JP2023145356A - Stage mechanism and method of using stage mechanism - Google Patents

Abstract

To provide a stage mechanism, etc. that allows for precision movement and easy downsizing.SOLUTION: A flat plate stage mechanism, etc., having a pair of fixed stages and a movable stage, and having configurations of: (1) a long guide member provided on the surface of the fixed stages, (2) one side of the guide member having a sliding surface, (3) the side of the guide member opposite the sliding surface provided with a pullout unit; (4) a guide groove provided on the back of the movable stage to guide the guide member in direct or indirect contact with the sliding surface; and (5) a feeder provided on the side of the fixed stages and the movable stage to slide the movable stage along the surface of the fixed stages.SELECTED DRAWING: Figure 1

Description

The present invention relates to a stage mechanism and a method of using the stage mechanism.
In particular, the present invention relates to a stage mechanism that can be moved accurately and easily miniaturized, and a method of using such a stage mechanism.

2. Description of the Related Art Conventionally, in processing machines, microscopes, and the like that perform cutting, grinding, polishing, etc., stage mechanisms for reciprocating a workpiece or fixing it at a predetermined location are widely known.
Such a stage mechanism basically consists of a fixed stage, a movable stage, and a feeder, and the feeder allows the movable stage to slide on the fixed stage, and in turn, the movable stage is fixed to the movable stage. A workpiece (not shown) can be moved back and forth.
As such a stage mechanism, in order to prevent play during movement of the workpiece, a stage mechanism is provided with a guide member, and a guide groove is provided along the guide member in at least one of the fixed stage and the movable stage. However, various proposals have been made.

As one such stage mechanism, for example, a stage mechanism has been proposed that can effectively suppress the occurrence of yawing (lateral shaking, etc., hereinafter the same applies) and can accurately move a workpiece. (For example, see Patent Document 1).
More specifically, as shown in FIG. 10(a), a fixed stage 212, a movable stage 214, a feed mechanism component 220 that slides the movable stage 214 along the surface of the fixed stage 212, and a feed mechanism component 220 for each stage. The stage mechanism 200 includes a guide groove 218 provided, a metal piece 216 that fits into the guide groove 218, and a pressing member 215, and satisfies a predetermined relational expression regarding thickness.

Further, for example, a stage device has been proposed that has a high flatness of the stage surface and can move smoothly and accurately (see, for example, Patent Document 2).
More specifically, as shown in FIG. 10(b), a base body 303, a first stage plate 304 laminated on the base body 303, a predetermined guide groove 318 along the surface of the base body 303, The stage device 300 includes a first stage guide 320 that supports a first stage plate 304 in a slidable state.

JP 2015-000460 (claims, drawings, etc.) JP 2015-038472 (claims, drawings, etc.)

However, the stage mechanism described in Patent Document 1 requires a configuration in which the guide member is brought into surface contact with the guide groove or is curved and brought into local contact with the guide groove.
As a result, the position and shape of the guide member are excessively restricted, making it difficult to downsize the stage mechanism itself and to form an opening for attaching a workpiece inside the stage device.

On the other hand, the stage device described in Patent Document 2 needs to have a configuration in which a guide groove slides along a pin-shaped guide member.
Therefore, there has been a problem in that the contact surface between the guide member and the guide groove is reduced, making it difficult to accurately move the stage device.
In addition, due to the structure, in order to ensure sufficient precision for precise movement, it is necessary to make the interval between the guides considerably wider, which requires the miniaturization of the stage device and the need to install a workpiece mounting device inside the stage device. Another problem was that it was difficult to form the opening.

In view of these problems, the inventor of the present application has made extensive efforts to develop a planar stage mechanism comprising a movable stage and a fixed stage, which includes at least the predetermined configurations (1) to (5). The inventors have discovered that even when the width of the guide member is narrowed, yawing can be prevented and accuracy of workpiece movement can be ensured, and the present invention has been completed.
That is, an object of the present invention is to provide a stage mechanism that can move a workpiece accurately and that can be easily miniaturized, and an efficient method of using the stage mechanism using such a stage mechanism. It is about providing.

According to the present invention, there is provided a flat stage mechanism including a pair of fixed stages and a movable stage, which is characterized by having the following configurations (1) to (5): The above-mentioned problems can be solved.
(1) A long guide member is provided on the surface of the fixed stage.
(2) A sliding surface is provided on one side of the guide member.
(3) A cutout is provided on the side of the guide member opposite to the sliding surface.
(4) A guide groove is provided on the back surface of the movable stage to directly or indirectly contact the sliding surface and guide the guide member.
(5) A feeding device that slides the movable stage along the surface of the fixed stage is provided on the side surface of the fixed stage and the movable stage.
That is, according to the stage mechanism of the present invention, by providing at least the configurations (1) to (5), even when the width of the guide member is made considerably narrower and the size is reduced, good precision movement can be achieved. It can be carried out.

Another aspect of the present invention is a flat stage mechanism including a pair of fixed stages and a movable stage, and is characterized by having the following configurations (1') to (5'). It is a stage mechanism.
(1') A long guide member is provided on the back side of the movable stage.
(2') A sliding surface is provided on one side of the guide member.
(3') A cutout is provided on the side of the guide member opposite to the sliding surface.
(4') A guide groove is provided on the surface of the fixed stage to directly or indirectly contact the sliding surface and guide the guide member.
(5') A feeding device for sliding the movable stage along the surface of the fixed stage is provided on the side surface of the fixed stage and the movable stage.
That is, according to the stage mechanism of the present invention, by providing at least the configurations (1') to (5'), good precision can be achieved even when the width of the guide member is made considerably narrower and the size is reduced. You can move.

Further, in configuring the stage mechanism of the present invention, a pressing member is provided that connects the fixed stage and the movable stage, and the pressing member passes through the pressing groove provided in the fixed stage and extends in the thickness direction from the back side to the front side. It is preferably a movable pressing member that penetrates through the movable stage, is fixed directly or indirectly to the back side of the movable stage, and moves horizontally within the range of the pressing groove as the movable stage slides.
With this configuration, the guide member can be pressed between the fixed stage and the movable stage, suppressing the floating of the movable stage from the fixed stage and achieving more precise movement. Can be secured.
Further, regardless of the sliding state of the movable stage, the movable stage can be pressed at the center by a predetermined pressing member, and the movable stage can be slid with a stable force.
Furthermore, since the fixed stage can be provided with a pressing groove, the surface of the movable stage can be used more widely, which can further contribute to miniaturization.

Further, in configuring the stage mechanism of the present invention, a pressing member is provided that connects the fixed stage and the movable stage, and the pressing member passes through a pressing groove provided in the movable stage in the thickness direction from the front side to the back side. It is preferable that the pressing member is a fixed type pressing member that penetrates through and is directly or indirectly fixed to the surface side of the fixed stage.
With this configuration, the guide member can be pressed between the fixed stage and the movable stage, preventing the movable stage from lifting up from the fixed stage, and moving the workpiece with higher precision. It can be carried out.
In addition, even when the movable stage is slid, the position of the pressing member can be kept in a fixed place, preventing the pressing member from loosening, etc., and making it easy to adjust the pressure of the pressing member. can do.

Further, in configuring the stage mechanism of the present invention, it is preferable that the guide members are at least two metal members whose sliding surfaces face each other at a predetermined interval.
With this configuration, the movable stage can be firmly sandwiched between the guide members and the sliding surfaces can be brought into contact with each other, and the workpiece can be moved with higher precision.

