201026462 六、發明說明： 【發明所屬之技術領域】 本發明係關於使用切刀切斷玻璃等脆性材料基板或金 屬材料以外之樹脂薄膜等之切斷裝置及用於切斷裝置之切 刀保持具。 【先前技術】 一般於切斷由玻璃等脆性材料基板構成之被加工物時 © 係使用於外周面形成有刃前緣之劃線輪，使劃線輪旋轉並 壓接而於玻璃基板形成劃線，之後以折斷裝置折斷據以進 行切斷。 另一方面，於切斷樹脂材料或薄膜材料等具有可撓性 之被加工物時不使用劃線輪，係使用將鐵、不繡鋼製等具 有直線狀之刀前緣之切刀壓接於被加工物上並移動以切斷 之切斷裝置。此時由於使用切斷裝置重複切斷後刀前緣會 磨耗而切斷效果變差，故有更換切刀之必要。 ❹ 然而若每次切刀磨耗便與新切刀更換，切刀之壽命短 且利用效率低。針對此點，在專利文獻1有揭示將圓板形 之刀輪固定為不旋轉，以刃前緣之一部進行切斷，在該部 分磨耗後之時點使刀輪少量旋轉，以新之刃前緣之—部進 行切斷之切斷裝置。 【專利文獻1】日本專利第2922221號公報 【發明内容】 3 201026462 在於專利文獻！記栽之裝置係改變卡 孔以使特定角度錯開而使 銷進入之疋位 ^ ^ Φ ^ ν 輪。然而刀輪之側面與切刃 巷°丨4之表側之面僅以螺轉址 '、按壓固定，有螺絲易鬆 螺絲之鬆脫則使用之刀前絡如、 右有 心乃别緣部分亦改變之缺點。 又，刀輪之大小雖因用掩 ,1、日能者m m u_ 士 途而異，但例如為直徑2〜7mm _ ^ 刀輪之角度之切換或更換花費時間之 :點。此外，在將多種刀前緣安裝於各襞置使用之工廢内 有誤安裝不同種類之刀輪之可能性。 本發明係著眼於以往之切齡 刀斷裝置或切刀方法之問題點 而為，以藉由使用與刀輪一艚 體化之切刀保持具消除此種缺 點為目的。 為解決此課題，本發明之+77邮壯β 货乃之切斷裝置，具備：設置被加 工物之設置手段；設為對向於铪$ 於别述設置手段上之被加工物 之切刀頭；設於前述切刀頭之針# > α 頌之别端之保持具接頭；具有安 裝部且可拆卸地安裝於前述保持具接頭並固定於外周面形 成有刃前緣之刀輪之切刀保持具；使前述切刀頭垂直於前 述設置手段上之被加工物之面上下動之升降手段；使前述 切刀頭及前述被加工物在沿被加工物之平面《面内相對移 動之相對移動部；藉由將前述刀輪壓接於被加卫物並掃插 來切斷被加工物。 在此可使前述切刀保持具為使前述刀輪之安裝方向相 異18〇度可拆卸地安裝於前述保持具接頭而具有2處之安 裝部。 在此可使前述切刀保持具之安裝部形成於前述切刀保 201026462 持具之上部之缺口部；前述保持具接頭具有插人前述切刀 保持具之保持孔部、卡合於前述切聽持具之前述缺 之鎖。 、。 在此可使前述切刀保持具之安裝部係往側方突出之操 作桿；前述保持具接頭具有插入前述切刀保持具之保持孔 部、插入前述切刀保持具之前述操作桿之桿導入槽。 在此可使前述刀輪於由前述切刀保持具突出之部分具 有平行於則述被加工物之面之直線狀之切除。 在此可使前述刀輪為圓板狀且於其外周部形成有刃前 緣角度為10°〜80。之刃。 在此可使前述切斷裝置之被加工物係使脆性材料基板 貼合具有可撓性之基板之貼合基板；前述刀輪係以比前述 被加工物之脆性材料基板硬度低之材質形成，切斷前述被 加工物之具有可撓性之基板；前述切斷裝置另具有將前述 被加工物之脆性材料基板劃線之劃線頭。 為解決此課題，本發明之切刀保持具，用於具有設為 對向於被加工物之切刀頭及設於前述切刀頭之前端之保持 具接頭，藉由將刀輪壓接於被加工物並掃描來切斷被加工 物之切斷裝置，其特徵在於：具有安裝部，可拆卸地安裝 於前述保持具接頭並固定於外周面形成有刀前緣之刀輪。 在此可使前述切刀保持具具有為使前述刀輪之安裝方 向相異180度可拆卸地安裝於前述保持具接頭而具有2處 之安裝部。 在此可使前述切刀保持具之安裝部係形成於前述切刀 201026462 保持具之上部之缺口邱.計、+，片 77 M k 邙，述保持具接頭具有插入前述士„ 刀保持具之保持孔部、卡人於 刀 部之銷。 卡〇於别述切刀保持具之前述缺口 在此可使則述切刀保持具之安裝部係往側方突出之 作桿；前述保持具接頭具有插人前^刀㈣具之 部、插入前述切刀保持具之前述操作桿之桿導入槽。 在此可使則述刀輪於由前述切刀保持具突出之部分具 有平行於前述被加工物之面之直線狀之切％。 、 在此可使前述刀輪為圓板狀且於其外周部形成有 緣角度為10〜80。之刀。 利用具有此種特徵之本發明，刀輪係一體化安裝於切 刀保持具，使切刀鱗具對健具接㈣可裝_。因此， 可極容易進行切刀保持具之更換。此外由於在請求項2、 9具有2處之安裝部’故即使於刀輪因使用而磨耗之狀況亦 可藉由使刀輪之安裝方向反轉而以新之刀前緣切斷被加工 物0 【實施方式】 (實施形態1) 圖1係顯示本發明之實施形態1之切斷裝置之全體構 成之立體圖。本實施形態之切斷裝置丨係移動台丨丨沿一對 之導引軌道12a、12b於y軸方向保持為可自由移動。滾珠 螺桿13係與移動台Π螺合。滾珠螺桿13係藉由馬達14 之驅動而旋轉，使移動台U沿導引軌道12a、12b於丫軸方 201026462 向移動。於移動台11之上面設有馬達15。馬達15係使平 台16在xy平面旋轉以定位於特定角度。被加工物17係載 置於此平台16上，以不圖示之真空吸引手段等保持。於切 斷裝置1之上部設有拍攝被加工物17之對準標記之2台之 CCD攝影機ι8β在此移動台11、平台16構成設置被加工 物1 7之設置手段。 於切斷裝置1沿X軸方向以支柱21a、21b價設有橋部 20跨越移動台丨丨於其上部之平台16。切刀頭22可沿設於 橋部20之導引23於x軸方向移動。馬達24係使切刀頭22 沿X軸方向移動。於切刀頭22之前端部透過保持具接頭4〇a 安裝有切刀保持具30A。在此馬達14與導引軌道12a、12卜 滾珠螺桿13係使平台16於y軸方向移動之移動部，橋部 支柱21a、21b、導引23、馬達24係使切刀頭22於x 轴方向移動之移動部，馬達15係使平台16旋轉之旋轉部， 此等構成相對移動部。 ❹ 其次說明安裝於本實施形態之切刀頭22之切刀保持具 3〇A之構成。圖2係顯示本發明之實施形態1之切刀保持具 之本體。卩。圖3係安裝有刀輪之之切刀保持具3〇A之 立體圖。圖4係顯示本發明之實施形態之刀輪之構成之圖。 如^等®所示’切刀保持具撤係保持刀輪之大致圓筒形 於切刀保持具3〇A之一端平坦部3U、31b皆設為 32仃於；心輛，於此平坦部…、31b具有沿中心轴之切除 32。於平坦部3la 銷槽…其侧… 有垂直於面之方向之 、 、形成為圓弧狀。刀輪34A係如後述為圓 7 201026462 板狀’於中心具有貫通孔，於圓周部分之至少一部具有直 線狀之切口 34a。刀輪34A係藉由於中心之貫通孔使插入於 銷槽33之銷35貫通並將直線狀之切口 34a抵接切除之 内壁而固定於切刀保持具30A。固定刀輪34A後，即使需 要刀輪之更換亦不卸下刀輪而與切刀保持具3〇a 一起更 換。另外，於切刀保持具30 A之另一端設有定位用之安裝 部36。安裝部36係切除切刀保持具3〇A而形成，具有傾斜 部36a及與切刀保持具30A之軸平行之平坦部36fe。此外， 切刀保持具30A係其上部之一部分以磁性體金屬構成。 其次使用圖4說明刀輪34Αβ刀輪34A具有例如輪徑 2.5mm、厚度〇.5mm程度之圓板狀之形狀，圓周部分之剖 面形成圓錐形。又，刀輪34A於中心具有貫通孔，於圓周 部分之至少一部具有直線狀之切口 34a。在此刀輪34a之圓 周部分之刃前緣角度係例如1(Γ〜8〇。，特別是15。〜較理 想。此外，刀輪之材質係根據被加工物17之種類而適當選 擇，例如使用超硬合金、燒結鑽石、sus、SKH(工具鋼）、 藍寶石等。此外，於如後述以貼合基板之樹脂薄臈為加工 對向時，使用比脆性材料基板硬度低之材質。 其次說明保持具接頭4〇A。圖5係本實施形態之保持具 接頭40A之圖。圖6係本實施形態之保持具接頭之切 刀保持具30A插入時之立體圖。如此等圖所示，保持具接 頭40A於上部具有轴纟4U、41b，下方係保持切刀保持具 3〇A之保持部42。於保持具接頭4〇A之保持部“如圖示形 成有圓形之保持孔部43，其内側埋設有磁石。此外，於 201026462 此保持孔部43之内部於從中心抽隔開之位置設與中心轴垂 直之平行銷45。平行鎖45係接觸切刀保持具嫩之傾斜部 36a定位切刀保持具3〇A。 • 於將此切刀保持具30A安裝於保持具接頭40A時，如 圖6所示將切刀保持具3〇A從其安裝部刊插入於保持具接 頭40A之保持孔部43。之後切刀保持具3〇a之前端部受磁 石44吸引，進而傾斜部36a接觸平行銷45而定位固定。圖 7係顯示安裝有切刀保持具3〇A之狀態之局部剖面圖。由於 切刀保持具30A僅受磁石44吸引，故安裝極容易，固定於 特定之位置。於更換時亦僅拉切刀保持具3〇A即可容易卸 下，容易裝卸。 其次使用方塊圖說明本實施形態之切斷裝置丨之構 成。圖8係顯示本實施形態之切斷裝置丨之控制系統之構 成之方塊圖。於本圖來自2台之CCD攝影機18之輸出係透 過影像處理部51給予控制部52。控制部52係透過χ馬達 Φ 驅動部53、Y馬達驅動部54分別驅動馬達24、14。此外， 旋轉用馬達驅動部55係驅動馬達15，使配置於平台16之 被加工物17旋轉並於有角度偏移時消除該角度偏移。另外 於控制部52接續切刀保持具升降部56、監視器57。切刀 保持具升降部56係使切刀保持具3〇A升降並驅動刀輪34A 以適當之荷重壓接被加工物17之表面之升降手段。 切刀保持具升降部56係設於切刀頭22之内部，以例 如使用空氣壓控制之孔體>飞紅或線性馬達之電動升降部等 構成。藉由切刀保持具升降部56可使刀輪34A接觸樹脂基 201026462 板等被加工物17之表面並以適當之荷重壓接。 其次針對實施形態1之切斷裝置1之動作說明。做為 被加工物17可考慮樹脂薄膜、其積層物、低溫燒成陶瓷 (LTCC)、高溫燒成陶瓷（HTCC)、矽晶圓等。此外，亦可能 以於玻璃基板等被加工物積層有樹脂薄膜等之貼合基板之 中之樹脂薄膜為對象。首先將被加工物17設置於平台Μ 上，以不圖示之真空吸著手段等保持。