TWI663133B - Holder, holder unit and scribing device - Google Patents

Abstract

The present invention is completed in view of the problem that the position of the scribing line is shifted due to the movement of the scribing wheel toward the pin axis, and provides a method for stabilizing the position of the scribing line without generating a desired position shift Holder, holder unit and scribing device.

The holder unit 30 includes: a scribing wheel 40; a pin 50 penetrating through a through hole of the scribing wheel; and a holder 60 including a pair of holder base materials 61a and 61b and a holding portion 62a and 62b, respectively. Pin holes 64a, 64b; and the holder base material 61a is formed of a magnetic material, and the holder base material 61b is formed of a non-magnetic material. Thereby, since the scribing wheel is drawn toward the holder base 61a side containing the magnetic material, the position where the scribing is formed can be stabilized.

Description

Holder, holder unit and scribing device

The present invention relates to a holder, a holder unit, and a scribing device used when a scribe is formed on a surface of a brittle material substrate during cutting of a brittle material substrate such as a glass substrate.

When cutting a brittle material substrate such as a glass substrate to a desired size, a scribing device is generally used. This scribing device is used by attaching a scribing wheel to a holder for holding the scribing wheel. The scribing wheel is held between the holding portions (holding grooves) by inserting a cylindrical pin into a pin hole formed in the holding portion of the holder and a through hole formed in a side surface of the scribing wheel.

Furthermore, the scribing wheel mounted on the holder is rotatably held, and advances while rotating on the surface of the brittle material substrate, thereby forming a scribing line on the brittle material substrate. In addition, as such a scribing device, there is a scribing device described in Patent Document 1, for example.

[Prior technical literature] [Patent Literature]

[Patent Document 1] International Patent Publication WO2007 / 063979

As described above, the scribing wheel mounted on the holder must rotate in the holding groove in order to form a scribing line. Therefore, the width of the holding groove is slightly wider than the thickness of the scribing wheel, and a gap is ensured between the scribing wheel and the holding portion. Specifically, when the thickness of the scribing wheel is 0.65mm At this time, the width of the holding groove becomes wider by about 0.02 mm. In this way, the scribing wheel is rotatably held by the gap between the scribing wheel and the holding portion.

On the other hand, the scribing wheel can move about 0.02 mm along the pin axis in the holder groove through the gap. Therefore, when the scribing line is formed, the scribing wheel moves in the direction of the pin axis, so that the position where the scribing line is formed becomes unstable. In the previous scribing device, the situation where the scribing line shifted from a desired position became a problem. .

The present invention is completed in view of the problem that the position of the scribing line is shifted due to the movement of the scribing wheel in the direction of the pin axis, and an object of the present invention is to provide a stable position of the scribing line without causing deviation from a desired position Removable holder, holder unit and scribing device.

In order to achieve the above object, the holder of the present invention is characterized by including: a main body portion; a pair of holding portions formed on the lower side of the main body portion; and pin holes that are coaxially formed on the holding portions; In addition, the holder is used to hold the scribing wheel rotatably between the holding parts through a pin hole penetrating through a penetrating hole of the scribing wheel and inserted into the pin hole, and a pair of the holding One of the parts contains a magnetic material and the other contains a non-magnetic material.

According to the holder of the present invention, the scribing wheel is pulled toward a holding portion side by magnetizing a holding portion containing a magnetic material. Thereby, the scribing wheel is restricted from moving in the pin axis direction due to the gap between the scribing wheel and the holding portion. Therefore, the holder can stabilize the formation position of the scribe line.

In addition, the holder of the present invention is characterized in that the main body is formed by screwing a holder substrate including one of the magnetic materials and another holder substrate including the non-magnetic materials.

According to the holder of the present invention, when a pin hole is worn out, only one holder substrate can be simply replaced by removing the screw and disassembling it.

In addition, the holder unit of the present invention is characterized by comprising: a scribing wheel; a pin shaft; A through hole penetrating through the scribing wheel; and a holder having: a main body portion; a pair of holding portions formed on the lower side of the main body portion to hold the scribing wheel; and a pin hole located on a coaxial line And each is formed on the holding portion and is used for inserting the pin; and one of the pair of holding portions includes a magnetic material and the other includes a non-magnetic material.

