JP2016056073A - Scribing apparatus, scribing method and holder unit - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a scribing apparatus, a scribing method and a holder unit, capable of forming a highly accurate scribe line, such as a scribe line formed by a scribing point while increasing a usable life.SOLUTION: A scribing apparatus 1 comprises: a holder unit 30 including a scribing wheel 31; a pin 32 for rotatably pivotally supporting the scribing wheel and a holder 40 for holding the pin; a scribing head 20 including a holder joint 21 for attaching the holder unit; a table 14 for placing a brittle material substrate 15; and a rotation suppression part 60 for suppressing the rotation of the scribing wheel when a load is applied to the scribing wheel.SELECTED DRAWING: Figure 4

Description

  The present invention relates to a scribing apparatus, a scribing method, and a holder unit for forming a scribe line on a surface of a brittle material substrate in the division of a brittle material substrate such as a glass substrate.

  The division of the glass substrate is usually performed by forming a scribe line on the surface of the glass substrate using a scribing tool. A scribing wheel is well known as this scribing tool. As this scribing wheel, there is a wheel cutter described in Patent Document 1, for example.

  The wheel cutter described in Patent Document 1 is held by a cutter holder and rotates on a brittle material substrate around a rotation axis into which a cutter pin is inserted, thereby forming a scribe line on the surface of the brittle material substrate. To form.

  As a scribing tool other than the scribing wheel, for example, a diamond tip or the like is attached to the tip of a columnar or prismatic support portion described in Patent Literature 2 or Patent Literature 3, and the tip surface is polished to form a scribing point. Things are known.

  The scribing tool described in Patent Document 2 or Patent Document 3 presses the scribing point against the brittle material substrate, and slides in a crisp state in this state. Therefore, the scribing point is dragged on the substrate, and at that time, a scribe line is formed on the surface of the brittle material substrate. At this time, since the blurring to the left and right does not occur as compared with the scribing wheel as in Patent Document 1, this scribing tool has an advantage that a highly accurate scribe line can be formed.

JP 2013-245135 A JP 2003-183040 A JP 2005-079526 A

  However, the scribing tool has a problem that the usable life is short because the scribing point cannot be used when the scribing point is worn.

  In order to solve the problem of short life, as in Patent Document 2 and Patent Document 3, when the scribing point is worn, it rotates around the central axis of the support portion (in a direction parallel to the surface of the brittle material substrate). However, it is difficult to fix the scribing point in an appropriate direction, and it is also difficult to process the scribing point.

  An object of the present invention is to provide a scribing apparatus, a scribing method, and a holder unit capable of forming a highly accurate scribing line like a scribing line by a scribing point while extending the usable life.

  To achieve the above object, a scribing device of the present invention includes a scribing wheel, a pin that rotatably supports the scribing wheel, and a holder that holds the pin by inserting the pin into an insertion hole. A holder unit, a scribe head having a holder joint to which the holder unit is attached, and a table on which a brittle material substrate is placed, and placed on the table by applying a load to the scribing wheel. A scribing device for forming a scribe line on the surface of a brittle material substrate, comprising: the scribing wheel; and a rotation suppressing portion for suppressing rotation of the scribing wheel.

  According to the scribing device of the present invention, when the scribing wheel that is rotatably held contacts the brittle material substrate, the rotation suppressing unit stops the rotation of the scribing wheel, so that the rotation of the scribing wheel is stopped. By forming the scribe line, it is possible to form a scribe line with high accuracy like a scribe line by a scribe point using a scribe wheel. In addition, when no load is applied to the scribing wheel, the scribing wheel is in a rotatable state. For example, the cutting edge of the scribing wheel can be easily rotated using riding on a brittle material substrate. Therefore, it is possible to prevent a scribe line from being always formed at the same cutting edge position, and it is possible to extend the life in which the scribing wheel can be used.

  Further, in the scribing device of the present invention, the scribing wheel rotatably supported by the pin is movable in the vertical direction, and the scribing wheel comes into contact with the brittle material substrate when the scribing wheel comes into contact with the brittle material substrate. It moves upward and the rotation is suppressed by the rotation suppression unit.

  The scribing device of the present invention further includes a joint auxiliary tool that holds the holder so that the holder unit can swing in the vertical direction, and is attached to the holder joint via the joint auxiliary tool, The rotation restraining part is provided in the joint auxiliary tool, and the scribing wheel moves upward by the swinging of the tip end side of the holder upward and comes into contact with the rotation restraining part to restrain the rotation. It is characterized by being.

  According to the scribing device of the present invention, when replacing the scribing wheel itself, the holder can be removed from the joint auxiliary tool and replaced, so that the scribing wheel can be easily replaced.

  The scribing apparatus of the present invention is characterized in that a tension coil spring is attached between the holder and the joint auxiliary tool.

  According to the scribing device of the present invention, the holder can be smoothly swung using the tension of the tension coil spring.

  Moreover, the scribing method of the present invention is characterized in that the scribing device described above is used and the scribing wheel is brought into contact from the outside of the end portion of the brittle material substrate placed on the table.

  According to the scribing method of the present invention, it is possible to easily rotate the cutting edge of the scribing wheel by using the climbing on the brittle material substrate, and to prevent the scribing line from being always formed at the same cutting edge position. The service life in which the wheel can be used can be extended.

  The holder unit of the present invention is a holder unit that is attached to a scribing device and used to form a scribe line on the surface of a brittle material substrate, the holder unit rotating a scribing wheel and the scribing wheel A pin that freely supports the shaft, a holder that holds the pin by inserting the pin into an insertion hole, and a joint auxiliary tool that holds the holder so as to be swingable in the vertical direction. The scribing wheel moves upward due to the upward swinging of the tip of the shaft, abuts against the rotation suppressing portion provided in the joint auxiliary portion, and the rotation of the scribing wheel is suppressed. .

