JP5655237B2 - Liquid resin supply device and resin molding device - Google Patents

Description

  The present invention relates to a liquid resin supply device that supplies a liquid resin to a work in which a semiconductor chip is held on a carrier, and a resin mold device including the liquid resin supply device.

When a workpiece is supplied to a plurality of press sections and resin molded, each press section is provided with a workpiece and resin (tablet resin, liquid resin, powder / granular resin, paste resin, etc.) in the press section by a loader. It is resin-molded by carrying in a mold and clamping it. At this time, in order to efficiently perform resin molding in multiple press sections, in addition to making the loader and decompression device shared in each press section, the molding cycle is adjusted to the resin mold operation of the slowest press section. (See Patent Document 1).
There has also been proposed an apparatus that automatically attaches a syringe to a dispenser that supplies a liquid resin regardless of the amount of liquid resin contained. Specifically, the syringe is automatically attached to the dispenser by retreating the rod while the rod is screwed into the screw hole provided in the central portion of the plunger and locking the syringe by the lock mechanism ( Patent Document 2).

JP 2010-83027 A JP 2009-285858 A

For example, when supplying a liquid resin together with a workpiece to a plurality of press sections, if a liquid resin is supplied to the workpiece with a single liquid resin supply device (dispenser), the discharge time of the liquid resin requiring temperature control becomes longer. There is a risk that production efficiency will fall.
In addition, even if the syringe is automatically mounted on the dispenser, it is necessary to align the screw hole and rod of the plunger of the syringe with the syringe transport mechanism and install them individually by screw fitting. The area is also required, and it takes time from the replacement of the syringe to the supply of the liquid resin.
Furthermore, there is a need to realize mixed production by efficiently supplying liquid resin to products having different types and supply amounts of liquid resin.

  The present invention solves the above-mentioned problems of the prior art, and a liquid resin supply device capable of quickly and efficiently replacing a syringe filled with a liquid resin with a compact device configuration and supplying a liquid resin to a workpiece with specifications according to the product, and It is providing the resin mold apparatus using this.

In order to achieve the above object, the present invention comprises the following arrangement.
A liquid resin supply device for supplying a liquid resin to a workpiece in which a semiconductor chip is held on a carrier, and holding a plurality of replacement syringes in a dispensing unit that discharges and supplies the liquid resin filled in the syringe to the workpiece The dispenser unit is rotatably provided, and the dispensing unit receives a replacement syringe from the syringe supply unit and discharges and supplies a predetermined amount of liquid resin to the work held at the liquid material discharge position. .
According to the above configuration, since the syringe supply unit holding the replacement syringe rotates, the syringe can be accessed at both the syringe replacement position with respect to the dispensing unit and the syringe replacement position of the syringe supply unit by the operator. In addition to simplifying and compactly installing the apparatus, the rotation of the syringe supply unit can be performed at a fixed position without changing the syringe replacement position, thereby facilitating replacement work.

The syringe supply unit is rotatably provided between a pair of dispense units, and each dispense unit shares the syringe supply unit to receive a replacement syringe and apply a liquid resin to the work held at the liquid material discharge position. A predetermined amount is discharged and supplied.
According to the above configuration, a pair of dispensing units share a common syringe supply unit, receive a replacement syringe, and discharge and supply a predetermined amount of liquid resin to the work held at the liquid material discharge position. The dispense operation that requires temperature control can efficiently realize the discharge operation of the liquid resin to the workpiece, can follow the continuous resin mold operation in multiple press parts, and contribute to the improvement of production efficiency. Liquid resin can be supplied to different workpieces, and versatility is improved.

Wherein the syringe supplying portion and the syringe is held every 60 ° in rotation angle, dispensing unit multiple is movable between a syringe receiving position and the liquid material supply position of the syringe feed unit, It is arrange | positioned so that the angle which connects the said syringe receiving position and the rotation center of the said syringe supply part may be set to 120 degrees.
According to this, for example, since the robot hand can supply the liquid material from the same position to the liquid material discharge position and supply the liquid material by the dispensing unit, the liquid resin supply device can be arranged in a compact manner. By holding the syringe at a rotation angle of 60 ° in the syringe supply unit, each dispensing unit can also replace the syringe held by the syringe supply unit at the same time.

The syringe supply unit and the dispense unit are each provided with a pinch valve that opens and closes a tube nozzle provided at the tip of the syringe.
Thereby, it is possible to prevent the liquid resin from leaking from the syringe held in both the syringe supply unit and the dispensing unit.
In addition, a syringe supply unit that holds a plurality of replacement syringes is provided in a dispensing unit that discharges and supplies liquid resin filled in a syringe to a workpiece as a liquid resin supply device that supplies liquid resin to a workpiece according to another example. The syringe supply unit and the dispense unit are each provided with a pinch valve for opening and closing a tube nozzle provided at the tip of the syringe, and the dispense unit receives a replacement syringe from the syringe supply unit. A predetermined amount of liquid resin may be discharged and supplied to the work held at the liquid material discharge position.

A disposal cup for discarding the liquid resin in the vicinity of the tube nozzle of the syringe held by the dispensing unit is provided so as to be movable between the liquid material supply position and the retreat position.
Thereby, the quality of the liquid resin can be maintained at a high quality by using the liquid resin in the vicinity of the tube nozzle of the syringe that is relatively poor in quality after being discarded in the cup.

Each dispense unit is characterized in that the discharge amount of the liquid resin discharged to the workpiece is measured and supplied at the liquid material supply position.
As a result, since the liquid resin can be accurately discharged from the dispensing unit requiring temperature control to the workpiece, it is possible to follow the continuous resin molding operation in a plurality of press sections, which can contribute to the improvement of production efficiency. .

