TW201600290A - Multi-point tool, positioning mechanism of multi-point tool, scribing head and scribing device - Google Patents

Multi-point tool, positioning mechanism of multi-point tool, scribing head and scribing device Download PDF

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TW201600290A
TW201600290A TW104112550A TW104112550A TW201600290A TW 201600290 A TW201600290 A TW 201600290A TW 104112550 A TW104112550 A TW 104112550A TW 104112550 A TW104112550 A TW 104112550A TW 201600290 A TW201600290 A TW 201600290A
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point tool
notches
blade
pin
tool
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TW104112550A
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Chinese (zh)
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Hiroshi Soyama
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Mitsuboshi Diamond Ind Co Ltd
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  • Chemical & Material Sciences (AREA)
  • Processing Of Stones Or Stones Resemblance Materials (AREA)
  • Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Dicing (AREA)
  • Manufacture Or Reproduction Of Printing Formes (AREA)

Abstract

When carrying out scribing, the multi-point tool, positioning mechanism of multi-point tool, scribing head and scribing device of the present invention can fix the sharp point positions of the multi-point tool having a plurality of sharp points and easily change the sharp point position. The multi-point tool 30 has first notches 34-41 that become the scribing sharp points, and deeper second notches 42-49 which are formed at an equal interval in between the first notches. The blade tip fixing pin 60 comprises a pair of protruding parts 61a, 61b corresponding to the interval of the second notches of the multi-point tool 30, and a through hole 42 formed obliquely relative to the shaft. During the scribing, the pair of protruding parts 61a, 61b is pressed to be fixed to the groove of the second notches. The through hole of the blade tip fixing pin 60 is inserted with a lock pin, which is formed by matching up two opposite cone-shaped parts, and locking and unlocking are achieved by changing the position.

Description

多點工具、多點工具之定位機構、刻劃頭及刻劃裝置 Multi-point tool, multi-point tool positioning mechanism, scribing head and scoring device

本發明係關於一種用於藉由鑽石尖點(鑽石尖頭)(diamond point)刻劃玻璃基板或矽晶圓等脆性材料基板之多點工具、固定該多點工具之定位機構、內藏該定位機構之刻劃頭及刻劃裝置。 The present invention relates to a multi-point tool for scribing a substrate of a brittle material such as a glass substrate or a crucible wafer by a diamond point, a positioning mechanism for fixing the multi-point tool, and a built-in mechanism The marking mechanism and the scoring device of the positioning mechanism.

習知為了刻劃玻璃基板或矽晶圓,採用使用有刻劃輪、或單結晶鑽石之鑽石尖點之工具。針對玻璃基板,一直以來主要是採用相對於基板滾動之刻劃輪,但從提高刻劃後之基板強度等優點來看,亦被檢討使用固定刀刃之鑽石尖點。在專利文獻1、2中提及有用於刻劃藍寶石晶圓或氧化鋁晶圓(alumina wafer)等高硬度之基板的尖點刀具。該等專利文獻中,使用有在角錐之稜線上設置有切割用尖點之工具、或前端成為圓錐之工具。此外,在專利文獻3中,為了刻劃玻璃板而提及有一種刻劃裝置,該刻劃裝置係使用具有圓錐形前端之玻璃劃線具。 Conventionally, in order to scribe a glass substrate or a tantalum wafer, a tool using a diamond cusp having a score wheel or a single crystal diamond is used. For the glass substrate, the scriber wheel is generally used for rolling with respect to the substrate. However, from the viewpoint of improving the strength of the substrate after the scribe, the diamond cusp using the fixed blade is also reviewed. Patent Documents 1 and 2 mention a sharp point cutter for marking a high hardness substrate such as a sapphire wafer or an alumina wafer. In these patent documents, a tool having a sharp point for cutting on a ridge line of a pyramid or a tool having a tip end tapered is used. Further, in Patent Document 3, in order to scribe a glass plate, there is mentioned a scribing device which uses a glass scribing tool having a conical front end.

專利文獻1:日本特開2003-183040號公報 Patent Document 1: Japanese Laid-Open Patent Publication No. 2003-183040

專利文獻2:日本特開2005-079529號公報 Patent Document 2: Japanese Laid-Open Patent Publication No. 2005-079529

專利文獻3:日本特開2013-043787號公報 Patent Document 3: Japanese Laid-Open Patent Publication No. 2013-043787

由於若以習知的工具進行刻劃則尖點將磨耗(磨損),因此有 必要變更尖點。在角錐形或圓錐形之工具中成為可使用之頂點的尖點為二個部位或最多四個部位。因此存在有如下之問題點:當變更二個部位或四個部位之尖點時必須更換工具,且更換頻度高。再者,為了更換工具,必須使保持工具之軸為中心並旋轉,且難以精度佳地調整尖點接觸基板之角度。 Since the cusp will wear (wear) if it is scored with a conventional tool, there is It is necessary to change the cusp. The apex that becomes a vertex in a pyramidal or conical tool is two or a maximum of four. Therefore, there is a problem that the tool must be replaced when changing the sharp points of two parts or four parts, and the frequency of replacement is high. Furthermore, in order to change the tool, it is necessary to center and rotate the axis of the holding tool, and it is difficult to accurately adjust the angle of the pointed contact substrate.

本發明係有鑑於如此般之習知問題點而完成,目的在於提供一種即使是在刻劃中所使用之尖點磨耗,亦能夠容易地變更並固定尖點位置之多點工具、多點工具之定位機構、內藏該定位機構之刻劃頭及刻劃裝置。 The present invention has been made in view of such conventional problems, and an object thereof is to provide a multi-point tool and a multi-point tool capable of easily changing and fixing a cusp position even when sharp point wear is used in scribing. The positioning mechanism, the scribe head and the scribe device that house the positioning mechanism.

