TW201326072A - Holder, holder unit and scribing device - Google Patents

Abstract

This invention provides a holder for a scribing wheel and a scribing device which can prevent poor rotation of the scribing wheel due to extraneous matters entering the space between the inner wall of a holding groove and the scribing wheel. In the holder 40a having the holding groove 42 for holding the scribing wheel 50, a groove 46 is preformed on the inner wall of the holding groove 42. Thus, extraneous matters entering therein can be discharged by the groove 46, so as to prevent poor rotation of the scribing wheel 50.

Description

Holder, holder unit and scribing device

The present invention relates to a holder for holding a scribing wheel, a holder unit having a scribing wheel, and a scribing device having the holder unit, and the scribing wheel is used for a glass substrate, a ceramic substrate, and a crucible A device for forming a scribe line on a substrate such as a substrate.

Conventionally, in a manufacturing process of a flat display panel such as a liquid crystal display panel or an organic electroluminescence (EL) panel or a solar cell, a step of dividing a brittle material substrate such as a mother glass substrate is designed. In this dividing step, a scribing device is usually used. Further, in the dividing step, the scribing wheel is rotated on the surface of the brittle material substrate while applying a load corresponding to conditions such as the material or thickness of the brittle material substrate to the scribing wheel of the scribing device. A scribe line is formed, and a brittle material substrate is divided along the scribe line by applying a specific force to the brittle material substrate, thereby manufacturing a single panel or various substrates.

As the scribing device, for example, a device shown in Patent Document 1 below is known. The scribing device described in Patent Document 1 has a movable scribing head attached to a bridge body that is erected across a platform on which a brittle material substrate is placed, and a scribing wheel is attached to the scribing head. Device.

Further, the holder for the scribing wheel is configured to have two support portions at the front end, and the scribing wheel is rotatably held in the holding groove between the two support portions.

[Previous Technical Literature] [Patent Literature]

[Patent Document 1]: International Publication WO2007/063979

There is a problem that foreign matter such as tiny glass swarf generated in the dividing step enters between the scribing wheel held by the holding groove and the inner wall of the holding groove, so that the scribing wheel is on the scribing wheel and the inner wall. Rotation in a state in which foreign matter is interposed therebetween causes a rotation failure of the scribing wheel.

That is, there is a tendency that, for example, in the holder unit held by the scribing wheel on the holder, the contact area between the side wall surface of the scribing wheel in the holding groove and the support portion of the holder becomes large, for example, the drawing of the glass substrate The swarf generated during the threading is caught between the side wall surface of the scribing wheel and the inner wall of the support portion of the holder, and the swarf wheel is caused to rotate poorly due to the entangled glass swarf.

Further, if the amount of glass swarf which is caught between the side wall surface of the scribing wheel and the inner wall of the holder is large, the rotatory property of the scribing wheel is further deteriorated, and the blade edge slips on the surface of the glass substrate at the time of scribing. Therefore, there is a concern that the life of the blade tip is shortened. In addition, there is a case where the frictional resistance is large due to the large contact area of the support portion of the retainer and the pin, resulting in the pin being rotated or not rotating in the scribing, thereby eliminating the cutting load on the glass. Uniformity is the main reason for the decrease in the strength of the glass end face or the unevenness of the breaking strength of the glass.

Therefore, the inventors of the present invention have conducted various studies in order to eliminate this problem, and as a result, it has been conceived that the inner wall of the retaining groove is held by the retainer for the scribing wheel having the retaining groove for rotating the disc-shaped scribing wheel. Forming a recess in the opposite direction of the side of the scribing wheel can eliminate the problem, thereby completing the present invention.

That is, an object of the present invention is to solve the above problems, and an object of the invention is to provide a holder, a holder unit having a scribing wheel, and a scribing device having the holder unit, which can prevent the cause of the scribing wheel holder The foreign matter enters between the inner wall of the retaining groove and the scribing wheel, resulting in a poor rotation of the scribing wheel.

In order to achieve the above object, an aspect of the present invention is characterized in that it is a holder that is rotatably held in a disk shape by a pin that is rotatably inserted into a through hole, and a scribing wheel in which a through hole is formed in the center; The holder includes: a holding groove that holds the scribing wheel; a pair of supporting portions formed by the holding grooves and having inner walls facing each other; and a pair of pin holes formed in the pair The support portion is inserted into the pin; and a recessed portion is formed in a portion of the inner wall of the support portion that faces the side surface of the scribing wheel.

According to the holder of the present invention, the holder is formed with a recessed portion on the inner wall of the support portion opposite to the side surface of the scribing wheel, so that the side of the scribing wheel can be used when the scribing wheel is held A space is secured between the support portion and the support portion, thereby reducing the occurrence of poor rotation due to foreign matter intruding between the inner wall and the side surface of the scribing wheel.

Further, in the aspect of the holder of the present invention, the recessed portion is formed in a groove of the inner wall of the support portion so as not to be in contact with the pin hole.

According to the holder of the present invention, the holder is on the inner wall of the support portion and the pin hole Since the groove is formed in a non-contact manner, even if foreign matter such as glass dust intrudes between the inner wall and the scribing wheel, the foreign matter stays in the groove and the rotation of the scribing wheel is reduced.

Further, in the aspect of the retainer of the present invention, the retaining groove includes a narrow portion into which one of the scribing wheels is partially inserted, and a wide portion wider than the narrow portion, and the recessed portion is wider In the web, the pair of pin holes are formed at positions corresponding to the wide portion of the holding groove.

According to the holder of the present invention, the side wall surface of the scribing wheel does not contact the support portion of the holder in the wide portion of the holding groove. Therefore, the contact area between the side wall surface of the scribing wheel inserted into the narrow portion of the retaining groove and the support portion of the retainer is small compared to the case of the previous retainer, so that between the scribing wheel and the support portion of the retainer The frictional resistance becomes small, so that the scribing wheel is easy to rotate. Further, according to the holder of the present invention, the scribe wheel and the pin have good rotatability when scribing, so that the slashing edge of the scribing wheel is less likely to slip on the surface of the scribing substrate when scribing, so that the cutting edge The life is prolonged, and the decrease in the strength of the end face of the scribed substrate after scribing or the variation in the breaking strength can be suppressed.

Further, according to the holder of the present invention, one of the pair of support portions is formed at a position corresponding to the wide portion of the holding groove, and thus is formed around the pin in the wide portion of the holding groove. The space is therefore easy to discharge even if the glass swarf is generated at the time of scribing and the swarf enters the narrow portion of the holding groove.

Further, in order to achieve the above object, an aspect of the present invention is a holder unit, comprising: the holder described in the above aspect; the scribing wheel having a dish shape and having a slope along the circumference portion and Ridge knife, a through hole is formed in the center; and a pin is rotatably inserted into the through hole; and the scribing wheel is held in the holding groove of the holder, and the pin is inserted into the through hole and the pin hole and held by the support unit.

According to the holder unit of the present invention, the holder has a recessed portion formed on the inner wall of the support portion opposite to the side surface of the scribing wheel, so that a space can be secured between the side surface of the scribing wheel and the support portion, thereby Reduces the occurrence of poor rotation caused by foreign matter intruding between the inner wall and the side of the scribing wheel.

Further, in order to achieve the above object, an aspect of the present invention provides a scribing apparatus comprising: the holder unit described in the above aspect; and a scribing head to which the holder unit is attached.

According to the scribing device of the present invention, the retainer is formed with a recessed portion on the inner wall of the support portion, so that a space can be secured between the side surface of the scribing wheel and the support portion, thereby reducing intrusion into the inner wall and the scribing wheel. The occurrence of poor rotation caused by foreign matter between the sides.

Further, in order to achieve the above object, an aspect of the present invention is characterized in that it is a scribing device as described above, and the scribing head has a holder joint for detachably attaching the above retainer unit.