In the resin molding device, Dewa chromatography click supplying portion surrounds the moving range of the articulated robot having a workpiece transport device which holds and conveys a workpiece to the robot hand, one of the liquid resin supply apparatus described above, up-less portion characterized in that及beauty word over click housing portion is disposed.

  If the liquid resin supply device is used, the liquid resin can be supplied to the workpiece with a specification corresponding to the product while quickly and efficiently replacing the syringe filled with the liquid resin with a compact device configuration. Further, in the resin molding apparatus, by efficiently supplying the liquid resin to the work carried into the plurality of press sections, it is possible to follow the continuous resin mold operation in the plurality of press sections, which contributes to the improvement of production efficiency. be able to. Moreover, mixed production can be realized by efficiently supplying liquid resin to products having different types and supply amounts of liquid resin.

It is a plane layout figure which shows the example of whole structure of the resin mold apparatus. It is a side view of the liquid resin supply apparatus at the time of workpiece | work carrying-in. It is sectional explanatory drawing which shows the opening / closing operation | movement of a pinch valve. It is a side view of the liquid resin supply apparatus before receiving a syringe from a syringe supply part. It is a side view of the liquid resin supply apparatus which shows the state which receives a syringe from a syringe supply part. It is a side view of the liquid resin supply apparatus after receiving a syringe from a syringe supply part. It is a side view of the liquid resin supply apparatus which shows the state which throws away a liquid resin. It is a side view of the liquid resin supply apparatus which shows the state which is discharging liquid resin to a workpiece | work. It is a plane explanatory view showing a layout composition of a pair of dispense units and a syringe supply part. It is sectional explanatory drawing which shows compression molding operation | movement. It is sectional explanatory drawing which shows the compression molding operation | movement which concerns on another example.

  Hereinafter, a preferred embodiment of a resin mold device according to the present invention will be described in detail with reference to the accompanying drawings. In the following embodiments, a compression molding apparatus is used as an example of a press apparatus, a lower mold is described as a movable mold, and an upper mold is described as a fixed mold.

(Overall configuration of resin molding equipment)
FIG. 1 is a plan layout view showing an embodiment of a resin molding apparatus according to the present invention. The resin molding apparatus of the present embodiment surrounds the movement range of the articulated robot provided in the workpiece conveyance mechanism H, and includes a workpiece supply unit A, a resin supply unit B, a press unit C, a workpiece inspection unit D (cooling unit), and heat curing. A processing unit that performs each processing step, such as the unit E and the workpiece storage unit F, and a control unit G that controls the operation of these processing units are arranged. In the vicinity of the press part C, an information reading part I is provided. A display unit J and an operation unit M are provided in the vicinity of the resin supply unit B. Thus, by arranging each process so as to surround the movement range of the articulated robot, the movement distance is shortened, and efficient workpiece transfer can be realized between the processes. In particular, since the heat curing portion E is incorporated in the resin mold apparatus, the molded product after the resin mold can be quickly brought into a curing furnace and heat cured. The configuration of each part will be specifically described below.

  In FIG. 1, a work W in which a semiconductor chip is held on a carrier is used. The workpiece W is used for a resin sealing method called E-WLP (Embedded Wafer Level Package) or eWLB (Embedded Wafer Level BGA). Specifically, for example, a peripheral plate such as a wafer transfer jig is shared, so that it is the same size as a semiconductor wafer, and is peeled off on a round metal plate (SUS, etc.) having a diameter of 12 inches (about 30 cm). A pressure-sensitive adhesive sheet (adhesive tape) is attached, and a plurality of semiconductor chips are adhered to the pressure-sensitive adhesive sheet in a matrix. An information code (QR code, bar code, etc.) associated with information on the product is assigned to the edge of each workpiece W. The carrier plate K may be rectangular. In this case, when the semiconductor chips are arranged in a matrix of a plurality of rows, an area where the semiconductor chips cannot be arranged can be reduced, which is preferable in terms of molding efficiency.

  The workpiece W is not a workpiece W for E-WLP (eWLB) in which a semiconductor chip is held on the carrier plate K, but a wafer level package (WLP) in which a wafer mounted on a rewiring layer is resin-molded. The workpiece W may be used. In this case, when possible, an information code may be given to the wafer itself, or an information code may be given individually to each slit (storage position) of the magazine. Furthermore, the workpiece W may be a resin substrate or a lead frame on which a semiconductor chip is mounted.

(Display unit L and operation unit M)
As shown in FIG. 1, the display part L and the operation part M are integrally arranged. While checking the information displayed on the display unit L, the operator can operate the operation unit M as necessary to control the operation of each unit (for example, the articulated robot 2) in the apparatus. It is also possible to input or change various information described later. In addition, it is good also as a structure which provides a display part and an operation part in the position distant from the apparatus by using a communication line, and performs remote operation.

(Work transfer mechanism H)
In FIG. 1, a workpiece transfer mechanism H includes a multi-joint robot 2 that can rotate and linearly move by sucking and holding a workpiece W on a robot hand 1 and transferring between steps. The articulated robot 2 is configured by a combination of vertical movement by a foldable vertical link and a rotatable horizontal link. Each link is subjected to feedback control by detecting the amount of rotation by an encoder provided in a servo motor (not shown). The robot hand 1 is configured to place and hold the carrier plate K by suction. The robot hand 1 may be of a mechanical chucking method in addition to the work W being sucked and held. The robot hand 1 may be rotated (reversed) about the horizontal axis in addition to rotating about the vertical axis.

  In FIG. 1, the base portion 3 of the articulated robot 2 is provided so as to reciprocate along the linear motion guide rail 4. For example, a ball screw is connected to a nut provided in the base portion 3, and the articulated robot 2 reciprocates along the linear guide rail 4 by being driven forward and reverse by a servo motor (not shown). It has become.

