JP5693931B2 - Resin molding equipment - Google Patents

Description

  The present invention relates to a resin molding apparatus for resin molding a work in which a semiconductor chip is held on a carrier.

  When a workpiece is supplied to a plurality of press sections and resin molded, each press section is provided with a workpiece and resin (tablet resin, liquid resin, powder / granular resin, paste resin, etc.) in the press section by a loader. It is resin-molded by carrying in a mold and clamping it. At this time, in order to efficiently perform resin molding in multiple press sections, in addition to making the loader and decompression device shared in each press section, the molding cycle is adjusted to the resin mold operation of the slowest press section. (See Patent Document 1).

JP 2010-83027 A

In addition to supplying workpieces and carrying them in and out of the press section, a series of devices that store the cooled workpieces by heat-curing only the non-defective products after judging the quality of the molded product are compactly arranged, and the process There was a need to improve the work efficiency through coordination between them. For example, when supplying a liquid resin together with a workpiece, when supplying a workpiece to a plurality of press units with a single liquid resin supply device (dispenser), the discharge time of the liquid resin that requires temperature management becomes longer. Production efficiency may be reduced.
Further, there is no disclosure about an apparatus configuration that includes a plurality of press sections and efficiently performs a series of operations from supplying a workpiece to resin molding for different products to heat-curing and storing only good products. In addition, simply gathering the devices that perform each of these steps may increase the installation area, require time for assembly work and maintenance, and may complicate the control operation.

  The present invention solves the above-mentioned problems of the prior art, and a series of operations from supplying a workpiece and resin to performing resin molding and storing a molded product with a compact apparatus configuration and specifications according to the product. It is providing the resin mold apparatus which can perform.

In order to achieve the above object, the present invention comprises the following arrangement.
A robot that can be rotated and linearly moved while holding a work in a robot hand and transporting between each process, and a base part of the robot is provided with a work transport mechanism that is reciprocally movable along a linear motion guide rail , A plurality of workpiece supply units for supplying the workpiece, a resin supply unit for supplying resin for resin molding the workpiece taken out from the workpiece supply unit, and a plurality of the linear motion guide rails along the extending direction; A press part in which the resin supplied from the resin supply part and the work supplied from the work supply part are carried in and resin-molded, a work storage part for storing the resin-molded work in the press part, and an apparatus A control unit that controls the operation of each unit, surrounding the movement range of the robot provided in the workpiece transfer mechanism, the workpiece supply unit, the resin supply , The press portion and the workpiece storage unit is disposed in each of the press section, reciprocable loader is provided toward the transfer area from the press apparatus, on the loader, held by suction to the robot hand work Is provided, or a work placement unit is provided for transferring a work taken out from the press device by a loader to the robot hand .
According to the above configuration, the processing unit and the control unit such as the workpiece supply unit, the resin supply unit, the press unit, and the workpiece storage unit are arranged in a compact manner so as to surround the moving range of the robot provided in the workpiece transfer mechanism, and the workpiece and the resin A series of operations from supplying the resin to performing resin molding and storing the molded product can be performed efficiently and with specifications according to the product.

As the robot, an articulated robot in which movement in the vertical direction by a vertical link and horizontal movement by a horizontal link are performed in parallel is used.
According to this, the workpiece can be conveyed linearly between the processing units arranged so as to surround the movement range of the articulated robot, and the time required for conveying the workpiece to each processing unit can be minimized. it can.

A workpiece inspection unit for inspecting the thickness and appearance of the molded product taken out from the press unit to determine whether it is good, a heat curing unit for storing the non-defective product after the inspection in a curing furnace and heat curing the resin, and after the heat curing Any or all of the cooling units for cooling the workpiece are arranged so as to surround the movement range of the robot provided in the workpiece transfer mechanism.
According to this, it is not necessary to perform processing steps such as workpiece inspection, post-cure, and cooling in a separate process from the resin mold device, that is, a separate device, and the processing steps are consolidated and arranged in a compact manner. A quick process can be performed by linking.

The work transport mechanism reads product information including a resin supply amount and molding conditions in an information reading unit and transports the product information to a subsequent process before the work is carried into the resin supply unit.
According to the above configuration, the product information including the resin supply amount and molding conditions according to the workpiece is collated before being carried into the resin supply unit, so that the resin can be used without mistakes in the molding conditions, heat curing conditions, etc. according to the products. Can be molded.

The control unit controls the timing of the workpiece supply operation and workpiece removal operation by the articulated robot in accordance with the minimum operation cycle of the processing process that takes the longest time, and controls the workpiece transfer operation in consideration of the high-priority process order. It is characterized by doing.
According to this, in addition to speeding up and improving the transport operation of the work transport mechanism in accordance with the resin mold operation in the press unit, the work supply operation and the work take-out operation are made to follow in order to increase the apparatus operating rate of each press unit. be able to.

The controller performs positioning in the XYZ directions with respect to the teaching jig provided for each step using a teaching hand equipped with a laser displacement meter and an imaging device instead of the robot hand of the robot. The operation of the robot is controlled based on positioning in the YZ direction.
According to this, when assembling the multi-joint robot, it is possible to position the work to be carried in / out with respect to each device provided around the multi-joint robot. Can be

The control unit controls the conveyance operation by the articulated robot so that the workpiece unloading operation after forming and the next workpiece loading operation are continuous with respect to a plurality of press units, so that the resin mold is continuously performed in each press unit. It is characterized by being.
As a result, the resin mold operation can be continuously performed in the plurality of press sections, the apparatus operating rate is increased, and the production efficiency can be increased.

The resin supply unit is provided with a plurality of dispense units for supplying a liquid resin, and each discharge unit measures and supplies a discharge amount of the liquid resin discharged to the workpiece.
As a result, the liquid resin can be efficiently and accurately discharged from the dispense unit that requires temperature control to the workpiece, so that it is possible to follow a continuous resin mold operation in a plurality of press sections, contributing to an improvement in production efficiency. be able to.

The work carried into the press part is floatingly supported apart from the lower mold surface, or is held suspended from the upper mold surface.
According to this, for example, when an adhesive tape is applied to a carrier plate and a work in which a semiconductor chip is adhered to the adhesive tape is sealed, a decrease in the adhesive force of the adhesive tape is started by heating from the mold surface. A phenomenon (flying die) in which the semiconductor chip moves toward the outside of the carrier plate by the resin flowing on the carrier plate can be prevented.

  By using the above resin mold equipment, a series of operations from supplying workpieces and resin to resin molding and storing the molded product can be performed efficiently with a compact device configuration and resin mold with specifications according to the product. An apparatus can be provided.

