TWI636025B - Marking device and holder unit - Google Patents
Marking device and holder unit Download PDFInfo
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- TWI636025B TWI636025B TW105118822A TW105118822A TWI636025B TW I636025 B TWI636025 B TW I636025B TW 105118822 A TW105118822 A TW 105118822A TW 105118822 A TW105118822 A TW 105118822A TW I636025 B TWI636025 B TW I636025B
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Abstract
本發明係鑒於因刻劃輪沿銷軸方向移動而導致劃線之形成位置偏離此一問題點而完成者,其目的在於提供一種使劃線之形成位置穩定,且不會發生自所期望之位置之偏離的劃線裝置及保持器單元。 The present invention has been made in view of the fact that the position at which the scribing is formed deviates from the problem due to the movement of the scoring wheel in the direction of the pin axis, and the object of the present invention is to provide a stable position for forming the scribing and which does not occur as expected. A scribing device and a retainer unit that deviate from the position.
劃線裝置1之構成為:形成於保持器60之保持部62a、62b的銷孔64a、64b係沿行進方向R形成於互不相同之位置,銷軸50在水平面H中以相對於與行進方向R正交之方向B傾斜之方式配置。因此,若形成劃線,則刻劃輪40之側面42a會朝靠近保持壁65a之方向移動並接觸,從而沿銷軸50之移動受到規制。 The scribing device 1 is configured such that the pin holes 64a, 64b formed in the holding portions 62a, 62b of the retainer 60 are formed at positions different from each other in the traveling direction R, and the pin 50 is opposed to and in the horizontal plane H. The direction R is orthogonal to the direction B. Therefore, if the scribe line is formed, the side surface 42a of the scribe wheel 40 is moved and brought into contact with the holding wall 65a, so that the movement along the pin 50 is regulated.
Description
本發明係關於一種在玻璃基板等之脆性材料基板之分斷中,於在脆性材料基板之表面形成劃線時所使用之劃線裝置及保持器單元。 The present invention relates to a scribing device and a holder unit used for forming a scribe line on a surface of a brittle material substrate in the division of a brittle material substrate such as a glass substrate.
在將玻璃基板等之脆性材料基板分斷為所期望之尺寸時,一般而言係使用劃線裝置。該劃線裝置係將刻劃輪安裝在用於保持刻劃輪之保持器而使用。又,該刻劃輪藉由使圓柱狀之銷軸插入形成於保持器之保持部的銷孔與形成於刻劃輪之側面的貫通孔而被保持於保持部之間(保持槽)。 When a brittle material substrate such as a glass substrate is divided into a desired size, a scribing device is generally used. The scribing device is used by mounting a scoring wheel on a holder for holding a scoring wheel. Further, the scribing wheel is held between the holding portions (holding grooves) by inserting a cylindrical pin into a pin hole formed in the holding portion of the retainer and a through hole formed in the side surface of the scoring wheel.
另外,安裝於保持器之刻劃輪以旋轉自如之方式被保持,藉由在脆性材料基板之表面一邊旋轉一邊前進,而在脆性材料基板處形成劃線。此外,作為如上述之劃線裝置,例如有如專利文獻1所記載之劃線裝置。 Further, the scribe wheel attached to the holder is rotatably held, and the scribe line is formed on the brittle material substrate by advancing while rotating on the surface of the brittle material substrate. Further, as the scribing device as described above, for example, there is a scribing device described in Patent Document 1.
[專利文獻1]國際專利公開WO2007/063979號公報 [Patent Document 1] International Patent Publication WO2007/063979
安裝於保持器之刻劃輪為了如上述般形成劃線,而需要在保持槽內旋轉。因而,保持槽之寬度較刻劃輪之厚度寬出若干,而確保在刻劃輪與保持部之間留有間隙。具體而言,在刻劃輪之厚度為0.65 mm之情形下,保持槽之寬度寬出0.02mm左右。如此,由於在刻劃輪與保持部之間存在有間隙,從而刻劃輪係以旋轉自如之方式被保持。 The scribing wheel mounted on the retainer is required to form a scribe line as described above, and needs to be rotated in the retaining groove. Thus, the width of the retaining groove is somewhat wider than the thickness of the scoring wheel, ensuring that a gap is left between the scoring wheel and the retaining portion. Specifically, the thickness of the scoring wheel is 0.65 In the case of mm, the width of the holding groove is about 0.02 mm wide. Thus, since there is a gap between the scoring wheel and the holding portion, the scoring wheel train is held in a rotatable manner.
另一方面,因該間隙而導致刻劃輪可在保持器槽內沿銷軸移動0.02mm左右。因此在形成劃線時,由於刻劃輪沿銷軸方向移動,導致劃線之形成位置不穩定,故而在先前之劃線裝置中存在劃線自所期望之位置偏離此一問題。 On the other hand, the scoring wheel can move about 0.02 mm along the pin in the retainer groove due to the gap. Therefore, when the scribing is formed, since the scribing wheel moves in the pin axis direction, the position at which the scribing is formed is unstable, and in the prior scribing device, there is a problem that the scribing is deviated from the desired position.
本發明係鑒於因上述之刻劃輪沿銷軸方向移動而劃線之形成位置偏離此一問題點而完成者,其目的在於提供一種使劃線之形成位置穩定,且不會發生自所期望之位置之偏離的劃線裝置及保持器單元。 The present invention has been made in view of the fact that the position of the scribing is deviated from the problem due to the movement of the scribing wheel in the direction of the pin axis as described above, and the object of the present invention is to provide a stable position for forming the scribing without any desired A scribing device and a retainer unit that deviate from the position.
為了達成上述目的,本發明之劃線裝置之特徵在於具備:保持器單元,其具備:刻劃輪;銷軸,其貫通於前述刻劃輪之貫通孔;及保持器,其具有:本體部;一對保持部,其等形成於前述本體部之下方側並將前述刻劃輪予以保持;及銷孔,其分別形成於前述保持部且供前述銷軸插通;以及劃線頭,其以沿鉛垂方向延伸之旋轉軸為中心而以旋轉自如之方式將前述保持器單元予以保持;且前述銷軸在水平面中以從與前述刻劃輪之行進方向正交之方向傾斜之方式配置。 In order to achieve the above object, a scribing apparatus according to the present invention includes: a retainer unit including: a scoring wheel; a pin shaft penetrating through the through hole of the scoring wheel; and a retainer having: a body portion a pair of holding portions formed on a lower side of the body portion and holding the scribing wheel; and pin holes respectively formed in the holding portion and through which the pin shaft is inserted; and a scribing head The holder unit is rotatably held centering on a rotation axis extending in the vertical direction; and the pin shaft is disposed in a horizontal plane so as to be inclined from a direction orthogonal to a traveling direction of the scoring wheel .