(Work supply part A and work storage part F)
In FIG. 1, a workpiece supply unit A and a workpiece storage unit F are provided on the front side of the linear motion guide rail 4 on which the articulated robot 2 reciprocates. Specifically, a supply magazine 9 storing workpieces W (molded products) and a storage magazine 10 capable of storing workpieces W (molded products) are provided in two rows. Since the supply magazine 9 and the storage magazine 10 have the same structure, the structure of the supply magazine 9 will be described below as a representative. Further, the supply magazines 9 provided in two rows may be either for storing the same type of workpieces W or for storing different types of workpieces W. The same applies to the storage magazine 10. In addition, the supply magazine 9 and the storage magazine 10 may be provided in one row, or each may be provided in three or more rows.

(Information reading unit I)
In FIG. 1, the information reading unit I is provided with a code information reading device 16 and an aligner 16a, and the information code of the work W is rotated by rotating the aligner 16a that has received the work W conveyed from the supply magazine 9. Is moved directly below the code information reading device 16. At this time, the workpiece W is unified in a certain direction. The code information reading device 16 reads an information code (QR code, bar code, etc.) relating to a product given to the workpiece W. Corresponding to this information code, the storage unit 47 stores resin supply information (resin type, resin supply amount, supply time, etc.), mold conditions (press number, press temperature, press time, molding thickness, etc.), cure information ( Molding conditions such as cure temperature, cure time, and cooling information (cooling time) are stored. Based on the molding condition information corresponding to the information code read by the code information reading device 16, processing of each process described later is performed on the workpiece W being conveyed. The multi-joint robot 2 sequentially conveys the workpiece W for which the molding conditions have been read to the subsequent processing steps from the resin supply unit B to the workpiece storage unit F.

(Configuration of resin supply part B)
In FIG. 1, a resin supply unit B is provided adjacent to the workpiece supply unit A. The resin supply unit B is provided with a liquid resin supply device. The liquid resin supply device is provided with a pair of dispense units 18 on both sides of a revolver type syringe supply unit 17 holding a plurality of syringes 19 rotatably. In the resin supply part B, an air conditioner for cooling and dehumidifying the room is provided in order to maintain the quality of the liquid resin. Further, as will be described later, a door is provided on the side of the apparatus so that the operator can replace the syringe.

  In FIG. 9A, a syringe supply unit 17 holding a plurality of replacement syringes 19 is rotatably provided between a pair of dispense units 18 that discharge and supply liquid resin filled in the syringes 19 to the workpiece W. Yes. Each dispensing unit 18 shares the syringe supply unit 17 to receive the replacement syringe 19 and discharge and supply a predetermined amount of liquid resin to the workpiece W held at the liquid material discharge position.

  In FIG. 9B, the syringe supply unit 17 holds six syringes 19 at 60 ° rotation angles. The pair of dispensing units 18 can move between the syringe receiving position L and the liquid material supply position J of the syringe supply unit 17, and the angle connecting the syringe reception position and the rotation center of the syringe supply unit 17 is set. It arrange | positions so that it may become 120 degrees.

  According to this, for example, the robot hand 1 can supply the work material from the same position to the liquid material discharge position J and supply the liquid material by the dispense unit 18, so that the liquid resin supply device can be arranged in a compact manner. In addition, by holding the syringe 19 at every rotation of 60 ° in the syringe supply unit 17, the syringes held in the syringe supply unit 17 in each dispense unit 18 can also be replaced at the same time. In addition, when a syringe replacement door is provided on the front side of the device (the lower side of FIG. 9A) or on the side surface of the device, the syringe 19 directed in that direction can be easily replaced by opening the corresponding door. can do.

(Press part C)
Next, the structure of the press part C is demonstrated with reference to FIG.1 and FIG.10.
As shown in FIG. 1, in the present embodiment, a plurality of press portions C are provided at the back of the linear motion guide rail 4. As an example, two press sections C are provided, but there may be one or three or more. Moreover, the press part C may be provided with either a mold die for resin-molding the same product or a mold die for resin-molding different products. A partition wall 24 is provided on the side of the pressing unit C facing the conveyance area 11, and an opening (not shown) is provided in the partition wall 24. The opening is normally closed by a shutter 25 that can be opened and closed. The shutter 25 is provided so as to be opened and closed by a driving source such as a cylinder or a solenoid.

  Further, a loader 32 capable of reciprocating from the press device 26 to the transport area 11 is provided in the press section C. In addition, a work placement unit (not shown) is provided in the transport area 11 on the near side by the shutter 25. The workpiece W applied with the liquid resin adsorbed and held by the robot hand 1 is delivered to the workpiece placement unit, or the workpiece W taken out by the loader 32 from the press device 26 is delivered.

  In FIG. 1, each press device 26 is provided with a film supply device 35. As shown in FIG. 10A, the film supply device 35 is a device for feeding and winding a long release film 36 covering the clamp surface of the upper mold 28 between reels. The release film 36 is adsorbed and held on the upper mold surface by a known suction mechanism. The release film 36 has heat resistance that can withstand the heating temperature of the mold, and is easily peeled off from the mold surface, and is a film material having flexibility and extensibility, such as PTFE and ETFE. PET, FEP, fluorine-impregnated glass cloth, polypropylene, polyvinyl chloride, etc. are preferably used. In addition, you may employ | adopt the structure using what was cut | disconnected in the strip shape of the magnitude | size which covers the clamp surface as the release film 36. FIG.