It is a plane layout figure which shows the example of whole structure of the resin mold apparatus. It is a side view of an articulated robot and an explanatory view of a robot hand. It is explanatory drawing which shows the position alignment operation | movement of the height direction of a teaching hand and an XY direction. It is explanatory drawing of a workpiece | work supply part. It is explanatory drawing of the taking-out and accommodation operation | movement of the workpiece | work with respect to the workpiece | work supply part and workpiece | work storage part by a multi joint robot. It is explanatory drawing which shows an example of the resin supply part. It is explanatory drawing which shows the workpiece carrying-in / out operation | movement to a press part. It is sectional explanatory drawing which shows compression molding operation | movement. It is sectional explanatory drawing which shows the compression molding operation | movement which concerns on another example. It is sectional explanatory drawing which shows the compression molding operation | movement which concerns on another example. It is explanatory drawing of a cooling part and a workpiece | work inspection part. It is explanatory drawing which shows the shutter opening / closing operation | movement of a heat-hardening part, and a workpiece | work accommodation state. It is a timing chart figure which shows the timing of the workpiece | work supply operation | movement to the press part by a workpiece conveyance mechanism. It is a chart which shows an example of the exchange order of an example of the conveyance order table of the workpiece | work memorize | stored in the memory | storage part, an example of a process priority table, and a conveyance order table. It is a timing chart figure of work conveyance operation by a work conveyance mechanism.

  Hereinafter, a preferred embodiment of a resin mold device according to the present invention will be described in detail with reference to the accompanying drawings. In the following embodiments, a compression molding apparatus is used as an example of a press apparatus, a lower mold is described as a movable mold, and an upper mold is described as a fixed mold.

(Overall configuration of resin molding equipment)
FIG. 1 is a plan layout view showing an embodiment of a resin molding apparatus according to the present invention. The resin molding apparatus of the present embodiment surrounds the movement range of the articulated robot provided in the workpiece conveyance mechanism H, and includes a workpiece supply unit A, a resin supply unit B, a press unit C, a workpiece inspection unit D (cooling unit), and heat curing. A processing unit that performs each processing step, such as the unit E and the workpiece storage unit F, and a control unit G that controls the operation of these processing units are arranged. In the vicinity of the press part C, an information reading part I is provided. In the vicinity of the resin supply unit B, a display unit J and an operation unit M are provided. Thus, by arranging each process so as to surround the movement range of the articulated robot, the movement distance is shortened, and efficient workpiece transfer can be realized between the processes. The configuration of each part will be specifically described below.

  In FIG. 1, a work W in which a semiconductor chip is held on a carrier is used. The workpiece W is used for a resin sealing method called E-WLP (Embedded Wafer Level Package) or eWLB (Embedded Wafer Level BGA). Specifically, for example, a peripheral plate such as a wafer transfer jig is shared, so that it is the same size as a semiconductor wafer, and is peeled off on a round metal plate (SUS, etc.) having a diameter of 12 inches (about 30 cm). A pressure-sensitive adhesive sheet (adhesive tape) is attached, and a plurality of semiconductor chips are adhered to the pressure-sensitive adhesive sheet in a matrix. An information code (QR code, bar code, etc.) associated with information on the product is assigned to the edge of each workpiece W. The carrier plate K may be rectangular. In this case, when the semiconductor chips are arranged in a matrix of a plurality of rows, an area where the semiconductor chips cannot be arranged can be reduced, which is preferable in terms of molding efficiency.

  The workpiece W is not a workpiece W for E-WLP (eWLB) in which a semiconductor chip is held on the carrier plate K, but a wafer level package (WLP) in which a wafer mounted on a rewiring layer is resin-molded. The workpiece W may be used. In this case, when possible, an information code may be given to the wafer itself, or an information code may be given individually to each slit (storage position) of the magazine. Furthermore, the workpiece W may be a resin substrate or a lead frame on which a semiconductor chip is mounted.

(Display unit L and operation unit M)
As shown in FIG. 1, the display part L and the operation part M are integrally arranged. While checking the information displayed on the display unit L, the operator can operate the operation unit M as necessary to control the operation of each unit (for example, the articulated robot 2) in the apparatus. It is also possible to input or change various information described later. In addition, it is good also as a structure which provides a display part and an operation part in the position distant from the apparatus by using a communication line, and performs remote operation.

(Work transfer mechanism H)
In FIG. 2A, the workpiece transfer mechanism H includes a multi-joint robot 2 that holds a workpiece W on the robot hand 1 and transfers and moves between the steps. The articulated robot 2 is configured by a combination of a vertical articulated robot that can move up and down by a foldable vertical link 2a and a horizontal articulated robot that can rotate and move the horizontal link 2b in a horizontal plane. A robot hand 1 is provided at the tip of the horizontal link 2b. The two horizontal links 2b and the robot hand 1 are rotatably supported around vertical axes 2c, 2d and 2e, respectively. Each link is subjected to feedback control by detecting the amount of rotation by an encoder provided in a servo motor (not shown). As described above, by adopting the configuration including the articulated robot 2, the robot hand 1 is moved to an arbitrary position in the vertical direction by the vertical link 2a, and the robot is moved to an arbitrary position in the horizontal direction by the horizontal link 2b. The operation of moving the hand 1 can be performed in parallel. For this reason, the workpiece | work W can be conveyed linearly between each process part arrange | positioned surrounding the movement range of the articulated robot 2, and the time required to convey to each process part can be minimized. it can. As a result, as will be described later, the workpiece W and the liquid resin can be rapidly conveyed to the next process in which the workpiece W and the liquid resin are carried into the press part C and resin-molded, thereby contributing to an improvement in molding quality.

  Further, as shown in FIG. 2B, the robot hand 1 can hold the vicinity of the outer periphery of the workpiece W by avoiding the center of the workpiece W by dividing the tip into a bifurcated shape. As shown in the figure, the robot hand 1 is formed with suction holes 1a capable of sucking the outer periphery of the workpiece W at three positions on the tip and base sides, and a suction path 1b communicating therewith. The robot hand 1 is configured to place a carrier plate K and suck and hold the back surface thereof. The robot hand 1 may be of a type that mechanically chucks the workpiece W so as to be sandwiched between claws in addition to holding the workpiece W by suction. The robot hand 1 may be configured to be able to invert the workpiece W by rotating around the horizontal axis in addition to rotating around the vertical axis 2e.

  In FIG. 1, the base portion 3 of the articulated robot 2 is provided so as to reciprocate along the linear motion guide rail 4. For example, a ball screw is connected to a nut provided in the base portion 3, and the articulated robot 2 reciprocates along the linear guide rail 4 by being driven forward and reverse by a servo motor (not shown). It has become.

  In FIG. 3, the articulated robot 2 uses a teaching hand 5 equipped with a laser displacement meter 6 and an imaging device (camera) 7 instead of the robot hand 1 at the time of assembling the teaching jig provided at the workpiece transfer position in each process. 8 is assembled by positioning in the XYZ direction. For example, the teaching jig 8 is formed in a rectangular plate shape having a predetermined size. Specifically, the approximate position of the teaching hand 5 is determined while displaying the image captured by the imaging device 7 on the display unit L. Next, the laser displacement meter 6 irradiates the teaching jig 8 with laser light and moves the vertical link 2a up and down as shown in FIG. As shown in FIG. 3B, the horizontal link 2b is rotated to move the teaching hand 5 in the left-right direction to detect the edge, thereby adjusting the position in the XY direction.