根據本發明之劃線裝置,由於銷軸以從與行進方向正交之方向傾斜之方式配置,因而若形成劃線,則刻劃輪朝一者之保持部側靠近。藉此,因刻劃輪與保持部之間之間隙所導致之刻劃輪朝銷軸方向移動此舉受到規制。因而,劃線裝置能夠使劃線之形成位置穩定。 According to the scribing device of the present invention, since the pin shaft is disposed to be inclined from the direction orthogonal to the traveling direction, when the scribing line is formed, the scoring wheel approaches toward the holder side of the one. Thereby, the movement of the scoring wheel in the pin axis direction due to the gap between the scoring wheel and the holding portion is regulated. Therefore, the scribing device can stabilize the formation position of the scribing line.
又,本發明之劃線裝置之特徵在於:前述銷孔在水平面中沿行進方向形成於互不相同之位置。 Further, the scribing device of the present invention is characterized in that the pin holes are formed at positions different from each other in the horizontal direction in the horizontal direction.
根據本發明之劃線裝置,僅憑藉調整保持器之銷孔的形成位置便可發揮上述效果。 According to the scribing device of the present invention, the above effects can be exerted only by adjusting the position at which the pin holes of the retainer are formed.
又,本發明之劃線裝置之特徵在於:在一對前述保持部之間形 成之保持槽係以與前述銷軸正交之方式傾斜而形成。 Further, the scribing device of the present invention is characterized in that a shape is formed between a pair of the aforementioned holding portions The groove is formed so as to be inclined so as to be orthogonal to the pin axis.
根據本發明之劃線裝置,由於在刻劃輪朝一者之保持部側靠近時,刻劃輪與保持部之接觸面積增大,因而能夠抑制刻劃輪之側面的磨耗。 According to the scribing device of the present invention, since the contact area between the scribing wheel and the holding portion is increased when the scoring wheel approaches the holding portion side of one, the wear of the side surface of the scoring wheel can be suppressed.
又,本發明之劃線裝置之特徵在於:前述劃線頭具備保持器單元傾斜機構,該機構係用於使前述銷軸在水平面中從與前述刻劃輪之行進方向正交之方向傾斜者。 Further, the scribing device of the present invention is characterized in that the scribing head is provided with a retainer unit tilting mechanism for tilting the pin shaft in a horizontal plane from a direction orthogonal to a traveling direction of the scoring wheel. .
根據本發明之劃線裝置,由於劃線頭具備保持器單元傾斜機構,因而無需對保持器單元本身進行用於使銷軸傾斜之特別的加工。因此,劃線裝置能夠使用在一般情形下所使用之保持器單元來發揮上述效果。 According to the scribing device of the present invention, since the scribing head is provided with the retainer unit tilting mechanism, it is not necessary to perform special processing for tilting the pin shaft to the retainer unit itself. Therefore, the scribing device can exert the above effects using the holder unit used in the general case.
又,本發明之劃線裝置之特徵在於:前述劃線頭具備安裝有前述旋轉軸之保持器接頭,且前述保持器單元傾斜機構形成於前述保持器接頭。 Further, in the scribing device of the present invention, the scribing head includes a retainer joint to which the rotating shaft is attached, and the retainer unit tilting mechanism is formed in the retainer joint.
根據本發明之劃線裝置,亦可適用於保持器單元經由保持器接頭而被安裝於劃線頭此種構成之劃線裝置。 The scribing device according to the present invention can also be applied to a scribing device in which the retainer unit is attached to the scribing head via the retainer joint.
又,本發明之劃線裝置之特徵在於:前述保持器接頭具備垂直壁,且前述保持器單元傾斜機構係配置於前述垂直壁與前述保持器之間之傾斜構件。又,本發明之劃線裝置之特徵在於:前述保持器單元傾斜機構係配置於前述保持器接頭與前述保持器之間之彈簧構件。又,本發明之劃線裝置之特徵在於:前述保持器單元傾斜機構係安裝於前述保持器接頭之磁鐵。 Further, in the scribing device of the present invention, the retainer joint includes a vertical wall, and the retainer unit tilting mechanism is an inclined member disposed between the vertical wall and the retainer. Further, in the scribing device of the present invention, the retainer unit tilting mechanism is a spring member disposed between the retainer joint and the retainer. Further, the scribing device of the present invention is characterized in that the retainer unit tilting mechanism is a magnet attached to the retainer joint.
根據本發明之劃線裝置,可採用適用於劃線裝置之保持器單元傾斜機構。 According to the scribing device of the present invention, a retainer unit tilting mechanism suitable for the scribing device can be employed.
又,本發明之保持器單元之特徵在於具備:刻劃輪;銷軸,其貫通於前述刻劃輪之貫通孔;及保持器,其具有:本體部;一對保持 部,其等形成於前述本體部之下方側並將前述刻劃輪予以保持;及銷孔,其分別形成於前述保持部且供前述銷軸插通;且前述銷孔在水平面中沿行進方向形成於互不相同之位置;前述銷軸在水平面中以從與前述刻劃輪之行進方向正交之方向傾斜之方式配置。 Further, the retainer unit of the present invention is characterized by comprising: a scoring wheel; a pin shaft penetrating through the through hole of the scoring wheel; and a retainer having: a body portion; a pair of holding a portion formed on a lower side of the body portion and holding the scribing wheel; and pin holes respectively formed in the retaining portion and through which the pin shaft is inserted; and the pin hole is in a horizontal direction in a traveling direction The pin shafts are disposed at positions different from each other; the pin shafts are disposed in a horizontal plane so as to be inclined from a direction orthogonal to a traveling direction of the scribing wheel.
藉由使用具備本發明之保持器單元之劃線裝置形成劃線,由於銷軸係以從與行進方向正交之方向傾斜之方式配置,故刻劃輪朝一者之保持部側靠近。藉此,因刻劃輪與保持部之間之間隙所導致之刻劃輪朝銷軸方向移動此舉受到規制。 By forming the scribe line by using the scribing device provided with the holder unit of the present invention, since the pin shaft is disposed to be inclined from the direction orthogonal to the traveling direction, the scoring wheel approaches toward the holder side of the one. Thereby, the movement of the scoring wheel in the pin axis direction due to the gap between the scoring wheel and the holding portion is regulated.