  The carrying-in / out operation | movement to the press part C and the press operation of the workpiece | work W are demonstrated. In FIG. 10A, the upper mold 28 and the lower mold 30 of the press device 26 are in the opened state, and the shutter 25 of the partition wall 24 shown in FIG. 1 is in a state of closing the opening. The workpiece W sucked and held by the robot hand 1 is placed on a workpiece placing portion (not shown), the suction is released, and the workpiece W is delivered. When the robot hand 1 is retracted, the loader 32 grasps the workpiece W from the workpiece placement unit by the hand, enters the press device 26 through the opening with the shutter 25 opened, and sets the workpiece W on the lower die 30.

  FIG. 10A shows a state where the workpiece W is set on the lower mold 30. When the loader 32 on which the workpiece W is set returns from the press device 26 to the transfer area 11 through the opening, the shutter 25 is closed (see FIG. 1), and the press device 26 clamps the workpiece W to perform compression molding. As shown in FIG. 10B, the lower mold 30 is raised and the workpiece W is clamped between the upper mold 28 and the lower mold 30. A release film 36 is held by suction on the clamping surface including the cavity 28a of the upper die 28.

  When the compression molding is completed, the press device 26 is opened as shown in FIG. 10C, and the workpiece W is released from the upper die 28 to which the release film 36 is adsorbed and placed on the lower die 30. It is in a state that remains. When the shutter 25 is opened, the loader 32 enters the pressing device 26 from the transfer area 11 and grabs the workpiece W placed on the lower mold 30 and takes it out to the transfer area 11 and delivers it to the workpiece placement unit 22 ( (See FIG. 1).

Here, another example of the press device 26 will be described with reference to FIG.
The same members as those of the press device 26 described above are denoted by the same reference numerals and the description thereof is incorporated. In FIG. 10, the workpiece W is loaded into the lower mold 30. However, the workpiece W may be loaded into the upper mold 28. For example, the robot hand 1 may be configured to hold the workpiece W coated with a liquid resin by the chuck hand, turn it over, and supply it to the upper die 28. In this case, it is preferable to use an epoxy resin or the like that has a high degree of thixotropy and has a viscosity that does not drop the resin even if it is inverted before the resin mold.

  The upper die 28 in the present embodiment has a claw portion 28b that can be opened and closed at the edge of the carrier plate K and can support it, and is configured to be able to hold the workpiece W. FIG. 11A shows a state in which the workpiece W is carried into the press device 26 that has been opened. The workpiece W is suspended and held (floating supported) on the upper die 28 by the claw portion 28b in a state where the carrier plate K is separated from the clamp surface of the upper die 28. In this case, heating to the liquid resin is suppressed by holding the carrier plate K away from the clamping surface of the upper mold 28 until clamping. Thereby, the situation where the viscosity of liquid resin falls temporarily by heating and liquid resin falls to the lower mold | type 30 can be avoided effectively. Moreover, the heating of the adhesive sheet used for E-WLP can also be delayed, which is also effective for preventing flying dies.

FIG. 11B shows a state where the press device 26 is closed. The workpiece W is clamped by the upper die 28 and the lower die 30 and compression-molded. When the compression molding is completed, the press device 26 is opened. As shown in FIG. 11C, when the lower mold 30 is moved downward, the workpiece W is released from the lower mold 30 whose mold surface is covered with the release film 36 and remains held by the upper mold 28 by suction. Become. In this state, the robot hand 1 of the articulated robot 2 waiting in the transfer area 11 is reversed and entered into the press device 26, and the suction to the upper die 28 surface is released while holding the workpiece W. It can be transferred to the robot hand 1 and carried out.
In this case, the loader 32 provided in the press part C is omitted, and the robot hand 1 is directly turned into the pressing device 26 that is opened with the robot hand 1 turned upside down, and the workpiece W is sucked and held on the upper die 28 to be molded. The subsequent workpiece W can be received from the upper die 28 and taken out from the press device 26.

(Work Inspection D)
Next, the configuration of the workpiece inspection unit D will be described with reference to FIG. In FIG. 1, a linear motion rail 39 a is provided on the base portion 39. A movable stage 40 is provided on the linear motion rail 39a so as to be capable of reciprocating in the rail longitudinal direction. The movable stage 40 has, for example, a known drive mechanism and a nut portion connected to a ball screw, and reciprocates on the linear motion rail 39a by driving the ball screw forward and reversely by a motor. The movable stage 40 also serves as a cooling unit for the workpiece W after heat curing.

The movable stage 40 stands by at a workpiece receiving position that is one end side of the linear motion rail 39. The workpiece W compression-molded by the press part C is placed on the movable stage 40 by the robot hand 1, the suction is released, and the workpiece W is delivered. A laser displacement meter 41 is provided as a pair of upper and lower workpieces W on the workpiece transfer mechanism H side of the movable stage 40 at the delivery position. Before the workpiece W is placed on the movable stage 40 by the robot hand 1, The thickness of the workpiece W is measured by irradiating laser light with the laser displacement meter 41. The control unit G stores the measured thickness in the storage unit 47 as operation information. In this case, the thickness of the molded product can be calculated by subtracting the thickness of the carrier plate K from the thickness of the workpiece W. The movable stage 40 moves from one end side of the linear motion rail 39 to the other end side. An appearance inspection unit 42 is provided above the other end of the linear motion rail 39. In the appearance inspection unit 42, the molded product is imaged in a lump or divided, and it is inspected by appearance observation whether there is a molding defect such as unfilled, flow mark or flying die. When there are good and bad molding, the type of defect and the captured image are stored in the storage unit 47 as operation information. When the inspection is completed, the movable stage 40 on which the workpiece W is placed returns to the delivery position, is delivered to the robot hand 1, and is conveyed to the heat curing unit E.
In addition, when an abnormality (such as unfilling exceeding the expected value) is detected, the fact is notified to the display unit J, and the operation of the entire apparatus is stopped and maintenance is performed, thereby preventing defective products from being continuously produced. it can.