According to the holder unit of the present invention, the scribing wheel is drawn toward a side of a holding portion by magnetizing a holding portion containing a magnetic material, so that the scribing wheel is restricted from moving due to the gap between the scribing wheel and the holding portion. Move in the direction of the pin. Therefore, the holder unit can stabilize the formation position of the scribe line.

In addition, the holder unit of the present invention is characterized in that the main body is formed by screwing a holder base material including one of the magnetic materials and another holder base material including the non-magnetic materials.

According to the holder unit of the present invention, when a pin hole is worn out, only a holder base material can be replaced by disassembling by disassembling the screw, and it can be simply performed when the scribing wheel is worn out. replace.

The holder unit of the present invention is characterized in that a magnet is mounted on a surface of the magnetic material.

According to the holder unit of the present invention, the scribe wheel can be pulled by utilizing a stable magnetic force when a holding portion is magnetized.

The scribing device of the present invention includes the holder unit described above.

According to the scribing device of the present invention, the scribing wheel is restricted from moving in the direction of the pin axis due to the gap between the scribing wheel and the holding portion. Therefore, the scribing device can stabilize the formation position of the scribing.

1‧‧‧ scribing device

10‧‧‧mobile station

11‧‧‧ball screw

12‧‧‧rail

13‧‧‧ Motor

14‧‧‧platform

15‧‧‧ Brittle material substrate

16‧‧‧CCD camera

17‧‧‧ Cross arm

18a, 18b

19‧‧‧Guide

20‧‧‧ crossed head

21‧‧‧ holder connector

22‧‧‧Mounting Department

22a‧‧‧Vertical wall

22b‧‧‧horizontal wall

23‧‧‧Rotary shaft

24a, 24b‧‧‧bearing

25‧‧‧Screw holes

30, 130, 230‧‧‧ holder units

31‧‧‧Mounting screws

40, 140, 240‧‧‧

41‧‧‧through hole

42a, 42b‧‧‧ side

50, 150, 250‧‧‧ pins

51‧‧‧ pointed head

60, 160‧‧‧ holder

61, 161‧‧‧ Body

61a, 61b, 161a, 161b, 261a, 261b ‧‧‧ holder substrate

62a, 62b, 162a, 162b‧‧‧

63, 163‧‧‧ holding groove

64a, 64b, 164a, 164b, 264a ‧‧‧ pin holes

65a, 65b, 165a, 165b

66a, 66b, 166‧‧‧ tapped holes

67,167‧‧‧Fixed screws

68a, 68b, 168a, 168b‧‧‧Fixed metal parts

69a, 69b, 169a, 169b‧‧‧screw

80‧‧‧ Magnet

FIG. 1 is a schematic view of a scribing device according to the first embodiment.

FIG. 2 (A) is a front view of the holder unit of Embodiment 1, and FIG. 2 (B) is a side view of the holder unit.

FIG. 3 is an enlarged view of a region III in FIG. 2 (A).

FIG. 4 (A) is a front view of the holder unit of Embodiment 2, and FIG. 4 (B) is a side view of the holder unit.

FIG. 5 is a front view of a holder unit of Embodiment 3. FIG.

Hereinafter, embodiments of the present invention will be described using drawings. However, the embodiment shown below is an example for embodying the technical idea of the present invention, and is not intended to limit the present invention to this embodiment. The present invention can also be applied to other embodiments included in the scope of patent application.

[Embodiment 1]

FIG. 1 is a schematic view of a scribing device 1 according to an embodiment of the present invention. The scribing device 1 includes a mobile station 10. The moving stage 10 is screwed with the ball screw 11 and is driven by a motor to rotate the ball screw 11 so that it can move along the pair of guide rails 12 in the y-axis direction.

A motor 13 is provided on the upper surface of the mobile station 10. The motor 13 rotates the upper platform 14 in the xy plane to position it at a specific angle. The platform 14 capable of horizontal rotation by the motor 13 includes a vacuum suction mechanism (not shown), and the vacuum suction mechanism holds the brittle material substrate 15 placed on the platform 14.

