JP6550941B2 - Insulation processing equipment - Google Patents

Description

  The present invention relates to an insulation processing apparatus (vacuum potting apparatus) for forming an insulator layer on a circuit board or the like and an insulation processing product (for example, a high voltage generation apparatus or a high frequency generation apparatus) manufactured thereby.

Since a characteristic X-ray having an energy specific to the element contained in the sample surface is generated from the analysis position on the sample surface irradiated with the electron beam, detecting this characteristic X-ray and analyzing its energy and intensity Discloses an electron beam microanalyzer (EPMA: also referred to as “electron beam probe microanalyzer”) for identifying and quantifying an element present at an analysis position on a sample surface (see, for example, Patent Document 1). .
Such an EPMA, a scanning electron microscope (SEM) or the like is generally provided with a high voltage generator.

The high-voltage generator A has a rectangular parallelepiped case (for example, 20 cm × 10 cm × 5 cm) and a circuit board 30 (configured by a ceramic capacitor, a diode, a high-voltage resistor, etc.) disposed in the center of the case 20. .
Then, an insulator layer (epoxy resin, silicon resin, urethane resin or the like) is formed inside the case 20, and the circuit board 30 is embedded in the central portion inside this insulator layer.

  By the way, in such a high voltage generator A, it is necessary to insulate elements of different potentials so that discharge does not occur. For this reason, an insulator such as oil, gas or solid is filled between the elements, but the insulation of the insulator layer by solid is performed from the viewpoint of insulation performance, ease of processing, and environmental considerations.

  Here, a manufacturing method for manufacturing a high-voltage generator (insulated product) A in which an insulator layer is formed on the circuit board 30 will be described. First, the circuit board 30 is disposed at the center of the inside of the case 20, and a liquid insulator accommodated in a container or the like is poured into the case 20 (potting process). Since the liquid insulator entrains air during the potting process, bubbles are present in the insulator layer formed inside the case 20, so that the high-voltage generator (insulator) A after the potting process is present. 'Is placed in a vacuum vessel, and the inside of the vacuum vessel is evacuated to remove air bubbles from the inside of the insulator layer (defoaming step). Finally, the insulator layer of the high voltage generator A ′ after the defoaming step is cured at room temperature or by heating (hardening step) to obtain the high voltage generator A.

JP 2008-58159 A

However, in the manufacturing method as described above, when the viscosity of the liquid insulator is high or the surface area is large (particularly, there are fine irregularities like the elements of the circuit board 30), the formed insulator layer There was a problem that the bubbles could not be completely removed from the inside, and the bubbles causing the discharge remained in the insulator layer, leading to deterioration of the product yield.
Accordingly, an object of the present invention is to provide an insulation processing apparatus capable of forming an insulator layer free from bubbles on a circuit board or the like.

In order to solve the above problems, an insulation processing apparatus of the present invention includes a vacuum vessel in which an object to be insulated is disposed, a vacuum pump, an exhaust pipe connecting the inside of the vacuum vessel and the vacuum pump, and An insulating treatment apparatus comprising: an insulator housing container in which a liquid insulator is housed; an insulator introduction pipe that connects the inside of the vacuum container and the insulator housing container; and the exhaust pipe And an insulator introducing pipe valve formed in the insulator introducing pipe, wherein the amount of the insulator accommodated in the inside is detected in the insulator accommodating container. After the inside of the vacuum vessel is evacuated by opening the exhaust pipe valve, the insulator introduction pipe valve is opened, so that the inside of the vacuum vessel is opened. The insulator is supplied to the insulator to be disposed. Is the level sensor, when the amount of the insulator is detected that falls below a predetermined value, so that to close the insulator inlet valve.
Here, the "predetermined value" is an arbitrary numerical value previously determined by a designer or the like so that air does not flow into the vacuum vessel.

According to the insulation processing apparatus of the present invention, the insulating material is disposed in the vacuum vessel and the inside of the vacuum vessel is evacuated, and then the insulator is drawn into the vacuum vessel instead of performing the degassing process after the potting process. Thus, the inclusion of air in the insulator can be eliminated to form an insulator layer free of air bubbles on the insulator.
Further, according to the insulation treatment apparatus of the present invention, the inflow of air into the vacuum vessel can be prevented. As a result, it is possible to realize improvement in product yield and insulation performance, and to improve the reduction and stability of the ripple and noise of the insulator such as a high voltage generator.