之後控制部52藉由 相對移動部於X軸或γ轴方向移動並旋轉控制以將切刀頭 22往切斷位置移動，在所望之位置控制切刀保持具升降部 56使切刀頭22降下。之後保持於切刀頭22之前端之刀輪 34Α壓接於被加工物17之表面。藉此壓入被加工物17之内 部。在此狀態下使相對移動部移動可切斷。例如在切斷於 玻璃基板等脆性材料基板積層有樹脂薄膜等之貼合基板之 中之樹脂薄膜時，雖取決於刀輪34Α之材質等但若使刀 輪34Α壓入至刀輪34Α貫通樹脂薄膜而與脆性材料基板接 觸，在切斷樹脂薄膜之加工可能對脆性材料基板亦造成損 傷。欲防止此問題於未然時，可在使刀輪34Α壓入至即將 貫通樹脂薄膜處（例如樹脂薄膜厚度之99%之深度）之狀態 下切斷。結果在切斷樹脂薄膜之加工雖未完全切斷樹脂薄 膜，但藉由對應於樹脂薄膜之材質減少不切斷之部分之厚 度可在大多數狀況可消除對在後續加工之貼合基板全體之 分離之不良影響。 (實施形態2) 201026462 其次針對本發明之實施形態2說明。實施形態1之切 刀保持具30 A於圓筒部之一面具有安裝部36之切除，而實 施形態2之切刀保持具30B係如圖9所示於左右對稱形成 安裝部36 A、36B。其他之構成與實施形態1相同。此時亦 與實施形態1同樣可將切刀保持具30B安裝於保持具接頭 40A使用。假設於此時安裝部36A接觸平行銷45安裝。之 後在隨使用而於刀輪34A之刃前緣產生磨耗時使切刀保持 具30B沿其中心轴旋轉18〇度，使安裝部36B接觸平行銷 〇 45女裝於保持具接頭40A。如此可換為新切刀面，可將刀 輪之兩處用於切斷。由於此切換不必卸下刀輪本身，故可 極容易進行，可使將刀輪一體化之切刀保持具長壽化。 (實施形態3) 其次針對實施形態3之切斷裝置說明。實施形態3之 切斷裝置1係適用於以積層有玻璃基板之脆性材料基板與 φ 樹脂薄膜等之貼合基板為被加工物，切斷其中之樹脂薄膜 等之用途。在實施形態3係如圖i〇(a)顯示刀輪34B，除刀 輪34B之直線狀缺口部34a以外還於下面平坦形成切除 34。此外由於以貼合基板之樹脂薄膜為加工對象，故於刀 輪34B係使用比脆性材料基板硬度低之材質。例如，針對 使用實施形態3之切斷裝置之刀輪34B切斷於玻璃基板等 脆性材料基板積層有樹脂薄膜等之貼合基板之中之樹脂薄 膜之狀況說明。此時，即使使刀輪34B壓入至刀輪34B貫 通樹脂薄膜，下面之平坦之切除34b接觸脆性材料基板之 201026462 表面’在滑動狀態下移動，故不會對脆性材料基板造成損 傷’可完全切斷樹脂薄膜。 此刀輪34B係如圖l〇(b)所示安裝於切刀保持具30C， 再安裝於保持具接頭40A。其他之構成與實施形態1相同。 如此’如圖11所示，於積層有玻璃基板G與樹脂薄膜f之 被加工物之樹脂薄膜側形成切入時，刀輪34B雖壓入於樹 脂薄膜F’但不會壓入玻璃基板因此不會損傷玻璃基板 之樹脂薄膜面側，可僅切斷樹脂薄膜，可防止玻璃面之損 傷0 (實施形態4) 其次針對本發明之實施形態4之切斷裝置說明。圖j 2 係本實施形態4之切刀保持具3〇D之立體圖。圖13係顯示 本實施形態之切刀保持具3〇D及保持具接頭4〇B之剖面 圖。另外，圖13中保持具接頭4〇B之剖面係將多角形狀之 兩側面之間已平行於兩侧面之面切時之面。 切刀保持具30D係以大致圓柱形之磁性體金屬構成， 於外周面部之全周具有行成為圓環狀之凹$ 37。此外，切 刀保持具30D係與實施形態i同樣固定保持刀# 34人，此 :為使往保持具接帛權之插人容易及以，具有從側面 大出之操作桿38做為安裝部。 保持具接頭40B具有插入保持切刀保持具3〇d之大 ^ =之保持孔部46及導人切刀保持具·之操作桿 之桿導人槽47。桿導入槽47於圖13中之保持具接頭士 201026462 “:：僅圖不有一部分。如圖13所示’於保持孔部46設 有例如彈簧構件等彈性構件48。 切刀保持具卿係將操作桿38導人桿導人槽Ο並插 入^持孔部抓切刀保持具卿插人保持 ❹ 38拉上至桿導入槽47之最上部時，…所示切= 具30D之凹陷37與保持孔部心彈㈣件^ 保持具30D固定於保持具接頭伽。此外，由 以桿導入槽47抑止旋轉方向之動作，故切刀保持具獅在 寺具接頭卿之保持孔部46内正確定位。其他構成與前 乂之實施形態1相同，可獲得同樣之效果。 (實施形態5) '、次針對本發明之實施形態5說明。在實施形態4係 於切刀保持具遍設有1個操作桿38,於實施形態5之切 刀保持具30E係如® 14所示於左右對稱形成2個操作桿 38A、38B °此時於保持具接頭4()C亦於左右形成桿導入槽 47A、47B。此外，保持切刀保持具3〇E之彈性構件係設於 不圖示之側方《如此在插入切刀保持具3〇E進行被加工物 之切斷後，刀輪之刃前緣磨耗後，可與實施形態2同樣使 插入方向旋轉1 80度後將切刀保持具3〇e安裝於保持具接 頭40C。因此可將刀輪之兩處用於切斷。由於此切換不必卸 下刀輪本身，故可極容易進行，可使將刀輪一體化之切刀 保持具長壽化。 13 201026462 (實施形態6) it 在前述之各實施形態係針對具有！個切刀頭之切斷裝 明。在可於將被加工物劃線之劃線裝置安裝於圖5顯 不之保持具接料，可直接安裝切刀料具做為切斷裝 置。進而可於具有複數之頭之多劃線裝置適用本發明之切 刀保持具，使其為具有切斷機能與劃線機能之切斷裝置。 於具有切刀機能與劃線機能之切斷裝置之狀況，以貼 合基板為被加工物，將被加工物17之中之脆性材料基板劃 線’以切刀機能切斷樹月旨薄膜。例如可考慮被加工物為於 玻璃基板貼合有樹脂薄膜之面板基板。此時係使用於上下 分別搭載有切刀頭與劃線頭之切斷裝置，如圖“所示從下 方以劃線頭61劃線，並以切刀帛34B切斷。藉此可容易切 斷貼合基板。 本發明係關於切割樹脂薄膜及積層有此等之基板等被 加工物之切斷裝置及用於此之切刀保持具，由於將刀輪與 切刀保持具一體化，故可實現容易更換之切刀保持具。 【圖式簡單說明】 圖1係顯示本發明之實施形態1之切斷裝置之全體構 成之立體圖。 圖2係顯示本發明之實施形態1之切刀保持具之構成 之圖。 圖3係本實施形態1之切刀保持具之立體圖。 圖4係顯示本發明之實施形態之刀輪之構成之圖。 201026462 圖5係本實施形態之保持具接頭之圖。 圖6係本實施形態之保持具接頭之切刀保持具插入時 之立體圖。 ’ 圖7係顯示插入切刀保持具之狀態之保持具接頭之局 部剖面圖。 圖8係顯示本實施形態之切斷裝置之控制系統之構成 之方塊圖。 ❹ 圖9係顯示本發明之實施形態2之切刀保持具之圖。 圖1〇係顯示本發明之實施形態3之刀輪、插入切刀保 持具之狀態之保持具接頭之局部剖面圖。 圖Π係顯示使用實施形態3之刀輪加工被積層之被加 工物之狀態之圖。 圖12係本發明之實施形態4之刀輪之立體圖。 圖13係顯示插入本發明之實施形態4之切刀保持具之 狀態之保持具接頭之局部剖面圖。 _ 圖14係本發明之實施形態5之刀輪之立體圖。 圖15係顯示插入本發明之實施形態5之切刀保持具之 狀態之保持具接頭之局部剖面圖。 圖16係顯示以本發明之實施形態6之切斷裝置切斷及 劃線之狀態之圖。 【主要元件符號說明】 I :切斷裝置 II :移動台 15 201026462 16 ： 平台 22 ： 切刀頭 30A 、30B、30C 、30D、30E :切刀保持具 31a 、31b 、 36b : 平坦部 32 : 缺口 33 ： 銷槽 34、 34A、34B ·· 刀輪 35 : 銷 36 : 安裝部 36a :傾斜部 37 : 凹部 38 ' 38A、38B : 操作桿 40A 、40B 、 40C :保持具接頭 41a 、4 1 b :轴承 42 : 保持部 43 : 保持孔部 44 : 磁石 45 : 平行銷 46 : 保持孔部 47、 47A、47B : 桿導入槽 51 : 影像處理部 52 : 控制部 53 : X馬達驅動- 郎 54 : Y馬達驅動- 郎[Technical Field] The present invention relates to a cutting device for cutting a brittle material substrate such as glass or a resin film other than a metal material using a cutter, and a cutter holder for the cutting device . [Prior Art] Generally, when a workpiece composed of a brittle material substrate such as glass is cut, a scribing wheel having a blade leading edge formed on an outer peripheral surface is used, and the scribing wheel is rotated and pressure-bonded to form a glass substrate. The wire is then broken by the breaking device to cut it. On the other hand, when cutting a flexible material such as a resin material or a film material, a scribing wheel is not used, and a cutter having a linear blade leading edge such as iron or stainless steel is used for crimping. A cutting device that is cut on the workpiece and moved to be cut. At this time, since the cutting edge of the blade is worn and the cutting