(Heat curing part E)
Next, the structure of the heat-hardening part E is demonstrated with reference to FIG. A curing furnace 43 is provided in the heat curing unit E, and the inspected work W is stored in the curing furnace 43 by the robot hand 1 and the mold resin is heated and cured (post-cured) at about 120 ° C. to 150 ° C. To complete the heat curing. In the curing furnace 43, opposed slits 43a are formed at a predetermined pitch in the height direction, and the workpiece W is held at this pitch. When the work W is stored in the curing furnace 43, the work W is inserted and held along the slit 43a formed in any one of them.

  In FIG. 1, an inner door 44 is provided on the side surrounding the transfer area 11 of the curing furnace 43, and an outer door 45 is provided on the outer surface side of the apparatus so as to be opened and closed. The inner door 44 is provided with openings (not shown) corresponding to the positions of the slits 43a for two steps. An opening / closing door 46 is provided inside the inner door 44 so as to be individually openable and closable so as to always block each opening. Also, as shown in FIG. 1, by providing two rows of 12-stage slits 43a in plan view, a total of 24 workpieces W can be post-cured in parallel.

  In this case, when the time from the resin molding at the press part C to the start of the post cure becomes long, the resin mold part may be warped. However, since the multi-joint robot 2 is used to smoothly move the workpiece W in the height direction, it can be moved in a short time with respect to the desired slits 43a having different heights. . As described above, in the molding apparatus in which the time required for conveyance affects the molding quality, the effect of shortening the conveyance time by the articulated robot 2 is particularly great.

  When one door 46 is opened, two workpieces W can be inserted and held in the upper and lower slits 43a by the robot hand 1 respectively. Thus, by opening and closing the door 46 individually, the open / close area can be reduced and the workpiece W can be stored and taken out, so that the temperature in the furnace can be prevented from being lowered and heat radiation to the transfer area 11 side can be suppressed. be able to.

  The workpiece W inspected by the workpiece inspection unit D is sucked and held by the robot hand 1 and is conveyed to the curing furnace 43. The curing furnace 43 is heated to a predetermined temperature with the open / close door 46 closed. When inserting the workpiece W, when the robot hand 1 approaches the inner door 44, the control unit G controls a drive mechanism (not shown) to open the opening / closing door 46 facing the slit 43a, and the robot hand 1 enters the furnace. Then, the workpiece W is inserted along the slit 43a. The robot hand 1 is retracted from the cure furnace 43 after the suction of the robot hand 1 is released and the workpiece W is transferred to the cure furnace 43. When the robot hand 1 is separated from the inner door 44, the open / close door 46 is closed. The above operation is repeated. When a predetermined time elapses after the work W is stored in the curing furnace 43, the robot hand 1 enters the curing furnace 43 again, and the work W is sucked and held from the curing furnace 43 to be transported to the cooling unit N. It has become.

(Cooling part N)
The cooling unit N is provided with a cooling magazine (not shown) in a space above the workpiece inspection unit D. Oppositely arranged slits are formed at a predetermined pitch in the height direction on both side walls in the cooling magazine, and the workpiece W can be held at this pitch. In this case, the workpiece W can be delivered to a predetermined slit by the articulated robot 2 that can move the robot hand 1 to an arbitrary height. The workpiece W on which the heat-curing of the molded product is completed is conveyed to the slit (delivery position) of the cooling unit N while being sucked and held by the robot hand 1, and is sucked and released. The workpiece W is naturally cooled by leaving it in this state for a predetermined time. Although the cooling unit N can be provided separately from the workpiece inspection unit D, the apparatus can be configured compactly by using an empty area of the workpiece inspection unit D.

(Work storage part F)
The configuration of the workpiece storage unit D is the same as the configuration of the workpiece supply unit A as described above. The robot hand 1 receives the workpiece W cooled by the cooling unit from the movable stage 40, conveys it to the adjacent storage magazine 10, and stores it.

(Control part G)
In FIG. 1, the control unit G includes a storage unit 47 such as a CPU (Central Processing Unit), ROM, and RAM, and controls the operation of each unit described above. In addition to storing various control programs, the storage unit 47 stores a workpiece transfer candidate list, transfer order information, and code information attached to the workpiece W. The CPU reads out a necessary program from the ROM to the RAM, executes it, stores the input information temporarily using the RAM, or performs arithmetic processing according to the input information, and outputs a command based on the control program. .

In the control unit G, the operation information of the workpiece supply unit A (the supply magazine slit number that has been delivered), the operation information of the code information reading device 16 (recipe information; resin conditions, mold conditions, curing conditions, cooling conditions), resin supply Information of part B (syringe number; (type of resin, resin thawing time, total storage amount), usage fee (per supply / total amount, supply start / end time), operation information of press part C (mold temperature curve, Clamping pressure curve, forming thickness, film usage), operation information of curing furnace 43 (in-furnace temperature), operation information of workpiece inspection part D (flying die, forming thickness), information of work storage part F (reception of received slits) Information such as (position) is input at any time, and necessary commands are output to each part. The control unit G stores such operation information, the above-described molding conditions, etc. in association with the workpiece W. Thereby, the actual manufacturing conditions etc. about the workpiece | work W after shaping | molding can be confirmed. For example, by reading the information code on the carrier plate K of the workpiece W after molding, the molding conditions and operation information can be confirmed, and information related to the actual molded product can be easily viewed. It can be used to optimize conditions.
The control unit G is disposed so as to surround the workpiece transfer mechanism H, but may be a device that can be remotely operated by wire or wireless, such as a controller.

