201206851 六、發明說明： 【發明所屬之技術領域】 本發明係關於用於對脆性材料基板形成劃線之劃線裝 置與其劃線頭、保持具單元、保持具接頭。 【先前技術】 以往，在液晶顯示面板或液晶投影機基板等平面顯示 器等，係母玻璃基板於製造過程被貼合後被分斷為特定大 小之單個面板。於此母玻璃基板等之脆性材料基板之分斷 有劃線步驟與折斷步驟，在劃線步驟係使用劃線裝置。 圖1為顯示揭示於專利文獻i之劃線裝置之立體圖。 此劃線裝置100係移動台101沿一對之導引軌道i〇2a、i〇2b 於y軸方向被保持為可移動。滾珠螺桿1〇3係與移動台1〇1201206851 VI. Description of the Invention: [Technical Field] The present invention relates to a scribing apparatus for forming a scribe line for a brittle material substrate, a scribing head, a holder unit, and a holder joint. [Prior Art] Conventionally, a flat glass display panel such as a liquid crystal display panel or a liquid crystal projector substrate is bonded to a single panel having a specific size after being bonded to a manufacturing process. The breaking of the brittle material substrate such as the mother glass substrate has a scribing step and a breaking step, and a scribing device is used in the scribing step. Fig. 1 is a perspective view showing a scribing apparatus disclosed in Patent Document i. The scribing device 100 is a movable table 101 that is held movable along the pair of guide tracks i〇2a, i〇2b in the y-axis direction. Ball screw 1〇3 series and mobile station 1〇1
置1之上部設有拍攝脆性材料基& 107之對準標記之2台 之CCD攝影機1〇8。 於劃線裝置100 橋110跨越移動合 1〇〇沿X軸方向以支柱1 j jThe upper part of the set 1 is provided with two CCD cameras 1 to 8 for photographing the alignment marks of the brittle material base & 107. In the scribing device 100, the bridge 110 spans the movement 1 〇〇 along the X-axis direction with the pillar 1 j j
於劃線裝置之劃線帛】12 $過保持具接頭 1 11 a、1 1 1 b架設有 。劃線頭112可 移動。馬達1 1 4係 120安裝有 201206851 刀輪保持具（以下僅稱為「 專利文獻丄之保持具之圖，'圖圖2為顯示㈣ 一 為其立體圖。如此等圖所 不’保持具1 〇係大致圓筒形 之平坦部na、Ub^被設_構件，其—端大致正方形狀 平坦部之間具有”心軸之:二中心軸。保持具10於此 下端具有垂直於其面 之，於平坦部"a'Hb之 14具有例如輪徑2.5 mm '厚：V3。？:(亦稱^輪」) 狀，面係形成二：：之圓板狀之形 取两圓錐形’於中心具有貫通 ΓΛ盤通狀巾或隸。義14—彳刚罐丨3之銷 ]3保持割：之貫通孔保持為可旋轉。在將銷15插入銷槽 魂於而盘㉟1 4後’即使需要劃線輪之交換時亦不取下劃 線輪而與保持具一 ^ 定位用之安裝部16 ’保持I 1〇之另一端設有 具有傾斜部…及平Si 平行，且與下方之平；:。平坦部⑽係與保持具之軸 上部之安裝部ί6Α、—j 、Ub為垂直。保持具1〇係其 P 6為以磁性體金屬構成。 可能!^=2_以部設有使保持具1〇之升降動作為 馬達之電動y例如使用空氣壓控制之氣壓红或利用線性 適告之行重：降部等。劃線裝置係由升降部將劃線輪14以 圖於跪性材料基板之表面上轉動，形成劃線。 將保持具之保持具接頭120之圖，圖5為顯示 等圖所示，伴持：:：具接頭120之狀態之立體圖。如此 下方為保持=且:於上部具有轴承叫、⑽， 、、之保持部！22。於保持具接頭！20之 4 201206851 保持部12 2，、m -Underlined in the scribing device] 12 $ over the retainer joint 1 11 a, 1 1 1 b rack. The scribing head 112 is movable. The motor 1 1 4 series 120 is equipped with a 201206851 cutter wheel holder (hereinafter referred to as "the holder of the patent document 保持 , , ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 The substantially cylindrical flat portions na, Ub^ are provided as members, and the ends thereof have a substantially square-shaped flat portion having a "mandrel: two central axes. The holder 10 has a perpendicular to the face at the lower end thereof. The flat portion "a'Hb 14 has, for example, a wheel diameter of 2.5 mm 'thickness: V3.?: (also known as a ^ wheel)), and the surface is formed into two:: the shape of a circular plate takes two conical shapes The center has a through-sleeve-like towel or a shackle. The pin 14 of the 14 14-彳 丨 can can be kept. The through hole is kept rotatable. After inserting the pin 15 into the pin groove and the disk 351 4 'even When the exchange of the scribing wheel is