TWI787411B - Resin molding device - Google Patents
Resin molding device Download PDFInfo
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- TWI787411B TWI787411B TW107144278A TW107144278A TWI787411B TW I787411 B TWI787411 B TW I787411B TW 107144278 A TW107144278 A TW 107144278A TW 107144278 A TW107144278 A TW 107144278A TW I787411 B TWI787411 B TW I787411B
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
- B29C43/02—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles
- B29C43/18—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles incorporating preformed parts or layers, e.g. compression moulding around inserts or for coating articles
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
- B29C43/32—Component parts, details or accessories; Auxiliary operations
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
- B29C43/32—Component parts, details or accessories; Auxiliary operations
- B29C43/34—Feeding the material to the mould or the compression means
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
- B29C43/32—Component parts, details or accessories; Auxiliary operations
- B29C43/36—Moulds for making articles of definite length, i.e. discrete articles
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
- B29C43/32—Component parts, details or accessories; Auxiliary operations
- B29C43/50—Removing moulded articles
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
- B29C43/32—Component parts, details or accessories; Auxiliary operations
- B29C43/52—Heating or cooling
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
- B29C43/32—Component parts, details or accessories; Auxiliary operations
- B29C43/58—Measuring, controlling or regulating
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
- B29C43/32—Component parts, details or accessories; Auxiliary operations
- B29C43/36—Moulds for making articles of definite length, i.e. discrete articles
- B29C2043/3602—Moulds for making articles of definite length, i.e. discrete articles with means for positioning, fastening or clamping the material to be formed or preforms inside the mould
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
- B29C43/32—Component parts, details or accessories; Auxiliary operations
- B29C43/58—Measuring, controlling or regulating
- B29C2043/5825—Measuring, controlling or regulating dimensions or shape, e.g. size, thickness
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
- Casting Or Compression Moulding Of Plastics Or The Like (AREA)
- Moulds For Moulding Plastics Or The Like (AREA)
Abstract
有效率地供給薄膜及模製樹脂。 Efficiently supply film and molding resin.
本發明的樹脂模製裝置1具備:搬送具400,屬於在對應下模206的模窩凹部209之形狀而形成的貫通孔400a、400b內保持模製樹脂R且和薄膜F一起搬送的器具;第1臺308,供保持從薄膜捲筒306送出並裁切成預定長度的薄膜F,使所裁切的薄膜F和搬送具400組合;第2臺310,載置薄膜F保持在下面側之狀態的搬送具400,且構成為可移動;搬送具拾取器304,保持下面側保持有薄膜F之狀態的搬送具400,並從第1臺308搬送到第2臺310;及分配器312,將模製樹脂R投入到載置於第2臺310上的搬送具400的貫通孔400a、400b之內側。 The resin molding apparatus 1 of the present invention includes: a transporter 400, which is a tool for holding the molding resin R in the through holes 400a, 400b formed corresponding to the shape of the cavity recess 209 of the lower mold 206 and transporting it together with the film F; The first station 308 is used to hold the film F sent out from the film roll 306 and cut into a predetermined length, and the cut film F is combined with the carrier 400; the second station 310 is used to place the film F on the lower side and keep it state of the carrier 400, and is configured to be movable; the carrier picker 304 holds the carrier 400 in the state where the film F is held on the lower side, and is transported from the first station 308 to the second station 310; and the distributor 312, The molding resin R is injected into the inside of the through-holes 400 a and 400 b of the carrier 400 placed on the second table 310 .
Description
本發明係關於對基材中搭載有電子零件之工件進行樹脂模製的樹脂模製裝置及樹脂模製方法。 The present invention relates to a resin molding device and a resin molding method for resin molding a workpiece with electronic components mounted on a base material.
藉樹脂模製製造半導體裝置等電子裝置的方法中,已知有將基材中搭載複數個電子零件的工件進行總括地樹脂模製,再將成形品切割成各片而成為各個電子裝置的方法。這種樹脂模製方式之一有壓縮成形方式。 Among the methods of manufacturing electronic devices such as semiconductor devices by resin molding, there is known a method of collectively resin-molding a workpiece in which a plurality of electronic components are mounted on a base material, and then cutting the molded product into individual pieces to form individual electronic devices. . One of such resin molding methods is compression molding.
概略而言,壓縮成形方式係為對具備上模與下模所構成的模製用模具中所設置的模製區域(模窩)供給預定量的樹脂,並且在該模製區域配置工件,藉由用上模與下模夾緊的操作來進行樹脂模製的方法。此時,在使用上模中設置模窩的模製用模具的情形中,一般是使用在工件上將高黏度樹脂總括地供給到中心位置進行成形的作法。在此情況中,為了將要供給到工件上的樹脂充填於模窩內,由於必須使模製樹脂流動到模窩的邊端,而有產生流痕(flow mark)的情形。 Roughly speaking, the compression molding method is to supply a predetermined amount of resin to a molding area (cavity) provided in a molding mold composed of an upper mold and a lower mold, and place a workpiece in the molding area. A method of performing resin molding by clamping an upper mold and a lower mold. At this time, in the case of using a molding die in which a cavity is provided in an upper die, a method of collectively supplying a high-viscosity resin to a central position on a workpiece for molding is used. In this case, in order to fill the cavity with the resin to be supplied to the workpiece, since the molding resin must flow to the edge of the cavity, flow marks may be generated.
另一方面,在使用下模中設置模窩的模製用模具時,一般通行的作法是以薄膜覆蓋包含該模窩的模具面,以均等的厚度供給模製樹脂,並將保持在上模的工件浸漬在熔融的模製樹脂中施行樹脂模製。例如專利文獻1(日本特開2010-247429號公報)、專利文獻2(日本特開2004-148621號公報)、專利文獻3(日本特開2017-024398號公報)等所載的裝置即已有揭露。 On the other hand, when using a molding die in which a cavity is provided in the lower mold, it is generally practiced to cover the mold surface including the cavity with a film, supply the molding resin with a uniform thickness, and hold it in the upper mold. Resin molding is performed by immersing the workpiece in molten molding resin. For example, devices described in Patent Document 1 (Japanese Patent Laid-Open No. 2010-247429 ), Patent Document 2 (Japanese Patent Laid-Open No. 2004-148621 ), Patent Document 3 (Japanese Patent Laid-Open No. 2017-024398 ), etc. expose.
專利文獻1 日本特開2010-247429號公報
專利文獻2 日本特開2004-148621號公報
專利文獻3 日本特開2017-024398號公報 Patent Document 3 Japanese Patent Laid-Open No. 2017-024398
上述專利文獻等所例示的傳統壓縮成形方式的樹脂模製裝置中,進行工件之供給或成形品之收納的機構、工件、執行成形品之厚度量測的機構、或者進行搬送的機構等以平面方式排列配置的構成係屬一般的作法。因此,有樹脂模製裝置的設置面積容易變大的課題。 In the resin molding apparatus of the conventional compression molding method exemplified in the above-mentioned patent documents, etc., the mechanism for supplying the workpiece or housing the molded product, the mechanism for measuring the thickness of the workpiece, the mechanism for conveying the molded product, etc. The composition of mode arrangement is a general practice. Therefore, there is a problem that the installation area of the resin molding apparatus tends to increase.
再者,工件的厚度量測或所搭載的電子零件的計數,或者成形品的厚度量測,進而逐一(一片)實施工件、成形品的搬送等製程時,製程時間會拉長而造成瓶頸,有裝置整體的生產性難以提高的課題。 Furthermore, when the thickness measurement of the workpiece or the counting of the mounted electronic parts, or the thickness measurement of the molded product, and then carry out the process of conveying the workpiece and the molded product one by one (one by one), the process time will be lengthened and cause a bottleneck. There is a problem that it is difficult to improve the productivity of the whole apparatus.
此外,上述專利文獻等所例示的傳統壓縮成形方式的樹脂模製裝置中,模製用模具的上模具有模窩之構成的情況中,由於可以模製樹脂搭載於一個工件 上的狀態進行搬送及樹脂模製,故有裝置構成或製程得以簡化的優點。但,在模製用模具的下模具有模窩之構成時,由於工件搬入後會產生必須依所需數量搬入薄膜(脫模用薄膜)或模製樹脂的情形,故成形的工件增多時,有裝置構成或製程複雜化的課題。 In addition, in the resin molding apparatus of the conventional compression molding method exemplified in the above-mentioned patent documents, etc., in the case where the upper die of the molding die has a cavity structure, since the molding resin can be mounted on one workpiece Transport and resin molding are carried out in the upper state, so there is an advantage that the device configuration and manufacturing process can be simplified. However, when the lower mold of the molding die has a cavity structure, since the required amount of film (release film) or molding resin must be loaded after the workpiece is loaded, when the number of molded workpieces increases, There is a problem of complicated device configuration or manufacturing process.
依此方式,特別是在下模具有模窩的樹脂模製裝置中,能夠有效率地供給工件及成形品、薄膜及模製樹脂,且構成或製程能夠簡化的裝置實為眾所期望。 In this way, especially in a resin molding apparatus in which a lower mold has a cavity, an apparatus that can efficiently supply workpieces, molded products, films, and molding resins, and that can simplify the configuration or process is desired.
本發明係有鑑於上述情形而研發者,目的在於提供一種樹脂模製裝置,其可透過謀求對工件、成形品進行供給、收納、厚度量測及搬送等的機構朝上下方向作階層式配置之構成的實現,相較於傳統裝置可減少設置面積,並且透過謀求將工件、成形品以二個排列狀態作處理、搬送之構成的實現,能夠較傳統裝置縮短製程時間。 The present invention was developed in view of the above circumstances, and its object is to provide a resin molding device that can be arranged in layers in the vertical direction through mechanisms for supplying, storing, measuring and transporting workpieces and molded products. The realization of the structure can reduce the installation area compared with the traditional device, and can shorten the process time compared with the traditional device by seeking the realization of the configuration of processing and transporting the workpiece and the molded product in two arranged states.
再者,本發明係有鑑於上述情形而研發者,目的在於提供能夠有效率地供給樹脂模製所用的工件及成形品、薄膜及模製樹脂,且其構成或製程能夠簡化的樹脂模製裝置及樹脂模製方法。 Furthermore, the present invention was developed in view of the above circumstances, and the object is to provide a resin molding apparatus capable of efficiently supplying workpieces, molded products, films, and molding resins used for resin molding, and whose configuration or manufacturing process can be simplified. and resin molding methods.
本發明係藉由如以下所載的解決手段作為一實施形態來解決前述課題。 The present invention solves the above-mentioned problems by using the solutions described below as an embodiment.
本發明的樹脂模製裝置係為使用:模製用模具;及將基材中搭載有電子零件的工件搬送到前述模製用模具並且將以該模製用模具進行樹脂模製所得的成 形品搬出的搬送部,將前述工件進行樹脂模製的樹脂模製裝置,其要件為具備:供給匣升降機,使供收納前述工件的供給匣升降;收納匣升降機,配置在對前述供給匣升降機在上下方向相異的位置,使供收納前述成形品的收納匣升降;供給軌道,配設在前述供給匣升降機的前方,供載置從前述供給匣的預定位置取出的前述工件;收納軌道,一面載置前述成形品,一面使其向前述收納匣通過;工件量測器,配設在前述供給軌道的下方,對前述供給軌道上的前述工件從下面側量測前述工件的厚度;供給拾取器,保持前述供給軌道上的前述工件,並搬送到前述搬送部;及收納拾取器,保持前述搬送部上的前述成形品,並搬送到前述收納軌道;且以前述供給軌道、前述工件量測器、及前述收納軌道係朝上下方向重複並設。 The resin molding apparatus of the present invention uses: a molding mold; The conveying part for carrying out the molded product is a resin molding device for resin-molding the aforementioned workpiece, and its requirements include: a supply box lifter for lifting the supply box for storing the aforementioned workpiece; a storage box lifter arranged on the aforementioned supply box lifter At different positions in the vertical direction, the storage box for storing the aforementioned molded products is lifted; the supply rail is arranged in front of the aforementioned supply box elevator, and is used to place the aforementioned workpiece taken out from the predetermined position of the aforementioned supply box; the storage track, While placing the molded product, it passes through the storage box; the workpiece measuring device is arranged under the supply rail, and measures the thickness of the workpiece on the supply rail from the lower side; the supply pick-up a device for holding the aforementioned workpiece on the aforementioned supply track and transporting it to the aforementioned transport section; and a storage picker for holding the aforementioned molded product on the aforementioned transport section and transporting it to the aforementioned storage track; The device, and the aforementioned storage track system are repeated and arranged in the up and down direction.
若依據此種構成,可謀求對工件、成形品進行供給、收納、厚度測定、及搬送等的機構朝上下方向階層式配置之構成的實現。因而,和各構成以平面式並設的傳統裝置相較,裝置的設置面積能大幅減少。 According to such a configuration, it is possible to achieve a configuration in which the mechanisms for supplying, storing, measuring thickness, and conveying workpieces and molded products are arranged in layers in the vertical direction. Therefore, the installation area of the device can be greatly reduced compared with a conventional device in which components are arranged side by side in a planar manner.
再者,較佳為,前述供給軌道係以可將二個前述工件朝左右方向排列載置的方式構成為二列,且前述工件量測器具有將二列前述供給軌道上的二個前述工件的各厚度以預定的一次掃描進行量測的一台或者二台厚度感測器。若依據此種構成,可將二個工件W的相同對應位置藉一台或二台厚度感測器同時掃描。因而,由於可以掃描距離及掃描時間達最短的一次掃描量測二個工件W,故製程時間可大幅縮短。 Furthermore, preferably, the aforementioned supply track is configured in two rows so that the two aforementioned workpieces can be arranged and placed in the left-right direction, and the aforementioned workpiece measuring device has two rows of the aforementioned two aforementioned workpieces on the aforementioned supply track. One or two thickness sensors that measure each thickness with a predetermined scan. According to this structure, the same corresponding positions of the two workpieces W can be scanned simultaneously by one or two thickness sensors. Therefore, since two workpieces W can be measured in one scan with the shortest scan distance and scan time, the process time can be greatly shortened.
而且,較佳為,更具備從下面側將前述工件加熱的工件加熱器,且前述工件加熱器係在前述供給軌道的上方,可在對保持於前述供給拾取器之狀態的前述工件較外周更外側的位置、與和下面相對的位置之間進退移動地配設。若依據此種構成,可將藉供給拾取器保持之狀態的工件W在向上方移動的路徑中途藉工件加熱器進行加熱(預熱)。因而,和各構成以平面式並設的傳統裝置相較,裝置的設置面積可大幅減少。 Furthermore, it is preferable to further include a workpiece heater for heating the workpiece from the lower surface side, and the workpiece heater is located above the supply rail so that the workpiece held by the supply picker can be positioned closer to the outer periphery of the workpiece. The position on the outer side and the position opposite to the bottom are arranged so as to move forward and backward. According to such a configuration, the workpiece W held by the supply picker can be heated (preheated) by the workpiece heater in the middle of the upward moving path. Therefore, compared with a conventional device in which components are arranged side by side in a planar manner, the installation area of the device can be greatly reduced.
此外,較佳為,前述供給拾取器向前述搬送部搬送前述工件的左右方向搬入路、與前述收納拾取器從前述搬送部搬送前述成形品的左右方向搬出路係設定為朝前後方向並設。若依據此種構成,由於藉供給拾取器進行的工件搬入動作、與藉收納拾取器進行的成形品搬出動作可以同時併行方式進行,故和搬入路與搬出路重疊構成的傳統裝置相較,製程時間可大幅縮短。 In addition, it is preferable that the left-right direction carry-in passage for the supply picker to convey the workpiece to the conveyance unit and the left-right direction carry-out passage for the storage picker to convey the molded product from the conveyance unit are set to be parallel in the front-rear direction. According to this configuration, since the loading-in operation of the workpiece by the supply picker and the unloading of the molded product by the storage picker can be performed simultaneously and in parallel, compared with the traditional device in which the loading-in and unloading lanes are overlapped, the process The time can be greatly shortened.
再者,本發明的樹脂模製裝置係屬於使用具備將基材中搭載有電子零件之工件保持的上模、及形成有隔介著薄膜供給模製樹脂之模窩凹部的下模的模製用模具,將前述工件進行樹脂模製並加工為成形品的樹脂模製裝置,其要件為具備:搬送具,形成有和前述模窩凹部之形狀對應的貫通孔,屬於在前述貫通孔內保持前述模製樹脂且和前述薄膜一起搬送的器具;第1臺,供保持從薄膜捲筒送出且裁切成預定長度的前述薄膜,使前述經裁切的薄膜與前述搬送具組合;第2臺,載置前述薄膜保持在下面側之狀態的前述搬送具,且構成為 可移動;搬送具拾取器,保持前述薄膜保持在下面側之狀態的前述搬送具,並從前述第1臺搬送到前述第2臺;及分配器,將前述模製樹脂投入到前述第2臺上所載置的前述搬送具的前述貫通孔之內側。 Furthermore, the resin molding apparatus of the present invention belongs to the molding process using an upper mold for holding a workpiece on which an electronic component is mounted on a base material, and a lower mold formed with a cavity recess for supplying molding resin through a film. A resin molding device that uses a mold to perform resin molding on the aforementioned workpiece and process it into a molded product. Its requisites include: a conveying tool that is formed with a through hole corresponding to the shape of the concave portion of the aforementioned mold cavity, and is held in the aforementioned through hole. A device for conveying the aforementioned molded resin together with the aforementioned film; a first unit for holding the aforementioned film fed from a roll of film and cut to a predetermined length, and combining the aforementioned cut film with the aforementioned transporter; second unit , placing the aforementioned conveyer in a state where the aforementioned film is kept on the lower side, and is constituted as Movable; the conveyer picker, which holds the conveyer in the state where the film is kept on the lower side, and conveys it from the first station to the second station; and the dispenser, which injects the molding resin into the second station The inner side of the aforementioned through-hole of the aforementioned carrier placed on it.