According to the scribing device of the present invention, the scribing device has the retainer joint for attaching and detaching the retainer unit, so that when the scribing wheel is replaced, the retainer unit can be replaced one by one, so that the replacement work can be easily performed.

Hereinafter, embodiments of the present invention will be described using the drawings. Here, the embodiment shown below shows an example of a scribing device, a holder unit, and a holder for embodying the technical idea of the present invention, and is not intended to be The present invention is specific to the scribing device, the retainer unit, and the retainer, and the present invention is also applicable to the case of other embodiments included in the scope of the claims. Further, a member in which the scribing wheel is held by the pin on the holder will be described as a holder unit.

[Embodiment 1]

Fig. 1 is a schematic view showing a scribing device 10 according to a first embodiment of the present invention. In the scribing device 10, the moving table 11 is movably held in the y-axis direction along the pair of guide rails 12a and 12b. The moving table 11 is screwed to the ball screw 13. The ball screw 13 is rotated by the driving of the motor 14, and the moving table 11 is moved in the y-axis direction along the guide rails 12a and 12b.

A motor 15 is provided on the upper surface of the mobile station 11. Motor 15 is a component that rotates platform 16 in the xy plane and is positioned at a particular angle. The brittle material substrate 17 is placed on the stage 16 and held by a vacuum suction mechanism or the like (not shown). Two CCD (Charge Coupled Device) cameras 18 for photographing the alignment marks of the brittle material substrate 17 are provided on the upper portion of the scribing device 10. Further, in the scribing device 10, the bridge body 19 is stretched by the pillars 20a and 20b in the x-axis direction so as to straddle the movable platform 11 and the upper platform 16 thereof.

A guide 22 is attached to the bridge body 19, and the scribing head 21 is movable along the guide 22 in the x-axis direction. Further, a holder unit including the holder 40 of the first embodiment that rotatably holds the scribing wheel 50 (see FIG. 2) is attached to the scribing head 21 of the scribing device 10 via the holder joint 23.

Next, the holder joint 23 to which the holder unit having the holder 40 is attached and the holder 40 will be described with reference to FIGS. 2 and 3. Figure 2 is installed with Front view of the holder joint 23 with the holder unit of the holder 40. Figure 3 is an enlarged perspective view of the holder unit having the holder 40a.

The holder joint 23 is formed in a substantially columnar shape and is composed of a rotating shaft portion 24 and a joint portion 25.

Further, in a state in which the holder joint 23 is attached to the scribing head 21, the two shaft bearings 24 are attached to the rotation shaft portion 24 via the cylindrical spacer 27 to rotatably hold the holder joint 23 The status of 26a, 26b. Further, a front view of the holder joint 23 is shown in Fig. 2, and a cross-sectional view of the bearings 26a, 26b and the spacer 27 attached to the rotating shaft portion 24 is shown.

A circular opening 28 is formed on the lower end side of the cylindrical joint portion 25, and a magnet 29 is embedded in the upper portion of the opening. Further, a holder 40 is detachably attached to the opening 28.

The holder 40 includes a substantially cylindrical metal or resin, and supports portions 41a and 41b are provided on the lower end side thereof. Further, the enlarged view of the lower end side of the holder 40 in Fig. 2 is an enlarged view when viewed in the lateral direction indicated by the arrow A.

A holding groove 42 for holding the scribing wheel 50 is formed between the support portion 41a and the support portion 41b. Further, in the support portions 41a and 41b, hole-shaped pin holes 43a are formed in order to fix the scribing wheel 50. The pin 44 penetrates the pin hole 43a, and the scribing wheel 50 is rotatably mounted. At this time, the inner walls 45a and 45b of the support portion 41a and the support portion 41b are opposed to the circular side faces 52a and 52b of the scribing wheel 50, respectively.

The scribing wheel 50 is formed of, for example, a sintered diamond, and has a dish shape having a wheel diameter of 2.5 mm and a thickness d of about 0.65 mm, and is along the circumference. A blade 51 having a V-shaped vertical cross-sectional shape including a slope and a ridge line is formed. Further, a through hole 53 is formed in the center of the two circular side faces 52a and 52b of the scribing wheel 50. The scribing wheel 50 is rotatably held in the holding groove 42 by the pin 44 penetrating the pin hole 43a described above penetrating the through hole 53. Further, with respect to the thickness of the scribing wheel 50, the interval of the retaining grooves 42 (the distance between the inner wall 45a and the inner wall 45b) is slightly larger, for example, when the thickness d of the scribing wheel 50 is 0.65 mm, the retaining groove 42 The interval is approximately 0.67 mm.

A mounting portion 46 for positioning is provided on the upper end side of the holder 40. The mounting portion 46 is formed by cutting a part of the holder 40, and has an inclined portion 46a and a supporting portion 46b. Further, at least a part of the upper end side of the holder 40 is made of a magnetic metal.

The holder unit having the scribing wheel 50 and the holder 40 is inserted from the mounting portion 46 of the holder 40 toward the opening 28 of the holder joint 23. At this time, the magnetic metal on the upper end side of the holder 40 is attracted by the magnet 29, so that the inclined portion 46a of the mounting portion 46 is in contact with the parallel pin 30 inside the opening 28, so that the holder unit is fixed to the holder. Connector 23. Conversely, when the holder unit is removed from the holder joint 23, it can be easily removed by drawing the holder unit downward.

Here, since the scribing wheel 50 is a consumable item, it is necessary to replace it periodically. In the present embodiment, since the holder unit is attached to the scribing head 21 via the holder joint 23, the holder unit can be easily attached and detached. Therefore, the scribing wheel 50 is not removed from the holder 40, and the scribing wheel 50 and the holder 40 are integrally treated, and the holder unit itself can be replaced, so that the scribing wheel 50 can be easily performed. Replace the job.

Next, as described above, the foreign matter such as minute glass swarf generated in the dividing step enters between the side faces 52a, 52b of the scribing wheel 50 held by the holding groove 42 of the holder 40 and the inner walls 45a, 45b of the holding groove 42. Concerns. Therefore, in the present embodiment, the recessed portions are formed in the inner walls 45a and 45b of the holding groove 42. Specifically, the depressed portion includes a portion such as a groove or a wide portion described below. Therefore, even if foreign matter enters between the inner walls 45a, 45b and the side faces 52a, 52b of the scribing wheel 50, the contact area between the side faces 52a, 52b and the inner walls 45a, 45b becomes smaller, and the rotation of the scribing wheel 50 is reduced. The occurrence of bad. A specific example of the depressed portion formed in the inner walls 45a and 45b of the holding groove 42 will be described with reference to the drawings.

[Example 1]

Fig. 4 is a cross-sectional view showing the holder 40a of the first embodiment. 4(a) is a cross-sectional view taken along line IVa-IVa of FIG. 3, and FIG. 4(b) is a cross-sectional view taken along line IVb-IVb of FIG. 3. In addition, the scribing wheel 50 is indicated by a broken line.

An arc-shaped groove 46 as an example of the recessed portion is formed in the inner walls 45a and 45b of the holder 40a. The groove 46 is disposed at a position opposite to the side faces 52a, 52b of the scribing wheel 50. Therefore, even if foreign matter such as glass swarf enters between the inner walls 45a and 45b and the side faces 52a and 52b, the foreign matter stays in the groove 46, and the influence on the rotation of the scribing wheel 50 can be reduced. Further, since the groove 46 is extended to be opposed to the side faces 52a, 52b of the scribing wheel 50, the foreign matter retained in the groove 46 is discharged to the side without the rotation of the scribing wheel 50. The position of 52a, 52b is opposite, so that the poor rotation of the scribing wheel 50 can be further reduced.

Moreover, since the groove 46 is extended to the end of the holding groove 42, The foreign matter can be discharged to the outside of the holder 40a. Further, since the groove 46 gradually enlarges and extends the width of the groove toward the vertical direction G, the foreign matter tends to face downward, and it is easier to discharge the foreign matter. In the present embodiment, the depth of the groove 46 is fixed, but the depth of the groove may be different depending on the situation. For example, the depth of the groove is deepest at the position opposite the side faces 52a, 52b of the scribing wheel 50, and the depth of the groove is not aligned with the side faces 52a, 52b of the scribing wheel 50. The end portion of the holding groove 42 is shallow and close, whereby the holder 40a can more easily discharge the foreign matter retained in the groove.