effect is deteriorated by repeated cutting using the cutting device, it is necessary to replace the cutting blade. ❹ However, if the cutter is worn and replaced with a new cutter, the life of the cutter is short and the utilization efficiency is low. In view of this, Patent Document 1 discloses that the disc-shaped cutter wheel is fixed so as not to rotate, and is cut at one of the leading edges of the blade, and the cutter wheel is rotated a small amount at the time after the portion is worn, to the new blade. The cutting device for cutting off the front edge. [Patent Document 1] Japanese Patent No. 2922221 [Invention Summary] 3 201026462 In the patent document! The device for recording is to change the hole of the card so that the specific angle is staggered and the pin enters the position ^ ^ Φ ^ ν wheel. However, the side of the cutter wheel and the surface of the cutting edge of the cutting edge of the cutting edge are only screwed and fixed by the screw. When the screw is loose, the front of the knife is used, and the right side is changed. The shortcomings. In addition, the size of the cutter wheel varies depending on the use of the cover, and the daily energy of the m m u_ 士 , but for example, the diameter is 2 to 7 mm _ ^ The switching or replacement of the angle of the cutter wheel takes time: point. In addition, it is possible to install a variety of cutter wheels in the work waste that is used in the installation of various tool leading edges. SUMMARY OF THE INVENTION The present invention has been made in view of the problems of the prior art knife cutting device or the cutter method, in order to eliminate such a defect by using a cutter holder which is integrated with the cutter wheel. In order to solve this problem, the apparatus for cutting a +77-mail-yield-yield of the present invention includes means for setting a workpiece, and a cutter for facing a workpiece on a setting means. a retainer joint provided at the other end of the cutter head of the cutter head; and a cutter wheel having a mounting portion and detachably attached to the holder joint and fixed to the outer peripheral surface and having a leading edge of the blade a cutter holder; a lifting means for lowering the cutting head perpendicular to a surface of the workpiece on the setting means; and causing the cutting head and the workpiece to move relative to each other in a plane along the plane of the workpiece The relative moving portion is formed by pressing the cutter wheel against the object to be affixed and sweeping the workpiece. Here, the cutter holder may have two mounting portions that are detachably attached to the holder joint at a position different from the mounting direction of the cutter wheel by 18 degrees. Here, the mounting portion of the cutter holder may be formed on a notch portion of the upper portion of the cutter holder 201026462; the holder joint has a retaining hole portion inserted into the cutter holder, and is engaged with the cutter The aforementioned lack of locks. ,. Here, the mounting portion of the cutter holder can be attached to the side protruding operating lever; the holder joint has a rod inserted into the holding hole portion of the cutter holder and inserted into the rod of the cutter holder groove. Here, the cutter wheel can be cut in a straight line parallel to the surface of the workpiece to be projected from the portion of the cutter holder. Here, the cutter wheel may have a disk shape and a blade leading edge angle of 10 to 80 may be formed on the outer peripheral portion thereof. Blade. Here, the workpiece of the cutting device may be a bonded substrate in which a brittle material substrate is bonded to a flexible substrate; and the cutter wheel is formed of a material having a lower hardness than a brittle material substrate of the workpiece. The flexible substrate is cut by the workpiece, and the cutting device further has a scribing line for scribing the brittle material substrate of the workpiece. In order to solve the problem, a cutter holder according to the present invention is provided with a cutter head that is opposite to a workpiece and a holder joint that is provided at a front end of the cutter head, by crimping the cutter wheel to The