  The control unit G controls the timing of the workpiece supply operation and the workpiece removal operation by the articulated robot 2 in accordance with the repetition cycle of the most time-consuming process. Incidentally, the minimum cycle of each process is calculated by dividing the required time by the number of devices. In the present embodiment, since the minimum cycle of the resin molding process in the press device 26 is the maximum between the processes, the timing for loading and unloading the workpiece W is determined according to this.

  Here, the configuration of the liquid resin supply device will be specifically described with reference to FIGS. In FIG. 2, in the syringe supply unit 17, a rotation holder 17b is rotatably supported by a holding unit body 17a. The syringe 19 stores a predetermined amount of thermosetting resin such as silicone resin or epoxy resin, and is held in the recesses 17d provided at six locations in the circumferential direction on the flange portion 17c provided on the upper portion of the rotary holder 17b. . In addition, a resin receiving portion 17e is provided below the rotary holder 17b for receiving liquid resin that leaks out from the tube nozzle 19a provided at the tip of the syringe 19.

  A pinch valve 17f is provided at a position corresponding to the tube nozzle 19a of each syringe 19 held in the recess 17d. As shown in FIG. 3B, the pinch valve 17f is in a state in which the tube nozzle 19a is closed in a normal state. As a result, the liquid resin is prevented from leaking from the syringe 19 held in the syringe supply unit 17. Further, when the syringe 19 is delivered to the dispense unit 18 described later, the tube nozzle 19a is closed by a pinch valve 18f described later, and then the pinch valve 17f is opened as shown in FIG. It is supposed to be handed over to.

  In FIG. 2, a motor 20 is assembled on the upper portion of the holding portion main body 17a. The motor shaft 20a of the motor 20 is connected to the flange portion 17c. When the motor 20 is activated, the rotary holder 17b rotates 60 ° in a predetermined direction to rotate a new replacement syringe 19 to the syringe receiving position L. As described above, since the syringe supply unit 17 is shared by the pair of dispenser units 18, the syringes 19 supplied to both the dispenser units 18 can be replaced at the same time. Moreover, a pair of dispenser unit 18 may replace the syringe 19 individually.

  Next, referring to FIG. 2, the configuration of one dispense unit 18 will be described. The other dispensing unit 18 is provided with the same components except that it is inverted with the syringe supply part 17 in between, and the description thereof is omitted. In the dispensing unit 18, a piston holding part 18 b is held so as to be movable up and down on a unit main body 18 a that can move toward and away from the syringe supply part 17 by a linear movement mechanism (not shown). A piston 18c is provided on the upper portion of the piston holding portion 18b so as to move up and down. The piston holding part 18b is provided with a position detection part for detecting the height position of the piston 18c, and the piston 18c is provided with a switch capable of detecting contact in the syringe 19. Thus, the dispensing unit 18 can detect the remaining amount of liquid resin in the syringe 19 being mounted. Further, the supply amount of the liquid resin can also be detected from the movement amount of the piston 18c from the start of the resin supply. With such a configuration, when the remaining amount of the liquid resin in the predetermined syringe 19 is less than the supply amount for one workpiece W, the syringe 19 may be replaced with an unused syringe 19 and the remaining amount is used up. After replacement, the shortage may be supplied from a new syringe 19.

  The piston holding part 18b is provided with a chuck 18d that receives and holds the syringe 19 below the piston 18c. A guide portion 18e that holds the posture of the syringe 19 and the tube nozzle 19a is provided below the chuck 18d. A pinch valve 18f is provided at a position corresponding to the tube nozzle 19a of each syringe 19 held by the chuck 18d. The pinch valve 18f has the same configuration as that provided in the syringe holder 17 shown in FIG. Thereby, it is possible to prevent the liquid resin from leaking out from the syringe 19 held by the chuck 18d and adhering to the apparatus or the supply amount fluctuating.

  A throw-away cup 21 is rotatably provided near the unit body 18a. When the liquid resin is discharged from the syringe 19, the throw-away cup 21 is provided to discharge the liquid resin 5 with relatively deteriorated quality at the distal end side of the tube nozzle 19 a. As will be described later, the discard cup 21 is rotationally moved from the retracted position to the liquid material discharge position J before the liquid resin is discharged onto the workpiece W by the rotation mechanism 7, and unnecessary resin is discarded.

  The resin supply part B and the conveyance area 11 shown in FIG. 1 are partitioned by a partition wall, and a shutter 6 that opens and closes an opening part through which the robot hand 1 can advance and retreat is provided on the partition wall. The shutter 6 is disposed at a position between the pair of dispensing units 18 and the work transport mechanism H, and is closed except when the work W is put in and out, so that the inside of the resin supply part B is kept airtight and the work is transported outside the apparatus. The area of the mechanism H is directly connected to prevent the movement of air. By opening the shutter 6, the workpiece W is carried into the liquid material discharge position J.

  In FIG. 2, at the liquid material discharge position J, a workpiece mounting portion 22 for mounting the workpiece W is provided. The workpiece placement unit 22 is placed after the suction of the workpiece W held by the robot hand 1 is released. In the workpiece W, the carrier plate K is supported by the support protrusion 22a. The workpiece placement unit 22 is provided with a weighing scale 23, and the weight of the workpiece W and the weight of the liquid resin discharged to the workpiece W are measured. The discharge amount of the liquid resin is determined in advance according to the product, and in any case, the discharge is performed with an accuracy of about the target value ± 0.3 g. The workpiece W from which the liquid resin has been discharged is sucked and held by the robot hand 1 from the workpiece placement unit 22 and conveyed to the press unit C.