[Embodiment 2]

The configuration of the holder 40b of the second embodiment is shown in Fig. 5. 5(a) is a cross-sectional view taken along line IVa-IVa of FIG. 3, and FIG. 5(b) is a cross-sectional view taken along line IVb-IVb of FIG. 3. In addition, the scribing wheel 50 is indicated by a broken line.

Three grooves 47a, 47b, and 47c are formed in the inner walls 45a and 45b of the holder 40b, respectively. Similarly to the groove 46 of the first embodiment, the grooves 47a, 47b, and 47c are extended from the opposite sides of the side faces 52a and 52b of the scribing wheel 50 to the non-opposing positions, and are extended toward the vertical direction G to The end of the groove 42 is held. Therefore, even if foreign matter such as glass dust enters between the inner walls 45a and 45b and the side surfaces 52a and 52b, the foreign matter can be discharged through the grooves 47a, 47b, and 47c, and the rotation failure of the scribing wheel 50 can be reduced.

Further, the three grooves 47a, 47b, 47c are formed to have a smaller curvature than the scribing wheel 50, and the curvatures thereof are different. By setting a plurality of grooves of different sizes in this way, even if the scribing wheel 50 is changed to a scribing wheel of a different size, since the groove is located at a position suitable for the scribing wheel 50 of each size, the holder 40b The poor rotation of the scribing wheel 50 can be reduced. In addition, The holder 40b is formed with a plurality of grooves, so that the probability of foreign matter staying in the grooves becomes higher, so that the rotation of the scribing wheel 50 can be reduced.

[Example 3]

The configuration of the holder 40c of the third embodiment is shown in Fig. 6. Further, Fig. 6 is a cross-sectional view taken along line IVa-IVa of Fig. 3, and is indicated by a broken line for the scribing wheel 50.

Three grooves 48a, 48b, 48c are formed in the inner wall 45a of the holder 40c, respectively. Similarly to the groove 46 of the first embodiment, the grooves 48a, 48b, and 48c are formed at positions facing the side surface 52a of the scribing wheel 50, and are extended toward the end portion of the holding groove 42 in the vertical direction G. Therefore, even if foreign matter such as glass swarf enters between the inner walls 45a and 45b and the side surfaces 52a and 52b, the retainer 40c can discharge the foreign matter through the grooves 48a, 48b, and 48c, and the rotation failure of the scribing wheel 50 can be reduced.

Further, since the grooves 48a, 48b, and 48c are formed in the same manner as the grooves 46 of the second embodiment, even if the scribing wheel 50 is changed to a scribing wheel of a different size, since the groove is located in relation to each size. The position of the reel 50 is suitable, so the holder 40c can also reduce the poor rotation of the scribing wheel 50. In addition, since the groove is formed with a plurality of tracks, the probability of foreign matter staying in the groove becomes higher, and The poor rotation of the scribing wheel 50 can be reduced. Further, the grooves 48a, 48b, 48c form a curve that is larger than the curvature of the scribing wheel 50. Thereby, the foreign matter retained in the groove is more likely to fall in the vertical direction G.

[Example 4]

The configuration of the holder 40d of the fourth embodiment is shown in Fig. 7. Further, Fig. 7 is a cross-sectional view taken along line IVa-IVa of Fig. 3, and is indicated by a broken line for the scribing wheel 50.

Two grooves 49a and 49b are formed in the inner wall 45a of the holder 40d, respectively. Similarly to the groove 46 of the first embodiment, the groove 49a is formed at a position opposed to the side surface 52a of the scribing wheel 50, and extends toward the end portion of the holding groove 42 in the vertical direction G. Therefore, even if foreign matter such as glass swarf enters between the inner wall 45a and the side surface 52a, the foreign matter can be discharged through the groove 49a, and the rotation failure of the scribing wheel 50 can be reduced.

Further, the groove 49a is a groove which is orthogonal to the pin 44 and which is asymmetrically formed with respect to the axis extending in the vertical direction G, and is formed on the side before the traveling direction B of the holder 40a. The curve having a large curvature is formed on the side of the traveling direction B of the holder 40d, and a curve smaller than the curvature of the scribing wheel 50 is formed. Therefore, the holder 40d tends to drop the foreign matter remaining in the groove on the side of the groove 49a, and the foreign matter remaining in the groove on the side of the groove 49a falls to the outside of the scribing wheel 50.

Further, the groove 49b is formed in a groove that does not face the side surface 52a of the scribing wheel 50. Therefore, even if a groove is formed at a position opposite to the side surface of the scribing wheel 50, the foreign matter entering the holding groove 42 can be discharged to the outside of the holding groove 42 via the groove 49b, so that the holder 40d can be cut. Foreign matter between the inner wall 45a and the side surface 52a is to be entered, so that the rotation of the scribing wheel 50 can be reduced.

Next, the holders 40e to 40g having different configurations from the holders 40a to 40d will be described. Further, similarly to the holders 40a to 40d, the holders 40e to 40g can be attached to the holder joint 23 as the holder unit holding the scribing wheel 50.

[Example 5]

8 and 9 show the holder 40e and the scribing wheel 50 of the embodiment 5. The composition of the holder unit. 8(a) is a perspective view of the holder 40e as viewed from the upper side, and FIG. 8(b) is a perspective view of the holder 40e as viewed from the lower side. 9(a) is a cross-sectional view taken along line IXa-IXa of FIG. 8, and FIG. 9(b) is a cross-sectional view taken along line IXb-IXb of FIG.

The holder unit of Embodiment 5 also rotatably holds the scribing wheel 50 at the lower end of the holder 40e. Further, as described above, the holder 40e is for abutting the scribing wheel 50 against a scribing member as a brittle material substrate to form a scribing line, and therefore, the holder 40e is abutted against the scribing member. The side (cut end side) is referred to as "lower side", and the opposite side is referred to as "upper side".

A holding groove 42 is formed below the holder 40e. Further, the holding groove 42 includes a narrow portion 42a into which one of the upper portions of the scribing wheel 50 is inserted, and a wide portion 42b which is formed as one of the depressed portions wider than the narrow portion 42a. Therefore, the pair of support portions 65 and 66 include the wide portions 65a and 66a opposed to the narrow portion 42a of the holding groove 42, and the narrow portions 65b and 66b opposed to the wide portion 42b of the holding groove 42, respectively. Further, the wide portions 65a and 66a of the support portions 65 and 66 of the holder 40e and the narrow portions 65b and 66b are formed in a stepped shape.

Further, the opposing faces of the support portions 65, 66 of the holder 40e, that is, the opposing faces of the wide portions 65a, 66a and the opposing faces of the narrow portions 65b, 66b are formed in parallel. Further, the narrow portions 65b and 66b of the support portions 65 and 66 of the holder 40e are coaxially formed with pin holes 43a penetrating each of them. The pin hole 43a is perpendicular to the retaining groove 42 and can maintain a circular through hole of the pin 44 of the scribing wheel 50.

Further, in the holder unit of the fifth embodiment, the pin 44 is attached to the wide portion 65a, 66a of the support portions 65, 66 of the holder 40e so as not to be in contact with each other. The through hole 53 and the pin hole 43a of the wire wheel 50. Therefore, a gap 67 is formed between the lower side of the wide portions 65a, 66a of the support portions 65, 66 of the holder 40e and the pin 44. Further, the pin 44 is a cylindrical member formed of a metal such as a cemented carbide or a sintered diamond, and has a pointed shape at one end.