  According to the holder unit of the present invention, the above effect can be obtained using an existing scribe device by exchanging the holder unit.

1 is a schematic diagram of a scribing apparatus according to Embodiment 1. FIG. FIG. 2A is a front view of a holder joint to which the holder unit of Embodiment 1 is attached, and FIG. 2B is a side view of the holder joint. 3A is a perspective view of a holder constituting the holder unit of Embodiment 1, FIG. 3B is a side sectional view of a joint auxiliary tool constituting the holder unit, and FIG. 3C is a holder. It is side surface sectional drawing of a unit. FIG. 4 is a conceptual process diagram illustrating a scribing method using the scribing apparatus of the first embodiment. FIG. 5A is a side view of the holder unit of the second embodiment, and FIG. 5B is a cross-sectional view of the holder unit. FIG. 6A is a perspective view of the holder of the second embodiment, FIG. 6B is a front view of the joint auxiliary tool constituting the holder unit of the second embodiment, and FIG. 6C is a joint auxiliary tool. FIG. FIG. 7 is a conceptual process diagram illustrating a scribing method using the scribing apparatus of the second embodiment. 8A is a side view of a holder constituting the holder unit of Embodiment 3, FIG. 8B is a front view of the holder, FIG. 8C is a bottom view of the holder, and FIG. (D) is front sectional drawing of a holder. FIG. 9A is an enlarged view of the main part of the holder unit when no load is applied to the scribing wheel of the third embodiment, and FIG. 9B is a diagram of the holder unit when the load is applied to the scribing wheel. It is a principal part enlarged view. FIG. 10 is a conceptual process diagram illustrating a scribing method using the scribing apparatus of the third embodiment.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings. However, the embodiment shown below shows an example for embodying the technical idea of the present invention, and is not intended to specify the present invention to this embodiment. The present invention is also applicable to other embodiments within the scope of the claims.

[Embodiment 1]
FIG. 1 is a schematic diagram of a scribing apparatus 1 according to Embodiment 1 of the present invention. The scribing apparatus 1 includes a moving table 10. The moving table 10 is screwed with a ball screw 11 and is movable in the y-axis direction along the pair of guide rails 12 by rotating the ball screw 11 by driving a motor.

  A motor 13 is installed on the upper surface of the movable table 10. The motor 13 rotates the table 14 positioned at the upper part on the xy plane and positions it at a predetermined angle. The table 14 that can be rotated horizontally by the motor 13 includes vacuum suction means (not shown), and holds the brittle material substrate 15 placed on the table 14 by the vacuum suction means.

  The brittle material substrate 15 is a glass substrate, a ceramic substrate made of low-temperature fired ceramics or high-temperature fired ceramics, a silicon substrate, a compound semiconductor substrate, a sapphire substrate, a quartz substrate, or the like. Further, the brittle material substrate 15 may be one in which a thin film or a semiconductor material is attached to or included in the surface or inside of the substrate. The brittle material substrate 15 may have a thin film or the like not corresponding to the brittle material attached to the surface thereof.

  The scribing apparatus 1 includes two CCD cameras 16 that image alignment marks formed on the surface of the brittle material substrate 15 above the brittle material substrate 15 placed on the table 14. A bridge 17 is installed on the columns 18a and 18b so as to straddle the movable table 10 and the table 14 on the upper side thereof.

  A guide 19 is attached to the bridge 17, and the scribe head 20 is installed so as to move in the x-axis direction while being guided by the guide 19. A holder unit 30 to be described later is attached to the scribe head 20 via a holder joint 21.

  Details of the holder joint 21 will be described. FIG. 2A is a front view of the holder joint 21 to which the holder unit 30 is attached, and FIG. 2B is a side view of the scribe head 20.

  The holder joint 21 has a holder unit mounting portion 24 at the lower end. The holder unit mounting portion 24 has a substantially inverted L shape toward the traveling direction D indicated by the arrow in FIG. A rotating shaft (not shown) is attached to the upper surface of the holder attaching portion 24. The rotating shaft is inserted into the two bearings 22 and 23. The holder joint 21 is rotatably supported via bearings 22 and 23 at the lower end of the scribe head 20.

  Further, the scribe head 20 includes a lifting unit (not shown), and the holder unit 30 is lifted and lowered by the lifting unit. A load is applied to a scribing wheel 31 described later by raising and lowering the holder unit 30, and the scribing wheel 31 is pressed against the surface of the brittle material substrate 15 placed on the table 14 to form a scribe line.

  Next, details of the holder unit 30 will be described. 3A is a perspective view of the holder 40 constituting the holder unit 30, FIG. 3B is a side sectional view of the joint auxiliary tool 50 constituting the holder unit 30, and FIG. 3C is a holder. 3 is a side sectional view of a unit 30. FIG. The holder unit 30 includes a scribing wheel 31, a pin 32, a holder 40, and a joint auxiliary tool 50.

  The scribing wheel 31 may be a wheel cutter described in Patent Document 1, but more specifically, a disc-shaped scribing wheel base circle as described in JP2013-14129A. What formed the diamond film in the surface of the inclined surface and ridgeline provided in the surrounding part is suitable. Since the diamond film is formed on the surface, the surface roughness of the scribing wheel 31 is suppressed, and the scribing wheel 31 becomes slippery on the brittle material substrate 15 when a scribe line is formed by a scribing method described later. Therefore, the rotation of the scribing wheel 31 on the brittle material substrate 15 can be suppressed, the occurrence of chipping due to unexpected rotation can be suppressed, and the end face strength when the brittle material substrate 15 is divided is increased. The scribing wheel 31 is formed with a through-hole for penetrating the pin 32 at the center of the side surface of the disk. The scribing wheel 31 of this embodiment has a thickness of about 0.65 mm, an outer diameter of about 2.0 mm, a diameter of the through hole 41 of about 0.8 mm, and a blade edge angle of the blade 43 of about 120 °. The scribing wheel 31 may be made of single-crystal diamond or polycrystalline diamond in addition to those formed of sintered diamond or cemented carbide.