workpiece is scanned and cut to cut the workpiece, and has a mounting portion that is detachably attached to the holder joint and fixed to a cutter wheel having a knife leading edge formed on an outer peripheral surface thereof. Here, the cutter holder may have two attachment portions that are detachably attached to the holder joint at 180 degrees apart from the mounting direction of the cutter wheel. Here, the mounting portion of the cutter holder can be formed on the upper portion of the cutter 201026462 holder, and the sheet is 77 M k , and the holder joint has the insert of the aforementioned knife holder. Holding the pin portion and the pin of the card holder on the blade portion. The aforementioned notch of the cutter holder is used to cause the mounting portion of the cutter holder to protrude to the side; the holder connector a rod introduction groove for inserting the front knife (four) member and inserting the operation lever of the cutter holder. The cutter wheel may have a portion protruding from the cutter holder to be parallel to the workpiece. In this case, the cutter wheel has a disk shape and a blade having an edge angle of 10 to 80 is formed on the outer peripheral portion thereof. With the present invention having such a feature, the cutter wheel is integrated. The cutter is mounted on the cutter holder so that the cutter scale can be attached to the exercise tool (4). Therefore, the cutter holder can be replaced easily. In addition, since the attachment portions 2 and 9 have two mounting portions' Therefore, even if the cutter wheel is worn due to use, The object to be processed is cut by the front edge of the new blade by inverting the mounting direction of the cutter wheel. [Embodiment 1] FIG. 1 is a perspective view showing the overall configuration of the cutting device according to the first embodiment of the present invention. The cutting device of the present embodiment is configured such that the movable table is held freely movable in the y-axis direction along the pair of guide rails 12a and 12b. The ball screw 13 is screwed to the moving table. The ball screw 13 is used. Rotating by the drive of the motor 14 causes the mobile station U to move along the guide rails 12a, 12b on the paraxial side 201026462. A motor 15 is provided on the upper side of the mobile station 11. The motor 15 rotates the platform 16 in the xy plane to locate The workpiece 17 is placed on the stage 16 and held by a vacuum suction means (not shown), etc. The upper part of the cutting apparatus 1 is provided with two alignment marks for photographing the workpiece 17. The CCD camera ι8β constitutes a means for installing the workpiece 17 on the moving table 11 and the platform 16. The cutting device 1 is provided with the bridge 20 at the upper portion of the movable table 11 in the X-axis direction via the pillars 21a and 21b. Platform 16. The cutter head 22 can be disposed along the bridge portion 20 The motor 23 moves in the x-axis direction. The motor 24 moves the cutter head 22 in the X-axis direction. The cutter holder 30A is attached to the front end of the cutter head 22 through the holder joint 4A. Here, the motor 14 is The guide rails 12a and 12b are ball-moving portions 13 which move the platform 16 in the y-axis direction, and the bridge pillars 21a and 21b, the guide 23, and the motor 24 move the cutter head 22 in the x-axis direction. The motor 15 is a rotating portion that rotates the table 16, and these constitute a relative moving portion. ❹ Next, the configuration of the cutter holder 3A attached to the cutting head 22 of the present embodiment will be described. Fig. 2 shows the present invention. The body of the cutter holder of the first embodiment. Hey. Fig. 3 is a perspective view of a cutter holder 3〇A in which a cutter wheel is mounted. Fig. 4 is a view showing the configuration of a cutter wheel according to an embodiment of the present invention. As shown by ^ et al., 'the cutter holder retains the substantially cylindrical shape of the cutter wheel. The one end flat portion 3U, 31b of the cutter holder 3〇A is set to 32仃; the heart is here, the flat portion ..., 31b has a cut 32 along the central axis. In the flat portion 3a, the pin groove ... the