CN105417942A - Scribing device, scribing method and retention tool unit - Google Patents

Abstract

The invention discloses a scribing device, a scribing method and a retention tool unit, wherein the service life of the scribing device is prolonged. At the same time, score lines of high precision can be formed in the point scribing manner by the device. The scribing device 1 comprises a scribing wheel 31; a retention tool unit 30 provided with a pin 32 that is supported by a shaft to freely rotate the scribing wheel, and a retention tool 40 for retaining the pin; a scribing head 20 provided with a retention tool joint 21 for installing the retention tool unit; and a loading platform 14 for loading a substrate 15 made of fragile materials. The device is characterized by comprising a rotation inhibiting part 60. By the rotation inhibiting part, the rotation of the scribing wheel is inhibited after the load is applied onto the scribing wheel.

Description

Scoring device, rose method and holder unit

Technical field

The present invention relates in the disjunction of the brittle substrates such as glass substrate in order to form the scoring device of score line, rose method and holder unit on brittle substrate surface.

Background technology

The disjunction of glass substrate is undertaken by using scribing tool to form score line in glass baseplate surface usually.That is widely known by the people as this scribing tool has scribe wheel.The colyliform cutting knife described in patent documentation 1 is such as had as this scribe wheel.

Colyliform cutting knife described in patent documentation 1 is held in cutting knife holder, and rotates on brittle substrate using the turning axle being inserted with cutting knife pin as center, forms score line successively thus in brittle substrate surface.

As the scribing tool beyond scribe wheel, there will be a known front end, the support portion installation diamond blade etc. be made up of cylindric or corner post shape described in such as patent documentation 2 or patent documentation 3, skive blade is surperficial and be formed with delineation point.

Patent documentation 2 or the scribing tool described in patent documentation 3, to brittle substrate crimping delineation point, slide in the mode of delineating in this case.Therefore, on substrate, delineation point is slided by drawing, now forms score line successively in brittle substrate surface.Now, owing to comparing the vibration that can not produce toward left and right with the scribe wheel of such as patent documentation 1, therefore this scribing tool has the advantage that can form high-precision score line.

[prior art document]

[patent documentation 1] Japanese Unexamined Patent Publication 2013-245135 publication

[patent documentation 2] Japanese Unexamined Patent Publication 2003-183040 publication

[patent documentation 3] Japanese Unexamined Patent Publication 2005-079526 publication

Summary of the invention

[invention institute for solution problem]

But if scribing tool is due to the abrasion of delineation point, this delineation point cannot use, and therefore has the problem that life-span that can use is short.

In order to solve life-span short problem, also just like as shown in patent documentation 2, patent documentation 3, after the abrasion of delineation point, using the central shaft of support portion as central rotation (rotating in the direction parallel with brittle substrate surface), to be replaced to the method that other delineation points use, but make delineation point be fixedly difficult toward appropriate direction, and the processing of delineation point is also difficult.

The object of the invention is to, life-span that can increase and can use is provided and forms the scoring device of high-precision score line, rose method and holder unit in the mode of the score line utilizing the formation of delineation point simultaneously.

[in order to solve the means of problem]

For reaching above-mentioned purpose, scoring device of the present invention, possesses: holder unit, has scribe wheel, the pin rotatable for the aforementioned scribe wheel earth's axis propped up, passes through aforementioned patchhole of selling to insert with the holder keeping aforementioned pin; Engraving head, has the holder joint installing aforementioned holder unit; And microscope carrier, mounting brittle substrate; By applying load-carrying to aforementioned scribe wheel to form score line in the surface being placed in the brittle substrate on aforementioned microscope carrier, it is characterized in that: possess rotation suppressing portion, when aforementioned scribe wheel contacts aforementioned brittle substrate, suppressing the rotation of aforementioned scribe wheel.

According to scoring device of the present invention, owing to being configured to after the scribe wheel contact brittle substrate rotatably kept, by rotating suppressing portion, the rotation of scribe wheel is stopped, therefore stop the rotation of scribe wheel to form score line, scribe wheel can be used thus to form the high score line of precision in the mode of the score line utilizing the formation of delineation point.Again, due to when not applying load-carrying to scribe wheel, scribe wheel becomes rotatable state, therefore such as can utilize the ejection of brittle substrate that the cutter leading edge of scribe wheel is rotated simply, and can prevent from forming score line at identical cutter leading edge locus at any time, can the life-span that can use scribe wheel be increased.

Again, in scoring device of the present invention, being propped up into rotatable aforementioned scribe wheel by aforementioned bearing pin can move toward above-below direction; Be contacted with brittle substrate by aforementioned scribe wheel, aforementioned scribe wheel moves toward top and suppresses to rotate by aforementioned rotation suppressing portion.

Again, in scoring device of the present invention, aforementioned holder unit also has the joint assisted tool aforementioned holder being held in and can swinging toward above-below direction, is installed in aforementioned holder joint by aforementioned joint assisted tool; Aforementioned rotation suppressing portion is located at aforementioned joint assisted tool; By the swing of aforementioned holder toward top, aforementioned scribe wheel moves toward top and abuts with aforementioned rotation suppressing portion, suppresses thus to rotate.

According to scoring device of the present invention, due to when changing scribe wheel itself, can change from joint assisted tool removal holder, therefore easily can carry out the replacing of scribe wheel.

Again, in scoring device of the present invention, between aforementioned holder and aforementioned joint assisted tool, stretch coil spring is installed.

According to scoring device of the present invention, the tension force of stretch coil spring can be utilized to carry out the swing of holder swimmingly.

Again, rose method of the present invention, uses above-mentioned scoring device, makes aforementioned scribe wheel from the end contact outside of the brittle substrate be placed in aforementioned microscope carrier.