又,本發明之保持器單元之特徵在於:在一對前述保持部之間形成之保持槽係以與前述銷軸正交之方式傾斜而形成。 Moreover, the retainer unit of the present invention is characterized in that the holding groove formed between the pair of the holding portions is formed to be inclined so as to be orthogonal to the pin shaft.
根據本發明之保持器單元,由於在刻劃輪朝一者之保持部側靠近時,刻劃輪與保持部之接觸面積增大,因而能夠抑制刻劃輪之側面的磨耗。 According to the retainer unit of the present invention, since the contact area of the scribing wheel and the holding portion is increased when the scoring wheel approaches the holding portion side of one, the wear of the side surface of the scoring wheel can be suppressed.
1‧‧‧劃線裝置 1‧‧‧ scribe device
10‧‧‧移動台 10‧‧‧Mobile Station
11‧‧‧滾珠螺桿 11‧‧‧Ball screw
12‧‧‧導軌 12‧‧‧ rails
13‧‧‧馬達 13‧‧‧Motor
14‧‧‧台 14‧‧‧
15‧‧‧脆性材料基板 15‧‧‧Battery material substrate
16‧‧‧CCD照相機 16‧‧‧CCD camera
17‧‧‧橋部 17‧‧ ‧Bridge
18a‧‧‧支柱 18a‧‧‧ pillar
18b‧‧‧支柱 18b‧‧‧ pillar
19‧‧‧引導件 19‧‧‧Guide
20‧‧‧劃線頭 20‧‧‧Drawing head
21‧‧‧保持器接頭 21‧‧‧Retainer connector
22‧‧‧安裝部 22‧‧‧Installation Department
22a‧‧‧垂直壁 22a‧‧‧ vertical wall
22b‧‧‧水平壁 22b‧‧‧ horizontal wall
23‧‧‧旋轉軸 23‧‧‧Rotary axis
24a‧‧‧軸承 24a‧‧‧ bearing
24b‧‧‧軸承 24b‧‧‧ Bearing
25‧‧‧螺絲孔 25‧‧‧ screw holes
30‧‧‧保持器單元 30‧‧‧keeper unit
31‧‧‧安裝螺釘 31‧‧‧Installation screws
40‧‧‧刻劃輪 40‧‧‧scribed wheel
41‧‧‧貫通孔 41‧‧‧through holes
42a‧‧‧側面 42a‧‧‧ side
42b‧‧‧側面 42b‧‧‧ side
50‧‧‧銷軸 50‧‧‧ pin
51‧‧‧尖頭部 51‧‧‧ pointed head
60‧‧‧保持器 60‧‧‧keeper
61‧‧‧本體部 61‧‧‧ Body Department
62a‧‧‧保持部 62a‧‧‧ Keeping Department
62b‧‧‧保持部 62b‧‧‧ Keeping Department
63‧‧‧保持槽 63‧‧‧ Keep the slot
64a‧‧‧銷孔 64a‧‧ pin hole
64b‧‧‧銷孔 64b‧‧‧ pinhole
65a‧‧‧保持壁 65a‧‧‧ Keep the wall
65b‧‧‧保持壁 65b‧‧‧ Keep the wall
66‧‧‧螺絲孔 66‧‧‧ screw holes
68a‧‧‧扣件 68a‧‧‧fasteners
68b‧‧‧扣件 68b‧‧‧fasteners
69a‧‧‧螺釘 69a‧‧‧screw
69b‧‧‧螺釘 69b‧‧‧screw
130‧‧‧保持器單元 130‧‧‧keeper unit
131‧‧‧安裝螺釘 131‧‧‧Mounting screws
140‧‧‧刻劃輪 140‧‧‧scribed wheel
142a‧‧‧側面 142a‧‧‧ side
150‧‧‧銷軸 150‧‧‧ pin
160‧‧‧保持器 160‧‧‧keeper
162a‧‧‧保持部 162a‧‧‧ Keeping Department
163‧‧‧保持槽 163‧‧‧ Keep the slot
165a‧‧‧保持壁 165a‧‧‧ Keep the wall
221‧‧‧保持器接頭 221‧‧‧Retainer connector
222a‧‧‧垂直壁 222a‧‧‧ vertical wall
230‧‧‧保持器單元 230‧‧‧keeper unit
250‧‧‧銷軸 250‧‧‧ pin
260‧‧‧保持器 260‧‧‧ keeper
261‧‧‧本體部 261‧‧‧ Body Department
262b‧‧‧保持部 262b‧‧‧ Keeping Department
268b‧‧‧扣件 268b‧‧‧fasteners
269b‧‧‧螺釘 269b‧‧‧screw
280‧‧‧傾斜構件 280‧‧‧ tilting members
321‧‧‧保持器接頭 321‧‧‧Retainer connector
322b‧‧‧水平壁 322b‧‧‧ horizontal wall
330‧‧‧保持器單元 330‧‧‧keeper unit
340‧‧‧刻劃輪 340‧‧‧scribed wheels
342a‧‧‧側面 342a‧‧‧ side
350‧‧‧銷軸 350‧‧‧ pin
360‧‧‧保持器 360‧‧‧ Keeper
361‧‧‧本體部 361‧‧‧ Body Department
365a‧‧‧保持壁 365a‧‧‧ Keep the wall
380‧‧‧彈簧構件 380‧‧ ‧ spring components
381a‧‧‧鉤掛部 381a‧‧‧Hooking Department
381b‧‧‧鉤掛部 381b‧‧‧hook
421‧‧‧保持器接頭 421‧‧‧Retainer connector
422b‧‧‧水平壁 422b‧‧‧ horizontal wall
430‧‧‧保持器單元 430‧‧‧keeper unit
440‧‧‧刻劃輪 440‧‧‧scribed wheels
442a‧‧‧側面 442a‧‧‧ side
450‧‧‧銷軸 450‧‧‧ pin
460‧‧‧保持器 460‧‧‧ keeper
461‧‧‧本體部 461‧‧‧ Body Department
465a‧‧‧保持壁 465a‧‧‧ Keep the wall
480‧‧‧磁鐵 480‧‧‧ magnet
481a‧‧‧固定部 481a‧‧‧Fixed Department
481b‧‧‧磁鐵 481b‧‧‧ magnet
A‧‧‧箭頭 A‧‧‧ arrow
B‧‧‧方向 B‧‧‧ directions
H‧‧‧水平面/虛線 H‧‧‧Horizontal/dotted line
R‧‧‧行進方向 R‧‧‧direction of travel
S‧‧‧一點鏈線 S‧‧‧Little chain
圖1係實施方式1之劃線裝置之概略圖。 Fig. 1 is a schematic view showing a scribing apparatus of the first embodiment.
