JP4235623B2 - Resin sealing device - Google Patents

Description

  The present invention relates to a resin sealing device, and more specifically, a resin that enables high-precision resin sealing without variation in quality by controlling the amount of resin supplied to a molded product for resin sealing with high accuracy. The present invention relates to a sealing device.

In a method of resin-sealing a molded product using a resin-sealed mold, liquid resin, powder / granular resin or paste resin is supplied onto the molded product, and the resin is clamped together with the molded product. There is a method of resin sealing (compression molding method). As a resin sealing device using a compression molding method, the present applicant measures the weight of a molded product and the thickness of a semiconductor chip, measures the amount of resin supplied to the molded product, and responds to variations in the molded product. A resin sealing device that adjusts the amount of resin supplied to perform resin sealing has been proposed (see Patent Document 1).
JP 2003-165133 A

  In the case of the compression molding method, since the variation in the amount of resin supplied to the molded product directly affects the variation in the quality of the molded product, as described above, the thickness of the semiconductor chip mounted on the molded product It is necessary to perform resin sealing while adjusting the amount of resin supplied to the molded product. However, even if the amount of resin supplied to the molded product is measured and supplied to the molded product, there are cases where accurate resin sealing is not always possible. This is because the resin molding conditions fluctuate because the thickness of the molded product on which the semiconductor chip is mounted varies depending on the lot, and when the resin for sealing is supplied to the molded product, This is thought to be because the amount of resin supplied varies due to variations in accuracy.

In recent resin-encapsulated products, the thickness of the resin-molded portion is extremely thin, such as 1 mm or less. As a result, variations in resin molding conditions and variations in the amount of resin supplied when the molded product is sealed with resin have greatly affected variations in the quality of the molded product.
Thus, the present invention has been made in view of the present situation in which slight variations in resin molding conditions have come to have a great influence on variations in quality of molded products. An object of the present invention is to provide a resin sealing device that makes it possible to obtain a resin molded product having no variation in quality by compensating for these fluctuations even when various resin molding conditions due to the supply amount of the resin vary. It is said.

The present invention has the following configuration in order to achieve the above object.
That is, a molded product supply unit, a molded product measurement unit that measures the thickness of a semiconductor chip mounted on the molded product, and a resin supply that supplies liquid resin used for resin sealing to the molded product A molded part for measuring the thickness of the resin-sealed part of the resin-molded molded product, and a resin molded part for resin-molding the molded product supplied with the liquid resin using a sealing mold And a molded product storage unit and a control unit that controls the operation of each unit. In the resin sealing device, the molded product includes a plurality of semiconductor chips mounted on a substrate, and the molded product A product measuring unit is provided as a sensor unit for measuring the thickness of the semiconductor chip mounted on the substrate so as to face the arrangement sandwiching the molded product in the thickness direction, and irradiates the molded product with laser light. A sensor for measuring the thickness of the semiconductor chip from the reflected light, An XY table that supports the molded product and moves the molded product so that the semiconductor chip is positioned at the measurement position of the sensor, and the measurement unit of the molded product is a semiconductor chip mounted on the substrate As a sensor unit for measuring the thickness of the resin-sealed portion, a pair of upper and lower portions are provided so as to sandwich the molded product in the thickness direction, and the resin-sealed portion is irradiated from the reflected light by irradiating the molded product with laser light A sensor that measures the thickness of the XY table, and an XY table that supports the molded product and moves the molded product so that the resin sealing portion is positioned at the measurement position of the sensor. Adjustment means for adjusting the amount of resin supplied to the molded product in the resin supply unit based on the measurement result of the thickness of the semiconductor chip by the measurement unit of the molded product, and the resin sealing by the measurement unit of the molded product Based on the thickness measurement results Te, characterized in that it comprises an adjustment means for adjusting the amount of resin supplied to the molded article in the resin supply section.

Further, the control unit is configured to adjust the amount of resin supplied to each semiconductor chip in the resin supply unit based on the measurement result of the thickness of each semiconductor chip mounted on the substrate, and the molding Adjusting means for adjusting the resin supply amount in the resin supply unit based on the measurement result of the thickness of each resin sealing unit of the product, so that the resin sealing unit falls within a predetermined thickness tolerance It is characterized by being.

Further, an image processing camera is arranged in the measurement part of the molded product and the measurement part of the molded product.