According to rose method of the present invention, can utilize the ejection of brittle substrate that the cutter leading edge of scribe wheel is rotated simply, and can prevent from forming score line at identical cutter leading edge locus at any time, can the life-span that can use scribe wheel be increased.

Again, holder unit of the present invention, is installed on scoring device, for forming score line on the surface of brittle substrate, it is characterized in that: aforementioned holder unit, has: scribe wheel; By the pin that rotatable for the aforementioned scribe wheel earth's axis is propped up; Holder, by inserting patchhole to keep aforementioned pin by aforementioned pin; And joint assisted tool, aforementioned holder is held in and can swings toward above-below direction; By the swing of aforementioned holder toward top, aforementioned scribe wheel moves toward top and abuts with the rotation suppressing portion being located at aforementioned joint assisted tool, to suppress the rotation of aforementioned scribe wheel.

According to holder unit of the present invention, by changing holder unit, existing scoring device is used to obtain above-mentioned effect.

Accompanying drawing explanation

Fig. 1 is the sketch chart of the scoring device of embodiment 1.

Fig. 2 (A) is the frontview of the holder joint of the holder unit being provided with embodiment 1,

Fig. 2 (B) is the side-view of this holder joint.

Fig. 3 (A) is the stereographic map of the holder of the holder unit forming embodiment 1, and Fig. 3 (B) is the side cutaway view of the joint assisted tool forming holder unit, and Fig. 3 (C) is the side cutaway view of holder unit.

Fig. 4 is the concept steps figure that display employs the rose method of the scoring device of embodiment 1.

Fig. 5 (A) is the frontview of the holder unit of embodiment 2, and Fig. 5 (B) is the sectional view of holder unit.

Fig. 6 (A) is the stereographic map of the holder of embodiment 2, and Fig. 6 (B) is the frontview of the joint assisted tool of the holder unit forming embodiment 2, and Fig. 6 (C) is the side-view of joint assisted tool.

Fig. 7 is the concept steps figure that display employs the rose method of the scoring device of embodiment 2.

Fig. 8 (A) is the side-view of the holder of the holder unit forming embodiment 3, Fig. 8 (B) is the frontview of holder, Fig. 8 (C) is the upward view of holder, and Fig. 8 (D) is the front cross-sectional view of holder.

The main portions enlarged view of holder unit when Fig. 9 (A) is the scribe wheel applying load-carrying not to embodiment 3, Fig. 9 (B) is the main portions enlarged view scribe wheel having been applied to holder unit when load-carrying applies.

Figure 10 is the concept steps figure that display employs the rose method of the scoring device of embodiment 3.

[nomenclature]

1: scoring device

10: transfer table

11: ball screw

12: guide rail

13: motor

14: microscope carrier

15: brittle substrate

16:CCD Kamera

17: bridge component

18a, 18b: pillar

19: guiding element

20: engraving head

21: holder joint

22,23: bearing

24: holder installation portion

30,130,230: holder unit

31,131,231: scribe wheel

32,132,232: pin

40,140,240: holder

41a, 41b, 141a, 141b, 241a, 241b: maintaining part

42,142,242: retention groove

43a, 43b, 143a, 143b, 243a, 243b: patchhole

44,144: swing axis hole

50,150: joint assisted tool

51a, 51b, 151a, 151b: holder maintaining part

52,52a, 52b, 152,152a, 152b, 152c: holder retention groove

53a, 53b, 153a, 153b: swing hole

54,154,254: jiont treatment hole

55,57,257a, 257b: screw

56,156,256: snap ring open holes

58,258a, 258b: snap ring

59,159: rocking pin

60,160,260: rotate suppressing portion

145,157: hook portion

155: bight

158: fixed orifices

170: stretch coil spring

261a, 261b: protuberance

Embodiment

Below, use accompanying drawing that embodiment of the present invention are described.But, embodiment shown below is the example in order to be specialized by technological thought of the present invention, is not intended to limit the invention to this embodiment.The present invention also can be applicable to other embodiments contained by claims.

[embodiment 1]

Fig. 1 is the sketch chart of the scoring device 1 of embodiment of the present invention 1.Scoring device 1 possesses transfer table 10.Transfer table 10 and ball screw 11 screw togather, and by the driving of motor, this ball screw 11 are rotated, and can be displaced into y-axis direction along pair of guide rails 12.

Motor 13 is provided with above transfer table 10.Motor 13 makes superposed microscope carrier 14 at xy Plane Rotation to be positioned to first retainer.The microscope carrier 14 horizontally rotated by motor 13, possesses not shown vacuum suck means, is kept the brittle substrate 15 be placed on microscope carrier 14 by these vacuum suck means.

This brittle substrate 15 is glass substrate, the ceramic substrate be made up of low-temperature sintering ceramic or hard-fired ware, silicon substrate, compound semiconductor substrate, sapphire substrate, quartz base plate etc.Again, brittle substrate 15 also can make film or semiconductor material attachment or contain to form in substrate surface or inside.Again, brittle substrate 15 also can have in its surface attachment the film etc. not being equivalent to hard brittle material.

Scoring device 1, possesses two CCD camera 16 that shooting is formed at the alignment mark on this brittle substrate 15 surface in the top of the brittle substrate 15 being placed in microscope carrier 14.Bridge component 17 is to be set up in pillar 18a, 18b across transfer table 10 and the mode of the microscope carrier 14 on its top.

Be provided with guiding element 19 in bridge component 17, engraving head 20 is arranged to guided by this guiding element 19 and be displaced into x-axis direction.In engraving head 20, by holder joint 21, holder unit 30 described later is installed.

Describe holder joint 21 in detail.Fig. 2 (A) is the frontview of the holder joint 21 being provided with holder unit 30, and Fig. 2 (B) is the side-view of this engraving head 20.