required, the underline wheel is not removed and the other end of the mounting portion 16' for holding the positioning device 16' is provided with the inclined portion ... and the flat Si parallel and flat with the lower portion; The flat portion (10) is perpendicular to the mounting portions ί6Α, -j, Ub of the upper portion of the shaft of the holder. The holder 1 is P 6 It is possible to make a body metal. It is possible to make a motor y that uses a lifting and lowering operation of the holder as a motor, for example, a pneumatic pressure using air pressure control or a linear warning weight: a descending portion, etc. The wire device rotates the scribing wheel 14 on the surface of the inert material substrate by the lifting portion to form a scribe line. The figure of the holder connector 120 of the holder is shown in FIG. ::The perspective view of the state with the joint 120. The lower part is the hold = and the upper part has the bearing, the (10), and the holding part! 22. The holder of the holder! 20 of 4, 2012,068, 51, holding portion 12 2, m -
圖不形成有圓形之開口 1 2 3 ’其内側埋設有 石 124。艾 -tK 人於此開口 1 23之内部於從中心軸離開之位置 設置與中心軸垂直之平行銷125。平行銷125係圓柱之構 件接觸保持具1 0之傾斜部1 6a以定位保持具i 〇。將此保 、 女裝於保持具接頭1 2 0時，係如圖5所示將保持具 1〇從其安裳部16插入保持具接帛120之開〇 123。如此保 持具ίο之前端部受磁$ 124吸引，I傾斜#…接觸平行 銷125而被定位固定。 圖6為顯示於保持具接頭120安裝有保持具1〇之狀態 之局W面圖’圖7為顯示安裝有保持具接頭12G之於劃 線：112之一部之圖。由於保持具1〇僅受磁石m及引， 故t裝極容易，被固定於转 1Λ 特疋之位置。更換時係拉保持具 1 U 卸下。The figure is not formed with a circular opening 1 2 3 'the inner side is embedded with stone 124. The inside of the opening 1 23 of the Ai-tK person is located at a position away from the central axis. A parallel pin 125 perpendicular to the central axis is provided. The member of the parallel pin 125-series cylinder contacts the inclined portion 16a of the holder 10 to position the holder i 〇. When the holder and the holder are attached to the holder 1 2 0, the holder 1 is inserted into the opening 123 of the holder 120 from the holder portion 16 as shown in FIG. Thus, the front end is magnetized by $124, and the I tilt #... is contacted with the parallel pin 125 to be positioned and fixed. Fig. 6 is a plan view showing a state in which the holder joint 120 is attached with the holder 1'. Fig. 7 is a view showing a portion of the hook: 112 to which the holder joint 12G is attached. Since the holder 1 is only subjected to the magnet m and the lead, it is extremely easy to mount and is fixed at the position of the turn. Pull the holder 1 U when removing.
I 【專利文獻1】國際公開w〇 2007/063979 【發明内容】 以往之保持具1 0係安裝 單亓如 扳於保持具接頭120構成保持具 早兀130。在將保持具單 係眩*丨& Α 女凌於劃線頭11 2劃線時， …剎線輪按壓於脆性材料基板並使 彎曲，則於保拄彳里θ 八移動。此日守右劃線 則於保持保持具之保持具接頭12〇亦有扭力作用。 匕旦形成彎曲之劃線後， ^ ^ ^ 會有即使直線劃線之狀況書1I [Patent Document 1] International Publication No. 2007/063979 SUMMARY OF THE INVENTION A conventional holder 10 is attached to a holder such as a holder 120 to constitute a holder 130. When the holder is slashed and the smear is slashed to the scribe head 11 2, the brake wheel is pressed against the brittle material substrate and bent, and then moved in the θ 八. The right-handed line on this day also has a torsion effect on the holder 12 of the holder. After forming a curved line, ^ ^ ^ will have a condition even if the line is crossed.