若依據此種構成,透過謀求用於薄膜之供給的第1臺、及用於模製樹脂之供給的第2臺各別設置之構成的實現,將薄膜及模製樹脂保持在搬送具時所需的薄膜之準備或模製樹脂之準備等處理可併行地進行。因而,和藉相同臺進行這些處理的傳統裝置相較,製程時間可大幅縮短。 According to such a configuration, the first station for supplying the film and the second station for supplying the molded resin are separately installed, and the film and the molded resin are held on the conveyor. Preparation of the required film or preparation of the molding resin can be performed in parallel. Therefore, the process time can be greatly shortened compared with conventional devices that perform these processes by the same platform.
而且,較佳為,前述搬送具具有以可將二片前述薄膜朝左右方向排列保持的方式具有二列薄膜保持部,並且在各前述薄膜保持部具有和各前述薄膜對應的樹脂投入孔作為前述貫通孔。若依據此種構成,可藉一台搬送具保持分別搭載有模製樹脂的二片薄膜,並向模製用模具搬送。因而,和藉一台搬送具逐一搬送薄膜的傳統裝置相較,製程時間可大幅縮短。 Furthermore, it is preferable that the conveyer has two rows of film holding parts so that the two films can be aligned and held in the left-right direction, and each of the film holding parts has a resin injection hole corresponding to each of the above-mentioned films as the above-mentioned. Through hole. According to this structure, the two films on which the molding resin is respectively loaded can be held by one conveyer, and can be conveyed to the mold for molding. Therefore, the process time can be greatly shortened compared with the conventional device that transports films one by one with a single conveyor.
此外,較佳為,前述第1臺與前述薄膜捲筒係朝上下方向並設成階層狀。若依據此種構成,和各構成以平面式並設的傳統裝置相較,可減少裝置的設置面積。 Moreover, it is preferable that the said 1st stage and the said film roll are facing up and down and are provided in a layered form. According to this structure, the installation area of the device can be reduced compared with a conventional device in which the components are arranged side by side in a planar manner.
而且,較佳為,更具備從保持有前述薄膜及前述模製樹脂之狀態的前述搬送具之上面側進行加熱的樹脂加熱器。若依據此種構成,由於可在模製樹脂剛搭載於薄膜上後馬上加熱俾進行搭載表面液化,特別是 在使用顆粒狀、粉末狀的模製樹脂得情況中,可防止塵埃(樹脂的微細粉末等)的發生,以抑制發生製品不良的情形。 Furthermore, it is preferable to further include a resin heater for heating from the upper surface side of the carrier holding the film and the molding resin. According to this structure, since the molding resin can be heated immediately after being mounted on the film to liquefy the mounting surface, especially In the case of using a granular or powdery molding resin, dust (fine powder of resin, etc.) can be prevented from occurring, thereby suppressing the occurrence of defective products.
再者,本發明的樹脂模製裝置係屬於使用具備上模及下模的模製用模具,將基材中搭載有電子零件的工件進行樹脂模製並加工成成形品的樹脂模製裝置,其要件為具有:第1搬送部,在上面具備保持前述工件的第1保持部、及保持經樹脂模製所得的前述成形品的第2保持部,並保持前述工件向前述上模的預定保持位置搬送,且將前述成形品向前述模製用模具外的預定位置搬送;及第2搬送部,在下面具備:保持薄膜及模製樹脂的搬送具的第3保持部、及保持已用過薄膜的第4保持部,將前述薄膜及前述模製樹脂向前述下模的預定保持位置搬送,並保持前述薄膜及前述模製樹脂的保持狀態已解除的前述搬送具且向前述模製用模具外的預定位置搬送,並且保持樹脂模製所得的前述成形品已取出之狀態的前述下模中所殘留的前述已用過薄膜且向前述模製用模具外的預定位置搬送。 Furthermore, the resin molding apparatus of the present invention belongs to a resin molding apparatus that uses a molding die including an upper mold and a lower mold to resin-mold a workpiece with electronic components mounted on a base material and process it into a molded product, Its requirements are to have: a first conveying part, a first holding part for holding the workpiece on the upper surface, and a second holding part for holding the molded product obtained by resin molding, and hold the predetermined holding of the workpiece to the upper mold. position transfer, and transfer the aforementioned molded product to a predetermined position outside the aforementioned molding die; The fourth holding part of the film conveys the film and the molded resin to a predetermined holding position of the lower mold, and holds the conveyer in which the holding state of the film and the molded resin is released, and transfers the film and the molded resin to the mold for molding. and convey the used film remaining in the lower mold in the state where the molded product obtained by resin molding has been taken out, and convey it to a predetermined position outside the molding mold.
若依據此種構成,由於可將樹脂模製所用的工件及成形品、以及薄膜及模製樹脂有效率地搬送,故相較於傳統裝置,可縮短製程時間。而且,裝置構成或製程也可簡化。 According to this configuration, since the workpiece and molded product used for resin molding, as well as the film and molding resin can be efficiently conveyed, the process time can be shortened compared with conventional devices. Moreover, the device configuration and manufacturing process can also be simplified.
而且,較佳為,前述工件為狹條形的狹條形工件;前述薄膜為和前述狹條形工件對應的狹條形的狹條形薄膜; 前述第1保持部係以可將二個前述狹條形工件以令該狹條形工件的長邊方向平行的方式排列保持地具有二列工件保持部;前述第2保持部係以可將前述狹條形工件加工所得的二個前述成形品以令該成形品的長邊方向平行的方式排列保持地具有二列成形品保持部;前述搬送具係以可將二片前述狹條形薄膜以令該狹條形薄膜的長邊方向平行的方式排列保持地具有二列搬入薄膜保持部;前述第3保持部具有保持前述搬送具的搬送具保持部;前述第4保持部係以可將用畢的二片前述狹條形薄膜以令該狹條形薄膜的長邊方向平行的方式排列保持地具有二列搬出薄膜保持部。若依據此種構成,由於可實現工件及成形品、以及薄膜及模製樹脂各二個同時搬送的構成,故和逐一搬送的傳統裝置比較,製程時間可大幅縮短。 Moreover, preferably, the aforementioned workpiece is a narrow strip-shaped workpiece; the aforementioned film is a narrow strip-shaped thin film corresponding to the aforementioned narrow strip-shaped workpiece; The aforementioned first holding portion has two rows of workpiece holding portions that can arrange and hold the two aforementioned strip-shaped workpieces so that the longitudinal directions of the strip-shaped workpieces are parallel; the aforementioned second holding portion can hold the aforementioned The two aforementioned molded products obtained by processing the strip-shaped workpiece have two rows of molded product holding parts arranged and held in a manner that makes the long-side direction of the molded product parallel; The long side direction of the strip-shaped film is arranged and held in parallel to have two rows of film holding parts; the aforementioned third holding part has a carrier holding part for holding the aforementioned carrier; the aforementioned fourth holding part can be used The above-mentioned two strip-shaped films that have been completed have two rows of carry-out film holding portions that are aligned and held so that the longitudinal directions of the strip-shaped films are parallel. According to this configuration, since two simultaneous transfers of the workpiece and the molded product, and the film and the molding resin can be realized, the process time can be greatly shortened compared with the conventional device that transfers one by one.
此外,較佳為,前述工件為狹條形的狹條形工件、或較該狹條形工件更寬的寬幅工件;前述薄膜為和前述狹條形工件對應之狹條形的狹條形薄膜、或較該狹條形薄膜更寬的寬幅薄膜;前述第3保持部具有搬送具保持部作為前述搬送具,其係以可將二片前述狹條形薄膜以令該狹條形薄膜的長邊方向平行的方式排列保持地具有二列搬入薄膜保持部的一台狹條形薄膜搬送具、或共通保持具有保持一片前述寬幅薄膜的一個搬入薄膜保持部的寬幅薄膜搬送具。若依據此種構成,由於可依照要加工成成形品的工件是狹條形工件、或寬幅工件的哪一種工件,故可藉共通的搬送具保持部保持不同 的搬送具並搬入薄膜,故可設成以簡易的切換供給薄膜的構成。 In addition, preferably, the aforementioned workpiece is a narrow strip-shaped workpiece, or a wider workpiece wider than the narrow strip-shaped workpiece; the aforementioned film is a narrow strip-shaped strip corresponding to the aforementioned narrow strip-shaped workpiece. film, or a wide film wider than the strip-shaped film; the aforementioned 3rd holding part has a carrier holding part as the aforementioned carrier, and it is so that two aforementioned strip-shaped films can be used to make the strip-shaped film A strip-shaped film carrier with two rows of film holders held in parallel to the longitudinal direction of the film, or a wide film carrier with one film holder for holding a piece of the aforementioned wide film. According to this structure, since the workpiece to be processed into a molded product is a narrow workpiece or a wide workpiece, it can be kept different by the common carrier holder. Since the film is loaded into the conveyor, it can be configured to supply the film with simple switching.
再者,較佳為,前述第1保持部係將以可將二個前述狹條形工件以令該狹條形工件的長邊方向平行的方式排列保持地具有二列工件保持部的構成、與具有保持一個前述寬幅工件的一個工件保持部的構成設成可置換;前述第2保持部係將以可將前述狹條形工件加工所得的二個前述成形品以令該成形品的長邊方向平行的方式排列保持地具有二列成形品保持部的構成、與具有保持一個由前述寬幅工件加工所得的一個前述成形品的一個成形品保持部的構成設成可置換。若依據此種構成,即使是狹條形工件與寬幅工件的任一種工件,也可設成以第1保持部與第2保持部的簡易構成置換就可搬送工件與成形品的的構成。 Furthermore, it is preferable that the first holding portion has two rows of workpiece holding portions so that the two aforementioned narrow workpieces can be aligned and held so that the longitudinal directions of the narrow workpieces are parallel. It is replaceable with a workpiece holding part that holds a aforementioned wide workpiece; the aforementioned second holding part is to use the two aforementioned formed products obtained by processing the aforementioned narrow workpiece to make the length of the formed product The configuration having two rows of molded product holding parts aligned and held in parallel to the side direction is interchangeable with the configuration having one molded product holding part holding one molded product obtained by processing the aforementioned wide workpiece. According to this structure, even if it is either a narrow workpiece or a wide workpiece, it is possible to transfer the workpiece and the molded product by replacing the simple structure of the first holding part and the second holding part.
而且,較佳為,前述薄膜為和前述狹條形工件對應之狹條形的狹條形薄膜、或較該狹條形薄膜更寬的寬幅薄膜;前述第4保持部具有薄膜保持部,其係在將二片前述狹條形薄膜令該狹條形薄膜的長邊方向平行地朝左右方向排列保持的二個狹條形區域、與保持一片前述寬幅薄膜的寬幅區域重複的區域配置有吸附並保持薄膜的複數個吸附部。若依據此種構成,透過複數個吸附部配置在不論是吸附保持狹條形薄膜的情況或吸附保持寬幅薄膜的情況均可保持薄膜的位置,而設成可搬出狹條形薄膜與寬幅薄膜的任一種薄膜而不用進行構成之置換等的構成。 Moreover, preferably, the aforementioned film is a narrow strip-shaped film corresponding to the aforementioned strip-shaped workpiece, or a wide-width film wider than the narrow strip-shaped film; the aforementioned 4th holding portion has a film holding portion, It is an area where the two narrow regions where the two strip-shaped films are aligned and held in parallel to the left and right direction and the wide region where one piece of the aforementioned wide-width film is held are overlapped. A plurality of adsorption parts that adsorb and hold the thin film are arranged. According to this structure, the plurality of suction parts are arranged at positions where the film can be held regardless of the situation of suction and holding of the narrow film or the situation of suction and holding of the wide film, so that the narrow film and the wide film can be carried out. Any kind of thin film that does not require replacement of the composition, etc.
此外,較佳為,前述搬送具設有複數台,俾在清理前述搬送具的清理製程、使前述薄膜組合於前述搬送具的薄膜設置製程、對已和前述薄膜組合的前述搬送具投下前述模製樹脂的樹脂投下製程、及對前述模製用模具供給前述薄膜及前述模製樹脂的樹脂供給製程等不同的製程進行處理。若依據此種構成,透過使各搬送具在用於進行樹脂模製的各製程內循環,可縮短搬送具在各製程的等待時間,使生產性提升。 In addition, it is preferable that the aforementioned carrier is provided with a plurality of units so that the cleaning process of cleaning the aforementioned carrier, the film setting process of combining the aforementioned film with the aforementioned carrier, and dropping the aforementioned mold on the aforementioned carrier that has been combined with the aforementioned film Different processes such as a resin casting process for making resin and a resin supply process for supplying the film and the molding resin to the mold for molding are performed. According to such a structure, by circulating each carrier in each process for performing resin molding, the waiting time of a carrier in each process can be shortened, and productivity can be improved.
而且,較佳為,前述搬送具具有產生吸附力俾保持前述薄膜的第1吸附孔;前述第3保持部具有以前述搬送具保持在預定位置的狀態配設於和前述第1吸附孔連通的位置俾產生吸附力的第2吸附孔。若依據此種構成,可在薄膜吸附於搬送具下面的狀態下,藉第3保持部搬送該搬送具。 Moreover, it is preferable that the aforementioned carrier has a first adsorption hole that generates an adsorption force to hold the aforementioned film; The position is to generate the second adsorption hole of adsorption force. According to such a configuration, the carrier can be conveyed by the third holding portion in a state where the film is adsorbed to the lower surface of the carrier.
再者,本發明的樹脂模製方法係為使用前述的樹脂模製裝置進行樹脂模製的樹脂模製方法,其要件為:前述搬送具設有複數台;在清理前述搬送具的清理製程、使前述薄膜組合在前述搬送具的薄膜設置製程、對已和前述薄膜組合的前述搬送具投下前述模製樹脂的樹脂投下製程、與對前述模製用模具供給前述薄膜及前述模製樹脂的樹脂供給製程之間,使前述複數台搬送具進行不同製程的處理。若依據此種構成,透過使各搬送具在用於進行樹脂模製的各製程內循環,可縮短各製程的搬送具等待時間,使生產性提升。 Furthermore, the resin molding method of the present invention is a resin molding method that uses the aforementioned resin molding apparatus to perform resin molding. A film setting process for combining the film on the carrier, a resin dropping process for dropping the molding resin on the carrier combined with the film, and a resin supplying the film and the molding resin to the molding die Between the supply processes, the above-mentioned plurality of conveyers are processed in different processes. According to such a configuration, by circulating each carrier in each process for performing resin molding, the carrier waiting time for each process can be shortened, and productivity can be improved.
若依據本發明,透過謀求對工件、成形品進行供給、收納、厚度量測、及搬送等的機構朝上下方向階層式配置之構成的實現,設置面積可較傳統裝置減少。再者,透過謀求將工件、成形品以二個排列的狀態施行處理、搬送之構成的實現,可較傳統裝置縮短製程時間。 According to the present invention, the installation area can be reduced compared with conventional devices through the realization of a structure in which the mechanisms for supplying, storing, measuring thickness, and conveying workpieces and molded products are arranged in layers in the up and down direction. Furthermore, by realizing the realization of processing and transporting workpieces and molded products in a two-arranged state, the process time can be shortened compared with conventional devices.
此外,若依據本發明,能夠謀求在一具下模中設置二個或二個以上模窩並且在各模窩分別配置工件同時進行樹脂模製之構成的實現。特別是由於可有效率地供給樹脂模製所用的工件及成形品、以及薄膜及模製樹脂,故可較傳統裝置縮短製程時間。而且,可將裝置構成或製程簡化。 Furthermore, according to the present invention, it is possible to realize a configuration in which two or more cavities are provided in one lower mold, and resin molding is performed while arranging workpieces in each cavity. In particular, the process time can be shortened compared with conventional devices because the workpieces and molded products used for resin molding, as well as films and molding resins can be efficiently supplied. Furthermore, the device configuration and manufacturing process can be simplified.
1、2‧‧‧樹脂模製裝置 1.2‧‧‧Resin molding device
100A、500A‧‧‧工件處理單元 100A, 500A‧‧‧Workpiece handling unit
100B、500B‧‧‧壓製單元 100B, 500B‧‧‧press unit
100C、500C‧‧‧分料單元 100C, 500C‧‧‧dispensing unit
103‧‧‧供給匣升降機 103‧‧‧Supply box elevator
104、104A、104B‧‧‧供給軌道 104, 104A, 104B‧‧‧supply track
108、108A、108B‧‧‧收納軌道 108, 108A, 108B‧‧‧Storage track
113‧‧‧收納匣升降機 113‧‧‧Storage box lift
114‧‧‧工件量測器 114‧‧‧Workpiece Measuring Device
116‧‧‧工件加熱器 116‧‧‧Workpiece heater
118‧‧‧成形品量測器 118‧‧‧Measuring device for molded products
120‧‧‧供給拾取器 120‧‧‧Supply Pickup
122‧‧‧第1收納拾取器 122‧‧‧The first storage picker
124‧‧‧第2收納拾取器 124‧‧‧The second storage picker
202‧‧‧模製用模具 202‧‧‧Mold for molding
204‧‧‧上模 204‧‧‧upper mold
206‧‧‧下模 206‧‧‧Lower mold
210‧‧‧第1裝載器(第1搬送部) 210‧‧‧1st loader (1st conveying part)
212‧‧‧第2裝載器(第2搬送部) 212‧‧‧The second loader (the second conveying part)
302‧‧‧準備臺 302‧‧‧Preparation table
304‧‧‧搬送具拾取器 304‧‧‧Conveyor picker
306、306A、306B‧‧‧薄膜捲筒 306, 306A, 306B‧‧‧film reel
308‧‧‧薄膜臺(第1臺) 308‧‧‧Film Platform (1st Unit)
310‧‧‧樹脂投下臺(第2臺) 310‧‧‧Resin drop platform (2nd unit)
312‧‧‧分配器 312‧‧‧Distributor
314‧‧‧樹脂加熱器 314‧‧‧Resin Heater
400‧‧‧搬送具 400‧‧‧Conveyor
F‧‧‧薄膜 F‧‧‧Film
Fd‧‧‧已用過薄膜 Fd‧‧‧used film
R‧‧‧模製樹脂 R‧‧‧molding resin
W‧‧‧工件 W‧‧‧workpiece
Wp‧‧‧成形品 Wp‧‧‧Molded products
圖1為本發明實施形態的樹脂模製裝置例的平面圖。 Fig. 1 is a plan view of an example of a resin molding apparatus according to an embodiment of the present invention.