  When the driving source (motor, cylinder, etc.) (not shown) is activated, the unit main body 18a moves from the liquid material discharge position J to the syringe receiving position L close to the syringe supply section 17, and holds the syringe 19 on the chuck 18d. The unit main body 18a moves to the liquid material discharge position J while holding the syringe 19, moves the piston 18c downward by a drive source such as a cylinder or a motor (not shown), and press-fits into the syringe 19 to thereby pinch the valve 18f by the liquid pressure. And the liquid resin is discharged from the tube nozzle 19a. When the downward movement of the piston 18c stops, the tube nozzle 19a is closed by the pinch valve 18f.

  By using together the pair of dispense units 18 configured as described above, the liquid resin can be efficiently and accurately discharged from the dispense unit 18 requiring temperature management to the workpiece W. It is possible to follow the resin mold operation to be performed, which can contribute to the improvement of production efficiency.

Next, the operation from the reception of the syringe 19 by the dispensing unit 18 to the supply of the liquid resin will be described with reference to FIGS.
As shown in FIG. 4, a syringe 19 is held in the syringe supply unit 17. The tube nozzle 19a of the syringe 19 is closed by a pinch valve 17f. Further, the dispensing unit 18 stands by at the liquid material discharge position J. The piston 18c is in a standby state above the piston holding portion 18b.

  Next, as shown in FIG. 5, the dispensing unit 18 is moved from the liquid material discharge position J to the syringe receiving position L by a linear motion mechanism (not shown). The chuck 18d of the dispensing unit 18 holds the syringe 19, and the pinch valve 18f clamps the tube nozzle 19a. Further, the pinch valve 17f of the syringe supply unit 17 is opened.

  Then, as shown in FIG. 6, the linear movement mechanism of the dispensing unit 18 is operated to move from the syringe receiving position L to the liquid material discharge position J. Thereby, the syringe 19 can be attached to the dispensing unit 18. When replacing the syringe 19, after the used syringe 19 is returned to its original position, a new syringe 19 is supplied by starting the motor 20 of the syringe supply unit 17 and rotating the rotary holder 17 b by 60 °. It becomes possible.

Next, the liquid resin supply operation will be described with reference to FIGS.
It is assumed that the workpiece W is placed on the workpiece placing portion 22 by the robot hand 1 and the shutter 6 is in a closed state. As shown in FIG. 7, after the syringe 19 is replaced or before the resin molding operation is resumed and the resin supply from the syringe 19 is started, the rotation mechanism 7 is operated to continue perpendicular to the rotation shaft 7a. The throw-away cup 21 held by the holding arm 8 is rotated from the retracted position (see FIGS. 9A and 9B) to the liquid material discharge position J. Then, the pinch valve 18f is opened and the piston 18c is moved downward by a predetermined amount, so that the liquid resin 5 in the vicinity of the tube nozzle 19a of the syringe 19 held by the dispensing unit 18 is discarded in the discarding cup 21. When the disposal is finished, the pinch valve 18f is closed and the rotation mechanism 7 is operated to rotate the disposal cup 21 from the liquid material discharge position J to the retracted position. Thereby, the quality of the liquid resin 5 can be maintained at a high quality by using the liquid resin 5 in the vicinity of the tube nozzle 19a of the syringe 19 that is relatively poor in quality by throwing it away in the cup 21.

  In FIG. 8, when the disposal of the liquid resin 5 is completed, the pinch valve 18f is opened again, the piston 18c is moved downward, and the liquid resin 5 is discharged onto the workpiece W. The weight of the workpiece W and the weight of the liquid resin 5 discharged to the workpiece W are measured by a weight meter 23 provided in the workpiece placement unit 22. When the downward movement of the piston 18c is stopped, the pinch valve 18f is closed and the supply of the liquid resin 5 is stopped.

  Here, a specific operation when supplying the liquid resin 5 will be described. When the discharge of the liquid resin 5 is started, a sufficiently small amount, for example, about 80 to 90% of the target value of the final supply amount is supplied. A detailed measurement value of the supply amount at this time is measured by the weigh scale 23 and supplied to a sufficiently small amount with respect to the supply amount calculated as the difference between the target value and the measurement value. In this way, the operation of supplying a sufficiently small amount with respect to the final supply amount in each supply is executed once or more. This operation needs to be repeated in order to supply with high accuracy. However, since the apparatus includes a plurality of dispensing units 18, the supply of the liquid resin 5 in the resin supply unit B reduces the overall throughput of the apparatus. The liquid resin 5 can be supplied with high accuracy. Subsequently, the supply amount at the last supply is calculated and supplied so that the total supply amount at the last supply becomes the final supply amount.

  Moreover, since the room | chamber interior is cooled at each supply, the viscosity of the liquid resin 5 discharged from the inside of the syringe 19 is high. For this reason, the liquid resin 5 discharged from the tube nozzle 19a may be suspended from the tube nozzle 19a as it is. Accordingly, the tube nozzle 19a is closed according to the supply amount detected by the movement amount of the piston 18c, and the liquid resin 5 suspended between the tube nozzle 19a and the workpiece W is forcibly moved by moving the piston holding portion 18b up and down. The thread cutting operation is performed by separating the wire and applying it to the workpiece W side. In this case, since the inside and outside of the syringe 19 are closed by the tube nozzle 19a, the liquid resin 5 in the syringe 19 is drawn to the outside liquid resin 5 during the thread cutting operation and flows out, and the supply amount fluctuates. There is no. Therefore, even the liquid resin 5 that has been cooled to increase the viscosity can be supplied with high accuracy.

  The workpiece W is held by the robot hand 1 and is transported from the workpiece placement unit 22 to the press unit C and shifts to a resin molding operation.

  If the above resin molding apparatus is used, a series of operations from the supply of the workpiece W or the liquid resin 5 to the resin molding, the inspection of the molded product, the heat curing of only the non-defective product, and the storage are efficiently performed with a compact apparatus configuration. Moreover, it is possible to provide a resin molding apparatus that can perform resin molding with specifications according to products.

