KR101348062B1 - Scribing wheel - Google Patents

Abstract

Provided is a scribing wheel having a good grip between a blade tip and a brittle substrate and capable of improving the end face strength of the scribed brittle substrate. The scribing wheel 10 of this invention is formed so that it may become the blade edge | tip 12a which continues the ridge part of a V-shaped blade along the circumference of a disk-shaped wheel, and also inclines the surface 12 of a V-shaped blade. The notch recess 13 is formed from the position spaced apart from the edge 12a by predetermined distance, the thin part 12b and the thick part 12c are alternately formed in the tip part of a V-shaped blade, and the notch recess The portion 13 is 180 °> θ2 when the angle of the blade tip 12a is θ1, and the angle between the blade end side of the surface forming the cutout recess 13 and the inclined surface 12 of the blade is θ2. It is formed so that it may become 180 degrees ((theta) 1) / 2.

Description

Scribing Wheel {SCRIBING WHEEL}

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a scribing wheel, and more particularly, to a scribing wheel which has a good grip between a blade tip and a brittle substrate, and which can improve the end face strength of the scribed brittle substrate.

Conventionally, in a manufacturing process of a flat display panel such as a liquid crystal display panel or an organic electroluminescence (EL) panel, a solar cell, or the like, a step of dividing a brittle material substrate such as a mother glass substrate is provided. In these division processes, the scribing wheel is rolled over the surface of the brittle substrate to form a scribe line while the scribing wheel is loaded with loads corresponding to various conditions such as the material and thickness of the brittle substrate. By loading a predetermined force on the substrate, the brittle substrate is divided along the scribe line to manufacture individual panels and glass substrates.

As these scribing wheels, generally, a V-shaped blade is formed along the circumference of the disc-shaped wheel (see Patent Document 1 below). When a scribe line is formed on a glass substrate using this conventional scribing wheel, a load is applied to the edge of the blade of the scribing wheel, so that elastic deformation occurs on the surface of the glass substrate in which the edge of the blade is in contact. When plastic deformation occurs at the contact point of the scribing wheel with the increase of the blade tip load, and the blade tip load increases, brittle fracture occurs beyond the limit point of the plastic deformation, and in the thickness direction of the glass substrate. Vertical cracks grow

At this time, by increasing the blade tip load, the depth at which the blade tip penetrates into the surface of the glass substrate increases, and the energy for generating vertical cracks increases, so that the length of the vertical cracks also increases. However, if the blade tip load exceeds a certain size, long vertical cracks can be formed, but internal deformation of the plastic deformation region along the scribe line of the surface of the glass substrate becomes saturated, and horizontal cracks occur, which is undesirable. Cutting chips (colllets) are generated and discarded.

As a result, a scribing wheel having long vertical cracks and less horizontal cracks formed, forming a V-shaped blade along the circumference of the disc-shaped wheel, and at the same time, a protrusion or a constant height at a constant pitch at the end of the blade. It is known to form the groove of depth (refer patent document 2). According to this scribing wheel, since the spot impact can be given when the projection portion is in contact with the glass substrate, the point contact caused by the projection is the center, and the stress generated in the surface direction of the glass substrate during scribing is conventionally Since it is small compared with the thing, unnecessary horizontal crack does not generate | occur | produce, and it becomes possible to scribe a glass substrate continuously, generating very long vertical cracks which penetrate a plate | board thickness to a glass substrate.

Similarly, the ridges of the V-shaped blades are formed along the circumference of the disk-shaped wheel so that the edges of the blades are continuous, and when the scribe lines are formed on the glass substrate, the notched recesses facing the depth direction of the scribe lines are formed. It is also known that the thin portion and the thick portion are alternately formed in the tip portion of the V-shaped blade by forming on the inclined surface of the blade just below the tip (see Patent Document 3 below).

Here, the scribing wheel disclosed by following patent document 3 is demonstrated using FIG. 5 and FIG. 5A is a side view of the scribing wheel disclosed in Patent Document 3 below, FIG. 5B is a sectional view, FIG. 5C is a front view, and FIG. 5D is an enlarged sectional view when a scribe line is formed on a glass substrate. . 6A is a figure explaining the action of the thin part of the scribing wheel shown in FIG. 5, and FIG. 6B is a figure explaining the action of the thick part.

In the scribing wheel 50, the edge of the blade 51a which becomes the ridge is shortly cut by the inclined surface 51 of the V-shaped blade along the outer periphery of the disk-shaped scribing wheel 50. It is formed continuously without. In addition, a through hole 52 is formed in the center portion of the scribing wheel 50, and a wheel pin (not shown) serving as a rotating shaft is inserted into the through hole 52, and is axially supported by the wheel pin. The scribing wheel 50 is made to move in the clouds.

Depth direction of this scribe line S when the scribing wheel 50 forms a scribe line in the glass substrate 54 (refer FIG. 5D) in the inclined surface 51 of the blade just below the blade tip 51a. The plurality of notched recesses 53 facing the surface are formed by appropriate means such as electrical discharge machining. Moreover, in this scribing wheel 50, the blade edge side part 53a of the surface which forms the notch recessed part 53 is formed so that it may be in parallel with the blade edge | tip 51a which forms a ridgeline part.

As shown in FIG. 5D, the notched recess 53 is formed from the normal depth of the scribe line S formed on the glass substrate 54, that is, from the surface of the glass substrate 54 to the blade tip 51a. When the depth is d1 (about 10 μm or less, usually 5 μm or less), the position d3 retracted from the surface of the glass substrate 54 from the position d2 retracted from the blade tip 51a on the inclined surface 51 of the blade. It is formed in a concave depression. Moreover, the blade edge side part 53a of the surface which forms the notch recessed part 53 becomes an arrangement relationship substantially perpendicular to the surface of the glass substrate 54. As shown in FIG. Thus, when the notch recessed part 53 is formed in the blade tip 51a side of the inclined surface 51 of a blade, the part in which the notch recessed part 53 was formed becomes the thin part 51b, and the notch recessed part ( The part where 53 is not formed becomes the thick part 51c, the thin part 51b and the thick part 51c are alternately formed, and the edge part 51a is formed continuously.

When forming a scribe line on the glass substrate 54 using this scribing wheel 50, the blade tip 51a of the scribing wheel 50 reaches the lowest point in the thickness direction of the glass substrate 54 Until the scribing by the thin part 51b and the thick part 51c which were formed in the front-end | tip side of a blade is repeated alternately, a scribing process advances, gradually increasing the depth of piercing of the blade tip 51a.

In the state where the thin portion 51b formed on the tip side of the blade is performing a scribe process, as shown in FIG. 6A, the cutout recess 53 becomes a relief recess and does not contact the inclined surface Sa of the groove of the scribe line S. Therefore, the whole load is concentrated only by the tip end portion of the blade tip 51a, and the scribe by the thin portion 51b proceeds effectively. In the scribing process by this thin part 51b, since the blade edge | tip 51a does not contact the plastic deformation area | region along the scribe line S, generation | occurrence | production of internal deformation can be suppressed low and generation of a horizontal crack can be prevented. And a shallow vertical crack Sb is formed at the bottom of the scribe line S. FIG. At this time, the thick part 51c is in the state just before entering the scribe line S. FIG.

When the thin portion 51b formed on the tip side of the blade passes and the thick portion 51c enters the scribe line S, both sides of the tip of the thick portion 51c contact the inclined surface Sa of the groove of the scribe line S. All of the blade tip load is applied to the inclined surface Sa of this groove. Further, as the thick portion 51c enters, as shown in Fig. 6B, the inclined surface Sa of the groove is pressed and plastically deformed and flattened. At this time, since the scribe line S is enlarged to the left and right, the vertical crack Sb is made larger. Further, when the thick portion 51c enters the scribe line S formed by the thin portion 51b formed on the tip side of the blade, the thick portion 51c is in contact with the inclined surface Sa of the groove of the scribe line S. As a result, it is in a state of giving a spot impact, and the formation of the vertical crack Sb is promoted.

In this manner, the scribes of the thin portion 51b and the thick portion 51c formed alternately on the tip end side of the blade alternately repeat to deepen the penetration into the glass substrate 54, which is equivalent to or less than conventional. Due to the blade tip load, the vertical crack Sb deeper than before can be formed. As a result, since the load applied to the glass substrate 54 at the time of scribing can be made small, since the residual stress hardly arises on the glass substrate 54, the effect that a generation | occurrence | production of a horizontal crack can be suppressed is exhibited. Done.

Japanese Patent Application Laid-Open No. 06-056451 Patent No. 3074143 Japanese Patent Application Publication No. 2010-126382

According to the scribing wheel 50 disclosed in the said patent document 3, the grip property between the blade edge | tip 51a and the glass substrate 54 is favorable, and the occurrence of a horizontal crack in the plastic deformation area of a scribe line is suppressed. Since the vertical cracks are effectively formed while the separation process is performed, an excellent effect is obtained that a glass substrate of high molding quality is obtained in which no unevenness occurs in the end face. However, according to the examination result of this inventor, when scribing the glass substrate 54 using the scribing wheel 50 disclosed in the said patent document 3, the subject that the end surface strength of the obtained glass substrate falls is Found.

MEANS TO SOLVE THE PROBLEM As a result of repeating various experiments in order to find out the generation | occurrence | production cause of the subject of the scribing wheel 50 currently disclosed by the said patent document 3, the edge part of the blade side of the surface which forms the notch recess 53 ( Since 53a) has an arrangement relationship that is substantially perpendicular to the surface of the glass substrate 54, it has been found that the spot impact caused by the thick portion 51c is caused by too large. Therefore, the present inventors have further studied, and since this spot impact does not exist at all, it becomes smaller than what is disclosed in the said patent document 3, Therefore, V formed along the outer periphery of the disk-shaped scribing wheel By re-viewing the shape of the notch recess formed on the inclined surface of the magnetic blade, the grip between the blade edge and the brittle substrate is good and the end surface strength of the brittle substrate such as the scribed glass substrate can be improved. It has been accomplished to complete the present invention.

That is, an object of the present invention is to provide a scribing wheel which has a good grip between the edge of a blade and a brittle substrate and can improve the end surface strength of the scribed brittle substrate.

In order to achieve the above object, the scribing wheel of the present invention is formed such that the ridge portion of the V-shaped blade is a continuous blade end along the circumference of the disk-shaped wheel, and on the inclined surface of the V-shaped blade. In the scribing wheel is formed from the position spaced apart from the end of the blade by a predetermined distance, the thin portion and the thick portion alternately in the tip portion of the V-shaped blade,

When the notch concave portion is set at an angle of the edge of the blade at θ1 (wherein θ1> 90 °) and the angle between the blade end side of the surface forming the notch concave portion and the inclined surface of the blade is θ2,

180 °> θ2> 180 °-(θ1) / 2

It is characterized in that it is formed to be.

In addition, "(theta) 2" in this invention includes the case where "the surface which forms a notch recessed part" is a curved surface, and "the surface which forms the notch recessed part" is the position which intersects the inclined surface of a blade in blade edge side part. Means the angle formed between the contact surface of "the surface which forms a notch recessed part" and the contact surface of the "inclined surface of a blade." Further, θ1 is an obtuse angle (θ> 90 °), preferably in a range of 165 ° ≧ θ1> 90 °.

And when (theta) 2 = 180 degrees, the notch recessed part is not formed and it is provided in the scribing wheel which provided the V-shaped blade | wing along the circumference of the disk-shaped wheel as disclosed in the said patent document 1. Corresponds. In addition, when (theta) 2 = 180 degrees ((theta) 1) / 2, the blade edge side part of the surface which forms a notch recess part is a state parallel to the blade edge which forms a ridge line part, and corresponds substantially to the said patent document 3. That is, in the scribing wheel of the present invention, a cutout recess is formed on the inclined surface of the V-shaped blade from a position spaced a predetermined distance from the edge of the blade. The angle of is larger than that of the scribing wheel disclosed in Patent Document 3.

As a result, horizontal cracks are less likely to occur than scribing wheels disclosed in Patent Document 1, but vertical cracks are shallower than scribing wheels disclosed in Patent Document 3. Therefore, according to the scribing wheel of the present invention, the grip between the blade tip and the brittle substrate is good, and the end face strength of the scribed brittle substrate can be improved. In addition, even if it intersects with another scribe line, a cutout is unlikely to occur at the intersection.

In addition, the scribing wheel of the present invention is a member in which a single crystal diamond, polycrystalline diamond, CBN, or the like is coated on the surface of a cemented carbide, a sintered diamond, or a steel or a cemented carbide by physical vapor deposition or chemical vapor deposition. Can be selected and used appropriately. In addition, since the size of a notch recess is small, it is preferable to form by laser processing in order to process with high precision. In the scribing wheel of the present invention, the cutout recess is preferably formed on the inclined surfaces of the V-shaped blades on both sides, but it is also possible to employ ones formed only on the inclined surfaces of the one blade, depending on the application. .

In the scribing wheel of the present invention, it is preferable that θ2 is made of 175 ° ≥θ2≥180 °-(θ1) / 2 + 5 °, furthermore, 175 ° ≥θ2≥180- (θ1) / More preferably, it consists of 2 + 45 degrees.

When θ2 is set to a condition of 180 °> θ2> 175 °, the effect of forming a cutout recess is small, and the difference in the effect that occurs between the scribing wheel disclosed in Patent Document 1 is small. Lose. Further, when θ2 is set to a condition of 180 °-(θ1) / 2 + 5 °> θ2 ≧ 180 °-(θ1) / 2, it occurs between the scribing wheel disclosed in Patent Document 3 above. The difference in the effect becomes small. When θ2 is a condition of 175 ° ≧ θ2 ≧ 180 ° − (θ1) / 2 + 45 °, the end face strength of the scribed brittle substrate can be improved.

In the scribing wheel of this invention, it is preferable that the said notch recessed parts are formed in the same shape on the same circumference, in multiple numbers of the same shape.

In the scribing wheel according to the present invention, even when a single or a plurality of different shapes are formed on the same circumference or are unevenly spaced or shifted apart as cutout concave portions, their respective effects are exerted. However, as a notch recessed part, when several pieces of the same shape are formed at equal intervals on the same circumference, the uniform scribe line can be formed over the whole length, and the scribing which abuts on a brittle board | substrate at the edge part. Since the contact state of the wheel becomes substantially uniform, the end face strength of the scribed brittle substrate can be further improved. Moreover, even if it intersects with another scribe line, a cutout becomes less likely to occur at an intersection part more.

In the scribing wheel of the present invention, the notch concave portion has a ratio b / a of the length a along the extending direction of the inclined surface of the blade and the length b along the direction orthogonal to the inclined surface of the blade,

b / a <1

It is preferable to form so that it may become.

When the notch concave portion satisfies the condition of b / a < 1, the notch concave portion becomes an oval shape, and is arranged in alignment with the extending direction of the inclined surface of the blade. Therefore, according to the scribing wheel of this invention, since many notch recessed parts can be formed in the inclined surface of a blade, the shape of the end surface of the scribed brittle substrate becomes more homogeneous, and the end surface strength can be improved more. .

1 is a side view of a scribing wheel of an embodiment.
FIG. 2 is a front view of the scribing wheel of FIG. 1. FIG.
3 is an enlarged cross-sectional view taken along line III-III of FIG. 1.
4A is a view for explaining the action of the thin part of the scribing wheel of the embodiment, and FIG. 4B is a view for explaining the action of the thick part.
FIG. 5A is a side view of a scribing wheel of a conventional example, FIG. 5B is a sectional view, FIG. 5C is a front view, and FIG. 5D is an enlarged sectional view when a scribe line is formed on a glass substrate.
FIG. 6A is a view for explaining the action of the thin part of the scribing wheel shown in FIG. 5, and FIG. 6B is a view for explaining the action of the thick part.

DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, embodiments of the present invention will be described with reference to the drawings. However, embodiment shown below shows an example of the scribing wheel for incorporating the technical idea of this invention, and does not intend to specify this invention to this scribing wheel, but is a claim It is applicable equally to the thing of the other embodiment contained in. In addition, in the drawing shown below, since each structure can be visually recognized easily, it is not necessarily shown like a real dimension or an angle, scale | stretching suitably for each component part.

First, the scribing wheel of embodiment is demonstrated with reference to FIGS. 1 is a side view of the scribing wheel of the embodiment. FIG. 2 is a front view of the scribing wheel of FIG. 1. FIG. 3 is an enlarged cross-sectional view taken along line III-III of FIG. 1.

As shown in FIGS. 1-3, the scribing wheel 10 of embodiment is provided with the shape in which the V-shaped blade was formed over the perimeter along the circumference of the disk-shaped wheel. More specifically, the lower bottom face has a shape in which lower bottom faces of two cones having a larger area than the upper bottom face are arranged to face each other, have a main plate egg shape, the main body portion 11 and the inclined surface of the blade. (12) and the blade tip 12a which is a ridge formed by the inclined surface of the blade.

In addition, the scribing wheel 10 is obtained by coating monocrystalline diamond, polycrystalline diamond, CBN, or the like on the surface of cemented carbide, sintered diamond, steel, or cemented carbide by physical vapor deposition or chemical vapor deposition. The member can be appropriately selected and used.

1 and 2, the main body portion 11 has a disk shape, and a through hole penetrating the main body portion 11 along the rotation shaft 10b near the center of the main body portion 11 ( 10a) is formed. Moreover, the inclined surface 12 of the blade is provided in the outer periphery of the main-body part 11 in an annular shape.

As shown in FIG. 1, the inclined surface 12 of a blade is an annular body formed by the concentric inner and outer peripheries centering on the rotating shaft 10b. Moreover, as shown in FIG. 2, the inclined surface 12 of a blade becomes a V shape in front view. The thickness of the inclined surface 12 of the blade along the rotating shaft 10b gradually decreases from the rotating shaft 10b side toward the blade tip 12a. The blade tip 12a is provided along the outermost periphery of the inclined surface 12 of the blade. In addition, the inclined surface 12 of a blade can be formed by the bevel grinding method (the method of grinding using the surface of a grindstone and forming an inclined surface) similarly to the case of a conventional example.

And in the scribing wheel 10 of this embodiment, the several notch notch recess 13 of the same shape is formed in concentric form at equal intervals in the inclined surface 12 of a blade. In addition, in FIG. 1 and FIG. 2, only some are shown as the notch recessed part 13, respectively, for the convenience of drawing production. Since this cutout recess 13 is small in size, what is necessary is just to form it by the laser processing method in order to process with high precision. In addition, the notch recess 13 may not all be the same shape, it may not be an equal space | interval, and may be located in a different position respectively on both surfaces of the inclined surface of a blade.

In addition, since the notch recessed part 13 also includes the case where the surface 13a (refer FIG. 3) which forms the notch recessed part 13 is a curved surface, the blade end side part and the blade of the surface 13a which forms the notch recessed part The angle θ2 between the inclined surfaces 12 of the edges is the contact surface L and the surface of the surface forming the cutout recess at the position where the face 13a forming the cutout portion intersects the inclined surface 12 of the blade at the blade end side portion. It is defined as the angle formed between the contact surfaces of the inclined surface 12 of.

Each notch recessed part 13 has ratio b / a of length a along the extension direction of the inclined surface 12 of a blade, and length b along the direction orthogonal to the inclined surface 12 of a blade, and b / a <1. It is formed in ellipse shape as much as possible, and in FIG. 1 and FIG. 2, the example which made the long ellipse shape of b / a <0.5 or less is shown. The plurality of cutout recesses 13 have the normal depth of the scribe line S formed on the glass substrate 14 (see FIG. 4), that is, the surface of the glass substrate 14, similar to that disclosed in Patent Document 3 above. When the depth from the blade tip 12a to d1 (about 5 µm or less) is retracted from the surface of the glass substrate 14 from the position d2 retracted from the blade tip 12a on the inclined surface 12 of the blade. The position d3 is formed in a concave depression.

The notch recess 13 is formed from a position spaced apart from the blade tip 12a by a predetermined distance on the inclined surface 12 of the V-shaped blade, and is cut out on the blade tip 12a side of the inclined surface 12 of the blade. By forming the recessed part 13, the part in which the notch recessed part 13 was formed becomes the thin part 12b, and the part in which the notch recessed part 13 is not formed becomes the thick part 12c, The thin portion 12b and the thick portion 12c are alternately formed at the tip portion of the V-shaped blade, and the blade tip 12a is formed continuously.

And in the scribing wheel of this embodiment, unlike what was disclosed in the said patent document 3, as shown in FIG. 3, as the notch recess 13, the angle of the blade edge | tip 12a is (theta) 1 and the notch recessed part. When the angle between the blade end side of the surface forming (13) and the inclined surface 12 of the blade is θ2, it is formed so as to be 180 °> θ2> 180 °-(θ1) / 2.

This θ2 is determined as follows. That is, when (theta) 2 = 180 degree, the notch recessed part is not formed and is the same as the scribing wheel in which the V-shaped blade was formed along the circumference of the disc-shaped wheel as disclosed in the said patent document 1 It becomes a shape. In this case, by increasing the blade tip load, the depth at which the blade tip 12a penetrates into the surface of the glass substrate 14 increases, and the energy for generating vertical cracks increases, so that the depth of the vertical crack increases, If the end load exceeds a certain magnitude, horizontal cracks occur and many undesirable cullets are generated.

On the other hand, in the case of θ2 = 180 °-(θ1) / 2, the blade end 12a of the surface forming the cutout recess 13 as disclosed in Patent Document 3 forms the blade tip 12a in which the ridge is formed. It becomes the same shape as a parallel state. That is, the blade end side part of the surface which forms the notch recessed part 13 becomes an arrangement relationship which is substantially perpendicular to the surface of the glass substrate 14. In this case, since the spot impact is given when the thick portion 12c enters the scribe line formed by the thin portion 12b formed on the tip side of the blade, the formation of vertical cracks is encouraged.

As a result, since the load applied to the glass substrate 14 at the time of scribing can be made small, the residual stress hardly arises in the glass substrate 14, and since generation | occurrence | production of a horizontal crack can be suppressed, the division process When performing the step, a glass substrate of high molding quality is obtained in which unevenness does not occur in the end face. On the other hand, since the spot impact when the thick portion 12c enters the scribe line formed by the thin portion 12b formed on the tip side of the blade is large, the end face strength is lowered.

Therefore, in this embodiment, in order to make the notch concave part 13 formed, the conditions of 180 degrees> (theta) 2 are employ | adopted, and also the scribe formed by the thin part 12b formed in the front end side of the blade. In order to prevent the spot impact when the thick portion 12c enters the line from becoming too large, a condition of θ2> 180 °-(θ1) / 2 is employed.

The action at the time of forming the scribe line S on the glass substrate 14 using the scribing wheel 10 of this embodiment is demonstrated using FIG. 4A is a figure explaining the action of the thin part of the scribing wheel of embodiment, and FIG. 4B is a figure explaining the action of the thick part.

The scribing disclosed in the patent document 3 shown in FIG. 6 until the blade tip 12a of the scribing wheel 10 of the embodiment reaches the depth of digging set in the thickness direction of the glass substrate 14. As in the case of the ice wheel, the scribe by the thin part 12b and the thick part 12c formed in the front end side of a blade is alternately repeated.

And in the state where the thin part 12b formed in the front end side of the blade is performing a scribe process, as shown in FIG. 4A, the notch recess 13 contacts the inclined surface Sa of the groove | channel of the scribe line S, Only the tip of the tip 12a is in a state where all of the load is concentrated, and the scribe by the thin portion 12b proceeds effectively. In the scribing process by this thin part 12b, even if the blade tip 12a contacts the plastic deformation area | region along the scribe line S, generation | occurrence | production of internal deformation can be suppressed low and generation of a horizontal crack can be prevented. In the bottom of the scribe line S, a shallow vertical crack Sc is formed. At this time, the thick portion 12c is in a state just before entering the scribe line S. FIG.

When the thin portion 12b formed on the tip side of the blade passes and the thick portion 12c enters the scribe line S, both sides of the tip of the thick portion 12c contact the inclined surface Sa of the groove of the scribe line S. All of the blade tip load is applied to the inclined surface Sa of this groove. Further, as the thick portion 12c enters, as shown in FIG. 4B, the inclined surface Sa of the groove is pressed to plastically deform and flatten. At this time, since the scribe line S is enlarged to the left and right, the vertical crack Sc is made larger, and furthermore, since the thick portion 12c is in contact with the inclined surface Sa of the groove of the scribe line S, the vertical crack The formation of Sc is encouraged.

In this way, the scribes of the thin portion 12b and the thick portion 12c formed alternately on the tip side of the blade are alternately repeated, so that the vertical crack Sc can be formed by the blade tip load that is equal to or lower than the conventional one. . As a result, since the load applied to the glass substrate 14 at the time of scribing can be made small, since residual stress hardly arises in the glass substrate 14, generation | occurrence | production of a horizontal crack can be suppressed.

In addition, in the scribing wheel 10 of the present embodiment, θ2 between the blade angle θ1 and the angle θ2 between the blade end side portion of the surface forming the cutout recess 13 and the inclined surface 12 of the blade. Since the condition of> 180 °-(θ1) / 2 is satisfied, the RBI impact by the thick portion 12c formed on the tip side of the blade is θ2 = 180 °-(θ1) / 2. It becomes smaller than the case of the scribing wheel disclosed in 3.

Therefore, according to the scribing wheel 10 of this embodiment, although a horizontal crack is harder to generate than the scribing wheel disclosed by the said patent document 1, the scribing wheel disclosed by the said patent document 3 In addition, the vertical crack is shallower, and the grip between the blade tip and brittle substrates such as glass substrates is improved similarly to the scribing wheel disclosed in Patent Document 3. In addition, since the vertical crack becomes shallower, the end surface strength of the scribed brittle substrate can be improved, and even if it intersects with another scribe line, the cutout is unlikely to occur at the intersection.

In addition, in the scribing wheel 10 of the present embodiment, 175 between the blade angle θ1 and the angle θ2 between the blade end side portion of the surface forming the cutout recess 13 and the inclined surface 12 of the blade, 175. It is preferable that it consists of ° ≧ θ2 ≧ 180 °-(θ1) / 2 + 5 °, and more preferably, 175 ° ≧ θ2 ≧ 180 °-(θ1) / 2 + 45 °.

When θ2 is set to a condition of 180 °> θ2> 175 °, the effect of forming the notch recess 13 is small, and substantially between the scribing wheel disclosed in Patent Document 1 above. The difference does not occur. Further, when θ2 is set to a condition of 180 °-(θ1) / 2 + 5 °> θ2 ≧ 180 °-(θ1) / 2, substantially between the scribing wheel disclosed in Patent Document 3 above. The difference in effect does not occur. When θ2 is a condition of 175 ° ≧ θ2 ≧ 180 ° − (θ1) / 2 + 45 °, since the vertical crack does not become too deep, the end face strength of the scribed brittle substrate can be improved.

Moreover, the outer diameter D (refer FIG. 2) of the scribing wheel 10 becomes like this. Preferably it is the range of 1-5 mm. When the outer diameter D of the scribing wheel 10 is smaller than 1 mm, the handleability and durability of the scribing wheel 10 fall, and industrial production also becomes difficult. On the other hand, when the outer diameter D of the scribing wheel 10 is larger than 5 mm, the appropriate load range at the time of scribing shifts to the high load side, and there exists a tendency for a scribe line to become difficult to form at low load.

In addition, the thickness T of the scribing wheel 10 is preferably in the range of 0.5 to 1.2 mm. When the thickness T of the scribing wheel 10 is smaller than 0.5 mm, workability and handleability may fall. On the other hand, when the thickness T of the scribing wheel 10 is larger than 1.2 mm, the cost for manufacturing the scribing wheel 10 becomes high.

In addition, the blade angle θ1 of the blade tip 12a is usually an obtuse angle, preferably 165 ° ≧ θ> 90 °. In addition, the specific angle of the blade angle (theta) 1 is suitably set from the material, thickness, etc. of the brittle material substrate to cut | disconnect. In addition, the optimal formation position of the notch recess 13 is a blade tip from the surface of the brittle substrate at the time of scribing in consideration of the material and thickness of the brittle material substrate, the blade angle θ1 and the thickness of the scribing wheel. What is necessary is just to set experimentally suitably in the range smaller than the depth to (12a), ie, about 1-5 micrometers. In addition, although there is no critical limit, the pitch between the adjacent notch recesses 13 should just select suitably in the range of 20-200 micrometers. Moreover, the scribing wheel of the said embodiment, the scribing wheel (1st conventional example) disclosed by the said patent document 1, and the scribing wheel (2nd conventional example) disclosed by the said patent document 3 Summarizing the difference of the characteristics, it becomes as shown in following Table 1.

In addition, in the scribing wheel 10 of the said embodiment, although the example of the several thing of the same shape was formed as the notch recess 13 on the same circumference, the notch recessed part ( (13) Even if the different shapes are formed in a single or plural and on the same circumference at different intervals or shifts, their effects can be achieved. However, as the notch concave portions 13, when a plurality of the same shapes are formed at equal intervals on the same circumference, a uniform scribe line can be formed over the entire length, and at the end, brittleness of the glass substrate or the like is formed. Since the contact state of the scribing wheel which contacts the board | substrate becomes substantially uniform, the end surface strength of the scribed brittle board | substrate can be improved more, and even if it may cross | intersect with another scribe line, it cuts out more in the intersection part. This becomes difficult to occur.

In the scribing wheel 10 of the said embodiment, as the notch recess 13, the length a along the extending direction of the inclined surface 12 of a blade, and the length b along the direction orthogonal to the inclined surface 12 of a blade. Ratio b / a showed an example of long ellipse shape with b / a <0.5. However, in the present invention, the notch recess 13 can exhibit its own effect even under the condition of b / a≥1, but at least if the condition of b / a <1 is satisfied, the notch recess Since the shape of (13) becomes an ellipse shape and is aligned and arranged in the direction orthogonal to the inclined surface 12 of a blade, many notch recesses 13 can be formed in the inclined surface 12 of a blade, The end face shape of the scribed brittle substrate becomes more homogeneous, and the end face strength can be further improved.

10: scribing wheel
10a: through hole
10b: axis of rotation
11: main body
12: slope of the blade
12a: end of day
12b: thinning
12c: thick portion
13: notch recess
14: glass substrate
S: scribe line
Sa: slope of the groove
Sc: Vertical Crack

Claims (7)

It is formed along the circumference of the disk-shaped wheel so that the ridge portion of the V-shaped blade is a continuous blade end, and a cutout recess is formed on the inclined surface of the V-shaped blade from a position spaced a predetermined distance from the blade end, In the scribing wheel in which a thin portion and a thick portion are alternately formed at the tip portion of the V-shaped blade,
When the notch concave portion is set at an angle of the edge of the blade at θ1 (wherein θ1> 90 °) and the angle between the blade end side of the surface forming the notch concave portion and the inclined surface of the blade is θ2,
180 °>θ2> 180 °-(θ1) / 2
Scribing wheel, characterized in that is formed to be. The method of claim 1,
Θ2 is
175 ° ≥θ2≥180 °-(θ1) / 2 + 5 °
Scribing wheel, characterized in that consisting of. 3. The method of claim 2,
Θ2 is
175 ° ≥θ2≥180 °-(θ1) / 2 + 45 °
Scribing wheel, characterized in that consisting of. The method of claim 1,
The scribing wheel according to claim 1, wherein the notched recesses are formed in plural, having the same shape on the same circumference at equal intervals. 3. The method of claim 2,
The scribing wheel according to claim 1, wherein the notched recesses are formed in plural, having the same shape on the same circumference at equal intervals. The method of claim 3,
The scribing wheel according to claim 1, wherein the notched recesses are formed in plural, having the same shape on the same circumference at equal intervals. 7. The method according to any one of claims 1 to 6,
The notch concave portion has a ratio b / a of the length a along the extending direction of the inclined surface of the blade and the length b along the direction orthogonal to the inclined surface of the blade,
b / a <1
A scribing wheel, characterized in that formed so as to be.

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