Holder joint 21 has holder cellular installation portion 24 in lower end.Holder cellular installation portion 24 toward Fig. 2 (B) arrow shown in direct of travel D become roughly inverted L-shaped.Above this holder cellular installation portion 24, not shown turning axle is installed.Again, turning axle inserts two bearings 22,23.Holder joint 21 is supported by bearing 22,23 revolvably in engraving head 20 lower end.

Again, engraving head 20 possesses not shown lifting unit, by this lifting unit, holder unit 30 is elevated.Again, apply load-carrying by the lifting of holder unit 30 to scribe wheel 31 described later, scribe wheel 31 crimps brittle substrate 15 surface being placed in microscope carrier 14 and forms score line.

Secondly holder unit 30 is described in detail.Fig. 3 (A) is the stereographic map of the holder 40 forming holder unit 30, and Fig. 3 (B) is the side cut away view of the joint assisted tool 50 forming holder unit 30, and Fig. 3 (C) is the side cut away view of holder 40.Holder unit 30 possesses scribe wheel 31, pin 32, holder 40 and joint assisted tool 50.

Though scribe wheel 31 can use the colyliform cutting knife described in patent documentation 1, but more specifically, preferably for the scarp set by the circumferential part of discoideus scribe wheel base material such as described in Japanese Unexamined Patent Publication 2013-14129 publication and crest line surface are formed with diamond film.By forming diamond film on surface, suppress the rugosity on the surface of scribe wheel 31, when forming score line by aftermentioned rose method, scribe wheel 31 is easily slided on brittle substrate 15.Therefore, the rotation of the scribe wheel 31 on brittle substrate 15 can be suppressed, the generation of the fragment that unexpected rotation also can be suppressed to cause, by end face strength also grow during brittle substrate 15 disjunction.Again, in scribe wheel 31, the through communicating pores of supply and marketing 32 is formed at the center of plectane side.Scribe wheel 31 thickness of the present embodiment is about 0.65mm, and external diameter is about 2.0mm, and the footpath of communicating pores 41 is about 0.8mm, and the cutter toe angle of sword 43 is about 120 °.In addition, scribe wheel 31, except to sinter except diamond or superhard alloy formed, may also be and be made up of single crystal diamond or many crystallizations diamond.

Pin 32 is the cylindrical elements such as sintering the formation such as diamond or superhard alloy, and one end is the pointed nose of pointed shape.By pin 32 being inserted the communicating pores of scribe wheel 31, namely scribe wheel 31 is propped up by the rotatable earth's axis.

Holder 40 is made up of metal member.Holder 40 is cut front as Suo Shi Fig. 3 (A), and is formed with a pair maintaining part 41a, 41b and the retention groove between maintaining part 41a, 41b 42.In maintaining part 41a, 41b, be formed with at coaxial position patchhole 43a, 43b that supply and marketing 32 inserts respectively.In holder 40, by scribe wheel 31 is configured at retention groove 42, makes pin 32 by the communicating pores of scribe wheel 31 and patchhole 43a, 43b, and pin 32 is rotatably kept and scribe wheel 31 is remained on retention groove 42.Therefore, when changing scribe wheel 31, from holder unit 30 removal holder 40 by whole for holder 40 replacing, the replacing of small scribe wheel 31 can therefore can easily be carried out.Again, holder 40 possesses the swing axis hole 44 being formed as equidirectional with patchhole 43a, 43b in the mid-way above maintaining part 41a, 41b.

Joint assisted tool 50 is made up of metal member.Joint assisted tool 50 upper side as Suo Shi Fig. 3 (B) is made up of rectangle, and lower side is along with toward below and width narrow trapezoidal of stenosis gradually.In joint assisted tool 50, a part for the trapezoidal portions of lower side and the rectangle part of upper side is cut, and is formed with a pair holder maintaining part 51a, 51b and the holder retention groove 52 between holder maintaining part 51a, 51b.

In holder maintaining part 51a, 51b, be formed respectively in order to holder 40 to be held in swing hole 53a, the 53b that can swing in above-below direction at coaxial position.In addition, as shown in Fig. 2 (A), though the non-penetrating joint assisted tool 50 of swing hole 53a of the present embodiment, also can be through.

Holder retention groove 52, relative direct of travel D is different from the groove depth (height in upper direction) of rear side at front side.For the groove of the holder retention groove 52a of front side is comparatively dark, be formed in herein and swing hole 53a, 53b.

For the groove of the holder retention groove 52b of rear side is more shallow, the top of holder retention groove 52b and the distance of scribe wheel 31 very near.If therefore scribe wheel 31 moves toward top, abut with the top of holder retention groove 52B, and suppress the rotation of rotatable scribe wheel 31.Therefore, the top of holder retention groove 52B forms the rotation suppressing portion 60 of the rotation suppressing scribe wheel 31, and joint assisted tool 50 possesses rotation suppressing portion 60.

Again, the jiont treatment hole 54 in order to lock to holder joint 21 is formed with in joint assisted tool 50.Then, joint assisted tool 50, by jiont treatment hole 54 and the threaded hole formed holder cellular installation portion 24, is installed in holder cellular installation portion 24 by screw 55.Again, snap ring open holes 56 is formed with in joint assisted tool 50.Then, by screw 57, snap ring 58 is fixed on snap ring open holes 56.This snap ring 58 swings hole 53b in order to obturation.

Again, joint assisted tool 50 is by being configured at holder retention groove 52 by scribe wheel 31 and the holder 40 being provided with pin 32, and make rocking pin 59 by the swing axis hole 44 of holder 40 and swing hole 53a, 53b, and holder 40 can be held in and can swing toward above-below direction.