圖2為圖1的II-II位置的左側視圖。 Fig. 2 is a left side view of the II-II position in Fig. 1 .
圖3為圖1的樹脂模製裝置之供給軌道例的平面圖。 Fig. 3 is a plan view of an example of a supply rail of the resin molding apparatus of Fig. 1 .
圖4為圖1的樹脂模製裝置之收納軌道例的平面圖。 Fig. 4 is a plan view of an example of storage rails of the resin molding apparatus of Fig. 1 .
圖5為圖1的V-V位置的左側視圖。 Fig. 5 is a left side view of the V-V position in Fig. 1 .
圖6為圖1的VI-VI位置的左側視圖。 FIG. 6 is a left side view of VI-VI in FIG. 1 .
圖7為圖1的VII-VII位置的左側視圖。 Fig. 7 is a left side view of the VII-VII position in Fig. 1 .
圖8為圖1的VIII-VIII位置的前視圖。 FIG. 8 is a front view of the VIII-VIII position of FIG. 1 .
圖9為圖1的樹脂模製裝置之搬送具例的平面圖。 Fig. 9 is a plan view of an example of a carrier of the resin molding apparatus of Fig. 1 .
圖10為圖1的樹脂模製裝置之模製用模具例的平面圖。 Fig. 10 is a plan view of an example of a molding die of the resin molding apparatus of Fig. 1 .
圖11為本發明實施形態的樹脂模製裝置的動作說明圖。 Fig. 11 is an explanatory view showing the operation of the resin molding apparatus according to the embodiment of the present invention.
圖12為繼圖11的動作說明圖。 FIG. 12 is an explanatory diagram of operations following FIG. 11 .
圖13為繼圖12的動作說明圖。 FIG. 13 is an explanatory diagram of operations following FIG. 12 .
圖14為繼圖13的動作說明圖。 FIG. 14 is an explanatory diagram of operations following FIG. 13 .
圖15為繼圖14的動作說明圖。 FIG. 15 is an explanatory diagram of operations following FIG. 14 .
圖16為繼圖15的動作說明圖。 FIG. 16 is an explanatory diagram of operations following FIG. 15 .
圖17為繼圖16的動作說明圖。 FIG. 17 is an explanatory diagram of operations following FIG. 16 .
圖18為繼圖17的動作說明圖。 FIG. 18 is an explanatory diagram of operations following FIG. 17 .
圖19為繼圖18的動作說明圖。 FIG. 19 is an explanatory diagram of operations following FIG. 18 .
圖20為繼圖19的動作說明圖。 FIG. 20 is an explanatory diagram of operations following FIG. 19 .
圖21為繼圖20的動作說明圖。 FIG. 21 is an explanatory diagram of operations following FIG. 20 .
圖22為繼圖21的動作說明圖。 FIG. 22 is an explanatory diagram of operations following FIG. 21 .
圖23為繼圖22的動作說明圖。 FIG. 23 is an explanatory diagram of operations following FIG. 22 .
圖24為繼圖23的動作說明圖。 FIG. 24 is an explanatory diagram of operations following FIG. 23 .
圖25為繼圖24的動作說明圖。 FIG. 25 is an explanatory diagram of operations following FIG. 24 .
圖26為繼圖25的動作說明圖。 FIG. 26 is an explanatory diagram of operations following FIG. 25 .
圖27為繼圖26的動作說明圖。 FIG. 27 is an explanatory diagram of operations following FIG. 26 .
圖28為本發明實施形態的樹脂模製裝置之變化例的平面圖。 Fig. 28 is a plan view of a modified example of the resin molding apparatus according to the embodiment of the present invention.
圖29為本發明實施形態的控制構成例的方塊圖。 Fig. 29 is a block diagram showing an example of a control structure according to the embodiment of the present invention.
圖30為本發明實施形態的樹脂供給動作例的流程圖。 Fig. 30 is a flow chart showing an example of resin supply operation according to the embodiment of the present invention.
以下,參照附圖,針對本發明的實施形態作詳細說明。圖1為本發明實施形態之樹脂模製裝置1的例子的概略圖(平面圖)。再者,圖2至圖10為顯示樹脂模製裝置1的各構成之詳細的概略圖。另外,在說明的權宜上,各圖中,有藉箭號說明樹脂模製裝置1的前後、左右、上下方向的情形。此外,用以說明各實施形態的全部圖示中,具有相同機能的構件均附註相同的符號,其有省略重複說明的情形。
Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. Fig. 1 is a schematic view (plan view) of an example of a
本實施形態的樹脂模製裝置1係為使用具備上模204及下模206的模製用模具202來進行工件(被成形品)W之樹脂模製成形的裝置。以下,樹脂模製裝置1以上模204保持工件W,以薄膜(脫模薄膜)F覆蓋設在下模206的模窩(cavity)208(包含一部分模具面206a)並供給模製樹脂R,進行上模204與下模206的夾緊動作,且使工件W浸漬於熔融的模製樹脂R,進行樹脂模製的壓縮成形裝置作為主要例子來說明。另外,模窩208係藉在下模206的上面凹陷成預定形狀的模窩凹部209來界定形狀,且透過介著薄膜F供給模製樹脂R即可壓縮成形。
The
首先,作為成形對象的工件W具備有複數個電子零件Wb以行列狀搭載於基材Wa的構成。更具體 而言,基材Wa的例子可舉出有形成狹條形的樹脂基板、陶瓷基板、金屬基板、托載板(carrier plate)、導線框架、晶圓等板狀構件(條帶狀的矩形工件)。再者,電子零件Wb的例子可舉出有半導體晶片、MEMS晶片、被動元件、散熱板、導電構件、間隔片等。另外,如後所述,特別是可和使用正方形、圓形者的情況對應的裝置變化例也可考慮作為基材Wa。 First, the workpiece W to be molded has a configuration in which a plurality of electronic components Wb are mounted on the base material Wa in a matrix form. more detail For example, examples of the substrate Wa include a strip-shaped resin substrate, a ceramic substrate, a metal substrate, a carrier plate (carrier plate), a lead frame, a wafer, and other plate-shaped members (strip-shaped rectangular workpieces). ). In addition, examples of the electronic component Wb include semiconductor wafers, MEMS wafers, passive elements, radiator plates, conductive members, spacers, and the like. In addition, as will be described later, an apparatus modification that can be used particularly when a square shape or a circle shape is used can also be considered as the base material Wa.
將電子零件Wb搭載於基材Wa的方法例有利用倒裝晶片實裝、導線接合實裝等搭載方法。或者,在樹脂模製後將基材(玻璃製或金屬製托載板)Wa從成形品剝離的構成時,也有使用具熱剝離性的黏膠帶或藉紫外線照射硬化的紫外線硬化性樹脂來貼設電子零件Wb的方法。 Examples of the method of mounting the electronic component Wb on the base material Wa include mounting methods such as flip chip mounting and wire bonding mounting. Alternatively, when the substrate (glass or metal carrier plate) Wa is peeled from the molded product after resin molding, there are also adhesive tapes with heat peelability or ultraviolet curable resin that is hardened by ultraviolet radiation. A method of setting the electronic part Wb.
另一方面,模製樹脂R的例子可使用顆粒狀的熱硬化性樹脂(例如,含充填料的環氧系樹脂)。另外,並不限定於上述的狀態,也可為液狀、粉末狀、圓柱狀、板狀、片狀等其他狀態(形狀)。 On the other hand, as an example of the molding resin R, a granular thermosetting resin (for example, a filler-containing epoxy-based resin) can be used. In addition, it is not limited to the above-mentioned state, and other states (shape) such as liquid, powder, columnar, plate, sheet, etc. may be used.
此外,薄膜F的例子中,耐熱性、剝離容易性、柔軟性、伸展性優異的薄膜材,例如,PTFE(聚四氟乙烯)、ETFE(聚四氟乙烯聚合物)、PET、FEP、氟含浸玻璃纖維布、聚丙烯、聚偏二氯乙烯等均甚合用。該薄膜F可用例如和狹條形工件W對應的狹條形式狹條形薄膜。 In addition, among the examples of the film F, film materials excellent in heat resistance, ease of peeling, flexibility, and stretchability, such as PTFE (polytetrafluoroethylene), ETFE (polytetrafluoroethylene polymer), PET, FEP, fluorine Impregnated glass fiber cloth, polypropylene, polyvinylidene chloride, etc. are very suitable. The film F may be, for example, a strip-formed strip-shaped film corresponding to the strip-shaped workpiece W. As shown in FIG.
接著,就本實施形態的樹脂模製裝置1的概要加以說明。如圖1所示,樹脂模製裝置1具備有:
工件處理單元100A,主要進行工件W之供給、及樹脂模製後成形品Wp之收納;壓製單元100B,主要進行將工件W進行樹脂模製成為成形品Wp之加工;及分料單元100C,主要進行薄膜F及模製樹脂R之供給、及樹脂模製後已用過薄膜Fd之收納(廢棄)等,作為主要構成。另外,本實施形態中,係舉在一具下模中設有二個模窩並且配置二個工件W總括地進行樹脂模製而同時製得二個成形品Wp之壓縮成形方式的樹脂模製裝置為例加以說明。
Next, the outline of the
本實施形態中,如工件處理單元100A、壓製單元100B及分料單元100C等單元係經予以連結並組裝。在一個例子中,工件處理單元100A、壓製單元100B及分料單元100C係在左右方向上自左方依序並設。另外,還有任意數量的導軌(未圖示)係跨越各單元之間設置成直線狀,搬送工件W等的第1裝載器(第1搬送部)210、及搬送薄膜F等的第2裝載器(第2搬送部)212係設置成可沿著任意的導軌移動在預定的單元間。另外,由於這些裝載器210、212並非僅執行例如工件W對模製用模具202的搬入動作,也執行成形品Wp從模製用模具202的搬出動作,故亦兼有作為卸載器(off loader)的功能。
In this embodiment, units such as the
從而,藉由改變單元的構成,即可變更樹脂模製裝置1的構成樣態。例如,圖1所示的構成雖為設置三台壓製單元100B的例子,但也可構成為壓製單元100B只設置一台,或者由二台或四台以上連結設置的樹
脂模製裝置(未圖示)。此外,也可設置其他的單元。例如,設置供給異於分料單元100C之模製樹脂R的單元,或供給在模具內和工件W組裝之構件的單元(未圖示)。在一個例子中,該構件也可為產生散熱板或遮蔽板功能的板狀構件。在此情況中,也可在將板狀構件重疊於薄膜F上之後,將模製樹脂R供給到板狀構件上再進行搬送。
Therefore, the configuration of the
接著,以樹脂模製裝置1具備的工件處理單元100A的構成為主,詳細說明有關工件W及成形品Wp的搬送動作。
Next, the conveying operation of the workpiece W and the molded product Wp will be described in detail, focusing on the configuration of the
首先,工件處理單元100A具備:供給匣升降機103,使收納有複數個工件W的供給匣102升降;及收納匣升降機113,使收納有複數個成形品Wp的收納匣112升降。該收納匣升降機113係配置在對供給匣升降機103在上下方向上不同的位置。例如,這些升降機103、113可以在平面視圖上具有重疊的狀態朝上下方向並設成階層狀。此處,供給匣102、收納匣112可使用公知的堆疊匣、狹口匣(slit magazin)等。本實施形態中,電子零件Wb的搭載面均以向下的狀態分別收納工件W及成形品Wp。另外,從保護電子零件Wb的觀點,較佳為使用將工件W插入並保持在匣框的內側彼此相向之凹部的狹口匣,將工件W彼此間分離保持。此外,供給匣升降機103係構成為可透過保持著供給匣102升降的方
式將工件W從預定的位置取出。收納匣升降機113則構成為可透過保持著收納匣112升降的方式將成形品Wp收納在預定的位置。
First, the
接著,工件處理單元100A具備供給軌道104,其係配設在供給匣102的前方,供載置自供給匣102取出之工件W。本實施形態中,在供給匣102與供給軌道104之間具備有讓工件W通過的中繼軌道106,但也可設成將其省略的構成。另外,工件W從供給匣102向供給軌道104上的移動可用公知的推動器等(未圖示)。
Next, the
此處,供給軌道104係避開電子零件Wb的搭載位置,藉一對軌道從下方支持工件W的縱長邊,在側方將工件W朝前後方向引導。再者,供給軌道104係以可將二個工件W在短邊方向朝左右方向排列載置的方式構成為二列(圖中104A、104B),並且具有可朝左右方向移動的移動機構(未圖示)。藉此構成,從供給匣102取出的工件W載置於一方的列(例如,104A)之後,使供給軌道104A、104B朝左右任一方的預定方向(例如,右方)移動,即可將下一個工件W載置於另一方的列(例如、104B)。此外,供給軌道104A、104B的各軌道係配合工件W的寬度而將軌道間的寬度構成為可變。
Here, the
其次,工件處理單元100A具備工件量測器114,其係配設在供給軌道104的下方,並且構成為可朝前後及左右方向移動,俾對供給軌道104上的工件W從下面側(電子零件Wb的搭載面側)量測工件W之厚度。該工件量測器114係以雷射位移計或攝像機(單眼攝像機
或複眼攝像機)構成,並根據這些量測器的輸出資料量測工件W之厚度。另外,此處所稱的「厚度量測」係包含基材Wa中搭載電子零件Wb的有無、電子零件Wb搭載高度的量測、搭載位置偏移的量測、搭載數的量測等所需的量測。根據此處之「厚度量測」的結果,例如電子零件Wb搭載的有無或搭載高度等,計算出工件W中所搭載的電子零件Wb的容積,並透過調整模製樹脂R的供給量,就可高精確度地控制成形品的成形厚度。
Next, the
此處,工件量測器114具有用於量測二列供給軌道104A、104B上的二個工件W之各個厚度的二台厚度感測器114a、114b。在一個例子中,在和右側列工件W對應的位置配設有厚度感測器114a,並且在和左側列工件W對應的位置配設有厚度感測器114b。藉此構成,即可同時將各個工件W的相同對應位置加以掃描,並以掃描距離及掃描時間達到最短的一次掃描量測二個工件W。因而,製程時間可大幅縮短。一次掃描的工件W量測動作,只要沿著將工件W縱向或橫向作n分割(n為2以上的整數)之直線的接近端部彼此間之連結線所構成的模式(pattern),使工件W對厚度感測器114a、114b一面移動,一面以預定間隔量測工件W即可。藉此方式,即可以按照預定模式的「一個掃描動作(一次掃描)」任意量測工件W的基材Wa之厚度或電子零件Wb之高度等。此外,本實施形態的構成中,可將掃描動作(往前後左右方向的移動)藉由使載置工件W用的供給軌道104A、104B朝左右方向移動動作的機構、及使工件量測
器114朝前後方向移動動作的機構以簡易的構成來實施。另外,和供給軌道104A、104B同樣的,係配合工件W的寬度將厚度感測器114a、114b的間隔構成為可變。藉此方式,即使工件W的大小(寬度)改變,也可以於一次掃描量測二個工件W。
Here, the
另外,作為變化例,也可在一次掃描的工件W量測動作中,以作為厚度感測器114a、114b的攝像機在一次朝前後方向的移動中將預定的寬度總括地拍攝而進行工件W整面厚度的量測。而且,也可使工件量測器114向前後左右移動,俾實施掃描動作。此外,也可設為具有一台厚度感測器,且以預定的一次掃描將二個工件W依序量測的構成(未圖示)。
In addition, as a modification example, in one scan of the workpiece W measurement operation, the cameras as the
再者,工件量測器114雖以和後述工件W的供給動作的關係對供給軌道104上的工件W從下面側量測工件W之厚度較佳;但也可設為從上面側對工件W量測工件W厚度的構成。在此情況中,工件量測器114也可設在讓工件W通過的中繼軌道106的上下任一面或者兩方。另外,工件量測器114也可採用不僅讀取工件W的厚度,也讀取工件W上所附設的識別資訊(例如二維碼)的構成。再者,也可將可讀取工件W之二維碼的讀碼器115設在中繼軌道106的上下任一面。這種工件W的識別資訊可透過附設成例如連號或不重複碼,而辨別是哪一工件W。藉由將樹脂模製的詳細條件等對該識別資訊建立關聯並加以記錄,即可實現如後述的提高追蹤能力的程序。
Furthermore, although the
