JP6076770B2 - Holder unit and scribing device - Google Patents

Description

  The present invention relates to a holder unit and a scribing device used for forming a scribe line on the surface of a brittle material substrate. More specifically, the present invention relates to a holder unit in which a holder, a scribing wheel, and a pin are integrated, and a scribing device including a joint portion to which the holder unit can be attached and detached.

  A scribing wheel is usually used for dividing a brittle material substrate such as a glass substrate. Specifically, this scribing wheel is pressed and rolled on a glass substrate to form a scribe line on the substrate surface, thereby causing a crack in the vertical direction from the substrate surface (scribing process), and then applying stress to the substrate. Then, the vertical crack is grown to the back surface of the substrate (break process), and the brittle material substrate is divided.

  When the scribe line is formed on the substrate surface, the cutting edge of the scribing wheel gradually wears. When the cutting edge wears out, the scribing wheel must be replaced. However, since the scribing wheel has a small outer diameter of about 1.0 to 5.0 mm, when removing the wheel supported at the tip of the holder, it is necessary to insert and remove the pin that supports the extremely thin wheel. For example, the scribing wheel replacement workability is very poor.

  Therefore, for example, a tip holder described in Patent Document 1 is known as a wheel unit that improves the operability of scribing wheel replacement.

  This chip holder has a holder, a scribing wheel, and a pin. More specifically, the chip holder has a structure in which the scribing wheel is rotatably held by a pin in the holder groove of the holder, and the holder, the scribing wheel, and the pin are integrated. The chip holder can be easily attached to and detached from the holder joint in which the magnet is embedded.

  Therefore, when it is necessary to replace the scribing wheel, it is not necessary to bother to remove the scribing wheel from the holder, and it is only necessary to replace the entire chip holder, so that the excavation workability of the scribing wheel is very good.

  As described above, the tip holder disclosed in Patent Document 1 is configured to replace the tip holder when the scribing wheel needs to be replaced. Therefore, after the tip holder is assembled, the scribing wheel is changed from the holder. And there is no need to remove the pins. For this reason, the chip holder disclosed in Patent Document 1 is configured so that the pins cannot be removed from the pin holes of the holder.

JP 2012-995 A

  By the way, in the glass substrate after division | segmentation, the thing with high end surface strength is desired. In particular, since display panels are becoming thinner, glass substrates constituting the display panels are increasingly thinner. According to the display panel using such a thin glass substrate, if the end surface strength of the glass substrate is weak, the glass substrate is easily broken when an external force is applied to the display surface. Accordingly, there is a great demand for improving the end face strength of the divided brittle material substrate.

  The present invention provides a holder unit and a scribing device in which a holder, a scribing wheel, and a pin are integrated, which can improve the end face strength of a fragmented brittle material substrate when the brittle material substrate is scribed. Objective.

In order to achieve the above object, the holder unit of the present invention is a pair of scribing wheels for forming a scribe line, a pin for rotatably holding the scribing wheel, and a holding groove for arranging the scribing wheel. A holder provided with a pin hole in which the pin is arranged in the pair of support parts, and the scribing wheel is held by the pin arranged in the pin hole The pin is disposed in the pin hole with a clearance between the pin and the pin disposed outside the pin hole to prevent the pin from falling off. A claw portion is provided .

  According to the holder unit of the present invention, the pin is rotatable because it is disposed in the pin hole with a clearance provided between the pin and the holder. Thereby, the end surface strength of the divided brittle material substrate is improved in the holder unit of the present invention compared to the holder unit in which the pins are arranged so as not to rotate.

In order to achieve the above object, the scribing device of the present invention forms a scribing wheel for forming a scribe line, a pin for rotatably holding the scribing wheel, and a holding groove for arranging the scribing wheel. And a holder provided with a pin hole in which the pin is disposed in the pair of support parts, wherein the pin has a clearance between the pin hole and the holder. A holder unit in which a claw portion for preventing the pin from falling off is provided outside the pin arranged in the pin hole, and a joint part to which the holder unit can be attached and detached. It is characterized by providing.