As mentioned above, the holder 40 possessing the scribe wheel 31 of being propped up by the rotatable earth's axis is retained the holder unit 30 of the formation that can swing toward above-below direction, the state that the front usually becoming holder 40 by the deadweight of holder 40 and scribe wheel 31 declines toward below.Now, scribe wheel 31 becomes rotatable state.In addition, be connected to the top of holder retention groove 52a by the upper end of holder 40 as shown in such as Fig. 3 (C), and the swing of holder 40 is stopped.

On the other hand, when such as scribe wheel 31 is positioned on the surface of brittle substrate 15, if make holder unit 30 decline by the lifting unit of engraving head 20, load-carrying can be applied to scribe wheel 31, and namely holder 40 front that the mode that can swing toward above-below direction keeps moves toward top.Then, by the movement of holder 40 front toward top, scribe wheel 31 also moves toward top, and namely rotates suppressing portion 60 with the top of holder retention groove 52b and abut.Therefore, the rotation of scribe wheel 31 is rotated suppressing portion 60 and is suppressed, if become large to the load-carrying that scribe wheel 31 applies, then scribe wheel 31 can change into stationary state from rotatable state.

Also namely, holder unit 30, is configured to after the scribe wheel 31 rotatably kept is mobile toward above, by rotating suppressing portion 60, the rotation of scribe wheel 31 is stopped, and is applied in load-carrying.

The holder unit 30 using accompanying drawing to illustrate to use this kind to form and the scoring device 1 that possesses holder unit 30 form in brittle substrate 15 effect that score line produces.Fig. 4 is the concept steps figure that display employs the rose method of scoring device 1.In addition, in the diagram in order to easy understand, only diagram forms holder unit 30 and the brittle substrate 15 of scoring device 1.Again, in order to the state of easy understand scribe wheel 31, holder unit 30 is shown with sectional view.

Herein, the formation of the score line to brittle substrate 15 in the present embodiment, carries out with the rose method that what is called is circumscribed.So-called circumscribed is rose method from the outside delineation of brittle substrate 15 to outside, at the point compared with a little outside, the end of brittle substrate 15, make the below place slightly above dropped to bottom compared with brittle substrate 15 of scribe wheel 31.What then make in direct of travel under the state applying set load-carrying to scribe wheel 31 moves horizontally, and delineates thus from the edge of brittle substrate 15, and delineation is to another edge of brittle substrate 15.

First, scoring device 1, first compared with the point outside brittle substrate 15 end, makes the position (step 1) dropping to the below slightly above compared with brittle substrate 15 bottom of scribe wheel 31.Now, scribe wheel 31, owing to not abutting with rotation suppressing portion 60, therefore becomes rotatable state.

Secondly, scoring device 1, makes holder unit 30 move horizontally toward direct of travel D by making engraving head 20 move.Now, scribe wheel 31, owing to becoming rotatable state, though therefore contact with the outer rim of brittle substrate 15 and form slight crack and by substrate surface ejection, rotates a little (step 2) toward the direction of arrow R in this moment.And at this moment, be retained the front of the holder 40 that can swing in above-below direction, moved toward top by the substrate surface ejection by brittle substrate 15.

Then, scoring device 1, the cutter leading edge of scribe wheel 31 nip brittle substrate 15 surface state under, make holder unit 30 move horizontally toward direct of travel D and carry out delineating (step 3).Now, owing to passing through the action of holder 40 toward top, scribe wheel 31 abuts with rotation suppressing portion 60 brute force, and applies set load-carrying to scribe wheel 31, therefore becomes stationary state from the rotatable state of step 1.Again, now the rotation in the scribe wheel 31 not only direction of opposite arrow R, also can strongly be limited relative to moving of the direction of pin 32.

Therefore, during delineation in step 3, scoring device 1, uses scribe wheel 31 to carry out the delineation of brittle substrate 15 at any time at identical cutter leading edge locus.Also namely, scoring device 1, as the scribing tool described in patent documentation 2 or patent documentation 3, using the cutter leading edge of the scribe wheel 31 of stationary state as delineation, point is crimped on brittle substrate 15, slides and form score line in the mode of delineating in this case.

Again, because scoring device 1 is delineating to another edge of brittle substrate 15, also with circumscribed formation score line, scribe wheel 31 therefore can be made when step 2 to rotate a little, changing the cutter leading edge locus secondly forming score line.

As above-mentioned, the scoring device 1 of the present embodiment, after with circumscribed formation score line, can form the high score line of precision as patent documentation 2 or patent documentation 3 as the score line of delineating some formation.Again, scribe wheel 31 itself owing to being widely used when to form score line in the past as the colyliform cutting knife of patent documentation 1, and it is easy for therefore manufacturing etc.

Again, scoring device 1, owing to be rotated simply making during brittle substrate 15 surperficial ejection the cutter leading edge of scribe wheel 31, therefore can suppress the abrasion caused in identical cutter leading edge locus formation score line at any time, can increase the life-span that can use scribe wheel 31.Again, the rotation amount of scribe wheel 31 now also can control more simply, and the location management of the delineation point therefore in scribe wheel 31 also can easily carry out.

[embodiment 2]

Secondly use figure that the holder unit 130 of embodiment 2 is described.Fig. 5 (A) is the side-view of holder unit 130, and Fig. 5 (B) is the sectional view of holder unit 130.In addition, Fig. 5 (B) is with side-view display holder 140.Again, Fig. 6 (A) is the stereographic map of holder 140, and Fig. 6 (B) is the frontview of the joint assisted tool 150 forming holder unit 130, and Fig. 6 (C) is the side-view of joint assisted tool 150.

The holder unit 30 of embodiment 1, is carrying out delineating to another edge of brittle substrate 15, the front of holder 40 is back to drop to the state of below by the deadweight of holder 40 and scribe wheel 31.If now holder 40 and scribe wheel 31 kick the beam, then the front of holder 40 is difficult to be back to the state dropping to below, and has holder 40 cannot the situation of smooth and easy swing.Therefore, the holder unit 130 of embodiment 2, be holder 40 and scribe wheel 131 lighter time also can make the formation of the smooth and easy swing of holder 140.