  The pin 32 is a cylindrical member made of, for example, sintered diamond or cemented carbide, and has one end with a pointed tip. By inserting the pin 32 into the through hole of the scribing wheel 31, the scribing wheel 31 is rotatably supported.

  The holder 40 is made of a metal member. As shown in FIG. 3A, the holder 40 is cut at the tip side, and a holding groove 42 is formed between the pair of holding portions 41a and 41b and the holding portions 41a and 41b. In the holding portions 41a and 41b, insertion holes 43a and 43b through which the pins 32 are inserted are formed at coaxial positions, respectively. The holder 40 arranges the scribing wheel 31 in the holding groove 42 and passes the pin 32 through the through hole and the insertion holes 43a and 43b of the scribing wheel 31, thereby holding the pin 32 rotatably and holding the scribing wheel 31 in the holding groove. Hold at 42. Therefore, when exchanging the scribing wheel 31, the scribing apparatus 1 can easily exchange the minute scribing wheel 31 by removing the holder 40 from the holder unit 30 and exchanging the holder 40 together. The holder 40 includes a swing shaft hole 44 formed in the same direction as the insertion holes 43a and 43b at an intermediate position above the holding portions 41a and 41b.

  The joint auxiliary tool 50 is made of a metal member. As shown in FIG. 3B, the joint auxiliary tool 50 has a rectangular shape on the upper side and a trapezoidal shape whose width decreases toward the lower side. The joint auxiliary tool 50 has a lower trapezoidal part and a part of an upper rectangular part cut off, and a holder located between the pair of holder holding parts 51a and 51b and the holder holding parts 51a and 51b. A holding groove 52 is formed.

  In the holder holding portions 51a and 51b, swing holes 53a and 53b for holding the holder 40 so as to be swingable in the vertical direction are formed at coaxial positions, respectively. In addition, as shown to FIG. 2 (A), although the rocking | fluctuation hole 53a of this embodiment does not penetrate the joint auxiliary tool 50, it may penetrate.

  The holder holding groove 52 has different groove depths (upward heights) on the front side and the rear side with respect to the traveling direction D. The holder holding groove 52a on the front side is deeper, and swing holes 53a and 53b are formed here.

  The holder holding groove 52b on the rear side is shallow, and the distance between the top of the holder holding groove 52b and the scribing wheel 31 is very short. For this reason, when the scribing wheel 31 moves upward, it comes into contact with the top of the holder holding groove 52b, and the rotation of the rotatable scribing wheel 31 is suppressed. Therefore, the top portion of the holder holding groove 52 b constitutes a rotation suppression unit 60 that suppresses the rotation of the scribing wheel 31, and the joint auxiliary tool 50 includes the rotation suppression unit 60.

  The joint auxiliary tool 50 is formed with a joint mounting hole 54 for screwing to the holder joint 21. The joint auxiliary tool 50 is attached to the holder unit attachment portion 24 with a screw 55 via the joint attachment hole 54 and a screw hole formed in the holder unit attachment portion 24. Further, a clasp attachment hole 56 is formed in the joint auxiliary tool 50. Then, the stopper 58 is fixed to the stopper attachment hole 56 via a screw 57. The stopper 58 is for closing the swing hole 53b.

  In the joint auxiliary tool 50, the holder 40 to which the scribing wheel 31 and the pin 52 are attached is disposed in the holder holding groove 52, and the swing pin 59 is moved to the swing shaft hole 44 and the swing holes 53a and 53b of the holder 40. By passing, the holder 40 is held so as to be swingable in the vertical direction.

  As described above, the holder unit 30 having the configuration in which the holder 40 including the scribing wheel 31 rotatably supported by the shaft is held so as to be swingable in the vertical direction is normally determined by the weight of the holder 40 and the scribing wheel 31. The tip end side of the holder 40 is in a state of being lowered downward. At this time, the scribing wheel 31 is in a rotatable state. As shown in FIG. 3C, the swing of the holder 40 stops when the upper end of the holder 40 hits the top of the holder holding groove 52a.

On the other hand, when the scribing wheel 31 is positioned on the surface of the brittle material substrate 15, when the holder unit 30 is lowered by the elevating part of the scribe head 20, a load is applied to the scribing wheel 31 and swings in the vertical direction. The tip end side of the holder 40 which is held so as to move is moved upward. Then, the scribing wheel 31 is also moved upward by the upward movement of the tip end side of the holder 40, and comes into contact with the rotation suppressing portion 60 that is the top of the holder holding groove 52b. Accordingly, the rotation of the scribing wheel 31 is suppressed by the rotation suppressing unit 60, and when the load applied to the scribing wheel 31 increases, the scribing wheel 31 changes from a rotatable state to a fixed state.

  That is, the holder unit 30 is configured such that when the scribing wheel 31 that is rotatably held moves upward, the rotation of the scribing wheel 31 is stopped by the rotation suppressing unit 60 and a load is applied.

  The effect of forming a scribe line on the brittle material substrate 15 using the holder unit 30 having such a configuration and the scribe device 1 including the holder unit 30 will be described with reference to the drawings. FIG. 4 is a conceptual process diagram showing a scribing method using the scribing apparatus 1. In FIG. 4, only the holder unit 30 constituting the scribe device 1 and the brittle material substrate 15 are illustrated for easy understanding. Moreover, in order to make the state of the scribing wheel 31 easy to understand, the holder unit 30 is shown in a sectional view.

