TWI752133B - cutter wheel - Google Patents

Abstract

The present invention provides a cutter wheel which can form a highly permeable and perfect scribe line that can surely bite into a substrate, thereby being able to be divided into unit products with excellent end face strength.

The cutting wheel system of the present invention has a V-shaped cutting edge ridge line 4 formed by two inclined surfaces 3a and 3a intersecting with each other on the circumferential surface, and a groove portion is machined at a specific pitch P in the entire area of the cutting edge ridge line 4 5. The groove portion 5 is alternately formed with the remaining blade edge ridge line portions 6, the depth 5b of the groove portion 5 is 1-3 μm, and the length 5a of the groove portion 5 is formed by 3.5-8 times the depth 5b of the groove portion 5, The length 6a of the blade edge ridge portion 6 is formed at 5 to 15 μm, whereby a scratch-free and highly permeable scribe line S can be formed.

Description

cutter wheel

The present invention relates to a cutter wheel (also referred to as a scribing wheel) used for processing a scribing line (grooving) for cutting on the surface of a brittle material substrate such as glass or a bonded substrate in which two brittle material substrates are bonded ).

In the past, a method has been generally known in which a cutting wheel is pressed against the surface of the substrate to form a scribe line in the process of dividing a brittle material substrate such as a glass substrate (hereinafter also referred to as a "substrate"), and thereafter, a scribe line is formed along the surface of the substrate. The scribe line is disclosed in Patent Document 1, for example, by applying an external force from the back side to deflect the substrate, thereby dividing the substrate into each unit substrate. The cutter wheel is used for the scribing of the brittle material substrate. The cutter wheel has a V-shaped cutting edge composed of two inclined surfaces intersecting with each other on the circumferential surface of the circular plate body with a diameter of 1-4 mm. Bearing holes for mounting. As the above-mentioned cutter wheel, there are cutter wheels (hereinafter referred to as "ordinary cutter wheels") that smoothly finish the ridge line of the blade edge, and those provided with grooves (notches) at a specific pitch on the ridge line of the blade edge. ) of the cutter wheel (hereinafter referred to as the "cutter wheel with grooves"). In the latter cutter wheel with grooves, the pitch of the grooves is generally formed to be, for example, 20 to 200 μm, and the length along the ridge line of the edge of the grooves is 1.5 to 2.5 times the depth of the grooves. ratio formation. The scribe lines formed by these cutter wheels will be described with reference to FIG. 3 . Fig. 3 shows ribs and vertical cracks formed in the scribe line of the substrate, Fig. 3(a) is a sectional view along the scribe line direction, and Fig. 3(b) is a sectional view along the direction orthogonal to the scribe line. The scribe line S is formed by the bite mark of the cutter wheel on the substrate surface, that is, the plastic deformation area, and the vertical crack 8 generated right below the plastic deformation area and penetrated in the thickness direction of the substrate W. Characteristic marks called ribs 7 are produced over a specific depth above the vertical cracks 8 . L1 of FIG. 3 represents the rib amount (depth) from the substrate W surface, and L2 represents the vertical crack amount (penetration amount) from the substrate W surface. Using a common cutter wheel can form a perfect groove surface when scribing. On the other hand, in the cutter wheel with grooves provided with grooves (cuts) on the ridgeline of the cutting edge, by alternately forming the grooves and the ridgeline parts (convex parts) of the cutting edge, it is possible to use the same as that of ordinary cutters. The higher scribing load of the wheel ratio bites into the surface of the substrate, and the scribing lines can be effectively formed by the above-mentioned ribs or vertical cracks. [Prior Art Document] [Patent Document] [Patent Document 1] Japanese Patent No. 3787489

However, even with the above-mentioned grooved cutter wheel, there is still a problem in the processing of the scribe line just above the sealing portion of the liquid crystal display panel, etc., which is attached to the substrate. Figures 7 and 8 show the mother board of the liquid crystal display panel before splitting, which are two large-area glass substrates W and W, that is, electronic components such as thin film transistors (TFT (Thin Film Transistor)) that drive liquid crystals are formed The glass substrate and the glass substrate on which the counter electrode is formed are formed by bonding together through the sealing portion 10 so as to form a plurality of liquid crystal injection regions 11 . In addition, in recent years, the scribe line S is processed by the cutter wheel 12 on the large-area glass substrate W at the position just above the sealing portion 10, and is divided into unit products from the scribe line S in the next step.