接著,工件處理單元100A具備將供給軌道104上所載置的工件W保持並向預定位置搬送的供給拾取器120。另外,下文中所稱的「拾取器(pickup)」係相當於將預定的對象物在任意的位置間移送的拾取並放置(pick and place)機構的構成。該供給拾取器120中,在保持工件W的機構方面已有公知的保持機構(例如,具有保持爪並進行挾持的構成、具有連通於吸附裝置的吸附孔並進行吸附的構成等)(未圖示)。另外,吸附裝置可用真空泵等公知的機構(以下相同)。此處,供給拾取器120係構成為可朝左右及上下方向移動。藉此構成,透過將供給軌道104上所載置的工件W保持並進行上升動作,最終都能向後述第1保持部210A進行搬送(供給)。
Next, the
再者,本實施形態的供給拾取器120的構成係使上述的保持機構朝左右方向二列並設在和二列供給軌道104A、104B上的二個工件W對應的位置。藉此構成,就可將二列供給軌道104A、104B上的二個工件W以朝左右方向排列狀態同時保持並進行搬送。換言之,可將工件W令其長邊方向平行地排列保持。
Furthermore, the
其次,工件處理單元100A具有將工件W從下面側加熱的工件加熱器116。此處,作為將工件W加熱的構成,係在工件加熱器116的上面配設公知的加熱機構(例如,電熱線加熱器、紅外線加熱器等)(未圖示)。藉此構成,透過在工件W搬入模製用模具202進行加熱前先予預熱,工件W在模製用模具202內的伸展即可受到抑制。另外,作為變化例,也可考量不具備工
件加熱器116的構成。此時,可在第1保持部210A(第1裝載器210)設置加熱器。在此情況中,可在以第1保持部210A保持工件W期間進行預熱。此外,也可在第1裝載器210設置加熱器。在此情況中,交接工件W時,可從第1保持部210A的位置先避開,而在工件W的搬送時進行預熱。
Next,
本實施形態的工件加熱器116係配設成在供給軌道104的上方可對保持在供給拾取器120之狀態的工件W的下面側進退移動(參照圖2)。亦即,工件加熱器116可說是配設成可在較工件W之外周更外方的位置、與工件W之下面正下方的位置間移動。藉此構成,即可進行將樹脂模製前的工件W加熱的預熱製程。另外,使工件加熱器116向工件W之下面正下方位置移動之際,藉由令保持工件W之狀態的供給拾取器120向下方移動,執行使工件W接近工件加熱器116的動作,即可成為更有效率的加熱。
The
另外,本實施形態的工件加熱器116的構成係使上述的加熱機構在和供給拾取器120所保持的二個工件W對應的位置朝左右方向並設二列。藉此構成,即可將藉供給拾取器120朝左右方向排列保持的二個工件W同時均等地加熱。
In addition, the
依此方式,將藉供給拾取器保持之狀態的工件W在供給軌道104的上方,亦即在藉供給拾取器而朝上下方向的移動中,藉工件加熱器116進行加熱(預熱製程)的構成可予實現。因而,相較於各構成以平面方式並設的傳統裝置,裝置的設置面積可大幅減少。
In this way, the workpiece W held by the supply picker is heated by the
其次,和工件處理單元100A的各機構協同動作的第1裝載器210係在其上面具備將該工件W往上模204的預定保持位置搬送的第1保持部210A。該第1保持部210A係在對供給軌道104向側方(在一個例中為右方)位置移動時供載置藉供給拾取器120搬送的工件W。在進行工件W的交接時,供給拾取器120會在供給軌道104上經過預熱製程並再行上升,接著透過向右方移動,而移動到可交送至位在供給軌道104之右方的第1保持部210A的位置。第1保持部210A中,作為保持所載置的工件W的工件保持部已有公知的保持機構(例如,具有保持爪俾進行挾持的構成、具有連通於吸附裝置的吸附孔俾進行吸附的構成等)(圖中的符號210a、210b)。
Next, the
本實施形態中,上述的工件保持部210a、210b係設成在和供給拾取器120所保持的二個工件W對應的位置朝左右方向並設二列的構成。意即,可將工件W令其長邊方向地排列保持。藉此構成,藉供給拾取器120將朝左右方向排列保持的二個工件W不用重新排列就可以其現有的配置同時載置,並朝左右方向排列保持及搬送。
In the present embodiment, the above-mentioned
此外,以第1保持部210A保持工件W的第1裝載器210係構成為可朝前後、左右及上下方向移動。藉由左右方向的移動,可將工件W從工件處理單元100A向壓製單元100B搬送。另一方面,藉由前後方向的移動,可將工件W從模製用模具202的外部向內部(亦
即,向開模狀態的上模204與下模206之間)搬送。再者,藉由上下方向的移動,可將工件W在模製用模具202的內部向上模204的預定保持位置搬送(交接)。另外,作為變化例,也可考量替代第1保持部210A左右移動的構成,改採藉供給拾取器120置換該移動範圍之移動的構成。此外,也可考慮替代第1保持部210A上下移動的構成,改用藉模製用模具202的開閉模機構置換該移動範圍之移動的構成(均未圖示)。
In addition, the
其次,第1裝載器210具備有第2保持部210B,樹脂模製所得的成形品Wp從模製用模具202(此處為上模204)取下並載置於其上面,並將該成形品Wp向模製用模具202外的預定位置搬送。另外,第2保持部210B具有公知的保持機構(例如,具有保持爪俾進行挾持的構成、具有連通於吸附裝置的吸附孔俾進行吸附的構成等)(圖中,符號210c、210d)作為保持所載置的成形品Wp的成形品保持部。
Next, the
再者,本實施形態的第2保持部210B係設成使上述成形品保持部210c、210d朝左右方向並設二列在和樹脂模製後模製用模具202(上模204)所保持的二個成形品Wp對應的位置的構成。意即,可將成形品Wp令其長邊方向平行地排列保持。藉此構成,將藉模製用模具202(上模204)朝左右方向排列保持的二個成形品Wp依其原狀的配置同時載置,不用變換排列,即可朝左右方向排列保持及進行搬送。
In addition, the
此處,本實施形態中,第2保持部210B與上述的第1保持部210A係構成為一體當作第1裝載器210。在一個例子中,第1裝載器210係在前方側配設具有左右二列之工件保持部210a、210b的第1保持部210A,在後方側配設具有左右二列之成形品保持部210c、210d的第2保持部210B。因而,第1保持部210A及第2保持部210B係成為可作為第1裝載器210以一體方式朝前後、左右及上下方向移動的構成。藉此構成,由於不僅裝置構成可簡化及小型化,且能夠實現工件W、成形品Wp皆各二個同時搬送的構成,故製程時間也能縮短。
Here, in this embodiment, the
另外,作為變化例,也可考量將具備第2保持部210B的裝載器和上述具備第1保持部210A的裝載器構成為各別件體(未圖示)。在此情況中,只要設成可和上述第1保持部210A同樣地移動的構成即可。
In addition, as a modification example, it is conceivable to configure the carrier including the
其次,工件處理單元100A具備有第1收納拾取器122,其係保持第2保持部210B上所載置的成形品Wp並向預定位置搬送。再者,工件處理單元100A還具備第2收納拾取器124,其係載置第1收納拾取器122所保持的成形品Wp並向單元內的預定位置搬送。這些作為保持成形品Wp的機構,均已具有公知的保持機構(例如,具有保持爪俾進行挾持的構成、具有連通於吸附裝置的吸附孔俾進行吸附的構成、單純供載置的機構等)(未圖示)。本實施形態中,係將第1收納拾取器122與第2收納拾取器124組合而構成為從第1裝載器210搬送成形品Wp的收納拾取器。
Next, the
此處,本實施形態的第1收納拾取器122係構成為可朝左右方向移動。藉此構成,即可保持第2保持部210B上所載置的成形品Wp,並向第2收納拾取器124上搬送。此處,在第1收納拾取器122與第2收納拾取器124的交接中,也可透過將成形品Wp挾住並待機,使其平坦化同時使其冷卻,藉以防止成形品Wp的翹曲或變形。另外,也可設成不僅朝左右方向也可朝上下方向移動的構成(收納拾取器)作為第1收納拾取器122的變化例。藉此方式,省略第2保持部210B之上下方向移動機構的構成即得以實現。
Here, the
而且,本實施形態的第1收納拾取器122係設成上述保持機構在和第2保持部210B(二列成形品保持部210c、210d)上所載置的二個成形品Wp對應的位置朝左右方向並設二列的構成。藉此構成,即可將第2保持部210B上的二個成形品Wp以朝左右方向排列的狀態同時保持並搬送。
Moreover, the
此外,本實施形態中,係設定為使供給拾取器120向第1保持部210A搬送工件W的左右方向搬入路、與收納拾取器(第1收納拾取器122)從第2保持部210B搬送成形品Wp的左右方向搬出路,朝前後方向並設。藉此方式,由於不會有工件W藉供給拾取器120進行的搬入動作、與成形品Wp藉收納拾取器(第1收納拾取器122)進行的搬出動作交叉、重疊的情形,故可抑制等待時間的發生。因而,由於複數個動作係以同時併行的方式進行,可有效率地執行各個動作,故可謀求處理的流暢化,使製程時間能夠縮短。
In addition, in this embodiment, it is set so that the
另一方面,本實施形態的第2收納拾取器124係構成為可朝上下方向移動。藉此構成,可將第2收納拾取器124上所載置的成形品Wp加以保持,並向後述的收納軌道108上搬送。
On the other hand, the
再者,本實施形態的第2收納拾取器124係設成為使上述的保持機構在和第1收納拾取器122所保持的二個成形品Wp對應的位置朝左右方向並設二列的構成。藉此構成,可將第1收納拾取器122所保持的二個成形品Wp以朝左右方向排列的狀態同時保持並搬送。
In addition, the
另外,本實施形態中,係如上述方式設成具備二個收納拾取器(第1收納拾取器122、及第2收納拾取器124)的構成,但也可設成具備可朝左右及上下方向移動可能的一台收納拾取器的構成作為變化例(未圖示)。藉此構成,即可將第2保持部210B上所載置的成形品Wp加以保持並直接向收納軌道108上搬送。而且,供給拾取器120與收納拾取器也可藉多關節機器人(搬送機器人來構成。在此情況中,若依據例如由水平多關節機器人及升降機構所組合的搬送機構,可使工件W及成形品Wp朝左右及上下方向移動,且具備和上述構成同樣的功能。
In addition, in this embodiment, it is set as the structure provided with two storage pickers (the
另外,上述構成中,只要第1裝載器210移動到可與第1收納拾取器122之間交接成形品Wp的位置(和圖1的第1收納拾取器122重複的位置),上述的動作即得以實施。然而,透過將第1裝載器210作成
可移動到裝置側面,作業人員就能夠容易地存取第1裝載器210所保持的工件W或成形品Wp。在此情況下,工件處理單元100A中即可採用使供第1裝載器210移動的軌道本身移動於左右方向的構成。若依據此種構成,第2收納拾取器124上下動作時,可先使該軌道從第2收納拾取器124的移動範圍退開。結果,在進行一般的生產時,藉由第1裝載器210與2台收納拾取器122、124的協同運作,就可搬送成形品Wp,在進行保養維護時,可藉第1裝載器210使工件W或成形品Wp直接移動到作業人員容易操作的位置(裝置側面位置)。
In addition, in the above-mentioned configuration, as long as the
其次,工件處理單元100A具備有收納軌道108,其係配設在工件量測器114的下方,供載置藉收納拾取器(此處為第2收納拾取器124)搬送的成形品Wp。另外,收納軌道108上所載置的成形品Wp係在該收納軌道108上通過(滑動移動),並往收納匣112收納。另外,收納軌道108因在其構成上與供給軌道104基本上相同,只有工件W或成形品Wp的移動方向不同,故有將已在供給軌道104中說明的部分省略的情形(有關處理成形品Wp的其他構成亦相同)。
Next, the
本實施形態中,在收納軌道108與收納匣112之間具備讓成形品Wp通過的中繼軌道110,但也可作成將其省略的構成。另外,成形品Wp從收納軌道108上往收納匣112的移動可使用公知的推動器等(未圖示)。
In the present embodiment, the
此處,收納軌道108係避開電子零件Wb的搭載位置,從下方支持成形品Wp的縱長邊,並以側
方引導工件W。再者,收納軌道108係以可將二個成形品Wp在短邊方向朝左右方向排列載置的方式構成為二列(圖中108A、108B),並且具有可朝左右方向移動的移動機構(未圖示)。藉此構成,將保持在收納拾取器(此處為第2收納拾取器124)的二個成形品Wp以朝左右方向排列的狀態同時載置後,即可使成形品Wp依序向收納匣112移動。例如,可使一方列(例如,108B)上的成形品Wp向收納匣112移動,接著,使收納軌道108A、108B朝左右任意預定方向(例如,左方)移動,且令另一方列(例如,108A)上的成形品Wp向收納匣112移動。
Here, the
接著,工件處理單元100A具備成形品量測器118,其係配設在收納軌道108的下方,從下面側(電子零件Wb的搭載面側)對收納軌道108上的成形品Wp進行檢查。在一個例子中,該成形品量測器118可配置在使成形品Wp向收納匣112移動之際收納軌道108A、108B到達預定位置時的下方位置。該成形品量測器118係由雷射位移計或攝像機(單眼攝像機或複眼攝像機)構成,並使用在和根據這些量測器之輸出資料的基準值的比較、或用模式匹配等手法量測成形品Wp的厚度、檢測出成形品Wp之成形部位的外觀缺失。另外,「收納軌道的下方」也包含設置中繼軌道110時的中繼軌道的下方。再者,此處所稱的「檢查」係包含基材Wa上的樹脂模製部分(樹脂成形部分)的厚度、樹脂模製的外觀(導線的露出)、樹脂模製的缺失(充填不良等)的量測等必要的量測。也可根據此處「檢查」的結果,例如根據樹
脂成形部分的實際厚度和目標厚度的值差來調整模製樹脂R的供給量,俾能高精確度地控制成形品Wp的成形厚度。
Next, the
本實施形態的成形品量測器118固定配設有一台厚度感測器118a。藉此即可量測通過收納軌道108上的成形品Wp的預定位置(例如,樹脂成形部分的中央位置或外周位置)的厚度。
The molded
如以上所說明,本實施形態中,供給軌道104、工件量測器114、收納軌道108、及成形品量測器118係成為在上下方向中重複並設,且從上方依序以階層狀並設的構成(包含前後左右方向的偏位(offset)設置)。同時,供給匣升降機103及收納匣升降機113也具備配置在上下方向相異的位置,且從上方依序以階層狀並設的構成。若依據這些構成,和各構成以平面方式並設的傳統裝置比較,裝置的設置面積可大幅減少。
As explained above, in the present embodiment, the
而且,上述實施形態係在將工件W搬送到模製用模具202的同時,使用將以該模製用模具202進行樹脂模製所得的成形品Wp搬出的第1裝載器210進行樹脂模製工件W的樹脂模製裝置1中,透過設成使量測工件W之厚度的工件量測器114與進行成形品Wp之檢查的成形品量測器118重複配置的構成,即可較傳統裝置減少設置面積。在此情況中,工件W在以工件量測器114進行厚度量測後,藉第1裝載器210搬送到模製用模具202,而藉第1裝載器210從模製用模具202搬送的成形品Wp則用成形品量測器118予以檢查。
In addition, in the above embodiment, the workpiece W is resin-molded using the
此外,藉第2收納拾取器124進行的上下方向移動中,由於例如在第1收納拾取器122與第2收納拾取器124的交接中一邊挾住使之平坦化一邊進行成形品Wp的散熱製程的構成可獲得實現,故不必另外設置散熱單元,也可謀求裝置的設置面積的減少。
In addition, during the vertical movement by the
再者,若依據上述的構成,從在供給軌道104上載置二個例如狹條形工件W的狀態到在收納軌道108上載置二個加工後成形品Wp的狀態的製程,全部皆以朝左右方向排列二個工件W或成形品Wp的狀態進行。因此,和因為包含中途依序逐一進行處理的製程而含有局部性耗時製程的傳統裝置相比較,製程時間即可大幅縮短。
Moreover, according to the above-mentioned structure, the process from the state where two, for example, narrow workpieces W are placed on the
再者,若依據上述的構成,就能實現從供給匣102取出工件W後到加工為成形品Wp再收納於收納匣112的整個製程中,在工件W及成形品Wp移動之際,工件W及成形品Wp的朝向(保持、載置的方向)一概不用變換即朝前後、左右、上下方向移動的構成。因而,相較於製程中要執行工件W及成形品Wp的朝向變換的傳統裝置,可縮短製程時間,裝置構成也可簡化。
Moreover, according to the above-mentioned structure, it is possible to realize the entire process from taking out the workpiece W from the
另外,作為上述樹脂模製裝置1的變化例,也可構成為在一具下模中設置一個模窩,同時配置一個工件W(可設想為使用例如圓形的晶圓、或正方形、長方形的基板等作為基材Wa的情況)進行樹脂模製,而獲得一個成形品的壓縮成形方式的樹脂模製裝置2(參照圖28)。在此情況中,工件W可設成對較上述狹條形工件
式的工件W更寬的寬幅工件(大面積型工件)進行加工的構成。該寬幅工件也可使用較狹條形工件更寬的正方形或長方形或多角形的工件W、或直徑(寬度)比狹條形工件相對較寬的圓形晶圓或作為托載板的工件W。在該情況中,可考量用如下述的工件處理單元500A構成來替代工件處理單元100A。
In addition, as a modified example of the above-mentioned
在一個例子中,工件處理單元500A也可設置具備進行工件W自供給匣之取出、或者成形品Wp向收納匣之收納等的機械手504的搬送機器人,以替代上述的供給軌道104或收納軌道108。此處,該機械手504可在公知的多關節機器人等的前端使用在符合工件W之形狀的叉狀構件具備吸附機構的機構。另外,也可設成具備複數隻機械手的構成(未圖示)。而且,不僅是上述的供給拾取器120與收納拾取器,也可設置在供給軌道104或收納軌道108進行工件W及成形品Wp之搬送的搬送機器人。
In one example, the
再者,第1保持部210A中,可設成可將前述二列工件保持部210a、210b、與保持一個工件W(寬幅工件)的寬幅工件保持部506置換設置的構成。而且,第2保持部210B中,也可設成可將前述的二列成形品保持部210c、210d、與保持一個成形品Wp(和寬幅工件W對應的成形品Wp)的寬幅成形品保持部508置換設置的構成。
In addition, in the first holding
依此方式,有關可將狹條形工件與寬幅工件切換的構成,可考量例如可將第1保持部210A作成為
可將二個屬於狹條形工件的工件W以令其長邊方向平行排列保持的方式具有二列工件保持部210a、210b之構成、與具有保持一個屬於寬幅工件之工件W的一個工件保持部506之構成置換的構成。再者,也可考量將第2保持部210B構成為可將屬於狹條形工件的工件W加工所得的二個成形品Wp以令其長邊方向平行地排列保持的方式具有二列成形品保持部210c、210d的構成、與具有保持由一個該工件W加工所得的一個成形品Wp的一個工件保持部508的構成置換。透過設成這種構成,可作成即使是狹條形工件與寬幅工件的任一種工件W也可藉第1保持部210A與第2保持部210B的簡易構成置換即可搬送工件W及成形品Wp的構成。
In this way, regarding the configuration that can switch between a narrow workpiece and a wide workpiece, it is conceivable that, for example, the
接著,就樹脂模製裝置1所具備的壓製單元100B之構成作詳細說明。
Next, the configuration of the
壓製單元100B首先具備模製用模具202,其具有可開閉的一對模具(例如,由合金工具鋼製成的複數個模塊、模板、模柱等或其他構件組裝而成的模具)。本實施形態中,係將一對模具中位於鉛直方向上方側的一方模具作為上模204,下方側的另一方模具作為下模206。該模製用模具202可藉由上模204與下模206相互接近、離開而進行閉模、開模。亦即,鉛直方向即為模具開閉方向。
The
另外,模製用模具202係藉由公知的模具開閉機構(未圖示)進行模具的開閉。例如,模具開閉機構係由具備:一對模板;供架設一對模板的複數個連結機構(連結桿(tie-bar)或柱部);及使模板可動(升降)的驅動源(例如,電動馬達)與驅動傳達機構(例如,肘節連桿)等所構成(有關驅動用機構皆未圖示)。 In addition, the molding die 202 is opened and closed by a known die opening and closing mechanism (not shown). For example, the mold opening and closing mechanism consists of: a pair of templates; a plurality of connecting mechanisms (tie-bars or columns) for erecting a pair of templates; motor) and a drive transmission mechanism (for example, a toggle link) etc. (the relevant drive mechanism is not shown).