  Specifically, first, the teaching jig 8 is set so that the center of the workpiece delivery position (the position of the robot hand 1 indicated by a broken line in each part in FIG. 1) and the center of the teaching jig 8 are aligned. Next, the operation unit M is operated while displaying the state captured by the imaging device 7 on the display unit L, and the multi-joint robot 2 is operated so that the teaching hand 5 is positioned in front of the teaching jig 8, thereby performing rough positioning. I do. At this time, the distance between the teaching hand 5 and the teaching jig 8 is measured by the laser displacement meter 6. Based on this distance and the width of the teaching jig 8 in the depth direction, the position (depth direction) with respect to the teaching hand 5 at the center of the workpiece transfer position is measured.

  Subsequently, the position of the edge on both sides of the teaching jig 8 is detected as the edge of the output value of the laser displacement meter 6 by moving the teaching hand 5 in the left-right direction with respect to the teaching jig 8. As the center of the positions of these edge portions, the position (left-right direction) with respect to the teaching hand 5 at the center of the workpiece transfer position is measured. Next, the position of the edge on the upper side of the teaching jig 8 is detected by moving the teaching hand 5 in the vertical direction with respect to the teaching jig 8. Based on the position of the edge and the thickness of the teaching jig 8, the height of the surface on which the workpiece is placed at the workpiece delivery position is measured. As described above, by acquiring the distance (position) information with respect to the teaching hand 5 in the three directions of the front-rear direction, the left-right direction, and the up-down direction, the coordinates of the delivery position of each part on the coordinates of the work transport mechanism H are measured.

  As described above, by using the teaching hand 5 and the teaching jig 8, accurate coordinates in the X, Y, and Z directions of the workpiece delivery position in each process are acquired and stored in the storage unit 47, and the control unit G is based on this. The operation of the articulated robot 2 is controlled. The teaching jig 8 may have a shape other than the rectangular plate as long as the relative positional relationship in the XYZ directions is known. In addition, when there are a plurality of delivery positions in one apparatus, such as the heat curing unit E and the cooling unit N, which will be described later, the coordinates are obtained for some delivery positions, and all delivery positions are calculated based on the coordinates. Alternatively, the coordinates may be acquired for all and the delivery position may be calculated.

  As a result, when the articulated robot 2 is assembled, the articulated robot 2 (work W) that is carried in and out of each device provided around the apparatus can be positioned with high accuracy using a simple configuration. It is not necessary to require high accuracy in the assembly of the apparatus itself, the assembly work can be simplified, the cost required for starting up the apparatus can be greatly reduced, and the overall cost can be greatly reduced.

  Instead of the articulated robot 2, a configuration using a horizontal articulated robot, a vertical articulated robot, another type of robot, a robot appropriately combined with an actuator, or the like may be employed. It is also possible to provide a plurality of articulated robots according to the number of press parts C. In this case, for example, the conveyance range is divided so that the workpiece supply unit A to the press unit C are transported by a single articulated robot, and the press unit C to the workpiece storage unit F are transported by a single articulated robot. Can do. Thereby, more workpiece | work W can be shape | molded in parallel and productivity can further be improved.

(Work supply part A, work storage part F and information reading part I)
In FIG. 1, a workpiece supply unit A and a workpiece storage unit F are provided on the front side of the linear motion guide rail 4 on which the articulated robot 2 reciprocates. Specifically, a supply magazine 9 storing workpieces W (molded products) and a storage magazine 10 capable of storing workpieces W (molded products) are provided in two rows. Since the supply magazine 9 and the storage magazine 10 have the same structure, the structure of the supply magazine 9 will be described below as a representative. Further, the supply magazines 9 provided in two rows may be either for storing the same type of workpieces W or for storing different types of workpieces W. The same applies to the storage magazine 10. In addition, the supply magazine 9 and the storage magazine 10 may be provided in one row, or each may be provided in three or more rows.

  Hereinafter, the configuration of the workpiece supply unit A will be described with reference to FIG. The transfer area 11 in which the articulated robot 2 moves and the workpiece supply unit A (work storage unit F) are blocked by a partition wall 12. This is because the workpiece W is stored in an environment that is not affected by dust or heat. The supply magazine 9 is supported by a known elevator mechanism 13 so as to be movable up and down. The elevator mechanism 13 is moved up and down along the lifting guide 14 by transport means (endless transport belt, transport chain, etc.) rotated by a drive source. On the elevator mechanism 13, supply magazines 9 are stacked in two stages. Slits (concave grooves) are formed on both side walls of each supply magazine 9 so that the carrier plate K of the workpiece W is inserted into and supported by the slits. In the partition wall 12, an outlet 12 a is opened near the raised position of the elevator mechanism 13. The take-out port 12a is closed by a shutter 15 that can be opened and closed. The shutter 15 is provided so as to be opened and closed by a driving source such as a cylinder or a solenoid.

Next, an example of the operation of taking out the workpiece W from the workpiece supply unit A will be described with reference to FIGS.
In FIG. 5 (A), the elevator mechanism 13 is assumed to be in the raised position of the lifting guide 14. At this time, the supply magazine 9 is in a position where the lowermost work W faces the take-out port 12a. The articulated robot 2 is activated and the robot hand 1 is moved to a position facing the shutter 15 across the partition wall 12.

  Next, as shown in FIG. 5 (B), the control unit G controls the drive source to open the shutter 15, and removes the robot hand 1 from the outlet 12a into the supply magazine 9 to the lowermost workpiece W. Enter below. Then, the robot hand 1 is slightly lifted so as to come into contact with the work W, and is sucked and held, and is directly taken out from the supply magazine 9 along the concave groove through the take-out port 12a (outside the partition wall 12). Carry out.

Thereafter, the shutter 15 is closed as shown in FIG. 5C, and the articulated robot 2 conveys the workpiece W to the information reading unit I shown in FIG. Moreover, the elevator mechanism 13 descends by a predetermined amount to a position facing the take-out port 12a and stands by in preparation for taking out the next workpiece W. Subsequent removal of the workpiece W is repeated in the same manner.
In the workpiece storage unit F, the robot hand 1 holding the molded workpiece W by suction enters the storage magazine 10 from the transfer area 11 along the concave groove and releases the workpiece W from the suction. Except for the transfer, the same operation as that of the workpiece supply unit A is performed.

  In FIG. 1, the information reading unit I is provided with a code information reading device 16 and an aligner 16a, and the information code of the work W is rotated by rotating the aligner 16a that has received the work W conveyed from the supply magazine 9. Is moved directly below the code information reading device 16. At this time, the workpiece W is unified in a certain direction. The code information reading device 16 reads an information code (QR code, bar code, etc.) relating to a product given to the workpiece W. Corresponding to this information code, the storage unit 47 stores resin supply information (resin type, resin supply amount, supply time, etc.), mold conditions (press number, press temperature, press time, molding thickness, etc.), cure information ( Molding conditions such as cure temperature, cure time, and cooling information (cooling time) are stored. Based on the molding condition information corresponding to the information code read by the code information reading device 16, processing of each process described later is performed on the workpiece W being conveyed. The multi-joint robot 2 sequentially conveys the workpiece W for which the molding conditions have been read to the subsequent processing steps from the resin supply unit B to the workpiece storage unit F.