When using the cutter wheel 12 to machine the scribe line S on the glass substrate W just above the sealing portion 10, if the cutter wheel with grooves is used before, there may be elasticity due to the material of the sealing portion 10 or Due to the change in the internal stress of the substrate due to sealing, irregular cracks (horizontal cracks) extending in the horizontal direction on the surface of the substrate are likely to occur, or vertical cracks cannot be sufficiently formed. If the vertical crack is insufficient, it will not be able to be split during scribing, or damage such as scratches will occur on the split surface, resulting in problems such as deterioration of the strength of the end face, and the frequency of defective products will increase.

Therefore, the object of the present invention is to provide a cutter wheel which has less horizontal cracks on substrates of brittle materials such as glass, and can form highly permeable scribe lines, thereby being able to cut into unit products with excellent end face strength.

In order to solve the above-mentioned problems, the present invention adopts the following technical means. That is, the cutter wheel of the present invention is a disc-shaped cutter wheel, and has a V-shaped blade edge ridge line composed of two inclined surfaces intersecting with each other on the circumferential surface, and the entire area of the blade edge ridge line is at a specific pitch. The grooves are machined, and the grooves and the remaining ridge lines of the cutting edge are alternately formed, and the depth of the grooves is formed at 1 to 3 μm, and the length of the grooves is formed by 3.5 to 8 times the depth of the grooves. , the length of the above-mentioned blade edge ridge line is formed with 5~15μm.

Here, it is preferable that the diameter of the cutter wheel is set to 1 to 5 mm, and the angle of the blade edge at which the two inclined surfaces intersect is set to be 90 to 120°.

According to the cutter wheel constructed as above, the edge of the ridge line portion of the blade edge bites into the substrate to form deep ribs, and can form vertical cracks with high penetration required for cutting. Especially in the present invention, since the length of the groove portion is increased by 3 to 8 times the depth of the groove portion, the load is concentrated on the ridgeline portion of the cutting edge, and even under the condition that the vertical crack is not easy to penetrate the substrate, it can be High penetration processing to scribe lines, and inhibit the generation of horizontal cracks. Thereby, in the next breaking step, it is possible to break with an intact broken surface, and there is an effect that a unit product with excellent end face strength can be obtained.