  Here, the scribe line is formed on the brittle material substrate 15 in the present embodiment by a so-called scribing method called outer cutting. The outer cutting is a scribing method for scribing from the outer side to the outer side of the brittle material substrate 15, and the lowermost end of the scribing wheel 31 is made to be lower than the upper surface of the brittle material substrate 15 at a point slightly outside the end of the brittle material substrate 15. Lower it slightly down. Then, scribing is started from the edge of the brittle material substrate 15 by horizontally moving in the traveling direction with a predetermined load applied to the scribing wheel 31, and the scribing wheel 31 is scribed to the other edge of the brittle material substrate 15.

  First, the scribe device 1 lowers the scribe head 20 to a position where the lowermost end of the scribing wheel 31 is slightly below the upper surface of the brittle material substrate 15 at a point outside the end of the brittle material substrate 15. (Step 1). At this time, since the scribing wheel 31 is not in contact with the rotation suppressing unit 60, the scribing wheel 31 is in a freely rotatable state.

  Next, the scribing apparatus 1 moves the holder unit 30 horizontally in the traveling direction D by moving the scribing head 20. At this time, since the scribing wheel 31 is in a rotatable state, the scribing wheel 31 contacts the outer edge of the brittle material substrate 15 to form a crack and ride on the surface of the substrate. Rotate (step 2). At this time, the tip end side of the holder 40 held so as to be swingable in the vertical direction moves upward as the brittle material substrate 15 rides on the substrate surface.

  Then, the scribing apparatus 1 performs scribing by horizontally moving the holder unit 30 in the advancing direction D with the cutting edge of the scribing wheel 31 biting into the surface of the brittle material substrate 15 (step 3). At this time, the scribing wheel 31 is in strong contact with the rotation suppressing portion 60 due to the upward movement of the holder 40, and a predetermined load is applied to the scribing wheel 31, so that the rotation state from step 1 to the fixed state is changed. It has become. At this time, not only the rotation of the scribing wheel 31 in the direction of the arrow R but also the movement of the pin 32 in the axial direction is restricted.

  Therefore, at the time of scribing in step 3, the scribing apparatus 1 always uses the scribing wheel 31 to scribe the brittle material substrate 15 at the same cutting edge position. That is, the scribing device 1 is in pressure contact with the brittle material substrate 15 with the cutting edge of the fixed scribing wheel 31 as a scribing point, like the scribing tool described in Patent Document 2 or Patent Document 3, and in this state The scribing line is formed by sliding like scribbling.

  In addition, when the scribing apparatus 1 performs scribing to the other edge of the brittle material substrate 15, a scribing line is formed by external cutting, so that the scribing wheel 31 can be slightly rotated at the time of step 2. Then, the position of the cutting edge that forms the scribe line can be changed.

  As described above, when the scribe device 1 according to the present embodiment forms a scribe line by cutting off, it can form a highly accurate scribe line like a scribe line by a scribing point as in Patent Document 2 and Patent Document 3. it can. Moreover, since the scribing wheel 31 itself is conventionally used frequently when forming a scribe line like the wheel cutter of patent document 1, manufacture etc. are easy.

  Further, since the scribing device 1 can easily rotate the cutting edge of the scribing wheel 31 when riding on the surface of the brittle material substrate 15, it is possible to suppress wear caused by always forming a scribe line at the same cutting edge position. The life in which the scribing wheel 31 can be used can be extended. Further, since the amount of rotation of the scribing wheel 31 at this time can also be controlled relatively easily, the position management of the scribing point on the scribing wheel 31 can be easily performed.

[Embodiment 2]
Next, the holder unit 130 according to the second embodiment will be described with reference to the drawings. FIG. 5A is a side view of the holder unit 130, and FIG. 5B is a cross-sectional view of the holder unit 130. FIG. 5B shows the holder 140 as a side view. 6A is a perspective view of the holder 140, FIG. 6B is a front view of the joint assisting tool 150 constituting the holder unit 130, and FIG. 6C is a side view of the joint assisting tool 150. FIG.

  The holder unit 30 according to the first embodiment is configured to return to a state in which the tip end side of the holder 40 is lowered downward due to the weight of the holder 40 and the scribing wheel 31 when scribing to the other edge of the brittle material substrate 15. At this time, if the holder 40 and the scribing wheel 31 are too light, it is difficult to return to the state where the tip end side of the holder 40 is lowered downward, and the holder 40 may not swing smoothly. Therefore, the holder unit 130 according to the second embodiment is configured such that the holder 140 can smoothly swing even when the holder 40 and the scribing wheel 131 are light.

  Specifically, the holder unit 130 includes a scribing wheel 131, a pin 132, a holder 140, a joint auxiliary tool 150, and a tension coil spring 170 connected to the holder 140 and the joint auxiliary tool 150. Since the scribing wheel 131 and the pin 132 are the same as the scribing wheel 31 and the pin 32 of the first embodiment, the description thereof is omitted.

  The holder 140 is made of a metal member. The holder 140 has a pair of holding portions 141a and 141b and a holding groove 142 positioned between the holding portions 141a and 141b on the tip side. In the holding portions 141a and 141b, insertion holes 143a and 143b through which the pins 132 are inserted are formed at coaxial positions, respectively. The holder 140 places the scribing wheel 131 in the holding groove 142 and passes the pin 132 through the through hole and the insertion holes 143a and 143b of the scribing wheel 131, thereby holding the pin 132 rotatably and holding the scribing wheel 131 in the holding groove. 142. Further, the holder 140 includes a swing shaft hole 144 formed in the same direction as the insertion holes 143a and 143b. The holder 140 is formed with a hooking portion 145 for hooking the hook of the tension coil spring 160 on the rear end side.