  In the above-described insulation processing apparatus of the present invention, the insulator may be a high voltage generator or a high frequency generator.

In the insulation processing apparatus of the present invention described above, a pressurizing mechanism for guiding the insulator to the insulator introduction pipe may be installed in the insulator storage container.

As described above , according to the insulation processing apparatus of the present invention, when the insulator has a high viscosity and is difficult to be pulled into the vacuum vessel, not only a negative pressure but also a pressure can be applied.

And a voltage generator or a high frequency generator can be manufactured as an insulation process thing manufactured with the insulation processing apparatus as mentioned above.

BRIEF DESCRIPTION OF THE DRAWINGS The schematic block diagram which shows an example of the insulation processing apparatus which concerns on embodiment of this invention. The flowchart explaining an example of the manufacturing method of the insulation treatment thing which concerns on this invention.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings. The present invention is not limited to the embodiments described below, and includes various aspects without departing from the spirit of the present invention.

FIG. 1 is a schematic configuration diagram illustrating an example of an insulation processing apparatus according to an embodiment of the present invention.
The insulation processing apparatus 1 is insulated from the vacuum vessel 10, the rotary pump (vacuum pump) 60, the exhaust pipe 53 connecting the inside of the vacuum vessel 10 and the rotary pump 60, the insulator housing vessel 40, and the inside of the vacuum vessel 10. An insulator introducing pipe 51 connecting the inside of the body storage container 40, an air introducing pipe 55 connecting the exhaust pipe 53 and the outside, an insulator introducing pipe valve 52 formed in the insulator introducing pipe 51, an exhaust An exhaust pipe valve 54 formed in the pipe 53 and an air introduction pipe valve 56 formed in the air introduction pipe 55 are provided.

  The vacuum vessel 10 includes a rectangular parallelepiped-shaped casing 11 (for example, 30 cm × 30 cm × 20 cm) and a pressure sensor 12 that detects the pressure in the casing 11, and the casing 11 includes a door (not shown) and an internal portion. A view port 13 for observing a space is formed. According to such a vacuum container 10, the high voltage generator A ′ before the formation of the insulator layer is arranged at a predetermined position when the door of the housing 11 is opened by a user or the like.

  The insulator storage container 40 includes a housing 41 for storing an insulator, a remaining amount sensor 42, and a pressurizing mechanism 43. And the bottom face of the housing | casing 41 and the one end part of the insulator introduction pipe | tube 51 are connected. According to such an insulator storage container 40, a liquid insulator is accommodated in the housing 41 by a user or the like, and the insulator introduction pipe valve 52 is opened after the vacuum container 10 is evacuated. Then, the insulator accommodated in the casing 41 is led to a predetermined position (inside the case 20) in the casing 11 of the vacuum vessel 10 through the insulator introduction tube 51 by negative pressure. At this time, when the viscosity of the liquid insulator is high and difficult to be pulled into the housing 11, the insulator is pushed by the pressurizing mechanism 43 for guiding the insulator to the insulator introduction pipe 51.

The remaining amount sensor 42 detects the amount of insulator contained in the housing 41. When the remaining amount sensor 42 detects that the remaining amount of the insulator has become equal to or less than the predetermined value, the insulator introducing pipe valve 52 is used to prevent the flow of air into the housing 11 of the vacuum vessel 10. Is automatically closed.
Moreover, it is preferable that the surface roughness of the inner surface of the housing 41 is smooth so as not to entrain air when the insulator is poured.

Here, a manufacturing method for manufacturing the high-voltage generator (insulated product) A in which the insulating layer is formed on the circuit board 30 by the above-described insulation processing apparatus 1 will be described with reference to the flowchart of FIG. .
First, in the process of step S101, the user opens the door of the casing 11 of the vacuum vessel 10 and arranges the high-voltage generator (insulator) A ′ before forming the insulator layer at a predetermined position.