圖2(A)係實施方式1之保持器單元之前視圖;圖2(B)係保持器單元之側視圖;圖2(C)係在俯視觀察下之保持器單元之概念圖。 Fig. 2(A) is a front view of the retainer unit of the first embodiment; Fig. 2(B) is a side view of the retainer unit; and Fig. 2(C) is a conceptual view of the retainer unit in a plan view.
圖3係實施方式2之保持器單元之在俯視觀察下之概念圖。 Fig. 3 is a conceptual view of the retainer unit of the second embodiment in a plan view.
圖4係實施方式3之保持器單元之在俯視觀察下之概念圖。 Fig. 4 is a conceptual view of the retainer unit of the third embodiment in a plan view.
圖5(A)係實施方式4之保持器單元之側視圖;圖5(B)係在俯視觀察下之保持器單元之概念圖。 Fig. 5(A) is a side view of the retainer unit of the fourth embodiment; Fig. 5(B) is a conceptual view of the retainer unit in a plan view.
圖6(A)係實施方式5之保持器單元之側視圖;圖6(B)係在俯視觀察下之保持器單元之概念圖。 Fig. 6(A) is a side view of the retainer unit of the fifth embodiment; Fig. 6(B) is a conceptual view of the retainer unit in a plan view.
以下,使用圖式說明本發明之實施方式。但,以下所示之實施方式係顯示用於將本發明之技術思想具體化之一例,而並非意圖將本 發明特定為該實施方式。本發明亦可適用於申請專利範圍內所包含之其他的實施方式。 Hereinafter, embodiments of the present invention will be described using the drawings. However, the embodiments shown below are examples for embodying the technical idea of the present invention, and are not intended to be The invention is specific to this embodiment. The invention is also applicable to other embodiments included in the scope of the patent application.
圖1係本發明之實施方式之劃線裝置1的概略圖。劃線裝置1具備移動台10。由於移動台10與滾珠螺桿11螺合,而該滾珠螺桿11藉由馬達之驅動而旋轉,因而該移動台10可沿一對導軌12在Y軸方向上移動。 Fig. 1 is a schematic view of a scribing apparatus 1 according to an embodiment of the present invention. The scribing device 1 includes a mobile station 10. Since the moving table 10 is screwed with the ball screw 11, and the ball screw 11 is rotated by the driving of the motor, the moving table 10 can be moved in the Y-axis direction along the pair of guide rails 12.
在移動台10之上表面設置有馬達13。馬達13使位於上部之載台14在XY平面內旋轉而定位於特定角度。可利用馬達13而水平旋轉之載台14具備未圖示之真空吸附機構,由該真空吸附機構將載置於載台14上之脆性材料基板15予以保持。 A motor 13 is provided on the upper surface of the mobile station 10. The motor 13 rotates the upper stage 14 in the XY plane to be positioned at a specific angle. The stage 14 which is horizontally rotatable by the motor 13 is provided with a vacuum suction mechanism (not shown), and the vacuum adsorption mechanism holds the brittle material substrate 15 placed on the stage 14.
該脆性材料基板15為玻璃基板、包含低溫燒成陶瓷或高溫燒成陶瓷之陶瓷基板、矽基板、化合物半導體基板、藍寶石基板、及石英基板等。又,脆性材料基板15亦可為在基板之表面或內部附著或包含薄膜或半導體材料者。又,脆性材料基板15,即便在其表面附著有脆性材料以外之薄膜等亦無妨。 The brittle material substrate 15 is a glass substrate, a ceramic substrate including a low-temperature fired ceramic or a high-temperature fired ceramic, a tantalum substrate, a compound semiconductor substrate, a sapphire substrate, a quartz substrate, or the like. Further, the brittle material substrate 15 may be a film or a semiconductor material attached or contained on the surface or inside of the substrate. Further, the brittle material substrate 15 may have a film or the like other than a brittle material adhered to the surface thereof.
劃線裝置1在載置於載台14之脆性材料基板15之上方具備二台CCD照相機16,其等對形成於該脆性材料基板15之表面之對準標記予以攝像。橋部17以跨於移動台10與其上部之載台14之方式架設於支柱18a、18b。 The scribing device 1 is provided with two CCD cameras 16 above the brittle material substrate 15 placed on the stage 14, and the like, and the alignment marks formed on the surface of the brittle material substrate 15 are imaged. The bridge portion 17 is stretched over the pillars 18a and 18b so as to straddle the mobile station 10 and the upper stage 14 thereof.
在橋部17處安裝有引導件19,劃線頭20以由該引導件19導引而沿X軸方向移動之方式設置。劃線頭20在下端具備保持器接頭21。於保持器60處保持有刻劃輪40的保持器單元30經由保持器接頭21而被安裝於劃線頭20。 A guide 19 is attached to the bridge portion 17, and the scribing head 20 is disposed to be guided by the guide 19 to move in the X-axis direction. The scribing head 20 is provided with a retainer joint 21 at its lower end. The holder unit 30 holding the scoring wheel 40 at the holder 60 is attached to the scribing head 20 via the holder joint 21.
此處,對使用劃線裝置1在脆性材料基板15形成劃線之步驟之概略予以說明。首先,在安裝於劃線頭20之保持器60處安裝刻劃輪40。 而且,劃線裝置1利用一對CCD照相機16進行脆性材料基板15之定位。其次,劃線裝置1使劃線頭20移動至特定之位置,並對刻劃輪40施加特定之荷重,而使其與脆性材料基板15接觸。而後,劃線裝置1藉由使劃線頭20沿X軸方向移動,而在脆性材料基板15之表面形成特定之劃線。此外,劃線裝置1根據需要使載台14轉動或沿Y軸方向移動,而與上述之情形相同地形成劃線。 Here, an outline of a step of forming a scribe line on the brittle material substrate 15 using the scribing device 1 will be described. First, the scoring wheel 40 is mounted at the holder 60 mounted to the scribing head 20. Further, the scribing device 1 performs positioning of the brittle material substrate 15 by a pair of CCD cameras 16. Next, the scribing device 1 moves the scribing head 20 to a specific position, and applies a specific load to the scoring wheel 40 to bring it into contact with the brittle material substrate 15. Then, the scribing device 1 forms a specific scribe line on the surface of the brittle material substrate 15 by moving the scribing head 20 in the X-axis direction. Further, the scribing device 1 rotates the stage 14 or moves in the Y-axis direction as needed, and forms a scribe line as in the above case.