(Configuration of resin supply part B)
In FIG. 1, a resin supply unit B is provided adjacent to the workpiece supply unit A. The resin supply unit B is provided with two systems of dispense units 18 on both sides of a revolver type syringe supply unit 17 that holds a plurality of syringes rotatably. In addition, the resin supply part B can adjust internal temperature and humidity for resin cooling and dehumidification. Moreover, the door is provided in the apparatus side surface, and the operator can replace | exchange a syringe.

  In FIG. 6, the syringe holder 17 has a holder 17b rotatably supported on a holder body 17a. The syringe 19 stores a predetermined amount of thermosetting resin such as silicone resin or epoxy resin, and is held in the recesses 17d provided at six locations in the circumferential direction on the flange portion 17c provided on the upper portion of the rotary holder 17b. . In addition, a resin receiving portion 17e is provided below the rotary holder 17b for receiving liquid resin that leaks out from the tube nozzle 19a provided at the tip of the syringe 19. A motor 20 is assembled to the upper portion of the holding portion main body 17a, and the motor shaft 20a of the motor 20 is connected to the flange portion 17c. When the motor 20 is started, the rotation holder 17b is provided to rotate in a predetermined direction. A pinch valve 19b is provided at a height at which the tube nozzle 19a is positioned at the lower end of the rotary holder 17b. The tube nozzle 19a of each syringe 19 is pressed and closed to prevent dripping.

  Next, one dispensing unit 18 will be described with reference to FIG. Since the other dispensing unit 18 has the same configuration in an arrangement that is reversed to the opposite side with the syringe supply unit 17 interposed therebetween, the description thereof is omitted. In the dispensing unit 18, a piston holding portion 18 b is held in a unit main body 18 a that can move toward and away from the syringe holding portion 17 so that the piston holding portion 18 b can move up and down. A piston 18c is provided on the upper portion of the piston holding portion 18b so as to move up and down. The piston holding part 18b is provided with a chuck 18d that receives and holds the syringe 19 below the piston 18c. A guide portion 18e that holds the posture of the syringe 19 and the tube nozzle 19a is provided below the chuck 18d. When a drive source (not shown) (motor, cylinder, etc.) is activated, the unit body 18a approaches the syringe holder 17 from the standby position retracted from the liquid material discharge position and holds the syringe 19 on the chuck 18d. The unit main body 18a moves to the liquid material discharge position J while holding the syringe 19 to open the pinch valve 19b, and the piston 18c is moved downward by a driving source such as a cylinder or a motor (not shown) to press fit into the syringe 19. Then, the liquid resin is discharged from the tube nozzle 19a and supplied to the workpiece W. When a predetermined amount of liquid resin is supplied onto the workpiece W, the operation of the piston 18c is stopped, and the tube nozzle 19a is closed by the pinch valve 19b to prevent fluctuations in the amount of supplied resin and contamination in the apparatus due to dripping. ing.

  A throw-away cup 20 is rotatably provided in the vicinity of the unit main body 18a. When the liquid resin is discharged from the syringe 19, the throw-away cup 21 is provided to discharge the liquid resin having a relatively deteriorated quality at the distal end side of the tube nozzle 19 a. The discard cup 21 rotates and moves to the liquid material discharge position J before the liquid resin is discharged onto the workpiece W, and unnecessary resin is discarded.

  Further, at the liquid material discharge position J, there is provided a work placement unit 22 on which the work W received from the robot hand 1 is placed. By making the robot hand 1 enter the resin supply part B to a position where the support protrusion 22a is sandwiched (see FIGS. 1 and 6), the work plate W is held by the robot hand 1 and the carrier plate K is placed on the support protrusion 22a. It is conveyed to. The workpiece W adsorbed and held by the robot hand 1 is released and placed on the workpiece placement unit 22, and the carrier W is supported by the support protrusion 22 a on the workpiece W. The workpiece placement unit 22 is provided with a weighing scale 23, and the weight of the workpiece W and the weight of the liquid resin discharged to the workpiece W are measured. The discharge amount of the liquid resin is stored as a molding condition according to the product, and is discharged with a predetermined accuracy (for example, about ± 0.3 g) with respect to the target value. In this case, supply information (resin supply unit number, syringe number, resin supply amount, supply end time to supply end time, etc.) of the resin actually supplied with resin is stored as operation information corresponding to the workpiece W.

  Further, the resin supply unit B automatically replaces the syringe 19 by monitoring the remaining amount of the liquid resin in the syringe 19 set in the dispense unit 18 according to the vertical position of the piston 18c. When it is determined that replacement is required, the used syringe 19 is returned to the syringe holding unit 17 and the pre-use syringe 19 filled with resin is automatically received. In this case, for example, when all of the syringes 19 held in the syringe holding unit 17 are used, the display unit J displays on the display unit J so as to replace the syringe 19 held in the syringe holding unit 17. Give instructions. As a result, the syringe 19 can be replaced while the resin supply from the syringe 19 loaded in the dispensing unit 18 is continued, so there is no need to stop the apparatus for replacing the syringe 19 and the throughput of the apparatus is improved. Can contribute.

  The workpiece W from which the liquid resin has been discharged is sucked and held by the robot hand 1 from the workpiece placement unit 22 and conveyed to the press unit C. In this case, for example, when the time required to move from the resin supply unit B to the press unit C becomes long, the supplied liquid resin seal absorbs moisture or is heated before being carried into the press unit C. Such problems may occur. However, since the work W can be moved in a short time using the multi-joint robot 2, it can be performed in a short time compared to a structure that operates on a predetermined transport path that can be moved by, for example, an air cylinder. It can move in a uniform time.

  By adopting a configuration in which the syringe supply unit 17 can be used together with the two dispensing units 18 configured as described above and the syringe 19 can be automatically replaced, the resin can be supplied without interruption, and the compactness can be achieved. With the configuration, it is possible to follow a continuous resin mold operation in the plurality of press portions C, and it is possible to contribute to an improvement in production efficiency.

  In addition, although the said embodiment demonstrated the apparatus structure which supplies liquid resin, according to the form of a workpiece | work, the supply apparatus of other resin (Tablet resin, powder-granular resin, or paste-form resin, sheet-form resin, etc.). Can be selected as appropriate. Further, in the case of powder / granular resin or the like, a configuration may be adopted in which the robot hand 1 is provided with a resin transporting configuration and the resin is not directly supplied onto the workpiece W in the resin supply unit B. In this case, since the robot hand 1 carries the workpiece W and the resin into the press portion C, and heat-melts the workpiece W and the resin in the press portion C, and then touches the workpiece W and performs resin molding, it contributes to improvement of molding quality. it can.

(Press part C)
Next, the configuration of the press part C will be described with reference to FIGS.
As shown in FIG. 1, in the present embodiment, a plurality of press portions C are provided at the back of the linear motion guide rail 4. As an example, two press sections C are provided, but there may be one or three or more. Moreover, the press part C may be provided with either a mold die for resin-molding the same product or a mold die for resin-molding different products. A partition wall 24 is provided on the side of the pressing unit C facing the conveyance area 11, and an opening 24 a is provided in the partition wall 24. The opening 24 is normally closed by a shutter 25 that can be opened and closed. The shutter 25 is provided so as to be opened and closed by a driving source such as a cylinder or a solenoid.