此處,模製用模具202係配設於該模具開閉機構的一對模板之間。本實施形態中,作為固定模的上模204係組裝於固定模板(固定於連結機構的模板),作為活動模的下模206則組裝於可動模板(沿著連結機構升降的模板)。但,並非限定於這種構成,也可將上模204作為活動模,下模206作為固定模;或者,也可將上模204、下模206皆作為活動模。或者,也可作成設置兩片可動模板,且設置二組上模204及下模206的構成。
Here, the molding die 202 is disposed between a pair of die plates of the die opening and closing mechanism. In this embodiment, the
接著,具體說明有關模製用模具202的下模206。下模206具備下板224、模窩件226、及箝位件228等,並由這些單元組裝所構成(參照圖10)。
Next, the
此處,模窩件226係固定組裝在下板224的上面(上模204側的表面)。箝位件228係以圍繞模窩件226的方式構成環狀6,且和模窩件226鄰接地分離(浮動)組裝在下板224的上面。
Here, the
本實施形態中,下模206雖具有從模具面(分模面)206a凹陷的模窩208,但係由模窩件226構成模窩208的內裡部(底部),由箝位件228構成模窩208的側部。換言之,係藉由該模窩件226的上面及箝位件228的內周壁面形成凹陷成預定形狀的模窩凹部209。
In this embodiment, although the
另外,本實施形態中,如圖21等所示,模窩208具備朝左右方向並設二個的構成(圖中,符號208A、208B),而且具備分別對應的模窩件226A、226B。藉此構成,即可將二片薄膜F(搭載模製樹脂R的部分)同時分別收容於模窩208A、208B內。因此,由於能夠實現同時樹脂模製各二個工件W的構成,故可縮短製程時間。另外,也可採取在下模206中作成將箝位件228按每個模窩208A、208B切開的構成,俾能各別地升降,且在上模204中具備以彈性體吸收二個工件W之板厚差的板厚調整機構的構成。若依據此種構成,即使同時壓縮成形的二個工件W有厚度差也不會發生傾斜,可一邊減少樹脂量供給偏差等的影響一邊成形。另外,本實施形態中,係以模窩208A、208B朝左右方向橫向排列的方式配置模具構件。因此,將構成模窩208A、208B的模窩件226A、226B及箝位件228作成左右分開的模套(chase)構造,故可對收容這些構件的基座朝裝置的前後方向各別插拔,俾進行保養維護。
In addition, in the present embodiment, as shown in FIG. 21 and the like, two
此處,在相對於箝位件228的上模204之模具面設有吸附溝(未圖示),並使其連通於吸附裝置(未圖示)。再者,藉由透過設置圍繞這些部位的密封構造,並驅動吸附裝置進行減壓,即可以閉模的狀態進行模窩208內的脫氣。
Here, a suction groove (not shown) is provided on the mold surface of the
再者,模製用模具202具備從下模206的模具面206a側吸附薄膜F的薄膜吸附機構。在一個例子中,該薄膜吸附機構係經由貫通箝位件228地配設的吸
附路230a、230b而連通到吸附裝置(未圖示)。具體而言,吸附路230a、230b的一端係通到下模206的模具面206a,另一端則和配設於下模206外的吸附裝置連接。藉此構成,即可驅動吸附裝置從吸附路230a、230b吸附薄膜F,俾將薄膜F吸附保持在包含模窩208之內面的模具面206a。更具體而言,能夠從吸附路230b吸附薄膜F,將薄膜F吸附保持在模窩208之外側的模具面206a,且透過從吸附路230a吸附薄膜F,能夠使薄膜F吸附於模具面206a並保持在模窩208之內面(模窩凹部209的模具面)。
Furthermore, the molding die 202 includes a film suction mechanism for sucking the film F from the
依此方式,由於透過設置覆蓋模窩208之內面及下模206之模具面206a(一部)的薄膜F,可使成形品Wp下面的模製樹脂R部分容易剝離,故能容易地將成形品Wp從模製用模具202取出。
In this way, by providing the film F covering the inner surface of the
而且,模製用模具202在下板224與箝位件228之間具備勢能賦予構件(例如,線圈彈簧等彈簧)232。經由該勢能賦予構件232,可使箝位件228可動地組裝在下板224。藉此構成,模窩件226會被箝位件228圍繞,使模窩件226與箝位件228可朝模具開閉方向相對地往復動作。依此方式,在下模206中,模窩件226係固定並保持在下板224,另一方面,箝位件228則以可動方式經由勢能賦予構件232保持分離(浮動)狀態。此時,即成為箝位件228之內周面與模窩件226之外周面的間隙確保在預定尺寸的構成。因而,箝位件228可順暢地動作。
Furthermore, the molding die 202 includes a potential energy imparting member (for example, a spring such as a coil spring) 232 between the
不過,上述的間隙係包含在前述薄膜吸附機構的吸附路230a,且以模窩件226與箝位件228的交界處(模窩208的隅角部)吸附薄膜F。因此,薄膜吸附機構具備密封構件234(例如,O型環)。密封構件234係以上述的間隙作為吸附路230a而設於模窩件226於箝位件228(的下部)之間產生密封作用,使空氣不致漏出。
However, the above-mentioned gap is included in the
此外,下模206具備:加熱器(例如,電熱線加熱器)、輔助加熱器(例如,電熱線加熱器)、溫度感測器、控制部、及電源等(皆未圖示),俾進行加熱及其控制。在一個例子中,下模206的加熱器係內建於下板224或收容這些元件的模具底座(未圖示),主要對下模206整體及工件W進行加熱。藉由這些下模206的加熱器,下模206即可加熱並調整到預定溫度(例如,120℃至180℃)。
In addition, the
接著,具體說明有關模製用模具202的上模204。上模204具備:上板222、及模窩板236等,並由這些元件組裝構成。此處,模窩板236係固定組裝在上板222的下面(下模206側的表面)。
Next, the
此外,上模204具備:加熱器(例如,電熱線加熱器)、溫度感測器、控制部、及電源等(皆未圖示),藉以進行加熱及其控制。在一個例子中,上模204的加熱器係內建於上板222,主要對上模204整體及模製樹脂R進行加熱。藉由該上模204的加熱器,上模204可被加熱並調整到預定溫度(例如,120℃至180℃)。
In addition, the
再者,上模204具備用以將工件W保持於模窩板236下面之預定位置的工件保持機構240。在一個例子中,該工件保持機構240係經由配設在模窩板236的吸附路240a而連通於吸附裝置(未圖示)。具體而言,吸附路240a之一端係通到上模204的模具面204a,另一端則和配設於上模204外的吸附裝置連接。藉此構成,即可驅動吸附裝置俾從吸附路240a吸附工件W,且可使工件W吸附並保持在模具面204a(此處為模窩板236的下面)。而且,也可和具備吸附路240a的構成並設地作成具有挾持工件W外周之保持爪的構成。
Furthermore, the
另外,本實施形態中,如圖21等所示,工件保持機構240具備朝左右方向並設二組的構成(圖中的符號240A、240B)。藉此構成,可將二個工件W同時分別用工件保持機構240A、240B保持。因而,由於能夠實現同時樹脂模製二個工件W的構成,故可縮短製程時間。另外,前述的板壓調整機構中,透過將保持工件W的模窩板236按每個模窩208A、208B分開各別地升降,即使同時壓縮成形的二個工件W有厚度差,也能成形而不會產生傾斜。
In addition, in this embodiment, as shown in FIG. 21 etc., the workpiece|work holding
如前所述,作為上述樹脂模製裝置1的變化例,也可構成為在一具下模中設置一個模窩,並且配置一個工件W來進行樹脂模製,而製得一個成形品的壓縮成形方式的樹脂模製裝置2(參照圖28)。在該情況中,可以考量以如下述的壓製單元500B的構成來替代壓製單元100B。
As mentioned above, as a modification example of the above-mentioned
在一個例子中,壓製單元500B只要作成在下模206中具備介由一片薄膜收容模製樹脂的模窩208以替代收容前述二片薄膜及模製樹脂的二列模窩208A、208B的構成即可。而且,只要作成在上模204中將保持前述二個工件的工件保持機構240A、240B一併使用作保持一個工件W的工件保持機構240的構成即可。
In one example, the
接著,以樹脂模製裝置1所具備的分料單元100C的構成為主,就薄膜F及模製樹脂R的供給動作詳加說明。
Next, the supply operation of the film F and the molding resin R will be described in detail, focusing on the configuration of the dispensing unit 100C included in the
如前所述,分料單元100C為進行薄膜F及模製樹脂R之供給等的單元。本實施形態中,係在將薄膜F及模製樹脂R向模製用模具202搬送時,使用搬送具400作為保持並搬送這些物料的器具。亦即,透過使用該搬送具400作為器具,將模製樹脂R保持且和薄膜F一起搬送。此外,搬送具400係可將薄膜F令其長邊方向平行地排列保持(詳細容後述)。
As described above, the dispensing unit 100C is a unit that supplies the film F and the molding resin R, and the like. In this embodiment, when transferring the film F and molding resin R to the
首先,分料單元100C具備準備臺302,其係供載置尚未保持薄膜F及模製樹脂R狀態的搬送具400,且經進行適當清理。例如,從模製用模具202搬出的搬送具400會附著有模製樹脂R而成為動作不良的原因。因此,藉由用刷子或吸附機構(皆未圖示)將表面連同後述的貫通孔進行清理即可防止動作不良。
First, the distributing unit 100C is equipped with a preparation table 302, which is used to place the
其次,裝設保持搬送具400並將其在複數個預定位置(臺)間進行搬送的搬送具拾取器304。另外,保持搬送具400的機構已有公知的保持機構(例如,具有保持爪俾進行挾持的構成、具有連通於吸附裝置的吸附孔俾進行吸取的構成等)(未圖示)。例如,可採用在搬送具400的外周部分設置凹凸部,將凹凸部勾掛保持在從搬送具拾取器304的下面向下立設的保持爪,而進行搬送的構成。
Next, a
此處,搬送具拾取器304係構成為可朝前後、左右及上下方向移動。藉此構成,可將準備臺302上所載置的搬送具400保持,且朝後述的薄膜臺308及樹脂投下臺310搬送。
Here, the
接著,分料單元100C係在位於準備臺302後方的位置處具備:薄膜捲筒306,由長帶狀薄膜F捲成捲筒狀;及薄膜臺(第1臺)308,配設於薄膜捲筒306之上方(本實施形態中為斜上方),供從薄膜捲筒306送出的薄膜F裁切成預定長度的狹條形並加以保持。
Then, the distributing unit 100C is provided at a position behind the preparation table 302: a
在一個例子中,薄膜臺308及薄膜捲筒306具備朝上下方向從上方依序並設成階層狀的構成(包含前後左右方向的偏位)。藉此構成,和各構成以平面方式並設的傳統裝置比較,可減少裝置的設置面積。
In one example, the film table 308 and the
本實施形態中,薄膜捲筒306係使二個薄膜捲筒306A、306B朝左右方向排列配設。藉此構成,二片同形的薄膜F即可同時供給在薄膜臺308上。此處,薄膜捲筒306A、306B可以其中心軸307a支持設置,也
可用較薄膜捲筒306A、306B之外形更小的間隔設有複數個的輥307b從下方支持設置。在此情況中,透過以輥307b從下方支持薄膜捲筒306A、306B的構成,可將2個排列的薄膜捲筒306A、306B簡易地更換,而不需插拔中心軸307a。此外,薄膜捲筒306向薄膜臺308的送出,也可作成將端部挾住拉出的構成、或以設在薄膜臺308前面的驅動式輥送出的構成。
In this embodiment, the
另一方面,薄膜臺308具有公知的裁切機構(例如,固定刃刀具、熱熔融刀具等)(未圖示)作為裁切長帶狀薄膜F的機構。此外,保持二片薄膜F的機構則具有公知的保持機構(例如,具有連通於吸附裝置的吸附孔執行吸取的構成等)(未圖示)。此處所裁切的薄膜F與搬送具400係在該薄膜臺308組合。
On the other hand, the film table 308 has a known cutting mechanism (for example, a fixed-blade cutter, a thermal fusion cutter, etc.) (not shown) as a mechanism for cutting the long strip-shaped film F. In addition, the mechanism for holding the two films F has a known holding mechanism (for example, a structure in which suction is performed through suction holes communicated with the suction device, etc.) (not shown). The film F cut here is combined with the
此處,本實施形態的搬送具400係如圖9所示,具有形成在上面與下面成為平行之平面的概略平板形狀,且具有保持薄膜F的二列搬入薄膜保持部(圖中,400A、400B)。此外,各搬入薄膜保持部400A、400B在對應各薄膜F的位置(保持各薄膜F的位置),配設有以從上面觀看時會露出各薄膜F之方式形成為貫通孔的樹脂投入孔400a、400b。透過該樹脂投入孔400a、400b形成為對應前述的模窩凹部209的形狀,在模製樹脂R投下並保持在樹脂投入孔400a、400b內時,可以適當的狀態準備模製樹脂R。
Here, as shown in FIG. 9 , the
再者,樹脂投入孔400a、400b的周圍配設有產生吸附力並保持薄膜的複數個第1吸附孔400c。另
外,第1吸附孔400c係成為後述經由設於第3保持部212A的第2吸附孔212b、或經由(連通)後述設於搬送具拾取器304的第3吸附孔(未圖示)傳達吸附裝置(未圖示)所產生之吸附力的構成。若依據上述構成,即可在藉搬送具拾取器304搬送到薄膜臺308上的搬送具400的下面,將二片薄膜F以朝左右方向排列吸附的狀態加以保持。另外,也可設成以保持爪挾住並保持薄膜F之外周的構成。
Furthermore, around the
其次,具備有樹脂投下臺(第2臺)310,其係相對於薄膜臺308配設在側方(在一個例子中為右方),並且構成為可朝前後左右方向移動,供載置藉搬送具拾取器304搬送的搬送具400(下面保持有二片薄膜F的狀態)。另外,樹脂投下臺310具有公知的保持機構(例如,具有保持爪俾進行挾持的構成、具有連通於吸附裝置的吸附孔俾進行吸附的構成等)(未圖示)作為保持所載置之搬送具400的機構。
Next, there is a resin casting table (second table) 310, which is arranged on the side (in one example, on the right) with respect to the film table 308, and is configured to be movable in the front, rear, left, and right directions for loading and unloading. The