  The joint auxiliary tool 150 is made of a metal member. As shown in FIG. 6C, the joint auxiliary tool 150 has a rectangular shape on the upper side and a trapezoidal shape whose width decreases toward the lower side. The joint assisting tool 150 has a lower trapezoidal part and a part of the upper rectangular part cut, and a holder located between the pair of holder holding parts 151a and 151b and the holder holding parts 151a and 151b. A holding groove 152 is formed.

  In the holder holding portions 151a and 151b, swing holes 153a and 153b for holding the holder 140 so as to be swingable in the vertical direction are formed at coaxial positions, respectively.

  The holder holding groove 152 has a different groove depth (upward height). The holder holding groove 152a on the front side with respect to the traveling direction D has the deepest groove, the holder holding groove 152b has the next deepest groove, and the holder holding groove 152b has swing holes 153a and 153b. Has been.

  The holder holding groove 152c on the rear side is shallowest, and the distance between the top of the holder holding groove 152c and the scribing wheel 131 is very short. For this reason, when the scribing wheel 131 moves upward, it comes into contact with the top of the holder holding groove 152c, and the rotation of the rotatable scribing wheel 131 is suppressed. Therefore, the top part of the holder holding groove 152 c constitutes the rotation suppressing part 160 in the joint auxiliary tool 150.

  Further, the joint auxiliary tool 150 is formed with a joint mounting hole 154 for screwing to the holder joint 21. The joint auxiliary tool 150 is attached to the holder attaching portion 24 with a screw (not shown) through the joint attaching hole 154 and the screw hole formed in the holder attaching portion 24. Further, a stopper mounting hole 156 is formed in the joint auxiliary tool 150. A stopper (not shown) is fixed to the stopper mounting hole 156 via a screw (not shown), and the swing hole 153b is closed by the stopper.

  Further, as shown in FIG. 6 (B), the joint auxiliary tool 150 is formed with a fixing hole 158 for fixing a screw in which a hook portion 157 for hooking the hook of the tension coil spring 170 is formed on the front upper portion.

  In the joint auxiliary tool 150, the holder 140 to which the scribing wheel 131 and the pin 132 are attached is disposed in the holder holding groove 152, and the swing pin 159 is moved to the swing shaft hole 144 and the swing holes 153a and 153b of the holder 140. By passing, the holder 140 is held so as to be swingable in the vertical direction. In addition, the joint auxiliary tool 150 hooks the hook of the tension coil spring 170 between the hook portion 145 of the holder 140 and the hook portion 157 fixed to the joint auxiliary tool 150, so that the holder 140 and the joint auxiliary tool 150 are interposed. A tension coil spring 170 is attached.

  As described above, the holder unit 130 having the configuration in which the holder 140 including the scribing wheel 131 rotatably supported by the holder unit 130 is swingable in the vertical direction is normally set to the weight of the holder 140 and the scribing wheel 131. The holder 140 is lowered downward by the tension of the tension coil spring 170. At this time, the scribing wheel 131 is in a rotatable state. As shown in FIG. 5B, the lower surface of the holder 140 is stopped by the upper surface of the holder 140 coming into contact with the corner portion 155 formed by the holder holding groove 152a and the holder holding groove 152b.

On the other hand, when the scribing wheel 131 is positioned on the surface of the brittle material substrate 15, when the holder unit 130 is lowered by the elevating part of the scribe head 20, the scribing wheel 131 comes into contact with the substrate and can swing up and down. The tip end side of the holder 140 held by the slider moves upward. Then, the scribing wheel 131 also moves upward due to the upward movement of the holder 140 on the front end side, and comes into contact with the rotation suppressing portion 160 that is the top of the holder holding groove 152c, and is rotated by the rotation suppressing portion 160. Will be suppressed. Accordingly, when the scribing wheel 131 comes into contact with the substrate, the scribing wheel 131 changes from a rotatable state to a fixed state, and is more firmly fixed when a load applied to the scribing wheel 131 is increased.

  That is, the holder unit 130 is configured such that the rotation of the scribing wheel 131 is stopped by the rotation suppression unit 160 when the scribing wheel 131 that is rotatably held contacts the substrate and a load is applied.

  The effect of forming a scribe line on the brittle material substrate 15 using the holder unit 130 having such a configuration and the scribe device 1 including the holder unit 130 will be described with reference to the drawings. FIG. 7 is a conceptual process diagram showing a scribing method using the scribing apparatus 1. In FIG. 7, since the configuration other than the holder unit 130 is the same as that of the first embodiment, the configuration other than the holder unit 130 will be described using the same reference numerals. For the sake of clarity, only the holder unit 130 and the brittle material substrate 15 constituting the scribe device 1 are illustrated. In order to make the state of the scribing wheel 131 easy to understand, the holder unit 130 is shown in a sectional view.

  Here, the scribe lines are formed on the brittle material substrate 15 in the present embodiment by a scribing method called outer cutting as in the first embodiment.

  First, the scribing apparatus 1 is lowered to a position where the lowermost end of the scribing wheel 131 is slightly below the upper surface of the brittle material substrate 15 at a point outside the end of the brittle material substrate 15. At this time, since the scribing wheel 131 is not in contact with the rotation suppressing portion 160, the scribing wheel 131 is in a freely rotatable state. Note that this process is not shown because it is the same as step 1 of FIG. 4 in the first embodiment.

  Next, the scribing apparatus 1 moves the holder unit 130 horizontally in the traveling direction D by moving the scribing head 20 (step 1). At this time, since the scribing wheel 131 is in a rotatable state, it contacts with the outer edge of the brittle material substrate 15 to form a crack and ride on the surface of the substrate. Rotate. At this time, the tip of the holder 140 held so as to be swingable in the vertical direction moves upward as the brittle material substrate 15 rides on the substrate surface.