The brittle material substrate 15 is a glass substrate, a ceramic substrate including a low-temperature baked ceramic or a high-temperature baked ceramic, a silicon substrate, a compound semiconductor substrate, a sapphire substrate, a quartz substrate, and the like. In addition, the brittle material substrate 15 may be a substrate attached to the surface or inside of the substrate or containing a thin film or a semiconductor material. In addition, the brittle material substrate 15 may have a film of a non-brittle material or the like adhered to the surface thereof.

The scribing device 1 is provided above the brittle material substrate 15 placed on the platform 14, and is provided with two CCD (Charge Coupled Device) cameras 16. These cameras are used to photograph the surface of the brittle material substrate 15. Alignment mark. The cross arm 17 is mounted on the pillars 18 a and 18 b so as to span the mobile station 10 and the platform 14 on the upper portion of the mobile station 10.

A guide 19 is mounted on the cross arm 17, and the scribing head 20 is guided by the guide 19 to the x-axis. Set the direction of movement. A holder unit 30 that holds the scribing wheel 40 on the holder 60 is mounted on the lower end of the scribe head 20 via a holder joint 21.

Here, an outline of a step of forming a scribe line on the brittle material substrate 15 using the scribe device 1 will be described. First, the scribing wheel 40 is attached to the holder 60, and the holder 60 is attached to the scribing head 20. Then, the scribing device 1 positions the brittle material substrate 15 by a pair of CCD cameras 16. Next, the scribing device 1 moves the scribing head 20 to a specific position, and applies a specific weight to the scribing wheel 40 to make it contact the brittle material substrate 15. Then, the scribing device 1 moves the scribing head 20 in the X-axis direction to form a specific scribing line on the surface of the brittle material substrate 15. The scribing device 1 rotates the stage 14 or moves in the Y-axis direction as necessary, and forms a scribing line in the same manner as described above.

Next, the details of the holder unit 30 will be described using drawings. FIG. 2 (A) is a front view of the holder unit 30, and FIG. 2 (B) is a side view of the holder unit 30. Moreover, in FIG. 2, the holder joint 21 for directly mounting the holder unit 30 is also illustrated. FIG. 3 is an enlarged view of a region III surrounded by a one-dot chain line in FIG. 2 (A). In addition, in FIG. 3, illustration of a part of the structure is omitted.

The holder unit 30 is a member in which the scribing wheel 40, the pin 50, and the holder 60 are integrated. As shown in FIG. 2, the holder unit 30 is mounted on the holder joint 21 by mounting screws 31.

Here, the holder joint 21 includes: a mounting portion 22 including a vertical wall 22 a and a horizontal wall 22 b and having an inverted L-shaped cross-section; and a rotation shaft 23 facing laterally from a top surface of the horizontal wall 22 b of the mounting portion 22 Extending in the vertical direction; and two bearings 24a, 24b, which are inserted through the rotation shaft 23.

The holder unit 30 mounted on the holder joint 21 is such that the side surface of the holder unit 30 is in contact with the vertical wall 22a of the mounting portion 22, and the upper surface of the holder unit 30 is in contact with the horizontal wall 22b. In addition, as shown in FIG. 2 (A), a vertical hole 22 is formed in the vertical wall 22a.

Further, the holder joint 21 allows the holder unit 30 mounted on the mounting portion 22 to be self-drawn. The thread head 20 is exposed to the inside of the scribe head 20 so as to be exposed. At this time, the holder unit 30 fixed to the holder joint 21 can rotate freely around the rotation shaft 23. When a scribe line is formed on the surface of the brittle material substrate 15 using the scribe device 1, the scribe wheel 40 rotates to advance in the direction of arrow R in FIG. 2 (B). In addition, the scribing device 1 may be configured such that the holder joint 21 is not used, and the holder unit 30 itself includes a rotation shaft 23 or bearings 24a and 24b.

The scribing wheel 40 is a disc-shaped member formed of, for example, sintered diamond or cemented carbide. The scribing wheel 40 has a property of being attracted by a magnet. Specifically, since the scribing wheel 40 includes a ferromagnetic material such as cobalt, which is a bonding material of sintered diamond or a cemented carbide, the scribing wheel 40 itself is pulled by a magnet.