Further, in configuring the stage mechanism of the present invention, when the cutout part is the first cutout part, the guide member has a first cutout part different from the first cutout part on the side opposite to the sliding surface. It is preferable to have one or more second cutouts.
With such a configuration, the degree of freedom in the shape and arrangement of the guide member is further improved, and further miniaturization can be achieved.

Further, in configuring the stage mechanism of the present invention, if the guide member is provided on the surface of the fixed stage, the fixed stage has a fitting groove into which the guide member is fitted, and a guide on the side surface of the fitting groove. A guide fixing member that presses and fixes the member, and when the guide member is provided on the back of the movable stage, the movable stage has a fitting groove and a side surface of the fitting groove. , and a guide fixing member.
With such a configuration, the sliding surface can be brought into contact with the guide groove more effectively, and the workpiece can be moved with higher precision.

Further, in configuring the stage mechanism of the present invention, it is preferable to have an opening for attaching a workpiece inside the outer edge.
With this configuration, even if the stage device is small, the arrangement and diameter of the opening for attaching the workpiece, which is a through hole that is provided inside the outer periphery of the stage device and penetrates the front and back surfaces of the stage device, can be reduced. The degree of freedom can be increased.

Further, in configuring the stage mechanism of the present invention, the feeding device includes a first connecting member fixed to the side surface of the fixed stage, a second connecting member fixed to the side surface of the movable stage, and supported by the first connecting member. and a feed screw member rotatably supported by the second connecting member.
With such a configuration, even with a simple configuration, the amount of slide of the movable stage can be finely adjusted by the amount of rotation of the spindle, and the workpiece can be moved with higher precision.

Further, in configuring the stage mechanism of the present invention, it is preferable that when the guide member is cut along a horizontal plane, the planar shape of the cutout portion is a semi-elongated hole shape along the sliding direction of the movable stage.
In this way, by making the elongated hole shape into a planar shape that is divided in half along the sliding direction, even if the thin wall portion due to the punched portion becomes relatively wide along the sliding direction, The guide member can be effectively prevented from falling or deforming in the width direction.
Moreover, with such a semi-elongated hole shape, the volume of the guide member can be reduced, which in turn can reduce the weight of the stage mechanism and further improve operability.

Furthermore, another aspect of the present invention is a method of using the stage mechanism described above, which is characterized by having the following steps (A) to (C).
(A) Step of attaching the stage mechanism to a predetermined position.
(B) A step of fixing a predetermined workpiece on the surface of the movable stage.
(C) A step of sliding the movable stage along the surface of the fixed stage using the feeding device to move a predetermined workpiece.
By implementing the method of using the stage mechanism in this way, it is possible to effectively demonstrate the followability of the sliding surface to the guide groove, and to move the workpiece with higher precision.Furthermore, the stage mechanism itself can be can be easily miniaturized.

FIG. 1 is a diagram provided to explain the assembled state of the stage mechanism of the first embodiment. FIGS. 2(a) to 2(e) are diagrams provided for explaining the planar shapes of the first and second cutout portions in the guide member of the first embodiment, respectively. FIGS. 3A and 3B are cross-sectional views of the stage mechanism of the first embodiment taken along a horizontal plane. FIGS. 4(a) to 4(c) are diagrams provided to explain modified examples of the stage mechanism of the first embodiment, respectively. FIG. 5 is a diagram provided to explain the attachment positions of the first connection member and the second connection member in the first embodiment. FIG. 6 is a diagram provided to explain another assembled state of the stage mechanism of the first embodiment. FIGS. 7A to 7C are cross-sectional views of a stage mechanism as a modified example of the first embodiment, respectively, taken along a horizontal plane. FIG. 8 is a diagram provided to explain the assembled state of the stage mechanism of the second embodiment. FIG. 9 is a diagram provided to explain how to use the stage mechanism of the third embodiment. FIGS. 10(a) to 10(b) are diagrams provided to explain conventional stage mechanisms, respectively.

[First embodiment]
The first embodiment, as illustrated in FIG. 1, is a flat stage mechanism 10 that includes a pair of fixed stages 12 and a movable stage 14, and has the following configurations (1) to (5). This is a stage mechanism 10 characterized by the following.
(1) A long guide member 16 is provided on the surface of the fixed stage 12.
(2) A sliding surface 16a is provided on one side of the guide member 16.
(3) A cutout 16b is provided on the side surface of the guide member 16 opposite to the sliding surface 16a.
(4) A guide groove 18 for guiding the guide member 16 by directly or indirectly contacting the sliding surface 16a is provided on the back surface of the movable stage 14.
(5) A feeding device 20 for sliding the movable stage 14 along the surface of the fixed stage 12 is provided on the side surface of the fixed stage 12 and the movable stage 14.
Hereinafter, embodiments of the stage mechanism of the present invention will be specifically described with reference to the drawings as appropriate.

1. Basic Configuration The basic configuration of the stage mechanism, as illustrated in FIG. , a flat stage mechanism 10 that is fixed.
The stage mechanism is characterized in that it includes at least configurations (1) to (5).

2. Configuration (1)
Configuration (1) is a configuration requirement that stipulates that an elongated guide member 16 is provided on the surface of the fixed stage 12, as shown in FIG.
Note that the surface of the fixed stage means the plane on the side on which the movable stage is placed, and the back surface of the fixed stage means the plane on the opposite side.

1) Fixed Stage Here, the fixed stage is a flat member that serves as the base of the stage mechanism.
Therefore, the shape of the fixed stage is not particularly limited as long as it is a flat plate, but the planar shape is usually circular, elliptical, triangular, quadrilateral, polygonal (for example, pentagon to decagon), or convex. It is preferable to have at least one of a shape, a concave shape, a T-shape, an L-shape, an H-shape, etc.
The reason for this is that by adopting such a planar shape, it is easy to manufacture even if it is small, and the stage surface can be widened, so that the movable stage (described later) can be stably placed and slides. This is because it can be done.
Therefore, it is particularly preferable that the fixed stage has a rectangular planar shape.

Further, it is preferable that the maximum diameter of the planar shape of the fixed stage is normally within the range of 20 to 200 mm.
The reason for this is that by having such a maximum diameter, a movable stage (described later) can be stably mounted, and the sliding distance can be increased.
Therefore, it is more preferable that the maximum diameter of the planar shape of the fixed stage is within the range of 30 to 150 mm, and even more preferably within the range of 40 to 100 mm.
Note that the maximum diameter of the planar shape can be defined as the diameter of the circumscribed circle of the planar shape.

Further, it is preferable that the thickness of the fixed stage is usually within the range of 2 to 30 mm.
The reason for this is that by having such a thickness, it is possible to have sufficient strength to support the movable stage and to easily create a thinner stage mechanism.
Therefore, the thickness of the fixed stage is more preferably within the range of 3 to 25 mm, and even more preferably within the range of 5 to 20 mm.

Furthermore, the constituent material of the fixed stage is not particularly limited as long as it has the strength to support the movable stage, but it is usually aluminum (including alumite-treated aluminum with an anodized film formed on the surface). ), copper, brass, iron, nickel, magnesium, tungsten, titanium, ceramic, polymer resin material, etc.
The reason for this is that such constituent materials are excellent in light weight, corrosion resistance, abrasion resistance, processability, thermal conductivity, decorativeness, economic efficiency, and the like.
Therefore, as a constituent material of the fixed stage, alumite-treated aluminum is particularly preferable because it has excellent electrical insulation properties in addition to the above-mentioned properties.

