TW202208138A - Scribing wheel for fragile material substrate and manufacturing method thereof to reduce or inhibit the occurrence of microcracks in the horizontal direction - Google Patents

Abstract

The present invention provides a scribing wheel for a fragile material substrate and a manufacturing method thereof, which can reduce or inhibit the occurrence of microcracks in the horizontal direction, and can particularly improve the cutting performance on a fragile material substrate with a thickness of 0.1 mm or less. The present invention relates to a disc-shaped scribing wheel that is used to apply scribe lines on the fragile material substrate. The scribing wheel (1) includes a first blade (10) and a second blade (20) alternately arranged along the circumferential direction on its outer peripheral portion (3). The outer peripheral portion includes a pair of slant faces (3a) that are intersected in a V shape to form the first blade (10); and a recess (22) that is recessed on one or both of the pair of slant faces (3a) to form the second blade (20). In the present invention, the difference S in the radial direction between the position of the blade tip (11) of the first blade (10) and the position of the blade tip (21) of the second blade (20) is less than 0.5 [mu] m.

Description

Scribing wheel for brittle material substrate and manufacturing method thereof

The present invention relates to a scribing wheel for brittle material substrates and a method for producing the same, and particularly relates to a scribing wheel that is a disk-shaped tool for imparting cutting lines to plates such as glass substrates, quartz substrates, and ceramic substrates, and to producing such a scribing wheel. Method of scribing wheel.

As one of the methods of dividing a brittle material substrate such as a mother glass substrate for a flat panel display (FPD: Flat Panel Display) into unit substrates of a predetermined size, a scribing and cutting method is widely used. This method is a method in which a scribing wheel is pressed against a brittle material substrate and rotated to give a dicing line, that is, a dicing pattern, and then an external force is applied to the brittle material substrate to cut or divide the brittle material substrate along the dicing line. In addition, as an example of a scribing wheel, there is known a scribing wheel in which grooves are provided at a predetermined pitch on the edge of the outer peripheral edge portion and the edge is processed into concavities and convexities, which is disclosed in, for example, Japanese Patent Publication No. 5022602 (Patent Document 1). ).

When the above-described scribing wheel having the concave-convex processing edge is pressed against a brittle material substrate and rotated, a scribe line SL as shown in FIG. 11 is generated on the substrate surface. The cutting line SL is alternately formed with a thick line portion L1' produced by the convex blade 1 and a thin line portion L2' produced by the concave knife 2. At this time, the blade 1 and the blade 2 also apply a force (hereinafter, referred to as "horizontal opening force" in this specification) to the substrate to cut the substrate in the horizontal direction from the dicing line SL. This horizontal opening force of the knife 1 is greater than that of the knife 2, as shown in particular by the arrow in FIG. 11 . In this way, by continuously applying horizontal opening forces with different strengths to the substrate by the blades 1 and 2, vertical cracks penetrate in the thickness direction of the substrate. Such vertical cracks generated inside the substrate reduce the load at the time of cutting the substrate.

The inventors have found that microcracks mc (only a part of which are shown in the figure) may be generated in the horizontal direction (the direction in which the substrate develops) from an angle C that starts from a portion having a substantially constant thickness in the line portion L1' toward the line portion. L2' tapered corners. Such microcracks mc may reduce the flexural strength after the division of the substrate or peel off the surface layer of the substrate. In particular, in recent years, with the reduction in weight of brittle material substrates, thinning has been demanded. For example, glass substrates with a thickness of 0.2 mm or less are also used. However, such thin substrates have inherently low strength, and thus the generation of the above-mentioned microcracks mc may occur. directly lead to a decrease in quality.

In addition, the current demand for brittle material substrates with a thickness of 0.1 mm (100 μm) or less is increasing, and if an existing scribing wheel is used for such thin substrates, there are vertical cracks that penetrate the thickness direction of the substrate beyond necessary and are not easily stabilized the problem of dividing the substrate.

prior art literature

Patent Literature

Patent Document 1: Japanese Patent No. 5022602

PROBLEMS TO BE SOLVED BY THE INVENTION The present invention has been made in view of the above-mentioned problems, and an object of the present invention is to provide a method that can reduce or suppress the generation of microcracks in the horizontal direction, and can improve the cutting of brittle material substrates with a thickness of 0.1 mm or less in particular. Performance scribing wheel for brittle material substrate and method of making the same.

In order to achieve the above object, according to an aspect of the present invention, there is provided a scribing wheel for a brittle material substrate, which is a disc-shaped scribing wheel for imparting a dicing line to a brittle material substrate, characterized in that the scribing wheel is The outer peripheral portion of the reel is provided with first blades and second blades alternately in the circumferential direction, and the outer peripheral portion includes: a pair of inclined surfaces that intersect in a V-shape to form the first blades; and a concave portion extending from the pair of inclined surfaces One or both sides are recessed to form the second blade, and the difference in the radial direction between the blade edge position of the first blade and the blade edge position of the second blade is less than 0.5 μm.

In the process of researching a scribing wheel that does not generate microcracks mc in the horizontal direction from the angle C of the thick cut line portion L1' (refer to FIG. 11 ) by the above-mentioned knife 1, the inventors found that the The difference (interval) in the radial direction between the edge position of the first blade and the edge position of the second blade in the wheel is less than 0.5 μm to reduce or suppress such microcracks, and the present invention has been completed. It should be noted that the distance between the blade 1 and the blade 2 in the radial direction of the conventional scribing wheel is set to be 0.5 μm or more. It is very difficult to machine the spacing of the scribing wheel to less than 0.5 μm.

In the present invention, the scribing wheel comprises sintered diamond, single crystal diamond or superalloy steel or a combination thereof.

In the present invention, the first blade is defined by a pair of inclined surfaces intersecting in a V-shape. Further, the second blade is defined by intersecting the recesses provided on both sides of the pair of slopes in a V-shape, or by intersecting the recesses formed on one of the pair of slopes and the other of the pair of slopes in a V-shape.

In one embodiment of the present invention, the angle of the second knife is smaller than the angle of the first knife. Preferably, the angle of the second knife is in the range of 99.98% to 10% of the angle of the first knife, more preferably 98% to 90%. By making the angle of the second blade smaller than the angle of the first blade, it is possible to increase the variation in the horizontal opening force applied by the first and second blades to the brittle material substrate, thereby extending vertical cracks in the thickness direction.

In one embodiment of the present invention, the difference in the radial direction between the position of the cutting edge of the first blade and the position of the cutting edge of the second blade is zero. In the present embodiment, the cutting edge of the second blade and the cutting edge of the first blade form a perfectly circular ridgeline (side), and the cutting line, as shown in FIG. 17 , is a continuous line of substantially the same thickness. However, it is conceivable that since the recesses forming the second blades and the first blades are alternately arranged in the circumferential direction, the strength of the horizontal opening force generated by the first and second blades is changed on the substrate, and thus the vertical cracks are directed to the substrate. The substrate extends inside.

In one embodiment of the present invention, the difference in the radial direction between the position of the blade edge of the first blade and the position of the blade edge of the second blade is 0.2 μm or more and less than 0.5 μm, and each of the recesses includes One or both sides of the pair of inclined surfaces have the deepest recess in the bottom of the middle in the circumferential direction, and the two sides that make the depth gradually shallower from the bottom to the two adjacent first blades in the circumferential direction and are connected. Each bottom side portion, the radius of curvature of the boundary between the bottom side portion and the first blade adjacent to each other is larger than the radius of curvature of the boundary between the bottom side portion and the bottom portion adjacent to each other. The inventors have found that when a scribing wheel of such a configuration is used, the dicing lines shown in FIG. 28 can be formed on the surface of the brittle material substrate, and the microcracks in the horizontal direction can be further reduced or suppressed. This point will be described later in relation to FIGS. 25 to 28 .

According to another aspect of the present invention, there is provided a method for producing a scribing wheel for a brittle material substrate, which is a method for producing a disc-shaped scribing wheel for imparting a dicing line to a brittle material substrate, characterized by comprising: Step A , process a pair of original bevels on the outer periphery of the original body to be made into the scribing wheel, and make the pair of original bevels intersect in a V-shape to form a first original knife; in step B, process a pair of original bevels at regular intervals in the circumferential direction. A pair of concave portions recessed from both sides of the pair of original slopes, the pair of concave portions form a second blade, the first original blade and the second blade alternate in the circumferential direction, and the first blade The difference in the radial direction between the position of the cutting edge of the original knife and the position of the cutting edge of the second knife is set to be 0.5 μm or more; The first blade is formed by intersecting the zigzag shapes, and the difference in the radial direction between the blade edge position of the first blade and the blade edge position of the second blade is set to 0 or more and less than 0.5 μm.

This method is a method for manufacturing a scribing wheel for brittle material substrates in which the difference in the radial direction between the position of the first blade and the position of the second blade in the radial direction is 0 or more and less than 0.5 μm. In this method, diamond, ceramics, iron, etc. of a predetermined grain size can be used for grinding the pair of original slopes, and electron beams, lasers, etc. can be used to form the concave portions on the pair of original slopes.

In one embodiment of the present invention, in the step B, the angle of the second blade is made smaller than the angle of the first original blade, and in the step C, the angle of the first blade is made larger than the angle of the first blade. The angle of the second knife. Thus, the angle of the second blade is made smaller than the angle of the first blade.

In one embodiment of the present invention, a step D is included, and after the step C, one of the pair of inclined surfaces is ground to eliminate the recessed portion in the one inclined surface. Thereby, a concave portion remains only on the other of the pair of inclined surfaces, and the concave portion intersects with the one inclined surface in a V shape to define the second blade.

The effect of the present invention is that, in the scribing wheel of the present invention, by setting the difference in the radial direction between the edge position of the first blade and the edge position of the second blade to less than 0.5 μm, it is possible to reduce or suppress the Microcracks in the horizontal direction of the cutting line formed by a knife.

In order to describe the present invention more clearly, preferred embodiments are given and described in detail with the drawings as follows. Several embodiments of the present invention will be described based on the drawings, but the present invention is not limited to such embodiments, and modifications and the like can be made within the scope of the technical claims and the scope of equivalents. FIGS. 1 , 2 , and 3 are a perspective view, a side view, and a front view of a scribing wheel (hereinafter also simply referred to as a “wheel”) 1 according to the first embodiment of the present invention. FIG. 4 is an enlarged view of a part of FIG. 2 . Hereinafter, the left and right of the wheel 1 (and the wheels 61 , 101 , and 201 described later) are based on FIGS. 3 , 14 , and the like unless otherwise specified. Wheel 1 (61, 101, 201) is substantially symmetrical left and right. Therefore, the description about one of the left and right of the wheel 1 ( 61 , 101 , 201 ) also applies to the other of the left and right. The wheel 1 includes a disk-shaped main body portion 2 and an outer peripheral portion 3 that protrudes radially outward from the main body portion 2 to have a triangular cross-section. The wheel 1 is provided with the first blade 10 and the second blade 20 alternately in the circumferential direction at the ridge 4 which is the outer end part in the radial direction of the outer peripheral part 3 . The main body portion 2 has right and left annular side surfaces 2 a perpendicular to the axis of the wheel 1 . Moreover, the main body part 2 is provided with the shaft hole 5 which penetrates between the side surfaces 2a on either side. The wheel 1 is used by being attached to the scribing device by passing the shaft portion of the not-shown scribing device through the shaft hole 5 of the main body portion 2 .

The outer peripheral portion 3 has a pair of left and right inclined surfaces 3 a inclined with respect to the left and right side surfaces 2 a of the main body portion 2 . The left and right inclined surfaces 3 a gradually approach each other toward the outer side in the radial direction, and the first blade 10 is defined by intersecting in a V shape at the edge portion 4 . The cutting edge 11 of the first blade 10 is along the outer periphery of the wheel 1 which is the outermost in the radial direction. A pair of left and right concave portions 22 are provided on the left and right inclined surfaces 3a at predetermined intervals in the circumferential direction. The left and right concave portions 22 are recessed from the inclined surface 3 a, and the second blade 20 is defined by crossing the edges 4 in a V-shape. The angle A2 (see FIG. 9 ) of the second blade 20 is set to be smaller than the angle ( A1 ) of the first blade 10 . In the present embodiment, A1 is 95° to 110°, and A2 is set to be 90% to 98% of A1. The cutting edge 21 of the second knife 20 together with the cutting edge 11 of the first knife 10 forms the outer periphery of the wheel 1 . The outer periphery formed by the cutting edges 11 and 21 of the first and second blades 10 and 20 is also the ridge line of the ridge portion 4 .

In the present embodiment, the length of one second blade 20 in the circumferential direction is approximately 3 to 4 times the length of one first blade 10 in the circumferential direction. Referring to FIG. 4 , the cutting edge 21 of each second blade 20 is slightly inward in the radial direction from both ends in the circumferential direction (the adjoining points of the cutting edge 11 of the first knife 10 adjacent to the left and right in FIG. 4 ) to the intermediate point in the circumferential direction. The concavity is the largest inward in the radial direction at the midpoint in the circumferential direction. The concavity of the second blade 20 (and the concave portion 22 ) has a curved shape that protrudes radially inward. In this embodiment, the difference S in the radial direction between the position of the cutting edge 11 of the first blade 10 and the intermediate point in the circumferential direction of the cutting edge 21 of the second blade 20 is 0.2 μm, but it may be set to 0.1 μm or more and less than 0.5μm. Moreover, the pitch of the 1st blade 10 is 0.014 micrometer or more and 0.019 micrometer or less. Moreover, the diameter of the wheel 1 is 2.6 mm, and the thickness of the wheel 1, that is, the interval between the left and right side surfaces 2a is 0.65 mm.

Table 1 shows the preferable specification range and the like of the scribing wheel 1 .

[表 1]

[Table 1]

Next, the manufacturing method of the scribing wheel 1 is demonstrated. 5 to 8 are explanatory diagrams roughly showing the manufacturing process of the wheel 1 . FIG. 9 is an explanatory diagram corresponding to the manufacturing process of FIGS. 6 to 8 . First, the original body 1' (refer to Fig. 5) to be finally made into the wheel 1 is prepared. The original body 1 ′ is in the shape of a disc by expanding the main body 2 of the wheel 1 radially outward, and has left and right side surfaces 2 a (the same reference numerals are used as the left and right side surfaces 2 a of the wheel 1 ) and the Circumferential side surfaces 3 ′ to which radially outer ends of the left and right side surfaces 2 a are connected. In addition, in FIGS. 5-8, the original body 1' and the wheel 1 are shown in the cross section seen from the CC line of FIG. 4. FIG. Next, as shown in Fig. 6 , a pair of original slopes 3a' are roughly machined on the outer peripheral portion of the original body 1' (step A). A pair of original bevels 3a' intersect in a V shape to form a first original blade 10'. The first original knife 10' has a cutting edge 11'. The angle of the first original blade 10' is set to be substantially the same as the angle of the finally formed first blade 10. The pair of original slopes 3a' and the first original blade 10' are located slightly outward in the radial direction than the final pair of slopes 3a and the first blade 10 (see Fig. 8 and the like).

Next, as shown in FIG. 7 , the recesses 22 are laser-processed on each of the pair of original slopes 3a' at predetermined intervals in the circumferential direction (step B). A pair of left and right recesses 22 intersect in a V shape to define the second blade 20 . The second blade 20 has a blade tip 21 . Referring to Fig. 9 , the angle A2 of the second blade 20 is set to be 90% to 98% of the angle (substantially A1) of the first original blade 10'. Therefore, the vertical depth d (see FIG. 9 ) of the pair of recesses 22 with respect to the original slope 3a' gradually becomes slightly deeper from the edge 21 located on the ridgeline toward the radially inner end 22b of the recess 22 . By forming the second knives 20, the first original knives 10' and the second knives 20 alternate in the circumferential direction. In addition, at this time, the difference S' (see FIG. 9 ) in the radial direction between the position of the cutting edge 11' of the first original blade 10' and the position of the cutting edge 21 of the second blade 20 is set to slightly exceed 0.5 μm.

Next, the pair of original bevels 3a are ground with diamonds having a predetermined grain size, and the first original blade 10' is formed into the first blade 10 shown in FIG. 8 (step C). At this time, the pair of original slopes 3a' are polished so as to be substantially parallel to the final pair of slopes 3a. Therefore, the angle A1 of the first blade 10 is substantially the same as the angle of the first original blade 10', and is larger than the angle A2 of the second blade 20. In the present embodiment, the angle A2 of the second blade 20 is set to 90% to 98% of the angle A1 of the first blade 10 . In addition, in step C, the difference S in the radial direction between the position of the cutting edge 11 of the first blade 10 and the position of the cutting edge 21 of the second blade 20 is set to 0.2 μm. And the recessed part 22 is made slightly shallow by the process C. As shown in FIG. That is, the depth of the recessed portion 22 from the inclined surface 3a becomes slightly smaller than the depth from the original inclined surface 3a'. The scribing wheel 1 is obtained in the above manner. The above steps A to C are also substantially applicable to the manufacture of the wheels 61 , 101 , and 201 (see FIGS. 12 , 21 , 25 , etc.) of the second to fourth embodiments to be described later. In the wheel 61 , the steps The original slope ( 3 a ′) in C is ground into the slope 3 a so that the difference S in the radial direction between the position of the cutting edge 71 of the first blade 70 and the position of the cutting edge 81 of the second blade 80 is zero.

FIG. 10 is a schematic view of the cut line SL1 given by the wheel 1 on the glass substrate. The cutting line SL1 is alternately formed with a thicker line portion L1 produced by the first blade 10 and a thinner line portion L2 produced by the second blade 20 . 11 : is a schematic diagram which provided the cutting line SL on the glass substrate by the conventional scribing wheel (henceforth "comparative example wheel") which has the convex-shaped blade 1 and the concave-shaped blade 2. In the wheel of the comparative example, the radial distance between the position of the edge of the knife 1 and the position of the knife 2 in the radial direction is 1.5 μm, the angle of the knife 1 and the angle of the knife 2 are almost the same, the diameter of the wheel, the thickness of the wheel and the distance of the knife 1 are the same as those of the wheel. 1 is roughly the same. In addition, the thickness of the glass substrate to which the cutting lines SL1 and SL are to be provided, the rotational pressure, the rotational speed, and the like are also set to be the same for the wheel 1 and the wheel of the comparative example. In the cutting line SL1 generated by the wheel 1, the distance S in the radial direction between the cutting edge 11 of the first blade 10 and the cutting edge 21 of the second blade 20 is set to 0.2 μm, so the difference between the thicknesses of the line portion L1 and the line portion L2 is It is smaller than the cutting line SL of FIG. 11 . That is, the line portion L1 of the cutting line SL1 is thinner than the line portion L1' of the cutting line SL, and the line portion L2 and the line portion L2' have substantially the same thickness. From this, it can be considered that the variation between the line portion L1 and the line portion L2 in the cutting line SL1 is reduced, thereby reducing or suppressing the microcracks mc.

Table 2 shows the experimental results using the above-mentioned scribing wheel 1 and the comparative wheel. The experiments were carried out as follows. First, the scribing wheel 1 and the comparative wheel were used to impart cutting lines to glass substrates with a thickness of 100 μm (0.1 mm) and 150 μm (0.15 mm) at the same rotational pressure and rotational speed, and the degree of vertical cracks generated inside each glass substrate was measured. Length in thickness direction (μm). The operation was repeated eight more times for glass substrates of various thicknesses.

[Table 2]

The vertical crack length of the first round of the comparative example to the glass substrate with a thickness of 100 μm was 90.9 μm. This means that the vertical crack penetrated 90.9% with respect to the thickness of 100 μm. Therefore, the "permeability" for the first time is 90.9%. The second vertical crack length (permeability 89.2%) of the comparative example wheel - glass substrate with a thickness of 100 μm is 89.2 μm.

For the first time, the vertical crack length of the glass substrate with a thickness of 100 μm generated by wheel 1 was 83.4 μm (permeability 83.4%). The vertical cracks (permeability) of the second to eighth times after that are shown in Table 2.

The vertical crack length of the first round of the comparative example to the glass substrate with a thickness of 150 μm was 127.3 μm. Therefore, the permeability is 127.3 μm/150 μm=84.9%. The vertical cracks and permeability of the second to eighth times after that are shown in Table 2.

The vertical crack length of the first round 1 pair of glass substrates with a thickness of 150 μm was 109.8 μm (permeability 73.2%). The vertical cracks (permeability) of the second to eighth times after that are shown in Table 2.

圖表1標示了表2的平均滲透率，並且示出了根據與對厚度200μm～100μm的玻璃基板進行的上述實驗為相同為的許多為滲透為率為的測為定為值為推為測為出的對為厚度為150μm～50μm的玻璃基板的滲透率的推測值。

Chart 1 shows the average permeability of Table 2, and shows that many of the same as the above-mentioned experiments performed on glass substrates with a thickness of 200 μm to 100 μm are the measured values of the permeability ratios. The obtained pair is an estimated value of the permeability of a glass substrate having a thickness of 150 μm to 50 μm.

It is known that in general, when dividing a glass substrate with a cutting line, when the permeability of the vertical crack is in the range of 75% to 90%, the work of dividing the substrate is stable. From Table 2 and Graph 1, it can be seen that the wheel 1 of the present invention has a permeability of 75% to 90% to a glass substrate having a thickness of 150 μm or less, particularly 100 μm or less, and the substrate division operation is stable. On the other hand, in the comparative example wheel, the permeability with respect to the glass substrate of thickness 100 micrometers or less exceeds 90 %, and it is considered that the division|segmentation operation|work of a board|substrate becomes unstable.

12 , 13 and 14 are a perspective view, a side view, and a front view of the scribing wheel 61 according to the second embodiment of the present invention. FIG. 15 is a cross-sectional view taken along line AA of FIG. 13 . FIG. 16 is an enlarged view of the portion circled B in FIG. 15 . In the wheel 61, the same reference numerals as those of the wheel 1 are used for the structures substantially common to the wheel 1 already described, for example, the main body portion 2, the outer peripheral portion 3, and the like, and the description thereof is omitted. The wheel 61 is provided with the first blade 70 and the second blade 80 alternately in the circumferential direction at the ridge 4 which is the outer end portion in the radial direction of the outer peripheral portion 3 . A pair of left and right inclined surfaces 3 a of the outer peripheral portion 3 intersect at the edge portion 4 in a V-shape to define the first blade 70 . A pair of left and right concave portions 82 are provided on the left and right inclined surfaces 3 a at predetermined intervals in the circumferential direction. The left and right concave portions 82 are recessed from the inclined surface 3a. The left and right concave portions 82 intersect in a V shape at the ridge portion 4 to define the second blade 80 . In the present embodiment, the difference S in the radial direction between the position of the cutting edge 71 of the first blade 70 and the position of the cutting edge 81 of the second blade 80 is zero (S=0). Therefore, the cutting edge 71 of the first blade 70 and the cutting edge 81 of the second blade 80 are along the outer periphery of the perfect circle that is most radially outward in the wheel 1 . 16 , the angle A1 of the first blade 70 is set to 95° to 110°, and the angle A2 of the second blade 80 is set to 90% to 98% of the angle A1 of the first blade 70 . In addition, A2 can be set to 10% - 99.98%. In this embodiment, the length of one first blade 70 in the circumferential direction is about 1.5 times the length of one second blade 80 in the circumferential direction. The wheel 61 is produced through the above-mentioned steps A to C in the same manner as the wheel 1, but in the wheel 61, the position of the cutting edge 71 of the first blade 70 and the position of the cutting edge 81 of the second blade 80 in the process C are set. The original inclined surface 3a' is ground into the inclined surface 3a so that the difference S in the radial direction is zero. The preferable specification range of the scribing wheel 61 is the same as that of the wheel 1 (refer to Table 1) except that S=0.

FIG. 17 is a schematic view of the cut line SL2 given by the wheel 61 on the glass substrate. In the cutting line SL2, a line having a substantially constant thickness is continuous by setting the distance S in the radial direction between the cutting edge 71 of the first blade 70 and the cutting edge 81 of the second blade 80 in the wheel 61 to zero. However, due to the presence of the concave portion 82 forming the second blade 80 and the angle difference between the first and second blades 70 and 80, the horizontal opening force of different strength continuously acts on the substrate, thereby causing vertical cracks to occur in the substrate. extending in the thickness direction. In addition, it is conceivable that in the cutting line SL2, there is almost no variation between the line portion formed by the first blade 70 and the line portion formed by the second blade 80, thus reducing or suppressing the microcracks mc in the horizontal direction production.

In the wheels 1 and 61 of the first and second embodiments described above, the recesses 22 and 82 are provided on both of the pair of left and right inclined surfaces 3 a of the outer peripheral portion 3 to define the second blades 20 and 80 , but the present invention It is not limited to such an embodiment. FIG. 18 is a front view of a wheel 61A which is a modification of the wheel 61 of the second embodiment. In the wheel 61A, the recesses 82 are provided at predetermined intervals in the circumferential direction only on one (left) 3a of the pair of left and right inclined surfaces 3a and 3A. Thus, each second blade 80 (using the same reference number as the second blade 80 of the wheel 61 for convenience.) is delimited by a left recess 82 and a right slope 3A. In the wheel 61A, the blade edge 71 of the first blade 70 and the blade edge 81 of the second blade 80 are also located at the same position in the radial direction (S=0), so that the microcracks mc can be reduced or suppressed in substantially the same manner as in the wheel 61 . . The flat slope 3A on the right side of the wheel 61A from which the concave portion is eliminated is substantially the same as the flat slope 3A on the right side of the wheel 1A which is a modification of the first embodiment described below, and therefore the same surface is used. reference number.

FIG. 19 is a front view of a wheel 1A which is a modification of the wheel 1 of the first embodiment. In the wheel 1A, the recesses 22 are provided at predetermined intervals in the circumferential direction only on one (left) 3a of the pair of left and right inclined surfaces 3a and 3A. Thus, each second blade 20 (using the same reference number as the second blade 20 of wheel 1 for convenience.) is delimited by a left recess 22 and a right slope 3A. In the wheel 1A, the radial distance between the position of the cutting edge 11 of the first blade 10 and the position of the cutting edge 21 of the second blade 20 is also 0.2 μm (S=0.2 μm).

As a result, the microcracks mc can be reduced or suppressed in substantially the same manner as in the wheel 1 . The flat slope 3A on the right side of the wheel 1A from which the concave portion has been eliminated is obtained by grinding the right slope 3a after step C (see FIG. 8 ) in the above-described manufacturing method of the wheel 1 to eliminate the right slope as shown in FIG. 20 . The recessed part 22 of 3a is formed (process D).

In the process D, the position of the cutting edge 21 of the second blade 20 is maintained. Accordingly, with respect to the inclination angle of the left and right inclined surfaces 3a and 3A with respect to the vertical line (not shown) passing through the cutting edges 11 and 21 of the first and second blades 10 and 20 in FIG. 9 , the inclination angle of the inclined surface 3A is become slightly smaller.

21 and 22 are a partial side view and a partial perspective view of the scribing wheel 101 according to the third embodiment of the present invention. FIG. 23 is a partial enlarged view of FIG. 21 . In the following description of the wheel 101 and the wheel 201 , the structures substantially common to the wheel 1 already described, such as the main body portion 2 and the outer peripheral portion 3 , are given the same reference numerals as those of the wheel 1 and their descriptions are omitted. The wheel 101 is provided with the first blade 110 and the second blade 120 alternately in the circumferential direction at the ridge 4 which is the outer end part in the radial direction of the outer peripheral part 3 . A pair of left and right inclined surfaces 3 a of the outer peripheral portion 3 intersect at the edge portion 4 in a V-shape to define the first blade 110 . A pair of left and right concave portions 122 are provided on the left and right inclined surfaces 3a at predetermined intervals in the circumferential direction. The left and right concave portions 122 intersect in a V-shape at the edge portion 4 to define the second blade 120 . In the present embodiment, the difference S in the radial direction between the position of the blade edge 111 of the first blade 110 and the position of the blade edge 121 of the second blade 120 is 0.4 μm. In addition, the angle A1 of the first blade 110 is 120°, and the angle A2 of the second blade 120 is 108°.

23 , each recess 122 includes a bottom portion 122a in the middle of the circumferential direction with the deepest recess and two bottom side portions 122b that gradually decrease in depth from the bottom portion 122a to two adjacent first blades 110 in the circumferential direction and are connected. In the present embodiment, each bottom side portion 122b is a curved surface that protrudes radially inward. The blade tip 121 of the second blade 120 defined by the left and right recesses 122 also includes a portion 122a corresponding to the bottom portion 122a (the same reference numerals are used for convenience) and a portion 122b corresponding to the two bottom side portions 122b (for the sake of convenience). It is convenient to use the same reference number). In the wheel 101, the convex curvature radius R1' of the boundary between the bottom side portion 122b and the first blade 110 adjacent in the circumferential direction is smaller than the concave shape of the boundary between the bottom side portion 122b and the bottom portion 122a adjacent in the circumferential direction. shape radius of curvature R2' (R1'<R2'). It should be noted that R1'+R2'=constant.

FIG. 24 is a schematic view showing a cut line SL3 provided by the wheel 101 to the surface of the glass substrate. In the cutting line SL3, the thick line portion L11 produced by the first blade 110 of the wheel 101 and the thin line portion L12 produced by the second knife 120 are alternately continuous. An angle C1' corresponding to the radius of curvature R1' between the bottom side 122b of the recess 122 of the wheel 101 and the first blade 110 is generated in the secant line SL3. Microcracks mc (refer to FIG. 11 ) are easily generated from such an angle C1 ′ in the horizontal direction outside the cutting line SL3 . When S is less than 5 μm, the generation of such microcracks mc can be suppressed or reduced.

25 and 26 are a partial side view and a partial perspective view of the scribing wheel 201 according to the fourth embodiment of the present invention. FIG. 27 is a partial enlarged view of FIG. 25 . The wheel 201 is provided with the first blade 210 and the second blade 220 alternately in the circumferential direction at the ridge 4 which is the outer end part in the radial direction of the outer peripheral part 3 . A pair of left and right inclined surfaces 3 a of the outer peripheral portion 3 intersect in a V shape at the edge portion 4 to define the first blade 210 . A pair of left and right concave portions 222 are provided on the left and right inclined surfaces 3a at predetermined intervals in the circumferential direction. The left and right concave portions 222 intersect in a V-shape at the edge portion 4 to define the second blade 220 . In the present embodiment, the difference S in the radial direction between the position of the blade edge 211 of the first blade 210 and the position of the blade edge 221 of the second blade 220 is 0.4 μm. In addition, the angle A1 of the first blade 210 is 120°, and the angle A2 of the second blade 220 is 108°.

27 , each concave portion 222 includes a bottom portion 222a in the middle in the circumferential direction with the deepest concave depth, and two bottom side portions 222b that gradually decrease in depth from the bottom portion 222a to two adjacent first blades 210 in the circumferential direction and are connected. In the present embodiment, each bottom side portion 222b is a curved surface that protrudes outward in the radial direction. The tip 221 of the second blade 220 defined by the left and right recesses 222 also includes a portion 222a corresponding to the bottom portion 222a (the same reference numerals are used for convenience) and a portion 222b corresponding to the two bottom side portions 222b (out use the same reference number for convenience). In the wheel 201, the convex curvature radius R1 of the boundary between the bottom side portion 222b adjacent in the circumferential direction and the first blade 210 is larger than the concave shape of the boundary between the bottom side portion 222b and the bottom portion 222a adjacent in the circumferential direction. The radius of curvature R2 (R1>R2). It should be noted that R1+R2=constant.

FIG. 28 is a schematic view showing a cut line SL4 provided by the wheel 201 to the surface of the glass substrate. In the cutting line SL4, the thick line portion L21 produced by the first blade 210 of the wheel 201 and the thin line portion L22 produced by the second knife 220 are alternately continuous. In the cutting line SL4, since the radius of curvature R1 between the bottom side portion 222b of the recessed portion 222 and the first blade 210 is large, an angle such as the angle C1' of the cutting line SL3 (see FIG. 24 ) does not occur. Therefore, the generation of microcracks mc can be further reduced or suppressed. It should be noted that, with the smaller radius of curvature R2 between the bottom side portion 222b and the bottom portion 222a, horizontal microcracks are likely to be generated between the thicker line portion L21 and the thinner line portion L22 in the cutting line SL4 , but the microcracks did not occur on the outside of the dicing line SL4 but on the inside, so there was no problem.

The above descriptions are only preferred feasible embodiments of the present invention, and any equivalent changes made by applying the description of the present invention and the scope of the patent application should be included in the patent scope of the present invention.

[this invention] 1, 1A, 61, 61A, 10, 201: Scoring wheel 2: main body 2a: side 3: Peripheral part 3a: a pair of bevels 3A: Eliminated the bevel of the recess 4: Ridge 5: Shaft hole 10,70,110,210: The first knife 11,71,111,211: The tip of the first knife 20,80,120,220: The second knife 21,81,121,221: The tip of the second knife 22,82,122,222: Recess 122a, 222a: Bottom 122b, 222b: Bottom side SL1, SL2, SL3, SL4: cutting lines C1': corner R1, R1', R2, R2': radius of curvature

FIG. 1 is a perspective view of a scribing wheel according to a first embodiment of the present invention. FIG. 2 is a side view of the scribing wheel of FIG. 1 . FIG. 3 is a front view of the scribing wheel of FIG. 1 . FIG. 4 is an enlarged view of a part of FIG. 2 . FIG. 5 is an explanatory diagram roughly showing a manufacturing process of the scribing wheel of FIG. 1 and the like. FIG. 6 is an explanatory diagram roughly showing a manufacturing process A of the scribing wheel of FIG. 1 and the like. FIG. 7 is an explanatory diagram roughly showing a manufacturing process B of the scribing wheel of FIG. 1 and the like. FIG. 8 is an explanatory diagram roughly showing a manufacturing process C of the scribing wheel of FIG. 1 and the like. FIG. 9 is an explanatory diagram corresponding to the manufacturing process of FIGS. 6 to 8 . Fig. 10 is a schematic view of a cut line given to a glass substrate by the scribing wheel of Fig. 1 and the like. FIG. 11 is a schematic diagram of a cut line provided on a glass substrate by a conventional scribing wheel. 12 is a perspective view of a scribing wheel according to a second embodiment of the present invention. FIG. 13 is a side view of the scribing wheel of FIG. 12 . FIG. 14 is a front view of the scribing wheel of FIG. 12 . FIG. 15 is a cross-sectional view taken along line AA of FIG. 13 . FIG. 16 is an enlarged view of the portion circled B in FIG. 15 . Fig. 17 is a schematic view of a cut line given to a glass substrate by the scribing wheel of Fig. 12 and the like. FIG. 18 is a modification of the scribing wheel of the second embodiment. FIG. 19 is a modification of the scribing wheel of the first embodiment. FIG. 20 is an explanatory diagram roughly showing a manufacturing process D of the scribing wheel of FIG. 19 . 21 is a partial side view of a scribing wheel according to a third embodiment of the present invention. FIG. 22 is a partial perspective view of the scribing wheel of FIG. 21 . FIG. 23 is a partial enlarged view of FIG. 21 . Fig. 24 is a schematic view of a cut line given to the surface of a glass substrate by the scribing wheel of Fig. 21 and the like. 25 is a partial side view of the scribing wheel according to the fourth embodiment of the present invention. FIG. 26 is a partial perspective view of the scribing wheel of FIG. 25 . FIG. 27 is a partial enlarged view of FIG. 25 . Fig. 28 is a schematic view of a cut line given to the surface of a glass substrate by the scribing wheel of Fig. 25 and the like.

1: Scribing wheel

2: main body

2a: side

3: Peripheral part

3a: a pair of bevels

4: Ridge

5: Shaft hole

10: The first knife

11: The tip of the first knife

20: The second knife

21: The tip of the second knife

22: Recess

Claims (9)

A scribing wheel for a brittle material substrate, which is a disc-shaped scribing wheel for imparting cutting lines to a brittle material substrate, characterized in that: An outer peripheral portion of the scribing wheel is provided with first blades and second blades alternately in the circumferential direction, and the outer peripheral portion includes: a pair of inclined surfaces intersecting in a V-shape to form the first blades; and a concave portion extending from the One or both of the pair of inclined surfaces are recessed to form the second blade, and the difference in the radial direction between the position of the blade edge of the first blade and the position of the blade edge of the second blade is less than 0.5 μm. The scribing wheel for a brittle material substrate according to claim 1, wherein the angle of the second blade is smaller than the angle of the first blade. The scribing wheel for a brittle material substrate according to claim 1 or 2, wherein the difference in the radial direction between the position of the cutting edge of the first blade and the position of the cutting edge of the second blade is 0. The scribing wheel for a brittle material substrate according to any one of Claims 1 to 3, wherein the recessed portion is recessed from only one of the pair of inclined surfaces to form the other one of the pair of inclined surfaces. The second knife. The scribing wheel for a brittle material substrate according to any one of claims 1 to 4, wherein the difference in the radial direction between the position of the blade edge of the first blade and the blade edge position of the second blade is 0.2 μm more than 0.5 μm and less than 0.5 μm, each of the concave portions includes a bottom portion in the middle in the circumferential direction with the deepest concave depth from one or both of the pair of inclined surfaces, and two circumferentially adjacent bottom portions of the depth from the bottom portion. The two bottom side portions of the first knife gradually becoming shallower and connected, the radius of curvature of the boundary between the bottom side portion adjacent to each other and the first knife is larger than that of the bottom side portion adjacent to each other and the first knife. The bottom boundary has a large radius of curvature. A method for manufacturing a scribing wheel for a brittle material substrate, which is a method for manufacturing a disc-shaped scribing wheel for imparting a cutting line to a brittle material substrate, characterized in that: The method for manufacturing a scribing wheel for a brittle material substrate includes: In step A, a pair of original bevels are processed on the outer periphery of the original body to be made into the scribing wheel, and the pair of original bevels are crossed in a V-shape to form a first original knife; In step B, a pair of concave portions recessed from both sides of the pair of original inclined surfaces are machined at predetermined intervals in the circumferential direction, the pair of concave portions form a second blade, and the first original blade and the second blade are formed on the circumference of the direction is alternated, and the difference in the radial direction between the position of the cutting edge of the first original knife and the position of the cutting edge of the second knife is set to 0.5 μm or more; and Step C, grinding the pair of original bevels into a pair of bevels, the pair of bevels intersecting in a V-shape to form a first blade, and the position of the blade edge of the first blade and the blade edge position of the second blade The difference in the radial direction is set to 0 or more and less than 0.5 μm. The method for manufacturing a scribing wheel for a brittle material substrate according to claim 6, wherein in the step B, the angle of the second blade is made smaller than the angle of the first original blade, and in the step C, the angle of the second blade is made smaller than the angle of the first original blade. The angle of the first knife is greater than the angle of the second knife. The method for manufacturing a scribing wheel for a brittle material substrate according to claim 6 or 7, comprising: a step D, after the step C, grinding one of the pair of inclined surfaces to eliminate the one of the inclined surfaces recess. A brittle material substrate characterized by being cut by using the scribing wheel according to any one of claims 1 to 5.

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