  In FIG. 7A, the press part C includes a known press device 26 to which a mold die for clamping a workpiece W and resin molding is mounted. In the press device 26, an upper mold (for example, a fixed mold) 28 is assembled to an upper mold platen 27, and a lower mold (for example, a movable mold) 30 is assembled to a lower mold platen 29. The workpiece W carried into the lower mold 30 is compressed by being clamped with the upper mold 28. The upper mold platen 27 and the lower mold platen 29 are inserted with tie bars 31 at four corners to guide the opening / closing operation of the mold.

  Further, a loader 32 capable of reciprocating from the press device 26 to the transport area 11 is provided in the press section C. In addition, a work placement unit 33 is provided in the transport area 11 on the near side where the opening 24 a is covered by the shutter 25. A workpiece W coated with a liquid resin adsorbed and held by the robot hand 1 is delivered to the workpiece placement unit 33, or the workpiece W taken out by the loader 32 from the press device 26 is delivered.

  In addition, a rail 34 is laid in the opening 24 a of the partition wall 24 in a region extending from the inside of the press device 26 to the transfer area 11 including above the workpiece placement unit 33. The loader 32 reciprocates between the transfer area 11 and the press device 26 along the rail 34. The races 34 are provided on both sides of the opening 24 a and do not interfere with the opening / closing operation of the shutter 25. The loader 32 stands by above the workpiece placement unit 33, receives the workpiece W from the robot hand 1, loads the workpiece W into the lower mold 30, and takes out the molded workpiece W from the lower mold 30 to the workpiece placement unit 33.

  In FIG. 7A, the upper mold platen 27 to which the upper mold 28 having the cavity is assembled is provided with a film supply device 35 as indicated by a broken line. The film supply device 35 is a device that feeds and winds a long release film 36 (see FIG. 8A) covering the clamp surface of the upper die 28 between reels. The release film is adsorbed and held on the upper mold surface by a known suction mechanism. The release film 36 has heat resistance that can withstand the heating temperature of the mold, and is easily peeled off from the mold surface, and is a film material having flexibility and extensibility, such as PTFE and ETFE. PET, FEP, fluorine-impregnated glass cloth, polypropylene, polyvinyl chloride, etc. are preferably used.

  The carrying-in / out operation | movement to the press part C and the press operation of the workpiece | work W are demonstrated. In FIG. 7A, the upper die 28 and the lower die 30 of the press device 26 are in the open state, and the shutter 25 of the partition wall 24 is in the state of closing the opening 24a. The workpiece W sucked and held by the robot hand 1 is placed on the workpiece placing portion 33, the suction is released, and the workpiece W is delivered. When the robot hand 1 is retracted, as shown in FIG. 7B, the loader 32 grasps the work W from the work placing portion 33 by the hand and enters the press device 26 from the opening 24a with the shutter 25 opened. Set the workpiece W on the lower mold 30.

  A state where the workpiece W is set on the lower mold 30 is shown in FIG. When the loader 32 on which the workpiece W is set returns from the pressing device 26 to the transfer area 11 through the opening 24a, the shutter 25 is closed, and the pressing device 26 clamps the workpiece W to perform compression molding. As shown in FIG. 8B, the lower mold 30 is raised and the workpiece W is clamped between the upper mold 28 and the lower mold 30. A release film 36 is held by suction on the clamping surface including the cavity 28a of the upper die 28.

  When the compression molding is completed, the press device 26 is opened as shown in FIG. 8C, and the workpiece W is released from the upper die 28 to which the release film 36 is adsorbed and placed on the lower die 30. It is in a state that remains. When the shutter 25 is opened, the loader 32 enters the pressing device 26 from the transfer area 11 and grabs the workpiece W placed on the lower mold 30 and takes it out to the transfer area 11 and delivers it to the workpiece placement unit 33 ( (See FIG. 7A).

Here, another example of the press device 26 will be described with reference to FIGS. 9 and 10.
The same members as those of the press device 26 described above are denoted by the same reference numerals and the description thereof is incorporated. For example, when an adhesive tape is attached to the carrier plate K as the work W as in the E-WLP molding, and the semiconductor chip is adhered to the adhesive tape, a molded product in which the semiconductor chip is sealed with a resin by heating. Is removed from the carrier plate K after resin molding. In such molding using the workpiece W, the adhesive force of the adhesive tape starts to decrease due to heating from when it is directly carried into the lower mold 30 of the press device 26, and the semiconductor chip is transferred to the carrier plate by the resin flowing on the carrier plate K. There is a possibility of moving toward the outside of K (so-called flying die).

  9A, a float pin 37 may be provided on the lower mold 30 so that the workpiece W does not directly touch the lower mold surface. The float pin 37 is always urged by a coil spring 38 or the like built in from the lower die 30 so that the tip of the pin protrudes toward the upper die surface. The coil spring 38 preferably has a spring coefficient such that the float pin 37 is not completely retracted into the lower mold 30 (a clearance is generated between the work W and the lower mold surface) in a state where the workpiece W is placed. . When the workpiece W is floatingly supported from the lower die surface by the float pin 37, the advantage of preventing the interference between the hand of the loader 32 (see FIG. 7A) and the lower die 30 and making it easier to grip the workpiece W. There is.

  FIG. 9A shows a state in which the workpiece W is carried into the press device 26 that has been opened. The work W is supported in a floating manner in a state of being separated from the lower mold surface while the float pin 37 is pushed down. Thereby, the heating of an adhesive tape can be delayed.

  FIG. 9B shows a state where the press device 26 is closed. The workpiece W is clamped by the upper die 28 and the lower die 30, and the float pin 37 is in a state of being retracted into the lower die 30 by compressing the coil spring 38.

  When the compression molding is completed, the press device 26 is opened. As shown in FIG. 9C, when the lower mold 30 moves downward, the workpiece W is released from the upper mold 28 whose mold surface is covered with the release film 36, and the float pin 37 of the lower mold 30 is a coil spring. Since it protrudes by the elastic force of 38, it is supported floating by the lower mold 30. In this state, the work W is carried out to the work placing unit 33 by the loader 32 described above waiting in the transfer area 11. Further, the control unit G stores, for example, actual molding conditions such as the number of the molded press unit C, a mold temperature curve, a clamp pressure curve, a molding thickness, and a film usage amount in the storage unit 47 as operation information.

Next, another example of the press device 26 will be described with reference to FIG.
8 and 9, the workpiece W is loaded into the lower mold 30, but the workpiece W may be loaded into the upper mold 28. For example, the robot hand 1 may be configured to hold the workpiece W coated with a liquid resin by the chuck hand, turn it over, and supply it to the upper die 28. In this case, it is preferable to use an epoxy resin or the like that has a high degree of thixotropy and has a viscosity that does not drop the resin even if it is inverted before the resin mold.