2) Movable Stage In addition, as shown in FIG. 1, the movable stage 14 is a flat member that moves parallel to the fixed stage 12, and is capable of moving a predetermined workpiece (not shown) on its surface. It has a structure that can be fixed, and is a member that slides linearly along the surface of the fixed stage 12 by a feed screw member 21, which will be described later.
Therefore, as shown in FIG. 1, it is preferable that the movable stage 14 has a screw hole as a workpiece fixing hole 14d on its surface side.
In addition, it is preferable that the shape of the movable stage, the maximum diameter of the planar shape, the thickness, the constituent materials, etc., be basically the same as that of the fixed stage, but the use environment, required accuracy, purpose of use, etc. should be taken into consideration. It is also preferable to have different configurations.

3) Guide member As shown in FIG. 1, the guide member 16 is a member that guides the slide of the movable stage 14, is fixed so as to protrude from the surface of the fixed stage 12, and extends along the sliding direction. It is an elongated member provided.
Therefore, by providing such a guide member, play such as yawing can be effectively controlled even when the feed device is installed on a side surface parallel to the sliding direction of the stage mechanism. , the movable stage can be slid with high precision.
Here, the fixing stage and the guide member can be attached using known methods such as adhesion, fitting, and screw fixation.

Further, it is preferable that the protruding height of the guide member with respect to the fixed stage is usually set to a value within the range of 1 to 20 mm.
The reason for this is that by having such a protruding height, the guide member can effectively contact the guide groove, and the stage mechanism can reduce friction during sliding, allowing the stage mechanism to slide with less force. This is because it can be done as follows.
Therefore, it is more preferable that the protrusion height of the guide member is within the range of 2 to 15 mm, and even more preferably within the range of 3 to 10 mm.

Further, it is preferable that the guide member is at least two metal members whose sliding surfaces face each other at a predetermined interval.
Specifically, the metal member is preferably made of at least one metal such as stainless steel, aluminum, copper, brass, iron, nickel, magnesium, tungsten, and titanium.
The reason for this is that by using such a metal member, play such as yawing can be effectively controlled for a longer period of time since it has excellent strength and wear resistance.
The sliding surface can effectively abut against the guide groove, making it possible to more firmly sandwich the movable stage, ensuring precise movement, and making it easier to downsize the stage mechanism itself. It's for a reason.

Further, it is preferable that the distance between the sliding surfaces, which is the distance between the opposing movable stage and the fixed stage, is usually within the range of 10 to 150 mm.
The reason for this is that by setting such an interval, it is possible to effectively suppress the occurrence of yawing, etc., and to slide the movable stage with higher precision.
Therefore, the distance between the opposing sliding surfaces is more preferably within the range of 15 to 100 mm, and even more preferably within the range of 20 to 50 mm.

Further, as shown in FIG. 2(a), the length L (mm) of the guide member 16 in the sliding direction is preferably set to a value within the range of 10 to 150 mm.
The reason for this is that with such a length, the surface in contact with the guide groove can be made wider in the sliding direction, ensuring a distance that allows for sufficient precision movement. .
Therefore, it is more preferable that the length L of the guide member is within the range of 15 to 100 mm, and even more preferably within the range of 20 to 50 mm.

Further, as shown in FIG. 2(a), it is preferable that the width Wa of the guide member 16 in the direction orthogonal to the sliding direction is normally within the range of 2 to 20 mm.
The reason for this is that by having such a width, sufficient strength can be obtained when sliding in the guide groove, and occurrence of yawing etc. can be more effectively suppressed.
Therefore, it is more preferable to set the width Wa of the guide member to a value within the range of 3 to 15 mm, and even more preferably to a value within the range of 4 to 10 mm.

Further, it is preferable that the thickness of the guide member in the vertical direction is usually within the range of 3 to 25 mm.
The reason for this is that by having such a thickness, it is possible to easily protrude from the surface of the fixed stage and make it contact more firmly with the guide groove.
Therefore, the thickness of the guide member is more preferably within the range of 4 to 20 mm, and even more preferably within the range of 5 to 15 mm.

4) Fitting groove In addition, as shown in FIG. 1 etc., when the guide member 16 is provided on the surface of the fixed stage 12, the fixed stage 12 has a fitting groove in which the guide member 16 is fitted on the surface side. 12a, and a guide fixing member 13 that presses and fixes the guide member 16 on the side surface of the fitting groove 12a parallel to the sliding direction.
More specifically, the guide fixing member 13 is screwed into a screw hole 12c serving as a horizontal hole passing through the side surface of the fitting groove 12a and the side surface of the fixed stage 12 from the outside of the fixed stage 12 toward the inside. , it is preferable to use a set screw-like member for fixing the guide member 16.
The reason for this is that the mounting position of the guide member can be positioned with higher accuracy with respect to the fixed stage.
With this configuration, the guide member can be more firmly fixed to the fixed stage.

3. Configuration (2)
Configuration (2) is a configuration requirement that stipulates that a sliding surface 16a is provided on one side surface of the guide member 16 parallel to the sliding direction, as shown in FIG.
That is, such a guide member is characterized in that a flat sliding surface that directly or indirectly contacts the guide groove is provided on a side surface parallel to one sliding direction.
Therefore, with this configuration, the guide member can be brought into surface contact with the guide groove, and play such as yawing can be stably controlled regardless of the sliding state. .

4. Configuration (3)
Configuration (3) is a configuration requirement that stipulates that a cutout 16b is provided on the side surface of the guide member 16 opposite to the sliding surface 16a, as shown in FIG.
That is, the guide member is characterized in that a predetermined constriction is provided along the sliding direction on the side opposite to the sliding surface.
Therefore, with this configuration, the planar shape of the guide member can be made into a comb-like shape, and the comb tooth portion plays the role of a rib, so that the guide member does not fall over in the width direction. It can effectively prevent deformation.
Further, it is possible to easily form a portion where the guide member and the guide groove are not in contact with each other, and by concentrating pressure on the contact portion, it is possible to effectively restrict play such as yawing.

Specifically, as shown in FIGS. 2(a) to 2(c) and further, as shown in FIG. 2(d), which is a modification of FIG. 2(a), the planar shape of the punched portions (16b to 16b'') is , a semicircular shape, a rectangular shape, a triangular shape, a polygonal shape (eg, pentagon to decagon), etc. are preferable.
The reason for this is that by adopting such a planar shape, the cutout portion can be formed with higher precision, and play such as yawing can be more stably controlled.
Furthermore, the degree of freedom in the shape and arrangement of the guide member can be improved by changing the planar shape and number of the cutout portions, and the guide member can be further miniaturized.
Note that the planar shape of the punched portion in the present invention is defined as the virtual straight line when the guide member is cut along a horizontal plane and an imaginary straight line is brought into contact with the side surface of the guide member on the side of the punched portion on the horizontal plane. and a guide member.