  According to the scribing device of the present invention, in a scribing device including a holder unit in which a scribing wheel, a pin, and a holder are integrated, and a joint part that can attach and detach this holder unit, a clearance is provided between the pin and the holder. Since it is rotatably arranged, it becomes possible to manufacture a fragmented brittle material substrate with improved end face strength.

1 is a schematic view of a scribing device in Embodiment 1. FIG. It is a front view of the holder joint which the scribing apparatus in Embodiment 1 has. 3 is a perspective view of a holder unit in Embodiment 1. FIG. 3 is a partially enlarged view of a holder unit in Embodiment 1. FIG. It is a side view of the scribing wheel in Embodiment 1. It is the schematic of the measuring method of the end surface intensity | strength of a test piece. FIG. 7A is a graph of measurement results of end face strength when a holder unit capable of rotating a pin is used, and FIG. 7B is a graph of end face strength when a holder unit capable of rotating a pin is not used. It is a graph of a measurement result. It is a partial expansion perspective view which shows the state before attaching the holder unit in Embodiment 2 to a joint part. It is sectional drawing of the state which attached the holder unit in Embodiment 2 to the joint part. 10 is a front view of a holder unit in Embodiment 2. FIG.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings. However, the embodiment shown below shows an example for embodying the technical idea of the present invention, and is not intended to specify the present invention to this embodiment. The invention is also applicable to other embodiments within the scope of the claims.

[Embodiment 1]
A schematic diagram of a scribing apparatus 10 according to Embodiment 1 is shown in FIG. The scribing apparatus 10 includes a moving table 11. The moving table 11 is screwed with the ball screw 13 and can be moved in the y-axis direction along the pair of guide rails 12a and 12b by rotating the ball screw 13 by driving the motor 14. ing.

  A motor 15 is installed on the upper surface of the movable table 11. This motor 15 is for rotating the table 16 located in the upper part on an xy plane and positioning it at a predetermined angle. The brittle material substrate 17 is placed on the table 16 and held by a vacuum suction means (not shown). The brittle material substrate 17 to be scribed is, for example, a glass substrate, a ceramic substrate, a sapphire substrate, a silicon substrate, or the like.

  The scribing apparatus 10 includes two CCD cameras 18 that image the alignment marks formed on the surface of the brittle material substrate 17 above the brittle material substrate 17. And in the scribe device 10, the bridge 19 is constructed by the support | pillars 20a and 20b along the x-axis direction so that the movable stand 11 and the table 16 of the upper part may be straddled.

  A guide 22 is attached to the bridge 19, and a scribe head 21 is movably installed along the guide 22 along the x-axis direction. A holder unit 30 is attached to the scribe head 21 via a holder joint 23.

  FIG. 2 is a front view of the holder joint 23 to which the holder unit 30 is attached. FIG. 3 is a perspective view of the holder unit 30. 4 is an enlarged view of a part of the side surface of the holder unit 30 observed from the direction A in FIG.

  The holder joint 23 has a substantially cylindrical shape, and includes a rotation shaft portion 23a and a joint portion 23b. In a state where the holder joint 23 is attached to the scribe head 21, two bearings 24a and 24b for rotatably holding the holder joint 23 are provided on the rotary shaft portion 23a via a cylindrical spacer 24c. It is attached. FIG. 2 shows a front view of the holder joint 23 and also shows a sectional view of the bearings 24a and 24b and the spacer 24c attached to the rotary shaft portion 23a.

  The cylindrical joint portion 23b is provided with an internal space 26 having a circular opening 25 on the lower end side. A magnet 27 is embedded in the upper portion of the internal space 26. A holder unit 30 that is detachable by a magnet 27 is inserted into the internal space 26 and attached.

  The holder unit 30 includes a holder 31, a scribing wheel 40 and a pin 50. That is, the holder unit 30 is a unit in which the holder 31, the scribing wheel 40, and the pin 50 are integrated.

  As shown in FIG. 3, the holder 31 has a substantially cylindrical shape and is formed of a magnetic metal. A positioning attachment portion 32 is provided on the upper portion of the holder 31. The attachment portion 32 is formed by cutting out the upper portion of the holder 31 and includes an inclined portion 32a and a flat portion 32b.