side thereof is formed in an arc shape perpendicular to the direction of the surface. The cutter wheel 34A is a circle 7 201026462. The plate shape has a through hole at the center, and has a straight slit 34a in at least one portion of the circumferential portion. The cutter wheel 34A is fixed to the cutter holder 30A by penetrating the pin 35 inserted into the pin groove 33 through the through hole of the center and abutting the linear slit 34a against the cut inner wall. After fixing the cutter wheel 34A, it is replaced with the cutter holder 3〇a without removing the cutter wheel even if the cutter wheel is required to be replaced. Further, a mounting portion 36 for positioning is provided at the other end of the cutter holder 30A. The attachment portion 36 is formed by cutting the cutter holder 3A, and has an inclined portion 36a and a flat portion 36fe parallel to the axis of the cutter holder 30A. Further, one portion of the upper portion of the cutter holder 30A is made of a magnetic metal. Next, the cutter wheel 34 Α β cutter wheel 34A has a disk-like shape of, for example, a wheel diameter of 2.5 mm and a thickness of about 55 mm, and the cross section of the circumferential portion is formed into a conical shape. Further, the cutter wheel 34A has a through hole at the center, and has a linear slit 34a in at least one portion of the circumferential portion. The blade leading edge angle of the circumferential portion of the cutter wheel 34a is, for example, 1 (Γ~8〇., particularly 15). Preferably, the material of the cutter wheel is appropriately selected depending on the type of the workpiece 17, for example. A cemented carbide, sintered diamond, SUS, SKH (tool steel), sapphire, etc. are used. When the resin thin film of the bonded substrate is processed as described later, a material having a lower hardness than the brittle material substrate is used. Fig. 5 is a view showing the holder joint 40A of the present embodiment. Fig. 6 is a perspective view showing the holder holder 30A of the holder joint of the embodiment inserted. The joint 40A has the shafts 4U and 41b at the upper portion, and the holding portion 42 for holding the cutter holder 3A in the lower portion. The holding portion of the holder joint 4A is formed with a circular holding hole portion 43 as shown in the drawing. The magnet is embedded in the inner side. Further, in 201026462, the inside of the holding hole portion 43 is provided with a parallel pin 45 perpendicular to the central axis at a position spaced apart from the center. The parallel lock 45 is in contact with the cutter to maintain the inclined portion 36a of the tender position. The cutter holder has 3〇A. When the cutter holder 30A is attached to the holder joint 40A, the cutter holder 3A is inserted from the mounting portion thereof into the holding hole portion 43 of the holder joint 40A as shown in Fig. 6. After that, the cutter is held. The front end portion of the belt 3 is attracted by the magnet 44, and the inclined portion 36a is positioned and fixed by contacting the parallel pin 45. Fig. 7 is a partial cross-sectional view showing the state in which the cutter holder 3A is attached. Since the cutter holder 30A It is only attracted by the magnet 44, so it is easy to mount and is fixed at a specific position. It can be easily removed only by pulling the knife holder 3〇A during replacement, and it is easy to attach and detach. Next, the cutoff of this embodiment will be described using a block diagram. Fig. 8 is a block diagram showing the configuration of a control system of the cutting device of the present embodiment. The output of the two CCD cameras 18 is transmitted to the control unit 52 via the image processing unit 51. The portion 52 drives the motors 24 and 14 through the χ motor Φ driving unit 53 and the Y motor driving unit 54. The rotation motor driving unit 55 drives the motor 15 to rotate the workpiece 17 placed on the stage 16 Eliminate this when the angle is offset In addition, the control unit 52 connects the cutter holder lifting portion 56 and the monitor 57. The cutter holder lifting portion 56 lifts and lowers the cutter holder 3A and drives the cutter wheel 34A to be crimped with an appropriate load. The