The interval between the narrow portions 42a of the holding grooves 42 is set to be slightly larger than the width of the scribing wheel 50. The width of the scribing wheel 50 is, for example, about 0.65 mm, and the interval between the narrow portions 42a of the retaining groove 42 is, for example, about 0.67 mm. Further, the interval between the wide portions 42b of the holding grooves 42 may be any width as long as the interval between the narrow portions 42a is wider. However, in order to reduce the friction in the rotation of the pin 44 in the pin hole 43a, it is necessary to support the pin 44 only at both end portions, and the length of the portion of the pin 44 located in the pin hole 43a is short. Therefore, the interval between the wide portions 42b is preferably twice or more the interval between the narrow portions 42a of the holding grooves 42.

On the other hand, if the interval between the wide portions 42b is set too large, the widths of the narrow portions 65b and 66b of the support portions 65 and 66 of the holder 40e become narrower, so that there is a problem due to the scribing. The load causes the narrow portions 65b, 66b to bend, and the pin 44 is supported on the both end sides, so that the pin 44 itself is also bent, so that the support portions 65, 66 of the holder 40e are preferably provided. The width of the narrow portions 65b and 66b is about 1/3 of the wide portions 65a and 66a of the support portions 65 and 66 of the holder 40e. Further, the interval between the lower side of the wide portions 65a and 66a of the support portions 65 and 66 of the holder 40e and the gap 67 between the pins 44 may be arbitrary, but the smaller the holder unit is, the smaller the better. .

When the brittle substrate 17 such as a glass substrate is scribed using the holder unit in this state, the scribing wheel 50 is stably positioned in the narrow portion 42a of the holding groove 42. Therefore, the left and right swing of the scribing wheel 50 with respect to the traveling direction is hardly present, so that the linearity of the scribing at the time of scribing can be improved. In addition, even if glass swarf is generated at the time of scribing, and the swarf enters between the narrow portion 42a of the holding groove 42 and the scribing wheel 50, the width of the support portions 65, 66 formed in the holder 40e is also wide. The gap 67 between the lower side of the web portions 65a and 66a and the pin 44 and the space formed between the pin 44 and the brittle substrate 17 are easily discharged, so that the rotation of the scribing wheel 50 is suppressed from being impaired.

Therefore, according to the holder unit of the embodiment 5, the scribe wheel 50 and the pin 44 have good rotatability when scribing, so that the blade edge of the scribing wheel 50 is less likely to slip on the surface of the scribed substrate when scribing. In other cases, it is possible to exhibit an excellent effect of prolonging the life of the blade edge and suppressing the decrease in the strength of the end surface of the scribing substrate after the scribing or the unevenness of the breaking strength.

Further, in the holder unit of the embodiment 5, an example in which the narrow portion 42a of the holding groove 42 is formed at a portion above the scribing wheel 50 is shown, but of course, one of the left and right sides of the drawing can be inserted. The way is formed. Further, in either case, it is difficult for the glass swarf generated at the time of scribing to intrude into the narrow portion 42a of the holding groove 42, so that the scribe wheel 50 and the pin 44 have good rotatability.

Further, in the holder 40e of the fifth embodiment, the opposite inner walls of the support portions 65, 66 of the holder 40b, that is, the opposite faces of the wide portions 65a, 66a and the opposite portions of the narrow portions 65b, 66b are opposed thereto. The faces are formed in parallel, but the opposing faces of the wide portions 65a and 66a may be formed in parallel, and the opposing faces of the narrow portions 65b and 66b may not be parallel. The reason for this is that at least the relative widths of the wide portions 65a, 66a of the support portions 65, 66 that the scribing wheel 50 contacts are at least The faces are parallel to stabilize the position of the scribing wheel 50 within the narrow portion 42a of the retaining groove 42.

[Embodiment 6]

Fig. 10 shows the configuration of a holder unit including the holder 40f of the sixth embodiment and the scribing wheel 50. 10(a) is a perspective view of the holder 40f viewed from the lower side, FIG. 10(b) is a perspective view of the holder 40f viewed from the opposite side, and FIG. 10(c) is taken along line XX of (a). Cutaway view.

The holder 40f and the holder unit of the embodiment 6 are different from the holder 40e and the holder unit of the fifth embodiment in the configuration of the narrow portion 42a and the wide portion 42b of the holding groove 42, and are formed accordingly. The wide portions 65a and 66a and the narrow portions 65b and 66b of the support portions 65 and 66 are formed. That is, in the holder 40f of the embodiment 6, the narrow portion 42a of the holding groove 42 is formed such that one portion above the scribing wheel 50 and one portion of the right side of the scribing wheel 50 in Fig. 10(c) are inserted. Then, the wide portions 65a and 66a of the support portions 65 and 66 are formed above the scribing wheel 50 and on the right side of the scribing wheel 50 in Fig. 10(c).

Further, the wide portion 42b of the holding groove 42 is formed on the left side of the scribing wheel 50 in Fig. 10(c), and the narrow portions 65b, 66b of the supporting portions 65, 66 are formed in the scribing wheel in Fig. 10(c). On the left side of 50. Further, the wide portions 65a and 66a of the support portions 65 and 66 of the holder 40f and the narrow portions 65b and 66b are formed in a stepped shape.

In this case, the opposing inner surfaces of the support portions 65, 66 of the holder 40f, that is, the opposing faces of the wide portions 65a, 66a and the opposing faces of the narrow portions 65b, 66b are also formed in parallel. Further, the narrow portions 65b and 66b of the support portions 65 and 66 of the holder 40f are coaxially formed with pin holes penetrating each of them. 43a, the pin 44 is attached so as not to come into contact with the wide portions 65a, 66a of the support portions 65, 66 of the holder 40f. Therefore, a gap 67 is formed between the lower side of the wide portions 65a, 66a of the support portions 65, 66 of the holder 40f and the pin 44.

According to the holder 40f and the holder unit of the embodiment 6 of the above configuration, when the holder 40e and the holder unit of the fifth embodiment are compared, the scribing wheel 50 and the wide portions 65a and 66a of the supporting portions 65 and 66 are provided. Since the contact area is slightly increased, the frictional resistance is slightly increased, but if the point is removed, the same effect can be exerted substantially, and since the blade tip of the scribing wheel 50 is less oscillated, It is also possible to suppress the flaws in the formation of the scribe line.

Further, in the holder unit of the embodiment 6, the narrow portion 42a of the holding groove 42 is shown not only to make a portion above the scribing wheel 50 but also to the right side of the scribing wheel 50 in Fig. 10(c). An example of the manner of insertion is formed, but of course, it can be formed by inserting one of the left sides of the scribing wheel 50 in Fig. 10(c). Further, in any case, when the scribing unit is formed using the holder unit having the holder 40f of the embodiment 6, as long as the holder 40f is moved, the glass cullet generated at the time of scribing is hard to intrude into the narrow portion of the holding groove 42. In the inside of the web portion 42a, it is possible to exhibit an excellent effect of prolonging the life of the blade edge and suppressing the decrease in the strength of the end surface of the scribing substrate after the scribing or the unevenness of the breaking strength.

[Embodiment 7]

Fig. 11 shows the configuration of a holder unit including the holder 40g of the seventh embodiment and the scribing wheel 50. 11(a) is a perspective view of the holder 40g as viewed from the lower side, and FIG. 11(b) is a cross-sectional view taken along line XI-XI of (a).

The holder 40g of Embodiment 7 and the holder unit and the holder of Embodiment 5 40e and the retainer unit are different in configuration in that the arrangement of the narrow portion 42a and the wide portion 42b of the retaining groove 42 and the wide portions 65a, 66a and the narrow portion 65b of the support portions 65, 66 formed therewith. The configuration of 66b is upside down. That is, in the holder 40g and the holder unit of the seventh embodiment, the narrow portion 42a of the holding groove 42 is formed below the scribing wheel 50, and the wide portion 42b is formed above the scribing wheel 50, with the support portion The wide portions 65a and 66a of 65 and 66 are formed below the scribing wheel 50, and the narrow portions 65b and 66b are formed above the scribing wheel 50. Further, the wide portions 65a and 66a of the support portions 65 and 66 of the holder 40g and the narrow portions 65b and 66b are formed in a stepped shape.