為解決該課題,本發明之多點工具之定位機構,係進行呈旋轉自如地安裝在刻劃頭之多點工具之定位;該多點工具,在旋轉對稱體之基座外周形成有多個第1缺口,在該第1缺口間呈等間隔地形成有較第1缺口更深之多個第2缺口;該定位機構,具備:刃前端固定銷,在一端具有與該多點工具之第2缺口之間隔相等的一對突起部,在中央具有相對於與軸垂直之另一軸傾斜之貫通孔;以及鎖止銷,插入於該刃前端固定銷之貫通孔,藉由與該刃前端固定銷之軸垂直地滑動並藉由該刃前端固定銷而使該多點工具鎖止及解除鎖止。 In order to solve the problem, the positioning mechanism of the multi-point tool of the present invention performs positioning of a multi-point tool that is rotatably mounted on the scribing head; the multi-point tool has a plurality of outer circumferences formed on the base of the rotationally symmetric body In the first notch, a plurality of second notches deeper than the first notch are formed at equal intervals between the first notches; and the positioning mechanism includes a blade distal fixing pin and has a second end of the multi-point tool at one end a pair of protrusions having the same interval of the notch, having a through hole inclined at the center with respect to the other axis perpendicular to the axis; and a locking pin inserted into the through hole of the front end of the blade fixing pin, by fixing the pin with the tip end of the blade The shaft slides vertically and the multi-point tool is locked and unlocked by the front end fixing pin.

為解決該課題,本發明之多點工具之定位機構,係進行呈旋轉自如地安裝在刻劃頭之多點工具之定位;該多點工具,在旋轉對稱體之基座外周形成有多個第1缺口,在該第1缺口間呈等間隔地形成有較第1缺口更深之多個第2缺口;該定位機構,具備:刃前端固定銷,在一端具有與該多點工具之第2缺口之間隔相等的一對突起部,在中央具有與軸垂 直地形成曲柄(crank)狀之貫通孔;以及鎖止銷,插入於該刃前端固定銷之貫通孔,藉由與該刃前端固定銷之軸垂直地滑動並藉由該刃前端固定銷而使該多點工具鎖止及解除鎖止。 In order to solve the problem, the positioning mechanism of the multi-point tool of the present invention performs positioning of a multi-point tool that is rotatably mounted on the scribing head; the multi-point tool has a plurality of outer circumferences formed on the base of the rotationally symmetric body In the first notch, a plurality of second notches deeper than the first notch are formed at equal intervals between the first notches; and the positioning mechanism includes a blade distal fixing pin and has a second end of the multi-point tool at one end a pair of protrusions having the same interval of the notches, having a sagging in the center Straightly forming a crank-like through hole; and a locking pin inserted into the through hole of the front end fixing pin of the blade, which slides perpendicularly to the axis of the front end fixing pin and fixes the pin by the front end of the blade The multi-point tool is locked and unlocked.

此處亦可為:該鎖止銷,以前端細之錐狀部相互相向配合之方式形成,該錐狀部插入於該刃前端固定銷之貫通孔。 Here, the lock pin may be formed such that the tapered tapered portions of the front end are opposed to each other, and the tapered portion is inserted into the through hole of the front end fixing pin of the blade.

此處亦可為:進一步具有使該多點工具旋轉既定角度之滑件。 Here, it may also be: further having a slider for rotating the multi-point tool at a predetermined angle.

為解決該課題,本發明之多點工具,係呈旋轉自如地安裝在刻劃頭;該多點工具,在旋轉對稱體之基座外周形成有多個第1缺口,在該第1缺口間呈等間隔地形成有較第1缺口更深之多個第2缺口,在進行刻劃時藉由在該第2缺口抵接刃前端固定銷而抑制其旋轉。 In order to solve the problem, the multi-point tool of the present invention is rotatably attached to the scribing head; the multi-point tool has a plurality of first notches formed on the outer periphery of the base of the rotationally symmetric body, and between the first notches A plurality of second notches deeper than the first notch are formed at equal intervals, and the pin is restrained from rotating at the tip end of the second notch abutting blade at the time of scribing.

為解決該課題,本發明之刻劃頭,係具備安裝成旋轉自如之多點工具、與該多點工具之定位機構;該多點工具,在旋轉對稱體之基座外周形成有多個第1缺口,在該第1缺口間呈等間隔地形成有較第1缺口更深之多個第2缺口;該定位機構,具備:刃前端固定銷,在一端具有與該多點工具之第2缺口之間隔相等的一對突起部,在中央具有相對於與軸垂直之另一軸傾斜之貫通孔;以及鎖止銷,插入於該刃前端固定銷之貫通孔,藉由與該刃前端固定銷之軸垂直地滑動並藉由該刃前端固定銷而使該多點工具鎖止及解除鎖止。 In order to solve the problem, the scribe head of the present invention includes a multi-point tool mounted in a rotatable manner and a positioning mechanism of the multi-point tool; the multi-point tool has a plurality of stages formed on the outer periphery of the base of the rotationally symmetric body a notch, a plurality of second notches deeper than the first notch are formed at equal intervals between the first notches; and the positioning mechanism includes a blade distal fixing pin and a second notch of the multi-point tool at one end a pair of protrusions having the same interval, a through hole having a center inclined with respect to the other axis perpendicular to the axis; and a lock pin inserted into the through hole of the front end of the blade fixing pin, and the pin is fixed to the front end of the blade The shaft slides vertically and the multi-point tool is locked and unlocked by the front end fixing pin.

此處亦可為:進一步具備使該多點工具旋轉既定角度之滑件。 Here, it may be further provided with a slider for rotating the multi-point tool at a predetermined angle.

為解決該課題,本發明之刻劃裝置,具備刻劃頭、呈旋轉自 如地安裝在刻劃頭之多點工具、及該多點工具之定位機構;該多點工具,在旋轉對稱體之基座外周形成有多個第1缺口,在該第1缺口間呈等間隔地形成有較第1缺口更深之多個第2缺口;該定位機構,具備:刃前端固定銷,在一端具有與該多點工具之第2缺口之間隔相等的一對突起部,在中央具有相對於與軸垂直之另一軸傾斜之貫通孔;鎖止銷,插入於該刃前端固定銷之貫通孔,藉由與該刃前端固定銷之軸垂直地滑動並藉由該刃前端固定銷而使該多點工具鎖止及解除鎖止;以及滑件,使該多點工具旋轉既定角度。 In order to solve the problem, the scoring device of the present invention has a scribing head and is rotated from a multi-point tool mounted on the scribe head and a positioning mechanism of the multi-point tool; the multi-point tool has a plurality of first notches formed on the outer circumference of the base of the rotationally symmetric body, and is placed between the first notches a plurality of second notches deeper than the first notch are formed at intervals; the positioning mechanism includes a blade distal fixing pin, and has a pair of protrusions at the one end equal to the interval between the second notches of the multi-point tool, and is centrally a through hole having a tilt with respect to another axis perpendicular to the axis; a lock pin inserted into the through hole of the front end fixing pin of the blade, sliding perpendicularly to the axis of the front end fixing pin of the blade and fixing the pin by the front end of the blade And the multi-point tool is locked and unlocked; and the slider rotates the multi-point tool by a predetermined angle.