lifting means 56 is attached to the inside of the cutter head 22. The cutter holder lifting portion 56 is provided inside the cutter head 22, and is configured, for example, by using an air pressure control hole body > a flying red or a linear motor electric lifting portion. The cutter holder 34A can be brought into contact with the surface of the workpiece 17 such as the resin base 201026462 by the cutter holder lifting portion 56, and can be pressed by an appropriate load. Next, the operation of the cutting device 1 of the first embodiment will be described. The workpiece 17 may be a resin film, a laminate thereof, a low temperature fired ceramic (LTCC), a high temperature fired ceramic (HTCC), a tantalum wafer or the like. In addition, it is also possible to apply a resin film in a bonded substrate such as a resin film to a workpiece such as a glass substrate. First, the workpiece 17 is placed on the platform , and held by a vacuum suction means or the like (not shown). Thereafter, the control unit 52 moves and rotates the control unit 52 in the X-axis or γ-axis direction to move the cutter head 22 to the cutting position, and controls the cutter holder lifting portion 56 to lower the cutter head 22 at the desired position. . Then, the cutter wheel 34 held at the front end of the cutter head 22 is pressed against the surface of the workpiece 17. Thereby, the inside of the workpiece 17 is pressed. In this state, the relative moving portion is moved to be cut. For example, when the resin film is laminated on a laminated substrate such as a resin film or the like on a brittle material substrate such as a glass substrate, the cutter wheel 34 is pressed into the cutter wheel 34 and penetrates the resin depending on the material of the cutter wheel 34 or the like. The film is in contact with the brittle material substrate, and the processing of cutting the resin film may also cause damage to the brittle material substrate. In order to prevent this problem, the cutter wheel 34 can be cut into a state where the resin film is to be penetrated to the resin film (e.g., the depth of the resin film is 99%). As a result, although the resin film is not completely cut in the process of cutting the resin film, the thickness of the uncut portion can be reduced by the material corresponding to the resin film, and in most cases, the entire bonded substrate can be eliminated in the subsequent processing. The adverse effects of separation. (Embodiment 2) 201026462 Next, description will be made on Embodiment 2 of the present invention. The cutter holder 30A of the first embodiment has the attachment portion 36 cut away from one surface of the cylindrical portion, and the cutter holder 30B of the second embodiment forms the attachment portions 36 A and 36B symmetrically in the left-right direction as shown in Fig. 9 . The other configuration is the same as that of the first embodiment. At this time, the cutter holder 30B can be attached to the holder joint 40A in the same manner as in the first embodiment. It is assumed that the mounting portion 36A is attached to the parallel pin 45 at this time. Thereafter, when the wear occurs at the leading edge of the blade of the cutter wheel 34A as it is used, the cutter holder 30B is rotated by 18 degrees along its central axis, so that the mounting portion 36B contacts the parallel pin 〇 45 to the holder joint 40A. This can be replaced with a new cutting face, which can be used to cut two places. Since it is not necessary to remove the cutter wheel itself by this switching, it is extremely easy to carry out, and the cutter which integrates the cutter wheel can be maintained for a long life. (Embodiment 3) Next, a description will be given of a cutting device according to Embodiment 3. The cutting device 1 of the third embodiment is applied to a bonded substrate such as a brittle material substrate in which a glass substrate is laminated and a φ resin film or the like as a workpiece, and the resin film or the like is cut. In the third embodiment, the cutter wheel 34B is shown in Fig. 1(a), and the cut 34 is formed flat on the lower surface in addition to the linear notch portion 34a of the cutter wheel 34B. Further, since the resin film to which the