In the scribing wheel 40, a through hole 41 through which the pin shaft 50 passes is formed at the center of both side surfaces 42a and 42b of the circular plate. In the scribing wheel 40, a V-shaped blade forming a ridge line is formed on the outer peripheral portion. The thickness of the scribing wheel 40 in this embodiment is about 0.65 mm, the outer diameter is about 2.0 mm, the diameter of the through hole 41 is about 0.8 mm, and the tip angle of the knife is about 130 °.

The scribing wheel 40 includes a scribing wheel formed of a single crystal diamond or a polycrystalline diamond in addition to a scribing wheel formed of a sintered diamond or a cemented carbide. If the scribing wheel 40 is formed of a single crystal diamond or a polycrystalline diamond, the scribing wheel 40 may have a property of being attracted by a magnet, for example, by forming a layer containing a ferromagnetic material on the side surfaces 42a and 42b of the disc. Make up.

The pin 50 is a cylindrical member formed of, for example, sintered diamond or cemented carbide. As shown in FIG. 2 (A), one end is a pointed portion 51 having a pointed shape. The diameter of the pin 50 in this embodiment is about 0.8 mm.

The holder 60 includes a body portion 61 that uses one pair of holder base materials 61a, 61b of the same shape, and the sides of the holder base materials 61a, 61b are in contact with each other and fixed with screws.

As shown in FIG. 2 (B), the holder base materials 61a and 61b have a ladder shape with a narrower width toward the lower end in a side view. The ladder-shaped portions of the holder base materials 61a and 61b are divided into The holding portions 62a and 62b are separately formed, and the holding grooves 63 are formed between the holder base materials 61a and 61b and the holding portions 62a and 62b in a state where the holder base materials 61a and 61b are assembled.

In the holding portions 62a and 62b, pin holes 64a and 64b through which the pin shaft 50 is inserted are formed at coaxial positions. Therefore, the side surface 42a of the scribing wheel 40 faces the holding portion 62a, and the side surface 42b faces the holding portion 62b. The facing surface of the holding portion 62a facing the side surface 42a becomes the holding wall 65a, and the facing surface of the holding portion 62b facing the side surface 42b becomes the holding wall 65b.

Threaded holes 66a and 66b are formed in the upper portions of the holder base materials 61a and 61b to which the mounting screws 31 are inserted. In addition, in the holder base materials 61a and 61b, screw holes for fixing (not shown) are formed on both sides of the screw holes 66a and 66b, respectively. In addition, the holder base 61a and the holder base 61b are fixed to the corresponding screw holes for fixing with the holder base 61a and the holder base 61b to form the body portion 61 of the holder 60. On the other hand, since the fixing screw 67 can be removed and disassembled into the holder base 61a and the holder base 61b, the holder unit 30 can simply replace the worn-out scribing wheel 40 or pin 50. In addition, for example, when one of the pin holes 64a, 64b is worn internally, the holder unit 30 may replace only the holder base materials 61a, 61b on the worn side.

In addition, the fixed metal piece 68a is attached to the holder base 61a side with a screw 69a, and the fixed metal piece 68b is attached to the holder base 61b side with a screw 69b. The fixed metal pieces 68a, 68b are members for covering the pin holes 64a, 64b. In addition, the fixed metal pieces 68a, 68b and the screws 69a, 69b are not shown in FIG. 3.

In the holder 60 described above, the holder base 61a and the holder base 61b include different materials from each other. Specifically, the holder base material 61 a includes a magnetic material, and carbon tool steel or stainless steel having a ferrite system having magnetic properties is used. On the other hand, the holder base material 61b includes a non-magnetic material, and stainless steel such as Vosstian iron is used.

Further, the holder unit 30 includes a scribing wheel 40, a pin 50 that penetrates through the through hole 41 of the scribing wheel 40, and a retainer 60 that is provided on the holding portions 62a, 62b provided on the lower side of the body portion 61. A pin shaft 50 is inserted into the pin holes 64a and 64b.