In this case, the opposing faces of the support portions 65, 66 of the holder 40g, that is, the opposing faces of the wide portions 65a, 66a and the opposing faces of the narrow portions 65b, 66b are also formed in parallel. Further, the narrow portions 65b and 66b of the support portions 65 and 66 of the holder 40g are coaxially formed with pin holes 43a penetrating each of them, and the pins 44 are formed in a wide portion with the support portions 65 and 66 of the holder 40g. 65a, 66a are installed without contact. Therefore, a gap 67 is formed between the upper side of the wide portions 65a, 66a of the support portions 65, 66 of the holder 40g and the upper side of the pin 44.

According to the retainer 40g and the holder unit of the seventh embodiment having such a configuration, if the holder 40e and the holder unit of the fifth embodiment are compared, the scribing wheel 50 and the supporting portions 65 and 66 can be used. The effect of the contact area becoming smaller.

Therefore, even if glass swarf is generated at the time of scribing, and the swarf enters between the narrow portion 42a of the holding groove 42 and the scribing wheel 50, it is also formed by the wide portion of the supporting portions 65, 66 formed by the holder 40g. A gap 67 between the upper side of the 65a, 66a and the pin 44 and an empty space formed between the pin 44 and the wide portion 42b of the retaining groove 42 The presence of the gap is easy to discharge, so that the rotation of the scribing wheel 50 is suppressed from being impaired.

[Embodiment 8]

Fig. 12 shows the configuration of a holder unit including the holder 40h of the eighth embodiment and the scribing wheel 50. Further, Fig. 12(a) is a perspective view of the holder 40h as viewed from the lower side, Fig. 12(b) is a cross-sectional view taken along line XIIb-XIIb of (a), and Fig. 12(c) is along (a) A cross-sectional view of the XIIc-XIIc line. Further, in Figs. 12(b) and (c), the pin 44 is not shown.

The holder 40h and the holder unit of the embodiment 8 are different from the holder 40e and the holder unit of the embodiment 5 in that the narrow portion 42a and the wide portion 42b of the holding groove 42 are formed and formed accordingly. The wide portions 65a and 66a and the narrow portions 65b and 66b of the support portions 65 and 66 are formed. Specifically, in the holder 40h of the embodiment 8, the lower end of the narrow portion 42a of the holding groove 42 is formed to a position overlapping the pin 44. That is, the lower ends of the wide portions 65a, 66a of the support portions 65, 66 are formed at positions in contact with the pin 44. Further, in the eighth embodiment, as shown in Fig. 12(b), the wide portion 65a of the support portion 65 is in contact with the pin 44 slightly above the center of the correction of the pin 44. That is, the holder 40h is configured by providing the pin holes 43a at the step positions between the wide portions 65a and 66a of the support portions 65 and 66 and the narrow portions 65b and 66b.

According to the eighth embodiment having such a configuration, since the holder 40h and the holder unit have the wide portion 42b in the holding groove 42, the contact area between the scribing wheel 50 and the supporting portions 65 and 66 can be reduced. Further, the holder 40h and the holder unit are provided with pin holes 43a at the step position between the wide portions 65a, 66a and the narrow portions 65b, 66b of the support portions 65, 66, so that the tip of the scribing wheel 50 is The swing is also reduced, thereby suppressing the effect of the formation of the scribing The fruit is also getting higher.

[Embodiment 2]

Next, the holder 40i of the second embodiment which is different from the holders 40a to 40h of the first embodiment will be described with reference to Fig. 13 . In addition, FIG. 13 is a perspective view obtained by enlarging the holder 40i. Incidentally, the same configurations as those of the holders 40a to 40h will be described using the same reference numerals, and detailed description thereof will be omitted. The holder 40i of the second embodiment is a holder unit that holds the scribing wheel 50, and is inserted into the opening 28 of the holder joint 23 and attached to the scribing head of the scribing device 10, similarly to the holder 40 of the first embodiment. twenty one.

The holder 40i includes a substantially cylindrical metal or resin, and support portions 41a, 41b are provided on the lower end side thereof. Further, a holding groove 42 for holding the scribing wheel 50 is formed between the support portion 41a and the support portion 41b. Further, at the lower ends of the support portions 41a and 41b, pin holes 43b for forming slits are formed in order to fix the scribing wheel 50. Further, the pin 44 penetrates the pin hole 43b, and the scribing wheel 50 is rotatably attached to the holder 40i. On the upper end side of the holder 40i, a mounting portion 46 including an inclined portion 46a and a supporting portion 46b is formed in the same manner as the holder 40.

Further, a recessed portion (not shown) having the same configuration as that shown in the first to eighth embodiments of the first embodiment is formed on the inner wall of the holding groove 42 of the retainer 40i. In the holder 40i of the second embodiment, the pin hole 43b can be formed relatively easily and accurately. However, the pin hole 43b is in a state in which the slit is formed. Therefore, compared with the case of the holder 40 of the first embodiment, foreign matter such as glass dust can be more easily invaded and held. Inside the slot 42. However, in the holder 40i of the second embodiment, since the inner wall of the holding groove 42 is formed with a depressed portion, it can be realized and implemented. The actions and effects of the first embodiment to the eighth embodiment of the first aspect are the same.

[Embodiment 3]

Next, the holder 140 of the third embodiment which is different from the holders 40a to 40h shown in the first embodiment or the holder 40i shown in the second embodiment will be described with reference to Fig. 14 . Further, Fig. 14 is a front view of the holder 140 of the third embodiment. In addition, the description will be made by holding the scribing wheel 150 on the holder 140 as a holder unit.

The holder unit including the holder 140 of the third embodiment is directly attached to the scribing head 21 of the scribing device 10 without passing through the holder joint. The holder 140 is formed in a substantially columnar shape and is composed of a rotating shaft portion 141 and a wheel holding portion 142. Further, in a state in which the holder 140 is attached to the scribing head 21, the two rotation bearings 141 are attached via the cylindrical spacer 127 to rotatably hold the two bearings 126a of the holder 140. , the state of 126b. Further, a front view of the holder 140 is shown in FIG. 14, and a cross-sectional view of the bearings 126a, 126b and the spacer 127 attached to the rotating shaft portion 141 is shown.

The wheel holding portion 142 is formed in a rectangular parallelepiped shape, and the lower end side is formed in a triangular shape. To insert the scribing wheel 150 at the front end of the triangular shape, between the support portions 143a and 143b, a gap is formed to maintain the retention of the scribing wheel 150. Slot 144. Further, the enlarged view of the lower end side of the holder 140 in Fig. 14 is an enlarged view when viewed from the lateral direction indicated by the arrow C.

In the support portions 143a and 143b, in order to fix the scribing wheel 150, hole-shaped pin holes 145 are formed, and the pin 146 penetrates through the pin holes 145, so that the scribing wheel 150 is rotatably mounted on the holder 140. . At this time, the support The inner walls 147a, 147b of the respective portions 143a and 143b are opposed to the circular side faces 151a, 151b of the scribing wheel 150, respectively. Further, on the outer sides of the support portions 143a, 143b, the pin members 148a, 148b are integrally screwed by the screws 149 to cover the pin holes 145 from the outside.

In addition, in this case, the scribing wheel 150 is also a consumable item, and must be periodically replaced. Therefore, in the holder unit having the holder 140, when the scribing wheel 150 is replaced, first, the holder unit is self-scored. The head 21 is removed, and then the pin presses 148a, 148b are removed from the holder 140, and the pin 146 is taken out to replace the scribing wheel 150.