根據具有如此般特徵之本發明,能夠藉由使刃前端固定銷之突起部卡合於第2缺口部而固定多點工具。此外,亦在變更尖點位置的情形時,藉由解除鎖止,並使工具旋轉既定角度後進一步再次鎖止,而能夠容易地調整尖點至相同位置。因此可獲得能夠容易地進行多點工具之尖點切換的效果。此外,即便使工具旋轉,亦由於在工具之前視觀察下刃前端之稜線接觸基板之角度不變,因此能容易調整尖點之相對於基板之接觸角度。 According to the invention having such a feature, the multi-point tool can be fixed by engaging the projection of the blade distal end fixing pin with the second notch. Further, when the cusp position is changed, the cusp can be easily adjusted to the same position by releasing the lock and rotating the tool a predetermined angle and then locking it again. Therefore, an effect that the cusp switching of the multi-point tool can be easily performed can be obtained. Further, even if the tool is rotated, since the angle at which the ridge line of the tip end of the lower blade contacts the substrate is not changed before the tool, the contact angle of the cusp with respect to the substrate can be easily adjusted.

22‧‧‧刻劃頭 22‧‧‧Scratch

24‧‧‧壓力賦予部 24‧‧‧ Pressure Giving Department

25‧‧‧工具保持部 25‧‧‧Tools Maintenance Department

26‧‧‧線性驅動部 26‧‧‧Linear drive department

27‧‧‧滑件保持部 27‧‧‧Sliding holder

28‧‧‧線性驅動部 28‧‧‧Linear drive department

30‧‧‧多點工具 30‧‧‧Multi-point tools

31‧‧‧基座 31‧‧‧ Pedestal

32‧‧‧貫通孔 32‧‧‧through holes

33‧‧‧研磨面 33‧‧‧Grinding surface

34~41‧‧‧第1缺口 34~41‧‧‧1st gap

42~49‧‧‧第2缺口 42~49‧‧‧2nd gap

60、80‧‧‧刃前端固定銷 60, 80‧‧ ‧ blade front end fixing pin

61a、61b‧‧‧突起部 61a, 61b‧‧‧ protrusions

62、81‧‧‧貫通孔 62, 81‧‧‧through holes

63‧‧‧鎖止銷 63‧‧‧Lock pin

64a、64b‧‧‧錐狀部 64a, 64b‧‧‧ cone

65、66‧‧‧圓柱部 65, 66‧‧‧ cylindrical

67‧‧‧彈簧 67‧‧‧ Spring

68‧‧‧滑件 68‧‧‧Sliding parts

68a、68b、68c‧‧‧突起部 68a, 68b, 68c‧‧‧ protrusions

圖1,係表示本發明之實施形態之刻劃裝置的立體圖。 Fig. 1 is a perspective view showing a scoring apparatus according to an embodiment of the present invention.

圖2,係本發明之實施形態之定位機構中使用之多點工具的前視圖及側視圖。 Fig. 2 is a front view and a side view of a multi-point tool used in the positioning mechanism of the embodiment of the present invention.

圖3A,係表示本發明之第1實施形態之內藏有定位機構之刻劃頭之鎖止時的概略圖。 Fig. 3A is a schematic view showing a state in which the scribe head of the positioning mechanism is locked in the first embodiment of the present invention.

圖3B,係表示本發明之第1實施形態之內藏有定位機構之刻劃頭之解除鎖止時的概略圖。 Fig. 3B is a schematic view showing the unlocking of the scribe head in which the positioning mechanism is housed in the first embodiment of the present invention.

圖4,係表示本實施形態之刃前端固定銷的立體圖及剖面圖。 Fig. 4 is a perspective view and a cross-sectional view showing a blade distal end fixing pin of the embodiment.

圖5,係表示本實施形態之鎖止銷的立體圖。 Fig. 5 is a perspective view showing the lock pin of the embodiment.

圖6A,係表示本實施形態之內藏滑件保持機構之刻劃頭的概略圖。 Fig. 6A is a schematic view showing a scribed head of the built-in slider holding mechanism of the embodiment.

圖6B,係表示本實施形態之內藏滑件保持機構之刻劃頭的概略圖。 Fig. 6B is a schematic view showing the scribed head of the built-in slider holding mechanism of the embodiment.

圖7,係表示本發明之第1實施形態之使用藉由定位機構固定之多點工具進行刻劃之狀態的圖及表示使多點工具旋動之狀態的圖。 Fig. 7 is a view showing a state in which a multi-point tool fixed by a positioning mechanism is used for scribing in a first embodiment of the present invention, and a view showing a state in which a multi-point tool is rotated.

圖8,係表示使多點工具旋動之狀態的圖及表示使用旋動後之多點工具進行刻劃之狀態的圖。 Fig. 8 is a view showing a state in which the multi-point tool is rotated and a state in which the multi-point tool after the rotation is used for scribing.

圖9A,係表示本發明之第2實施形態之內藏有定位機構之刻劃頭之鎖止時的概略圖。 Fig. 9A is a schematic view showing the locking of the scribe head in which the positioning mechanism is housed in the second embodiment of the present invention.

圖9B,係表示本發明之第2實施形態之內藏有定位機構之刻劃頭之解除鎖止時的概略圖。 Fig. 9B is a schematic view showing the unlocking of the scribe head in which the positioning mechanism is housed in the second embodiment of the present invention.

