JP2015000497A - Tip holder unit, tip holder, pin, wheel tip, and substrate processing device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a tip holder capable of holding a wheel tip without becoming unsteadily.SOLUTION: A tip holder unit is composed of a wheel tip 2 and a tip holder 4A for holding the wheel tip 2 by a wheel shaft 3 inserted into a shaft insertion hole 1, and a holder body 4 of the tip holder 4A comprises left-right support parts 6 and 7 having a surface opposed by sandwiching a groove 5, and the wheel shaft 3 is installed in the support parts 6 and 7 via installation holes 8 and 9, and the wheel shaft 3 is formed of a thin diameter part 3a, a tapered part 3b and a large diameter part 3c, and a peripheral surface of the thin diameter part 3a is fitted to the shaft insertion hole 1 so as to be capable of sliding contact, and a guide surface 1a is provided in an edge part of the shaft insertion hole 3 opening on one side surface of the wheel tip 2, and the tapered part 3b of the wheel shaft 3 contacts with the guide surface 1a, and the wheel tip 2 is rotatably supported by the wheel shaft 3 in a state where a side surface 2a on the opposite side of the guide surface 1a of the wheel tip 2 contacts with a surface 6a of one support member 6.

Description

The present invention relates to a disk-shaped wheel chip (also referred to as a cutter wheel or a scribing wheel) having a cutting edge at an outer peripheral ridge, a pin for holding the wheel chip, a chip holder for holding the pin, a chip holder, and a wheel chip. And a substrate processing apparatus using the chip holder unit.
Such a chip holder (chip holder unit) is used in a substrate processing apparatus or the like that performs scribe processing on the substrate by rolling the wheel chip against the surface of the substrate placed on a table while pressing the wheel chip.

Conventionally, there has been known a substrate processing apparatus for forming a scribe line using a wheel chip on the surface of a substrate made of a brittle material such as glass, silicon, ceramic, or a semiconductor or a bonded substrate (hereinafter simply referred to as “substrate”). (See, for example, Patent Document 1, Patent Document 2, and Patent Document 3).
Such a substrate processing apparatus includes a scribe head movably attached to a frame of the apparatus, and the scribe head is provided with a chip holder for holding a wheel chip via a holder joint.
7A and 7B show a conventional chip holder disclosed in Patent Document 3 and the like, in which FIG. 7A is a side view and FIG. 7B is a cross-sectional view.
The chip holder 21 includes a substantially cylindrical holder main body 22 and a pair of left and right support portions 24 and 24 formed in parallel with a lower end of the holder main body 22 with a wheel chip mounting groove 23 interposed therebetween. A wheel chip 26 is rotatably attached to a groove 23 between the support portions 24 and 24 via a wheel shaft (pin) 25.

  A slight clearance is secured between the side surface of the wheel tip 26 and the surfaces of the left and right support portions 24, 24. For example, when the wheel tip 26 has a diameter of 1.0 to 3.0 mm, It is about 5-35 micrometers. As a result, the wheel tip is allowed to freely rotate, but on the other hand, the wheel shaft 25 can freely move in the axial direction by the clearance dimension. For this reason, the wheel tip may fluctuate from side to side and the rotational position of the wheel tip may not be stable, and there may be a problem such as deviation from a desired scribe line formation position during scribing.

  The wobbling of the wheel tip can be solved by reducing the clearance as much as possible within the range that allows the wheel tip to freely rotate, but it is practical to perform highly precise processing on the support part of the small wheel tip or tip holder. However, even if processing is possible, there is a problem that it becomes very expensive.

In order to solve such a problem, in Japanese Patent Application Laid-Open No. H10-260260, the applicant has disclosed a wheel chip in which a spiral groove 25a as shown in FIG. 9 has proposed a wheel tip having a tapered wheel shaft 25 itself.
According to this, the wheel chip 26 rotating on the wheel shaft peripheral surface moves in the screwing direction of the spiral groove or the inclined lower direction of the tapered surface and rotates at a position in contact with the surface 24a of the one support portion 24. Thus, the wheel tip 26 can always be rotated at a fixed position.