其次,針對保持器單元30之細節,使用附圖進行說明。圖2(A)係保持器單元30之朝橫向顯示之前視圖;圖2(B)係保持器單元30之側視圖;圖2(C)係以圖2(B)之箭頭A所示之在俯視觀察下之保持器單元30的概念圖。此外,在圖2(A)、圖2(B)中,直接安裝有保持器單元30之保持器接頭21一併被圖示。又,圖2(C)由於係用於顯示後述之水平面H中之銷軸50之方向的概念圖,因而針對保持器單元30省略一部分圖式。 Next, the details of the holder unit 30 will be described using the drawings. Fig. 2(A) is a front view showing the holder unit 30 in the lateral direction; Fig. 2(B) is a side view of the holder unit 30; Fig. 2(C) is shown by the arrow A in Fig. 2(B) A conceptual diagram of the holder unit 30 in a plan view. Further, in FIGS. 2(A) and 2(B), the holder joint 21 to which the holder unit 30 is directly attached is collectively shown. 2(C) is a conceptual diagram for indicating the direction of the pin 50 in the horizontal plane H to be described later, and therefore a part of the drawing is omitted for the holder unit 30.
保持器單元30係由刻劃輪40、銷軸50、及保持器60一體化而成者。保持器單元30,如圖2(B)所示,利用安裝螺釘31而被安裝於保持器接頭21。 The holder unit 30 is formed by integrating the scribing wheel 40, the pin shaft 50, and the retainer 60. The holder unit 30 is attached to the holder joint 21 by a mounting screw 31 as shown in FIG. 2(B).
此處,保持器接頭21由以下部分構成:安裝部22,其包含垂直壁22a與水平壁22b,且剖面形狀為倒L字狀;旋轉軸23,其自安裝部22之水平壁22b之頂面側起沿鉛垂方向延伸;及2個軸承24a、24b,其等插通有旋轉軸23。 Here, the retainer joint 21 is composed of a mounting portion 22 including a vertical wall 22a and a horizontal wall 22b and having an inverted L-shape in cross-sectional shape, and a rotating shaft 23 from the top of the horizontal wall 22b of the mounting portion 22. The surface side extends in the vertical direction; and two bearings 24a, 24b are inserted through the rotating shaft 23.
安裝於保持器接頭21之保持器單元30係保持器單元30之側面與安裝部22之垂直壁22a接觸,且保持器單元30之上表面與水平壁22b接觸。又,在垂直壁22a處,如圖2(A)所示,形成有供安裝螺釘31插入之螺絲孔25。 The holder unit 30 mounted on the holder joint 21 is in contact with the vertical wall 22a of the mounting portion 22 on the side of the holder unit 30, and the upper surface of the holder unit 30 is in contact with the horizontal wall 22b. Further, at the vertical wall 22a, as shown in Fig. 2(A), a screw hole 25 into which the mounting screw 31 is inserted is formed.
而且,保持器接頭21以使安裝於安裝部22之保持器單元30自劃線頭20露出之方式,固定於劃線頭20之內部。此時,固定於保持器接 頭21之保持器單元30以旋轉軸23為中心可自如旋轉。此外,一點鏈線S表示旋轉軸23之軸中心。又,圖2(A)之虛線H表示與旋轉軸23正交之水平面,該水平面H為與脆性材料基板15之表面平行的面。 Further, the retainer joint 21 is fixed to the inside of the scribing head 20 such that the retainer unit 30 attached to the attaching portion 22 is exposed from the scribing head 20. At this time, fixed to the holder The holder unit 30 of the head 21 is rotatable around the rotation shaft 23. Further, the one-point chain line S represents the axis center of the rotary shaft 23. Further, a broken line H in FIG. 2(A) indicates a horizontal plane orthogonal to the rotation axis 23, and the horizontal plane H is a surface parallel to the surface of the brittle material substrate 15.
又,在使用劃線裝置1於脆性材料基板15之表面形成劃線時,刻劃輪40以沿在圖2等圖式中所示之箭頭R之方向前進之方式旋轉。此外,劃線裝置1即便為以下之構成亦無妨:不使用保持器接頭21,而保持器單元30本身具備旋轉軸23與軸承24a、24b。 Further, when the scribe line is formed on the surface of the brittle material substrate 15 by using the scribing device 1, the scribing wheel 40 is rotated in the direction of the arrow R shown in the drawing of Fig. 2 or the like. Further, the scribing device 1 may have the following configuration: the retainer joint 21 is not used, and the retainer unit 30 itself includes the rotating shaft 23 and the bearings 24a and 24b.
刻劃輪40係由例如燒結金剛石或超硬合金等形成之圓板狀的構件。又,用於供銷軸50貫通於刻劃輪40之貫通孔41形成於圓板之兩側面42a、42b之中心。又,在刻劃輪40處形成稜線之V字狀之刀刃係形成於外周部。又,本實施方式之刻劃輪40,厚度約為0.65mm,外徑約為2.0mm,貫通孔41之直徑約為0.8mm,刀刃之刃尖角約為130°。 The scribing wheel 40 is a disk-shaped member formed of, for example, sintered diamond or cemented carbide. Further, a through hole 41 for the supply pin shaft 50 to penetrate the scribing wheel 40 is formed at the center of both side faces 42a and 42b of the disc. Further, a V-shaped blade forming a ridge line at the scribing wheel 40 is formed on the outer peripheral portion. Further, the scribing wheel 40 of the present embodiment has a thickness of about 0.65 mm, an outer diameter of about 2.0 mm, a through hole 41 having a diameter of about 0.8 mm, and a blade edge angle of about 130°.
銷軸50係由例如燒結金剛石與超硬合金等形成之圓柱狀的構件,一端為尖頭形狀之尖頭部51。又,本實施方式之銷軸50之直徑約為0.8mm。 The pin shaft 50 is a cylindrical member formed of, for example, sintered diamond, a cemented carbide, or the like, and has a tip end 51 having a pointed shape at one end. Further, the pin shaft 50 of the present embodiment has a diameter of about 0.8 mm.