  Then, the attachment portion 32 side of the holder 31 is inserted into the internal space 26 through the opening 25. At this time, the upper end side of the holder 31 is attracted by the magnet 27, and the inclined portion 32a of the mounting portion 32 comes into contact with the parallel pin 28 passing through the inner space 26, whereby the holder unit 30 is positioned and fixed with respect to the holder joint 23. . Further, when removing the holder unit 30 from the holder joint 23, the holder unit 30 can be easily removed by pulling it downward.

  A holding groove 33 formed by cutting out the holder 31 is provided below the holder 31. Then, support portions 34 a and 34 b are positioned below the holder 31 cut out to provide the holding groove 33 with the holding groove 33 interposed therebetween. A scribing wheel 40 is rotatably disposed in the holding groove 33. The support portions 34a and 34b are respectively formed with pin holes 35a and 35b for supporting the pins 50 for holding the scribing wheel 40 freely during rotation. The pin hole 35a has a stepped portion therein, and the diameter of the opening on the holding groove 32 side is larger than the diameter of the opening on the other side.

  Next, the details of the scribing wheel 40 will be described with reference to FIG. FIG. 5 is a side view of the scribing wheel 40 attached to the tip of the holder 24.

  The scribing wheel 40 is formed of a base material 41. The base material 41 is formed with a through hole 42 for penetrating the pin 50 at substantially the center of the base material 41, and is formed by cutting both ends of the circumferential portion of the base material 41. A blade portion 43 is formed.

  The base material 41 is a disk-shaped member made of a hard material such as cemented carbide, sintered diamond (hereinafter referred to as PCD), stainless steel, ceramic, or the like. The through hole 42 is formed by cutting the substantial center of the base material 41 into a circle.

  The blade portion 43 includes a ridge line 44 formed by cutting both ends of the circumferential portion of the disk-shaped base material 41, and inclined surfaces 45 on both sides of the ridge line 44. The cutting edge angle of the blade portion 43 is usually an obtuse angle, and is in the range of 90 to 160 °, preferably 90 to 140 °. Note that the specific angle of the blade edge angle is appropriately set based on the material, thickness, and the like of the brittle material substrate 17 to be cut.

  The dimensions of the scribing wheel 40 will be described. The outer diameter of the scribing wheel 40 is 1.0 to 10.0 mm, preferably 1.0 to 5.0 mm, and more preferably 1.0 to 3.0 mm. When the outer diameter of the scribing wheel 40 is smaller than 1.0 mm, the handleability of the scribing wheel 40 is lowered. On the other hand, when the outer diameter of the scribing wheel 40 is larger than 10.0 mm, the vertical crack at the time of scribing may not be formed deeply with respect to the brittle material substrate 17.

  The thickness of the scribing wheel 40 is 0.4 to 1.2 mm, preferably 0.4 to 1.1 mm. When the thickness of the scribing wheel 40 is smaller than 0.4 mm, workability and handleability may deteriorate. On the other hand, when the thickness of the scribing wheel 40 is greater than 1.2 mm, the material for the scribing wheel 40 and the cost for manufacturing increase. The width of the holding groove 33 of the holder 31 (the distance between the support portion 34a and the support portion 34b) is slightly larger than the thickness of the scribing wheel 40. In the first embodiment, the width is 0.65 mm. The width of the holding groove 33 with respect to the wheel is approximately 0.67 mm, and a clearance of about 0.02 mm is provided.

  The diameter of the through hole 42 of the scribing wheel 40 is about 0.8 to 1.5 mm.

  Next, the pin 50 will be described. The pin 50 is a cylindrical member, and one end has a pointed shape as indicated by a dotted line in FIG.

  As the material of the pin 50, similarly to the base material 41 of the scribing wheel 40, a hard material such as cemented carbide, PCD, stainless steel, or ceramic is used. In addition, the pin 50 may be a cylindrical member formed of a cemented carbide or the like and having a plating film containing hard particles formed on the surface thereof. Thus, by forming the plating film containing hard particles on the surface, it is possible to reduce the wear of the pin 50 due to the rotation of the scribing wheel 40. Hard particles such as single crystal diamond, polycrystalline diamond, and cubic boron nitride are suitable as the hard particles. Moreover, a nickel film etc. are suitable for a plating film, for example.