深之位置精度亦會低落之缺 -J a ’’ x ’由於保持具係壓入to 持具接頭120之開口 123 U坚入保 手臂蓉白紅曰 乂卸下。特別是在使用機楠 手“自動工具交換器交換保持機蜮 困難之缺點。 ，、寺，有保持具之卸下變 201206851 本發明係著眼於此種問題而為， 實保持於保持具接頭並 檢仏可將保持，、確 Μ M. iA -s J線之位置精度提升且容易裝卸 之保持具接碩、包含此盥 ' 目的。 〃保持具之保持具單元或劃線頭為 為解決此課題，本發 她之門口 L 之保持具接頭係具備：設於― 歼 里设於前述開口之内 iili Ώ -S- 'Z -ZI 之磁石、由側方貫通前 述開口之貫通孔、具有平 述貫通孔且被保持為 第1平面部且被插入前 0 ^在一疋角度範圍自由旋動之銷。 在此本發明之保持且 ^ m如古 I、接頭’可更具備：連結於前述貫 通孔之側方而設之道 汰員 旋動角度限制於特定㈣插入嗅部内且將前述銷之 将疋乾圍之限制手段。 在此前述限制手與_ 之鋼球㈣體。 W料為在―定侧自由移動 在此前述銷可係具有 1平面部相異之角户夕货 ^被切除而具有與前述第 2平面與前述蓮部：持^平面部之圓柱狀構件’以前述第 保待則述球體。 在此前述銷可係剖The depth position accuracy will also be low. -J a ’’ x ’ Because the retaining device is pressed into the opening of the holder connector 120 U is securely removed from the arm. In particular, the use of the machine "automatic tool changer exchanges the difficulty of the machine.", Temple, there is a retaining device to change 201206851 The present invention is focused on this problem, and is actually maintained in the retainer joint and The inspection can be used to ensure that the positional accuracy of the M. iA-s J line is improved and that the holder can be easily loaded and unloaded, and the purpose of this is included. 〃 Hold the holder unit or the scribing head to solve this problem. In the case of the door of the present invention, the holder of the holder of the door is provided with a magnet located in the opening of the iili Ώ -S- 'Z -ZI in the opening, and a through hole penetrating the opening from the side. The through hole is held as the first flat portion and is inserted into the pin before the insertion of 0 ^ in a range of angles. Here, the holding of the present invention can be further provided as follows: The side of the hole is set to the side of the hole, the angle of rotation is limited to the specific (4) insertion of the olfactory part and the restriction means of the pin to be dried. Here, the hand and the ball (4) body of the _ are limited. ―The fixed side free movement in this pin can be There is a plane in which the plane of the plane is different from the second plane and the lotus portion: the cylindrical member holding the plane portion is the ball described above. Section
Ai ^ j面為多角形狀之柱體。 為解決此课題，本 ^ ^ ^ 之保持具單元係具備：保持里The Ai ^ j face is a polygonal shaped cylinder. In order to solve this problem, this ^ ^ ^ holding unit has: keep in
按頭具備女裝於前述伴技H 之保持具之保持具單_、二、s貝之劃線形成用之劃線輪 a 70，前述保持具接頭具有：設於一端 之開口、埋设於前述開口 知 開口之貫通孔、具有 貝'丨之磁石、由側方貫通前述 切除而具有與前述第、:；軸之第丨平面部及至少-端被 被插入前述貫通孔：：部相異之角度之第2平面部且 ，'夺為至少在一定角度範圍自由旋 6 201206851 動之銷，前述保持具具有：以磁性體金屬構成玉 前述保持具接頭之俞 ’ 且具有接觸 自由旋動地設4:=第1平面之傾斜面之安裝部、 之剎線輪，前述保持具係由二，十.饳 之第1平面與前述保持具之安裝部之傾斜面之二被一 位而被安裝於前述保持具接頭。 面接㈣疋 在此前述保持具接頭可更具備：連結 :方而設…、被插入前述窪部内且將前述鎖 度限制於特疋範圍之限制手段。 在此前述保持具可為圓柱狀構件，前 前述保持具之圓筒之外徑大之圓周部= 0周之外徑小之圓周部分。 為解决此課題，本發明之劃線頭係用於劃線裝置之割 線頭’具有將前述之保持具單元保持為自由上下降 部。 牛 為解決此課題，本發明之劃線裝置係用於脆性材料基 板之』線之劃線裝置’具有··申請專利範圍第9項記載之 劃線頭、於脆性材料基板與脆性材料基板之平面方向相對 移動前述劃線頭之相對移動部。 利用具有此種特徵之本發明，保持具接頭在第丨平面 部安定保持保持具’故可使形成劃線時之精度提升。又， 可容易從保持具接頭安裝或卸下保持具。因此’可獲得使 用機械手臂或自動工具交換H而保持具之裝卸為自由之效 果。 【實施方式】 7 201206851 圖8為顯不使用本發明之實施形態之劃線頭之劃線裝 置之立體圖°⑤此劃線裝置中，與前述之習知例相同部份 給予相同符说。本實施形態之劃線裝置1係移動台1 〇 i沿 對之導引軌道lG2a ' lG2b於y轴方向被保持為可移動。 滾珠螺桿103係與移動自1〇1螺合。滾珠螺桿1〇3係由馬 達1〇4之驅動而旋轉，使移動台101沿導引軌道102a、102b 於y軸方向移動。於移動台1〇1之上面設有馬達馬達 5係使平σ 1 g6在xy平面旋轉以定位於既定角度。脆性 材料^ 107係載置於此平纟1〇6上受未圖示之真空吸 引手&寺保持。於劃線裝置1之上部設有拍攝脆性材料基 板1〇7之對準標記之2台CCD攝影機108。 於幻線裝置【沿χ軸方向以支柱】n a、⑴b架設有橋 0跨越移動台1 〇 1與其上部之平台1 06。劃線頭Η2可沿 ，於橋no之導引部113於,軸方向移動。馬達114係使 劃線頭1 1 2沿X站士 A α / 軸方向移動。於劃線頭Π2之前端部透過 引Ί接，20 *裝有⑨述之保持$ i q。在此馬達⑽與導 a 1 〇2b、滾珠螺桿1 03係使平台於y軸方向移 動之移動部，橋丨】η ± α 支柱1 1丨a、1 1 1 b、導引部1 π係使劃 、’頭於X轴方向務勒 ..M A 移動之移動部，馬達105係使平台旋轉之 邛，此等構成相對移動部。 