Hereinafter, the grooved cutter wheel of the present invention will be described in detail based on the drawings. Fig. 1 is a side view showing the grooved cutter wheel A of the present invention, and Fig. 2 is a front view thereof. In addition, the area enclosed by the circle in FIG. 1 is enlarged and displayed at the upper right of the figure. The cutter wheel A with grooves is made of metal materials with excellent tool properties, such as cemented carbide, sintered diamond, single crystal diamond, etc., and has a mounting bearing hole 2 in the center of the disc-shaped main body 1, and on the circumferential surface The blade edge ridge line 4 which consists of the left and right inclined surfaces 3a and 3a which cross each other is formed. The diameter D of the cutter wheel A with grooves is selected from 2 to 4 mm, but in this embodiment, the diameter D is set to 2 mm. In addition, the angle α of the cutting edge where the left and right slopes 3a and 3a intersect is 100° or 105°, the thickness is 650 μm, and the inner diameter of the bearing hole 2 is 0.8 mm. Furthermore, the grooved cutter wheel A of the present invention processes the grooves 5 . . . in the entire area of the ridgeline 4 of the cutting edge at a specific pitch, by alternately forming the grooves 5 and the remaining ridgelines 6 of the cutting edge and constitute. According to the first embodiment of the grooved cutter wheel A of the present invention, the entire circumference of the cutter wheel is divided into 275 to form the groove portion, the depth 5b of the groove portion 5 is set to 2.5 μm, and the circumferential direction of the groove portion 5 is set to 2.5 μm. The length 5a was set to 11.5 μm which is about 4.5 times the depth 5b, and the length 6a in the circumferential direction of the blade edge ridge portion 6 was formed to be 12.5 μm. In addition, the cutting edge angle α at which the two inclined surfaces 3a and 3a intersect is set to 100°. Hereinafter, the cutter wheel with grooves of the first embodiment is referred to as No. 1. In the second embodiment, the number of divisions of the groove 5, the length 5a and depth 5b of the groove 5, and the length 6a of the edge ridge 6 are the same as those of wheel No. 1, and the edge angle α is set to 105°. Hereinafter, this is referred to as wheel No. 2. In the third embodiment, the number of divisions of the groove portion 5 is 275, the depth 5b of the groove portion 5 is 3 μm, the length 5a of the groove portion 5 is 11.5 μm, and the length of the edge ridge portion 6 is 6a is formed at 12.5 μm. In addition, the cutting edge angle α is set to 100°. Hereinafter, this is referred to as wheel No. 3. In the fourth embodiment, the number of divisions of the groove 5, the length 5a and depth 5b of the groove 5, and the length 6a of the edge ridge 6 are the same as those of wheel No. 3, and the edge angle α is set to 105°. Hereinafter, this is referred to as wheel No. 4. In the first comparative example, the number of divisions of the groove portion 5 was 300, the depth 5b of the groove portion 5 was 3 μm, the length 5a of the groove portion 5 was 9 μm, and the length of the edge ridge portion 6 was 6a is formed at 8.5 μm. In addition, the cutting edge angle α is set to 100°. Hereinafter, this is referred to as wheel No. 5. In the second comparative example, the number of divisions of the groove 5, the length 5a and depth 5b of the groove 5, and the length 6a of the edge ridge 6 were the same as those of wheel No. 5, and the edge angle α was set to 105°. Hereinafter, this is referred to as wheel No. 6. The cutter wheel A with grooves constructed as above is installed on the scribing head 13 of the scribing device B shown in FIG. Thereby, the scribe line S for division is processed on the surface of the board|substrate W. At this time, any of the grooved cutter wheels A of the above-mentioned wheel Nos. 1 to 6, as shown in FIGS. 4 and 5 , can form ribs on the glass substrate W and can form vertical cracks. Fig. 4 shows the ribs of the glass substrate W when the cutting wheel A with grooves of wheel Nos. 1 to 6 is subjected to a scribing test of 0.05 MPa, 0.06 MPa and 0.07 MPa for several times. The average value of the amount L1 and the vertical crack amount L2. In addition, the glass substrate W used as a processing object used the thing of thickness 0.2 mm. Furthermore, Fig. 5 is a graph showing the numerical data of Fig. 4, Fig. 5(a) shows the depth of the rib from the surface of the substrate, and Fig. 5(b) shows the vertical direction including the rib from the surface of the substrate The depth of the crack. In addition, FIG. 6 is a bar graph which shows the scribe line formation area from the viewpoint of the scribe line load of each grooved cutter wheel A. As shown in FIG. As a result, in the grooved cutter wheels A of the wheel Nos. 1 to 6 of the present invention, the deep rib amount L1 ranging from a minimum of 42.99 μm to a maximum of 62.99 μm was detected. In addition, even in the vertical crack amount L2, high penetration values ranging from the lowest 174.20 μm to the highest 190.12 μm were detected. From this test data, it can be seen that ribs are definitely formed on the glass substrate W, and vertical cracks required for breaking are formed. Here, as can be seen from FIG. 6 , with respect to Nos. 1, 3, and 5 with a cutting edge angle of 100°, a rib was formed by a relatively low load, and a vertical crack was generated. However, in No. 5 of the comparative example, the vertical cracks in all regions are relatively shallow, and the difference becomes large especially at 0.05 MPa on the low-load side. Therefore, it is considered that Nos. 1 and 3 transmit the load to the substrate more efficiently even when scribing is performed with the same load. Under the test conditions, this tendency is particularly remarkable at a blade angle of 100°, but the same tendency is also found at a blade angle of 105° under scribing conditions such as changing the thickness of the substrate. In this way, by increasing the length 5a of the groove portion 5 to 3.5 to 8 times the depth 5b of the groove portion 5, the load is concentrated on the edge of the edge of the blade edge ridge portion 6, and the efficiency can be achieved even on the low-load side of the scribing area. Deep vertical cracks are well formed, and horizontal cracks are not easily generated due to excess load. Generally, in the scribe line on the seal, vertical cracks are less likely to enter due to changes in the internal stress of the substrate, and on the other hand, horizontal cracks are prone to occur. However, with a relatively low scribe line load of 0.05 MPa in the scribe line forming region as shown in FIG. 4, the scribe line S can be easily processed with high penetration. In this way, the occurrence of horizontal cracks can be suppressed, and in the next breaking step, the fracture can be carried out with a perfect split surface, and a unit product with excellent end face strength can be obtained. In addition, although the indication of the test data is omitted, in the case of a cutter wheel with a groove with a diameter of 3 mm, or a cutter wheel with a groove with a diameter of 4 mm, which has the same cutting edge as the cutting wheel A with a groove with a diameter of 2 mm above In the case of the cutter wheel, a perfect score line with deep ribs and highly penetrated vertical cracks can also be formed, similar to the above-mentioned cutter wheel A with a groove of 2 mm in diameter. The above numerical values of the length 5a and the depth 5b of the groove portion 5 of the grooved cutter wheel A are shown as the best examples, and the present invention is not limited to the above numerical values, and can be implemented within the following ranges. That is, the depth 5b of the groove portion 5 is 1 to 3 μm, the length 5a of the groove portion 5 is 3.5 to 8 times the depth 5b, and the length of the edge ridge portion is 5 to 15 μm. In addition, it is acceptable that the edge angle α is within the range of 90° to 120°. In addition, the side surface shape of the groove part 5 may be replaced with the trapezoidal shape shown in FIG. 1, and may be a V-shape or a circular arc shape. The representative embodiments of the present invention have been described above, but the present invention is not limited to the above-mentioned embodiments, and appropriate modifications and changes can be made within the scope of achieving the object of the present invention without departing from the scope of the patent application. [Industrial Applicability] The present invention can be preferably applied to a cutter wheel used for processing a scribing line for cutting on the surface of a brittle material substrate such as glass or a laminated substrate in which two brittle material substrates are bonded .

