perpendicular to the inner side surface of the holding groove.

4. The scribing device according to claim 3,

an inclination angle of the pin shaft in a direction perpendicular to the substrate surface with respect to a direction perpendicular to the inner side surface of the holding groove is set to 1.5 degrees or less.

5. A holder unit holds a scribing wheel for forming a scribing line,

the holder unit is characterized in that it is,

the holder unit includes:

a holding groove into which the scribing wheel is inserted;

a pin hole formed to cross the holding groove; and

wherein a clearance between the through hole and the pin shaft, a clearance between an inner surface of the holding groove and a side surface of the scribing wheel, and an inclination angle of the pin shaft with respect to the inner surface of the holding groove are set so that both side surfaces of the scribing wheel are respectively pressed against the mutually opposed inner surfaces of the holding groove when the scribing wheel is pressed against the surface of the substrate,