Specifically, holder unit 130 possesses scribe wheel 131, pin 132, holder 140, joint assisted tool 150 and is connected to the stretch coil spring 170 of holder 140 and joint assisted tool 150.In addition, about scribe wheel 131 and pin 132, due to identical with the scribe wheel 31 and pin 32 of embodiment 1, therefore omit the description.

Holder 140 is made up of metal member.Holder 140 is formed with a pair maintaining part 141a, 141b and the retention groove between maintaining part 141a, 141b 142 in front.In maintaining part 141a, 141b, be formed with at coaxial position patchhole 143a, 143b that supply and marketing 132 inserts respectively.In holder 140, by scribe wheel 131 is configured at retention groove 142, makes pin 132 by the communicating pores of scribe wheel 131 and patchhole 143a, 143b, and pin 132 is rotatably kept and scribe wheel 131 is remained on retention groove 142.Again, holder 140 possesses the swing axis hole 144 being formed as equidirectional with patchhole 143A, 143B.Again, in holder 140, be formed with the hook portion 145 of the hook of hooking stretch coil spring 160 in rear end side.

Joint assisted tool 150 is made up of metal member.Joint assisted tool 150 upper side as Suo Shi Fig. 6 (C) is made up of rectangle, and lower side is along with toward below and width narrow trapezoidal of stenosis gradually.In joint assisted tool 150, a part for the trapezoidal portions of lower side and the rectangle part of upper side is cut, and is formed with a pair holder maintaining part 151a, 151b and the holder retention groove 152 between holder maintaining part 151a, 151b.

In holder maintaining part 151a, 151b, be formed respectively in order to holder 140 to be held in swing hole 153a, the 153b that can swing in above-below direction at coaxial position.

The groove depth (height in upper direction) of holder retention groove 152 is different.Relative direct of travel D is the darkest at the holder retention groove 152A of front side, and holder retention groove 152B is then secondary dark, is formed swings hole 153A, 153B in holder retention groove 152B.

The holder retention groove 152C of side is the most shallow in the wings, the top of holder retention groove 152C and the distance of scribe wheel 131 very near.Therefore, after scribe wheel 131 is mobile toward above, namely abuts with the top of holder retention groove 152C, suppress the rotation of rotatable scribe wheel 131.Therefore, the top of holder retention groove 152C forms the rotation suppressing portion 160 in joint assisted tool 150.

Again, the jiont treatment hole 154 in order to lock to holder joint 21 is formed with in joint assisted tool 150.Then, joint assisted tool 150, by jiont treatment hole 154 and the threaded hole formed holder cellular installation portion 24, is installed in holder cellular installation portion 24 by not shown screw.Again, snap ring open holes 156 is formed with in joint assisted tool 150.Then, by not shown screw, not shown snap ring is fixed on snap ring open holes 156, swings hole 153b by this snap ring obturation.

Again, in joint assisted tool 150, as Fig. 6 (B) be shown in front upper and be formed with fixed orifices 158, this fixed orifices 158 is in order to be fixedly formed with the screw in the hook portion 157 of the hook of hook stretch coil spring 170.

Again, joint assisted tool 150 is by being configured at holder retention groove 152 by scribe wheel 131 and the holder 140 being provided with pin 132, and make rocking pin 159 by the swing axis hole 144 of holder 140 and swing hole 153a, 153b, and holder 140 can be held in and can swing toward above-below direction.Again, joint assisted tool 150 passes through by the hook hooking of stretch coil spring 170 in the hook portion 145 of holder 140 and the hook portion 157 being fixed on joint assisted tool 150, and is installed between holder 140 and joint assisted tool 150 by stretch coil spring 170.

As mentioned above, the holder 140 possessing the scribe wheel 131 of being propped up by the rotatable earth's axis is retained the holder unit 130 of the formation that can swing toward above-below direction, is usually become the state that holder 140 declines toward below by holder 140 and the deadweight of scribe wheel 131 and the tension force of stretch coil spring 170.Now, scribe wheel 131 becomes rotatable state.In addition, be connected to the bight formed with holder retention groove 152a and holder retention groove 152b above by holder 140 as shown in such as Fig. 5 (B), and make holder 140 toward the movement stopping of below.

On the other hand, when such as scribe wheel 131 is positioned on the surface of brittle substrate 15, if make holder unit 130 decline by the lifting unit of engraving head 20, scribe wheel 131 is contacted with substrate, and can be retained and namely can move toward top toward holder 140 front of above-below direction swing.Then, by the movement of holder 140 front toward top, scribe wheel 131 also moves toward top, and namely rotates suppressing portion 60 with the top of holder retention groove 152b and abut, by rotating the suppressed rotation of suppressing portion 160.Therefore, after scribe wheel 131 contact substrate, scribe wheel 131 can change into stationary state from rotatable state, becomes large, and firmly fix by the load-carrying applied scribe wheel 131.

Also namely, holder unit 130, is configured at scribe wheel 131 contact substrate rotatably kept after being applied in load-carrying, by rotating suppressing portion 160, the rotation of scribe wheel 131 is stopped.

The holder unit 130 using accompanying drawing to illustrate to use this kind to form and the scoring device 1 that possesses holder unit 130 form in brittle substrate 15 effect that score line produces.Fig. 7 is the concept steps figure that display employs the rose method of scoring device 1.In addition, in Fig. 7, because the formation except holder unit 130 is all identical with embodiment 1, the formation beyond same-sign explanation holder unit 130 is therefore used.Again, in order to easy understand, only diagram forms holder unit 130 and the brittle substrate 15 of scoring device 1.Again, in order to the state of easy understand scribe wheel 131, holder unit 130 is shown with sectional view.