1‧‧‧Main body 2‧‧‧Bearing hole 3a‧‧‧Chamfer 4‧‧‧Cut ridge line 5‧‧‧Slot 5a‧‧‧Length of groove 5b‧‧‧Depth of groove 6‧‧‧ Blade ridge 6a‧‧‧Length of blade ridge 7‧‧‧Ribbon8‧‧‧Vertical crack 10‧‧‧Sealing part 11‧‧‧LCD injection area 12‧‧‧Cutter wheel 13‧ ‧‧Scribing head 14‧‧‧Platform A‧‧‧Cutter wheel B‧‧‧Scribing device D‧‧‧Diameter L1‧‧‧Rib length L2‧‧‧Vertical crack amount S‧‧‧Scribing W ‧‧‧Brittle material substrateα‧‧‧Tool tip angle

FIG. 1 is a side view of the grooved cutter wheel of the present invention. Figure 2 is a front view of the grooved cutter wheel of the present invention. 3(a) and (b) are cross-sectional views showing scribe lines formed on a brittle material substrate. FIG. 4 is a graph showing scribing test data using the grooved cutter wheel of the present invention. Figures 5(a) and (b) are graphs showing the numerical data of Figure 4 as graphs. FIG. 6 is a bar graph showing a scribe line forming area of the grooved cutter wheel of the present invention. FIG. 7 is a plan view showing a bonded substrate to be processed. FIG. 8 is a cross-sectional view of FIG. 6 . Fig. 9 is a schematic diagram showing a front view of the scribing device.

1: main body

2: Bearing hole

5: Groove

5a: Length of groove

5b: Depth of groove

6: Blade tip ridge line

6a: The length of the ridge line of the blade tip

A: Cutter wheel

Claims (2)

A cutter wheel, which is a disc-shaped cutter wheel, and has a V-shaped cutter tip ridge line formed by two inclined surfaces intersecting with each other on the circumferential surface, and the entire area of the cutter tip ridge line is machined at a specific pitch. The grooves are formed alternately with the remaining edge ridges, the depth of the grooves is 1 to 3 μm, and the length of the grooves is 3.5 to 8 times the depth of the grooves. The length of the ridge line portion is formed to be 5 to 15 μm. As claimed in claim 1, the cutter wheel, wherein the diameter of the cutter wheel is 1~5mm, and the angle of the cutting edge at the intersection of the two inclined surfaces is 90~120°.

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