Furthermore, as shown in FIG. 2(e), it is preferable that the planar shape of the cutout portion 16b''' is a semi-elongated hole shape along the sliding direction of the movable stage.
The reason for this is that by providing a cutout with a planar shape obtained by dividing such an elongated hole shape in half, even if the thin wall portion caused by the cutout becomes relatively wide in the sliding direction, the guide This is because the member can be effectively prevented from deforming.
This is because such an elongated hole shape can reduce the volume of the guide member, thereby reducing the weight and further improving the operability.
Furthermore, for example, even when a movable pressing member described below is provided, the guide member and the pressing member can be slid while being adjacent to each other by using the semi-elongated hole-shaped cutout. be.

Also, as shown in Fig. 2(a), when the length of the guide member is L (mm), the cutout of a predetermined planar shape (semicircular, rectangular, triangular, polygonal) in the sliding direction. Preferably, the length La (mm) is within the range of 0.1L to 0.9L.
The reason for this is that by making the length of the cutout (semicircular, rectangular, triangular, polygonal) as described above, it is possible to maintain sufficient strength for sliding in the guide groove, and the space of the cutout can be effectively used. This is because it can be used to make it more compact.
Therefore, it is more preferable to set the length La of the predetermined cutout part to a value within the range of 0.15L to 0.7L, and even more preferably to a value within the range of 0.2L to 0.5L.

Further, as shown in Fig. 2(e), when the length of the guide member is L (mm) and the planar shape of the cutout is a half-elongated hole shape, the length La' of the half-elongated hole shape is The amount is preferably 0.5L to 0.9L.
The reason for this is that by forming the semi-elongated hole shape with such a length, the stress generated in the guide member can be more widely dispersed, and deformation of the guide member can be more effectively prevented.
Furthermore, for example, even when a movable pressing member, which will be described later, is provided, it is possible to slide stably, and the sliding distance in a stable state can be made longer.
Therefore, the length La' of the semi-elongated hole shape is more preferably 0.55L to 0.85L, and even more preferably 0.6L to 0.8L.

In addition, the position where the cutout is placed is not particularly limited as long as it is on the side opposite to the sliding surface, but the distance between the imaginary center line in the length direction of the guide member and the imaginary center line in the length direction of the cutout part is determined. is preferably within the range of 0 to 50 mm.
The reason for this is that by arranging the slider at such a position, it is possible to more effectively prevent the magnitude of the generated yawing or the like from varying depending on the sliding direction.
Therefore, it is more preferable that the distance between the longitudinal imaginary center line of the guide member and the longitudinal imaginary center line of the cutout part be within 40 mm, and even more preferably within 30 mm.
When the planar shape of the punched part is a semi-elongated hole shape, from the viewpoint of ensuring a sliding distance on both sides, the virtual center line in the length direction of the guide member and the virtual center line in the length direction of the punched part It is preferable that the distance is within 20 mm, more preferably within 15 mm, and even more preferably within 10 mm.

Further, as shown in FIG. 2(a), the width of the guide member 16 in the direction orthogonal to the sliding direction is Wa (mm), and the width of the cutout in the direction orthogonal to the sliding direction is Wb (mm). In this case, it is preferable that the following relational expression (1) is satisfied.

The reason for this is that with this configuration, it is possible to maintain sufficient strength to slide through the guide groove, and the space in the cutout can be used effectively to make it more compact. be.
Therefore, it is more preferable that Wb satisfies the following relational expression (1'), and even more preferable that the following relational expression (1'') is satisfied.

Further, as shown in FIG. 2(d), the guide member has a hole on the side opposite to the sliding surface 16a, which is different from the above-described cutout 16b (sometimes referred to as a first cutout). Preferably, one or more second cutouts 16c are provided.
The reason for this is that by having the second cutout, the degree of freedom in the shape and arrangement of the guide member is further improved, and the guide member can be more easily miniaturized.
On the other hand, if an excessively large number of second cutouts are provided, the strength of the guide member may decrease or it may become difficult to form them with high precision.
Therefore, it is preferable that the number of second punched portions be 8 or less, more preferably 6 or less, and still more preferably 4 or less.
Although it is preferable that the configuration of the second cut-out part is basically the same as the configuration of the first cut-out part, it is also preferable that the structure of the second cut-out part is different depending on the aspect of the arrangement location.

Moreover, it is preferable that the second cutout is provided at least at one end of the guide member.
As shown in FIG. 2(d), the second cutout 16c is preferably provided along the stage fixing hole 12d provided in the fixed stage 12.
The reason for this is that with this configuration, even when using a longer guide member, it is possible to more effectively prevent interference with the stage fixing hole, and it is also possible to stabilize the guide member over a longer distance. This is because it can be slid easily.
Therefore, it is more preferable that the second cutout portions be provided at both ends of the guide member.

Here, the state in which the second cutout is arranged along the stage fixing hole means, for example, that the shortest distance between the stage fixation hole and the second cutout is 0.1 This shows the case where the distance is within the range of 10 mm.
That is, by setting such a distance, the guide member can be disposed close to the outer edge of the movable stage, and the entire stage can be further miniaturized.
Therefore, it is more preferable to arrange the stage fixing hole and the second cutout so that the distance between the respective side surfaces is within the range of 0.3 to 5 mm, and is preferably within the range of 0.5 to 3 mm. It is more preferable to arrange the values within the range.

Further, in the case where the guide member is provided with a second cutout, it is preferable that the second cutout is provided at a position symmetrical to both ends with respect to the first cutout.
The reason for this is that the amount of deformation of the guide member can be made to be the same regardless of the sliding direction, and the movable stage can be slid more stably.

Further, as shown in FIG. 2(d), when the second cutout 16c is provided at the end of the guide member 16, the end of the guide member 16 and the end of the second cutout 16c It is preferable that the length Lb (mm) between the two parts is a value within the range of 0.05L to 0.3L.
The reason for this is that by having such a length, it is possible to prevent the guide member from shifting in the sliding direction, and it is also possible to prevent deformation of the guide member more effectively.
Therefore, it is more preferable to set the length Lb between the end of the guide member and the end of the second cutout to a value within the range of 0.08L to 0.25L, and more preferably within the range of 0.1L to 0.2L. It is more preferable to set the value within the range.

5. Configuration (4)
As shown in FIG. 1, configuration (4) includes a guide that directly or indirectly contacts the sliding surface 16a on the back surface of the movable stage 14 of the stage mechanism 10 to guide the movement of the guide member 16. This is a structural requirement specifying that the groove 18 be provided.
That is, the guide groove is provided on the back surface of the movable stage, and is a part that straddles the guide member and comes into direct or indirect contact with the guide member to precisely regulate the sliding direction of the movable stage.
Specifically, it is preferable that the groove be formed by a groove carved linearly along the sliding direction of the movable stage.

In addition, in the plane perpendicular to the sliding direction, the cross-sectional shape of the guide groove is at least rectangular, semicircular, triangular, polygonal (for example, penta- to decagonal), trapezoidal, convex, concave, etc. It is preferable to use one.
The reason for this is that the slide of the movable stage can be more precisely regulated by effectively coming into contact with the guide member.

6. Configuration (5)
In configuration (5), as shown in FIG. 1, a feeding device 20 for sliding the movable stage 14 along the surface of the fixed stage 12 is provided on the side surface of the fixed stage 12 and movable stage 14 of the stage mechanism 10. This is the configuration of the specified stage mechanism.
Here, the side surfaces of the fixed stage and the movable stage refer to either side surfaces parallel to the sliding direction of the stage mechanism or side surfaces perpendicular to the sliding direction.
Hereinafter, unless otherwise specified, a case will be described as an example of the present invention in which the feeding device is provided on a side surface parallel to the sliding direction of the stage mechanism.
Hereinafter, the components will be explained in detail based on a configuration example of the feeding device.