Herein, the formation of the score line to brittle substrate 15 in the present embodiment, carries out with the rose method that what is called is circumscribed in the same manner as embodiment 1.

First, scoring device 1, the point outside the end compared with brittle substrate 15, makes the below place slightly above dropped to bottom compared with brittle substrate 15 of scribe wheel 131.Now, scribe wheel 131, owing to not abutting with rotation suppressing portion 160, therefore becomes rotatable state.In addition, this step is due to identical with the step 4 of the Fig. 4 in embodiment 1, therefore not shown.

Secondly, scoring device 1, makes holder unit 130 move horizontally (step 1) toward direct of travel D by making engraving head 20 move.Now, scribe wheel 131, owing to becoming rotatable state, though therefore contact with the outer rim of brittle substrate 15 and form slight crack and by substrate surface ejection, rotates toward the direction of arrow R in this moment a little.And at this moment, be retained the leading section of the holder 140 that can swing in above-below direction, moved toward top by the substrate surface ejection by brittle substrate 15.

Then, scoring device 1, the cutter leading edge of scribe wheel 131 nip brittle substrate 15 surface state under, make holder unit 130 move horizontally toward direct of travel D and carry out delineating (step 2).Now, owing to applying set load-carrying to scribe wheel 131, therefore pass through the action of front toward top of holder 140, scribe wheel 131 abuts with rotation suppressing portion 160 brute force, and becomes stationary state from the rotatable state of step 1.Again, now the rotation in the scribe wheel 131 not only direction of opposite arrow R, is also limited relative to moving of the direction of pin 132.

Therefore, during delineation in step 2, scoring device 1, uses scribe wheel 131 to carry out the delineation of brittle substrate 15 at any time at identical cutter leading edge locus.Also, namely, in the same manner as embodiment 1, scoring device 1, using the cutter leading edge of the scribe wheel 131 of stationary state as delineation, point is crimped on brittle substrate 15, slides and form score line in the mode of delineating in this case.

Again, because scoring device 1 is delineating to another edge of brittle substrate 15, also with circumscribed formation score line, scribe wheel 131 therefore can be made when step 1 to rotate a little, changing the cutter leading edge locus secondly forming score line.

Again, when step 2 because stretch coil spring 170 becomes the state stretched, therefore delineating to another edge of brittle substrate 15, make the rear end side of holder 140 by past top pull-up by the tension force of stretch coil spring 170, the front of holder 140 positively becomes the state dropping to below.

As above-mentioned, the scoring device 1 of embodiment 2, after with circumscribed formation score line, can form the high score line of precision in the same manner as embodiment 1.Again, and can easily manufacture scribe wheel 131.Again, scoring device 1 can prevent from forming score line at identical cutter leading edge locus at any time, can increase the life-span that can use scribe wheel 131.

And then, scoring device 1, owing to being provided with stretch coil spring 170 between holder 140 and joint assisted tool 150, therefore holder 140 can swing swimmingly, under the state not especially being contacted with brittle substrate in scribe wheel 131, the leading section of holder 140 is positively declined.

[embodiment 3]

Secondly use figure that the holder unit 230 of embodiment 3 is described.Fig. 8 (A) is the side-view of the holder 240 forming holder unit 230, Fig. 8 (B) is the frontview of holder 240, Fig. 8 (C) is the upward view of holder 240, and Fig. 8 (D) is the front cross-sectional view of holder 240.Holder unit 230 possesses scribe wheel 231, pin 232, holder 240.In addition, about scribe wheel 231 and pin 232, due to identical with pin 32 with the scribe wheel 31 of embodiment 1, therefore omit the description.

Holder 240 is made up of metal member.Holder 240 upper side as Suo Shi Fig. 8 (A) is rectangle, and lower side is along with toward below and width narrow trapezoidal of stenosis gradually.In holder 240, a part for the trapezoidal portions of lower side is cut, and is formed with a pair maintaining part 241a, 241b and the retention groove between maintaining part 241a, 241b 242.

In maintaining part 241a, 241b, be fixed with at coaxial position right cylinder 246a, 246b of being made up of sintering diamond or superhard alloy respectively by hard solder.Again, the plectane side of scribe wheel 231, the retaining wall 247a be made up of the right cylinder 246a of maintaining part 241a side is subtend with the retaining wall 247b be made up of the right cylinder 246b of maintaining part 241b side.In addition, in Fig. 8 (A), (B), (C), right cylinder 246a, 246b show with oblique line.

Again, in right cylinder 246a, 246b, be formed with at coaxial position patchhole 243a, 243b that supply and marketing 232 inserts respectively.This patchhole 243a, 243b are the hole longer in above-below direction that the diameter of fully comparatively pin 232 is large, can move to make the pin 232 be inserted through toward above-below direction and fore-and-aft direction.More specifically, as shown in Fig. 8 (A), patchhole 243a, 243b are diamond shape.

Again, right cylinder 246a, 246b top in retention groove 242 is formed with protuberance 261a, 261b respectively.This protuberance 261a, 261b, in order to make with the pin 232 up movement in direction and the scribe wheel 231 of up direction movement abuts and formed.Then, be connected to protuberance 261a, 261b by the scribe wheel 231 rotatably kept by pin 232, and suppress the rotation of rotatable scribe wheel 231.Therefore, protuberance 261a, 261b form the rotation suppressing portion 260 of the rotation suppressing scribe wheel 231, and holder 240 possesses rotation suppressing portion 260.