International Publication WO2007 / 063979 JP2011-218815A JP 2012-000995 A

However, it has been found that the following problem exists in the means of Patent Document 3.
That is, in the wheel shaft 25 having the spiral groove shown in FIG. 8, if the spiral groove 25a is too shallow, the wheel chip 26 cannot be moved in the screwing direction by the rotational friction force. Accordingly, it is necessary to make the spiral groove 25a deep enough (Taniyama) to move the spiral groove 25a by rotational frictional force. However, if the groove is deepened, the shaft strength deteriorates when a thin pin must be used. There is a problem that it becomes easy to do.
Further, in the tapered wheel shaft 25 shown in FIG. 9, as shown in FIG. 9B, the rotating wheel tip 26 is always in line contact with the outer peripheral surface of the wheel shaft 25, and this line contact. The load will be concentrated on the part. For this reason, when the wear of the line contact portion proceeds, it is difficult to accurately determine the rotational position of the wheel tip 26.
Further, in each of the means of Patent Document 3, since the wheel tip moves with the rotation of the wheel tip, the scribe line meanders for a short time from the start of scribing until the wheel tip contacts the side surface of the holder. There was a case.
In view of the above problems, an object of the present invention is to provide a chip holder that can be held from the start of scribing so that the wheel chip does not wobble.

In order to solve the above problems, the present invention takes the following technical means. That is, the tip holder unit of the present invention includes a disk-shaped wheel chip having a blade edge at the outer peripheral ridge line portion and a shaft insertion hole at the center, a wheel shaft inserted through the shaft insertion hole, and the wheel shaft. A chip holder for holding the wheel chip by supporting, the holder body of the chip holder has a pair of left and right support parts having surfaces facing each other across a groove in which the wheel chip is disposed, The wheel shaft is attached to the support portion via an attachment hole.
The wheel shaft is formed by a narrow diameter portion, a tapered portion connected to the small diameter portion, and a large diameter portion continuous to the tapered portion, and a peripheral surface of the small diameter portion slides in a shaft insertion hole of the wheel chip. It should be formed so that it can be contacted.
A guide surface extending outward is provided at an edge of the shaft insertion hole that opens on one side surface of the wheel tip, and a tapered portion of the wheel shaft contacts the guide surface, and the wheel tip The wheel tip is rotatably supported on the wheel shaft in a state where the side surface opposite to the guide surface is in contact with the surface of one of the support members.

  The guide surface provided at one end opening edge of the shaft insertion hole of the wheel chip may be a linear inclined surface or a convex arc surface. Further, the tapered portion of the wheel shaft is not limited to a linear inclined surface, and may be an arc surface that gently swells.

  According to the present invention, the wheel tip is rotatably supported by the wheel shaft in a state where the tapered portion of the wheel shaft is in contact with the guide surface of the wheel tip and one side surface of the wheel tip is in contact with the surface of the support member. Therefore, the wheel tip is positioned between the surface of the one support member and the tapered portion of the wheel shaft, and can rotate without wobbling. Thereby, it can scribe precisely along the scheduled scribe line defined at the time of scribing. In addition, since the peripheral surface of the small-diameter portion of the wheel shaft is fitted to the shaft insertion hole of the wheel tip so as to be slidable by surface contact, the wheel tip can be smoothly rotated around the wheel shaft in a stable state. There is an effect that can be.

In the above invention, it is preferable that a sliding contact portion between the small-diameter portion of the wheel shaft and the inner peripheral surface of the wheel insertion hole of the wheel chip is not less than half of the thickness of the wheel chip.
Thereby, the stability and smoothness of the rotation of the wheel chip can be further enhanced.

In the above invention, it is preferable that the mounting state of the wheel shaft is maintained by closing one mounting hole where the outer end of the large-diameter portion of the wheel shaft is located with a contact plate.
As a result, the wheel shaft can be fixed to the support portion to keep the wheel chip positioned, and the wheel shaft can be prevented from being pulled out of the mounting hole.