Further, recessed portions (not shown) having the same configuration as those shown in the first to eighth embodiments of the first embodiment are formed on the inner walls 147a and 147b of the holder 140. Therefore, even if foreign matter such as glass swarf enters between the inner walls 147a and 147b and the side faces 151a and 151b of the scribing wheel 150, the occurrence of the rotation failure of the scribing wheel 150 can be reduced by the depressed portion. Further, although the pin hole 145 of the present embodiment is formed in a hole shape, a portion of the lower end of the support portion 143a and the support portion 143b may be cut away in the same manner as in the second embodiment.

[Embodiment 4]

The holder 211 and the holder unit 210 according to the fourth embodiment of the present invention will be described with reference to Figs. 15 and 16 . 15 is a perspective view of the holder unit of Embodiment 4, FIG. 16(a) is a front view of the holder unit of FIG. 15, and FIG. 16(b) is an enlarged view of a portion XVIB of FIG. 16(a).

The holder unit 210 of the fourth embodiment has a holder 211 and a scribing wheel 212, and the scribing wheel 212 is rotatably held at the lower end of the holder 211. The holder 211 is a member having a rectangular parallelepiped shape formed below, and A through hole 213 for fixing the holder 211 is provided at the upper portion. Further, the holder 211 is a device for causing the scribing wheel 212 to abut against the scribing member to form a scribing line, and the abutting of the holder 211 on the side (cut end side) of the scribing member is hereinafter referred to as For "down", the opposite side is referred to as "upper".

The scribing wheel 212 is a disk-shaped member having a thickness d of about 0.65 mm formed of, for example, a sintered diamond, and has a through hole at the center. Further, the scribing wheel 212 has a V-shaped blade forming a ridge line along the outer peripheral portion. The inclined faces on both sides of the ridge line generally intersect each other at an angle of 90 to 165 degrees, and the inclined faces are used to form ridge lines.

Below the holder 211, a holding groove 214 is formed so that the lower triangular shape of the holder 211 is opened, and the support portions 215 and 216 are formed in a portion of the triangular shape sandwiching the holding groove 214. Further, the holding groove 214 includes a narrow portion 214a into which one portion above the scribing wheel 212 is inserted, and a wide portion 214b formed to be wider than the narrow portion 214a. Therefore, the pair of support portions 215 and 216 include the wide portions 215a and 216a opposed to the narrow portion 214a of the holding groove 214 and the narrow portions 215b and 216b opposed to the wide portion 214b of the holding groove 214, respectively. Further, the wide portions 215a and 216a of the support portions 215 and 216 of the holder 211 are formed in a stepped shape between the narrow portions 215b and 216b.

Further, the opposing inner surfaces of the support portions 215, 216 of the holder 211, that is, the opposing faces of the wide portions 215a, 216a and the opposing faces of the narrow portions 215b, 216b are formed in parallel. Further, pin holes 217 and 218 penetrating each of the narrow portions 215b and 216b of the support portions 215 and 216 of the holder 211 are coaxially formed. The pin holes 217, 218 are perpendicular to the retaining groove 214 And a circular through hole of the pin 219 of the scribing wheel 212 can be maintained.

Further, in the holder unit 210 of the fourth embodiment, the pin 219 is attached to the through hole and the pin hole of the scribing wheel 212 so as not to be in contact with the wide portions 215a and 216a of the support portions 215 and 216 of the holder 211. 217, 218. Therefore, a gap 220 is formed between the lower side of the wide portions 215a, 216a of the support portions 215, 216 of the holder 211 and the pin 219. Further, the pin 219 is a cylindrical member formed of a metal such as a cemented carbide or a sintered diamond, and has a pointed shape at one end.

The interval w1 of the narrow width portion 214a of the holding groove 214 is set to be slightly larger than the width of the scribing wheel 212. The width d of the scribing wheel 212 is, for example, about 0.65 mm, and the interval w1 of the narrow width portion 214a of the retaining groove 214 is, for example, about 0.67 mm. Further, the interval w2 of the wide portion 214b of the holding groove 214 may be any width as long as the interval w1 of the narrow portion 214 is wider, but in order to reduce the pin formed in the narrow portions 215b, 216b of the supporting portions 215, 216 The friction of the rotation of the pin 219 in the holes 217, 218 must support the pin 219 only at both ends, and the length of the portion of the pin 219 located in the pin holes 217, 218 is short, so that the groove is preferably retained. The interval w1 of the narrow width portion 214a of 214 is more than twice.

However, if w2 is set too large, the widths of the narrow portions 215b, 216b of the support portions 215, 216 of the holder 211 become narrower, so that there is a narrow portion 215b due to the load applied at the time of scribing. After the 216b is bent, and the pin 219 is supported on the both end sides, so that the pin 219 itself is bent, the narrow portions 215b, 216b of the support portions 215, 216 of the holder 211 are preferably used. The width is about 1/3 of the wide portions 215a, 216a of the support portions 215, 216 of the holder 211. In addition, formed in The interval between the lower side of the wide portions 215a, 216a of the support portions 215, 216 of the holder 211 and the gap 220 between the pins 219 may be arbitrary, but it is preferably as small as possible to reduce the size of the holder unit 210.

Further, in the holder unit 210 of the fourth embodiment, both end portions of the pin holes 217 and 218 formed in the wide portions 215a and 216a of the support portions 215 and 216 of the holder 211 are blocked by the glands 222 and 223, respectively. . For example, as shown in FIG. 15, the glands 222 and 223 have a gasket shape in which one end protrudes, and each gland is fixed to the outer surface of the holder 211 by the adjusting screws 224 and 225 above the holder 211.

The assembly of the holder unit 210 is performed in the following manner. First, the cover 222 is attached to the side of the support portion 215 by the adjustment screw 224 to block the outer side of the pin hole 217. Next, a portion of the scribing wheel 212 is inserted into and held in the narrow portion 214a of the retaining groove 214, and the pin 219 is inserted into the pin hole 218, the through hole of the scribing wheel 212, and the pin hole 217 from the portion of the pointed shape. . The pin 219 is inserted into the tip-shaped portion of the pin 219 to be in contact with the gland 222 located near the opening of one of the pin holes 217, and then the cap 223 is screwed by the adjusting screw 225 from the side of the support portion 216 to close the pin hole 218. External side. Thereby, the pin 219 does not fall off from the pin holes 217, 218, and the scribing wheel 212 is rotatably held by the pin 219.

When the brittle substrate such as a glass substrate is scribed by the holder unit 210 in this state, the scribing wheel 212 is stably positioned in the narrow portion 214a of the holding groove 214, so that the scribing wheel 212 swings to the left and right with respect to the traveling direction. It hardly exists, so that the linearity of the scribe line when scribing is improved. In addition to this, even if the glass swarf is generated at the time of scribing, the swarf enters the holding groove 214. The narrow portion 214a and the scribing wheel 212 are also formed in the pin 219 by the gap 220 formed between the lower side of the wide portions 215a, 216a of the support portions 215, 216 of the holder 211 and the pin 219. The space between the brittle substrate and the brittle substrate is easily discharged, so that the rotation of the scribing wheel 212 is suppressed from being impaired.

Therefore, according to the holder unit 210 of the fourth embodiment, the scribing wheel 212 and the pin 219 have good rotatability when scribing, so that the blade edge of the scribing wheel 212 is less likely to occur on the surface of the scribbed substrate when scribing. The phenomenon of slipping can exhibit an excellent effect of prolonging the life of the blade tip and suppressing the decrease in the strength of the end face of the scribing substrate after the scribing or the unevenness of the breaking strength.

Further, in the holder unit 210 of the fourth embodiment, an example in which the narrow portion 214a of the holding groove 214 is formed at a portion above the scribing wheel 212 is shown, but of course, one of the left and right sides of the drawing can be inserted. The way it is formed. Further, in either case, it is difficult for the glass cullet generated at the time of scribing to intrude into the narrow portion 214a of the holding groove 214, so that the scribe wheel 212 and the pin 219 have good rotatability.