According to the resin sealing device of the present invention, the result of measuring the thickness of the semiconductor chip of the molded product in the measuring unit of the molded product, and the thickness of the resin sealing portion of the molded product in the measuring unit of the molded product the measurement results of the, by feeding back the amount of resin supplied to Oite the molded article in the resin supply section, it is possible to perform accurate resin encapsulation in accordance with the molded article, also of molded product resin sealing Based on the result, the molded product can be accurately resin-sealed.

(Configuration of resin sealing device)
1 and 2 are a plan view and a front view showing the overall configuration of the resin sealing device according to the present invention. Below, the structure of each part of a resin sealing apparatus is demonstrated according to FIG.
As shown in FIG. 1, the resin sealing device includes a supply unit (A) for a molded product, and a measurement unit (B) for the molded product that measures the thickness of a semiconductor chip mounted on the molded product. A resin supply unit (C) for supplying a liquid resin used for resin sealing to the molded product, and a resin molding unit (D) for resin molding the molded product supplied with the liquid resin using a sealing mold And a molded product measuring section (E) for measuring the thickness of the resin-sealed portion of the molded product, and a molded product storage section (F).

  FIG. 3 is a block diagram showing the configuration of each part of the resin sealing device of this embodiment. The control unit (G) operates a series of operations from supplying the molded product to the resin sealing device, supplying the sealing resin to the molded product, and molding the resin after resin molding. To control.

The molded product 10 used in the resin sealing device of the present embodiment is a product in which semiconductor chips are mounted in two rows on a strip-shaped substrate.
The molded product supply unit (A) includes a set unit 11 that sets the magazine in a state where the molded product is stored in the magazine, an elevator 12 that drives the magazine set in the set unit 11 up and down, and a molded product. A take-out mechanism having a pusher or the like for cutting out the product, and two molded products taken out from the magazine by the take-out mechanism are arranged face to face in accordance with the arrangement of the molded product in the resin molding portion (D). And a cutting mechanism including a turntable 14 and the like.
At the rear of the turntable 14, a set position is provided for temporarily carrying out and supporting the moldings arranged side by side with the turntable 14, and the molding is placed between the turntable 14 and the setting position. Two feeder rails 16a and 16b to be conveyed are provided.

The measurement unit (B) of the molded product includes an XY table 20 that supports the molded product 10 and a sensor unit 22 that measures the thickness of the molded product 10 supported by the XY table 20. . The XY table 20 is provided so as to support two molded articles 10 in parallel. An image processing camera 21 is disposed above the XY table 20.
Note that an inloader 36 and a rail for conveying the molded product 10 from the set position to the XY table 20 are located at the side of the set position of the molded product 10 carried out from the turntable 14 and the XY table 20. 18 is provided.

As shown in FIG. 2, the sensor unit 22 of the measurement unit (B) of the molded product includes a support frame 23 whose front shape is formed in a U shape and a sensor 24 attached to the support frame 23.
4 and 5 show an enlarged configuration of the sensor unit 22. The sensor 24 used in the sensor unit 22 of the present embodiment irradiates the molded product with laser light and measures the thickness of the molded product from the reflected light. As shown in FIG. A pair of sensors 24 a and 24 b are arranged on the support frame 23 so as to face each other so as to sandwich the molded product 10 in the thickness direction. The thickness of the substrate is measured by measuring the distance from the sensor 24a, 24b to the substrate by the laser light irradiated to the substrate from the sensors 24a, 24b arranged opposite to each other, and subtracting the measured value from the distance between the sensors. It is required by doing.

  Since the two molded articles 10 are supported in parallel at a predetermined interval on the XY table 20, according to the arrangement of these molded articles 10, they are spaced apart from each other as viewed from the front. A pair of sensors 24a and 24b are provided on the upper and lower sides. The sensors 24 a and 24 b are guided by slide guides 25 a and 25 b, respectively, and the left and right positions can be adjusted according to the arrangement interval of the molded product 10 on the XY table 20.

The resin supply unit (C) includes a dispenser device 32 provided with nozzles 30a and 30b for supplying a liquid resin in accordance with each arrangement position of the semiconductor chip 10b mounted on the substrate 10a, and the product 10 to be molded. And an XY table 34 to be supported.
In the resin sealing apparatus of this embodiment, as shown in FIG. 1, the resin supply part (C) is arrange | positioned in the front part of the left-right center of a base. The nozzles 30a and 30b are provided as a pair on the left and right sides when viewed from the front in order to supply the liquid resin to each of the two molded articles 10 supported by the XY table 34. The XY table 34 is provided such that the movement position in the XY direction is controlled and the movement position in the Z direction (height direction) can also be controlled.