再者,圖1中,係相對於薄膜臺308以上述的樹脂投下臺310夾在中間的配置在側方(在一個例子中為右方)較樹脂投下臺310更高的位置具備有分配器312。該分配器312係將模製樹脂R投入到樹脂投下臺310所載置之搬送具400的樹脂投入孔400a、400b,並將該模製樹脂R搭載(投下)於露出的薄膜F上(樹脂投入孔400a、400b之內側)。該分配器312係以具備例如貯留模製樹脂R的料斗312a、秤量所投下之樹脂重量的重量計312b、將所秤量的模製樹脂R以振動給料器(未圖
示)送出的料槽312c、規範從料槽312c送出並投下之模製樹脂R的投下位置的注口(nozzle)312d等所構成。
In addition, in FIG. 1 , the
此處,本實施形態的樹脂投下臺310係構成為可朝前後及左右方向移動(圖1中,係圖示在三個的位置)。藉由朝左右方向的移動,即可在保持有薄膜F的狀態下將載置於樹脂投下臺310上的搬送具400向分配器312的下方進退移動。藉此構成,搬送具400即可在分配器312與薄膜臺308的中間位置、與分配器312之注口312d的正下方位置間移動。而且,藉由前後方向的移動,可將保持有已搭載模製樹脂R之薄膜F的狀態的搬送具400向預定位置(藉後述的第3保持部212A進行搬送具400之保持的位置)搬送。另外,作為變化例,也可考量設成藉分配器312置換該移動範圍之移動的構成來替代樹脂投下臺310左右移動的構成。而且,也可考量設成藉第3保持部212A(後述)置換該移動範圍之移動的構成來替代樹脂投下臺310前後移動的構成(皆未圖示)。
Here, the resin casting table 310 of this embodiment is comprised so that it may move to front-back and left-right directions (in FIG. 1, it shows in three positions). By moving in the left-right direction, the
再者,透過使樹脂投下臺310在前後及左右方向的預定路徑一面移動一面從二個注口312d向樹脂投入孔400a、400b送出模製樹脂R,即可在露出於樹脂投入孔400a、400b內的薄膜F上將模製樹脂R以預定厚度均勻不偏倚地填鋪。藉此方式,可防止因薄膜F上的模製樹脂R偏倚所引起的不良品產生。
Furthermore, by moving the
此處,本實施形態的分配器312在搬送具400的二列樹脂投入孔400a、400b分別具有投入模製樹
脂的二個注口312d。在一個例子中,在對應右側樹脂投入孔400a的位置配設有一方注口312d,並且在對應左側樹脂投入孔400b的位置配設有另一方注口312d。換言之,二個注口312d各自的中心間距離、與樹脂投入孔400a、400b各自的中心間距離係構成為相同。藉此方式,可一邊同時通過各個樹脂投入孔400a、400b的相同對應位置,一邊投入模製樹脂R,故可藉移動距離及移動時間最短的一條路徑將模製樹脂R填鋪在二片薄膜F上。因而,能夠大幅縮短製程時間。另外,也可設成具有一個注口,並藉預定的一條路徑在二片薄膜F上依序填鋪模製樹脂R(未圖示)的構成,作為變化例。
Here, the
其次,具備有樹脂加熱器314,其係透過從保持有已搭載模製樹脂R之薄膜F的搬送具400的上面側進行加熱,俾將該模製樹脂R加熱。另外,加熱搬送具400(模製樹脂R)的構成,係在樹脂加熱器314下面配設公知的加熱機構(例如,電熱線加熱器、紅外線加熱器等)(未圖示)。藉此方式,可藉搬送具400將以搭載於二片薄膜F上的狀態保持的模製樹脂R同時加熱。
Next, a
此處,本實施形態的樹脂加熱器314係配設在樹脂投下臺310的移動路徑上,更具體而言,從分配器312的注口312d的正下方位置移動到藉後述的第3保持部212A進行搬送具400之保持的位置間的路徑中途。藉此方式,在模製樹脂R剛藉分配器312的注口312d投入到搬送具400所保持的薄膜F後,隨即進行將該模製樹脂R加熱的製程。因而,特別是在使用顆粒狀、粉
末狀等的樹脂作為模製樹脂R時,可在搭載於薄膜F上後隨即加熱,將位於表面的粉末狀等樹脂加熱熔融而使之一體化。藉此方式,可防止塵埃(樹脂的微細粉末等)的產生,且防止因塵埃在裝置內擴散而發生動作不良或製品不良。
Here, the
另外,樹脂加熱器314的前後位置中,也可具備供給樹脂量測器315,藉以在量測樹脂投入孔400a、400b內投下供給到薄膜F上的模製樹脂R的外觀。該供給樹脂檢查器315可藉由在樹脂投下臺310的移動路徑上方裝設攝像機(單眼攝像機或複眼攝像機),並使用這些裝置的輸出值或拍攝影像利用在記錄所投下的模製樹脂R的厚度或形狀。藉此構成,例如,透過將成形品Wp的成形厚度與實際資訊建立關聯並保存資料,就可由作業人員將這些資料作比較,並選定模製樹脂R的投下條件。藉此方式,可確保有關模製樹脂R供給的追蹤能力(tracerablity),以維持成形品質。
In addition, a supply
接著,和分料單元100C的各機構協同運作的第2裝載器212具備第3保持部212A。該第3保持部212A係在其下面接受樹脂投下臺310上所載置的搬送具400,向下模206的預定保持位置搬送,並且將已解除薄膜F及模製樹脂R之保持的搬送具400向前述準備臺302上搬送。另外,第3保持部212A具有公知的保持機構(例如,具有保持爪俾進行挾持的構成、具有連通於吸附裝置的吸附孔俾進行吸附的構成等)作為用以保持該搬送具400的搬送具保持部212a。再者,具有第2吸附孔
212b,其係配設在和保持於預定位置的搬送具400的第1吸附孔400c連通的位置,藉以產生(傳遞)由吸附裝置(未圖示)所提供的吸附力。藉此構成,可一面將二片薄膜F(分別搭載有模製樹脂R的狀態)朝左右方向排列吸附在搬送具400之下面的狀態加以維持,一面向下模206的預定保持位置(配設有模窩208的位置)搬送。另外,也可作成在搬送具400的下面具有挾持並保持二片薄膜F外周之保持爪的第3保持部212A。
Next, the
此處,具備本實施形態之第3保持部212A的第2裝載器212係構成為可朝前後、左右及上下方向移動。藉由左右方向的移動,能夠進行將搬送具400(保持有已分別搭載模製樹脂R之二片薄膜F的狀態)從分料單元100C向壓製單元100B搬送的動作。再者,藉由前後方向的移動,能夠進行將搬送具400(保持分別搭載有模製樹脂R的二片薄膜F的狀態)從模製用模具202的外部向內部(亦即,向開模狀態的上模204與下模206之間)搬送的動作。
Here, the
再者,藉由上下方向的移動(也有使前後、或者左右方向的移動組合的情形),即可進行將載置於樹脂投下臺310上的搬送具400(保持分別搭載有模製樹脂R的二片薄膜F的狀態)保持的動作。在此情況中,即可進行在下模206的預定保持位置(配設模窩208的位置)一面保持搬送具400一面將分別搭載有模製樹脂R之二片薄膜F的保持解除,且分別(一對一)載置於二個模窩208A、208B(包含一部分模具面206a)的動作。再者,也
可進行將已解除薄膜F及模製樹脂R之保持的狀態的搬送具400載置到前述的準備臺302上的動作。另外,作為變化例,也可考量將第3保持部212A的一部分移動範圍藉其他機構(樹脂投下臺310、下模206等)的移動進行置換之構成(未圖示)。
Furthermore, by moving up and down (there may be a combination of front and rear or left and right movements), the
接著,第2裝載器212具備第4保持部212B,其係用以保持該樹脂模製所得的成形品Wp從模製用模具202(此處為上模204)取出後殘留在下模206的薄膜(已用過薄膜)Fd,並向預定位置(後述的薄膜殘料處理器(film disposer)316)搬送。另外,第4保持部212B具有公知的保持機構(例如,具有連通於吸附裝置的吸附孔俾進行吸附的構成等)作為保持已用過薄膜Fd的搬出薄膜保持部(圖中的符號212c、212d)。
Next, the
而且,本實施形態的第4保持部212B係作成在上述搬出薄膜保持部212c、212d和模製用模具202(下模206)的二個模窩208A、208B對應的位置朝左右方向並設二列的構成。意即,可將薄膜F令其長邊方向平行地排列保持。藉此方式,可在樹脂模製後藉模製用模具202(下模206)將左右方向排列保持的二片已用過薄膜Fd同時朝左右方向排列保持及搬送。
In addition, the fourth holding
此處,本實施形態中,第4保持部212B與上述的第3保持部212A係一體地構成作為第2裝載器212。在一個例子中,第2裝載器212配設有在前方側具有搬送具保持部212a的第3保持部212A,且配設有在後方側具有左右二列搬出薄膜保持部212c、212d的第4
保持部212B。因而,第3保持部212A及第4保持部212B係設成可作為第2裝載器212以一體方式朝前後、左右及上下方向移動的構成。藉此方式,可實現不僅裝置構成可簡化及小型化,且搭載有模製樹脂R的薄膜F、已用過薄膜Fd皆可各二片同時搬送的構成,製程時間也能縮短。
Here, in the present embodiment, the
另外,作為變化例,也可考量將具備第4保持部212B的裝載器和具備上述第3保持部212A的裝載器構成為各別件體(未圖示)。在該情況中,只要構成為可和上述第3保持部212A相同地移動即可。
In addition, as a modification example, it is conceivable to configure the carrier including the
接著,分料單元100C具備有薄膜殘料處理器316供收納藉第4保持部212B搬送的已用過薄膜Fd。在一個例子中,薄膜殘料處理器316係形成為上部(上面部分)設有開口的箱狀。藉此構成,在搬送已用過薄膜Fd的第4保持部212B到達薄膜殘料處理器316正上方位置時,即停止第4保持部212B的搬送動作,並且可藉由解除已用過薄膜Fd的保持,使該已用過薄膜Fd落下並收納到薄膜殘料處理器316內。
Next, the distributing unit 100C is equipped with a
如以上所說明,若依據本實施形態的構成,供給二個狹條形工件W,且在(樹脂模製)加工後取出二個成形品Wp之動作可有效率地進行的裝置得以實現。特別是,在一具下模中設置二個模窩208A、208B,並且配置二個工件W總括地進行樹脂模製時,可一邊維持在二片薄膜F分別搭載模製樹脂R的狀態,一邊向下模206的模窩208A、208B搬送。因而,和傳統裝置比較,可
抑制製程或裝置構造的複雜化,同時大幅提升生產性。再者,和在一具下模206中設置二個模窩208A、208B的並且配置二個工件W,並以一片(一張)薄膜F覆蓋全部的構成比較,也可謀求薄膜使用量的減少。
As described above, according to the configuration of this embodiment, an apparatus can be realized in which two strip-shaped workpieces W are supplied and the operation of taking out two molded products Wp after processing (resin molding) can be efficiently performed. In particular, when two
再者,由於將用於薄膜F之供給的薄膜臺308、與用於模製樹脂R之供給的樹脂投下臺310可作成各別的構成,且併行地進行處理,故相較於傳統裝置,可縮短製程時間。 Furthermore, since the film table 308 for supplying the film F and the resin casting table 310 for supplying the molding resin R can be made into separate structures, and can be processed in parallel, so compared with conventional devices, The process time can be shortened.
如前所述,作為上述樹脂模製裝置1的變化例,也可構成為在一具下模設置一個模窩,並且配置一個工件W進行樹脂模製,而製得一個成形品之壓縮成形方式的樹脂模製裝置2(參照圖28)。在此情況中,可設成能使用較作成上述狹條形薄膜的薄膜F更寬的寬幅薄膜來作為薄膜F的構成。而且,使用寬度較狹條形薄膜更寬的正方形或長方形的單片形薄膜F作為該寬幅薄膜甚為簡易。但,作為寬幅薄膜,只要寬度較狹條形薄膜更大,也可使用剪切成圓形的單片形薄膜F。在此情況中,可考量如下述分料單元500C的構成來替代分料單元100C。
As mentioned above, as a modification example of the above-mentioned
在一個例子中,分料單元500C只要作成能將前述搬送具400的二列搬入薄膜保持部400A、400B、與保持一片薄膜F(寬幅薄膜)的大型搬入薄膜保持部516置換設置的構成即可。再者,前述二列搬出薄膜保持部212c、212d只要設成不論是二片狹條形薄膜的已用過薄膜Fd、或是一片寬幅薄膜的已用過薄膜Fd皆可吸附保持的構成即可。
In one example, the distributing
依此方式,有關可將狹條形薄膜與寬幅薄膜切換使用的構成,可考量例如第3保持部212A設為具有將狹條形用與寬幅用的2種搬送具400共通地保持的搬送具保持部212a的構成。以搬送具保持部212a保持的第一搬送具400,係為以可將屬於狹條形薄膜的二片薄膜F以令其長邊方向平行地排列保持的方式具有二列搬入薄膜保持部400A、400B的一個狹條形薄膜搬送具400。作為以搬送具保持部212a保持的第二搬送具400,則可考量將具有保持屬於一片寬幅薄膜的薄膜F的一個搬入薄膜保持部516的搬送具400共通地保持的搬送具保持部212a的構成。
In this way, regarding the configuration that can switch between the narrow film and the wide film, it is conceivable that, for example, the
透過設成此種構成,由於可按照要加工為成形品Wp的工件W屬於狹條形工件或寬幅工件的任一種工件W,而藉共通的搬送具保持部212a保持不同的搬送具400,將薄膜F和模製樹脂R一起搬入,故可設成能夠以簡易的切換供給薄膜F的構成。
With such a configuration,
再者,有關可將狹條形薄膜與寬幅薄膜切換使用的構成,由於第4保持部212B可設成在將屬於二片狹條形薄膜的已用過薄膜Fd令其長邊方向平行地朝左右方向排列保持的二個狹條形區域、與保持一片屬於寬幅薄膜的已用過薄膜Fd的寬幅區域重複的區域,具有配置有吸附保持已用過薄膜Fd的複數個吸附部的搬出薄膜保持部212c、212d的構成。在此情況中,例如由於應吸附的位置重疊,故不論是屬於狹條形工件用的狹條形薄膜的已用過薄膜Fd、或屬於一片寬幅薄膜的已用過薄膜Fd,皆可用相同的吸附部吸附保持。
Furthermore, regarding the structure that can switch between the narrow film and the wide film, since the fourth holding
若依據此種構成,不論是保持屬於狹條形薄膜的已用過薄膜Fd的情形、或吸附保持屬於寬幅薄膜的已用過薄膜Fd的情形,透過在可保持已用過薄膜Fd的位置配置吸附部,對於狹條形薄膜與寬幅薄膜的任一種已用過薄膜Fd,均可進行搬出,而不需進行構成的置換等。 According to this structure, regardless of whether it is the case of holding the used film Fd belonging to the narrow film, or the case of holding the used film Fd belonging to the wide film by suction, the position where the used film Fd can be held Arrangement of the suction section allows the used film Fd of either the narrow film or the wide film to be unloaded without replacement of the structure or the like.