1) Feeding Device The feeding device is not particularly limited as long as it is configured to linearly move the movable stage along the surface of the fixed stage, but it is a feed screw member that moves by rotating a spindle screwed into a female thread. (hereinafter sometimes referred to as a microhead).
More specifically, as shown in FIG. It is preferable that the feed screw member 21 is supported by the second connecting member 24 and rotatably supported by the second connecting member 24 .
The reason for this is that by rotating the spindle of the feed screw member, the movable stage can be slid more accurately even with a simple and compact configuration.

Here, the feed screw member is a member in which a male thread provided on the spindle and a female thread provided on the sleeve are screwed together and move along the axis of the spindle.
Specifically, as shown in FIG. 1, a spindle 21a having a male thread, a sleeve 21b directly or indirectly screwed onto the spindle 21a, and a part of the sleeve 21b are inserted. , and a thimble 21c that can rotate about the sleeve 21b as a rotation axis and that is partially connected to one end of the spindle 21a.
The reason for this is that even with a simple configuration, the spindle can be moved more easily and accurately.

Further, it is preferable that the spindle has a smooth circumferential surface on its distal end side and rotates while abutting a part of the inner wall of the sleeve.
The reason for this is that by using the smooth circumferential surface as a guide, the linearity of the spindle can be further improved, and it is easier to insert the spindle into the bearing member.

Further, it is preferable that the feed screw member is provided with a backlash absorbing member inside the sleeve.
The reason for this is that by having the backlash absorbing member in the sleeve, while the spindle is rotating, it can absorb stress while exhibiting a predetermined slipperiness, without hindering the rotation of the spindle. This is because the occurrence of yawing can be more effectively controlled.
On the other hand, when the spindle stops rotating, it deforms appropriately to suppress the backlash of the movable stage, and is sufficiently solidified to maintain a firmly fixed state, resulting in a so-called "natural lock". This is because they can gain "sexuality".

In addition, the constituent material of the backlash absorbing member is preferably an organic resin component, such as amide resin (nylon resin), urethane resin, ester resin, carbonate resin, acrylic resin, olefin resin, rubber resin (natural resin), etc. rubber, styrene rubber, butadiene rubber, styrene-butadiene-styrene block copolymer (SBS), styrene-isoprene-styrene block copolymer (SIS), styrene-ethylene-butylene-styrene block copolymer (SEBS), etc.), imide resin, amide resin, etc. It is preferable that the resin material is made of at least one of imide resin, phenoxy resin, polyether sulfone resin, polyether ether ketone resin, silicone resin, epoxy resin, airate resin, guanamine resin, urea resin, and phenol resin.
The reason for this is that if the backlash absorbing member is made of such a thermoplastic resin material or thermosetting resin material, the moldability, backlash absorbability, etc. of the backlash absorbing member can be improved.
Therefore, it is particularly preferable that the constituent material of the backlash absorbing member is at least one of amide resin (nylon resin), urethane resin, and rubber-based resin.
The reason for this is that it is possible to further improve the balance between spindle mobility and fixation, and it also has excellent durability.

Further, it is preferable that the backlash absorbing member has a metal protective cover around the backlash absorbing member.
That is, it is preferable to use a metal protective cover that has a cap-shaped accommodating portion that accommodates a resin-made backlash absorbing member and a threaded portion having a threaded groove corresponding to the male threaded portion of the spindle.
Preferably, a backlash absorbing member made of resin is inserted into the cap-shaped accommodating portion, and the opening on the inserted side is bent.
The reason for this is that by providing the metal protective cover in this way, the fixation of the backlash absorbing member to a predetermined location of the sleeve is further improved.
Furthermore, the durability of the backlash absorbing member is improved, and excellent spindle mobility and fixation can be obtained for a longer period of time.

Further, it is preferable that the feed screw member is provided with a metal nut member inside the sleeve, which directly or indirectly contacts the backlash absorbing member.
The reason for this is that with such a configuration, the backlash absorbing member and the metal nut function as a double nut, making it possible to more effectively reduce the backlash of the spindle.

2) Bearing Member As shown in FIG. 1, it is preferable that the feeding device 20 includes at least thrust bearings (26a, 26b) as the bearing member 26.
The reason for this is that by providing such a bearing member, play in the thrust direction along the axial direction of the spindle can be effectively restricted.
Therefore, as shown in FIG. 1, the bearing member 26 connects the first thrust bearing 26a and the first thrust bearing 26a adjacent to the first thrust bearing 26a so as to sandwich the second connection member 24 along the axial direction of the spindle. It is particularly preferable to have two thrust bearings 26b.

3) Preload member As shown in FIG. 1, it is preferable that the feeding device 20 is provided with a preload member 26c that applies a preload to the bearing member 26 along the axial direction.
The reason for this is that with such a configuration, the bearing member 26 can be pressed against the end of the feed screw member 21 with a predetermined pressure, and play in the axial direction can be more easily reduced. This is because it can be done.

Specifically, it is preferable that the preload member has a head portion that comes into contact with the bearing member, and is a screw member that is screwed into the tip of the spindle along the axial direction.
That is, it is preferable that the bearing member be held between the spindle and the screw member, with the screw head being used as a presser.
The reason for this is that the preload can be adjusted by adjusting the amount of tightening of the screw member, and play in the thrust direction of the spindle can be more effectively suppressed.

4) First connection member As shown in FIG. 3(a), the first connection member 22 has a structure such as a sleeve 21b having a nut member (not shown) screwed with the feed screw member 21, etc. Although it is not particularly limited as long as it supports the stage 12 laterally, for example, it is preferable to use a member having a through hole along the sliding direction as the fitting hole of the sleeve 21b.
More specifically, it has a fixed part for screwing the first connecting member 22 to the fixed stage 12 and a gripping part for the sleeve 21b, and when the stage mechanism 10 is viewed from above, it has a rectangular shape, an L-shape, It is preferable to use a convex or concave member.
The reason for this is that with such a configuration, the feed screw member can be more easily fixedly supported on the side surface of the fixed stage.
Here, as shown in FIG. 1, the fixing stage 12 and the first connecting member 22 are not particularly limited as long as they do not come off due to the stress caused by sliding, but they are usually fixed by screw members 22a. Preferably.
On the other hand, it is particularly preferable that the first connecting member 22 and the sleeve 21b are usually fixed by pressing with a screw member 22b.

Further, as shown in FIG. 3(a), the dimensions of the gripping portion of the sleeve 21b in the first connecting member 22 are usually such that the length La in the axial direction is within the range of 4 to 40 mm, and the width Lb is within the range of 4 to 40 mm. It is preferable to set the value within the range of 4 to 40 mm.
The reason for this is that by having such lengths and widths, play such as yawing can be more effectively restricted and the movable stage can be slid with higher precision.
Therefore, it is more preferable to set the length in the axial direction to a value within the range of 5 to 35 mm, and the width to a value within the range of 5 to 35 mm, and the length in the axial direction to a value within the range of 6 to 30 mm. It is more preferable that the width is within the range of 6 to 30 mm.

The constituent material of the first connecting member is not particularly limited, but may include special purpose steels such as SUS, SUH, SUJ, SUP, and SUM, and tool steels such as SK, SKS, SKD, and SKT. , SKH, etc. is preferable.
Among these, it is more preferable to use at least one of SUS303, SUS440, SKS, and SKD, which is highly versatile and has excellent durability and mechanical strength.