Further, in the holder of the fourth embodiment, the opposing inner walls of the support portions 215, 216 of the holder 211, that is, the opposing faces of the wide portions 215a, 216a and the opposite portions of the narrow portions 215b, 216b are opposed thereto. The faces are formed in parallel, but the opposing faces of the wide portions 215a and 216a may be formed in parallel, and the opposing faces of the narrow portions 215b and 216b may not be parallel. The reason for this is that the position of the scribing wheel 212 in the narrow portion 214a of the retaining groove 214 can be made as long as at least the opposite faces of the wide portions 215a, 216a of the supporting portions 215, 216 which the scribing wheel 212 contacts are parallel. stable.

Further, in the holder of the fourth embodiment, the support portion of the holder 211 The narrow portions 215b and 216b of 215 and 216 are coaxially formed with pin holes 217 and 218 penetrating each of them. The glands 222 and 223 can be used to hold the pins 219 from both sides of the pin holes 217 and 218, and a pin hole can be formed. The diameter is narrower on the outer peripheral side of the support portion to hold the pin. Further, as long as the pin holes 217 and 218 are formed coaxially, only one of the narrow portions 215b and 216b may be penetrated. In this case, the gland may be provided on the side surface other than the support portion where the pin hole has a narrow diameter or the support portion through which the through hole is provided.

[Embodiment 5]

Next, the holder and the holder unit of the fifth embodiment will be described with reference to Figs. 17 and 18 . 17 is a perspective view of the holder unit of the fifth embodiment, and FIG. 18 is a cross-sectional view taken along line XVIII-XVIII of FIG. 17. 17 and FIG. 18, the same components as those of the holder unit 210 of the fourth embodiment are denoted by the same reference numerals, and detailed description thereof will be omitted.

The holder 211A and the holder unit 210A of the fifth embodiment differ from the holder 211 and the holder unit 210 of the fourth embodiment in the configuration of the narrow portion 214a and the wide portion 214b of the holding groove 214. The wide portions 215a and 216a and the narrow portions 215b and 216b of the support portions 215 and 216 are formed. That is, in the holder 211A and the holder unit 210A of the fifth embodiment, the narrow portion 214a of the holding groove 214 is formed such that one portion of the upper portion of the scribing wheel 212 is inserted into one of the right side portions of the drawing, and is supported thereby. The wide portions 215a, 216a of the portions 215, 216 are formed above the scribing wheel 212 and to the right of the drawing.

Moreover, the wide portion 214b of the retaining groove 214 is formed in the pattern of the scribing wheel 212. On the left side, the narrow portions 215b, 216b of the support portions 215, 216 are formed on the left side of the scribing wheel 212. Further, the wide portions 215a and 216a of the support portions 215 and 216 of the holder 211A and the narrow portions 215b and 216b are formed in a stepped shape.

In this case, the opposing inner faces of the support portions 215, 216 of the holder 211A, that is, the opposing faces of the wide portions 215a, 216a and the opposing faces of the narrow portions 215b, 216b are also formed in parallel. Further, the narrow portions 215b and 216b of the support portions 215 and 216 of the holder 211A are coaxially formed with pin holes (not shown) penetrating each of them, and the pins 219 are supported by the support portions 215 and 216 of the holder 211A. The wide portions 215a, 216a are mounted without contact. Therefore, a gap 220 is formed between the lower side of the wide portions 215a, 216a of the support portions 215, 216 of the holder 211A and the pin 219.

According to the holder 211A and the holder unit 210A of the fifth embodiment having such a configuration, when the holder 211 and the holder unit 210 of the fourth embodiment are compared, the scribing wheel 212 and the wide portion 215a of the support portions 215 and 216 are provided. Since the contact area between 216a is slightly increased, the frictional resistance is slightly increased, but if the point is removed, substantially the same effect can be exerted, and since the knurling of the scribe wheel 212 is less, Therefore, it is also possible to suppress the flaw in the formation of the scribe line.

Further, in the holder unit 210A of the fifth embodiment, the narrow portion 214a of the holding groove 214 is formed by forming not only one portion above the scribing wheel 212 but also one portion of the right side of the drawing, but Of course, it can also be formed in such a manner that one part of the left side of the drawing is inserted. Further, in either case, the holder unit 210A of the fifth embodiment is used. At the time of scribing, if the holder unit 210A is moved to the narrow portion side formed at any of the left and right positions in the drawing, it is difficult for the glass cullet generated at the time of scribing to intrude into the narrow portion 214a of the holding groove 214, and thus The effect of prolonging the life of the blade tip and suppressing the decrease in the strength of the end face of the scribing substrate after the scribing or the unevenness of the breaking strength is exhibited.

[Embodiment 6]

Next, the holder and the holder unit of the sixth embodiment will be described with reference to Figs. 19 and 20 . 19 is a perspective view of the holder unit of Embodiment 6, FIG. 20(a) is a front view of the holder unit of FIG. 19, and FIG. 20(b) is an enlarged view of a portion XIXB of FIG. 20(a). In addition, in FIG. 19 and FIG. 20, the same components as those of the holder unit 210 of the fourth embodiment are denoted by the same reference numerals, and detailed description thereof will be omitted.

The holder 211B and the holder unit 210B of the sixth embodiment differ from the holder 211 and the holder unit 210 of the fourth embodiment in the arrangement and the arrangement of the narrow portion 214a and the wide portion 214b of the holding groove 214. The arrangement of the wide portions 215a, 216a and the narrow portions 215b, 216b of the support portions 215, 216 formed is upside down. That is, in the holder 211B and the holder unit 210B of the sixth embodiment, the narrow portion 214a of the holding groove 214 is formed below the scribing wheel 212, and the wide portion 214b is formed above the scribing wheel 212, thereby supporting The wide portions 215a, 216a of the portions 215, 216 are formed below the scribing wheel 212, and the narrow portions 215b, 216b are formed above the scribing wheel 212. Further, the wide portions 215a and 216a of the support portions 215 and 216 of the holder 211B and the narrow portions 215b and 216b are formed in a stepped shape.

In this case, the opposite sides of the support portions 215, 216 of the holder 211B The opposing faces of the wide portions 215a, 216a and the opposing faces of the narrow portions 215b, 216b are also formed in parallel. Further, the narrow portions 215b and 216b of the support portions 215 and 216 of the holder 211B are coaxially formed with pin holes 217 and 218 penetrating each of them, and the pin 219 is widened from the support portions 215 and 216 of the holder 211B. The webs 215a, 216a are mounted in a non-contact manner. Therefore, a gap 220 is formed between the upper side of the wide portions 215a, 216a of the support portions 215, 216 of the holder 211B and the upper side of the pin 219.

According to the holder 211B and the holder unit 210B of the sixth embodiment having such a configuration, when the holder 211 and the holder unit 210 of the fourth embodiment are compared, the scribing wheel 212 and the support portions 215 and 216 can be used. The contact area between the two is small and the mounting of the scribing wheel 212 is facilitated.

That is, when the scribing wheel 212 is installed, one portion of the scribing wheel 212 is inserted into the narrow portion 214a of the retaining groove 214, so that the pin 219 sequentially passes through the through hole 218 of the supporting portion 216 and the scribing wheel 212. The through hole 217 of the hole and the support portion 215. However, in the holder 211 and the holder unit 210 of the fourth embodiment, the narrow portion 214a is located inside the holder 211, so that it is difficult to fix the scribing wheel 212, and if the outer diameter of the scribing wheel 212 is reduced, the mounting becomes difficult. . On the other hand, according to the holder 211B and the holder unit 210B of the sixth embodiment, the narrow portion 214a of the holding groove 214 is formed on the cutting end side, so that the retainer 211B can be used when the scribing wheel 212 is attached. The narrow end portion 214a at the lower end holds the scribing wheel 212 and is inserted into the pin 219, so that the mounting and replacement of the scribing wheel 212 is facilitated.