Herein, the manufacture method of right cylinder 246a, 246b and patchhole 243a, 243b is described.First, by hard solder to the open holes in order to install right cylinder 246a, 246b and the base material fixed cylinder shape component of holder 240 being formed with retention groove 242.Secondly, trapezoidal by what cut into as Fig. 8 (A) below the base material of holder 240, now form slit S, patchhole 243a, 243b also cut off formation simultaneously.Secondly, coordinate the cutter leading edge width of scribe wheel 231 to be excised with diamond cutting knife etc. in the mid-way of cylindrical element, form the gap that width is narrow.Then, to the cylindrical element being formed with width close clearance, coordinate the width of scribe wheel 231 to be excised by diamond cutting knife or electrodischarge machining(E.D.M.) etc., form the gap of width broadness, and form retaining wall 47a, 47b and protuberance 261a, 261b.In addition, about the manufacture method of right cylinder 246a, 246b and patchhole 243a, 243b, the step described in Japanese Unexamined Patent Publication 2011-240541 publication can more specifically be adopted.

Again, the jiont treatment hole 254 in order to lock to holder joint 21 is formed with in holder 240.Then, holder 240, by jiont treatment hole 254 and the threaded hole formed holder joint 21, is installed in holder joint 21 by not shown screw.Again, snap ring open holes 256 is formed with in holder 240.Then, by screw 257a, 257b, snap ring 258a, 258b are fixed on snap ring open holes 256.This snap ring 258a, 258b are in order to inaccessible patchhole 243a, 243b person.

Then, holder unit 230, by scribe wheel 231 being configured at the retention groove 242 of holder 240, and make pin 232 by the communicating pores of scribe wheel 231 and patchhole 243a, 243b, and pin 232 is rotatably kept and scribe wheel 231 is remained between retaining wall 247a, 247b.Again, holder unit 230, owing to patchhole 243a, 243b of holder 240 to be formed as the diamond shape of lengthwise, therefore can be held in scribe wheel 231 can move freely toward above-below direction and fore-and-aft direction together with pin 232.

Use the action of the scribe wheel 231 in accompanying drawing explanation holder unit 230 as above.Fig. 8 (A) is the main portions enlarged view of the holder unit 230 when not applying load-carrying to scribe wheel 231, and Fig. 8 (B) is the main portions enlarged view of the holder unit 230 when applying load-carrying to scribe wheel 231.

Possess and the pin 232 that rotatable for scribe wheel 231 earth's axis is propped up is that above-below direction is formed as the holder unit 230 of the holder 240 that longer patchhole 243a, 243b is kept, usually, as shown in Fig. 9 (A), pin 232 is positioned at the below of patchhole 243a, 243b.Therefore, scribe wheel 231 does not abut with rotation suppressing portion 260, and scribe wheel 231 rotatably keeps by holder unit 230.

On the other hand, when such as scribe wheel 231 is positioned on the surface of brittle substrate 15, if make holder unit 230 decline by the lifting unit of engraving head 20, load-carrying can be applied to scribe wheel 231, by with the action of the pin 232 that can keep toward the mode of above-below direction and fore-and-aft direction movement toward top, namely scribe wheel 231 moves toward top.Therefore, the rotation suppressing portion 260 be made up of protuberance 261a, 261b abuts with scribe wheel 231, and the rotation of scribe wheel 231 is suppressed.Then, if become large to the load-carrying that scribe wheel 231 applies, then scribe wheel 231 can change into from rotatable state and keep with stationary state by holder unit 230.

Also namely, holder unit 230, is configured to after applying load-carrying to the scribe wheel 231 rotatably kept, and stops the rotation of scribe wheel 231 by rotating suppressing portion 260.

The holder unit 230 using accompanying drawing to illustrate to use this kind to form and the scoring device 1 that possesses holder unit 230 form in brittle substrate 15 effect that score line produces.Figure 10 is the concept steps figure that display employs the rose method of scoring device 1.In addition, in Fig. 10 in order to easy understand, only diagram forms and brittle substrate 15 of the holder unit 230 of scoring device 1.Again, in order to the state of easy understand scribe wheel 231, holder unit 230 is shown with sectional view.

Herein, the formation of the score line to brittle substrate 15 in the present embodiment, carries out with the rose method that what is called is circumscribed.So-called circumscribed is rose method from the outside delineation of brittle substrate 15 to outside, at the point compared with a little outside, the end of brittle substrate 15, make the below place slightly above dropped to bottom compared with brittle substrate 15 of scribe wheel 231.Then make it to move horizontally in direct of travel under the state applying set load-carrying to scribe wheel 231, delineate from the edge of brittle substrate 15 thus, and delineation is to another edge of brittle substrate 15.

First, scoring device 1, first compared with the point outside brittle substrate 15 end, makes the position (step 1) dropping to the below slightly above compared with brittle substrate 15 bottom of scribe wheel 231.Now, scribe wheel 231, owing to not abutting with rotation suppressing portion 260, therefore becomes rotatable state.

Secondly, scoring device 1, makes holder unit 230 move horizontally toward direct of travel D by making engraving head 20 move.Now, scribe wheel 231, owing to becoming rotatable state, though therefore contact with the outer rim of brittle substrate 15 and form slight crack and by substrate surface ejection, rotates a little (step 2) toward the direction of arrow R in this moment.And at this moment, be retained the pin 232 that can be displaced into above-below direction and fore-and-aft direction, moved toward top by the substrate surface ejection by brittle substrate 15.

Then, scoring device 1, the cutter leading edge of scribe wheel 231 nip brittle substrate 15 surface state under, make holder unit 230 move horizontally toward direct of travel D and carry out delineating (step 3).Now, owing to being applied with set load-carrying to scribe wheel 231, therefore by the action of pin 232 toward top, scribe wheel 231 abuts with rotation suppressing portion 260 brute force, and becomes stationary state from the rotatable state of step 1.Again, formed with protuberance 261a, 261b owing to will rotate suppressing portion 260, therefore as shown in Fig. 9 (B), the cutter leading edge of scribe wheel 231 can enter between protuberance 261a and protuberance 261b.Therefore, scribe wheel 231, the not only rotation in the direction of opposite arrow R, also can strongly be limited relative to moving of the direction of pin 232.