另外,分料單元500C的平面配置可作成使薄膜臺308與樹脂投下臺310調換的配置,以代替圖1及圖8所示的構造。在此情況中,透過配合此項調換而使準備臺302也移動到裝置側面位置,對於搬送具400的設置或清理用的刷子,皆可從裝置側面進出,使這些調換作業也變得容易。
In addition, the planar arrangement of the
接著,就使用本發明實施形態的樹脂模製裝置1進行樹脂模製的動作,一面參照圖5至圖27,一面以壓製單元100B及分料單元100C的動作為中心進行說明。
Next, the operation of resin molding using the
首先,藉搬送具拾取器304保持已在準備臺302上清理過的搬送具400(未保持薄膜F及模製樹脂R的狀態),且如圖11所示地向薄膜臺308上搬送。在此情況中,搬送具400可在以搬送具拾取器304的保持爪保持的狀態搬送。另一方面,從二個薄膜捲筒306A、306B送出的二片薄膜F則分別裁切成預定長度的狹條形,並保持於薄膜臺308上。
First, the
接著,如圖12所示,藉由使搬送具拾取器304向下方移動(下降),令搬送具400的下面抵接於薄膜臺308上的二片薄膜F。
Next, as shown in FIG. 12 , the lower surface of the
其次,如圖13所示,經由搬送具拾取器304使搬送具400的第1吸附孔400c產生吸附力,且以二片薄膜F吸附保持於搬送具400之下面的狀態,使搬送具拾取器304向上方移動(上升)。
Next, as shown in Figure 13, the
然後,如圖14所示,藉由使搬送具拾取器304向側方(右方)移動,使藉搬送具拾取器304保持的搬送具400(保持有二片薄膜F的狀態)向樹脂投下臺310上搬送。
Then, as shown in FIG. 14 , by moving the
接著,如圖15所示,藉由使搬送具拾取器304向下方移動(下降),搬送具400下面的二片薄膜F會抵接在樹脂投下臺310上。在該狀態下,使藉搬送具拾取器304之保持機構對搬送具400的保持解除(停止),令搬送具400(保持有二片薄膜F的狀態)載置於樹脂投下臺310上。藉此動作,搬送具拾取器304會將下面側保持有薄膜F之狀態的搬送具400保持,從薄膜臺308搬送到樹脂投下臺310的一系列動作就結束。
Next, as shown in FIG. 15 , the two films F on the lower surface of the
其次,藉由使樹脂投下臺310向側方(右方)移動,如圖16所示,載置於樹脂投下臺310上的搬送具400(保持有二片薄膜F的狀態)即可朝分配器312的注口312d正下方的位置搬送。
Next, by moving the resin casting table 310 to the side (to the right), as shown in FIG. The position directly below the
然後,如圖17所示,使用二個注口312d將模製樹脂R向搬送具400的二列樹脂投入孔400a、
400b內側同時投入。此時,由於透過預先量測工件W的厚度,可將向各樹脂投入孔400a、400b內投下供給的模製樹脂R量進行調整,故可將供給到模窩208的模製樹脂R量最佳化。例如,將從二個注口312d投下的模製樹脂R在分配器312側預先各別量測,在對應注口312d之一方的既定量模製樹脂已經投下的時刻,即停止該模製樹脂R的投下,另一方則繼續進行投下動作,直到已投下既定量的模製樹脂。
Then, as shown in FIG. 17, the molding resin R is supplied to the two rows of
再者,在從二個注口312d投下模製樹脂R之際,係使已搭載搬送具400的樹脂投下臺310沿著任意的模式移動。藉此動作,即可在各樹脂投入孔400a、400b內使模製樹脂R供給成對應的模式(將前述的任意模式旋轉180度後的模式)。此處,透過使樹脂投下臺310沿著無間隙的模式移動,模製樹脂R即可以預定厚度均勻而不偏倚地分別鋪填到二片薄膜F上。例如,藉由使樹脂投下臺310沿著將樹脂投入孔400a、400b朝縱向或橫向作n分割(n為2以上的整數)之直線的接近端部彼此間的連結直線所構成的模式移動,即可在樹脂投入孔400a、400b內整體平均地供給模製樹脂R。另外,此處所稱的「直線」,其間隔不必一定要均等,也可在中途折曲。
In addition, when casting the molding resin R from the two
接著,透過使樹脂投下臺310向前方移動,而如圖18所示,載置於樹脂投下臺310上的搬送具400可一邊通過樹脂加熱器314正下方的位置一邊搬送。藉此動作,保持在搬送具400之狀態的薄膜F上的模製樹
脂R的加熱就可進行。然後,透過使樹脂投下臺310再向前方移動,如圖19所示,載置於樹脂投下臺310上的搬送具400即可向預定位置(藉第3保持部212A進行搬送具400之保持的位置)搬送。
Next, by moving the resin dropping table 310 forward, as shown in FIG. 18 , the
接著,從圖19所示的狀態,藉由使第3保持部212A向下方移動(下降),第3保持部212A之下面即抵接於樹脂投下臺310上的搬送具400。然後,第3保持部212A會以保持爪保持搬送具400。而且,經由第3保持部212A使搬送具400的第1吸附孔400c產生吸附力,使二片薄膜F吸附在搬送具400的下面。在維持該狀態的同時,藉第3保持部212A保持搬送具400,如圖20所示地,令第3保持部212A及搬送具400向上方移動(上升)。
Next, from the state shown in FIG. 19 , by moving (falling) the
接著,藉由使第2裝載器212移動,如圖21所示地,保持於第3保持部212A的搬送具400即從模製用模具202外部向內部(亦即,向開模狀態的上模204與下模206之間)搬送。另一方面,在搬送具400被搬送到模製用模具202之前,保持在第1裝載器210的第1保持部210A的二個工件W會先被搬入上模204。此時,首先,第1裝載器210會向模製用模具的內側退入(進入),在第2保持部210B先行樹脂模製,並從上模204接收所成形的成形品Wp(參照圖5)。接著,第1裝載器210會在模製用模具內側前進,保持在保持部210A的二個工件W則被交接到上模204。藉此動作,如圖21所示,成為藉第1保持部210A搬入的二個工件W被保
持在上模204的狀態,而在搬送具400的搬送前,工件W已經充分加熱。
Next, by moving the
再者,在搬送具400被搬送到模製用模具202之前,先以第2裝載器212之第4保持部212B將已用過薄膜Fd保持並從下模206搬出。此時,首先,第2裝載器212會向模製用模具的內側退入(進入),以第4保持部212B吸附並接收先前在樹脂模製時所使用並保持於下模206的已用過薄膜Fd(參照圖6)。藉此方式,即可對模製用模具202搬入搬送具400。
Furthermore, before the
接著,如圖22所示,透過使第3保持部212A向下方移動(下降),搬送具400下面的二片薄膜F(搭載有模製樹脂R的狀態)會抵接在下模206上。此時,各薄膜F(搭載有模製樹脂R的部分)就收納載置於模窩208A、208B內。
Next, as shown in FIG. 22 , by moving (lowering) the
其次,令經由第3保持部212A產生的搬送具400之第1吸附孔400c的吸附力停止,從搬送具400解除對二片薄膜F(搭載有模製樹脂R的狀態)的保持。此時,各薄膜F的外緣部分係分別在模窩208A、208B外的模具面206a載置成附掛在吸附路230b的一端部位。此處,係從吸附路230b吸引薄膜F,使薄膜F吸附保持在模窩208外側的模具面206a。然後,透過從吸附路230a吸引薄膜F,如圖23所示地,令薄膜F吸附於模具面206a並保持在模窩208內面(模窩凹部209的模具面)。藉此動作,模製樹脂R即介著薄膜F供給到模窩208內(模窩凹部209上)。
Next, the suction force of the
接著,如圖24所示地,藉由使第3保持部212A移動而取出搬送具400。此時,保持在第3保持部212A的搬送具400(未保持有薄膜F及模製樹脂R的狀態)即被從模製用模具202的內部向外部(亦即,從開模狀態的上模204與下模206之間向外部)取出,並向準備臺302上搬送。此處,搬送具400可加以清理再使用。
Next, as shown in FIG. 24 , the
然後,如圖25所示,進行模製用模具202的閉模,並藉上模204及下模206夾住二個工件W。
Then, as shown in FIG. 25 , the molding die 202 is closed, and the two workpieces W are clamped by the
接著,如圖26所示,藉由使各模窩208A、208B的模窩件226A、226B相對地上升,即可對二個工件W藉由模製樹脂R受到加熱加壓而熱硬化,同時進行樹脂模製(壓縮成形)。藉此動作,即可製成二個成形品Wp。
Next, as shown in FIG. 26, by raising the
其次,如圖27所示,進行模製用模具202的開模。此時,成形品Wp及已用過薄膜Fd會被分離,成為二個成形品Wp保持在上模204,並且,二片已用過薄膜Fd保持在下模206的狀態。在此狀態下,如上所述,透過成形品Wp與已用過薄膜Fd被分別取出及搬送,一組的模製動作即告結束。
Next, as shown in FIG. 27 , the molding die 202 is opened. At this time, the molded product Wp and the used film Fd are separated, and the two molded products Wp are held in the
另外,有關如上所述的模製動作,為了動作的效率化,較佳為使用複數個搬送具400同時併行各製程。在此情況中,在樹脂模製裝置1的內部,較佳為設成具備複數個搬送具400,且使搬送具400在上述的各製程內循環的構成。亦即,只要在:於準備臺302清理搬送具400的清理製程、薄膜F組合於搬送具400的
薄膜設置製程、對已和薄膜F組合的搬送具400投下模製樹脂R的樹脂投下製程、及對模製用模具202供給薄膜F及模製樹脂R的樹脂供給製程之間,以使複數個搬送具400進行不同製程之處理的方式,在樹脂模製裝置1對控制各部動作的控制部(未圖示)進行控制即可。
In addition, regarding the molding operation as described above, it is preferable to use a plurality of
藉此方式,可縮短各製程中搬送具400的等待時間,且可提升生產性。例如,藉由使一般情況下容易耗時的對薄膜F供給模製樹脂R的製程、與其它製程同時併行,即可有效率地進行裝置內的製程,並能提高生產性。
In this way, the waiting time of the
另外,使用作為變化例的樹脂模製裝置2進行樹脂模製時的動作,基本上係和使用上述樹脂模製裝置1進行樹脂模製時的動作相同。在此情況中,只要對於二個工件W、二個薄膜F(及所搭載的模製樹脂R)、二個成形品Wp使裝置構成等分別和一個工件W、一個薄膜F(及所搭載的模製樹脂R)、一個成形品Wp對應即可。
In addition, the operation when resin molding is performed using the
如以上所說明,若依據本發明的樹脂模製裝置及樹脂模製方法,可謀求對工件、成形品進行供給、收納、測量厚度、及搬送等的機構朝上下方向階層式配置之構成的實現。因而,相較於傳統裝置,可減少設置面積。 As explained above, according to the resin molding apparatus and resin molding method of the present invention, it is possible to achieve a structure in which the mechanisms for supplying, storing, measuring thickness, and conveying workpieces and molded products are arranged in layers in the vertical direction. . Therefore, compared with conventional devices, the installation area can be reduced.
再者,可謀求將工件、成形品以二個排列狀態進行處理、搬送之構成、及在一個下模設置二個模窩並且分別對各模窩配置工件同時進行樹脂模製之構成 的實現。依此方式,由於可同時搬送各二個工件與成形品、以及薄膜與模製樹脂,並且可同時樹脂模製二個工件,故相較於傳統裝置,可大幅縮短製程時間。而且,裝置構成或製程都可簡化。 Furthermore, it is possible to achieve a configuration in which workpieces and molded products are processed and transported in two arrayed states, and a configuration in which two cavities are set in one lower mold and the workpieces are respectively placed in each cavity to perform resin molding at the same time realization. In this way, since two workpieces and molded products, as well as film and molding resin can be transported at the same time, and two workpieces can be resin molded at the same time, compared with the traditional device, the process time can be greatly shortened. Moreover, the configuration of the device and the manufacturing process can be simplified.
另外,本發明並不限定於以上說明的實施例,在不逸離本發明的範圍內,可進行各種變更。特別是,雖例舉了下模中具備模窩的壓縮成形方式的樹脂模製裝置來說明,但也可應用在上模中具備模窩的構成等。 In addition, this invention is not limited to the Example demonstrated above, Various changes are possible in the range which does not deviate from this invention. In particular, although a resin molding apparatus of a compression molding method in which a lower mold is provided is described as an example, a configuration in which an upper mold is provided with a dimple, etc. may also be applied.
此外,以上說明的樹脂模製裝置的整體動作中,也可透過一面進行以下所說明的樹脂供給控制一面依序進行樹脂模製來謀求壓縮成形中對維持成形品質(成形厚度的均勻化)甚為重要的樹脂供給均勻化。 In addition, in the overall operation of the resin molding apparatus described above, it is also possible to maintain the molding quality (uniformity of the molding thickness) in the compression molding by sequentially performing the resin molding while performing the resin supply control described below. For critical resin supply homogenization.
以下,參照圖面就本實施形態中用於控制樹脂供給的構成或動作詳細說明。圖29為本發明實施形態的樹脂模製裝置的控制構成例的方塊圖。控制部CTR係以CPU等構成,並和控制上述工件處理單元100A或分料單元100C內之各部協同動作,俾進行模製樹脂R的供給控制。再者,控制部CTR會執行用於作業人員操作之顯示部DIS的顯示控制,從輸入部INP受理輸入,將必要的資訊從記憶部MEM讀出或記憶。
Hereinafter, the configuration and operation for controlling resin supply in this embodiment will be described in detail with reference to the drawings. Fig. 29 is a block diagram showing an example of the control structure of the resin molding apparatus according to the embodiment of the present invention. The control unit CTR is constituted by a CPU, etc., and cooperates with controlling each unit in the
圖30為本發明實施形態的樹脂模製裝置的樹脂供給動作例的流程圖。此處說明的動作係相當於用以對一個工件W樹脂模製所需的一組動作(一系列動
作)。此外,實際的樹脂模製裝置1內,因為要對複數個工件W併行施行各個動作,故會針對這些一系列動作中必要的部分在局部性重複的時間軸上進行。
Fig. 30 is a flow chart showing an example of the resin supply operation of the resin molding apparatus according to the embodiment of the present invention. The motions described here correspond to a set of motions (a series of motions) required for resin molding one workpiece W.
do). In addition, in the actual
該圖所示的樹脂供給動作中,首先,控制部CTR會從記憶部MEM取得成形條件資訊Dc(步驟S1)。此處,控制部CTR係從記憶部MEM讀出例如成形品Wp的樹脂部分成形厚度(目標值)、或在搬送具400內投下模製樹脂R的模式作為成形條件資訊Dc。該模製樹脂R的投下模式雖係當作樹脂投下臺310的動作控制模式預行記憶,但不是只有以移動目標點構成的樹脂投下臺310的移動位置,也包含各點間的樹脂投下臺310的移動速度。此外,模製樹脂R的投下模式也包含從注口312d投下模製樹脂R的速度(每單位時間的投下量)。
In the resin supply operation shown in the figure, first, the control unit CTR acquires the molding condition information Dc from the memory unit MEM (step S1). Here, the control unit CTR reads, for example, the molded thickness (target value) of the resin part of the molded product Wp or the pattern of dropping the molded resin R in the
另一方面,控制部CTR會取得此後要樹脂模製之工件W的工件資訊Dw(步驟S2)。此處,工件處理單元100A中,讀碼器115係藉由將從供給匣102取出之工件W所附的二維碼讀取,並輸出至控制部CTR,讓控制部CTR取得各個工件W的工件資訊Dw(例如連續編號等)。接著,控制部CTR會取得厚度資訊Dt(步驟S3)。此處,工件量測器114係量測工件W的厚度(詳細如上述),並透過向控制部CTR輸出,讓控制部CTR取得作為各個工件W之基材Wa或電子零件Wb的厚度等的厚度資訊Dt。
On the other hand, the control unit CTR acquires the workpiece information Dw of the workpiece W to be resin-molded thereafter (step S2). Here, in the
接著,控制部CTR會輸出樹脂供給設定資訊Dd1(步驟S4)。此處,控制部CTR係計算從分配器312
投下供給的模製樹脂R之量(重量)。該動作可藉由從作為目標值的樹脂部分成形厚度及模窩208的外形(俯視的形狀)求得成形時的模窩208之容積中,扣除藉量測工件W的厚度取得的電子零件Wb之體積所得的容積、及成形後(硬化狀態)的模製樹脂R的比重而算出。然後,控制部CTR會將先前讀出的模製樹脂R的投下模式和該計算值一起輸出到分配器312作為樹脂供給設定資訊Dd1。
Next, the control part CTR outputs resin supply setting information Dd1 (step S4). Here, the control unit CTR is calculated from the
接著,分配器312會根據樹脂供給設定資訊Dd1將模製樹脂R向薄膜F上的樹脂投入孔400a、400b內側投下。此處,在分配器312中,會將預定量的模製樹脂R以重量計312b計量,並介由料槽312c以振動方式送出,並從注口312d投下。在此種模製樹脂R的投下動作中,會有模製樹脂R經常難以均勻地從分配器312投下的情況。
Next, the
例如,在分配器312的貯留模製樹脂R的料斗(hopper)312a中,其內部之上側與下側所含的粒度大小容易產生不同,會發生因投下的時機而讓模製樹脂R的粒度改變的情形。而且,藉振動給料器在料槽312c上送出時,也會因模製樹脂R的粒度而使送出速度不同,故即使想以相同的投下模式進行投下動作,也有難以將實際投下的模製樹脂R均一化的情形。因此,在分配器312中,會發生無法按照從控制部CTR輸出的樹脂供給設定資訊Dd1(供給的模製樹脂R的重量)投下模製樹脂R的情況。對於此點,藉由分配器312將作為實際供給的模製樹脂R量(重量)的實供給量資訊Dd2輸出到
控制部CTR,控制部CTR即可取得實供給量資訊Dd2(步驟S5)。
For example, in the hopper (hopper) 312a for storing the molded resin R of the
接著,控制部CTR會取得供給樹脂形狀資訊Dr(步驟S6)。此處,供給樹脂檢查器315係針對已投下到薄膜F上的模製樹脂R的外觀進行量測。例如,作為供給樹脂檢查器315的攝像機會將載置於樹脂投下臺310上的搬送具400中搭載於薄膜F上的模製樹脂R進行拍攝,並將拍攝影像作為供給樹脂形狀資訊Dr輸出到控制部CTR。
Next, the control part CTR acquires supply resin shape information Dr (step S6). Here, the supplied
其次,控制部CTR會取得成形品資訊Dp(步驟S7)。此處,係針對使用如以上方式準備的模製樹脂R進行樹脂模製所得的成形品Wp,以成形品量測器118量測成形品Wp的厚度。接著,藉由將該量測值輸出到控制部CTR,控制部CTR即可取得作成各個成形品Wp之(樹脂成形部分)厚度的成形品資訊Dp。
Next, the control part CTR acquires the molded product information Dp (step S7). Here, the thickness of the molded product Wp is measured by the molded
接著,控制部CTR會針對依上述方式取得的複數筆資訊,和工件資訊Dw建立關聯並保存於記憶部MEM(步驟S8),作為有關一個工件W之樹脂模製的取得資訊。藉由將依此方式取得的資訊保存於記憶部MEM,作業人員即可使用顯示部DIS裝置內實際進行的樹脂模製的狀態進行確認,從輸入部INP進行必要的變更,或傳送到製造工場的上位系統,利用於品質管理等。另外,也可只進行以上的步驟作為樹脂供給控制,俾確保追蹤能力。 Next, the control unit CTR associates the plurality of pieces of information acquired in the above manner with the workpiece information Dw and stores them in the memory unit MEM (step S8 ) as the acquired information about one workpiece W for resin molding. By storing the information obtained in this way in the memory part MEM, the operator can use the display part DIS device to confirm the actual state of resin molding, make necessary changes from the input part INP, or send it to the manufacturing plant The higher-level system is used for quality control, etc. In addition, it is also possible to perform only the above steps as resin supply control to ensure traceability.