The perspective view which shows an example of the chip holder unit which concerns on this invention. The partial cross section figure which shows the attachment state to the holder joint of the chip holder unit. The exploded view and sectional drawing which show the wheel tip attachment part of a tip holder. Sectional drawing which shows another Example of the wheel chip | tip guide surface of a chip | tip holder unit. Sectional drawing which shows another Example of FIG. Sectional drawing which shows the example of fixation of the wheel shaft in a chip | tip holder unit. The side view and sectional drawing which show the conventional chip holder. Explanatory drawing which shows an example of the wheel shaft part of the conventional chip holder. Explanatory drawing which shows another example of FIG.

  Hereinafter, the chip holder unit according to the present invention will be described. FIG. 1 is a perspective view showing an embodiment of a chip holder unit in which the present invention is implemented, and FIG. 2 is a partial cross-section showing a state in which the chip holder unit is attached to a holder joint provided in a scribe head of a substrate processing apparatus. FIG. 3 and FIG. 3 are an exploded view and a cross-sectional view showing a wheel chip mounting portion in the chip holder unit.

The chip holder unit A has a blade tip 2 having a blade edge at the outer peripheral ridge line and a shaft-shaped wheel chip 2 having a shaft insertion hole 1 at the center, and a wheel shaft 3 inserted through the shaft insertion hole 1. It comprises a chip holder 4 </ b> A to be held and a wheel shaft 3. The wheel tip 2 and the wheel shaft 3 are preferably formed of a material having excellent tool characteristics such as cemented carbide or sintered diamond.
The holder body 4 of the tip holder 4A has a pair of left and right support portions 6 and 7 having flat surfaces 6a and 7a facing each other across a groove 5 in which the wheel tip 2 is disposed. Mounting holes having different inner diameters are coaxially formed in the support portions 6 and 7, and the wheel shaft 3 is attached via these mounting holes. In the present embodiment, the support portion 6 is formed with a small diameter attachment hole 8, and the support portion 7 is formed with a large diameter attachment hole 9 having an inner diameter larger than that of the small diameter attachment hole 8. The diameters of the small-diameter mounting hole 8 and the large-diameter mounting hole 9 are determined in accordance with a thin-diameter portion 3a and a large-diameter portion 3c of the wheel shaft 3 described later, respectively.

  The wheel shaft 3 is formed of a cylindrical body, and is formed by a small diameter portion 3a, a tapered portion 3b continuous with the small diameter portion 3a, and a large diameter portion 3c continuous with the tapered portion 3b. Then, the peripheral surface of the small diameter portion 3a is fitted to the shaft insertion hole 1 of the wheel chip 2 and the inner diameter of the small diameter mounting hole 8, and the large diameter portion 3c is fitted to the large diameter mounting hole 9 so as to be slidable in surface contact. It is formed as follows. The width L of the sliding contact portion of the shaft insertion hole 1 is preferably at least half the thickness of the wheel chip 2. Since the load applied when the wheel is pressed against the substrate can be evenly distributed in the width L portion and does not become a concentrated load, local wear of the wheel shaft 3 is reduced. The wheel chip 2 can smoothly rotate in a stable state around the wheel shaft 3. Note that the shape of the tapered portion 3b is not limited to the straight line as illustrated, but may be a curved surface that swells gently.