圖1係表示本發明之實施形態之刻劃裝置一例子的概略立體圖。該刻劃裝置10,其移動台11被保持成可沿一對導引軌條12a、12b而於y軸方向移動自如。滾珠螺桿13與移動台11螺合。馬達14藉由使滾珠螺桿13旋轉,而使移動台11沿導引軌條12a、12b於y軸方向移動。在移動台11之上面設置有馬達15。馬達15係使平台16在xy平面旋轉而定位於既定角度。在平台16上載置脆性材料基板17,並藉由未圖示之真空吸引手段等而保持。在刻劃裝置之上部,設置有對脆性材料基板17之對準標 記進行拍攝之2台CCD攝影機18a、18b。 Fig. 1 is a schematic perspective view showing an example of a scoring apparatus according to an embodiment of the present invention. In the scribing device 10, the moving table 11 is held to be movable in the y-axis direction along the pair of guiding rails 12a, 12b. The ball screw 13 is screwed to the moving table 11. The motor 14 moves the movable table 11 in the y-axis direction along the guide rails 12a and 12b by rotating the ball screw 13. A motor 15 is disposed above the mobile station 11. Motor 15 rotates platform 16 in the xy plane to a predetermined angle. The brittle material substrate 17 is placed on the stage 16 and held by a vacuum suction means or the like (not shown). On the upper portion of the scoring device, an alignment mark for the brittle material substrate 17 is provided Two CCD cameras 18a and 18b for photographing are recorded.

在刻劃裝置10,以跨越移動台11與其上部之平台16的方式沿x軸方向藉由支柱21a、21b而架設橋架20。在橋架20設置有保持刻劃頭22之線性馬達23。線性馬達23沿x軸方向直線驅動刻劃頭22。在刻劃頭22透過對刃前端賦予壓力之壓力賦予部24安裝工具保持部25。工具保持部25,於下端保持多點工具30且使其以適當的負載壓接於脆性材料基板17之表面上,在刃前端已磨耗時使多點工具30旋轉既定角度。 In the scribing device 10, the bridge 20 is bridged by the stays 21a, 21b in the x-axis direction so as to straddle the mobile station 11 and the platform 16 above it. A linear motor 23 holding the scoring head 22 is provided in the bridge 20. The linear motor 23 linearly drives the scribing head 22 in the x-axis direction. The tool holding portion 25 is attached to the pressure applying portion 24 that applies pressure to the tip end of the blade by the scribing head 22. The tool holding portion 25 holds the multi-point tool 30 at the lower end and presses it against the surface of the brittle material substrate 17 with an appropriate load, and rotates the multi-point tool 30 by a predetermined angle when the tip end of the blade is worn.

接著針對本發明之實施形態之多點工具進行說明。圖2係表示本實施形態之藉由定位機構而固定之多點工具30之一例的前視圖及側視圖。該多點工具30使用單結晶鑽石形成圓板等旋轉對稱形之基座31,且在其中心具有貫通孔32。如圖2(a)之側視圖所示般,從圓周部分之兩側研磨成V字形而成為由稜線與傾斜面構成之刃前端部33。而且如圖示般在刃前端部33之圓周之八個部位,藉由雷射加工、放電加工或機械研磨等形成第1缺口34~41。以第1缺口與稜線之焦點作為尖點而進行刻劃。而且各該第1缺口設成等間隔,在其缺口之中間部分藉由雷射加工、放電加工或機械研磨等而等間隔地形成更深之V字形之第2缺口42~49。 Next, a multi-point tool according to an embodiment of the present invention will be described. Fig. 2 is a front view and a side view showing an example of a multi-point tool 30 fixed by a positioning mechanism in the embodiment. The multi-point tool 30 uses a single crystal diamond to form a base 31 having a rotationally symmetrical shape such as a circular plate, and has a through hole 32 at the center thereof. As shown in the side view of Fig. 2(a), the both ends of the circumferential portion are polished into a V shape to form a blade tip end portion 33 composed of a ridge line and an inclined surface. Further, as shown in the figure, the first notches 34 to 41 are formed by laser processing, electric discharge machining, mechanical polishing or the like at eight locations on the circumference of the blade tip end portion 33. The focus of the first notch and the ridge line is used as a sharp point. Further, each of the first notches is formed at equal intervals, and the second notches 42 to 49 having a deeper V shape are formed at equal intervals in the middle portion of the notch by laser processing, electric discharge machining, mechanical polishing or the like.

圖3A係表示該實施形態之內藏有定位機構之刻劃頭22之工具保持部25鎖止時的概略圖,圖3B係表示解除鎖止時的概略圖,且僅刃前端固定銷60以剖面圖表示。如該等圖式所示般,在工具保持部25之端部,藉由將未圖示之銷插通於貫通孔32而將上述之多點工具30安裝成旋轉自如。而且在進行刻劃時為了不使多點工具30旋轉,將刃前端固定銷60固定於多點工具之二個部位之第2缺口。刃前端固定銷60可稍微於上下方 向移動自如,為了藉由刃前端固定銷60鎖止多點工具30而使用鎖止銷63。 3A is a schematic view showing a state in which the tool holding portion 25 of the scribing head 22 in which the positioning mechanism is housed is locked, and FIG. 3B is a schematic view showing the state in which the lock is released, and only the blade distal end fixing pin 60 is used. The profile is shown. As shown in the drawings, the multi-point tool 30 is rotatably attached to the end portion of the tool holding portion 25 by inserting a pin (not shown) into the through hole 32. Further, in order to prevent the multi-point tool 30 from rotating during the scribing, the blade distal end fixing pin 60 is fixed to the second notch of the two portions of the multi-point tool. The blade front end fixing pin 60 can be slightly above and below The lock pin 63 is used in order to lock the multi-point tool 30 by the blade distal end fixing pin 60.

接著針對刃前端固定銷60詳細地進行說明。刃前端固定銷60如於圖4表示立體圖及剖面圖般,係圓柱形之構件,並在其右端部形成一對突起部61a、61b。突起部61a、61b之前端之間隔,與多點工具30之第2缺口42~49之凹部之底部之間隔相同。此外,在該刃前端固定銷60之中央部,形成有相對於圓柱之中心軸而具有一定傾斜角度的傾斜之貫通孔62。 Next, the blade distal end fixing pin 60 will be described in detail. The blade distal end fixing pin 60 is a cylindrical member as shown in a perspective view and a cross-sectional view of Fig. 4, and a pair of projections 61a, 61b are formed at the right end portion thereof. The interval between the front ends of the projections 61a and 61b is the same as the interval between the bottoms of the recesses of the second notches 42 to 49 of the multi-point tool 30. Further, at a central portion of the blade distal end fixing pin 60, an inclined through hole 62 having a certain inclination angle with respect to a central axis of the cylinder is formed.