  The upper die 28 in the present embodiment has a claw portion 28b that can be opened and closed at the edge of the carrier plate K and can support it, and is configured to be able to hold the workpiece W. FIG. 10A shows a state in which the workpiece W is loaded into the press device 26 that has been opened. The workpiece W is suspended and held (floating supported) on the upper die 28 by the claw portion 28b in a state where the carrier plate K is separated from the clamp surface of the upper die 28. In this case, heating to the liquid resin is suppressed by holding the carrier plate K away from the clamping surface of the upper mold 28 until clamping. Thereby, the situation where the viscosity of liquid resin falls temporarily by heating and liquid resin falls to the lower mold | type 30 can be avoided effectively. Moreover, the heating of the adhesive sheet used for E-WLP can also be delayed, which is also effective for preventing flying dies.

FIG. 10B shows a state where the press device 26 is closed. The workpiece W is clamped by the upper die 28 and the lower die 30 and compression-molded. When the compression molding is completed, the press device 26 is opened. As shown in FIG. 10C, when the lower mold 30 moves downward, the workpiece W is released from the lower mold 30 whose mold surface is covered with the release film 36, and remains held by the upper mold 28 by suction. Become. In this state, the robot hand 1 of the articulated robot 2 waiting in the transfer area 11 is reversed and entered into the press device 26, and the suction to the upper die 28 surface is released while holding the workpiece W. It can be transferred to the robot hand 1 and carried out.
In this case, the workpiece loading / unloading device 32 provided in the press section C is omitted, and the workpiece W is sucked and held by the upper die 28 by directly entering the pressing device 26 with the robot hand 1 turned upside down. Thus, the molded workpiece W can be received from the upper mold 28 and taken out from the press device 26.

(Work Inspection D)
Next, the configuration of the workpiece inspection unit D will be described with reference to FIG. In FIG. 11, a linear motion rail 39 a is provided on the base portion 39. A movable stage 40 is provided on the linear motion rail 39a so as to be capable of reciprocating in the rail longitudinal direction. The movable stage 40 has, for example, a known drive mechanism and a nut portion connected to a ball screw, and reciprocates on the linear motion rail 39a by driving the ball screw forward and reversely by a motor.

The movable stage 40 stands by at a workpiece receiving position that is one end side of the linear motion rail 39. The workpiece W compression-molded by the press part C is placed on the movable stage 40 by the robot hand 1, the suction is released, and the workpiece W is delivered. A laser displacement meter 41 is provided as a pair of upper and lower workpieces W on the workpiece transfer mechanism H side of the movable stage 40 at the delivery position. Before the workpiece W is placed on the movable stage 40 by the robot hand 1, The thickness of the workpiece W is measured by irradiating laser light with the laser displacement meter 41. The control unit G stores the measured thickness in the storage unit 47 as operation information. In this case, the thickness of the molded product can be calculated by subtracting the thickness of the carrier plate K from the thickness of the workpiece W. The movable stage 40 moves from one end side of the linear motion rail 39 to the other end side. An appearance inspection unit 42 is provided above the other end of the linear motion rail 39. In the appearance inspection unit 42, the molded product is imaged in a lump or divided, and it is inspected by appearance observation whether there is a molding defect such as unfilled, flow mark or flying die. When there are good and bad molding, the type of defect and the captured image are stored in the storage unit 47 as operation information. When the inspection is completed, the movable stage 40 on which the workpiece W is placed returns to the delivery position, is delivered to the robot hand 1, and is conveyed to the heat curing unit E.
In addition, when an abnormality (such as unfilling exceeding the expected value) is detected, the fact is notified to the display unit J, and the operation of the entire apparatus is stopped and maintenance is performed, thereby preventing defective products from being continuously produced. it can.

(Heat curing part E)
Next, the structure of the heat-hardening part E is demonstrated with reference to FIG. 12 (A) (B). A curing furnace 43 is provided in the heat curing unit E, and the inspected work W is stored in the curing furnace 43 by the robot hand 1 and the mold resin is heated and cured (post-cured) at about 120 ° C. to 150 ° C. To complete the heat curing. 12A, in the curing furnace 43, opposed slits 43a are formed at a predetermined pitch in the height direction, and the workpiece W is held at this pitch. When the work W is stored in the curing furnace 43, the work W is inserted and held along the slit 43a formed in any one of them.

  In FIG. 1, an inner door 44 is provided on the side surrounding the transfer area 11 of the curing furnace 43, and an outer door 45 is provided on the outer surface side of the apparatus so as to be opened and closed. As shown in FIG. 12A, the inner door 44 is provided with an opening 44a corresponding to the position of the slit 43a for two steps. An opening / closing door 46 is provided inside the inner door 44 so as to be individually openable and closable so as to always block each opening 44a. Also, as shown in FIG. 1 and FIG. 1, by providing two rows of 12-stage slits 43a in plan view, a total of 24 workpieces W can be post-cured in parallel.

  In this case, when the time from the resin molding at the press part C to the start of the post cure becomes long, the resin mold part may be warped. However, since the multi-joint robot 2 is used to smoothly move the workpiece W in the height direction, it can be moved in a short time with respect to the desired slits 43a having different heights. . As described above, in the molding apparatus in which the time required for conveyance affects the molding quality, the effect of shortening the conveyance time by the articulated robot 2 is particularly great.

  In FIG. 12B, when one door 46 is opened, two workpieces W can be inserted and held in the upper and lower slits 43 a by the robot hand 1. Thus, by opening and closing the door 46 individually, the open / close area can be reduced and the workpiece W can be stored and taken out, so that the temperature in the furnace can be prevented from being lowered and heat radiation to the transfer area 11 side can be suppressed. be able to.

  The workpiece W inspected by the workpiece inspection unit D is sucked and held by the robot hand 1 and is conveyed to the curing furnace 43. As shown in FIG. 12A, the curing furnace 43 is heated to a predetermined temperature with the door 46 being closed. For example, when the workpiece W is inserted into the uppermost slit 43a, when the robot hand 1 approaches the inner door 44, the control unit G controls a driving mechanism (not shown) and the uppermost slit as shown in FIG. The open / close door 46 facing 43a opens, and the robot hand 1 enters the furnace and inserts the workpiece W along the slit 43a. The robot hand 1 is retracted from the cure furnace 43 after the suction of the robot hand 1 is released and the workpiece W is transferred to the cure furnace 43. When the robot hand 1 is separated from the inner door 44, the open / close door 46 is closed. The above operation is repeated. When a predetermined time elapses after the work W is stored in the curing furnace 43, the robot hand 1 enters the curing furnace 43 again, and the work W is sucked and held from the curing furnace 43 to be transported to the cooling unit. It has become.

(Cooling part N)
As shown in FIG. 11, the cooling unit N is provided with a cooling magazine 48 in a space above the workpiece inspection unit D. Oppositely arranged slits 48a are formed at a predetermined pitch in the height direction on both side walls in the cooling magazine 48, and the workpiece W can be held at this pitch. In this case, the work W can be delivered to the predetermined slit 48a by the articulated robot 2 that can move the robot hand 1 to an arbitrary height. The workpiece W on which the heat curing of the molded product has been completed is conveyed to the slit 48a (delivery position) of the cooling unit N while being adsorbed and held by the robot hand 1, and is released after being adsorbed. The workpiece W is naturally cooled by leaving it in this state for a predetermined time. The cooling unit can be provided separately from the workpiece inspection unit D, but the apparatus can be configured compactly by using an empty area on the workpiece inspection unit D.