Again, the mode that the scarp not contacting, not being contacted with when delineating substrate with protuberance 261a, 261b with the crest line periphery being contacted with the scribe wheel 231 of substrate when delineating then contacts with protuberance 261a, 261b is formed with the groove between protuberance 261a and protuberance 261b.Therefore, cutter leading edge portion can not be connected to and rotates suppressing portion 260 and bear load-carrying, can make more increase the work-ing life of cutter leading edge.Well width is such as set to 0.2mm.

Again, in the present embodiment, form protuberance 261a and protuberance 261b in the mode of the lower end of protuberance 261a, protuberance 261b and scribe wheel 231 point cantact respectively.The situation that the angle formed compared with the lower end of protuberance 261a and the lower end of protuberance 261b at the cutter leading edge angle of scribe wheel is little, rotating suppressing portion 260 can point cantact with scribe wheel 231.Thus, even be provided with the situation of the different scribe wheel of cutter leading edge angle 231, similarly make rotation suppressing portion and scribe wheel 231 point cantact owing to moving toward top by pin 232, therefore can use identical holder 240 to the scribe wheel 231 of various cutter leading edge angle.

Therefore, during delineation in step 3, scoring device 1, uses scribe wheel 231 to carry out the delineation of brittle substrate 15 at any time at identical cutter leading edge locus.Also namely, scoring device 1, as the scribing tool described in patent documentation 2 or patent documentation 3, using the cutter leading edge of the scribe wheel 231 of stationary state as delineation, point is crimped on brittle substrate 15, slides and form score line in the mode of delineating in this case.

Again, because scoring device 1 is delineating to another edge of brittle substrate 15, also with circumscribed formation score line, scribe wheel 231 therefore can be made when step 2 to rotate a little, changing the cutter leading edge locus secondly forming score line.

As above-mentioned, the scoring device 1 of the present embodiment, after with circumscribed formation score line, can form the high score line of precision as patent documentation 2 or patent documentation 3 as the score line of delineating some formation.Again, scribe wheel 231 itself due to such as patent documentation 1 colyliform cutting knife as be widely used when to form score line in the past, it is easy for therefore manufacturing etc.

Again, scoring device 1, owing to be rotated making during brittle substrate 15 surperficial ejection the cutter leading edge of scribe wheel 231, therefore can prevent from forming score line at identical cutter leading edge locus at any time, can increase the life-span that can use scribe wheel 231.

Again, scoring device 1, differently can be formed holder unit 230 with the less part number of packages of scribe wheel 231, pin 232, holder 240 with embodiment 1, embodiment 2.

In addition, in the present embodiment, though be just easier to the viewpoint of making and be made diamond shape by being formed as longer patchhole 243a, 243b in above-below direction, patchhole 243a, 243b also can be other shapes such as Elliptical toroidal.Again, though be formed with hard solder in right cylinder 246a, 246b of holder 240, holder unit 230 also can not form the formation of right cylinder 246a, 246b in holder 240.Under this situation, the top by such as retention groove 242 realizes rotating suppressing portion 260.

Again, in the present embodiment, though scoring device 1 is by the circumscribed rotation carrying out scribe wheel 231, also by manually waiting additive method to make it to rotate.

Claims (6)

1. a scoring device, possesses:

Holder unit, has scribe wheel, the pin rotatable for the aforementioned scribe wheel earth's axis propped up, passes through aforementioned patchhole of selling to insert with the holder keeping aforementioned pin;

Engraving head, has the holder joint installing aforementioned holder unit; And

Microscope carrier, mounting brittle substrate;

By applying load-carrying to aforementioned scribe wheel to form score line in the surface being placed in the brittle substrate on aforementioned microscope carrier, it is characterized in that:

Possess rotation suppressing portion, when aforementioned scribe wheel contacts aforementioned brittle substrate, suppress the rotation of aforementioned scribe wheel.

2. scoring device according to claim 1, wherein, being propped up into rotatable aforementioned scribe wheel by aforementioned bearing pin can move toward above-below direction;

Be contacted with brittle substrate by aforementioned scribe wheel, aforementioned scribe wheel moves toward top and suppresses to rotate by aforementioned rotation suppressing portion.

3. scoring device according to claim 2, wherein, aforementioned holder unit also has the joint assisted tool aforementioned holder being held in and can swinging toward above-below direction, is installed in aforementioned holder joint by aforementioned joint assisted tool;

Aforementioned rotation suppressing portion is located at aforementioned joint assisted tool;

By the swing of aforementioned holder toward top, aforementioned scribe wheel moves toward top and abuts with aforementioned rotation suppressing portion, suppresses thus to rotate.

4. scoring device according to claim 3, wherein, is provided with stretch coil spring between aforementioned holder and aforementioned joint assisted tool.

5. a rose method, uses arbitrary described scoring device in the claims 1 to 4, makes aforementioned scribe wheel from the end contact outside of the brittle substrate be placed in aforementioned microscope carrier.

6. a holder unit, is installed on scoring device, for forming score line on the surface of brittle substrate, it is characterized in that:

Aforementioned holder unit, has:

Scribe wheel;

By the pin that rotatable for the aforementioned scribe wheel earth's axis is propped up;

Holder, by inserting patchhole to keep aforementioned pin by aforementioned pin; And

Joint assisted tool, is held in aforementioned holder and can swings toward above-below direction;

By the swing of aforementioned holder toward top, aforementioned scribe wheel moves toward top and abuts with the rotation suppressing portion being located at aforementioned joint assisted tool, to suppress the rotation of aforementioned scribe wheel.