  The holder unit 30 is configured using the holder 31, the scribing wheel 40, and the pin 50 as described above. Specifically, as shown in FIG. 4, the holder unit 30 allows the pin 50 to pass through the through hole 42 of the scribing wheel 40, and both ends of the pin 50 are disposed in the pin holes 35 a and 35 b, so that the scribing wheel 40 is It arrange | positions so that rotation with respect to the holder 31 is possible.

  When the scribing wheel 40 needs to be replaced, the integrated holder unit 30 as in the first embodiment replaces the entire holder unit 30 without removing the scribing wheel 40. Therefore, after the holder 31, the scribing wheel 40, and the pin 50 are integrated, it is not necessary to remove the scribing wheel 40 from the holder 31, so that the pin 50 does not need to be removed from the pin holes 35a, 35b. Therefore, in the conventional integrated holder unit, the pin 50 is fixed by the pin holes 35a and 35b so as not to rotate.

  However, the holder unit 30 of the first embodiment is disposed in the pin holes 35a and 35b so that the pin 50 can rotate.

  Specifically, the pin 50 installed in the pin holes 35 a and 35 b is provided with a clearance of 0.025 to 0.055 mm between the pin 31 and the holder 31. By providing such a clearance, the pin 50 installed in the pin hole can rotate together with the scribing wheel 40 when the scribing wheel 40 rotates. Note that if the clearance is smaller than 0.025 mm, the pin 50 is less rotatable, and if the clearance is larger than 0.055 mm, the cullet generated by the scribing easily enters the clearance, and the pin 50 is less rotated. End up. The clearance between the scribing wheel 40 and the pin 50 in the through hole 42 of the scribing wheel 40 is set to 0.035 to 0.065 mm.

  Further, as shown in FIGS. 3 and 4, the holder unit 30 according to the first embodiment forms four claw portions 36 by crimping the wall of the pin hole 35b on the pin hole 35b side, and the pin 50 is a pin. It is comprised so that it may not fall out from the hole 35b. And on the pin hole 35a side, it has a stepped portion inside, and the hole diameter of the opening on the holding groove 32 side is larger than the hole diameter of the opening on the other side. This step portion forms a pin receiving portion so that the pin 50 does not fall out of the pin hole 35a.

  With such a configuration, the holder unit 30 can rotate the pins 50 arranged in the pin holes 35a and 35b. In the first embodiment, four claw portions 36 are formed. However, the number of the claw portions 36 may be smaller or larger than four. Further, on the pin hole 35a side, as in the pin hole 35b side, the wall of the pin hole 35a may be crimped and a claw portion may be formed.

  Next, a description will be given of the result of measuring the cross-sectional strength of the divided brittle material substrate 17 by actually performing scribing using the holder unit 30 in which the pins 50 arranged in the pin holes 35a and 35b are rotatable. To do.

  First, the scribing wheel 40 actually used was such that the base material 41 was made of PCD. The pin 50 is also made of PCD.

  PCD is fine diamond particles (particle size is 0.5 to 2.0 μm), additives (ultrafine carbides such as tungsten, titanium, niobium and tantalum), binders (iron such as cobalt, nickel and iron). Group elements) are mixed and the mixture is sintered under high temperature and ultrahigh pressure at which diamond is thermodynamically stable.

  Moreover, the reason for using the thing made from PCD as the pin 50 is for making it easy to rotate the pin 50 more smoothly. This is because one of the three PCD pins, a cemented carbide pin, and a pin with a plating film containing hard particles formed on the surface was actually manufactured. This is because the pin made of cemented carbide and the pin made of cemented carbide were excellent in terms of surface roughness. The arithmetic average roughness (Ra), which is one of the parameters representing the surface roughness, was determined to be 0.062 μm for PCD, 0.024 μm for cemented carbide, and 0.954 μm for the plated coating containing hard particles. there were. In addition, regarding the friction coefficient, PCD has a lower friction coefficient than cemented carbide.