  Behind the resin supply unit (C), the molded product 10 is conveyed from the measurement unit (B) of the molded product to the resin supply unit (C), and from the resin supply unit (C) to the resin molded unit (D). An inloader 36 for conveying the molded product 10 is disposed. The inloader 36 includes a chuck mechanism that chucks a pair of molded articles 10 and 10 that are disposed to face each other, and performs an operation of supporting and conveying the molded article 10 in parallel without changing the direction of the molded article 10.

  The resin molding portion (D) includes an upper die 40 and a lower die 41 that clamp the product 10 and resin-mold, and a press portion 42 that supports the upper die 40 and the lower die 41. The press unit 42 includes a fixed platen 43 that supports the upper mold 40, a movable platen 44 that supports the lower mold 41, and a mold clamping mechanism 46 that presses the movable platen 44 and clamps the mold. The press unit 42 in the present embodiment uses an electric motor as a drive source of the mold clamping mechanism 46 and includes a pressing mechanism including a toggle mechanism.

The measurement unit (E) of the molded product includes an XY table 60 that supports the two molded products 50 molded by the resin molding unit (D), and a sensor unit 62 that measures the resin sealing portion of the molded product 50. With. The XY table 60 supports the molded product 50 in the same planar arrangement as the planar arrangement of the molded product 50 on the mold of the resin molding part (D).
The sensor unit 62 is formed in the same manner as the sensor unit 22 provided in the measurement unit (B) of the molded product described above, and each molded product 50, 50 supported by the XY table 60 is provided. A pair of upper and lower sensors are arranged to face each other in an arrangement separated from each other in accordance with the arrangement position. The XY table 60 moves in the XY direction at an intermediate position in the height direction of a pair of upper and lower sensors provided in the sensor unit 62. An image processing camera 63 similar to that provided above the XY table 20 is mounted above the XY table 60.

  Note that an unloader 64 for carrying out the molded product 50 from the resin molded portion (D) to the measurement portion (E) of the molded product is disposed behind the resin molded portion (D). The unloader 64 picks up the molded products 50 and 50 from the lower mold 41 while maintaining the planar arrangement of the molded products 50 and 50 in the press section 42 of the resin molded portion (D), and transfers them to the XY table 60. Perform the operation.

The storage part (F) for the molded product is arranged at the right position on the front surface of the base.
A pickup mechanism 70 that picks up the molded product 50 is disposed above the position where the XY table 60 has moved to the front side when the molded product 50 is measured and operated. The pickup mechanism 70 functions to pick up the molded product 50 from the XY table 60 and insert the molded product 50 into a magazine (not shown) for storage. In FIG. 2, reference numeral 74 denotes an elevator for storing a magazine for storing the molded product 50 in the magazine storage portion 72.

(Operation of resin sealing device)
Then, the effect | action of the resin sealing apparatus mentioned above is demonstrated.
First, the magazines stored in the set unit 11 are lifted one by one from the lower position by the elevator 12, and the molded products 10 are sent out one by one from the magazine onto the turntable 14 by the take-out mechanism. The turntable 14 receives the first molded article 10 supplied by the take-out mechanism at one support position, and then reverses 180 ° in the plane to bring the second molded article 10 into the other support position. In this way, the two molded articles 10 are arranged to face each other.

The moldings 10 and 10 that are supported on the turntable 14 so as to face each other are transferred to a set position behind the turntable 14 by feeder rails 16a and 16b.
From this transfer position, two in-mold products 10 are transferred to the XY table 20 provided in the measurement unit (B) of the in-mold product by the inloader 36. When transferring the molded product 10 to the XY table 20, the inloader 36 picks up the molded products 10, 10 from the feeder rails 16 a, 16 b, and then moves the inloader 36 to the XY table 20. The molded product 10 is transferred.
After the molded product 10 is transferred to the XY table 20, an image of the molded product 10 is captured by the camera 21, and the semiconductor chip is not mounted or chipped by image processing.

In the measurement unit (B) of the molded product, the XY table 20 is moved in the longitudinal direction of the molded product 10 and the thickness of each semiconductor chip 10b in the first row is measured. Are moved to the second row to measure the thickness of each semiconductor chip 10b in the second row. FIG. 6 shows a state in which the XY table 20 is moved and the thickness of the semiconductor chip 10b mounted on the molded product 10 is measured.
Even if the substrate 10a of the molded product 10 is bent by measuring the sensors 24a and 24b facing each other so as to sandwich the molded product 10 in the thickness direction, the substrate of the molded product 10 can be obtained. The thickness of the semiconductor chip 10b can be accurately measured by subtracting the thickness 10a. At this time, a check is also made on whether the semiconductor chip is not mounted from the measurement data obtained by the sensors 24a and 24b.

  The measurement result by the measurement unit is fed back to the amount of resin supplied in the resin supply unit (C) in the next process for each semiconductor chip 10b mounted on the substrate 10a. That is, the control unit (G) calculates the amount of resin to be supplied to each semiconductor chip 10b based on the result of measuring the thickness of the semiconductor chip 10b, and supplies it to each semiconductor chip 10b in the resin supply unit (C). The amount of resin to be controlled is controlled. Even when the semiconductor chip 10b is not mounted at the position where the semiconductor chip 10b is to be mounted on the substrate 10a, the amount of resin required at the mounting position is obtained, and the required amount is obtained by the resin supply unit (C) in the next process. Resin is supplied.

  After measuring the thickness of the molded product 10, the molded product 10 is picked up from the XY table 20 by the inloader 36 and transferred to the XY table 34 of the resin supply unit (C). In the resin supply unit (C), the liquid resin is supplied onto the article 10 from the nozzles 30 a and 30 b of the dispenser device 32. In the present embodiment, the liquid resin is supplied from the nozzles 30a and 30b to the two molded articles 10 supported by the XY table 34, respectively.

  Similarly to the measurement unit (B) described above, the XY table 34 is pitch-shifted in the longitudinal direction of the molded product 10 and the semiconductor chip 10b of the molded product 10 supported by the XY table 34 is moved. One after another, liquid resin is supplied. After supplying the liquid resin to the first row of semiconductor chips 10b, the liquid resin is supplied to the second row of semiconductor chips 10b. Note that the method of supplying the liquid resin is not limited to this method, and it is also possible to supply the liquid resin to all the rows at the same time.

  In the resin molding operation in the resin molding part (D), the movable platen 44 of the press part 42 is moved downward, and the molded articles 10 and 10 are loaded onto the lower mold 41 by the inloader 36 in the opened state and set. The lower mold 41 is moved upward, and the products 10 and 10 are clamped by the upper mold 40 and the lower mold 41. The resin molding method of the present embodiment is a method of clamping a molded article 10 supplied with a liquid resin with an upper mold 40 and a lower mold 41 together with the liquid resin and sealing the resin, and a resin sealing method using a so-called compression molding method. It is.

The upper mold 40 and the lower mold 41 clamp the molded product 10 together with the liquid resin and hold it for a certain period of time, whereby the resin is cured and resin molded.
When the resin is cured, the lower mold 41 is moved downward to open the mold, and the molded product 50 is unloaded from the mold by the unloader 64. The unloader 64 picks up the two molded products 50 and 50 from the mold, and transfers the molded products 50 and 50 to the XY table 60 of the molded product measuring section (E).

In the measurement part (E) of the molded product, the molded product 50 is moved in the thickness direction in exactly the same manner as the method of measuring the thickness of the semiconductor chip 10b of the molded product 10 in the measurement part (B) of the molded product. The thickness of the resin sealing part of the molded product 50 is measured by a sensor using laser light provided in the sandwiched arrangement. By moving the XY table 60, the thickness of all the resin sealing portions of the molded product 50 is measured. Further, the camera 63 captures an image of the molded product, and determines whether there is unfilled resin or chipped portions by image processing.
The thickness of the resin sealing part and the measurement result of the image processing by the measurement part (E) of the molded product are fed back to the supply amount of the liquid resin in the resin supply part (C). In the resin supply section (C), the thickness of the semiconductor chip 10b mounted on the molded product 10 is measured, and the amount of resin necessary for performing accurate resin molding is obtained by calculation, and the resin supply section (C) The liquid resin is supplied to the article 10 from the mold. Therefore, the resin sealing portion of the molded product 50 should be resin-molded so as to fall within a predetermined thickness tolerance.