5) Second connection member The second connection member 24 is not particularly limited as long as it can be configured to rotatably support the spindle 21a on the side of the movable stage 14, as shown in FIG. 3(b). For example, it is preferable to use a member having a bearing member 26 that rotatably supports the spindle 21a and a through hole extending along the sliding direction as a fitting hole for the bearing member 26.
More specifically, it has a fixed part for attaching the second connecting member 24 to the movable stage 14 and a gripping part for the bearing member 26, and when the stage mechanism 10 is viewed from above, it has a rectangular shape, an L-shape, or a convex shape. It is preferable to use a mold-shaped or concave-shaped member.
The reason for this is that with such a configuration, the spindle of the feed screw member can be more easily rotatably supported on the side surface of the movable stage via the bearing member.
Here, as shown in FIG. 1, the movable stage 14 and the second connection member 24 may be attached by any method as long as they do not come off due to the stress caused by sliding, but they are usually fixed by a screw member 24a. Preferably.

Further, as shown in FIG. 3(b), as for the dimensions of the portion of the second connecting member 24 that grips the bearing member 26, the length Lc in the axial direction is usually set to a value within the range of 4 to 40 mm. It is preferable that the width Ld in the direction orthogonal to the axial direction is within the range of 4 to 40 mm.
The reason for this is that by having such lengths and widths, play such as yawing can be effectively restricted and the movable stage can be slid with higher precision.
Therefore, it is more preferable to set the length in the axial direction to a value within the range of 5 to 35 mm, and the width to a value within the range of 5 to 35 mm, and the length in the axial direction to a value within the range of 6 to 30 mm. It is more preferable that the width is within the range of 6 to 30 mm.

The constituent material of the second connecting member is not particularly limited, but may include special purpose steels such as SUS, SUH, SUJ, SUP, and SUM, and tool steels such as SK, SKS, SKD, and SKT. , SKH, etc. is preferable.
Among these, it is particularly preferable to use SUS303, SUS440, SKS, and SKD.

6) Installation positions of the first connection member and the second connection member The installation positions of the first connection member and the second connection member are not particularly limited as long as they are on the side of the stage mechanism, but as shown in FIG. , it is preferable that a predetermined relational expression be satisfied.
Specifically, as shown in FIG. 5, when the sliding direction is the left-right direction and the side surface on the first connecting member side is the reference position P0 (mm), the distance P1 (mm) to one end of the guide member is mm), the distance P4 (mm) to the other end of the guide member, the distance P2 (mm) to the corner of the first connecting member on the P0 side, and the distance P2 (mm) to the corner of the second connecting member on the P0 side It is preferable that the distance P3 (mm) to the corner portion satisfies the following relational expression (2).

The reason for this is that the feeding mechanism can more effectively restrict play such as yawing that occurs when sliding the movable stage, and can move the movable stage with higher precision.

Further, it is preferable that the distance P2 from P0 to the corner of the first connecting member on the P0 side is normally set to a value within the range of 5 to 80 mm.
The reason for this is that by adopting such a configuration, the arrangement of the feeding device is better balanced and the feeding device can be further downsized.
Therefore, it is more preferable that the distance P2 from P0 to the L-shaped corner of the first connecting member is within the range of 8 to 60 mm, and even more preferably within the range of 10 to 40 mm.

Further, it is preferable that the distance P3 from P0 to the corner of the second connecting member opposite to the P0 side is usually set to a value within the range of 10 to 150 mm.
The reason for this is that by adopting such a configuration, the arrangement of the feeding device is better balanced and the feeding device can be further downsized.
Therefore, it is more preferable that the distance P2 from P0 to the L-shaped corner of the first connecting member is within the range of 13 to 130 mm, and even more preferably within the range of 15 to 100 mm.

7. Other configurations (1) Pressing member As shown in FIG. 1, the stage mechanism of the present invention preferably includes a pressing member 15 that connects the fixed stage 12 and the movable stage 14 with a predetermined pressure.
The reason for this is that with this configuration, it is possible to apply an appropriate amount of force to press the fixed stage and movable stage against each other, making it more effective to prevent side-to-side misalignment and yawing when sliding. This is because it can be prevented.

Further, when the stage mechanism includes a pressing member, it is preferable that the pressing member is arranged along the cutout.
The reason for this is that by arranging the guide member and the pressing member in this manner, the area occupied by the pressing member and the guiding member on the movable stage surface can be reduced by arranging the guide member and the pressing member adjacent to each other. This is because the entire stage mechanism can be more easily miniaturized.
Furthermore, it is possible to press the fixed stage and the movable stage near the guide member, ensuring precise movement even when using a small screw member, and reducing the size of the stage mechanism itself. This is because it can be done easily.

Here, the state in which the pressing member is arranged along the cutout means that the pressing member and the cutout are arranged so that the shortest distance between the respective side surfaces is within the range of 0.1 to 10 mm. The case where it is placed in is shown.
That is, by setting such a distance, the fixed stage and the movable stage can be more effectively pressed by the pressing member, and both operability when sliding the movable stage and stability of the sliding operation are achieved. This is because it can be done.
Therefore, it is more preferable to arrange the pressing member and the cutout so that the distance is within the range of 0.3 to 5 mm, and it is even more preferable to arrange the pressing member and the cutout so that the distance is within the range of 0.5 to 3 mm. preferable.

Further, it is preferable that the pressing member is a screw member having a collar at one end.
Specifically, it is preferable that the pressing member is a flat screw, a countersunk screw, a round screw, a cap bolt, a hexagonal bolt, or the like.
The reason for this is that with this configuration, it is possible to use standard products that are generally commercially available, and the fixed stage and movable stage can be pressed down with a predetermined pressure with constant precision regardless of individual differences. This is because it can be done.

Further, the pressing force by the pressing member is preferably a value within the range of 0.1 to 30 N per unit area.
For example, if the area of the pressing member is 0.5 cm ² , the pressing force is preferably within the range of 0.2 to 60 N/cm ² .
The reason for this is that by using such a pressing force, it is possible to slide the movable stage with a lighter force, and it is also possible to further improve the sliding accuracy of the movable stage by pressing with a moderate force. .
Therefore, the pressing force applied by the pressing member is more preferably a value within the range of 0.5 to 25 N, and even more preferably a value within the range of 1 to 20 N per unit area.

Further, it is preferable that the stage mechanism of the present invention has a pressing groove that penetrates in the thickness direction in one of the fixed stage or the movable stage and allows the pressing member to pass therethrough.
More specifically, as shown in FIG. 1 etc., the pressing groove 11a penetrates the counterbore 11b in which the collar is embedded and the fixed stage 12 or the movable stage 14 in the thickness direction, and extends in the sliding direction. It is preferable to have the elongated hole portion 11c and the protection plate 15b filling the step of the counterbore portion 11b.
The reason for this is that by embedding the pressing member in the movable stage, the degree of freedom in arranging a given workpiece can be increased, and play in the thickness direction of the movable stage can be more effectively regulated. .
By having such a configuration, in combination with the effect of the guide member mentioned above, in addition to regulating play such as yawing, even though the feeding device is provided on the side of the stage mechanism, it is possible to control play in the thickness direction. This is because play can be effectively regulated.