  Then, in order to make a comparison with the holder unit 30, a holder unit C for comparison was prepared. Similar to the holder unit 30, the holder unit C includes a holder 31, a scribing wheel 40, and a pin 50, which are integrated.

  The holder unit C is different from the holder unit 30 in that the pins 50 arranged in the pin holes 35a and 35b are fixed so as not to rotate. Specifically, the holder unit C is configured to be fixed so that the pin 50 cannot rotate by press-fitting the pin 50 into the pin hole 35a. In addition, the pin 50 in the comparative holder unit C may be fixed by an adhesive or the like.

  The scribing wheel 40 used had an outer diameter of 3.0 mm, a thickness of 0.65 mm, a through hole 42 having a hole diameter of 0.8 mm, and a cutting edge angle of the blade portion 43 of 110 °.

  Then, the holder unit C for comparison with the holder unit 30 is attached to the holder joint 23 of the scribing device 10, the brittle material substrate 17 is divided to create a test piece, and the cross-sectional strength of the test piece is measured. It was.

In addition, the conditions at the time of producing a test piece are as follows.
Scribing device: scribing device made by Samsung Diamond Industrial Co., Ltd. (MS type)
Cutting speed: 300mm / sec
Cutting depth: 0.1 mm
Brittle material substrate: Nippon Electric Glass Co., Ltd. glass substrate, thickness 0.3 mm, 360 mm × 460 mm, OA-10 (trade name)
Test piece size: 40 mm x 50 mm

  In addition, the strength of the end faces is two straight and opposite surfaces (back surface) that are 5 mm apart on both sides from the center line (line divided into 40 mm × 25 mm size) on one surface of each test piece. Apply pressure F from the vertical direction to the test piece on two straight lines that are 10 mm apart on both sides from the upper center line (line facing the center line of the surface). By measuring, it calculated | required as 4-point bending strength (unit: N). In addition, the outline of the measuring method of the bending strength of each test piece was shown in FIG. The 4-point bending tester used was Ez Test / CE manufactured by Shimadzu Corporation, and the measurement was performed at a test speed of 1 mm / min.

  Then, the four-point bending strength of 20 test pieces cut using the holder unit 30 and the holder unit C was measured. FIG. 7A is a graph of the measurement result when the holder unit 30 that can rotate the pin 50 is used, and FIG. 7B is the measurement result when the holder unit C that cannot rotate the pin 50 is used. It is a graph of. The measurement is performed using three different pins 50. The same pin 50 is used when n = 1 in FIGS. 7A and 7B, and the holder unit 30 and n = 2 and n = 3, respectively. The same pin 50 was used in the holder unit C.

  Moreover, in FIG. 7, the maximum value (Max), the minimum value (Min), and the average value (Ave) when measuring about 20 test pieces are described on the graph. And when the holder unit 30 shown to Fig.7 (a) was used, three average intensity | strengths were 81.3N. Moreover, three average intensity | strengths at the time of using the holder unit C shown in FIG.7 (b) was 71.3N.

  As is clear from this result, the holder unit 30 installed with the pin 50 being rotatable is a test piece compared to the holder unit C being set with the pin 50 being non-rotatable. The end face strength of the glass substrate is high. Specifically, the end face strength of the holder unit 30 is about 14% higher than the end face strength of the holder unit C.

  That is, in the case of the holder unit 30 in which the holder 31, the scribing wheel 40, and the pin 50 are integrated, the end face strength of the divided brittle material substrate 17 is improved by arranging the pin 50 in a rotatable state. Can do.

  In addition, when the holder unit 30 and the holder unit C are respectively attached to the holder joint of a so-called manual scribing device and a scribe line is formed on the glass substrate, the holder unit C is more in comparison with the holder unit 30. I felt heavy.

  From the above, in the holder unit C arranged with the pin 50 fixed, it is considered that the rotational resistance of the scribing wheel 40 is increased, so that many large cracks are generated on the end surface, and the end surface It is thought that the strength decreases.