而且,在刃前端固定銷60之傾斜之貫通孔62插入圖5中所示之鎖止銷63。鎖止銷63具有接合一對錐狀部64a、64b之構件而成之構造,在其外側突出有圓柱部65與66。錐狀部64a、64b插入於上述之刃前端固定銷60之貫通孔62。而且如圖3A所示般,在鎖止銷63之一方之圓柱部65外周設置彈簧67,而對鎖止銷63往圖3A之左側進行彈壓。鎖止銷63係在使多點工具30旋轉時藉由向右按壓圓柱部66而使刃前端固定銷60往上方移動,而使其解除鎖止。 Further, the inclined through hole 62 of the blade distal end fixing pin 60 is inserted into the lock pin 63 shown in Fig. 5. The lock pin 63 has a structure in which members of the pair of tapered portions 64a and 64b are joined, and cylindrical portions 65 and 66 protrude from the outside. The tapered portions 64a and 64b are inserted into the through holes 62 of the blade distal end fixing pins 60 described above. Further, as shown in FIG. 3A, a spring 67 is provided on the outer circumference of the cylindrical portion 65 of one of the lock pins 63, and the lock pin 63 is biased to the left side of FIG. 3A. The lock pin 63 causes the blade distal end fixing pin 60 to move upward by pressing the cylindrical portion 66 to the right when the multi-point tool 30 is rotated, thereby releasing the lock.

在變更尖點時,為了使多點工具30旋轉既定角度而可使用滑件68。滑件68如圖3A、圖3B所示般係於細長之直方體構件形成有三個部位之等間隔之突起部68a~68c而成。突起部68a、68b、68c之前端之間隔,設成與多點工具30之第2缺口42~49之凹部之底部之間隔相同。滑件68如圖7(b)所示般,使突起抵接於多點工具30之第2缺口,且使其相對地滑動。而且,藉由從突起部68a與68b嵌合於缺口之狀態使其往圖中右側移動而至突起部68b、68c嵌合之狀態,從而能夠使多點工具30旋轉一定角度。滑件68可設置在與刻劃頭不同的刻劃裝置,亦可內藏於刻劃頭。 When the cusp is changed, the slider 68 can be used in order to rotate the multi-point tool 30 by a predetermined angle. As shown in FIGS. 3A and 3B, the slider 68 is formed by forming elongated portions 68a to 68c at three intervals in the elongated rectangular member. The distance between the front ends of the projections 68a, 68b, and 68c is the same as the interval between the bottoms of the recesses of the second notches 42 to 49 of the multi-point tool 30. As shown in Fig. 7(b), the slider 68 abuts the second notch of the multi-point tool 30 and slides it relative to each other. Further, the multi-point tool 30 can be rotated by a predetermined angle by the state in which the projections 68a and 68b are fitted into the notch and moved to the right side in the drawing to the state in which the projections 68b and 68c are fitted. The slider 68 can be disposed in a scoring device different from the scoring head, or can be embedded in the scoring head.

接著針對內藏於刻劃頭之情形的滑件之保持機構之一例進 行說明。如圖6A所示般以與壓力賦予部24、多點工具保持部25相鄰之方式,設置有在上下方向驅動滑件保持部之線性驅動部26。線性驅動部26往上下方向驅動滑件保持部27。在滑件保持部27設置有用於在水平方向驅動滑件68之線性驅動部28,且在其前端安裝有上述之滑件68。 Then, for one of the holding mechanisms of the slider built in the case of the scribing head, Line description. As shown in FIG. 6A, a linear drive unit 26 that drives the slider holding portion in the vertical direction is provided adjacent to the pressure applying portion 24 and the multi-point tool holding portion 25. The linear drive unit 26 drives the slider holding unit 27 in the vertical direction. The slider holding portion 27 is provided with a linear driving portion 28 for driving the slider 68 in the horizontal direction, and the above-described slider 68 is attached to the tip end thereof.

針對使用本實施形態之多點工具30進行刻劃之情形,使用圖7、圖8進行說明。此外,在圖7、圖8中誇張放大表示圓周部之缺口。在進行刻劃時,如圖7所示般以多點工具30之一個第1缺口、例如缺口34之端部作為尖點,並使刃前端固定銷60之突起部61a、61b與第2缺口45、46卡合而鎖止。以如此方式將多點工具30以不旋轉之狀態固定,並使其相對於基板17而於圖示之箭頭A方向相對移動,以進行刻劃。此時由於使多點工具30不滾動,因此能夠以相同的尖點進行刻劃。 The case where the multipoint tool 30 of the present embodiment is used for scribing will be described with reference to Figs. 7 and 8 . In addition, in FIGS. 7 and 8, the notch of the circumferential portion is exaggeratedly enlarged. When the scribing is performed, as shown in FIG. 7, one of the first notches of the multi-point tool 30, for example, the end of the notch 34 is used as a sharp point, and the projections 61a, 61b and the second notch of the blade distal fixing pin 60 are provided. 45, 46 snap and lock. In this manner, the multi-point tool 30 is fixed in a non-rotating state, and is relatively moved in the direction of the arrow A shown in the figure with respect to the substrate 17 to perform scribing. At this time, since the multi-point tool 30 is not scrolled, it is possible to perform scribing with the same sharp point.

而且,在與基板17相接觸之尖點因磨耗而已經劣化的情形,藉由使多點工具旋轉而變更尖點。 Further, in a case where the sharp point in contact with the substrate 17 has deteriorated due to abrasion, the sharp point is changed by rotating the multi-point tool.

當為了使多點工具30旋轉,而使刻劃頭22本身往上方移動時,則多點工具30與基板17成為不相互接觸。而後,如圖6A(b)所示般藉由線性驅動部26使滑件保持部27往下方移動。接著如圖6B(a)所示般藉由線性驅動部28往圖中右方向驅動滑件68,進一步藉由線性驅動部26使滑件保持部27稍微上升。據此如圖6B(b)及圖7(b)所示般,滑件68之突起部68a與68b,成為與V字形之缺口42、49嵌合。 When the scribing head 22 itself is moved upward in order to rotate the multi-point tool 30, the multi-point tool 30 and the substrate 17 do not contact each other. Then, as shown in FIG. 6A(b), the slider holding portion 27 is moved downward by the linear drive portion 26. Next, as shown in FIG. 6B(a), the slider 68 is driven in the right direction by the linear drive unit 28, and the slider holding portion 27 is slightly raised by the linear drive unit 26. Accordingly, as shown in FIGS. 6B(b) and 7(b), the projections 68a and 68b of the slider 68 are fitted to the V-shaped notches 42, 49.

接著藉由未圖示之汽缸等以對抗彈簧67之方式對鎖止銷63往圖3A之箭頭B方向進行彈壓。據此如圖3B所示般,貫通孔62之內壁與鎖止銷63之錐狀部64a、64b相接之位置改變,使刃前端固定銷60往上方 移位。因此,能夠解除鎖止銷63對多點工具30之鎖止。 Then, the lock pin 63 is biased in the direction of the arrow B of FIG. 3A by a cylinder or the like (not shown) against the spring 67. Accordingly, as shown in FIG. 3B, the position at which the inner wall of the through hole 62 is in contact with the tapered portions 64a, 64b of the lock pin 63 is changed, so that the blade front end fixing pin 60 is upward. Shift. Therefore, the lock of the multi-point tool 30 by the lock pin 63 can be released.

然後,藉由線性驅動部28使滑件68往圖中右側移動,藉此如圖8(a)所示般使多點工具30旋動45°。據此在缺口42、43卡合刃前端固定銷之突起部68b、68c,多點工具30之缺口35成為與基板17抵接之位置。 Then, the slider 68 is moved to the right side in the drawing by the linear driving portion 28, whereby the multi-point tool 30 is rotated by 45° as shown in Fig. 8(a). Accordingly, the notches 42 and 43 are fixed to the projections 68b and 68c of the pin end of the notch 42 and 43, and the notch 35 of the multi-point tool 30 is brought into contact with the substrate 17.

接著藉由未圖示之汽缸對鎖止銷63往箭頭C方向進行彈壓。據此貫通孔62之內壁與鎖止銷63之錐狀部64a、64b相接之位置改變,使刃前端固定銷60往下方移位而如圖8(b)所示般能夠使刃前端固定銷60之突起部61a、61b卡合於缺口46、47。據此而再度將多點工具30鎖止。然後一邊藉由彈簧67而維持鎖止之狀態,一邊使缺口35之端部作為尖點而與基板17接觸,同樣地進行刻劃。藉由重複進行此動作,即使尖點因磨耗而劣化,亦能夠容易地依形成於圓板周圍之缺口數之次數而切換至新的尖點以進行刻劃。 Then, the lock pin 63 is biased in the direction of the arrow C by a cylinder (not shown). Accordingly, the position at which the inner wall of the through hole 62 is in contact with the tapered portions 64a and 64b of the lock pin 63 is changed, and the blade distal end fixing pin 60 is displaced downward to provide the blade tip as shown in Fig. 8(b). The projections 61a and 61b of the fixing pin 60 are engaged with the notches 46 and 47. According to this, the multi-point tool 30 is locked again. Then, while the lock is maintained by the spring 67, the end portion of the notch 35 is brought into contact with the substrate 17 as a sharp point, and the scribe is similarly performed. By repeating this operation, even if the sharp point is deteriorated by abrasion, it is possible to easily switch to a new sharp point in accordance with the number of times of the number of notches formed around the disk to perform the scribing.

接著,針對本發明之第2實施形態進行說明。在該實施形態中,僅刃前端固定銷80有所不同,其他之構成則與第1實施形態同樣。圖9A、圖9B表示該實施形態,且僅刃前端固定銷80以剖面圖表示。刃前端固定銷80,取代從軸之垂直方向傾斜之貫通孔62,設有藉由中心稍微錯開之二個孔81a、81b而使剖面為曲柄狀之貫通孔81。 Next, a second embodiment of the present invention will be described. In this embodiment, only the blade distal end fixing pin 80 is different, and the other configuration is the same as that of the first embodiment. 9A and 9B show this embodiment, and only the blade distal end fixing pin 80 is shown in a cross-sectional view. The blade distal end fixing pin 80 is provided with a through hole 81 having a crank-like cross section by a pair of holes 81a and 81b which are slightly shifted from the center instead of the through hole 62 which is inclined from the vertical direction of the shaft.

亦在該情形,在使刃前端旋轉的情形時,對鎖止銷63之圓柱部66往箭頭方向B進行按壓。據此如圖9B所示般,能夠以對抗彈簧67之方式使鎖止銷63往右側移動而使刃前端固定銷80往上方移動。藉此解除多點工具30之鎖止,成為可旋轉自如。然後藉由使滑件68滑動而使其旋轉既定角度。然後藉由對鎖止銷63往箭頭C左方向進行彈壓而使刃前端固定 銷80往下方移動。藉此能夠鎖止多點工具30。若重複此動作則即使尖點因磨耗而劣化,亦能夠容易地依形成於多點工具之缺口數量而切換到新的尖點以進行刻劃。此外,即便使工具旋轉,由於在工具之前視觀察下刃前端之稜線與基板接觸之角度不變,因此可容易地調整尖點相對於基板之接觸角度。尤其是,若將第1缺口等間隔地設置,則能夠僅以使工具旋轉而容易地設定新的尖點之位置與角度。 Also in this case, when the tip end of the blade is rotated, the cylindrical portion 66 of the lock pin 63 is pressed in the arrow direction B. As a result, as shown in FIG. 9B, the lock pin 63 can be moved to the right side against the spring 67, and the blade distal end fixing pin 80 can be moved upward. Thereby, the locking of the multi-point tool 30 is released, and the rotation is freely rotatable. The slider 68 is then rotated by a predetermined angle by sliding it. Then, the front end of the blade is fixed by pressing the lock pin 63 in the left direction of the arrow C. The pin 80 moves downward. Thereby, the multi-point tool 30 can be locked. If this action is repeated, even if the sharp point is deteriorated due to wear, it is possible to easily switch to a new sharp point to perform the scoring depending on the number of notches formed in the multi-point tool. Further, even if the tool is rotated, since the angle at which the ridge line of the tip end of the lower blade contacts the substrate is not changed before the tool, the contact angle of the cusp with respect to the substrate can be easily adjusted. In particular, when the first notches are provided at equal intervals, the position and angle of the new sharp points can be easily set only by rotating the tool.