The holder unit 30 is fixed to the holder joint 21 by inserting and screwing mounting screws 31 into the screw holes 66 a and 66 b of the holder 60 and the screw holes 25 of the vertical wall 22 a of the holder joint 21.

In addition, the holder unit 30 is formed by a pair of holder base materials 61a and 61b to form a body portion 61 of the holder 60. One holder base material 61a includes a magnetic material and the other holder base material 61b includes a non-magnetic material. .

Therefore, by holding the holder base material 61 a magnetized, the holder unit 30 can attract the scribing wheel 40 having the property of being attracted to a magnet toward the holder base 61 a side.

Specifically, as shown in FIG. 3, the scribing wheel 40 is attracted to the holder base 61a side containing a magnetic material, and the side surface 42a of the scribing wheel 40 is in contact with the holding wall 65a.

With such a holder unit 30, the clearance between the side surface 42a of the scribing wheel 40 and the holding wall 65a becomes zero. Therefore, the scribing wheel 40 is restricted from moving along the pin shaft 50 when forming a scribing line. Therefore, the scribing device 1 stabilizes the position where the scribing is formed, and can form a scribing to a desired position. In addition, since only the holder base material 61a containing a magnetic material can be magnetized, the holder unit 30 can simply restrict the movement of the scribing wheel 40 without performing complicated processing or the like on the holder 40.

Furthermore, in the present embodiment, the holder base material 61a is directly attached to the holder base material 61a when the scribe line is used to form a scribe line other than the operation steps for forming the scribe line, and the scribe line is formed in the operation step. This magnet is detached to magnetize the holder base 61a. Even with this method, a magnetic force sufficient to attract the scribing wheel 40 to the holder base 61a can be obtained.

[Embodiment 2]

Next, a holder unit 130 according to another embodiment will be described with reference to the drawings. FIG. 4 (A) is a front view of the holder unit 130 according to the second embodiment, and FIG. 4 (B) is a side view of the holder unit 130.

The holder unit 130 differs from the holder unit 30 of the first embodiment in that it constitutes a holder. The shapes of the holder base materials 161a and 161b of the holder 160. The scribing wheel 140 and the pin 150 have the same configuration as the scribing wheel 40 and the pin 50 of the first embodiment, and descriptions thereof are omitted.

The holder 60 of the holder unit 30 of the first embodiment includes a main body portion 61 which uses one of the same shape of the pair of holder base materials 61a and 61b, and the sides of the holder base materials 61a and 61b are in contact with each other and used. Screwed and fixed.

On the other hand, the shape of the body portion 161 of the holder 160 of the holder unit 130 is the same as that of the body portion 61, but includes the following holder base material 161a and holder base material 161b. The holder base material 161a is formed with a holding portion. 162a, the holder base material 161b is formed with a holding portion 162b and a screw hole 166, and the screw hole 166 is used to screw the holder unit 130 to the vertical wall 22a of the holder joint 21 with a mounting screw (not shown).

Regarding other structures, the holder base materials 161a and 161b have the same configuration as the holder base materials 61a and 61b of the first embodiment. Specifically, two holder screw holes (not shown) for fixing are formed in the holder base materials 161a and 161b, respectively, and the holder base material 161a and the holder are held by using fixing screws 167 to the corresponding fixing screw holes. The holder base 161b is fixed to form a body portion 161 of the holder 160.

Further, a holding groove 163 is formed between the holding portion 162a and 162b. In the holding portions 162a and 162b, pin holes 164a and 164b through which the pin shaft 150 is inserted are formed at coaxial positions. The side surface 142a of the scribing wheel 140 faces the holding portion 162a, and the side surface 142b faces the holding portion 162b. The facing surface of the holding portion 162a facing the side surface 142a is a holding wall 165a, and the facing surface of the holding portion 162b facing the side surface 142b is a holding wall 165b.

The fixing metal pieces 168a and 168b for covering the pin holes 164a and 164b are mounted with screws 169a and 169b.

Moreover, in the holder 160 as described above, the holder base material 161a includes a magnetic material, and the holder base material 161b includes a non-magnetic material.