(Work storage part F)
The configuration of the workpiece storage unit D is the same as the configuration of the workpiece supply unit A as described above. The robot hand 1 receives the workpiece W cooled by the cooling unit from the movable stage 40, conveys it to the adjacent storage magazine 10, and stores it.

(Control part G)
In FIG. 1, the control unit G includes a storage unit 47 such as a CPU (Central Processing Unit), ROM, and RAM, and controls the operation of each unit described above. In addition to storing various control programs, the storage unit 47 stores a workpiece transfer candidate list, transfer order information, and code information attached to the workpiece W. The CPU reads out a necessary program from the ROM to the RAM, executes it, stores the input information temporarily using the RAM, or performs arithmetic processing according to the input information, and outputs a command based on the control program. .

In the control unit G, the operation information of the workpiece supply unit A (the supply magazine slit number that has been delivered), the operation information of the code information reading device 16 (recipe information; resin conditions, mold conditions, curing conditions, cooling conditions), resin supply Information of part B (syringe number; (type of resin, resin thawing time, total storage amount), usage fee (per supply / total amount, supply start / end time), operation information of press part C (mold temperature curve, Clamping pressure curve, forming thickness, film usage), operation information of curing furnace 43 (in-furnace temperature), operation information of workpiece inspection part D (flying die, forming thickness), information of work storage part F (reception of received slits) Information such as (position) is input at any time, and necessary commands are output to each part. The control unit G stores such operation information, the above-described molding conditions, etc. in association with the workpiece W. Thereby, the actual manufacturing conditions etc. about the workpiece | work W after shaping | molding can be confirmed. For example, by reading the information code on the carrier plate K of the workpiece W after molding, the molding conditions and operation information can be confirmed, and information related to the actual molded product can be easily viewed. It can be used to optimize conditions.
The control unit G is disposed so as to surround the workpiece transfer mechanism H, but may be a device that can be remotely operated by wire or wireless, such as a controller.

  FIG. 13 is an example of a timing chart showing a transport procedure from sequentially supplying four workpieces W (1 to 4) from one supply magazine to storing them in one storage magazine. Assuming an apparatus configuration in which the dispensing units 18f and 18g and the pressing devices 26a and 26b are used, the number of the slits 43a of the curing furnace 43 is 24, and the number of the slits 48a of the cooling magazine 48 of the cooling unit N is four. ing. In this case, the processing cycle in each processing step is a time obtained by dividing the processing time required for each individual apparatus by the maximum number of simultaneous processes (the number of apparatuses and the number of slits in this embodiment). For this reason, the heat-hardening part E which requires a comparatively long processing time increases the maximum number which can process simultaneously by providing many slits 43a, and an apparatus with which processing does not stagnate there as a whole apparatus It has a configuration.

However, since the processing cycles cannot be matched, the work W carry-in timing and the carry-out timing with respect to other processing units are determined based on the work W carry-in timing and the carry-out timing with respect to the processing unit that performs the process with the longest processing cycle. Has been decided. In FIG. 13, since the processing cycle in the press devices 26a and 26b is the longest, the timing for unloading the workpiece W3 from the workpiece supply unit A is determined by back calculation. In this case, each workpiece W (1-4) is used so as not to waste time between the resin molds of the workpiece W1 and the workpiece W3 in the press device 26a, and similarly between the resin molds of the workpiece W2 and the workpiece W4 in the press device 26b. ) Supply timing is determined. Specifically, when the resin mold for the workpiece W1 of the press device 26a is completed and becomes empty, the timing is determined by calculating backward so that the next workpiece W3 can be carried into the press device 26a. FIG. 14A is a table showing the workpiece transfer order in the area surrounded by the broken-line square in FIG. At this time, when the work number 1 is conveyed from the press device 26a to the inspection, the next work number 3 is carried into the press device 26a from the dispensing unit 18f, and when the inspection of the work number 1 is finished, it is carried into the curing furnace 43.
Similarly, when the workpiece number 2 is conveyed from the pressing device 26b to the workpiece inspection unit D (laser displacement meter 41 and appearance inspection unit 42), the next workpiece number 4 is carried from the dispensing unit 18g to the pressing device 26b, and the workpiece number 2 is transferred. When the above inspection is completed, it is carried into the curing furnace 43. In this way, when a plurality of workpieces W are processed in parallel in each processing unit, the entire apparatus can be efficiently processed by minimizing the waiting time required for loading / unloading the workpiece W into / from each processing unit. It is possible.

  FIG. 14B shows an example of a processing priority table in which high-priority processing is stored in the storage unit 47. In the multi-joint robot 2, the transfer order of the workpieces W is controlled based on the priorities in the processing priority table. As shown in this figure, when the articulated robot 2 instructs the priority order of transporting the workpiece W in advance, when the start time of the process of transporting the workpiece W is near, the transport order is set according to the priority order of each process. It can be replaced as appropriate. Thereby, in consideration of the level of priority, it is possible to transport from a work W having a high priority that should be transported as soon as possible for the purpose as shown in the figure, so that the molding quality can be improved.

  FIG. 14C shows an example of a transfer order table showing an example of changing the transfer order. FIG. 14C shows an example in which the order in which the workpiece W is conveyed from the cooling unit N to the workpiece storage unit F and then conveyed from the resin supply unit B to the press unit C is changed. As described above, the processing as a whole of the apparatus can be performed by postponing processing that has a low priority and does not affect the molding quality when it is transported, such as transporting the workpiece W from the cooling unit N to the workpiece storage unit F. It is possible to contribute to the improvement of molding quality while improving the processing efficiency. It should be noted that the priority order for changing the order of conveyance may be programmed in advance or may be changed later by command input.

  As described above, by determining the transfer order of the workpiece W according to the processing cycle and transfer priority, the transfer operation of the workpiece transfer mechanism H is speeded up and made efficient in accordance with the resin mold operation in the press part C. At the same time, the workpiece supply operation and the workpiece removal operation can be followed in order to increase the apparatus operating rate of each press unit C. In addition, when it is necessary to stop a part due to trouble or maintenance, the processing cycle is changed by appropriately changing the maximum number of simultaneous processing of each processing unit, so the transport order is reset accordingly. be able to. For this reason, it is possible to produce without performing complicated processing settings even during troubles and maintenance.

  FIG. 15 is a timing chart of a workpiece transfer operation according to another example. The difference from FIG. 14 is that the workpieces W1 to W4 are alternately supplied from the two supply magazines 9a and 9b and are alternately stored in the two storage magazines 10a and 10b. In this case, a plurality of types (for example, two types) of resin are supplied to a plurality of types of workpieces W, and a plurality of types of workpieces W are selectively selected with respect to a press unit having a plurality of types of dies. And can be resin-molded. The apparatus configuration using the dispensing units 18f and 18g and the press devices 26a and 26b and having 24 slits 43a in the curing furnace 43 is the same.

  In this case, a plurality of types of syringes 19 in which different types of resins are filled in the dispensing units 18f and 18g are loaded into the syringe supply unit 17 and selectively supplied to the pair of dispensing units 18f and 18g. Thus, by allowing a plurality of types of liquid resins to be supplied in parallel for each of the dispensing units 18f and 18g, mixed production (mix production) for manufacturing a plurality of types of products using a plurality of resin materials can be performed. it can. Further, different types of dies are set in the press devices 26a and 26b, and the supply magazines 9a and 9b are selectively loaded into the press devices 26a and 26b. Thereby, resin molding using a plurality of types of molds can be performed in parallel, and mixed production (mix production) of molded products under different resin mold conditions can be performed.

  Furthermore, it is possible to manufacture by changing the molding thickness according to the resin, or to change the supply amount of the resin according to the mold, and it is possible to execute many conditions in parallel. . As described above, according to the resin molding apparatus of the present invention, the information related to the product is read in the apparatus using the information code displayed on the carrier plate K for each workpiece W, and the processing in each unit is executed based on the information. The operation setting can be changed as necessary, for example, by rearranging the processing order. For this reason, it is not necessary to individually specify the operation settings or change the settings when trouble occurs, and the waiting time is eliminated, which can contribute to the improvement of the productivity of the apparatus.

  If the above resin molding apparatus is used, a series of operations from supplying the workpiece W and resin to performing resin molding, inspecting the molded product, performing post-cure, and storing it is efficiently performed in a compact apparatus configuration and according to the product. A resin molding apparatus capable of performing resin molding according to the specifications can be provided.

In the resin molding apparatus described above, the dispensing units 18f and 18g are provided in the resin supply part B and the two pressing apparatuses 26a and 26b are provided in the pressing part C, respectively, but may be further increased. Further, the articulated robot 2 provided in the work transport mechanism H is not limited to one, and a plurality of articulated robots 2 may be provided to transport the work W while sharing the transport area.
Further, the press device 26 is not limited to the compression molding device, and may be a transfer molding device, or may be molded by forming a reduced pressure space.
Further, the workpiece supply unit A and the workpiece storage unit F may be shared by storing the workpieces W before and after molding in one magazine. In this case, in order to prevent the workpiece W before the resin mold from being heated by the workpiece W after the resin molding, it is preferable to cool and store the workpiece W after the resin molding.

A Work supply part B Resin supply part C Press part D Work inspection part E Heat curing part F Work storage part G Control part H Work transport mechanism I Information reading part N Cooling part W Work K Carrier plate 1 Robot hand 1a Suction hole 1b 28b Suction path 2 Articulated robot 2a Vertical link 2b Horizontal link 2c, 2d, 2e Vertical axis 3,39 Base part 4 Linear motion guide rail 5 Teaching hand 6 Laser displacement meter 7 Imaging device 8 Teaching jig 9, 9a, 9b Supply magazine 10 , 10a, 10b Storage magazine 11 Transport area 12, 24 Partition wall 12a Takeout port 13 Elevator mechanism 14 Lift guide 15, 25 Shutter 16 Code information reader 17 Syringe supply part 17a Holding part body 17b Rotating holder 17c Flange part 17d Recessed part 1 e Resin receiving portion 18, 18f, 18g Dispensing unit 18a Unit body 18b Piston holding portion 18c Piston 18d Chuck 18e Guide portion 19 Syringe 19a Tube nozzle 19b Pinch valve 20 Motor 20a Motor shaft 21 Discarding cup 22, 33 Work placement portion 22a Support projection 23 Weigh scale 24a Opening 26, 26a, 26b Press device 27 Upper mold platen 28 Upper mold 28a, 30a Cavity 28b Claw 29 Lower mold platen 30 Lower mold 31 Tie bar 32 Loader 34 Rail 35 Film supply device 36 Release film 37 Float pin 38 Coil spring 39a Linear motion rail 40 Movable stage 41 Laser displacement meter 42 Visual inspection section 43 Cure furnace 43a, 48a Slit 44 Inner door 45 Outer door 6 door 47 storage unit 48 cooling Magazine

Claims (11)

A robot that can be rotated and linearly moved while holding a work in a robot hand and transporting between each process, and a base part of the robot is provided with a work transport mechanism that is reciprocally movable along a linear motion guide rail ,
A workpiece supply unit for supplying the workpiece;
A resin supply unit for supplying a resin for resin molding the work taken out from the work supply unit;
A plurality of press sections provided along the extending direction of the linear motion guide rail, the resin supplied from the resin supply unit and the press supplied with the work supplied from the work supply unit and resin molded,
A work storage part for storing a resin molded work in the press part;
A control unit for controlling the operation of each part of the device,
The workpiece supply unit, the resin supply unit, the press unit, and the workpiece storage unit are disposed so as to surround a moving range of a robot provided in the workpiece transfer mechanism, and each of the press units extends from a press device to a transfer area. A reciprocating loader is provided, and the loader receives the work attracted and held by the robot hand, or places the work taken out by the loader from the press device to the robot hand. A resin mold apparatus provided with a portion .   2. The resin molding apparatus according to claim 1, wherein the robot is an articulated robot in which movement in the vertical direction by a vertical link and horizontal movement by a horizontal link are performed in parallel.   The work inspection unit for inspecting the thickness and appearance of the molded product taken out from the press unit to determine whether the product is acceptable or not is disposed so as to surround a movement range of a robot provided in the workpiece conveyance mechanism. Item 3. A resin molding apparatus according to Item 1.   The heat curing unit for storing the workpiece after resin molding in a curing furnace and heating and curing the resin is disposed so as to surround a movement range of a robot provided in the workpiece conveyance mechanism. Resin mold equipment.   The resin molding apparatus according to claim 1, wherein a cooling unit that cools the workpiece after resin molding is disposed so as to surround a movement range of a robot provided in the workpiece conveyance mechanism.   2. The resin molding apparatus according to claim 1, wherein the work transport mechanism reads product information including molding conditions by an information reading unit and transports the product information to a subsequent process before the work is carried into the press unit.   The control unit controls the timing of the workpiece supply operation and workpiece removal operation by the robot in accordance with the minimum operation cycle of the processing process that takes the longest time, and controls the workpiece transfer operation in consideration of the high priority process order. The resin mold apparatus of any one of Claims 1 thru | or 6 characterized by these.   The control unit performs positioning in the X, Y, and Z directions with respect to the teaching jig provided for each process using a teaching hand equipped with a laser displacement meter and an imaging device instead of the robot hand of the robot, and the XY The resin molding apparatus according to claim 1, wherein the operation of the robot is controlled based on positioning in the −Z direction.   The control unit continuously controls each press unit by controlling the conveying operation by the robot hand so that the workpiece unloading operation after forming and the next workpiece loading operation are continuous with respect to each workpiece placing unit for a plurality of press units. The resin mold apparatus according to claim 1, wherein the resin mold is performed.   The dispenser is provided with a plurality of dispense units for supplying a liquid resin, and each of the dispense units is supplied with a measured amount of the discharged liquid resin discharged to the workpiece in each dispense unit. The resin mold apparatus of any one of Claim 1 thru | or 9.   11. The workpiece carried into the press section is floatingly supported apart from the lower die surface, or is held suspended from the upper die surface. The resin mold apparatus of 1 item | term.

Images