此外,在上述之實施形態中,雖在多點工具之圓周上之周圍形成有八個第1缺口與第2缺口,但當然亦可進一步地形成有多個缺口。此外,第2缺口之形狀不限於V字形,亦可為U字形等其他形狀。進一步地,必須以等間隔形成第2缺口。此外,亦針對第1缺口,較佳為以能夠在藉由第2缺口進行定位時在相同位置與基板接觸之方式而為等間隔。 Further, in the above-described embodiment, eight first notches and second notches are formed around the circumference of the multi-point tool, but of course, a plurality of notches may be further formed. Further, the shape of the second notch is not limited to a V shape, and may be other shapes such as a U shape. Further, the second notch must be formed at equal intervals. Further, it is preferable that the first notch is equally spaced so as to be in contact with the substrate at the same position when positioning by the second notch.

此外,在上述之各實施形態中,雖在刻劃頭設置多點工具之定位裝置,但亦可在刻劃裝置本身設置該定位裝置。在滑件設於刻劃裝置本身的情形,較佳為設置於平台之端部或刻劃頭之待機位置附近。在將滑件設置於刻劃裝置本身的情形,只要在變更尖點時,使刻劃頭相對地往水平方向移動至滑件68之位置,進一步使刻劃頭或滑件68相對地往垂直方向移動直至與滑件68抵接即可。之後關於變更尖點的動作則與第1實施形態同樣,並省略其說明。 Further, in each of the above embodiments, the positioning device of the multi-point tool is provided on the scribing head, but the positioning device may be provided in the scribing device itself. In the case where the slider is provided on the scoring device itself, it is preferably disposed near the end of the platform or the standby position of the scribing head. In the case where the slider is disposed on the scoring device itself, as long as the cusp is changed, the scribe head is relatively moved horizontally to the position of the slider 68, further causing the scribe head or slider 68 to be relatively vertical The direction is moved until it abuts against the slider 68. The operation of changing the cusp is the same as that of the first embodiment, and the description thereof will be omitted.

進一步地,在上述之各實施形態中,雖將滑件設成為在細長之直方體構件形成三個部位之等間隔之突起部68a~68c而成者,但只要以能夠與多點工具之一個部位的第2缺口抵接之方式至少具有一個突起即可。在該情形,只要預先設定好滑件之移動距離、亦即多點工具之旋轉量即可。 此外,滑件並不限於直方體構件,亦可為具有能夠與多點工具之缺口抵接之突起的圓柱體或任意形狀。 Further, in each of the above-described embodiments, the slider is formed as the protrusions 68a to 68c which are formed at equal intervals in three places in the elongated rectangular member, but only one of the multi-point tools can be used. The manner in which the second notch of the portion abuts may have at least one protrusion. In this case, the moving distance of the slider, that is, the amount of rotation of the multi-point tool may be set in advance. Further, the slider is not limited to the rectangular member, and may be a cylinder having any protrusion that can abut against the notch of the multi-point tool or an arbitrary shape.

此外,在上述之各實施形態中,雖在刃前端固定銷形成有貫通孔,但亦可為供鎖止銷插入之溝槽部。此外,刃前端固定銷雖為圓柱體但亦可為角柱,亦針對鎖止銷只要是具有錐狀部之形狀則可設成為角柱、組合角錐而成之形狀等任意之形狀。 Further, in each of the above-described embodiments, the through hole is formed in the blade distal end fixing pin, but the groove portion into which the lock pin is inserted may be used. Further, the blade distal end fixing pin may be a cylindrical body, but may be a corner post, and the locking pin may have any shape such as a corner post or a combined pyramid shape as long as it has a tapered shape.

本發明之多點工具能夠於刻劃脆性材料基板之刻劃裝置中使用,尤其是對於磨耗多之刻劃對象亦能很有效果地使用。 The multi-point tool of the present invention can be used in a scoring device for scribing a substrate of a brittle material, and is particularly useful for scoring objects with a large amount of wear.

24‧‧‧壓力賦予部 24‧‧‧ Pressure Giving Department

30‧‧‧多點工具 30‧‧‧Multi-point tools

60‧‧‧刃前端固定銷 60‧‧‧blade front end fixing pin

62‧‧‧貫通孔 62‧‧‧through holes

63‧‧‧鎖止銷 63‧‧‧Lock pin

65、66‧‧‧圓柱部 65, 66‧‧‧ cylindrical

67‧‧‧彈簧 67‧‧‧ Spring

68‧‧‧滑件 68‧‧‧Sliding parts

68a、68b、68c‧‧‧突起部 68a, 68b, 68c‧‧‧ protrusions

Claims (8)