[Embodiment 2]
Next, the holder joint 123 and the holder unit 130 according to the second embodiment will be described with reference to FIGS. FIG. 8 is a partially enlarged perspective view showing a state before the holder unit 130 is attached to the joint portion 123 b of the holder joint 123. FIG. 9 is a cross-sectional view of a state in which the holder unit 130 is attached to the joint portion 123 b of the holder joint 123. FIG. 10 is a front view of the holder unit 130.

  In the holder unit 130, a holder 131, a scribing wheel 140, and a pin 150 are integrated.

  The holder 131 is formed of a substantially cylindrical metal or resin. The holder 131 is formed with an operation bar 132 that protrudes from the side surface in order to easily regulate the direction of insertion into the joint portion 123b and facilitate attachment / detachment. The holder 131 is formed with an annular recess 133 over the entire circumference.

  In addition, a holding groove 134 formed by cutting out is provided in the lower portion of the holder 131. The support portions 135a and 135b are located below the holder 131 that is notched to provide the holding groove 134 with the holding groove 134 interposed therebetween. In the holding groove 134, pin holes 136a and 136b for supporting a pin 150 for rotatably holding the scribing wheel 140 are formed. The pin hole 136a has a stepped portion inside, and the hole diameter of the opening on the holding groove 134 side is larger than the hole diameter of the opening on the other side. The scribing wheel 140 is the same as the scribing wheel 40 of the first embodiment. Further, the pin 150 is the same as the pin 50 of the first embodiment.

  An inner space 125 having an opening 124 for inserting and holding the holder unit 130 and a bar introduction groove 126 for introducing the operation bar 132 of the holder 131 are formed in the joint portion 123b of the holder joint 123. Yes. The opening 124 is provided with an elastic member 127 (see FIG. 9) such as a ball plunger or a spring member. The elastic member 127 comes into contact with the annular recess 133 of the holder 131.

  The holder unit 130 is inserted into the internal space 125 through the opening 124 while introducing the operation bar 132 into the bar introduction groove 126. When the holder unit 130 is inserted into the internal space 125 and the operation bar 132 is pulled up in the bar introduction groove 126, the upper end of the holder 131 comes into contact with the ceiling portion in the internal space 125. At this time, the elastic member 127 is engaged with the recess 133 of the holder 131, whereby the holder unit 130 is detachably held and fixed to the joint portion 123b. Further, since the operation bar 132 is prevented from moving in the rotational direction by the bar introduction groove 126, the holder unit 130 is accurately positioned in the internal space 125 of the joint portion 123b. Note that the holder 131 does not include the annular recess 133 on the entire circumference of the outer peripheral surface portion, but may include the recess 133 only at a position where the elastic member 127 abuts.

  The holder 131 has a large diameter on the outside (opposite side of the holding groove 134) of the pin hole 136b formed in the support portion 135b. A disk-shaped contact plate 137 having a diameter larger than that of the pin 150 is disposed in the increased diameter portion. The abutting plate 137 is held so as not to come off by claw portions 138 formed by caulking the outer wall of the pin hole 136b at four locations. The contact plate 137 is disposed after the pin 150 is inserted from the pin hole 136b side, and is held by the claw portion 138.

  Further, the holder 131 has a stepped portion on the pin hole 136a side, and the diameter of the opening on the holding groove 134 side is larger than the diameter of the opening on the other side. The holder 131 forms a pin receiving portion by this step portion so that the pin 150 does not fall out of the pin hole 136a.

  Further, the pin 150 is arranged in the holder unit 130 as well as the holder unit 30 of the first embodiment with a clearance of 0.025 to 0.055 mm between the pin holes 136a and 136b and the holder 131. ing.

  With such a configuration, the holder unit 130 can rotate the pins 150 arranged in the pin holes 136a and 136b. Therefore, similarly to the holder unit 30 of the first embodiment, the holder unit 130 in which the holder 131, the scribing wheel 140, and the pin 150 are integrated is also divided because the pin 150 is disposed in a rotatable state. Further, the end face strength of the brittle material substrate can be improved.