A guide surface 1 a that extends outward is provided at the edge of the shaft insertion hole 1 that opens on one side surface of the wheel chip 2. The taper portion 3b of the wheel shaft 3 abuts on the guide surface 1a, and the side surface 2a on the opposite side of the guide surface 1a of the wheel chip 2 is in contact with the surface 6a of the one support member 6 with a slight clearance. The wheel shaft 3 is rotatably supported. Thereby, the wheel chip 2 is positioned without wobbling and can always rotate at a fixed position. According to the tolerance of the width of the groove 5 and the thickness of the wheel chip 2, a clearance of 35 μm at maximum is generated. However, when the tapered portion 3b of the wheel shaft 3 is in contact with the guide surface 1a, this clearance is about 15 μm at maximum. be able to. In addition, when the wheel chip 2 is completely pressed against the surface 6a and the clearance becomes 0, there is a possibility that smooth rotation of the wheel chip 2 may be hindered, so it is preferable to secure about 1 to 5 μm.
The guide surface 1a is not limited to the straight line as shown in FIG. 3 but may be a convex arc as shown in FIG. It is also possible to form the surface. When the guide surface 1a is a straight inclined surface, the inclination angle may be larger than the inclination angle of the tapered portion 3b of the wheel shaft 3 as shown in FIG. 3B, as shown in FIG. As shown in FIG. 5B, it may be the same. These angles are appropriately adjusted depending on the material of the wheel chip and the wheel shaft, the surface roughness, and the like. When the guide surface 1a and the tapered portion 3b are both straight and have the same inclination angle, the surface contact occurs and the rotational resistance becomes relatively high, but the load can be dispersed. Moreover, when each is formed with a convex circular arc surface or when the inclination angle is different, line contact occurs and rotational resistance can be lowered, but wear tends to occur at the contact portion. In any case, the wheel tip 2 can be positioned by bringing the tapered portion 3b of the wheel shaft 3 into contact with the guide surface 1a.
Moreover, although the guide surface 1a should just be formed in the one side surface of the wheel chip 2, you may form in both side surfaces.

As shown in FIG. 3, in assembling the chip holder unit A, the wheel shaft 3 is inserted into the large-diameter mounting hole 9 of the holder body 4 from the small diameter portion, and the shaft insertion hole 1 of the wheel chip 2 in the groove 5. The small diameter portion 3 a is held in the small diameter mounting hole 8, and the large diameter portion 3 c is held in the large diameter mounting hole 9. And in order to maintain the mounting state in which the above-mentioned wheel chip 2 was positioned, it is necessary to fix to the support member. Therefore, in this embodiment, as shown in FIG. 6A, the tip holder 4 </ b> A is provided with the contact plate 10 and the screw 11, and the outer end of the large diameter portion 3 c of the wheel shaft 3 is the large diameter mounting hole of the support portion 7. The large-diameter mounting hole 9 is attached from the outer surface of the support portion 7 with the abutment plate 10 to be closed. The abutting plate 10 is fixed to the holder body 4 with screws 11. As a result, the wheel shaft 3 can be held on the support portion 7, and the wheel chip 2 is held in a positioned state, and the wheel shaft 3 is fixed with a slight clearance in the mounting hole 9. The wheel shaft 3 can be prevented from being pulled out from the mounting hole 9 without being pressed against the surface 6a and hindering rotation.
The fixing means for the wheel shaft 3 is not limited to the above-described embodiment, and can be attached by the following method.

(Modification 1)
In the first modification, as shown in FIG. 6 (b), the large diameter portion 3 c of the wheel shaft 3 is mounted so that the outer end thereof is positioned slightly inside the large diameter mounting hole 9 of the support portion 7. Claw pieces 15 are formed by caulking the attachment holes 9 about 2 to 4 locations from the outer surface of the support portion 7. The wheel shaft 3 is held by the claw piece 15. In this modified example, the wheel chip 2 and the wheel shaft 3 are formed as a chip holder unit integrated with the chip holder, so that the entire chip holder unit can be replaced when the wheel chip 2 is replaced.

(Modification 2)
In the modified example 2, as shown in FIG. 6C, the large-diameter portion 3c of the wheel shaft 3 is attached so that the outer end is located inside the large-diameter attachment hole 9 of the support portion 7, and the large-diameter attachment hole is further provided. The abutment plate 10 a is inserted into 9. The claw pieces 15 are formed by caulking the large-diameter mounting holes 9 from the outer surface of the support portion 7 together with the abutment plate to hold the wheel shaft 3. Even when the wheel shaft 3 is rotated with the rotation of the wheel chip 2, the wheel shaft 3 is held in the mounting hole 9 more firmly because it does not contact the crimping plate 10a and directly contact the crimped portion. can do.