保持器60包含由不銹鋼或碳工具鋼構成之本體部61。本體部61,如圖2(B)所示,下方側在側視觀察下為寬度朝向下端變窄之梯形。又,本體部61之梯形部分分別形成有保持部62a、62b,在保持部62a、62b之間形成保持槽63。此外,保持器60雖然係以同一基材構成本體部61,但即便為例如以下之構成亦無妨:藉由將分別具有保持部62a、62b之2個基材固定而形成本體部61。 The holder 60 includes a body portion 61 made of stainless steel or carbon tool steel. As shown in FIG. 2(B), the main body portion 61 has a trapezoidal shape in which the width is narrowed toward the lower end in a side view. Further, the trapezoidal portions of the main body portion 61 are respectively formed with holding portions 62a and 62b, and a holding groove 63 is formed between the holding portions 62a and 62b. Further, although the holder 60 is configured by the main base portion 61, the main body portion 61 may be formed by fixing the two base materials each having the holding portions 62a and 62b, for example, in the following configuration.
在保持部62a、62b形成有供銷軸50插通之銷孔64a、64b。並且,針對形成有銷孔64a、64b之位置,將於下文進一步敘述其細節。刻劃輪40之側面42a與保持部62a對向,側面42b與保持部62b對向。與側面42a對向之保持部62a的對向面為保持壁65a,與側面42b對向之保持部62b的對向面為保持壁65b。 Pin holes 64a and 64b through which the pin shaft 50 is inserted are formed in the holding portions 62a and 62b. Further, the details of the positions at which the pin holes 64a, 64b are formed will be further described below. The side surface 42a of the scoring wheel 40 opposes the holding portion 62a, and the side surface 42b faces the holding portion 62b. The opposing surface of the holding portion 62a opposed to the side surface 42a is the holding wall 65a, and the opposing surface of the holding portion 62b opposed to the side surface 42b is the holding wall 65b.
在本體部61之上部形成有供安裝螺釘31插入之螺絲孔66。又,扣件68a藉由螺釘69a被安裝於保持部62a側,扣件68b藉由螺釘69b被安裝於保持部62b側。該扣件68a、68b係用於使銷孔64a、64b閉塞者。 A screw hole 66 into which the mounting screw 31 is inserted is formed in the upper portion of the body portion 61. Further, the fastener 68a is attached to the holding portion 62a side by a screw 69a, and the fastener 68b is attached to the holding portion 62b side by a screw 69b. The fasteners 68a, 68b are used to occlude the pin holes 64a, 64b.
如上述之劃線裝置1具備:保持器單元30,其具有刻劃輪40、貫通於刻劃輪40之貫通孔41之銷軸50、及在設置於本體部61之下方側之保持部62a、62b之銷孔64a、64b處被銷軸50插通之保持器60;以及保持器接頭21,其以旋轉軸23為中心而以旋轉自如之方式將保持器單元30予以保持且固定於劃線頭20內部。 The scribing device 1 described above includes a holder unit 30 having a scoring wheel 40, a pin shaft 50 penetrating through the through hole 41 of the scribing wheel 40, and a holding portion 62a provided on the lower side of the main body portion 61. a retainer 60 through which the pin 50 is inserted at the pin holes 64a, 64b of 62b; and a retainer joint 21 that rotatably holds and holds the retainer unit 30 around the rotary shaft 23 Inside the thread head 20.
又,該劃線裝置1在水平面H中如圖2(C)所示般係以相對於與行進方向R正交之方向B傾斜之方式配置銷軸50。具體而言,雖然形成於保持器60之保持部62a、62b之銷孔64a、64b一般而言係沿行進方向R在相同之位置以呈對面之方式形成,但在本實施方式中,如圖2(C)所示般係沿行進方向R形成於互不相同之位置。 Further, in the horizontal plane H, the scribing device 1 is disposed so as to be inclined with respect to the direction B orthogonal to the traveling direction R as shown in FIG. 2(C). Specifically, although the pin holes 64a, 64b formed in the holding portions 62a, 62b of the holder 60 are generally formed in the opposite direction at the same position along the traveling direction R, in the present embodiment, as shown in the figure 2 (C) is formed in a mutually different position along the traveling direction R.
因而,插通於銷孔64a、64b之銷軸50以相對於與行進方向R正交之方向B傾斜之方式配置。 Therefore, the pin shaft 50 inserted through the pin holes 64a, 64b is disposed to be inclined with respect to the direction B orthogonal to the traveling direction R.
如是,若使用如上述之劃線裝置1在脆性材料基板15之表面形成劃線,則因受到來自脆性材料基板15之反作用力,刻劃輪40之側面42a側朝靠近保持壁65a之方向移動,而與保持壁65a接觸。 If a scribing line is formed on the surface of the brittle material substrate 15 by using the scribing device 1 as described above, the side surface 42a side of the scribing wheel 40 moves toward the holding wall 65a due to the reaction force from the brittle material substrate 15. And in contact with the retaining wall 65a.
因此,刻劃輪40之側面42a與保持壁65a之間隙為零。因而,在形成劃線時,刻劃輪40沿銷軸50之移動受到規制。如是,劃線裝置1之劃線之形成位置變得穩定,而可在所期望之位置形成劃線。 Therefore, the gap between the side surface 42a of the scoring wheel 40 and the retaining wall 65a is zero. Thus, the movement of the scoring wheel 40 along the pin 50 is regulated when the scribing is formed. If so, the formation position of the scribe line of the scribing device 1 becomes stable, and a scribe line can be formed at a desired position.
其次,針對其他之實施方式,使用圖式進行說明。圖3係在俯視觀察下之保持器單元130的概念圖。並且,就與實施方式1之保持器單元30相同的構成,省略其符號與說明。 Next, for other embodiments, the description will be made using the drawings. Figure 3 is a conceptual diagram of the holder unit 130 in a plan view. In addition, the same configurations as those of the holder unit 30 of the first embodiment are omitted, and the symbols and description thereof are omitted.
實施方式1之保持器單元30,僅位於保持槽63之銷軸50以相對於與行進方向R正交之方向B傾斜之方式配置。另一方面,本實施方式之保持器單元130以如下之方式形成:配合銷軸150之傾斜,保持槽163亦作傾斜。 In the retainer unit 30 of the first embodiment, only the pin shaft 50 located in the holding groove 63 is disposed to be inclined with respect to the direction B orthogonal to the traveling direction R. On the other hand, the holder unit 130 of the present embodiment is formed in such a manner that the inclination of the pin 15 is engaged, and the holding groove 163 is also inclined.