substrate is bonded is processed, the cutter wheel 34B is made of a material having a lower hardness than the brittle material substrate. For example, a description will be given of a state in which a resin film in a laminated substrate such as a resin film is laminated on a brittle material substrate such as a glass substrate, by using a cutter wheel 34B of the cutting device of the third embodiment. At this time, even if the cutter wheel 34B is pressed into the cutter wheel 34B through the resin film, the lower flat cut 34b contacts the 201026462 surface of the brittle material substrate, and the surface of the 201026462 is moved in the sliding state, so that the damage to the brittle material substrate is not caused. The resin film was cut. This cutter wheel 34B is attached to the cutter holder 30C as shown in Fig. 1(b), and is attached to the holder joint 40A. The other configuration is the same as that of the first embodiment. As shown in FIG. 11, when the resin film side of the workpiece on which the glass substrate G and the resin film f are laminated is formed, the cutter wheel 34B is pressed into the resin film F' but is not pressed into the glass substrate, so The resin film side of the glass substrate is damaged, and only the resin film can be cut, and the damage of the glass surface can be prevented. (Embodiment 4) Next, the cutting device according to the fourth embodiment of the present invention will be described. Fig. j 2 is a perspective view of the cutter holder 3〇D of the fourth embodiment. Fig. 13 is a cross-sectional view showing the cutter holder 3〇D and the holder joint 4〇B of the embodiment. Further, the cross section of the holder joint 4A in Fig. 13 is such that the sides of the polygonal shape are parallel to the faces of the both side faces. The cutter holder 30D is made of a substantially cylindrical magnetic metal, and has a concave shape of a circle of 37 on the entire circumference of the outer peripheral surface. In addition, the cutter holder 30D is fixed and held in the same manner as in the embodiment i. Here, in order to facilitate the insertion of the holder, the operation lever 38 that is large from the side is used as the attachment portion. . The holder joint 40B has a rod guide groove 47 into which the holding hole portion 46 of the holding cutter holder 3?d and the operating rod of the cutter holder are inserted. The rod introduction groove 47 is in the holder of the holder in FIG. 13 201026462 ":: only a part is not shown. As shown in FIG. 13, the holding hole portion 46 is provided with an elastic member 48 such as a spring member. The operating rod 38 is guided by the guiding rod and inserted into the holding hole. The holding knife is held by the holding member. When the lever 38 is pulled up to the uppermost portion of the rod introduction groove 47, the cut shown is 30 with a recess of 30D. And the holding hole portion of the core (four) piece ^ holder 30D is fixed to the holder joint gamma. In addition, by the action of the rod introduction groove 47 to suppress the rotation direction, the cutter is held in the holding hole portion 46 of the temple joint The other configuration is the same as that of the first embodiment, and the same effect can be obtained. (Embodiment 5) ', the second embodiment of the present invention is described. In the fourth embodiment, the cutter holder is provided with one. The operation lever 38 is formed in the left and right sides of the cutter holder 30E according to the fifth embodiment, and the two levers 38A and 38B are formed symmetrically on the right and left sides. 47A, 47B. In addition, the elastic member holding the cutter holder 3〇E is attached to In the side of the side of the blade, after the cutting tool holder 3 is inserted into the workpiece, the leading edge of the blade is worn, and the cutting direction can be rotated by 180 degrees in the same manner as in the second embodiment. The 3〇e is mounted on the holder 40C. Therefore, the two places of the cutter wheel can be used for cutting. Since this switching does not need to remove the cutter wheel itself, it can be easily performed, and the cutter that integrates the cutter wheel can be integrated. 