(Modification 3)
In Modification 3, as shown in FIG. 6 (d), the large-diameter portion 3 c of the wheel shaft 3 is attached so that the outer end thereof is located inside the large-diameter mounting hole 9 of the support portion 7. An elastic body 16 such as sponge, rubber or spring having a predetermined thickness is inserted outside. Then, the large-diameter mounting hole 9 is applied from the outer surface of the support portion 7 with a contact plate 10 to be closed. The plate 10 is fixed to the holder body 4 with screws 11. In this modification, the wheel chip 2 can be held without being pressed too much against the surface 6 a by the elastic force of the elastic body 16. Note that the same effect can be obtained even if the plate 10 is caulked and fixed as in the second modification.

(Modification 4)
In the modified example 4, as shown in FIG. 6 (e), the outer end of the large-diameter portion 3c of the wheel shaft 3 slightly protrudes from the outer surface of the support portion 7, and is formed by an elastic body such as a leaf spring. The protruding end surface of the wheel shaft 3 may be elastically pressed by the plate 10b. The abutting plate 10b is fixed to the holder body 4 with screws 11. Also in this case, the wheel chip 2 can be held without being excessively pressed against the surface 6a by the elastic force of the contact plate 10b.

  As a means for fixing the wheel shaft 3, in addition to the above method, for example, a screw is provided on the outer peripheral surface of the large-diameter portion 3c and the inner surface of the large-diameter mounting hole 9 and attached by screwing means, or fixed by an adhesive. It is also possible to do.

As shown in FIGS. 1 and 2, the upper portion of the holder body 4 forms an attachment portion 12 for attaching the chip holder unit A to the holder joint 13. The holder joint 13 is assembled to the scribe head 14 of the substrate processing apparatus described at the beginning.
The attachment portion 12 of the holder body 4 is made of a magnetic metal, and a vertical plane portion 12a and an inclined surface 12b are formed by cutting out a portion of the attachment portion 12.

  The holder joint 13 includes a bearing 13a at the upper part, and the lower part serves as a holding part 13b that holds the chip holder unit A. The holding portion 13b is provided with an opening 13c having a substantially circular cross section that opens downward, and a magnet 13d is attached to the inner back thereof. Furthermore, a parallel pin 13e extending in a direction orthogonal to the axis is provided inside the opening 13c at a location away from the axis of the opening. The parallel pins 13e are positioned so that when the chip holder unit A is inserted into the opening 13c, the chip holder unit A comes into contact with the inclined surface 12b so that the direction and posture of the chip holder unit A are constant. is there.

  When the tip holder unit A is attached to the holder joint 13, the tip holder unit A is inserted into the opening 13 c of the holder joint 13 from the attachment portion 12. When the mounting portion 12 is inserted into the opening 13c of the holder joint 13, the parallel pin 13e comes into contact with the inclined surface 12b of the chip holder unit A, and the upper end portion of the chip holder unit A is magnetically attached to the magnet 13d and held. Is done. Thereby, the chip holder unit A can be attached to the holder joint 13 in a state where the posture of the chip holder unit A is automatically oriented in a certain direction.

As described above, in the tip holder unit A of the present invention, the tapered portion 3b of the wheel shaft 3 is in contact with the guide surface 1a of the wheel tip 2, and the side surface 2a of the wheel tip 2 is in contact with the surface 6a of the support member 6. In this state, the wheel chip 2 is rotatably supported on the wheel shaft 3. Therefore, the wheel chip 2 is positioned by being sandwiched between the surface 6a of the one support member 6 and the tapered portion 3b of the wheel shaft 3, and can rotate without wobbling. Thereby, it can scribe precisely along the scribe plan line defined at the time of scribe.
Further, since the peripheral surface of the small-diameter portion 3a of the wheel shaft 3 is fitted to the shaft insertion hole 1 of the wheel chip 2 so as to be slidable by surface contact, the wheel chip 2 is in a stable state around the wheel shaft 3 Can be rotated smoothly.