若使用具備如上述之保持器單元130之劃線裝置1形成劃線,則在刻劃輪140之側面142a側朝靠近保持壁165a之方向移動時,刻劃輪140之側面142a側與保持壁165a之接觸面積增大。又,由於使保持槽163之傾斜角度和刻劃輪140之側面與行進方向R之間之角度為一致,因而刻劃輪140之側面142a側與保持壁165a以面接觸。 When the scribe line is formed using the scribing device 1 having the holder unit 130 as described above, the side surface 142a side of the scribing wheel 140 and the retaining wall are moved toward the side closer to the retaining wall 165a on the side of the side surface 142a of the scribing wheel 140. The contact area of 165a is increased. Further, since the inclination angle of the holding groove 163 and the angle between the side surface of the scribing wheel 140 and the traveling direction R are made uniform, the side surface 142a side of the scribing wheel 140 is in surface contact with the holding wall 165a.
因而,刻劃輪140之側面142a與保持部162a之保持壁165a的磨耗係均一地進行,而可抑制部件之更換頻度。 Therefore, the wear of the side surface 142a of the scribing wheel 140 and the holding wall 165a of the holding portion 162a is uniformly performed, and the frequency of replacement of the components can be suppressed.
其次,針對其他之實施方式,使用圖式進行說明。圖4係在俯視觀察下之安裝於保持器接頭221之保持器單元230的概念圖。並且,針對與實施方式1相同之構成,省略其符號與說明。 Next, for other embodiments, the description will be made using the drawings. 4 is a conceptual diagram of the holder unit 230 mounted to the holder joint 221 in a plan view. Further, the same configurations as those in the first embodiment are omitted and their symbols and descriptions are omitted.
為了在水平面H中以相對於與行進方向R正交之方向B傾斜之方式配置銷軸250,本實施方式之劃線裝置1為保持器接頭221具備保持器單元傾斜機構之構成。 In order to arrange the pin 250 so as to be inclined with respect to the direction B orthogonal to the traveling direction R in the horizontal plane H, the scribing device 1 of the present embodiment has a configuration in which the retainer joint 221 is provided with a retainer unit tilting mechanism.
具體而言,保持器單元傾斜機構係固定配置於保持器接頭221之垂直壁222a與保持器單元230之間的傾斜構件280。 Specifically, the retainer unit tilting mechanism fixes the tilting member 280 disposed between the vertical wall 222a of the retainer joint 221 and the retainer unit 230.
該傾斜構件280,係包含金屬製之構件,且如圖4所示般為相對於行進方向R寬度自前方朝向後方逐漸變窄之三角狀的構件。 The inclined member 280 includes a member made of metal, and as shown in FIG. 4, is a triangular member that gradually narrows from the front toward the rear with respect to the traveling direction R width.
該傾斜構件280係在本體部261之保持部262b側之側面與垂直壁222a之間,以不接觸扣件268b與螺釘269b之方式在前視觀察下配置於較螺釘269b更靠上方。又,傾斜構件280形成有螺絲孔(未圖示),藉由將保持器260安裝於垂直壁222a之安裝螺釘(未圖示)而被固定。 The inclined member 280 is disposed between the side surface of the main body portion 261 on the side of the holding portion 262b and the vertical wall 222a, and is disposed above the screw 269b in a front view without contacting the fastener 268b and the screw 269b. Further, the inclined member 280 is formed with a screw hole (not shown), and is fixed by a mounting screw (not shown) for attaching the retainer 260 to the vertical wall 222a.
如此,由於藉由採用保持器接頭221具備保持器單元傾斜機構之構成,而無需對保持器單元230本身實施用於使銷軸250傾斜之加工,故可原樣使用一般的保持器單元230。 As described above, since the retainer joint 221 is provided with the retainer unit tilt mechanism, it is not necessary to perform the processing for tilting the pin 250 to the retainer unit 230 itself, so that the general retainer unit 230 can be used as it is.
其次,針對其他之實施方式,使用圖式進行說明。圖5(A)係安裝於保持器接頭321之保持器單元330的側視圖;圖5(B)係在俯視觀察下之保持器單元330之概念圖。 Next, for other embodiments, the description will be made using the drawings. Fig. 5(A) is a side view of the holder unit 330 attached to the holder joint 321, and Fig. 5(B) is a conceptual view of the holder unit 330 in a plan view.
本實施方式之劃線裝置1係與實施方式3相同,為保持器接頭321具備保持器單元傾斜機構之構成。 The scribing device 1 of the present embodiment is the same as that of the third embodiment, and has a configuration in which the retainer joint 321 includes a retainer unit tilting mechanism.
另一方面,本實施方式之保持器單元傾斜機構係配置於保持器接頭321與保持器單元330之間的彈簧構件380。具體而言,彈簧構件380之配置係將端部分別鉤掛於設置在保持器接頭321之水平壁322b之前方的鉤掛部381a與設置在保持器360之本體部361前方的鉤掛部381b。而且,鉤掛部381a與381b係沿行進方向R以自同一線上稍微偏離之方式設置。 On the other hand, the retainer unit tilting mechanism of the present embodiment is a spring member 380 disposed between the retainer joint 321 and the retainer unit 330. Specifically, the spring member 380 is disposed such that the end portions are respectively hooked to the hook portion 381a disposed in front of the horizontal wall 322b of the holder joint 321 and the hook portion 381b disposed in front of the body portion 361 of the holder 360. . Further, the hook portions 381a and 381b are provided to be slightly offset from the same line in the traveling direction R.
因而,利用彈簧構件380之彈性力,如圖5(B)所示般保持器單元330稍許傾斜。因保持器單元330傾斜,銷軸350亦相對於與行進方向R正交之方向B傾斜。 Thus, the retainer unit 330 is slightly inclined as shown in Fig. 5(B) by the elastic force of the spring member 380. Since the retainer unit 330 is inclined, the pin 350 is also inclined with respect to the direction B orthogonal to the traveling direction R.