r人說明安裝於劃線頭之保持具單元之構成。保持具 1〇: 〇雖係由保持具接頭2〇與保持具1〇構成但保持具 :成與前述之習知例相同，省略詳細說 0 怖如圖2、圖3胼-达， 不：.、' 大致圓筒形之構件，於其下端將劃線 8 201206851 輪14保持為可旋轉’於另—端設有定位用 其次說明本實施形態之保持具接頭2〇。圓9、° ° 實施形態之保持具接頭20之圖。如圖9所=本 20係於上部具有轴承2Ia、m，了方為保持保持^接頌 部22。於保持具接頭2〇之保持部22 ^之:持 圓形之開口 23,於其内側埋設有磁石24。於二= 之保持部U設有貫通圓形之開口 23之貫通孔 保持部22於左右分別机番由 A t 入於 及右刀別6又置中心軸與貫通孔2 2卜 形之蓬部22b、22c。於一方之穿邱川 万之洼邓22b之内部如圖9 設有小圓形之窪部22d。此g 所不 ^ 0 . ^ LL “係用於保持小鋼球等球 之内部於從中心㈣開之位置設置- 中；；；轴垂直之銷25。銷25係接觸保持具心 : 以定位保持具1〇。 1 lt)a 更詳細說明本實施㈣之保持具接頭之銷Μ。銷 例如於圖10顯示立體圖為大致圓柱形狀，具有於 向 沿銷25之轴被切除之第！平面部25a。又，於銷25之—於 形成缺口 25b，設置垂直於平 而 、卞囱邓25a之第2平面部25c。 们5之平面部25a與平面部〜不必—定要為直角。 其.次說明開口 23之形狀與保持具1〇之徑。使開口 2 之技非與保持具10之外徑相同而稍大，且設有 部分之形狀。亦即如圖11A所示，開口 23之外周中二 域U為比保持具1G之外周大之徑，此外L2、L3係盘保持 具 '之外周同徑，區域L2、L3之間之區域“比保持具 1 j k。如此即使於保持具！ 〇與開口 23之間有尺寸上之 201206851 块差至少在圖中會以2點（L4之兩端）接觸。實際上，此 係保持具10在沿紙面垂直之2條線上與開口 23之内壁接 觸，可使保持確實且使交換容易。另外，亦可僅為區域u 與L4。若僅考慮裝卸之容易度時，可如圖丨丨b所示僅為比 保持具之外形稍大之外形。 於保持具接頭20之組裝時，如圖12所示先將銷乃從 一方之窪部22b插入貫通孔22a。此時將平面部25a保持為 對保持具接頭之開口 23之方向約45度之程度，再使第2 平面部25c對向於窪部22d。之後將鋼球26收納於以窪部 22d與缺口 25b形成之空間内。再使—對之圓板形之蓋心、 覆k並接著於蓮部22b、22c以免銷25從貫通孔仏脫 落。如此鋼球26即被封閉於以銷25之缺口 25b、小徑之窪 4 22d、！ 27a形成之空間内，可在鋼球％移動之範圍内 使銷25以-定角度旋動。在此鋼球％、窪部叫、蓋… 構成限制銷25之旋動範圍之限制手段。於銷25之旋動角 M ^ 3與保持具丨G之安裝部之傾 斜面16a為包含平行之角度。 F二if成保持具接頭2〇後，將前述之保持具10安 竑於保持具接頭20。於安$ # $ 1。從其安裝部16如气= A所示將保持具 箭頭所示插入保持具接頭20 23。逐漸插入後安步 *貝20之開口 ,文裝°卩16之傾斜面“a與銷25之平面 25a接觸’如圖13 R w 1 所不銷25會稍微旋動，故可文尽估巫 面部25a面接觸安 ㉝故了今易使平 1〇 ^裝°卩丨6之傾斜面丨6&，可以磁石24固定 保持具1 0。由於保姓 u疋 ' 僅受磁石24 °及引，故安裝極容 10 201206851 易，被固定於特定之位置。 ::4為劃線頭之立體圖。劃線頭⑴之伺服馬達4】 二l :疋轉軸往下側突出之倒立狀態下透過載置板4 2安裝 ^裝板…於伺服馬達41之旋轉軸安裝有與旋轉轴一體 才疋轉之圓琦凸輪44。圓筒凸私^ d凸輪44之下面係對水平狀態為傾 斜狀態之凸輪面44a。 又，劃線頭112係於下部具有線性轴承45,保持具構 件40於此線性軸承45被 做保符為可於上下方向滑動。於 性軸承45與保持具構件46 — 、 體叹有抵接於圓筒凸輪44之 凸輪面…之凸輪從動件47。凸輪從動件47係可旋轉之滚 輪形狀。於保持具構件46盥安 ^ 構件Μ相·安^ 43往、Π ㈣保持具 女裝板43往上方彈壓之彈性體，例如線彌 彈簧48。線圈彈簧48將保持 圈 丁竹丹構件46往上方彈壓會將 :從動件47壓接於凸輪面44a。在此飼服馬達“、圓筒凸 線性軸承45、保持具構件46、凸輪從動件47 圈彈簧48構成使歸具單元3G升降之料部。 ' 於如上述構成之劃線裝置丨巾，由升降部以適 重將劃線輪14壓接於脆性材料基板之表面上並…了 劃線。在本實施形態由於前述持 .、 形成 K保待具接頭20與銷25 :面部…係與保持具1〇之傾斜部W以面接觸，故4 持保持位置，即使形成彎曲之劃線安裝位置亦不會變動 =線特定時間後，會需要交換保㈣. 成…將保持具Π)如圖13C所示向下拉出。由： 25為可旋動，故即使於劃線時有橫 夸銷 门之力作用亦可容易 201206851 可無礙使用自動 除保持具1 〇。因此保持具l 〇之交換容易 交換器等。 另外，在本實施形態，銷2 ^ 貝 月U雖係圓柱狀且於長度方 切除一部形成平面部2 5 a ’但亦可由 u『使用多角柱例如四角柱之 構件構成。此時至少兩端部< 4角落加工為圓形， 通孔22a内可旋動…亦可僅使兩端部為圓柱形以使可旋 動。 隹尽貫施形態雖於銷 限制銷之旋動範圍，但此僅為—例，亦可使用可限制銷 旋動範圍之其他方法。例如於銷25之一端設突起，以此 起在窪部22d内運動之範圍為銷25之旋動範圍，以 動範圍。 ’ 又，在本貫施形態雖於銷2 5設第2平面部2 5 c，伸〇 要保持鋼球26以使接觸苐丨平面部25a旋動範圍便受限， 不必疋要設缺口 25b或平面部25c。又，在本實施形態 雖係使用鋼球26 ’但亦可使用任意材料之球體。 本發明係關於用於對脆性材料基板形成劃線之劃線裝 置且使保持具之交換容易之保持具接頭、保持具單元，可 使保持具之安裝位置安定化，可使交換自動化。因此 泛利用於劃線裝置。 只 【圖式簡單說明】 [ΞΙ 1 為顯示以往之劃線裝置之全體構成之立體圖。 圖2為顯示保持具之構成之圖。 圖3為顯示保持具之立體圖。 12 201206851 圖4為顯示以往之保持具接頭之圖。 圖圖5Λ將:持具插入以往之保持具接頭時之立體圖。· 剖面圖。π已插人保持具之狀態之保持具接頭之局部 之狀態之圖。 置之全體構成 圖7為顯示將保持具接頭安裝於劃線頭 圖8為_ *本發日月之實施形態之劃線裝 之立體圖。 、 圖9為顯示本發明之實施形態之保持具接頭之圖。 圖1〇為顯示本發明之實施形態之銷之立體圖。 ® 11Α “示本發明之實施形態之保持具接頭之開口 圖 圖 立體圖 ΗΒ為顯示保持具接頭之開口之其他形態之圖。 12為顯示本發明之實施形態之保持具接頭之組裝之 圖13Α為顯示於本發明之實施形態即將將保持 疋於保持具接頭之狀態之局部剖面圖。 、 圖13Β為顯示於本發明之實施形態將保持具插人 、保持具接頭後之狀態之局部剖面圖。 、 圖13C為顯示於本發明之實施形態從保持具接 '、、具後之狀態之局部剖面圖。 圖1 4為顯示本發明之實施形態之劃線頭之立體圖 【主要元件符號說明】 ， 1 :劃線裝置 1 〇 ··保持具 13 201206851 1 la、1 lb、16b :平坦部 1 2 :缺口 1 3 :銷槽 1 4 :劃線輪 1 5 :劃線輪用銷 1 6 :安裝部 1 6 a :傾斜部 20 :保持具接頭 2 1 a、2 1 b :軸承 22 :保持部 2 2 a :貫通孔 22b ' 22c ' 22d ：蓮部 23 :開口 24 :磁石 25 :銷 25a、25c :平面部 25b ：缺口 26 :鋼球 1 1 2 :劃線頭 14The scribing wheel a 70 for forming the holder of the holder _, s, and s of the holder of the above-mentioned accompaniment H according to the head, the holder of the holder has an opening provided at one end, and is embedded in the foregoing a through hole having an open opening, a magnet having a shell, and a side cut through the cut, and having a second plane portion and at least an end of the shaft inserted into the through hole: The second planar portion of the angle is a pin that is freely rotated at least in a certain angular range. The retainer has a magnetic metal to form the jig of the retainer joint and has a contact free rotation. 4:= the mounting portion of the inclined surface of the first plane, and the brake reel, wherein the holder is installed by one of the inclined planes of the first plane of the second, tenth, and the mounting portion of the holder In the aforementioned holder joint. Face contact (4) 疋 Here, the holder joint may further include: a connection: a device that is inserted into the crotch portion and restricts the lock to a characteristic range. Here, the holder may be a cylindrical member, and the outer portion of the outer diameter of the cylinder of the front holder is a circumferential portion having a small outer diameter of 0 weeks. In order to solve this problem, the scribing head of the present invention is used in the splicing head of the scribing apparatus to have the above-described holder unit held as a free upper descending portion. In order to solve this problem, the scribing apparatus of the present invention is used for a scribe line device for a brittle material substrate, and has a scribe head according to the ninth aspect of the patent application, and a brittle material substrate and a brittle material substrate. The relative moving portion of the scribing head is relatively moved in the planar direction. With the present invention having such a feature, the holder joint can be stably held in the second plane portion, so that the accuracy in forming the scribe line can be improved. Also, the holder can be easily attached or detached from the holder joint. Therefore, it is possible to use the robot arm or the automatic tool to exchange H and keep the loading and unloading free. [Embodiment] 7 201206851 Fig. 8 is a perspective view showing a scribing apparatus of a scribing head according to an embodiment of the present invention. In the scribing apparatus, the same parts as those of the conventional example are given the same. In the scribing apparatus 1 of the present embodiment, the moving stage 1 〇 i is held movable in the y-axis direction along the guide rails 1G2a ' lG2b. The ball screw 103 is screwed to move from 1 to 1. The ball screw 1〇3 is rotated by the motor 1〇4 to move the moving table 101 in the y-axis direction along the guide rails 102a and 102b. A motor motor 5 is disposed above the mobile station 1〇1 to rotate the flat σ 1 g6 in the xy plane to be positioned at a predetermined angle. The brittle material ^ 107 series is placed on this flat 纟 1 〇 6 and held by a vacuum suction hand & Two CCD cameras 108 for photographing the alignment marks of the brittle material substrate 1〇7 are provided on the upper portion of the scribing device 1. In the phantom device [with the pillar in the direction of the 】 axis] n a, (1) b frame with a bridge 0 across the mobile station 1 〇 1 and its upper platform 106. The scribing head Η 2 is movable along the guide portion 113 of the bridge no in the axial direction. The motor 114 moves the scribing head 1 1 2 in the X station A α / axis direction. At the end of the scribing head Π 2, the end is transmitted through the splicing, and the 20 * is loaded with 9 to hold $ i q. Here, the motor (10) and the guide a 1 〇 2b and the ball screw 303 move the platform in the y-axis direction, and the bridge 丨 η ± α struts 1 1 丨 a, 1 1 1 b, and the guide portion 1 π The moving portion of the stroke, the head is moved in the X-axis direction, and the motor 105 is rotated by the platform, and these constitute a relative moving portion. The r person describes the configuration of the holder unit mounted on the scribing head. Holder 1〇: Although the holder is made up of the holder 2〇 and the holder 1但, the holder is the same as the conventional example described above, and the detailed description is omitted. Figure 2, Figure 3: .. 'A substantially cylindrical member, the scribing line 8 201206851 wheel 14 is kept rotatable at the lower end thereof. Positioning is provided at the other end. Next, the holder joint 2〇 of the present embodiment will be described. Circular 9, ° ° Figure of the holder joint 20 of the embodiment. As shown in Fig. 9, the base 20 has bearings 2Ia and m on the upper portion, and the retaining portion 22 is held. The holding portion 22 of the holder 2 is held in a circular opening 23, and a magnet 24 is embedded in the inner side. In the holding portion U of the second=, the through hole holding portion 22 that penetrates the circular opening 23 is provided on the left and right sides by the A t and the right knife 6 and the central axis and the through hole 2 2 22b, 22c. Wearing a Qiuchuan in the other party, the interior of Deng 22b is shown in Figure 9. There is a small rounded hem 22d. This g is not ^ 0 . ^ LL " is used to keep the inside of the ball such as the small steel ball in the position from the center (four) open -;;; the axis vertical pin 25. The pin 25 series contact retains the heart: to locate 1) lt)a The pin of the holder of the present embodiment (4) will be described in more detail. The pin is, for example, shown in Fig. 10 as a substantially cylindrical shape, and has a plane portion which is cut away from the axis of the pin 25. 25a. Further, in the pin 25, the notch 25b is formed, and the second flat portion 25c perpendicular to the flat and the lower portion 25a is provided. The flat portion 25a and the flat portion of the 5 are not necessarily at right angles. The shape of the opening 23 and the diameter of the holder 1 are described. The opening 2 is not slightly the same as the outer diameter of the holder 10, and is partially shaped. That is, as shown in FIG. 11A, the opening 23 is In the outer circumference, the two domains U are larger than the circumference of the holder 1G, and the L2 and L3 trays have the same circumference as the outer circumference, and the area between the regions L2 and L3 is "1 jk than the holder." So even in the holder! There is a size between the 〇 and the opening 23 201206851 The block difference is at least 2 points (the ends of L4) in the figure. In fact, the holder 10 is in contact with the inner wall of the opening 23 on two lines perpendicular to the paper surface, so that the holding is made secure and the exchange is easy. In addition, it is only for areas u and L4. If only the ease of handling is considered, it can be slightly larger than the shape of the holder as shown in Fig. b. When the holder 20 is assembled, the pin is inserted into the through hole 22a from one of the flange portions 22b as shown in Fig. 12 . At this time, the flat portion 25a is held at a level of about 45 degrees with respect to the direction of the opening 23 of the holder joint, and the second flat portion 25c is opposed to the crotch portion 22d. Thereafter, the steel ball 26 is housed in a space formed by the crotch portion 22d and the notch 25b. Further, the center of the circular plate is covered, and k is applied to the lotus portions 22b and 22c so that the pin 25 is prevented from being detached from the through hole. Thus, the steel ball 26 is closed to the notch 25b of the pin 25, the trailing edge 4 22d,! In the space formed by 27a, the pin 25 can be rotated at a constant angle within the range of % movement of the steel ball. Here, the steel ball %, the crotch portion, the cover ... constitute a restriction means for limiting the range of the rotation of the pin 25. The angle of rotation of the pin 25, M^3, and the inclined surface 16a of the mounting portion of the holding member G are parallel. After F 2 is the holder 2, the aforementioned holder 10 is attached to the holder joint 20. Yu An $ # $ 1. The holder joint 20 23 is inserted from the mounting portion 16 as indicated by the gas as indicated by the arrow. After gradually inserting the opening of the Anbu*bei 20, the inclined surface of the text “°a16” is in contact with the plane 25a of the pin 25 as shown in Fig. 13 R w 1 The pin 25 will be slightly rotated, so it is possible to estimate the witch. The face 25a is in contact with the An 33. Therefore, it is easy to make the flat 1 〇 ^ 卩丨 ° 之 6 inclined surface 丨 6 &, can be fixed with the magnet 24 holding the holder 1 0. Since the surname u 疋 ' only by the magnet 24 ° and cited, Therefore, the installation of the capacity 10 201206851 is easy to be fixed at a specific position. ::4 is a perspective view of the scribing head. The servo motor 4 of the scribing head (1)] 2 l: the translating shaft is placed in the inverted state and is placed in the inverted state. The plate 4 2 is mounted on the mounting plate. The circular shaft cam 44 is integrally attached to the rotating shaft of the servo motor 41. The lower surface of the cylindrical convex private cam 44 is a cam surface which is inclined in a horizontal state. 44a. Further, the scribing head 112 has a linear bearing 45 at the lower portion, and the retainer member 40 is secured by the linear bearing 45 so as to be slidable in the up and down direction. The bearing 45 and the holder member 46 are sighed. a cam follower 47 abutting against the cam surface of the cylindrical cam 44. The cam follower 47 is a rotatable roller shape In the holder member 46, the member Μ phase, the ampere, the ampere, the Π, the Π (4), the elastic body, which is pressed upwards, for example, the wire spring 48. The coil spring 48 will keep the ring dingzhudan member 46 toward The upper pressing force will: the follower 47 is pressed against the cam surface 44a. Here, the feeding motor ", the cylindrical convex linear bearing 45, the holder member 46, the cam follower 47, the coil spring 48 constitute the lifting unit 3G The material department. In the scribing device wipe having the above configuration, the scribing wheel 14 is pressure-bonded to the surface of the brittle material substrate by the elevating portion and scribing. In the present embodiment, the holding portion 20 and the pin 25 are formed in a face-to-face relationship with the inclined portion W of the holder 1 so that the holding position is maintained even if a curved scribing position is formed. It will not change = after the line has been specified for a certain period of time, it will need to be exchanged (4). The ... will remain Π) as shown in Figure 13C. From: 25 is rotatable, so even when the line is crossed, the force of the door can be easily exaggerated. 201206851 It can be used without interruption. Therefore, it is easy to exchange switches and the like. Further, in the present embodiment, the pin 2 ^ Bayu U is cylindrical and is cut away to form a flat portion 2 5 a ' in length, but may be constituted by a member using a polygonal post such as a quadrangular prism. At this time, at least the both end portions < 4 corners are formed into a circular shape, and the through holes 22a are rotatable therein. Alternatively, only the both end portions may be cylindrical so as to be rotatable. Although the shape of the pin is limited to the range of rotation of the pin, it is only an example, and other methods that limit the range of the pin can be used. For example, a projection is provided at one end of the pin 25, and the range of movement in the crotch portion 22d is the range of the rotation of the pin 25, and the range of motion. Further, in the present embodiment, although the second flat portion 2 5 c is provided in the pin 2 5, the steel ball 26 is held so as to keep the range of the contact flat portion 25a from being rotated, and it is not necessary to provide the notch 25b. Or the flat portion 25c. Further, in the present embodiment, the steel ball 26' is used, but a spherical body of any material may be used. The present invention relates to a holder joint and a holder unit for forming a scribing line for a brittle material substrate and facilitating exchange of the holder, and the mounting position of the holder can be stabilized, and the exchange can be automated. Therefore, it is widely used in scribing devices. Only [Simplified illustration of the drawing] [ΞΙ 1 is a perspective view showing the overall structure of the conventional scribing device. Fig. 2 is a view showing the constitution of the holder. Figure 3 is a perspective view showing the holder. 12 201206851 Figure 4 is a diagram showing the conventional holder joint. Figure 5Λ: A perspective view of the holder when inserted into a conventional holder. · Profile view. π has been inserted into the state of the holder to maintain the state of the joint. Fig. 7 is a perspective view showing the mounting of the holder joint to the scribing head. Fig. 8 is a perspective view of the embodiment of the present invention. Fig. 9 is a view showing a holder joint according to an embodiment of the present invention. Fig. 1 is a perspective view showing a pin of an embodiment of the present invention. ® 11Α "The perspective view of the opening of the holder joint of the embodiment of the present invention is a view showing another form of the opening of the holder joint. 12 is a view showing the assembly of the holder joint of the embodiment of the present invention. Fig. 13A is a partial cross-sectional view showing a state in which the holder is inserted and the holder is joined, in the embodiment of the present invention. Fig. 13C is a partial cross-sectional view showing a state in which the holder is connected to the holder of the embodiment of the present invention. Fig. 14 is a perspective view showing a scribing head according to an embodiment of the present invention. 1 : scribing device 1 〇·· holder 13 201206851 1 la, 1 lb, 16b: flat portion 1 2 : notch 1 3 : pin groove 1 4 : scribing wheel 1 5 : scribing wheel pin 1 6 : mounting Part 1 6 a : inclined portion 20 : holder joint 2 1 a, 2 1 b : bearing 22 : holding portion 2 2 a : through hole 22b ' 22c ' 22d : lotus portion 23 : opening 24 : magnet 25 : pin 25 a , 25c: plane portion 25b: notch 26: steel ball 1 1 2 : 14 thread