Therefore, by magnetizing the holder base material 161a, the holder unit 130 can attract the scribing wheel 140 having the property of being attracted by a magnet to the holder base material 161a side. With this solid The gap between the side surface 142a of the scribing wheel 140 and the holding wall 165a becomes zero when the holder unit 130 is held. Therefore, the scribing wheel 140 is restricted to move along the pin 50 when forming the scribing line. The scribe device 1 provided with the holder unit 140 stabilizes the position where the scribe is formed, and can form a scribe to a desired position.

The holder 160 of the present embodiment includes at least a holder base material 161a having a holding portion 162a, and a holder base material 161b having a holding portion 162b and a screw hole 166. Therefore, when the holder base material 161a of the magnetic material is more expensive than the holder base material 161b of the non-magnetic material, the usage amount of the holder base material 161a can be reduced. It is also possible to have a configuration in which the shapes of the holder base material 161a and the holder base material 161b are reversed.

That is, as long as the holder 160 includes a magnetic material and the holding portion 162b includes a non-magnetic material, the shape of the holder base material 161a and the holder base material 161b may be different. In the case where the holder base materials 61a and 61b are not limited to the same shape as in the first embodiment, the holder base materials 161a and 161b can be designed in different shapes as in this embodiment, and the selection of the best material considering cost can be expanded range.

[Embodiment 3]

Next, a holder unit 230 according to another embodiment will be described with reference to the drawings. FIG. 5 is a front view of the holder unit 230 according to the third embodiment.

The holder unit 230 is different from the holder unit 30 of the first embodiment in a method of magnetizing a holder base material 261a containing a magnetic material. The scribing wheel 240 and the pin shaft 250 have the same configuration as the scribing wheel 40 and the pin shaft 50 of the first embodiment, and descriptions thereof are omitted.

The holder base material 61 of the first embodiment is obtained by directly mounting the magnet on the holder base material 61a when the scribe line is used to form a scribe line, and removing the magnet during the scribe line forming step. The holder base 61a is magnetized.

On the other hand, the holder base material 261a of the holder unit 230 is a surface in which the magnet 80 is directly mounted on the holder base material 261a. Specifically, the holder base material 261a of the holder unit 230 is provided with a magnet 80 in place of the cap pin hole 264a instead of the fixing of the first embodiment. 定 METALpiece 68a.

Therefore, the holder unit 230 can magnetize the holder base material 261a by the magnet 80 in advance, so that the scribe wheel 240 can be attracted to the holder base material 261a side by a stable magnetic force. Further, the scribe device 1 provided with the holder unit 240 stabilizes the position where the scribe is formed, and can form a scribe to a desired position.

Moreover, the holder unit 230 directly uses the magnet 80 as a component, thereby reducing the use of other components. The fixed metal piece 68a of the first embodiment may be formed by the magnet 80.

Claims (7)

A holder is characterized by comprising: a main body portion; a pair of holding portions formed on the lower side of the main body portion; and pin holes located on a coaxial axis and formed on the holding portions, respectively; and the holder is borrowed A pin shaft penetrating through the penetrating hole of the scribing wheel and inserted into the pin hole to freely hold the scribing wheel between the holding portions, and one of the pair of holding portions includes magnetic Materials, the other contains non-magnetic materials. For example, the holder of claim 1, wherein the main body is made by screwing a holder substrate containing one of the magnetic materials and another holder substrate containing the non-magnetic materials. A holder unit, comprising: a scribing wheel; a pin that penetrates through a through hole of the scribing wheel; and a holder having: a main body portion; a pair of holding portions formed on the main body portion And a pin hole, which is coaxially formed on the holding portion and is inserted through the pin shaft; and one of the pair of holding portions includes a magnetic material and the other Contains non-magnetic materials. For example, the holder unit of claim 3, wherein the main body is made by screwing a holder base material containing one of the magnetic materials and another holder base material containing the non-magnetic materials. The holder unit of claim 3, wherein a magnet is mounted on the surface of the magnetic material. The holder unit according to claim 4, wherein a magnet is mounted on the surface of the magnetic material. A scribing device comprising a holder unit according to any one of claims 3 to 6.