Further, as shown in FIG. 1, the pressing member 15 penetrates in the thickness direction from the front side to the back side through the pressing groove 11a provided in the movable stage 14, and directly or directly on the front side of the fixed stage 12. It is preferable to use a fixed pressing member 15 (sometimes referred to as a fixed pressing member) that is indirectly fixed.
At this time, as shown in FIG. 1, it is preferable that the pressing member 15 is screwed into a screw hole 12b provided in the fixed stage 12 and fixed.
More specifically, it is preferable that the movable stage has an elongated hole passing through it, and that a counterbore and a protection plate are provided on the front side of the movable stage.
The reason for this is that with this configuration, even when the movable stage is slid, the position of the pressing member can be kept in a fixed place, and the loosening of the pressing member can be prevented. This is because it becomes easier to adjust the pressure of the pressing member.

On the other hand, as shown in the stage mechanism 40 of FIG. 6, a configuration in which the pressing member 15 passes through the pressing groove 11a provided in the fixed stage 12 in the thickness direction from the back side to the front side is also preferable.
A movable pressing member 15 (movable pressing member ) is preferable.
Specifically, as shown in FIG. 7(c), it is preferable that the pressing member 15 is screwed and fixed into a screw hole 14b provided in the movable stage 14.
More specifically, it is preferable that the fixed stage has an elongated hole passing through it, a counterbore recessed on the back side of the fixation stage, and a protection plate that fills the counterbore.
The reason for this is that with such a configuration, it is possible to press at the center of the movable stage regardless of the sliding state of the movable stage, and it is possible to slide with a stable force.
Further, since the pressing groove can be provided on the back side of the fixed stage, the surface of the movable stage can be used more widely.
Further, when the pressing member is a movable pressing member and the planar shape of the cutout is a semi-elongated hole shape, it is preferable that the movable pressing member slides along the cutout.
The reason for this is that with this configuration, the fixed stage and the movable stage can be pressed down with a more uniform force regardless of the sliding state.

Further, as shown in FIG. 1 and the like, it is preferable that the fixed stage 12 and the movable stage 14 are fixed so as to be slidable by being fastened together via a washer 15a.
The reason for this is that the contact area of the collar can be increased by the washer, and the pressing force for pressing the fixed stage and the movable stage can be adjusted more easily.

(2) Opening for attaching a workpiece In the stage mechanism, it is preferable to have an opening for attaching a workpiece inside the outer edge corresponding to the outline when viewed from above.
The reason for this is that by having such an opening, usability can be improved, while the stage device remains small. It is possible to determine the diameter etc.
More specifically, as shown in FIGS. 4(a) to 4(c), a transmission type is provided with an opening 32 for attaching a workpiece, consisting of a through hole 32a in the fixed stage 12 and a through hole 32b in the movable stage 14. A stage mechanism 30 is preferable.

Here, it is preferable that at least one of the through holes (32a, 32b) has an elongated hole shape having a long axis along the sliding direction.
The reason for this is that even if the positions of the fixed stage and the movable stage are shifted due to sliding, a wider area of the opening can be secured.

Further, the diameter (circular equivalent diameter) of the opening for attaching the workpiece in the direction perpendicular to the sliding direction is preferably set to a value within the range of 8 to 140 mm.
The reason for this is that, for example, when the guide members are arranged side by side at predetermined intervals, the area between the guide members can be used widely to create a large diameter opening.
Therefore, it is more preferable that the diameter of the through hole is within the range of 10 to 80 mm, and even more preferably within the range of 15 to 40 mm.

(3) Modification As a modification of the present invention, the stage mechanism is such that the feeding device is provided on the side surface perpendicular to the sliding direction of the stage mechanism instead of disposing it on the side surface parallel to the sliding direction of the stage mechanism. It is preferable.
More specifically, as shown in FIGS. 7(a) to 7(c), a first connecting member 22' fixed to protrude from one side surface perpendicular to the sliding direction of the fixed stage 12, and a movable stage 14, and a feed screw member 21' supported by the first connecting member 22' and rotatably supported by the second connecting member.
At this time, as shown in FIG. 7(a), it is preferable that the second connecting member 24' is fixed to the movable stage 14 by a screw member 24a'.
The reason for this is that with this configuration, it is possible to suppress the occurrence of yawing when sliding the movable stage and further improve the linearity.
As shown in FIGS. 7(b) and 7(c), even if the rotation axis of the spindle 21a of the feed screw member 21' is arranged so as to overlap the stage mechanism, the through hole of the fixed stage 12 32a and the through hole 32b of the movable stage 14 can be provided more easily.
Note that the features already described above can be applied to other contents, and a repeated explanation will be omitted.

[Second embodiment]
The present invention is not limited to the first embodiment in which the guide member is provided on the surface of the fixed stage, but may be provided in an embodiment in which the guide member is provided on the back surface of the movable stage.
That is, as shown in FIG. 8, the second embodiment is a flat stage mechanism 50 that includes a pair of fixed stages 12 and a movable stage 14, and has the following configurations (1') to ( 5').
(1') A long guide member 16 is provided on the back side of the movable stage 14.
(2') A sliding surface 16a is provided on one side surface of the guide member 16.
(3') A cutout 16b''' is provided on the side surface of the guide member 16 opposite to the sliding surface 16a.
(4') A guide groove 18 is provided on the surface of the fixed stage 12 to guide the guide member 16 by directly or indirectly contacting the sliding surface 16a.
(5') A feeding device 20 for sliding the movable stage 14 along the surface of the fixed stage 12 is provided on the side surface of the fixed stage 12 and the movable stage 14.
In other words, with this configuration, it is possible to perform precise movement, and the load on the fixed stage due to position adjustment of the guide member is reduced, so that the stage mechanism can be adjusted more smoothly. This is because it is possible.
This is because the degree of freedom can be further improved by arranging the guide member on the fixed stage or on the movable stage depending on the environment and purpose of use of the stage mechanism.
Note that in this embodiment, explanations that overlap with those in the first embodiment will be omitted as appropriate.

1) Guide Member In the stage mechanism of this embodiment, an elongated guide member is fixed so as to protrude from the back surface of the movable stage.
That is, since the guide member slides together with the movable stage, it is preferable that the stage fixing hole is a non-penetrating screw hole that is fixed from the back side of the fixed stage so as not to interfere with the guide groove.

2) Fitting groove In addition, when the guide member is provided on the back side of the movable stage as in this embodiment, the movable stage 14 has a fitting groove 14a on the back side, as shown in FIG. It is preferable to have a guide fixing member 13 on a side surface of the fitting groove 14a parallel to the sliding direction.
The reason for this is that with this configuration, even when the guide member is attached to a movable stage, the sliding surface can be brought into contact with the guide groove more effectively, allowing precision movement. This is because the stage mechanism itself can be easily downsized.

3) Guide Groove Furthermore, the stage mechanism of this embodiment has a mode in which a guide groove is provided on the surface of the fixed stage to directly or indirectly contact the sliding surface and guide the movement of the guide member. be.
The reason for this is that by adopting such an aspect, there is no need to apply a load to the fixed stage once positioned in order to adjust the position of the guide member.