在裝置內實施進一步控制的情況中,控制部CTR會使用依以上方式取得的資訊來判斷樹脂供給是否正確(步驟S9)。此處,控制部CTR係例如將作為樹脂部分之成形厚度目標值的成形條件資訊Dc、和作為成形品Wp的(樹脂成形部分)厚度的成形品資訊Dp作比較。只要依據此種方式,在目標值與成形品Wp的實際厚度差超過預定值(容許值)時,即可判斷為樹脂供給不恰當。 In the case of implementing further control in the device, the control unit CTR uses the information obtained in the above manner to determine whether the resin supply is correct (step S9). Here, the control unit CTR compares, for example, the molding condition information Dc, which is the target value of the molding thickness of the resin portion, with the molded product information Dp, which is the thickness of the molded product Wp (resin molded portion). According to this method, when the difference between the target value and the actual thickness of the molded product Wp exceeds a predetermined value (allowable value), it can be judged that the resin supply is inappropriate.
其次,控制部CTR會調整下一個工件W的樹脂供給設定資訊Dd1(步驟S10)。此處,係在例如計算從分配器312投下供給的模製樹脂R的重量時,藉由依上述目標值與成形品Wp的厚度差為正值或負值,將要供給的模製樹脂R的重量進行修正的修正值設定為正負相反值,就可使後續工件W的成形厚度接近目標值。
Next, the control part CTR adjusts the resin supply setting information Dd1 of the next workpiece|work W (step S10). Here, for example, when calculating the weight of the molded resin R dropped and supplied from the
作為步驟9之動作的其他例子,控制部CTR係例如將作為要供給的模製樹脂R之重量的樹脂供給設定資訊Dd1、與作為實際供給的模製樹脂量(重量)的實供給量資訊Dd2作比較。若依據此種構成,在設定值與實際值之差超過預定值(容許值)時,即判斷為樹脂供給不恰當。此時,步驟10中,控制部CTR能夠使為了供給用於後續工件W而以重量計312b計量並投下的模製樹脂R之量增減。
As another example of the operation in
作為步驟9之動作的另一其他例子,控制部CTR會例如根據屬於薄膜F上所搭載之模製樹脂R的拍攝影像的供給樹脂形狀資訊Dr,來判斷樹脂供給是否恰當。此處,係將模製樹脂R的拍攝影像分割為預定的
劃分區域(n行m列),將該拍攝影像的劃分區域間加以比較,並計算出其偏差程度,再根據該偏差程度來判斷樹脂供給是否恰當。例如,取得構成各劃分區域之影像的顏色或亮度分布(顏色的深度與畫素數的乘積),並根據每個劃分區域之顏色濃度所表示的樹脂投下量偏差程度大小來判斷樹脂供給是否恰當。
As another example of the operation in
例如,若為一般使用於樹脂模製的黑色環氧樹脂,供給到預定區域內的模製樹脂R量越多,模製樹脂R會變密而使模製樹脂R的間隙越少。在此情況中,由於位在模製樹脂R下面的薄膜F(例如乳白色)變得難以拍攝,會使影像接近模製樹脂R的顏色(黑色)。因此,例如在模製樹脂R投下偏倚的情況中,多拍攝薄膜F而使影像的顏色變淺的區間、與未拍攝薄膜F而使影像的顏色變深的區間會混合存在。像這樣,影像的深度在各區間有大幅不同時(偏差大時),即判斷為樹脂供給不恰當。此時,即在步驟10中,將此後工件W的樹脂供給的指示加以調整。例如,控制部CTR可以在影像變淺的劃分區域投下更多模製樹脂R的方式,將樹脂投下臺310的移動速度降低、或將從注口312d的模製樹脂R投下速度增加。另一方面,控制部CTR可以在影像變深的劃分區域投下的模製樹脂R減少的方式,使樹脂投下臺310的移動速度加快、或將從注口312d的模製樹脂R的投下速度降低。
For example, in the case of black epoxy resin generally used in resin molding, the more the amount of molded resin R supplied to a predetermined area, the denser the molded resin R will be, and the smaller the gaps between the molded resins R will be. In this case, since the film F (for example, milky white) under the molding resin R becomes difficult to photograph, the image will be close to the color of the molding resin R (black). Therefore, for example, in the case of uneven casting of the mold resin R, the section in which the film F is photographed more and the color of the image becomes lighter and the section in which the film F is not photographed and the color of the image is darker are mixed. In this way, when the depth of the image is greatly different in each section (when the deviation is large), it is judged that the resin supply is inappropriate. At this time, that is, in
如上所述,藉由控制部CTR根據取得資訊對下一個工件W的樹脂供給設定資訊Dd1進行調整,即 可使對壓縮成形的品質維持甚為重要的模製樹脂R之供給均勻化。 As described above, the resin supply setting information Dd1 of the next workpiece W is adjusted by the control unit CTR according to the obtained information, that is, The supply of molding resin R, which is important for maintaining the quality of compression molding, can be made uniform.
再者,以上雖係就模製裝置的各單元說明其特徵,但係屬於對共通的工件進行加工或處理的單元,而有關在任一單元進行的構成或動作,也可在其他單元同樣進行而不會妨礙。此外,在本案中,這些單元的機能在單元單位中也有各別的功效,而屬於包含有作為單體單元的發明。例如,在分料單元中,可準備由薄膜與搬送具組合以供給模製樹脂的機組。因此,會有另外準備及利用分料單元與壓製單元也可獲得相同效果的情形。 Furthermore, although the characteristics of each unit of the molding device have been described above, it belongs to a unit that processes or handles a common workpiece, and the configuration or action performed in any unit can also be performed in other units. won't get in the way. In addition, in this case, the functions of these units also have different functions in the unit units, and belong to the invention that includes them as monomer units. For example, in the dispensing unit, it is possible to prepare a unit that combines a film and a carrier to supply molding resin. Therefore, there is a situation where the same effect can be obtained by preparing and utilizing the distributing unit and the pressing unit separately.
此外,上文主要是就將屬於狹條形工件的二個工件W以令其長邊方向平行地排列的狀態在模製裝置1內進行搬送並成形的例子作說明。然而,也可作成將屬於狹條形工件的三個工件W以令其長邊方向平行地排列的狀態在模製裝置1內進行搬送並成形的構成。再者,為考慮到模具更換的便利性,雖係就屬於狹條形工件的工件W以成為朝裝置的前後方向平行地排列的狀態在模製裝置1內進行搬送並成形的例子為主作說明,但也可作成將該工件W以成為朝裝置的左右方向平行地排列的狀態在模製裝置1內進行搬送並成形的構成。在此情況中,只要將供給匣升降機103或收納匣升降機113配置在工件處理單元100A的左側,即可有效率地搬送,而不用使工件W的朝向旋轉。
In addition, the above mainly describes an example in which two workpieces W which are narrow workpieces are transported and molded in the
此外,上文雖是就從捲筒薄膜裁取並準備狹條形或寬幅的薄膜F進行搬送的例子作說明,但對於前述實施形態的發明中不涉及薄膜F的部分,在利用不使用薄膜F的模製用模具202進行壓縮成形時,也可加以實施。在此情況中,係使用僅搬送模製樹脂R的專用搬送具。而且,也可作成不使用狹條形或寬幅的薄膜F,但將捲筒薄膜設置在壓製單元100B、500B供給薄膜F,僅搬送模製樹脂R的專用搬送具的構成。該搬送具中,可透過將收容模製樹脂R的位置下方設成可開閉,而以關閉狀態搬送模製樹脂R,以開啟狀態供給到模窩208的構成。
In addition, although the above is an example of cutting from a roll film and preparing and conveying a narrow or wide film F, the part not related to the film F in the invention of the above-mentioned embodiment is not used. It can also be implemented when the
再者,以上雖係以基材Wa的電子零件Wb搭載面反轉成向下後供給到裝置內的情形為前提作說明,但也可設成樹脂在裝置內模製前就使工件W反轉的構成。在此情況中,也可在成形後再度使成形品Wp或收納匣112反轉。而且,也可以工件W或成形品Wp的單位反轉,也可以供給匣102或收納匣112的單位反轉。作為達成此目的的構成,可在例如挾持工件W或成形品Wp的外周或吸附保持預定位置的狀態下進行移送或交接時,透過以對工件W或成形品Wp的外周邊成平行的旋轉軸為基準旋轉180度,就能夠反轉。若依據此種構成,在成形面朝上進行作業的前後製程(接合製程或檢查製程)的前後施行的反轉作業即不必要,故可防止因作業疏失使生產停止等。
In addition, although the above description is based on the premise that the electronic component Wb mounting surface of the base material Wa is turned downward and then supplied into the device, it may also be set so that the workpiece W is reversed before the resin is molded in the device. The composition of the turn. In this case, the molded product Wp or the
此外,因作業疏失而未進行工件W或成形品Wp之反轉的情況中,亦即,工件W以相對於預想的朝向反轉的錯誤朝向供給時,也可對作業人員發出警報,俾修正為正確的朝向。在此情況中,在工件量測器114量測工件W之厚度時,也可檢測半導體晶片等的實裝方向作為工件W的厚度。
In addition, when the workpiece W or the molded product Wp is not reversed due to an operation error, that is, when the workpiece W is supplied in a wrong direction reversed from the expected direction, an alarm can be issued to the operator for correction. for the correct orientation. In this case, when the
1‧‧‧樹脂模製裝置 1‧‧‧Resin molding device
100A‧‧‧工件處理單元 100A‧‧‧Workpiece Handling Unit
100B‧‧‧壓製單元 100B‧‧‧press unit
100C‧‧‧分料單元 100C‧‧‧Dispensing unit
102‧‧‧供給匣 102‧‧‧Supply box
104、104A、104B‧‧‧供給軌道 104, 104A, 104B‧‧‧supply track
106‧‧‧中繼軌道 106‧‧‧relay track
114‧‧‧工件量測器 114‧‧‧Workpiece Measuring Device
116‧‧‧工件加熱器 116‧‧‧Workpiece heater
120‧‧‧供給拾取器 120‧‧‧Supply Pickup
122‧‧‧第1收納拾取器 122‧‧‧The first storage picker
124‧‧‧第2收納拾取器 124‧‧‧The second storage picker
202‧‧‧模製用模具 202‧‧‧Mold for molding
208A、208B‧‧‧模窩 208A, 208B‧‧‧Mould cavity
210‧‧‧第1裝載器(第1搬送部) 210‧‧‧1st loader (1st conveying part)
210A‧‧‧第1保持部 210A‧‧‧1st maintenance part
210B‧‧‧第2保持部 210B‧‧‧The second maintenance part
210a、210b‧‧‧工件保持部 210a, 210b‧‧‧workpiece holding part
210c、210d‧‧‧成形品保持部 210c, 210d‧‧‧Molded product holding part
212‧‧‧第2裝載器(第2搬送部) 212‧‧‧The second loader (the second conveying part)
212A‧‧‧第3保持部 212A‧‧‧3rd maintenance department
212B‧‧‧第4保持部 212B‧‧‧4th maintenance part
212c、212d‧‧‧薄膜保持部 212c, 212d‧‧‧Film holding part
240A、240B‧‧‧工件保持機構 240A, 240B‧‧‧workpiece holding mechanism
302‧‧‧準備臺 302‧‧‧Preparation table
304‧‧‧搬送具拾取器 304‧‧‧Conveyor picker
306、306A、306B‧‧‧薄膜捲筒 306, 306A, 306B‧‧‧film reel
308‧‧‧薄膜臺(第1臺) 308‧‧‧Film Platform (1st Unit)
310‧‧‧樹脂投下臺(第2臺) 310‧‧‧Resin drop platform (2nd unit)
312‧‧‧分配器 312‧‧‧Distributor
314‧‧‧樹脂加熱器 314‧‧‧Resin Heater
315‧‧‧供給樹脂檢查器(供給樹脂量測器) 315‧‧‧Supply resin checker (supply resin measuring device)
316‧‧‧薄膜殘料處理器 316‧‧‧Film residue processor
400‧‧‧搬送具 400‧‧‧Conveyor
F‧‧‧薄膜 F‧‧‧Film
Fd‧‧‧已用過薄膜 Fd‧‧‧used film
R‧‧‧模製樹脂 R‧‧‧molding resin
W‧‧‧工件 W‧‧‧workpiece
Wp‧‧‧成形品 Wp‧‧‧Molded products
Claims (4)
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JP2018-025730 | 2018-02-16 | ||
JP2018025724A JP6989409B2 (en) | 2018-02-16 | 2018-02-16 | Resin molding device and resin molding method |
JP2018025728A JP6989410B2 (en) | 2018-02-16 | 2018-02-16 | Resin molding device |
JP2018-025728 | 2018-02-16 | ||
JP2018025730A JP7088687B2 (en) | 2018-02-16 | 2018-02-16 | Resin molding device and resin molding method |
JP2018-025724 | 2018-02-16 |
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TW201934295A TW201934295A (en) | 2019-09-01 |
TWI787411B true TWI787411B (en) | 2022-12-21 |
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TW107144278A TWI787411B (en) | 2018-02-16 | 2018-12-10 | Resin molding device |
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KR (1) | KR102521504B1 (en) |
CN (1) | CN110154300B (en) |
TW (1) | TWI787411B (en) |
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JP6861779B1 (en) * | 2019-11-07 | 2021-04-21 | Towa株式会社 | Resin material supply equipment, resin molding equipment, and manufacturing methods for resin molded products |
JP7121763B2 (en) * | 2020-02-14 | 2022-08-18 | アピックヤマダ株式会社 | RESIN MOLDING APPARATUS AND RESIN MOLDING METHOD |
TWI727696B (en) * | 2020-03-11 | 2021-05-11 | 巧力工業股份有限公司 | High-efficiency vacuum orbital perfusion system and its use method |
JP7284514B2 (en) * | 2020-05-11 | 2023-05-31 | アピックヤマダ株式会社 | RESIN MOLDING DEVICE AND CLEANING METHOD |
JP7360364B2 (en) * | 2020-07-03 | 2023-10-12 | Towa株式会社 | Resin molding equipment and method for manufacturing resin molded products |
CN112659438B (en) * | 2020-12-22 | 2022-07-22 | 山东美氟科技股份有限公司 | Single double-end polytetrafluoroethylene mould pressing rod machining device |
WO2023100439A1 (en) * | 2021-12-03 | 2023-06-08 | アピックヤマダ株式会社 | Resin seal device and resin seal method |
TWI793892B (en) * | 2021-12-03 | 2023-02-21 | 日商山田尖端科技股份有限公司 | Resin Encapsulation Device |
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JP2007281368A (en) * | 2006-04-11 | 2007-10-25 | Towa Corp | Resin sealing molding apparatus for electronic component |
JP2017177455A (en) * | 2016-03-29 | 2017-10-05 | Towa株式会社 | Resin molding device, resin molding method, and fluid material discharging device |
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TW410194B (en) * | 1996-08-20 | 2000-11-01 | Apic Yamada Kk | Resin molding machine |
JP4262468B2 (en) * | 2002-10-30 | 2009-05-13 | アピックヤマダ株式会社 | Resin molding method, resin molding apparatus, and support jig used therefor |
JP4078231B2 (en) * | 2003-03-10 | 2008-04-23 | アピックヤマダ株式会社 | Molded product storage device and resin sealing device |
JP2006156796A (en) * | 2004-11-30 | 2006-06-15 | Towa Corp | Resin seal molding method and device of semiconductor chip |
JP2010247429A (en) | 2009-04-15 | 2010-11-04 | Apic Yamada Corp | Resin sealing apparatus and resin sealing method using the same |
JP5544585B2 (en) * | 2010-07-13 | 2014-07-09 | アピックヤマダ株式会社 | Resin molding device and workpiece thickness measuring device |
JP5627619B2 (en) * | 2012-02-28 | 2014-11-19 | Towa株式会社 | Resin sealing device and method for manufacturing resin sealing body |
JP6049597B2 (en) * | 2013-11-28 | 2016-12-21 | Towa株式会社 | Resin material supply method and supply mechanism of compression molding apparatus, and compression molding method and compression molding apparatus |
JP6298719B2 (en) * | 2014-06-09 | 2018-03-20 | Towa株式会社 | Resin sealing device and resin sealing method |
JP6456254B2 (en) * | 2015-06-16 | 2019-01-23 | アピックヤマダ株式会社 | Film conveying apparatus, film conveying method, and resin molding apparatus |
JP6438913B2 (en) | 2015-07-15 | 2018-12-19 | アピックヤマダ株式会社 | Mold and resin molding equipment |
JP6176416B1 (en) * | 2017-03-31 | 2017-08-09 | 第一精工株式会社 | Semiconductor package resin sealing apparatus and semiconductor package resin sealing method |
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TW200415733A (en) * | 2002-11-29 | 2004-08-16 | Apic Yamada Corp | Resin molding machine |
JP2007281368A (en) * | 2006-04-11 | 2007-10-25 | Towa Corp | Resin sealing molding apparatus for electronic component |
JP2017177455A (en) * | 2016-03-29 | 2017-10-05 | Towa株式会社 | Resin molding device, resin molding method, and fluid material discharging device |
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CN110154300A (en) | 2019-08-23 |
KR102521504B1 (en) | 2023-04-13 |
TW201934295A (en) | 2019-09-01 |
CN110154300B (en) | 2022-02-11 |
KR20190099143A (en) | 2019-08-26 |
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