TW201446677A - Scribing wheel holder unit, scribing wheel holder, pin, scribing wheel and substrate processing device - Google Patents

Abstract

The present invention provides a scribing wheel holder that can prevent the scribing wheel from shaking. The scribing wheel holder of this invention is composed of a scribing wheel 2 and a scribing wheel holder 4A that holds the scribing wheel 2 by a wheel shaft 3 inserted into a shaft through-hole 1. The main body 4 of the scribing wheel holder 4A has the left and right supporting parts 6, 7 facing to each other and clamping a trench 5. The wheel shaft 3 is installed in the supporting parts 6, 7 through the mounting holes 8, 9. The wheel shaft 3 is formed of a small diameter section 3a, a tapered section 3b, and a large diameter section 3c, and the peripheral surface of the small diameter section 3a can slidably to contact and engage with the shaft through-hole 1. One side of the scribing wheel 2 is provided with a guide surface 1a at the edge portion of the shaft through-hole 1. In the states of the tapered section 3b of the wheel shaft 3 in contact with the guide surface 1a and the side face 2a of the scribing wheel 2, which is on the other side of the guide surface 1a, in contact with the face 6a of the supporting member 6, the scribing wheel 2 can be rotatably supported on the wheel shaft 3.

Description

Cutter wheel holder unit, cutter holder, pin, cutter wheel and substrate processing device

The present invention relates to a disc wheel (also referred to as a cutter wheel or a scoring wheel) having a blade edge at a peripheral ridge portion, a pin for holding the cutter wheel, a cutter wheel holder for holding the pin, and a knife holder A cutter holder unit including a wheel holder, a cutter wheel and a pin, and a substrate processing apparatus using the cutter holder unit.

Such a cutter wheel holder (cutter holder unit) is a substrate processing apparatus for scribing the substrate by rotating the cutter wheel while pressing against the surface of the substrate placed on the stage. .

A substrate processing apparatus in which a scribing line is formed by a cutter wheel on a surface of a substrate or a bonded substrate (hereinafter simply referred to as "substrate") made of a brittle material such as glass, tantalum, ceramics, or semiconductor (for example, refer to the patent document) 1. Patent Document 2, Patent Document 3).

Such a substrate processing apparatus includes a scribe head that is movably attached to a frame of the apparatus, and is provided with a cutter holder that holds the cutter wheel through the holder joint in the scribe head.

Fig. 7 is a view showing a conventional cutter wheel holder disclosed in Patent Document 3 and the like, and Fig. 7(a) is a side view and Fig. 7(b) is a sectional view.

The cutter wheel holder 21 includes a substantially cylindrical holder body 22 and a pair of right and left support portions 24 and 24 which are formed in parallel with the groove 23 for mounting the cutter wheel at the lower end of the holder body 22. The groove 23 between the support portions 24 and 24 is rotatably transmitted through the wheel shaft (pin) 25 A cutter wheel 26 is mounted.

A slight gap is ensured between the side surface of the cutter wheel 26 and the surfaces of the left and right support portions 24, 24. For example, when the diameter of the cutter wheel 26 is 1.0 to 3.0 mm, the gap is about 5 to 35 μm. Thereby, the free rotation of the cutter wheel is allowed, and on the other hand, the cutter wheel can freely move the size of the gap in the axial direction of the axle 25. Therefore, there is a fear that the cutter wheel is shaken left and right to make the rotation position of the cutter wheel unstable, and is offset from the formation position of the required score line at the time of scribing.

The sway of the cutter wheel can be solved by reducing the clearance to the limit within the range allowing the free rotation of the cutter wheel, but there is a substantial difficulty in heightening the support portion of the smaller cutter wheel or the cutter holder. Precision machining, even if it can be processed, the cost will become very high.

In order to solve such a problem, the applicant proposes in Patent Document 3 that a cutter wheel having a spiral groove 25a as shown in FIG. 8 is provided on the outer circumferential surface of the wheel shaft 25 of the above-mentioned cutter wheel holder, or as shown in FIG. The axle 25 itself is a tapered cutter wheel.

Accordingly, the cutter wheel 26 that rotates on the circumferential surface of the wheel shaft moves in the screwing direction of the spiral groove or the inclined lower direction of the tapered surface and rotates at a position contacting the surface 24a of the support portion 24, so that the cutter wheel 26 can be made. Always rotate at a fixed position.

Patent Document 1: International Publication WO2007/063979

Patent Document 2: Japanese Laid-Open Patent Publication No. 2011-218815

Patent Document 3: Japanese Laid-Open Patent Publication No. 2012-000995

However, it has been confirmed that the means of Patent Document 3 has the following problems.

That is, in the wheel shaft 25 having the spiral groove shown in Fig. 8, if the spiral groove 25a is too shallow, the cutter wheel 26 cannot be moved in the screwing direction by the rotational frictional force. Therefore, it is necessary to set the spiral groove 25a to a depth (valley) sufficient for the cutter wheel 26 to move by the rotational frictional force, but there are the following problems: if the groove is made deeper, A thinner pin must be used, in which case the shaft strength becomes susceptible to deterioration.

Further, in the tapered axle 25 shown in Fig. 9, as shown in Fig. 9(b), the rotating cutter wheel 26 is always in contact with the outer peripheral surface of the axle 25 in line contact, so that the load is concentratedly applied to The line contacts the part. Therefore, if the abrasion of the wire contact portion continues, it becomes difficult to accurately determine the rotational position of the cutter wheel 26.

Further, in the means of Patent Document 3, since the cutter wheel moves with the rotation of the cutter wheel, there is a short time from the start of the scribing until the cutter wheel abuts against the side surface of the holder. The situation.

In view of the above, it is an object of the present invention to provide a cutter wheel holder that can be held without causing ratcheting of the cutter wheel from the start of scoring.

In order to solve the above problems, the following technical means are employed in the present invention. In other words, the cutter wheel holder unit of the present invention has a disk-shaped cutter wheel having a blade edge and a shaft insertion hole at the center thereof, and an axle shaft inserted through the shaft insertion hole. And a cutter wheel holder for holding the cutter wheel by supporting the axle; the holder body of the cutter wheel holder has a pair of left and right sides having a groove on which the cutter wheel is disposed and facing each other The support portion is mounted to the support portion through the mounting hole.

The axle is composed of a small diameter portion, a tapered portion connected to the small diameter portion, and a tapered portion The large diameter portion is formed, and the circumferential surface of the small diameter portion is formed to be slidably fitted to the shaft insertion hole of the cutter wheel.

Further, a leading surface that is expanded outward is provided at an edge of the shaft insertion hole that is open to one side of the cutter wheel, and the tapered portion of the axle is in contact with the guiding surface and is located at the cutter wheel The cutter wheel is rotatably supported by the axle in a state in which the side opposite to the guide surface is in contact with the surface of a support member.

The guiding surface of the opening edge of one of the shaft insertion holes of the cutter wheel may be a linear inclined surface or a convex arc surface. Further, the tapered portion of the axle is not limited to the linear inclined surface, and may be a gently convex circular surface.

According to the invention, the cutter wheel is rotatably supported by the wheel axle in a state where the tapered portion of the axle abuts against the guide surface of the cutter wheel and one side surface of the cutter wheel comes into contact with the surface of the support member. Therefore, the cutter wheel is positioned between the surface of a support member and the tapered portion of the axle, and is rotatable without shaking. Thereby, it is possible to accurately score the predetermined line along the prescribed scribe line at the time of scribing. Further, since the peripheral surface of the small-diameter portion of the axle is slidably contacted to the shaft insertion hole of the cutter wheel so as to be in surface contact with each other, the cutter wheel can smoothly rotate around the axle in a stable state.

In the above invention, it is preferable that a sliding contact portion between the small diameter portion of the wheel shaft and the inner circumferential surface of the shaft insertion hole of the cutter wheel is one-half or more of the thickness of the cutter wheel.

Thereby, the rotation stability and smoothness of the cutter wheel can be further improved.

In the above invention, it is preferable that the mounting state of the axle is maintained by sealing a mounting hole at the outer end of the large diameter portion of the axle with a baffle.

Thereby, the axle can be fixed to the support portion and the state in which the cutter wheel is positioned can be maintained, and the axle can be prevented from being detached from the mounting hole.

A‧‧‧Cutter wheel holder unit

1‧‧‧Axis insert through hole

1a‧‧‧ guiding surface

2‧‧‧Cutter wheel

3‧‧‧Axle

3a‧‧‧Small diameter department

3b‧‧‧ Tapered

3c‧‧‧The Great Trails Department

4‧‧‧ Keeping the body

4A‧‧‧Cutter wheel holder

5‧‧‧ trench

6, 7‧‧‧ Support Department

8, 9‧‧‧ mounting holes

10‧‧‧Baffle

Fig. 1 is a perspective view showing an example of a cutter wheel holder unit of the present invention.

Fig. 2 is a partial cross-sectional view showing a state in which the cutter wheel holder unit is attached to the holder joint.

Figure 3 is an exploded view and a cross-sectional view showing a cutter wheel mounting portion of the cutter wheel holder.

Figure 4 is a cross-sectional view showing another embodiment of the cutter wheel guide surface of the cutter wheel holder unit.

Figure 5 is a cross-sectional view showing still another embodiment of Figure 4.

Fig. 6 is a cross-sectional view showing a fixing example of the axle in the cutter wheel holder unit.

Figure 7 is a side elevation and cross-sectional view showing a conventional cutter wheel holder.

Fig. 8 is an explanatory view showing an example of an axle portion of a conventional cutter wheel holder.

Fig. 9 is an explanatory view showing another example of Fig. 8.

Hereinafter, the cutter wheel holder unit of the present invention will be described. 1 is a perspective view showing an aspect of a cutter wheel holder unit embodying the present invention, and FIG. 2 is a partial cross-sectional view showing a state in which a cutter wheel holder unit is attached to a holder joint provided in a scribe head of a substrate processing apparatus. Figure 3 is an exploded view and a cross-sectional view showing a mounting portion of the cutter wheel in the cutter wheel holder unit.

The cutter wheel holder unit A holds the cutter wheel 2 by a circular plate-shaped cutter wheel 2 having a blade edge at the outer peripheral ridge portion and having a shaft insertion hole 1 at the center thereof by the wheel shaft 3 inserted through the shaft insertion hole 1 The cutter wheel holder 4A and the axle 3 are formed. The cutter wheel 2 and the axle 3 are preferably formed of a material having excellent tool properties such as cemented carbide or sintered diamond (diamond).

The holder body 4 of the cutter wheel holder 4A has a pair of left and right support portions 6, 7 and so on The pair of support portions 6 and 7 are provided with flat faces 6a and 7a that face the grooves 5 on which the cutter wheel 2 is disposed and face each other. Mounting holes having different inner diameters are coaxially formed in the support portions 6, 7 and the wheel shaft 3 is attached through the mounting holes. In the present embodiment, the support portion 6 is formed with a small diameter attachment hole 8, and the support portion 7 is formed with a large diameter attachment hole 9 having an inner diameter larger than the small diameter attachment hole 8. The small diameter mounting hole 8 and the large diameter mounting hole 9 respectively determine the diameter corresponding to the small diameter portion 3a and the large diameter portion 3c of the wheel shaft 3 described below.

The axle 3 is formed in a cylindrical shape and is formed by a small diameter portion 3a, a tapered portion 3b connected to the small diameter portion 3a, and a large diameter portion 3c connected to the tapered portion 3b. Further, the peripheral surface of the small-diameter portion 3a is slidably fitted to the inner diameter of the shaft insertion hole 1 and the small-diameter mounting hole 8 of the cutter wheel 2 so as to be in surface contact with each other, and the large-diameter portion 3c is large. The diameter mounting hole 9 is slidably contactably fitted in surface contact. The width L of the sliding contact portion of the shaft insertion hole 1 is preferably set to be one-half or more of the thickness of the cutter wheel 2. The load applied when the cutter wheel is pressed against the substrate can be uniformly dispersed in the portion of the width L without becoming a concentrated load, so that local wear of the axle 3 can be reduced. Moreover, the cutter wheel 2 can smoothly rotate around the axle 3 in a stable state. Further, the shape of the tapered portion 3b is not limited to a straight line as shown in the drawing, and may be a gently convex curved surface.

A guide surface 1a that is expanded outward is provided at an edge of the shaft insertion hole 1 that is open on one side of the cutter wheel 2. The tapered portion 3b of the axle 3 abuts against the guiding surface 1a, and is located on the side 2a of the cutter wheel 2 opposite to the guiding surface 1a, and is spaced apart from the surface 6a of the supporting member 6 by a slight gap. Next, the cutter wheel 2 is rotatably supported by the axle 3. Thereby, the cutter wheel 2 is positioned without shaking, and can always rotate at a fixed position. According to the tolerance of the width of the groove 5 and the thickness of the cutter wheel 2, a gap of up to 35 μm is generated. However, by abutting the tapered portion 3b of the axle 3 against the guide surface 1a, the gap can be set to a maximum of about 15 μm. . Further, when the cutter wheel 2 is completely pressed against the surface 6a and the gap is made zero, there is a hindrance to hinder the smooth rotation of the cutter wheel 2, Therefore, it is preferable to ensure about 1 to 5 μm.

In addition, the guide surface 1a is only required to be in contact with the tapered portion 3b of the axle 3 to realize the positioning of the cutter wheel 2. Therefore, it is not limited to a straight line as shown in FIG. 3, and may be formed as shown in FIG. The convex arc surface. In addition, when the guiding surface 1a is a straight inclined surface, the inclination angle thereof may be larger than the inclination angle of the tapered portion 3b of the axle 3 as shown in FIG. 3(b), or as shown in FIG. 5(a). As shown, the inclination angle of the tapered portion 3b of the axle 3 is the same, and may be smaller than the inclination angle of the tapered portion 3b of the axle 3 as shown in Fig. 5(b). These angles are appropriately adjusted depending on the material of the cutter wheel and the axle, the surface roughness, and the like. When both the guide surface 1a and the tapered portion 3b are straight and the inclination angles are equal, the surface contact is made and the rotational resistance is relatively high, but the load can be dispersed. In addition, when each of them is formed into a convex arcuate surface or a case where the inclination angle is different, it becomes a line contact, and although the rotation resistance can be reduced, abrasion is likely to occur at the contact portion. In either case, the positioning of the cutter wheel 2 can be achieved by abutting the tapered portion 3b of the axle 3 against the guide surface 1a.

Further, the guide surface 1a may be formed on one side of the cutter wheel 2, but may be formed on both side surfaces.

As shown in FIG. 3, in the assembly of the cutter wheel holder unit A, the axle 3 is inserted into the large diameter mounting hole 9 of the holder body 4 from the small diameter portion, and the shaft of the cutter wheel 2 passing through the groove 5 is inserted. The hole 1 holds the small diameter portion 3a in the small diameter mounting hole 8 and holds the large diameter portion 3c in the large diameter mounting hole 9. Further, in order to maintain the mounted state in which the cutter wheel 2 is positioned, it is necessary to be fixed to the support member. Therefore, in the present embodiment, as shown in FIG. 6(a), the baffle holder 10 and the screw 11 are provided to the cutter wheel holder 4A, and the outer end of the large diameter portion 3c of the wheel shaft 3 is located at a large diameter from the support portion 7. The mounting hole 9 is mounted slightly inside, and the large diameter mounting hole 9 is abutted against the outer surface of the support portion 7 by the baffle 10. The baffle 10 is fixed to the holder body 4 by screws 11. Thereby, the axle 3 can be held by the support portion 7, the state in which the cutter wheel 2 has been positioned is maintained, and the axle 3 is minutely formed in the mounting hole 9. The gap is fixed, and the cutter wheel 2 is not pressed against the surface 6a to hinder the rotation, and the wheel shaft 3 can be prevented from being detached from the mounting hole 9.

Further, the fixing means of the axle 3 is not limited to the above embodiment, and may be mounted by the following method.

(Modification 1)

In the first modification, as shown in FIG. 6(b), the outer end of the large diameter portion 3c of the axle 3 is mounted slightly inside from the large diameter mounting hole 9 of the support portion 7, and is supported by the support portion. In addition to this, the large-diameter mounting hole 9 is caulked to the left and right sides of 2 to 4 to form the claw piece 15. The axle 3 is held by the claw piece 15. In the present modification, by providing the cutter wheel holder unit in which the cutter wheel 2 and the wheel axle 3 are integrated with the cutter wheel holder, the cutter wheel 2 can be replaced together with the cutter wheel holder unit.

(Modification 2)

In the second modification, as shown in FIG. 6(c), the outer end of the large diameter portion 3c of the axle 3 is attached to the inside of the large diameter mounting hole 9 of the support portion 7, and the shutter 10a is further inserted. The large diameter is installed in the hole 9. Further, the claw piece 15 is formed by caulking the large diameter mounting hole 9 from the outside of the support portion 7 together with the baffle to form the claw piece 15 to hold the wheel shaft 3. When the axle 3 rotates in accordance with the rotation of the cutter wheel 2, it also abuts against the baffle 10a without directly contacting the swaged portion, so that the axle 3 can be more firmly held in the attachment hole 9.

(Modification 3)

In the third modification, as shown in FIG. 6(d), the outer end of the large diameter portion 3c of the axle 3 is located at the outer end. The large-diameter mounting hole 9 of the support portion 7 is attached to the inside, and an elastic body 16 such as a sponge, a rubber or a spring of a specific thickness is inserted into the outer side of the large-diameter portion 3c. Then, the outer surface of the support portion 7 is closed by the baffle 10 to block the large diameter mounting hole 9. The baffle 10 is fixed to the holder body 4 by screws 11. In the present modification, the elastic force of the elastic body 16 can hold the cutter wheel 2 without excessively pressing against the surface 6a. Further, even if the baffle 10 is caulked and fixed as in the second modification, the same effect can be obtained.

(Modification 4)

In the fourth modification, as shown in Fig. 6(e), the outer end of the large diameter portion 3c of the axle 3 may be slightly protruded from the outer surface of the support portion 7, and the baffle 10b formed of an elastic body such as a leaf spring may be elastic. The ground is pressed against the protruding end face of the axle 3 . The baffle 10b is fixed to the holder body 4 by screws 11. In this case as well, the cutter wheel 2 can be held without excessively pressing the cutter wheel 2 against the surface 6a by the elastic force of the baffle 10b.

Further, as the fixing means of the axle 3, in addition to the above-described method, for example, a screw may be provided on the outer surface of the large-diameter portion 3c and the inner surface of the large-diameter mounting hole 9, and may be attached by a screwing means or may be solidified by an adhesive. With.

As shown in FIGS. 1 and 2, the upper portion of the holder body 4 is formed with a mounting portion 12 for attaching the cutter holder unit A to the holder joint 13. The holder joint 13 is assembled to the scribe head 14 of the substrate processing apparatus initially described.

The mounting portion 12 of the holder body 4 is formed of a magnetic metal, and a vertical flat portion 12a and an inclined surface 12b are formed by cutting away a portion of the mounting portion 12.

The holder joint 13 is provided with a bearing 13a at the upper portion and a holding knife at the lower portion. The holding portion 13b of the wheel holder unit A. The holding portion 13b is provided with an opening 13c having a substantially circular cross section that opens downward, and a magnet 13d is attached to the inner side of the holding portion 13b. Further, inside the opening portion 13c, a parallel pin 13e is provided, and the parallel pin 13e extends in a direction orthogonal to the axial center at a portion spaced apart from the axial center of the opening portion. The parallel pin 13e is positioned such that when the cutter holder unit A is inserted into the opening 13c, it comes into contact with the inclined surface 12b of the holder body 4 to fix the direction or posture of the cutter holder unit A.

When the cutter holder unit A is attached to the holder joint 13 , the cutter holder unit A is inserted from the attachment portion 12 into the opening 13 c of the holder joint 13 . When the mounting portion 12 is inserted into the opening portion 13c of the holder joint 13, the parallel pin 13e comes into contact with the inclined surface 12b of the cutter holder unit A, and the upper end portion of the cutter holder unit A is magnetically attracted to the magnet 13d. maintain. Thereby, the cutter holder unit A can be attached to the holder joint 13 in a state in which the posture of the cutter holder unit A is automatically oriented in a predetermined direction.

As described above, in the cutter wheel holder unit A of the present invention, the tapered portion 3b of the wheel shaft 3 abuts against the guide surface 1a of the cutter wheel 2, and the side surface 2a of the cutter wheel 2 comes into contact with the face 6a of the support member 6. In this state, the cutter wheel 2 is rotatably supported by the axle 3. Therefore, the cutter wheel 2 is positioned between the face 6a of the support member 6 and the tapered portion 3b of the axle 3 so as to be rotatable without shaking. Thereby, the predetermined line can be accurately scored along the prescribed scribe line at the time of scoring.

Further, since the circumferential surface of the small-diameter portion 3a of the axle 3 is slidably fitted to the shaft insertion hole 1 of the cutter wheel 2 so as to be in surface contact with each other, the cutter wheel 2 can be smoothly rotated around the axle 3 in a stable state. .

Although the representative embodiments of the present invention have been described above, the present invention is not necessarily limited to the above embodiments. For example, the configuration in which the cutter wheel holder unit A is attached to the scribed portion of the substrate processing apparatus is not limited to the above embodiment, and may be The screw holder or the like has a shape in which the cutter wheel holder is directly attached to the scribing head. Further, the present invention is not limited to the substrate processing apparatus according to the above embodiment, and may be, for example, a hand-held cutter: a holder holder or a holder attachment handle to which the cutter holder is mounted, the user holds The handle is moved and moved to machine a substrate of brittle material. Further, in the present invention, it is possible to appropriately modify and change the scope of the invention without departing from the scope of the invention.

The present invention can be applied to a holder for a cutter wheel used for scribing or cutting a brittle material substrate such as a ceramic substrate or a glass substrate.

1‧‧‧Axis insert through hole

1a‧‧‧ guiding surface

2‧‧‧Cutter wheel

2a‧‧‧ side

3‧‧‧Axle

3a‧‧‧Small diameter department

3b‧‧‧ Tapered

3c‧‧‧The Great Trails Department

4‧‧‧ Keeping the body

4A‧‧‧Cutter wheel holder

5‧‧‧ trench

6, 7‧‧‧ Support Department

6a, 7a‧‧‧

8, 9‧‧‧ mounting holes

L‧‧‧Width

Claims (11)

A cutter wheel holder unit is a disc-shaped cutter wheel having a blade edge at a peripheral ridge portion and having a shaft insertion hole at a center, an axle inserted through the shaft insertion hole, and being held by supporting the axle a cutter wheel holder of the cutter wheel; the holder body of the cutter wheel holder has a pair of left and right support portions having a surface on which the groove of the cutter wheel is disposed and opposed to each other, and is mounted through the support portion The axle is mounted on the hole; the axle is formed by a small diameter portion, a tapered portion connected to the small diameter portion, and a large diameter portion connected to the tapered portion, and is formed as a circumferential surface of the small diameter portion a shaft insertion hole that is slidably engaged with the cutter wheel; and a guide surface that is expanded outwardly at an edge of the shaft insertion hole that is open at one side of the cutter wheel, and the guide surface that is expanded outward is provided The cutter wheel is rotatably supported by the wheel shaft in a state where the tapered portion is in contact with the guide surface and the side surface of the cutter wheel opposite to the guide surface is in contact with the surface of a support member. The cutter wheel holder unit according to claim 1, wherein the sliding contact portion between the small diameter portion of the wheel shaft and the inner circumferential surface of the shaft insertion hole of the cutter wheel is more than half of the thickness of the cutter wheel. The cutter wheel holder unit of claim 1 or 2, wherein the guide surface of the shaft insertion hole of the cutter wheel is a linear inclined surface. The cutter wheel holder unit of claim 1 or 2, wherein the guide surface of the shaft insertion hole of the cutter wheel is a convex arc surface. The cutter wheel holder unit of claim 1 or 2, wherein the mounting state of the axle is maintained by sealing a mounting hole of the outer end of the large diameter portion of the axle with a baffle. a cutter wheel holder for holding a cutter wheel; a holder body of the cutter wheel holder, comprising: a pair of left and right support portions having a surface on which the groove of the cutter wheel is disposed and facing each other; and the support portion is provided with a mounting hole for mounting the axle; the mounting hole is a small diameter mounting hole formed in one of the support portions, the large diameter mounting hole being formed coaxially with the small diameter mounting hole on the other side of the support portion, and The inner diameter is larger than the small diameter mounting hole. The cutter wheel holder of claim 6, which has a baffle for blocking the large diameter mounting hole of the holder body. A pin is inserted into a shaft insertion hole of a cutter wheel, and has a small diameter portion, a tapered portion connected to the small diameter portion, and a large diameter portion connected to the tapered portion. A cutter wheel having a circular plate shape having a blade edge at an outer peripheral ridge portion and a shaft insertion hole at a center thereof, wherein a portion of the shaft insertion hole opened at one side of the cutter wheel is provided with The guide surface is expanded to the outside. A substrate processing apparatus for scribing a brittle material substrate by pressing a cutter wheel against a surface of a brittle material substrate placed on a platform, wherein the substrate is sculpted and sculpted The holder of the head holder is equipped with the cutter wheel holder unit of any one of claims 1 to 4. A substrate processing apparatus characterized in that the cutter wheel holder unit according to any one of claims 1 to 4 is attached with a handle.