  As mentioned above, although the typical Example of this invention was described, this invention is not necessarily specified to said embodiment. For example, the configuration of the portion for attaching the chip holder unit A to the scribe head of the substrate processing apparatus is not limited to the above embodiment, but any form such as attaching the chip holder directly to the scribe head by screwing or the like. It may be. Further, the present invention is not limited to the substrate processing apparatus as in the above embodiment. For example, a brittle material can be obtained by attaching a handle to a chip holder or a holder joint to which the chip holder is attached and moving the user with the handle. It is good also as a hand cutter which processes a substrate. Others The present invention can be appropriately modified and changed within the scope of achieving the object and without departing from the scope of the claims.

  The present invention is applied to a wheel chip holder used when processing or dividing a scribe line on a brittle material substrate such as a ceramic substrate or a glass substrate.

A Tip holder unit 1 Shaft insertion hole 1a Guide surface 2 Wheel tip 3 Wheel shaft 3a Small diameter portion 3b Tapered portion 3c Large diameter portion 4 Holder body 4A Tip holder 5 Groove 6, 7 Support portion 8, 9 Mounting hole 10

Claims (11)

A disk-shaped wheel chip having a cutting edge at the outer peripheral ridge line part and having a shaft insertion hole at the center, a wheel shaft inserted through the shaft insertion hole, and holding the wheel chip by supporting the wheel shaft A chip holder that
The holder body of the tip holder has a pair of left and right support portions having surfaces facing each other across a groove in which the wheel tip is disposed, and the wheel shaft is attached to the support portion through an attachment hole. And
The wheel shaft is formed by a narrow diameter portion, a tapered portion connected to the small diameter portion, and a large diameter portion continuous to the tapered portion, and a peripheral surface of the small diameter portion slides in a shaft insertion hole of the wheel chip. It is formed so that it can be contacted,
A guide surface that extends outward is provided at an edge of the shaft insertion hole that opens on one side surface of the wheel tip, and a tapered portion of the wheel shaft contacts the guide surface, and the guide surface of the wheel tip A tip holder unit in which a wheel tip is rotatably supported on the wheel shaft in a state where a side surface on the opposite side contacts a surface of one support member.   2. The tip holder unit according to claim 1, wherein a sliding contact portion between the narrow diameter portion of the wheel shaft and an inner peripheral surface of the shaft insertion hole of the wheel tip is at least half of a thickness of the wheel tip.   The tip holder unit according to claim 1 or 2, wherein the guide surface of the shaft insertion hole of the wheel tip is a linear inclined surface.   The tip holder unit according to claim 1 or 2, wherein the guide surface of the shaft insertion hole of the wheel tip is a convex arc surface.   The mounting state of the wheel shaft is maintained by closing one mounting hole where the outer end of the large-diameter portion of the wheel shaft is located with a contact plate. The described chip holder unit. A tip holder for holding a wheel tip,
The holder body of the tip holder has a pair of left and right support portions having surfaces facing each other across a groove in which the wheel tip is disposed, and the support portion is provided with an attachment hole for attaching a wheel shaft. And
The mounting hole includes a small-diameter mounting hole formed on one side of the support portion and a large-diameter mounting hole formed on the other side of the support portion and coaxially with the small-diameter mounting hole. Chip holder formed by   The chip holder according to claim 6, further comprising a contact plate that closes the large-diameter mounting hole of the holder body.   A pin that is inserted into a shaft insertion hole of a wheel chip, and has a small diameter portion, a tapered portion that is continuous with the small diameter portion, and a large diameter portion that is continuous with the tapered portion.   A disc-shaped wheel chip having a cutting edge at the outer peripheral ridge and having a shaft insertion hole at the center, the guide extending outward at the edge of the shaft insertion hole opened on one side of the wheel chip A wheel chip characterized in that a surface is provided. A substrate processing apparatus for scribing the brittle material substrate by rolling the wheel chip against the surface of the brittle material substrate placed on a table,
5. A substrate processing apparatus, wherein the chip holder unit according to claim 1 is attached to a holder joint assembled to a scribe head.   A substrate processing apparatus, wherein a handle is attached to the chip holder unit according to claim 1.

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