[Third embodiment]
The third embodiment is a method of using the stage mechanism of the first embodiment, which is characterized by having the following steps (A) to (C).
(A) Step of placing the fixed stage and the movable stage at the mounting positions.
(B) A step of fixing a predetermined workpiece on the surface of the movable stage.
(C) A step of sliding the movable stage along the surface of the fixed stage using the feeding device to move a predetermined workpiece.
Hereinafter, an embodiment of the method of using the stage mechanism of the present invention will be specifically explained with reference to the flowchart of FIG. 9 as appropriate, but explanations of parts that overlap with the first embodiment will be omitted as appropriate. do.

1. Process (A)
Step (A), as indicated by the symbol S1 in FIG. 9, is a step of placing the stage mechanism at the location where it will be used.
That is, as for the fixing method at the mounting position, a general fixing method can be used and is not particularly limited, but as shown in FIG. It is preferable to fix the screws from the surface side to the screw holes provided at the positions.
The reason for this is that the stage mechanism can be placed with higher accuracy.
On the other hand, it is also preferable to provide a female screw in the stage fixing hole and fix the stage with the screw from the back side.

2. Process (B)
Step (B), as indicated by the symbol S2 in FIG. 9, is a step of fixing a predetermined workpiece to the surface of the movable stage.
A general fixing method can be used for fixing the predetermined workpiece, and is not particularly limited. As an example, as shown in FIG. is provided, and it is preferable to fix it with screws from the front side.
The reason for this is that even when the movable stage is slid, play such as yawing of the predetermined workpiece can be easily restricted.

Here, the predetermined work is not particularly limited as long as it can be placed on the surface of a movable stage and moved precisely, but examples include cameras, optical lenses, polarizing plates, laser oscillators, drills, measuring instruments, measurement probes, etc. Preferably, it is a semiconductor wafer, an object to be measured, an object to be processed, or the like.
The reason for this is that such a type can be used in many fields that require precision movement.

3. Process (C)
Step (C) is a step of sliding a movable stage using a feeding device to move a predetermined workpiece fixed to the movable stage.
Specifically, first, as shown by reference numeral S3 in FIG. 9, a feeding device fixed to the side surface of the fixed stage and the movable stage is driven to move the spindle along the axial direction.
Then, as indicated by reference numeral S4, the spindle moves to indirectly press the movable stage coupled to the spindle, causing it to slide along the surface of the fixed stage.
Then, as shown by reference numeral S5, a predetermined work fixed to the movable stage is moved together with the movable stage.
The reason for this is that by carrying out the process in this manner, the workpiece can be moved precisely using a small stage mechanism.

As described above, according to the stage mechanism and the method of using the stage mechanism of the present invention, miniaturization is easy and the workpiece can be moved precisely.
Therefore, it can be expected that cameras, microscopes, electrodes, lights, lenses, sensors, and the like can be fixed as predetermined workpieces and used as a stage mechanism that moves precisely.
In addition, by drilling holes through the workpiece in the stage, a camera, etc. fixed to the surface of the movable stage can be brought out to the fixed stage side without installing an arm on the side, allowing precise movement of a given workpiece. It is expected that it can be used as a small transmission-type stage.
By using a movable pressing member as the pressing member, it is possible to press at the center of the movable stage regardless of the sliding state of the movable stage, and it is expected that sliding can be performed with a stable force.
Furthermore, by making the planar shape of the cutout part into a semi-elongated hole shape along the sliding direction of the movable stage, even if the thin walled part caused by the cutout part becomes relatively wide, the guide member can It is expected that it will be possible to effectively prevent falling or deformation in the width direction.

10, 30, 40, 50: Stage mechanism 11a: Pressing groove 11b: Counterbore portion 11c: Elongated hole portion 12: Fixed stage 12a: Fitting groove 13: Guide fixing member 14: Movable stage 15: Pressing member 16: Guide member 16a: Sliding surface 16b: Cutout (first cutout)
16c: Second cutout 18: Guide groove 20: Feeding device 21, 21': Feed screw member 21a: Spindle 21b: Sleeve 21c: Thimble 22: First connecting member 24: Second connecting member 24a': Screw member 26 : Bearing member 26a: First thrust bearing 26b: Second thrust bearing 26c: Preload member 32: Opening for mounting workpiece

Claims (11)

A flat stage mechanism comprising a pair of fixed stages and a movable stage, the stage mechanism having the following configurations (1) to (5).
(1) A long guide member is provided on the surface of the fixed stage.
(2) A sliding surface is provided on one side of the guide member.
(3) A cutout is provided on the side surface of the guide member opposite to the sliding surface.
(4) A guide groove for guiding the guide member by directly or indirectly contacting the sliding surface is provided on the back surface of the movable stage.
(5) A feeding device that slides the movable stage along the surface of the fixed stage is provided on a side surface of the fixed stage and the movable stage. A flat stage mechanism comprising a pair of fixed stages and a movable stage, the stage mechanism having the following configurations (1') to (5').
(1') A long guide member is provided on the back surface of the movable stage.
(2') A sliding surface is provided on one side of the guide member.
(3') A cutout is provided on the side surface of the guide member opposite to the sliding surface.
(4') A guide groove for guiding the guide member by directly or indirectly contacting the sliding surface is provided on the surface of the fixed stage.
(5') A feeding device that slides the movable stage along the surface of the fixed stage is provided on a side surface of the fixed stage and the movable stage. comprising a pressing member that connects the fixed stage and the movable stage,
The pressing member passes through the pressing groove provided in the fixed stage in the thickness direction from the back side to the front side, is directly or indirectly fixed to the back side of the movable stage, and is fixed to the back side of the movable stage. 3. The stage mechanism according to claim 1, wherein the stage mechanism is a movable pressing member that moves horizontally within the range of the pressing groove as the stage mechanism slides. comprising a pressing member that connects the fixed stage and the movable stage,
The pressing member penetrates through the thickness direction from the front side to the back side through a pressing groove provided in the movable stage, and is fixed directly or indirectly to the front side of the fixed stage. The stage mechanism according to claim 1 or 2, characterized in that: 3. The stage mechanism according to claim 1, wherein the guide members are at least two metal members, each of which has its sliding surfaces facing each other at a predetermined interval. When the cutout is a first cutout, the guide member has one or more second cutouts different from the first cutout on the side opposite to the sliding surface. 3. The stage mechanism according to claim 1, further comprising a section. When the guide member is provided on the surface of the fixed stage, the fixed stage presses and fixes the guide member to a fitting groove into which the guide member is fitted and a side surface of the fitting groove. and a guide fixing member, and when the guide member is provided on the back surface of the movable stage, the movable stage has the fitting groove and the guide fixing member on the side surface of the fitting groove. 3. The stage mechanism according to claim 1, further comprising a fixing member. 3. The stage mechanism according to claim 1, further comprising an opening for attaching a workpiece inside the outer edge. The feeding device is supported by a first connecting member fixed to a side surface of the fixed stage, a second connecting member fixed to a side surface of the movable stage, and supported by the first connecting member, and is connected to the second connecting member. 3. The stage mechanism according to claim 1, further comprising a rotationally supported feed screw member. 3. When the guide member is cut along a horizontal plane, the planar shape of the cutout portion is a semi-elongated hole shape along the sliding direction of the movable stage. stage mechanism. A method of using the stage mechanism according to claim 1 or 2, comprising the following steps (A) to (C).
(A) A step of attaching the stage mechanism to a predetermined position.
(B) A step of fixing a predetermined workpiece on the surface of the movable stage.
(C) A step of sliding the movable stage along the surface of the fixed stage by the feeding device to move the predetermined workpiece.

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