  Further, in the holder unit 130, the contact plate 137 is held by a claw portion 138 formed by caulking the inner peripheral wall on the outside of the pin hole 136b. For this reason, the end of the pin 150 on the pin hole 136b side does not directly contact the claw portion 138 but contacts the contact plate 137. Therefore, when the pin 150 directly hits the claw portion 138, there is a possibility that the rotation of the pin 150 may be irregular or decelerated due to the level difference caused by the claw portion 138. However, in the second embodiment, such a problem is caused. Does not occur.

  The contact plate 137 is made of steel. The pin holes 136a and 136b may come into contact with the pin 150 that is not fixed, so that the coefficient of friction is higher, such as a PCD product or a DLC (diamond-like carbon) film formed on a base material. It may be formed of a low one. Alternatively, a cemented carbide with high hardness may be used in order to prevent wear and damage due to contact with the pins.

  Further, if the scribe speed is increased when the scribe line is formed, the pin 150 is likely to rotate together by the rotation of the scribing wheel 140, and a large external force is applied to the pin 150. At this time, if the pin 150 directly contacts the claw portion 138, the pin 150 may break through the claw portion 138. However, in the second embodiment, the pin 150 comes into contact with the contact plate 137 and the external force is dispersed, so that the pin 150 is difficult to come off.

  In the second embodiment, an example in which a disk-shaped plate is used as the contact plate 137 is shown. However, any shape that prevents the pin 150 from slipping out of the pin hole 136b may be used. It may be a flat plate, a polygonal flat plate, or the like.

  Further, in the second embodiment, the contact plate 137 is held by the claw portion 138. However, the holder unit 130 is configured to hold the contact plate 137 in the pin hole 136b by an adhesive, for example, or by welding. The pin hole 136b may be held.

  Further, the holder unit 130 may be configured to use a contact plate for the pin 150 on the pin hole 136a side.

DESCRIPTION OF SYMBOLS 10 ... Scribing device 11 ... Moving stand 12a, 12b ... Guide rail 13 ... Hall screw 14, 15 ... Motor 16 ... Table 17 ... Brittle material substrate 18 ... CCD camera DESCRIPTION OF SYMBOLS 19 ... Bridge 20a, 20b ... Post 21 ... Scribe head 22 ... Guide 23, 123 ... Holder joint 23a ... Rotary shaft part 23b, 123b ... Joint part 24a, 24b .. Bearing 24c ... Spacer 25, 124 ... Opening 26, 125 ... Internal space 27 ... Magnet 28 ... Parallel pin 30, 130 ... Holder unit 31, 131 ... Holder 32 ... Attachment part 32a ... Inclined part 32b ... Flat part 132 ... Operation bar 33, 134 ... Holding groove 34a, 34b, 135a, 135b ... support part 35a, 35b, 136a, 136b ... pin hole 36, 138 ... claw part 40, 140 ... scribing wheel 41 ... base material 42 ... pin hole 43 ... Blade part 44 ... Ridge line 45 ... Inclined surface 50, 150 ... Pin 126 ... Bar introduction groove 127 ... Elastic member 133 ... Indentation 137 ... Contact plate

Claims (5)

A scribing wheel to form a scribe line;
A pin for rotatably holding the scribing wheel;
A holder having a pair of support portions forming a holding groove in which the scribing wheel is disposed, and a pin hole in which the pin is disposed in the pair of support portions;
With
A holder unit in which the scribing wheel is held by a pin disposed in the pin hole,
The pin is disposed in the pin hole with a clearance from the holder, and a claw portion for preventing the pin from falling off is provided outside the pin disposed in the pin hole. holder unit, characterized in that is.   The holder unit according to claim 1, wherein the clearance is 0.025 to 0.055 mm. The holder unit according to claim 1 , wherein a contact plate is disposed between the pin and the claw portion. The holder unit according to any one of claims 1 to 3 , wherein the pin is made of sintered diamond. The holder unit according to any one of claims 1 to 4 ,
A joint part to which the holder unit can be attached and detached;
A scribing device comprising: