JP7288832B2 - rotary drive - Google Patents

Description

The present invention relates to a rotary drive device for rotating a substrate.

In equipment for forming films by vapor deposition, sputtering, etc., there is a rotation drive that reverses the substrate together with the substrate holder in a state where the substrate is attracted to a substrate holder that has functions such as an electrostatic chuck or an adhesive chuck. A technique in which the device is provided is known (see Patent Document 1).

In such an apparatus, there is a concern that for some reason the suction force of the substrate by the substrate holder becomes insufficient and the substrate falls from the rotary drive device. Moreover, even when a configuration is adopted in which the substrate is held on the substrate holder by a mechanical holder, there is a concern that the substrate may come off the holder and fall from the rotation drive device.

Korean Patent No. 10-1586691

SUMMARY OF THE INVENTION An object of the present invention is to provide a rotary drive device capable of suppressing the dropping of a substrate.

The present invention employs the following means to solve the above problems.

That is, the rotary drive device of the present invention is
A rotation drive device comprising a rotation mechanism for rotating a substrate holder that holds a substrate,
a frame having an outer peripheral frame provided along the outer periphery of the substrate held by the substrate holder and receiving the substrate when the substrate drops from the substrate holder;
a reciprocating mechanism for reciprocating the frame so as to change the distance between the facing surfaces of the frame and the substrate holder.

As described above, according to the present invention, it is possible to suppress the dropping of the substrate.

FIG. 1 is a schematic configuration diagram of a rotary drive device according to Embodiment 1 of the present invention. FIG. 2 is a schematic configuration diagram of a rotation drive device according to Embodiment 1 of the present invention. 3A and 3B are explanatory diagrams of the operation of the rotary drive device according to the first embodiment of the present invention. FIG. 4A and 4B are explanatory diagrams of operations in the process from after the rotation operation by the rotation driving device according to the first embodiment of the present invention until the film formation is performed. 5A and 5B are explanatory diagrams of the operation of the rotary drive device according to the first embodiment of the present invention. FIG. 6 is a schematic configuration diagram of a rotary drive device according to Embodiment 2 of the present invention. 7A and 7B are explanatory diagrams of the operation of the rotary drive device according to the second embodiment of the present invention.

BEST MODE FOR CARRYING OUT THE INVENTION A mode for carrying out the present invention will be exemplarily described in detail below based on an embodiment with reference to the drawings. However, unless otherwise specified, the dimensions, materials, shapes, relative arrangements, etc. of the components described in this embodiment are not intended to limit the scope of the present invention only to them. . INDUSTRIAL APPLICABILITY The rotation drive device according to the present invention is applied to a device for forming a film by vapor deposition, sputtering, or the like. In the following embodiments, a case where a rotation driving device is applied to an apparatus for vapor deposition will be described as an example. However, the rotary drive device according to the present invention can also be applied to devices for sputtering.

(Example 1)
A rotary drive device according to a first embodiment of the present invention will be described with reference to FIGS. 1 to 5. FIG. FIG. 1 is a schematic configuration diagram of a rotation drive device according to Embodiment 1 of the present invention, and schematically shows the main configuration of the device when the device is viewed from the front. In addition, in order to make the features of each configuration easy to understand, some configurations are shown in a cross-sectional manner. FIG. 2 is a schematic configuration diagram of a rotation drive device according to Embodiment 1 of the present invention, and schematically shows the main configuration of the device when the device is viewed from above. In addition, in order to make the arrangement relationship of each component easy to understand, a part of the component is shown in a perspective view with a dotted line. In addition, in FIGS. 1 and 2, the carrier and substrate arranged in the rotary drive device are also shown by dotted lines to clarify the positional relationship.

3 to 5 are explanatory diagrams of the operation of the rotary drive device etc. according to the first embodiment of the present invention. Note that FIG. 3 schematically shows the main configuration necessary for explaining the operation of the rotary drive device when viewed from the front. FIG. 4 is an operation explanatory view in the process from after the rotation operation by the rotation drive device until film formation is performed. FIG. 5 schematically shows main components necessary for explaining the operation of the rotary drive device when viewed from the side. In addition, in FIGS. 3 to 5, in order to facilitate understanding of the features of each configuration, a part of the configuration is shown in cross section.

<Rotation drive device>
In particular, referring to FIGS. 1 and 2, the overall configuration of the rotary drive device according to the first embodiment will be described. The rotation drive device 100 according to this embodiment includes a rotation mechanism that rotates a carrier 110 as a substrate holder. The rotating mechanism includes a rotating shaft 120, a carrier mounting member 121 fixed to the rotating shaft 120, a rotational driving source 131 such as a motor for rotating the rotating shaft 120, and a bearing 132 of the rotating shaft 120. there is

The carrier 110 has a function of holding the substrate 10 by adsorption. Specifically, an electrostatic chuck that holds the substrate 10 with an electrostatic adsorption force, an adhesive chuck that holds the substrate 10 with an adhesive force, or the like can be suitably applied. A carrier mounting member 121 fixed to the rotating shaft 120 is provided with a fixture (not shown) such as a clamp for fixing the carrier 110 . A magnetic attraction member 140 capable of generating a magnetic force is provided on the opposite side of the carrier 110 from the side on which the substrate 10 is arranged. For example, the magnetic attraction member 140 may be incorporated in the carrier 110 so as to be able to move up and down with respect to the carrier 110 .

The rotary drive device 100 according to the present embodiment also includes a frame 150 that receives the substrate 10 when the substrate 10 drops from the carrier 110, and a reciprocating mechanism 160 that reciprocates the frame 150. . Since the mechanism for reciprocating various members and various devices is known technology, detailed description of the reciprocating mechanism 160 is omitted. For example, the reciprocating mechanism 160 can be configured with a ball screw and a motor that rotates the ball screw. Further, by providing a pinion on the shaft of the motor and a rack on the frame 150, the reciprocating mechanism 160 can be configured by a so-called rack and pinion. The reciprocating mechanism 160 according to this embodiment is provided on both sides of the frame 150 . The pair of reciprocating mechanisms 160 can reciprocate the frame 150 so that the distance between the facing surfaces of the frame 150 and the carrier 110 can be changed. That is, the reciprocating mechanism 160 can reciprocate the frame 150 vertically in FIG.

The carrier mounting member 121 fixed to the rotating shaft 120, the frame 150, and the reciprocating mechanism 160 are connected by members not shown in each drawing, and are rotated integrally by the rotating mechanism. is configured as Therefore, in a state in which the carrier 110 and the magnetic attraction member 140 are fixed to the carrier mounting member 121, the carrier 110 and the magnetic attraction member 140 are integrated together with the carrier mounting member 121 and the frame 150 by the rotation mechanism. Rotate.

<frame body>
The frame 150 will be described in more detail. The frame body 150 includes an outer peripheral frame portion 151 provided along the outer periphery of the substrate 10 held by the carrier 110, and at least one central portion of the substrate 10 that is connected to the outer peripheral frame portion 151 and held by the carrier 110. and a crosspiece 152 provided so as to cover the portion. The bridge portion 152 is provided at a position that does not obstruct the film formation region (vapor deposition region) R with respect to the substrate 10 .

The outer peripheral frame portion 151 has a first opposing surface 151 a that faces the surface of the substrate 10 held by the carrier 110 opposite to the surface in close contact with the carrier 110 . In addition, the outer peripheral frame portion 151 has a second facing surface 151 b that faces the outer peripheral side surface of the substrate 10 held by the carrier 110 . The bridge portion 152 has a third facing surface 152a that faces the surface of the substrate 10 held by the carrier 110 opposite to the surface in close contact with the carrier 110 . It should be noted that the above-mentioned "facing surfaces between the frame 150 and the carrier 110" can also be referred to as opposing surfaces between the carrier 110 and the first opposing surface 151a and the third opposing surface 152a.

<Description of the operation of the rotary drive device>
Particularly, with reference to FIGS. 3 to 5, the operation of the rotary drive device 100 and the like configured as described above will be described. 3 to 5, the upward direction in the drawings corresponds to the upward direction in the vertical direction, and the downward direction in the drawings corresponds to the downward direction in the vertical direction. Here, in general, a plurality of chambers are provided in an apparatus for performing a series of film formation processes (vapor deposition processes), and after a certain process is completed, the substrate or the like is transferred to another chamber. , the following steps are performed: Since such a technique is a known technique, a description thereof will be omitted. The rotation driving apparatus 100 according to the present embodiment performs an alignment process (alignment process) between the substrate 10 and the mask 20 after the process of mounting (fixing) the substrate 10 on the carrier 110 in a series of film formation processes. , is provided in a chamber for performing a process for inverting the substrate 10 together with the carrier 110 . Hereinafter, the operation of the rotation driving device 100 and the like will be described in accordance with the order of steps until vapor deposition is performed on the substrate 10 . In addition, in the following description, the chamber in which the rotary drive device 100 is provided is called an inversion chamber.

In the step before the reversing operation in the reversing chamber, the substrate 10 is attracted to the carrier 110 . Before the carrier 110 with the substrate 10 sucked thereon is transported into the reversing chamber, the frame 150 is arranged in the upward retracted position in FIG. 3(a). In this state, the carrier 110 with the substrate 10 sucked thereon is transported between the carrier mounting member 121 and the frame 150 . Specifically, in FIG. 3, the carrier 110 with the substrate 10 sucked thereon is transported from the front side to the back side of the drawing, or from the back side to the front side. After that, the carrier 110 is mounted on the carrier mounting member 121 and fixed.

After the carrier 110 is fixed to the carrier mounting member 121 , the reciprocating mechanism 160 moves the frame 150 toward the carrier 110 . This frame 150 moves to a position where the tip 151 c of the outer peripheral frame 151 contacts the carrier 110 . FIG. 3B shows a state in which the frame 150 has moved to a position where the tip 151c of the outer peripheral frame 151 contacts the carrier 110. FIG. Thereby, the positional relationship among the carrier 110, the substrate 10 attracted to the carrier 110, and the frame 150 is determined.

Thereafter, the carrier 110, the carrier mounting member 121, the magnetic attraction member 140, the frame 150 and the reciprocating mechanism 160 are integrally rotated 180 degrees by the rotation mechanism. As a result, the film formation surface (vapor deposition surface) of the substrate 10 faces downward in the vertical direction (see FIG. 3C). After the film-forming surface of the substrate 10 faces downward in the vertical direction in this way, the mask 20 is attracted to the film-forming surface of the substrate 10 . As for the method of sucking the mask 20, various known techniques can be adopted, and one example thereof will be described here. After the reversing operation is performed by the rotation driving device 100, the carrier 110 with the substrate 10 sucked thereon is removed from the rotation driving device 100 and carried out of the reversing chamber. transported to In this room, the mask 20 is placed on the mask table 200 in advance. In this state, with the substrate 10 and the mask 20 placed on the mask table 200 aligned, the substrate 10 and the mask 20 are moved closer to each other. Specifically, the substrate 10 and the mask 20 approach each other by moving the mask table 200 vertically upward, moving the carrier 110 vertically downward, or performing these operations simultaneously. When they approach, the mask 20 is magnetically attracted toward the substrate 10 by the magnetic attraction member 140 provided on the carrier 110 . Note that FIG. 4A shows a state in which the substrate 10 and the mask 20 are approaching each other.

After the mask 20 is sucked, film formation (vapor deposition) is performed. That is, after the mask 20 is adsorbed, the substrate 10 and the mask 20 adsorbed to the carrier 110 are transported to the film formation chamber (vapor deposition chamber). FIG. 4B shows the main configuration of a film forming apparatus (vapor deposition apparatus). As shown in the figure, the film forming apparatus is provided with an evaporation source 30 as a film forming source for forming a film on the substrate 10 held by the carrier 110 via the mask 20 . Since the evaporation source 30 is a well-known technology, its detailed description is omitted. For example, the evaporation source 30 can be composed of a crucible and a heating device that heats the crucible. In general, a vapor deposition apparatus is also equipped with a vacuum chamber in which various devices are arranged.

Next, the relationship between the substrate 10 and the frame 150 during operation of the rotary drive device 100 will be described with particular reference to FIG. 5, only the substrate 10, the carrier 110, and the frame 150 are shown for convenience of explanation. The film-forming surface of the substrate 10 adsorbed to the carrier 110 faces vertically upward immediately after the frame 150 has moved to the predetermined position (see FIG. 5A). Then, due to the rotating operation of the rotating mechanism, the film formation surface is oriented horizontally (see FIG. 5B), and then oriented vertically downward (see FIG. 5C).

Here, in a state where the substrate 10 is held by the carrier 110 , a gap is ensured between the substrate 10 and the first opposing surface 151 a of the outer peripheral frame portion 151 of the frame 150 . Similarly, when the substrate 10 is held by the carrier 110, a gap is ensured between the substrate 10 and the second facing surface 151b of the outer peripheral frame portion 151 of the frame 150. there is The planar shape of the substrate 10 is rectangular, and the outer peripheral side surface of the substrate 10 has four planar portions. Accordingly, the second facing surface 151b of the outer peripheral frame portion 151 is also composed of four plane portions. In this embodiment, when the substrate 10 is held by the carrier 110, the four planes that are the outer peripheral side surfaces of the substrate 10 and the second opposing surfaces 151b (four planes) of the outer peripheral frame portion 151 are interposed. , a clearance is ensured. Furthermore, in a state where the substrate 10 is held by the carrier 110 , a gap is also ensured between the substrate 10 and the third facing surface 152 a of the crosspiece 152 .

<Excellent points of the rotary drive device according to the present embodiment>
According to the rotary drive device 100 of this embodiment, the frame 150 that receives the substrate 10 is provided. Therefore, even if the substrate 10 is detached from the carrier 110 against the adsorption force of the carrier 110 for some reason, the substrate 10 can be prevented from falling from the rotary drive device 100 . That is, for example, as shown in FIG. 5B, when the substrate 10 is detached from the carrier 110 for some reason while the film formation surface of the substrate 10 is oriented in the horizontal direction, the substrate 10 may be removed from the frame. It is received by the second facing surface 151 b of 150 . Further, as shown in FIG. 5C, when the substrate 10 is detached from the carrier 110 for some reason with the film-forming surface of the substrate 10 facing downward in the vertical direction, the substrate 10 may move to the second position of the frame 150. As shown in FIG. It is received by the first facing surface 151 a and the third facing surface 152 a of the crosspiece 152 . In addition, although not shown, in particular, when the substrate 10 is separated from the carrier 110 for some reason while the film-forming surface of the substrate 10 is tilted downward in the vertical direction, the substrate 10 may move to the frame 150. It is received by the first opposing surface 151a and the second opposing surface 151b of the crosspiece 152 and the third opposing surface 152a of the crosspiece 152. As described above, the substrate 10 is prevented from falling from the rotary drive device 100 .

In addition, in the state shown in FIG. 5C, when the substrate 10 is maintained in a state of being sucked by the carrier 110, but the vicinity of the center of the substrate 10 is bent downward in the vertical direction, the center of the substrate 10 The vicinity abuts against the third facing surface 152 a of the crosspiece 152 . Accordingly, it is possible to prevent the substrate 10 from being detached from the carrier 110 and to limit the bending amount of the substrate 10 . In addition, as described above, the bridge portion 152 is provided at a position that does not interfere with the film formation region (vapor deposition region) R with respect to the substrate 10 . Therefore, even if the substrate 10 abuts against the third facing surface 152a of the bridge portion 152, it is possible to prevent the film formation region R from being adversely affected.

Furthermore, the frame 150 is configured to be reciprocally movable by a reciprocating mechanism 160 . Therefore, the frame 150 does not interfere with the operation of placing and fixing the carrier 110 with the substrate 10 attached thereto on the carrier placement member 121 .

(Example 2)
6 and 7 show Embodiment 2 of the present invention. In the above-described first embodiment, a configuration is shown in which a gap is secured over the entire region between the substrate and the second facing surface of the outer peripheral frame portion while the substrate is held by the carrier. , and the present embodiment shows a configuration in which some of the gaps are eliminated. Since other basic configurations and functions are the same as those of the first embodiment, the same components are denoted by the same reference numerals, and descriptions thereof are omitted.

FIG. 6 is a schematic configuration diagram of a rotation drive device according to Embodiment 2 of the present invention, and schematically shows the main configuration of the device when the device is viewed from above. In addition, in order to make the arrangement relationship of each component easy to understand, a part of the component is shown in a perspective view with a dotted line. Further, in FIG. 6, the carrier and the substrate arranged in the rotary drive device are also indicated by dotted lines to clarify the positional relationship. 7A and 7B are explanatory diagrams of the operation of the rotary drive device according to the second embodiment of the present invention. It should be noted that FIG. 7 schematically shows the main configuration necessary for explaining the operation of the device when the rotary drive device is viewed from the side. In addition, in FIG. 7, in order to facilitate understanding of the features of each configuration, a part of the configuration is shown in cross section.

In this embodiment, a first substrate pressing mechanism and a second substrate pressing mechanism are added to the configuration shown in the first embodiment. Also, the shape of a portion of the frame 150 is different from that of the first embodiment due to the addition of these mechanisms. Since other configurations and functions are the same as those of the configuration shown in the first embodiment, description thereof will be omitted.

As described in the first embodiment, the planar shape of the substrate 10 held by the carrier 110 is rectangular, and the outer peripheral side surface of the substrate 10 has four planes. In Example 1, when the substrate 10 is held by the carrier 110, the four planes that are the outer peripheral side surfaces of the substrate 10 and the second opposing surfaces 151b (four planes) of the outer peripheral frame portion 151 It is configured so that a gap is secured between them. In this case, if the substrate 10 is detached from the carrier 110 against the adsorption force of the carrier 110 for some reason, the position of the substrate 10 is shifted. Moreover, in some cases, the substrate 10 may receive an impact, and the quality of the substrate 10 may deteriorate.

Therefore, in this embodiment, in order to eliminate such concerns, a configuration including a first substrate pressing mechanism and a second substrate pressing mechanism is adopted. The first substrate pressing mechanism includes a first pressing member 171a and a first driving mechanism 172a for reciprocating the first pressing member 171a. For the first drive mechanism 172a, as in the case of the reciprocating mechanism 160, a mechanism including a ball screw and a motor for rotating the ball screw, or a mechanism including a rack and pinion can be employed. . Further, the frame 150 is provided with a slit 153 that allows the first pressing member 171a to enter. The provision of the slit 153 allows the first pressing member 171a to come into contact with the outer peripheral side surface of the substrate 10 and press the substrate 10 with the first pressing member 171a. The configuration of the second substrate pressing mechanism is similar to that of the first substrate pressing mechanism. Therefore, the second substrate pressing mechanism also includes a second pressing member 171b and a second driving mechanism 172b. The frame 150 is provided with a slit 154 that allows the second pressing member 171b to enter.

In particular, operations of the first substrate pressing mechanism and the second substrate pressing mechanism will be described with reference to FIG. As described above, both have the same configuration, and will be described together. A pressing member 171 in FIG. 7 corresponds to the first pressing member 171a in the first pressing mechanism and also to the second pressing member 171b in the second pressing mechanism. A driving mechanism 172 in FIG. 7 corresponds to the first driving mechanism 172a in the first pressing mechanism and also to the second driving mechanism 172b in the second pressing mechanism.

As shown in FIG. 7, by moving the pressing member 171 with the drive mechanism 172 while the substrate 10 is adsorbed to the carrier 110, the substrate 10 can be pressed and the substrate 10 can be moved. 7A shows a state in which the substrate 10 is being pressed by the pressing member 171, and FIG. It shows a state in which it abuts against the facing surface 151b. Thus, the gap between the outer peripheral side surface of the substrate 10 and the second facing surface 151b of the outer peripheral frame portion 151 can be eliminated.

Here, in the first substrate pressing mechanism, among the four planes that are the outer peripheral side surfaces of the substrate 10, the plane (end surface) on the side that is vertically upward in the process of rotating the carrier 110 by the rotation mechanism is vertically moved. It plays a role of pressing toward the plane (end face) side of the downward direction. This eliminates the gap between the plane (peripheral side surface) that is vertically downward during rotation and the second opposing surface 151 b of the outer peripheral frame portion 151 among the four planes.

Further, the second substrate pressing mechanism has a role of pressing one plane (end face) in the rotation axis direction toward the other plane (end face) of the four planes that are the outer peripheral side surfaces of the substrate 10. ing. This eliminates the gap between the plane (peripheral side surface) of the four planes that becomes the other end in the horizontal direction during rotation and the second opposing surface 151 b of the outer peripheral frame portion 151 .

The pressing operation by the first substrate pressing mechanism and the pressing operation by the second substrate pressing mechanism are performed after the moving operation of the frame 150 described in the first embodiment is completed (FIG. 3B). Therefore, it is performed before the rotating operation (FIG. 3(c)) by the rotating mechanism.

According to the rotation driving device 100 according to the present embodiment configured as described above, the substrate 10 is arranged so as to eliminate the gap between the outer peripheral side surface of the substrate 10 and the second facing surface 151b of the outer peripheral frame portion 151. It is pressed by the pressing member 171 . Thereby, it is possible to suppress positional deviation of the substrate 10 during the rotation operation.

In this embodiment, the configuration including the first substrate pressing mechanism and the second substrate pressing mechanism is shown, but a configuration including only one of the substrate pressing mechanisms may be employed. In particular, since the substrate 10 tends to be displaced downward in the vertical direction during the rotating operation, it is preferable to provide the first substrate pressing mechanism.

(others)
In the above embodiment, the case where the carrier 110 has the function of attracting the substrate 10 by means of an electrostatic chuck or an adhesive chuck has been described. However, the present invention can also be applied when the carrier does not have an adsorption function. For example, the substrate 10 separated from the carrier and supported on the frame 150 during the reversal is adsorbed to another carrier having an adsorption function, and the substrate 10 and the mask 20 are aligned in the next step. The present invention can be applied even if the carrier does not have a suction function at the time of reversal, for example, in the case of a configuration in which the substrate can be transported to the substrate or in the case of a configuration having the above-described substrate pressing mechanism. Even in this case, even if the substrate is detached from the carrier for some reason, the substrate is received by the frame, so that the substrate can be prevented from falling from the rotary drive device.

REFERENCE SIGNS LIST 10 substrate 20 mask 30 evaporation source 100 rotary drive device 110 carrier 120 rotary shaft 121 carrier mounting member 131 rotary drive source 132 bearing 140 magnetic attraction member 150 frame 151 outer peripheral frame 151a first opposing surface 151b second opposing surface 151c Tip 152 Crosspiece 152a Third Opposing Surface 153, 154 Slit 160 Reciprocating Mechanism 171, 171a, 171b Pressing Member 172, 172a, 172b Driving Mechanism 200 Mask Stand R Film Forming Area (Vapor Deposition Area)

Claims (10)

A rotation drive device comprising a rotation mechanism for rotating a substrate holder that holds a substrate,
a frame having an outer peripheral frame provided along the outer periphery of the substrate held by the substrate holder and receiving the substrate when the substrate drops from the substrate holder;
and a reciprocating mechanism for reciprocating the frame so as to change the distance between the facing surfaces of the frame and the substrate holder. 2. The peripheral frame portion according to claim 1, wherein the outer peripheral frame portion has a first opposing surface facing a surface of the substrate held by the substrate holder opposite to a surface in close contact with the substrate holder. rotary drive. 3. The rotary drive device according to claim 2, wherein a gap is secured between the substrate and the first opposing surface when the substrate is held by the substrate holder. 4. The rotation drive device according to claim 1, wherein the outer peripheral frame portion has a second facing surface facing an outer peripheral side surface of the substrate held by the substrate holder. The planar shape of the substrate held by the substrate holder is rectangular, and the outer peripheral side surface of the substrate has four planes. Of these four planes, the substrate holder is rotated by the rotation mechanism. 5. The method according to any one of claims 1 to 4, further comprising a first substrate pressing mechanism that presses the upper plane in the vertical direction toward the lower plane in the vertical direction in the process. 4. The rotary drive device according to . The planar shape of the substrate held by the substrate holder is rectangular, and the outer peripheral side surface of the substrate has four planes. 6. The rotary drive device according to claim 1, further comprising a second substrate pressing mechanism for pressing the substrate toward the other flat surface side. 6. The frame is connected to the outer peripheral frame and has a crosspiece provided so as to cover at least a part of the center of the substrate held by the substrate holder. The rotary drive device according to any one of . 8. The crosspiece according to claim 7, wherein the bridge portion has a third facing surface facing a surface of the substrate held by the substrate holder opposite to a surface in close contact with the substrate holder. rotary drive. 9. The rotation drive device according to claim 8, wherein a gap is secured between the substrate and the third opposing surface when the substrate is held by the substrate holder. 10. The rotary drive device according to claim 1, wherein the substrate holder holds the substrate by suction.

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