  Then, the scribing apparatus 1 performs scribing by horizontally moving the holder unit 130 in the traveling direction D in a state where the cutting edge of the scribing wheel 131 bites into the surface of the brittle material substrate 15 (step 2). At this time, since a predetermined load is applied to the scribing wheel 131, the scribing wheel 131 comes into strong contact with the rotation suppressing portion 160 by the upward movement of the holder 140, and is fixed from the rotatable state in Step 1. It is in a state. At this time, the scribing wheel 131 is restricted not only in the direction of the arrow R but also in the direction of the pin 132.

  Therefore, at the time of scribing in step 2, the scribing apparatus 1 always uses the scribing wheel 131 to scribe the brittle material substrate 15 at the same cutting edge position. That is, as in the first embodiment, the scribing apparatus 1 presses against the brittle material substrate 15 with the cutting edge of the scribing wheel 131 in a fixed state as a scribing point, and slides in a scribble state in this state to form a scribe line. .

  In addition, when the scribing apparatus 1 performs scribing to the other edge of the brittle material substrate 15, a scribing line is also formed by cutting off, so that the scribing wheel 131 can be slightly rotated during step 1. Then, the position of the cutting edge that forms the scribe line can be changed.

  Further, since the tension coil spring 170 is in an extended state at the time of step 2, when the scribing is performed to the other edge of the brittle material substrate 15, the rear end side of the holder 140 is pulled upward by the tension of the tension coil spring 170, The tip end side of the holder 140 is surely lowered downward.

  As described above, the scribing apparatus 1 according to the second embodiment can form a highly accurate scribe line as in the first embodiment when the scribe line is formed by cutting off. Also, the scribing wheel 131 can be easily manufactured. In addition, the scribing device 1 can always prevent the scribing line from being formed at the same cutting edge position, and can extend the life in which the scribing wheel 131 can be used.

  Furthermore, since the tension coil spring 170 is attached between the holder 140 and the joint auxiliary tool 150 in the scribing device 1, the holder 140 can swing smoothly, and in particular, the scribing wheel 131 is in contact with the brittle material substrate. In this state, the tip of the holder 140 can be reliably lowered.

[Embodiment 3]
Next, a holder unit 230 according to the third embodiment will be described with reference to the drawings. 8A is a side view of the holder 240 constituting the holder unit 230, FIG. 8B is a front view of the holder 240, and FIG. 8C is a bottom view of the holder 240. (D) is a front sectional view of the holder 240. The holder unit 230 includes a scribing wheel 231, a pin 232, and a holder 240. Since the scribing wheel 231 and the pin 232 are the same as the scribing wheel 31 and the pin 32 of the first embodiment, the description thereof is omitted.

  The holder 240 is made of a metal member. As shown in FIG. 8A, the holder 240 has a rectangular shape on the upper side, and has a trapezoidal shape whose width decreases toward the lower side. A part of the lower trapezoidal portion of the holder 240 is cut, and a holding groove 242 is formed between the pair of holding portions 241a and 241b and the holding portions 241a and 241b.

  Cylindrical bodies 246a and 246b made of sintered diamond or cemented carbide are fixed to the holding portions 241a and 241b at respective coaxial positions by brazing. The holding wall 247a made of the cylindrical body 246a on the holding portion 241a and the holding wall 247b made of the cylindrical body 246b on the holding portion 241b are opposed to the disk side surface of the scribing wheel 231. In FIGS. 8A, 8B, and 8C, the cylindrical bodies 246a and 246b are indicated by oblique lines.

  Further, insertion holes 243a and 243b through which the pins 232 are inserted are formed in the cylindrical bodies 246a and 246b, respectively, at coaxial positions. The insertion holes 243a and 243b are long holes in the vertical direction that are sufficiently larger than the diameter of the pin 232 so that the inserted pin 232 can move in the vertical direction and the front-rear direction. More specifically, as shown in FIG. 8A, the insertion holes 243a and 243b have a rhombus shape.

  Further, convex portions 261a and 261b are formed on the upper portions of the cylindrical bodies 246a and 246b in the holding groove 242, respectively. The convex portions 261 a and 261 b are formed so that the scribing wheel 231 moved upward as the pin 232 moves upward is brought into contact. Then, the scribing wheel 231 rotatably held by the pin 232 comes into contact with the convex portions 261a and 261b, so that the rotation of the rotatable scribing wheel 231 is suppressed. Therefore, the convex portions 261 a and 261 b constitute a rotation suppression unit 260 that suppresses the rotation of the scribing wheel 231, and the holder 240 includes the rotation suppression unit 260.

  Here, a method for manufacturing the cylindrical bodies 246a and 246b and the insertion holes 243a and 243b will be described. First, a cylindrical member is fixed by brazing to the base material of the holder 240 in which the mounting holes and the holding grooves 242 for mounting the cylindrical bodies 246a and 246b are formed. Next, the lower part of the base material of the holder 240 is cut into a trapezoidal shape as shown in FIG. 8A. At this time, the slits S are formed, and the insertion holes 243a and 243b are simultaneously cut and formed. Next, the intermediate position of the cylindrical member is cut with a diamond cutter or the like in accordance with the width of the cutting edge of the scribing wheel 231 to form a narrow gap. Then, the cylindrical member having the narrow gap is cut by a diamond cutter or electric discharge machining according to the width of the scribing wheel 231 to form a wide gap, and the holding walls 247a and 247b and the convex portions 261a and 261b are formed. In addition, about the manufacturing method of cylinder 246a, 246b and insertion hole 243a, 243b, the process described in Unexamined-Japanese-Patent No. 2011-240541 can be employ | adopted more specifically.

  Further, the holder 240 is formed with a joint mounting hole 254 for screwing to the holder joint 21. The holder 240 is attached to the holder joint 21 with a screw (not shown) through the joint attachment hole 254 and the screw hole formed in the holder joint 21. Further, the holder 240 is formed with a stopper mounting hole 256. Then, the clasps 258a and 258b are fixed to the clasp attachment holes 256 via screws 257a and 257b. The stoppers 258a and 258b are for closing the insertion holes 243a and 243b.

  The holder unit 230 places the scribing wheel 231 in the holding groove 242 of the holder 240 and passes the pin 232 through the through hole and the insertion holes 243a and 243b of the scribing wheel 231, thereby holding the pin 232 rotatably. The scribing wheel 231 is held between the holding walls 247a and 247b. Further, since the holder unit 230 has the insertion holes 243a and 243b of the holder 240 formed in a vertically long rhombus shape, the holder unit 230 holds the scribing wheel 231 together with the pins 232 so that the scribing wheel 231 can freely move in the vertical direction and the front-back direction.

  The movement of the scribing wheel 231 in the holder unit 230 as described above will be described with reference to the drawings. FIG. 9A is an enlarged view of a main part of the holder unit 230 when no load is applied to the scribing wheel 231, and FIG. 9B is a diagram of the holder unit 230 when a load is applied to the scribing wheel 231. It is a principal part enlarged view.

  In the holder unit 230 including the holder 240 that holds the pin 232 that rotatably supports the scribing wheel 231 in the insertion holes 243a and 243b that are long in the vertical direction, as shown in FIG. The pin 232 is positioned below the holes 243a and 243b. Therefore, the scribing wheel 231 and the rotation suppression unit 260 are not in contact with each other, and the holder unit 230 holds the scribing wheel 231 rotatably.

On the other hand, when the scribing wheel 231 is positioned on the surface of the brittle material substrate 15, a load is applied to the scribing wheel 231 when the holder unit 230 is lowered by the elevating part of the scribing head 20. The scribing wheel 231 moves upward by the upward movement of the pin 232 held so as to be movable in the direction. Therefore, the rotation suppressing unit 260 including the convex portions 261a and 261b and the scribing wheel 231 come into contact with each other, and the rotation of the scribing wheel 231 is suppressed. When the load applied to the scribing wheel 231 increases, the holder unit 230 holds the scribing wheel 231 from a rotatable state to a fixed state.

  That is, the holder unit 230 is configured to stop the rotation of the scribing wheel 231 by the rotation suppressing unit 260 when a load is applied to the scribing wheel 231 that is rotatably held.

  The effect of forming a scribe line on the brittle material substrate 15 using the holder unit 230 having such a configuration and the scribe device 1 including the holder unit 230 will be described with reference to the drawings. FIG. 10 is a conceptual process diagram showing a scribing method using the scribing apparatus 1. In FIG. 10, only a part of the holder unit 230 constituting the scribe device 1 and the brittle material substrate 15 are shown for easy understanding. Further, in order to make the state of the scribing wheel 231 easy to understand, the holder unit 230 is shown in a sectional view.

  Here, the scribe line is formed on the brittle material substrate 15 in the present embodiment by a so-called scribing method called outer cutting. The outer cutting is a scribing method of scribing from the outer side to the outer side of the brittle material substrate 15, and at the point slightly outside the end portion of the brittle material substrate 15, the lowermost end of the scribing wheel 231 is located above the upper surface of the brittle material substrate 15. Lower it slightly down. Then, scribing is started from the edge of the brittle material substrate 15 by horizontally moving in the traveling direction in a state where a predetermined load is applied to the scribing wheel 231, and the scribing is performed to the other edge of the brittle material substrate 15.

  First, the scribe device 1 is lowered to a position where the lowermost end of the scribing wheel 231 is slightly below the upper surface of the brittle material substrate 15 at a point outside the end of the brittle material substrate 15 (step 1). . At this time, the scribing wheel 231 is in a freely rotatable state because it is not in contact with the rotation suppressing portion 260.

  Next, the scribing apparatus 1 moves the holder unit 230 horizontally in the traveling direction D by moving the scribing head 20. At this time, since the scribing wheel 231 is in a rotatable state, the scribing wheel 231 contacts the outer edge of the brittle material substrate 15 to form a crack and ride on the surface of the substrate. Rotate (step 2). At this time, the pin 232 held so as to be movable in the vertical direction and the front-rear direction moves upward as the brittle material substrate 15 rides on the substrate surface.

  The scribing apparatus 1 performs scribing by horizontally moving the holder unit 230 in the traveling direction D in a state where the cutting edge of the scribing wheel 231 bites into the surface of the brittle material substrate 15 (step 3). At this time, since a predetermined load is applied to the scribing wheel 231, the upward movement of the pin 232 causes the scribing wheel 231 to come into strong contact with the rotation suppressing portion 260, and the step 1 is changed from the rotatable state to the fixed state. Become. Moreover, since the rotation suppression part 260 is comprised by convex part 261a, 261b, the blade edge | tip of the scribing wheel 231 will enter between convex part 261a and convex part 261b like FIG.9 (B). Therefore, the scribing wheel 231 is not only rotated in the direction of the arrow R but also strongly moved in the direction of the pin 232.

  Further, the periphery of the ridge line of the scribing wheel 231 that contacts the substrate during scribing does not contact the convex portions 261a and 261b, and the inclined surface that does not contact the substrate during scribing protrudes so as to contact the convex portions 261a and 261b. A groove between the portion 261a and the convex portion 261b is formed. For this reason, a blade edge | tip part contact | abuts to the rotation suppression part 260, a load is not received, and the lifetime of a blade edge can be lengthened more. The groove width is, for example, 0.2 mm.

  Moreover, in this embodiment, the convex part 261a and the convex part 261b are formed so that the lower end of the convex part 261a and the convex part 261b and the scribing wheel 231 may be in point contact. When the cutting edge angle of the scribing wheel 231 is smaller than the angle formed by the lower end of the convex portion 261a and the lower end of the convex portion 261b, the rotation suppressing portion 260 and the scribing wheel 231 come into point contact. Thereby, even when the scribing wheel 231 having different blade edge angles is attached, the pin 232 moves in the upward direction, so that the rotation suppressing portion and the scribing wheel 231 are similarly point-contacted. The same holder 240 can be used for the wheel 231.

  Therefore, at the time of scribing in step 3, the scribing apparatus 1 always uses the scribing wheel 231 to scribe the brittle material substrate 15 at the same cutting edge position. That is, the scribing device 1 is in pressure contact with the brittle material substrate 15 with the cutting edge of the fixed scribing wheel 231 as a scribing point, like the scribing tool described in Patent Document 2 or Patent Document 3, and in this state The scribing line is formed by sliding like scribbling.

  In addition, when the scribing apparatus 1 performs scribing to the other edge of the brittle material substrate 15, a scribing line is formed by cutting off, so that the scribing wheel 231 can be slightly rotated at the time of step 2. Then, the position of the cutting edge that forms the scribe line can be changed.

  As described above, when the scribe device 1 according to the present embodiment forms a scribe line by cutting off, it can form a highly accurate scribe line like a scribe line by a scribing point as in Patent Document 2 and Patent Document 3. it can. The scribing wheel 231 itself is easy to manufacture because it is conventionally used frequently when forming a scribe line like the wheel cutter of Patent Document 1.

  Further, since the scribing device 1 can rotate the cutting edge of the scribing wheel 231 when riding on the surface of the brittle material substrate 15, it is possible to always prevent the scribing line 231 from being formed at the same cutting edge position. The usable life can be extended.

  Further, unlike the first and second embodiments, the scribing apparatus 1 can configure the holder unit 230 with a small number of parts, that is, the scribing wheel 231, the pin 232, and the holder 240.

  In the present embodiment, the insertion holes 243a and 243b that are long in the vertical direction are formed in a rhombus shape in terms of ease of making, but the insertion holes 243a and 243b may have other shapes such as an elliptical shape. . The holder 240 is formed with brazed cylindrical bodies 246a and 246b, but the holder unit 230 may be configured so that the cylindrical bodies 246a and 246b are not formed on the holder 240. In this case, for example, the rotation suppression unit 260 can be realized by the top of the holding groove 242.

  Moreover, in this embodiment, although the scribing apparatus 1 rotates the scribing wheel by external cutting, it may be rotated by other methods such as manual operation.

DESCRIPTION OF SYMBOLS 1 ... Scribing apparatus 10 ... Moving stand 11 ... Ball screw 12 ... Guide rail 13 ... Motor 14 ... Table 15 ... Brittle material board 16 ... CCD camera 17 ... Bridge 18a, 18b ... Post 19 ... Guide 20 ... Scribe head 21 ... Holder joint 22 , 23 ... Bearing 24 ... Holder mounting part 30, 130, 230 ... Holder unit 31, 131, 231 ... Scribing wheel 32, 132, 232 ... Pin 40, 140, 240 ... Holder 41a, 41b, 141a, 141b, 241a, 241b ... Holding part 42, 142, 242 ... Holding groove 43a, 43b, 143a, 143b, 243a, 243b ... Insertion hole 44, 144 ... Oscillating shaft hole 50, 150 ... Joint auxiliary tool 51a, 51b, 151a, 151b ... Holder holding Part 52, 52 a, 52b, 152, 152a, 152b, 152c ... Holder holding groove 53a, 53b, 153a, 153b ... Swing hole 54, 154, 254 ... Joint mounting hole 55, 57, 257a, 257b ... Screw 56, 156, 256 ... Clasp mounting holes 58, 258a, 258b ... Clasps 59, 159 ... Swing pins 60, 160, 260 ... Rotation suppression portions 145, 157 ... Hook portions 155 ... Corner portions 158 ... Fixing holes 170 ... Tension coil springs 261a, 261b ... Convex

Claims (6)

A holder unit having a scribing wheel, a pin that rotatably supports the scribing wheel, and a holder that holds the pin by inserting the pin into an insertion hole;
A scribe head having a holder joint for attaching the holder unit;
A table on which a brittle material substrate is placed,
A scribing device that forms a scribe line on the surface of a brittle material substrate placed on the table by applying a load to the scribing wheel,
A scribing apparatus comprising: a rotation suppressing unit that suppresses rotation of the scribing wheel when the scribing wheel contacts the brittle material substrate. The scribing wheel pivotally supported by the pin is movable in the vertical direction,
The scribing apparatus, wherein the scribing wheel contacts the brittle material substrate, so that the scribing wheel moves upward and the rotation is suppressed by the rotation suppressing unit. The holder unit further includes a joint auxiliary tool that holds the holder in a vertically swingable manner, and is attached to the holder joint via the joint auxiliary tool,
The rotation suppressing part is provided in the joint auxiliary tool,
The scribing device according to claim 2, wherein the scribing wheel is restrained from rotating by moving upward in contact with the rotation restraining portion by swinging the holder upward.   4. The scribing device according to claim 3, wherein a tension coil spring is attached between the holder and the joint auxiliary tool. Using the scribing device according to any one of claims 1 to 4,
A scribing method, wherein the scribing wheel is brought into contact with the outside of an end portion of a brittle material substrate placed on the table. A holder unit attached to a scribe device and used to form a scribe line on the surface of a brittle material substrate,
The holder unit is
A scribing wheel,
A pin that rotatably supports the scribing wheel;
A holder for holding the pin by inserting the pin into the insertion hole;
A joint auxiliary tool that holds the holder in a vertically swingable manner,
The holder is characterized in that the scribing wheel moves upward due to the upward swing of the holder and abuts against a rotation restraining part provided in the joint auxiliary part, and the rotation of the scribing wheel is restrained. unit.

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