Next, in the process of step S102, the user closes all the valves (the insulator introduction pipe valve 52, the exhaust pipe valve 54, and the air introduction pipe valve 56).
Next, in the process of step S <b> 103, the user stores the liquid insulator in the housing 41 of the insulator storage container 40. Examples of the insulator include an epoxy resin, a silicon resin, and a urethane resin.

Next, in the process of step S <b> 104, the user opens the exhaust pipe valve 54 and operates the rotary pump 60. Thus, the inside of the housing 11 of the vacuum vessel 10 is evacuated.
Next, in the process of step S105, the user confirms that the pressure value of the pressure sensor 12 has become equal to or less than a predetermined value (for example, 1 Pa), and opens the insulator introduction pipe valve 52 (potting process starts ). Thereby, a liquid insulator is poured into the case 20.

Next, in the process of step S106, the user observes the inside of the housing 11 of the vacuum vessel 10 at the view port 13 to confirm that a predetermined amount of insulator has flowed into the case 20, and the insulator is Close the inlet pipe valve 52 (end of the potting process).
Next, in the process of step S107, the user closes the exhaust pipe valve 54.

Next, in the process of step S108, the user stops driving the rotary pump 60 and opens the air introduction pipe valve 56.
Next, in the process of step S109, the user opens the exhaust pipe valve 54 and purges the inside of the housing 11 of the vacuum vessel 10 with air.

  Finally, in the process of step S110, the user opens the door of the case 11 of the vacuum vessel 10 and takes out the high voltage generator A. Then, the insulator layer of the high voltage generator A is cured at normal temperature or by heating (curing step).

  As mentioned above, according to the insulation processing apparatus 1 of this invention, the insulator layer which bubble does not exist on the circuit board 30 can be formed. As a result, the product yield and the insulation performance can be improved, and the reduction and stability of the ripple and noise of the material to be insulated such as the high voltage generator A can be improved. Further, the installation of the remaining amount sensor 42 can prevent the inflow of air into the vacuum vessel 10.

Other Embodiments
(1) In the insulation processing apparatus 1 described above, the user operates the respective valves (insulator inlet pipe valve 52, exhaust pipe valve 54, air inlet pipe valve 56), but the pressure sensor 12 etc. A configuration may be adopted in which the computer automatically controls opening and closing of each valve based on the numerical values.

(2) In the above-described embodiment, the method of manufacturing the high voltage generator A has been described. However, instead of this, a high frequency generator may be manufactured.

  The present invention can be used for an insulation processing apparatus or the like for forming an insulator layer on a circuit board or the like.

DESCRIPTION OF SYMBOLS 1 Insulation processing apparatus 10 Vacuum container 40 Insulator storage container 51 Insulator introduction pipe 52 Insulator introduction pipe valve 53 Exhaust pipe 54 Exhaust pipe valve 60 Rotary pump (vacuum pump)

Claims (3)

A vacuum vessel for the insulator to be disposed therein;
With a vacuum pump,
An insulation treatment apparatus comprising an inside of the vacuum vessel and an exhaust pipe connecting the vacuum pump,
An insulator storage container in which a liquid insulator is stored;
An insulator introducing pipe connecting the inside of the vacuum vessel and the inside of the insulator storage vessel;
An exhaust pipe valve formed in the exhaust pipe;
And an insulator introduction pipe valve formed in the insulator introduction pipe,
The insulator storage container is provided with a residual amount sensor for detecting the amount of the insulator contained therein,
After the inside of the vacuum vessel is evacuated by opening the exhaust pipe valve, the insulator introduction pipe valve is opened, whereby the insulating member is disposed in the insulating member disposed in the vacuum vessel. The body is supplied,
The remaining amount sensor closes the insulator introduction pipe valve when detecting that the amount of the insulator has become a predetermined value or less.   The insulation processing device according to claim 1, wherein the material to be insulated is a high voltage generator or a high frequency generator.   The insulation processing apparatus according to claim 1, wherein a pressurizing mechanism for guiding the insulator to the insulator introduction pipe is installed in the insulator storage container.

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