如是,若使用劃線裝置1在脆性材料基板15之表面形成劃線,則刻劃輪340之側面342a側朝靠近保持壁365a之方向移動,而與保持壁365a接觸。因此,側面342a與保持壁365a之間隙為零,從而在形成劃線時刻劃輪340沿銷軸350之移動受到規制。 If a scribe line is formed on the surface of the brittle material substrate 15 by using the scribing device 1, the side surface 342a side of the scribing wheel 340 moves in the direction of the holding wall 365a, and comes into contact with the holding wall 365a. Therefore, the gap between the side surface 342a and the retaining wall 365a is zero, so that the movement of the row wheel 340 along the pin 350 is regulated at the time of forming the scribing.
其次,針對其他之實施方式,使用圖式進行說明。圖6(A)係安裝於保持器接頭421之保持器單元430的側視圖;圖6(B)係在俯視觀察下之保持器單元430之概念圖。 Next, for other embodiments, the description will be made using the drawings. Fig. 6(A) is a side view of the holder unit 430 attached to the holder joint 421; Fig. 6(B) is a conceptual view of the holder unit 430 in a plan view.
本實施方式之劃線裝置1係與實施方式3、實施方式4相同,為保持器接頭421具備保持器單元傾斜機構之構成。 The scribing device 1 of the present embodiment is the same as the third embodiment and the fourth embodiment, and has a configuration in which the retainer joint 421 includes a retainer unit tilting mechanism.
另一方面,本實施方式之保持器單元傾斜機構係安裝於保持器接頭421之磁鐵480。具體而言,磁鐵480係安裝於固定部481a,該固定部481a設置於保持器接頭421之水平壁422b之前方。 On the other hand, the retainer unit tilt mechanism of the present embodiment is attached to the magnet 480 of the holder joint 421. Specifically, the magnet 480 is attached to the fixing portion 481a, which is provided in front of the horizontal wall 422b of the holder joint 421.
又,在本實施方式中,保持器460之本體部461係例如由如奧氏體系不銹鋼之非磁性材料形成。另外,在保持器460之本體部461前方內置有磁鐵481b。 Further, in the present embodiment, the body portion 461 of the retainer 460 is formed of, for example, a non-magnetic material such as austenitic stainless steel. Further, a magnet 481b is built in front of the main body portion 461 of the holder 460.
因而,藉由保持器單元430所具備之磁鐵481b被磁鐵480吸引,而如圖6(B)所示般保持器單元430稍許傾斜。因保持器單元430傾斜,銷軸450亦相對於與行進方向R正交之方向B傾斜。 Therefore, the magnet 481b provided in the holder unit 430 is attracted by the magnet 480, and the holder unit 430 is slightly inclined as shown in Fig. 6(B). Since the retainer unit 430 is inclined, the pin 450 is also inclined with respect to the direction B orthogonal to the traveling direction R.
如是,若使用劃線裝置1在脆性材料基板15之表面形成劃線,則刻劃輪440之側面442a側朝靠近保持壁465a之方向移動,而與保持壁465a接觸。因此,側面442a與保持壁465a之間隙為零,從而在形成劃線時刻劃輪440沿銷軸450之移動受到規制。 If a scribe line is formed on the surface of the brittle material substrate 15 by using the scribing device 1, the side surface 442a side of the scribing wheel 440 moves in the direction of the holding wall 465a, and comes into contact with the holding wall 465a. Therefore, the gap between the side surface 442a and the retaining wall 465a is zero, so that the movement of the row wheel 440 along the pin 450 is regulated at the time of forming the scribing.
又,如實施方式3~5般,由於藉由劃線裝置1具備保持器單元傾斜機構之構成,而無需對保持器單元自身實施使銷軸傾斜之加工,故可大致原樣使用在一般情形下所使用之保持器單元。此外,雖然在實施方式3~5中,係顯示保持器接頭具備保持器單元傾斜機構之構成,但例如在劃線裝置1為不具備保持器接頭之構成之情形下,即便採用將保持器單元傾斜機構設置於劃線頭之構成亦無妨。 Further, as in the third to fifth embodiments, since the scribing device 1 is provided with the retainer unit tilting mechanism, it is not necessary to perform the processing for tilting the pin shaft itself, so that it can be used as it is in the general case. The holder unit used. Further, in the third to fifth embodiments, the retainer joint is provided with the retainer unit tilting mechanism. For example, in the case where the scribing device 1 does not have the retainer joint, even if the retainer unit is employed It is also possible that the tilting mechanism is disposed on the scribing head.
Claims (10)
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US4372471A (en) * | 1978-10-26 | 1983-02-08 | Vidrierias De Llodio, S.A. | Glass cutting system |
TW201331137A (en) * | 2012-01-20 | 2013-08-01 | Asahi Glass Co Ltd | Device for machining cutting plane line of glass plate, and method for machining on cutting plane line |
CN103979785A (en) * | 2013-02-12 | 2014-08-13 | 三星钻石工业股份有限公司 | Holding utensil unit and marking device |
TW201446677A (en) * | 2013-06-14 | 2014-12-16 | Mitsuboshi Diamond Ind Co Ltd | Scribing wheel holder unit, scribing wheel holder, pin, scribing wheel and substrate processing device |
JP2015229255A (en) * | 2014-06-03 | 2015-12-21 | 三星ダイヤモンド工業株式会社 | Holder, holder unit and scribe device |
JP2016010917A (en) * | 2014-06-30 | 2016-01-21 | 三星ダイヤモンド工業株式会社 | Multipoint tool, positioning mechanism of multipoint tool, scribe head, and scribe device |
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2016
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US4372471A (en) * | 1978-10-26 | 1983-02-08 | Vidrierias De Llodio, S.A. | Glass cutting system |
TW201331137A (en) * | 2012-01-20 | 2013-08-01 | Asahi Glass Co Ltd | Device for machining cutting plane line of glass plate, and method for machining on cutting plane line |
CN103979785A (en) * | 2013-02-12 | 2014-08-13 | 三星钻石工业股份有限公司 | Holding utensil unit and marking device |
TW201446677A (en) * | 2013-06-14 | 2014-12-16 | Mitsuboshi Diamond Ind Co Ltd | Scribing wheel holder unit, scribing wheel holder, pin, scribing wheel and substrate processing device |
JP2015229255A (en) * | 2014-06-03 | 2015-12-21 | 三星ダイヤモンド工業株式会社 | Holder, holder unit and scribe device |
JP2016010917A (en) * | 2014-06-30 | 2016-01-21 | 三星ダイヤモンド工業株式会社 | Multipoint tool, positioning mechanism of multipoint tool, scribe head, and scribe device |
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