一種多點工具之定位機構,係進行呈旋轉自如地安裝在刻劃頭之多點工具之定位,其特徵在於:該多點工具,在旋轉對稱體之基座外周形成有多個第1缺口,在該第1缺口間呈等間隔地形成有較第1缺口更深之多個第2缺口;該定位機構,具備:刃前端固定銷,在一端具有與該多點工具之第2缺口之間隔相等的一對突起部,在中央具有相對於與軸垂直之另一軸傾斜之貫通孔;以及鎖止銷,插入於該刃前端固定銷之貫通孔,藉由與該刃前端固定銷之軸垂直地滑動並藉由該刃前端固定銷而使該多點工具鎖止及解除鎖止。 A positioning mechanism for a multi-point tool is a positioning of a multi-point tool that is rotatably mounted on a scribing head, wherein the multi-point tool has a plurality of first notches formed on a periphery of a base of the rotationally symmetric body a plurality of second notches deeper than the first notch are formed at equal intervals between the first notches; and the positioning mechanism includes a blade distal fixing pin and has a gap with the second notch of the multi-point tool at one end An equal pair of protrusions having a through hole at the center inclined with respect to the other axis perpendicular to the axis; and a lock pin inserted into the through hole of the front end of the blade fixing pin, perpendicular to the axis of the pin fixing the front end of the blade The multi-point tool is locked and unlocked by sliding the blade and fixing the pin at the tip end. 一種多點工具之定位機構,係進行呈旋轉自如地安裝在刻劃頭之多點工具之定位,其特徵在於:該多點工具,在旋轉對稱體之基座外周形成有多個第1缺口,在該第1缺口間呈等間隔地形成有較第1缺口更深之多個第2缺口;該定位機構,具備:刃前端固定銷,在一端具有與該多點工具之第2缺口之間隔相等的一對突起部,在中央具有與軸垂直地形成曲柄狀之貫通孔;以及鎖止銷,插入於該刃前端固定銷之貫通孔,藉由與該刃前端固定銷之軸垂直地滑動並藉由該刃前端固定銷而使該多點工具鎖止及解除鎖止。 A positioning mechanism for a multi-point tool is a positioning of a multi-point tool that is rotatably mounted on a scribing head, wherein the multi-point tool has a plurality of first notches formed on a periphery of a base of the rotationally symmetric body a plurality of second notches deeper than the first notch are formed at equal intervals between the first notches; and the positioning mechanism includes a blade distal fixing pin and has a gap with the second notch of the multi-point tool at one end a pair of equal protrusions having a through-hole formed in a crank shape perpendicularly to the shaft at the center; and a lock pin inserted into the through hole of the pin at the tip end of the blade, sliding perpendicularly to the axis of the tip fixing pin of the blade The multi-point tool is locked and unlocked by the blade front end fixing pin. 如申請專利範圍第1或2項之多點工具之定位機構,其中,該鎖止銷,以前端細之錐狀部相互相向配合之方式形成,該錐狀部插入於該刃前端固定銷之貫通孔。 The positioning mechanism of the multi-point tool of the first or second aspect of the patent application, wherein the locking pin is formed by the tapered tapered portions of the front end being mutually opposed to each other, and the tapered portion is inserted into the front end of the blade to fix the pin Through hole. 如申請專利範圍第1或2項之多點工具之定位機構,其進一步具有使該多點工具旋轉既定角度之滑件。 The positioning mechanism of the multi-point tool of claim 1 or 2 further has a slider for rotating the multi-point tool at a predetermined angle. 一種多點工具,係呈旋轉自如地安裝在刻劃頭,其特徵在於:該多點工具,在旋轉對稱體之基座外周形成有多個第1缺口,在該第1缺口間呈等間隔地形成有較第1缺口更深之多個第2缺口,在進行刻劃時藉由在該第2缺口抵接刃前端固定銷而抑制其旋轉。 A multi-point tool is rotatably mounted on a scribe head, wherein the multi-point tool has a plurality of first notches formed on an outer circumference of a base of the rotationally symmetric body, and is equally spaced between the first notches A plurality of second notches deeper than the first notch are formed in the ground, and the pin is restrained from rotating at the tip end of the second notch abutting blade at the time of scribing. 一種刻劃頭,係具備安裝成旋轉自如之多點工具、與該多點工具之定位機構,其特徵在於:該多點工具,在旋轉對稱體之基座外周形成有多個第1缺口,在該第1缺口間呈等間隔地形成有較第1缺口更深之多個第2缺口;該定位機構,具備:刃前端固定銷,在一端具有與該多點工具之第2缺口之間隔相等的一對突起部,在中央具有相對於與軸垂直之另一軸傾斜之貫通孔;以及鎖止銷,插入於該刃前端固定銷之貫通孔,藉由與該刃前端固定銷之軸垂直地滑動並藉由該刃前端固定銷而使該多點工具鎖止及解除鎖止。 A scribing head having a multi-point tool mounted in a rotatable manner and a positioning mechanism of the multi-point tool, wherein the multi-point tool has a plurality of first notches formed on an outer circumference of a base of the rotationally symmetric body. A plurality of second notches deeper than the first notch are formed at equal intervals between the first notches; and the positioning mechanism includes a blade distal fixing pin having an interval equal to the second notch of the multi-point tool at one end a pair of protrusions having a through hole at the center inclined with respect to the other axis perpendicular to the axis; and a lock pin inserted into the through hole of the front end of the blade fixing pin, perpendicular to the axis of the front end fixing pin of the blade The multi-point tool is locked and unlocked by sliding and fixing the pin at the front end of the blade. 如申請專利範圍第6項之刻劃頭,其具備使該多點工具旋轉既定角度之滑件。 For example, the scribe head of claim 6 is provided with a slider for rotating the multi-point tool at a predetermined angle. 一種刻劃裝置,具備刻劃頭、呈旋轉自如地安裝在刻劃頭之多點工具、及該多點工具之定位機構,其特徵在於:該多點工具,在旋轉對稱體之基座外周形成有多個第1缺口,在該第1缺口間呈等間隔地形成有較第1缺口更深之多個第2缺口;該定位機構,具備: 刃前端固定銷,在一端具有與該多點工具之第2缺口之間隔相等的一對突起部,在中央具有相對於與軸垂直之另一軸傾斜之貫通孔;鎖止銷,插入於該刃前端固定銷之貫通孔,藉由與該刃前端固定銷之軸垂直地滑動並藉由該刃前端固定銷而使該多點工具鎖止及解除鎖止;以及滑件,使該多點工具旋轉既定角度。 A scoring device, comprising: a scribing head, a multi-point tool rotatably mounted on the scribing head, and a positioning mechanism of the multi-point tool, wherein the multi-point tool is outside the base of the rotationally symmetric body a plurality of first notches are formed, and a plurality of second notches deeper than the first notch are formed at equal intervals between the first notches; and the positioning mechanism includes: The blade distal end fixing pin has a pair of protrusions at one end equal to the distance between the second notches of the multi-point tool, and has a through hole at the center inclined with respect to the other axis perpendicular to the axis; the lock pin is inserted into the blade a through hole of the front end fixing pin, which slides perpendicularly to an axis of the front end fixing pin of the blade and locks and unlocks the multi-point tool by fixing the pin at the front end of the blade; and a slider for the multi-point tool Rotate the given angle.
TW104112550A 2014-06-30 2015-04-20 Multi-point tool, positioning mechanism of multi-point tool, scribing head and scribing device TW201600290A (en)

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