13 201026462 (Embodiment 6) It In the above-described embodiments, the cutting device having the cutting heads is provided. The scribing device capable of scribing the workpiece is attached to Fig. 5 The cutter holder can be directly installed as a cutting device, and the cutter holder of the present invention can be applied to a plurality of scribing devices having a plurality of heads, so as to have a cutting function and The cutting device of the scribing function. In the case of the cutting device having the cutter function and the scribing function, the bonded substrate is the workpiece, and the brittle material substrate in the workpiece 17 is scribed by the cutter. The function cuts the tree-shaped film. For example, it can be considered that the workpiece is A panel substrate in which a resin film is bonded to a glass substrate. In this case, a cutting device in which a cutter head and a scribing head are respectively mounted on the upper and lower sides is used, and as shown in the figure, a scribing head 61 is scribed from below, and The cutter 帛 34B is cut. Thereby, the bonded substrate can be easily cut. The present invention relates to a cutting device for cutting a resin film and a workpiece such as a substrate on which such a substrate is laminated, and a cutter holder for the same, which is easy to replace because the cutter wheel and the cutter holder are integrated. Cutter holder. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a perspective view showing the overall configuration of a cutting device according to a first embodiment of the present invention. Fig. 2 is a view showing the configuration of a cutter holder according to the first embodiment of the present invention. Fig. 3 is a perspective view of the cutter holder of the first embodiment. Fig. 4 is a view showing the configuration of a cutter wheel according to an embodiment of the present invention. 201026462 Fig. 5 is a view showing a holder joint of the embodiment. Fig. 6 is a perspective view showing the state in which the cutter holder of the holder joint of the embodiment is inserted. Figure 7 is a partial cross-sectional view showing the holder of the holder inserted into the state of the cutter holder. Fig. 8 is a block diagram showing the configuration of a control system of the cutting device of the embodiment. Fig. 9 is a view showing a cutter holder according to a second embodiment of the present invention. Fig. 1 is a partial cross-sectional view showing a holder of a cutter wheel according to a third embodiment of the present invention and a holder joint in a state in which the cutter holder is inserted. The figure shows a state in which the workpiece to be laminated is processed using the cutter wheel of the third embodiment. Figure 12 is a perspective view of a cutter wheel according to a fourth embodiment of the present invention. Figure 13 is a partial cross-sectional view showing a holder joint in a state in which the cutter holder of the fourth embodiment of the present invention is inserted. Fig. 14 is a perspective view of a cutter wheel according to a fifth embodiment of the present invention. Figure 15 is a partial cross-sectional view showing a holder joint in a state in which the cutter holder of the fifth embodiment of the present invention is inserted. Fig. 16 is a view showing a state in which the cutting device according to the sixth embodiment of the present invention is cut and scribed. [Description of main component symbols] I: Cutting device II: Mobile station 15 201026462 16 : Platform 22: Cutter heads 30A, 30B, 30C, 30D, 30E: Cutter holders 31a, 31b, 36b: Flat portion 32: Notch 33 : pin groove 34, 34A, 34B ·· cutter wheel 35 : pin 36 : mounting portion 36 a : inclined portion 37 : recess 38 ' 38A, 38B : operating levers 40A , 40B , 40C : holder joints 41 a , 4 1 b : Bearing 42 : Holding portion 43 : Holding hole portion 44 : Magnet 45 : Parallel pin 46 : Holding hole portion 47 , 47A , 47B : Rod introduction groove 51 : Image processing unit 52 : Control unit 53 : X motor drive - Lang 54 : Y Motor drive - Lang
16 201026462 55 :旋轉用馬達驅動部 56 :切刀保持具升降部 57 :監視器16 201026462 55 : Rotary motor drive unit 56 : Cutter holder lifting unit 57 : Monitor
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