In the resin molding apparatus described above, the dispensing unit 18 is provided in the resin supply section B and the two pressing apparatuses 26 are provided in the pressing section C. However, the number may be further increased. Also, the number of articulated robots provided in the work transport mechanism H is not limited to one, and a plurality of multi-joint robots may be provided to transport the work by sharing the transport area.
Further, the press device 26 is not limited to the compression molding device, and may be a transfer molding device, or may be molded by forming a reduced pressure space.

  Further, a plurality of types of liquid resins 5 are used by adopting a configuration in which a plurality of types of syringes 19 with different filled liquid resins 5 are held in the syringe supply unit 17 and selectively delivered to the dispensing unit 18. It is also possible to perform mixed production in which mold resin sealing is performed in parallel. Even in this case, the syringe 19 can be delivered to any of the dispensing units 18 by rotating the syringe supply unit 17. For this reason, one syringe supply part 17 can be shared by a pair of dispense units 18, and even if it is the structure which implement | achieves a mix production, it is not necessary to provide a syringe supply part separately, and can make an apparatus compact.

  Moreover, what is necessary is just to perform the replacement | exchange operation | work of the syringe 19 with respect to one syringe supply part 17. FIG. In this case, for example, by providing an identification number for each concave portion 17d and setting a syringe having the same identification number in the concave portion 17d when the replacement is performed, the replacement work can be simplified and replacement mistakes can be prevented. Therefore, for example, workability can be improved as compared with a configuration in which a syringe holding portion is provided for each type of resin. Thus, even if it is the structure which implement | achieves mix production, an apparatus can be made compact and workability | operativity can also be improved.

A Work supply part B Resin supply part C Press part D Work inspection part E Heat curing part F Work storage part G Control part H Work transport mechanism I Information reading part K Carrier plate L Display part M Operation part N Cooling part W Work 1 Robot Hand 2 Articulated robot 3,39 Base part 4 Linear guide rail 5 Liquid resin 6, 15, 25 Shutter 7 Rotating mechanism 8 Holding arm 9 Supply magazine 10 Storage magazine 11 Transport area 12, 24 Partition wall 16 Code information reader 16a Aligner 17 Syringe supply part 17a Holding part main body 17b Rotating holder 17c Flange part 17d Recessed part 17e Resin receiving part 17f, 18f Pinch valve 18 Dispense unit 18a Unit main body 18b Piston holding part 18c Piston 18d Chuck 18e Guide part 1 DESCRIPTION OF SYMBOLS 9 Syringe 19a Tube nozzle 20 Motor 20a Motor shaft 21 Discarding cup 22 Work placement part 22a Support protrusion 23 Weigh scale 24a Opening part 26 Press device 28 Upper mold | type 28a, 30a Cavity 28b Claw part 29 Lower mold | type platen 30 Lower mold | type 32 Loader 35 Film supply device 36 Release film 39a Linear motion rail 40 Movable stage 42 Appearance inspection unit 43 Cure furnace 44 Inner door 45 Outer door 46 Opening / closing door 47 Storage unit

Claims (8)

A liquid resin supply device for supplying a liquid resin to a workpiece in which a semiconductor chip is held on a carrier,
A dispensing unit that holds a plurality of replacement syringes is rotatably provided in a dispensing unit that discharges and supplies the liquid resin filled in the syringe to the workpiece, and the dispensing unit receives the replacement syringe from the syringe supplying unit. A liquid resin supply device that discharges and supplies a predetermined amount of liquid resin to a work held at a liquid material discharge position.   The syringe supply unit is rotatably provided between a pair of dispense units, and each dispense unit shares the syringe supply unit to receive a replacement syringe and apply a liquid resin to the work held at the liquid material discharge position. 2. The liquid resin supply device according to claim 1, wherein a predetermined amount is discharged and supplied. Wherein the syringe supplying portion and the syringe is held every 60 ° in rotation angle, dispensing unit multiple is movable between a syringe receiving position and the liquid material supply position of the syringe feed unit, The liquid resin supply apparatus of Claim 1 or Claim 2 arrange | positioned so that the angle which connects the said syringe receiving position and the rotation center of the said syringe supply part may be set to 120 degrees.   The liquid resin supply apparatus according to any one of claims 1 to 3, wherein the syringe supply unit and the dispense unit are each provided with a pinch valve that opens and closes a tube nozzle provided at a distal end of the syringe. 5. The throwing cup for discarding the liquid resin near the tube nozzle of the syringe held by the dispensing unit is provided so as to be movable between the liquid material supply position and the retreat position. The liquid resin supply apparatus of Claim 1.   6. The liquid resin supply device according to claim 1, wherein each dispense unit is supplied by measuring a discharge amount of the liquid resin discharged to the workpiece at a liquid material supply position. A liquid resin supply device for supplying liquid resin to a workpiece,
A dispensing unit that holds a plurality of replacement syringes is provided in a dispensing unit that discharges and supplies a liquid resin filled in a syringe to a workpiece, and the syringe supplying unit and the dispensing unit are provided at a syringe tip. Pinch valves for opening and closing the tube nozzles are provided, and the dispensing unit receives a replacement syringe from the syringe supply unit and discharges a predetermined amount of liquid resin to a work held at a liquid material discharge position. A liquid resin supply device characterized by supplying the liquid resin. 8. The liquid supply device according to claim 1, wherein the workpiece supply unit surrounds a movement range of an articulated robot provided in a workpiece transfer mechanism that holds and transfers a workpiece by a robot hand. A resin molding apparatus in which a part and a work storage part are arranged.

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