In addition, even if glass swarf is generated at the time of scribing and the swarf enters between the narrow portion 214a of the holding groove 214 and the scribing wheel 212, it is formed in the solid The gap 220 between the upper side of the wide portions 215a, 216a of the support portions 215, 216 of the holder 211B and the pin 219 and the space formed between the pin 219 and the wide portion 214b of the holding groove 214 are easily discharged. Therefore, the rotation of the scribing wheel 212 is suppressed from being impaired.

In the holders and holder units shown in the fourth to sixth embodiments as described above, in the same manner as in the first to third embodiments, the scribing head provided in the scribing device can be used to form a scribe line on the brittle material substrate. Further, the holder and the holder unit shown in the fourth to sixth embodiments may be attached to a cutting device for cutting a brittle material for manually cutting a substrate of a brittle material. Further, in the holders shown in the fourth to sixth embodiments, the grooves shown in the first to fourth embodiments can be applied to the inner wall of the support portion.

Therefore, in the present embodiment, since the concave portion is formed at a position opposite to the side surface of the scribing wheel by the inner wall of the retainer, the rotation caused by the foreign matter entering between the inner wall and the side surface of the scribing wheel can be reduced. Bad production.

Further, in the above-described embodiment, the groove which is one example of the depressed portion only shows that the groove is formed above the pin hole, but the same effect can be exerted even if it is formed below the pin hole, and The grooves can also be formed in contact with the pin holes. Further, in the above embodiment, only the case where the shape of the groove is an arc shape is shown, but other curves or straight lines may be used.

Further, the scribing device 10 is a device in which the scribing head 21 is located above the brittle material substrate 17, but the scribing head may also be located below the brittle material substrate 17 and form a scribing from the upper and lower surfaces of the brittle material substrate 17. Line device. By setting as such, the upper and lower surfaces of the self-brittle material substrate 17 can be The formation of the scribe line is formed, and the work efficiency of the singulation step can be improved.

10‧‧‧ scribe device

11‧‧‧Mobile Station

12a, 12b‧‧‧ rails

13‧‧‧Ball screw

14, 15‧‧ ‧ motor

16‧‧‧ platform

17‧‧‧Battery material substrate

18‧‧‧CCD camera

19‧‧‧ Bridge body

20a, 20b‧‧ ‧ pillar

21‧‧‧Drawing head

22‧‧‧ Guides

23‧‧‧Retainer connector

24, 141‧‧‧Rotary shaft

25‧‧‧Connector

26a, 26b, 126a, 16b‧‧‧ bearings

27, 127‧‧‧ spacers

28‧‧‧ openings

29‧‧‧ Magnet

30‧‧‧ parallel sales

40, 40a~40i, 140, 211, 211A, 211B‧‧‧ retainers

41a, 41b, 46b, 65, 66, 143a, 143b, 215, 216‧ ‧ support

42, 144, 214‧‧‧ keep slots

43a, 43b, 145, 217, 218‧‧ pin holes

44, 146, 219‧‧ sales

45a, 45b, 147a, 147b‧‧‧ inner wall

46, 47a, 47b, 47c, 48a, 48b, 48c, 49a, 49b‧‧‧ trench

46a‧‧‧ inclined section

50, 150, 212‧‧‧ scribe wheel

51‧‧‧knife

52a, 52b, 151a, 151b‧‧‧ side

53, 213‧‧‧through holes

65a, 66a, 214b, 215a, 216a‧‧‧ wide section

65b, 66b, 214a, 215b, 216b‧‧‧ narrow section

67, 220‧‧ ‧ gap

142‧‧‧ Wheelkeeping Department

148a, 148b‧‧ ‧ pin press

210, 210A, 210B‧‧‧ retainer unit

222, 223‧‧ ‧ gland

224, 225‧‧‧ adjustment screws

D‧‧‧thickness

Lines IVa, IVb, IXa, IXb, X, XI, XIIb, XIIc, XVIB, XVIII‧‧

W1‧‧‧ Keeping the gap between the narrow sections of the groove

W2‧‧‧ Keep the gap between the wide sections of the trough

Fig. 1 is a schematic view showing a scribing apparatus of the first embodiment.

Fig. 2 is a front elevational view showing a holder joint to which the holder unit of the first embodiment is mounted.

Fig. 3 is a perspective view of the holder unit of the first embodiment.

4(a) and 4(b) are cross-sectional views showing the holder unit of the first embodiment.

5(a) and 5(b) are cross-sectional views showing the holder unit of the second embodiment.

Figure 6 is a cross-sectional view of the holder unit of Embodiment 3.

Figure 7 is a cross-sectional view of the holder unit of Embodiment 4.

8(a) and 8(b) are perspective views of the holder unit of the fifth embodiment.

9(a) and 9(b) are cross-sectional views showing the holder unit of the fifth embodiment.

10(a) to (c) are a perspective view and a cross-sectional view of the holder unit of the embodiment 6.

11(a) and 11(b) are a perspective view and a cross-sectional view of the holder unit of the seventh embodiment.

12(a) to (c) are a perspective view and a cross-sectional view of the holder unit of the embodiment 8.

Figure 13 is a perspective view of the holder unit of the second embodiment.

Figure 14 is a front elevational view of the holder unit of Embodiment 3.

Figure 15 is a perspective view of the holder unit of the fourth embodiment.

16(a) and 16(b) are a front view and an enlarged view of the holder unit of the fourth embodiment.

Figure 17 is a perspective view of the holder unit of the fifth embodiment.

Figure 18 is a front view and an enlarged view of the holder unit of Embodiment 5.

Figure 19 is a perspective view of the holder unit of the sixth embodiment.

20(a) and 20(b) are a front view and an enlarged view of the holder unit of the sixth embodiment.

40a‧‧‧Retainer

42‧‧‧ Keep slot

44‧‧ ‧ sales

45a, 45b‧‧‧ inner wall

46‧‧‧ trench

50‧‧‧marking wheel

52a, 52b‧‧‧ side

Claims (14)

A holder for rotating a disc that is rotatably inserted into a through hole for rotationally retaining a disk shape and having the through hole formed in the center thereof, and the holder includes: a holding groove that holds the scribing wheel; a pair of supporting portions formed by the holding grooves and having inner walls facing each other; and a pair of pin holes formed in the pair of supporting portions for the above The pin is inserted; and a recessed portion is formed at a position of the inner wall of the support portion opposite to the side surface of the scribing wheel. The holder of claim 1, wherein the recessed portion is formed in a groove of the inner wall of the support portion so as not to be in contact with the pin hole. A holder according to claim 2, wherein said groove is extended to a position that does not face the side of said scribing wheel. The holder of claim 2, wherein the groove extends to the edge of the holding groove. The holder of claim 2, wherein the groove is provided with a plurality of strips. A holder according to claim 2, wherein said groove extends in a vertical direction. The holder of claim 1, wherein the holding groove comprises a narrow portion into which one of the scribing wheels is partially inserted, and a wide portion having a width wider than the narrow portion, and The recessed portion is the wide portion, and the pair of pin holes are formed at positions corresponding to the wide portion of the holding groove. The holder of claim 7, wherein the narrow portion and the wide portion are formed in a step shape. The holder of claim 7, wherein the narrow portion of the holding groove is formed on a side opposite to the cut end side of the holder with respect to the axis of the pin. The holder according to claim 7, wherein the narrow portion of the holding groove is formed on a side opposite to the cut end side of the holder and on one of the right and left sides with respect to the axis of the pin. The holder according to claim 7, wherein the narrow portion of the holding groove is formed on the cut end side of the holder with respect to the axis of the pin. A holder unit, comprising: a holder according to any one of claims 1 to 11; a scribing wheel having a disk shape, having a blade including a slope and a ridge along the circumference, and being formed at the center a through hole; and a pin rotatably inserted into the through hole; and the scribing wheel is held in the holding groove of the holder, and the pin is inserted into the through hole and the pin hole and held by the support portion. A scribing apparatus comprising: a holder unit as claimed in claim 12; and a scribing head mounted with the above-described holder unit. The scribing device of claim 13, wherein the scribing head is provided with a holder joint for attaching and detaching the holder unit.