However, due to the properties of the molded product 10, the configuration of the mold, the characteristics of the press part 42, etc., when the molded product 10 is actually resin-sealed, the thickness of the resin-sealed portion is within the assumed thickness tolerance. It may happen that it is out of the range. In such a case, the thickness of the resin sealing part is adjusted by adjusting (feeding back) the amount of resin supplied in the resin supply part (C) based on the measurement result in the measurement part (E) of the molded product. Can be adjusted within predetermined tolerances.
For example, when a new product is resin-sealed with a resin-sealing device, the thickness of the semiconductor chip 10b or the like in the molded product 10 is measured, and the resin supply amount in the resin supply unit (C) is set. At the same time, by adjusting the resin supply amount in the resin supply unit (C) based on the actual measurement result of the molded product, an appropriate value of the resin supply amount in the resin supply unit (C) is set efficiently and reliably. can do. That is, setting when producing a resin-sealed product by the resin-sealing device can be facilitated.

  Further, when the property of the molded product 10 varies depending on the lot or the property of the liquid resin varies, the resin supply amount in the resin supply unit (C) is adjusted based on the measured value of the molded product 50. Thus, the variation in the running can be compensated for and the variation of the resin sealing portion of the molded product 50 can be suppressed. That is, the measurement of the molded product 50 is continuously performed continuously, and the variation in the thickness of the resin sealing portion in the molded product 50 is continuously monitored. From the tendency of the measurement result, the resin supply unit (C) It is possible to increase or decrease the resin supply amount in advance.

  That is, the trend of the measurement result in the measurement unit (E) of the molded product is fed back to the resin supply amount of the resin supply unit (C) and resin-sealed, so that the molded product caused by the variation of various resin sealing conditions The resin supply amount in the resin supply part (C) can be controlled in advance so that the variation in the shape of the resin sealing part is within the tolerance. Further, even when the shape of the resin sealing portion is out of the tolerance, it is possible to prevent a large amount of defective products from occurring by feeding back the measurement result to the resin supply portion (C). .

  Thus, according to the method of feeding back and controlling the measurement result of the resin sealing portion of the molded product 50 to the resin supply amount of the resin supply portion (C), it is possible to perform resin sealing with extremely high accuracy and small variation. It becomes possible. In the case of a product with a very thin resin sealing portion such as a thickness of 1 mm or less, the thickness of the resin sealing portion of the molded product is constantly monitored in this way, and the resin is determined based on the monitoring result. The method for controlling the supply section (C) is extremely effective in enabling accurate resin sealing.

  In the above-described embodiment, the molded product 10 in which the semiconductor chips 10b are arranged vertically and horizontally on the substrate 10a has been described as an object. However, the resin sealing device according to the present invention is such a molded product. The present invention is not limited to 10 and can be similarly applied to a product in which a plurality of semiconductor chips are grouped and resin-sealed, or one side of a semiconductor wafer is collectively resin-sealed. When batch-sealing one side of a semiconductor wafer, measurement of the molded product is omitted, only the thickness of the molded product is measured, and the measurement result is fed back to the resin supply unit (C) for control. Method, when the surface irregularities of the molded product affect the variation in the resin supply amount, measure the surface state of the molded product, and the resin supply amount in the resin supply part (C) based on the measurement result Can be controlled.

It is a top view which shows the whole structure of one Embodiment of the resin sealing apparatus which concerns on this invention. It is a front view showing the whole composition of one embodiment of the resin sealing device concerning the present invention. It is a block diagram which shows the structure of each part of the resin sealing apparatus which concerns on this invention. It is a front view of the sensor part in one embodiment of a resin sealing device. It is a top view of the sensor part in one embodiment of a resin sealing device. It is explanatory drawing which shows the state which measures a to-be-molded product with a sensor part.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 Molded article 10a Board | substrate 10b Semiconductor chip 12 Elevator 14 Turntable 16a, 16b Feeder rail 18 Rail 20, 34, 60 XY table 22 Sensor part 23 Support frame 24, 24a, 24b Sensor 30a, 30b Nozzle 32 Dispenser apparatus 36 Inloader 40 Upper mold 41 Lower mold 42 Press section 43 Fixed platen 44 Movable platen 46 Mold clamping mechanism 50 Molded product 62 Sensor unit 64 Unloader 70 Pickup mechanism 72 Storage unit A Molded product supply unit B Molded product measurement unit C Resin supply part D Resin molding part E Molded part measurement part F Molded part storage part

Claims (3)

A molded product supply unit, a molded product measurement unit that measures the thickness of a semiconductor chip mounted on the molded product, and a resin supply unit that supplies liquid resin used for resin sealing to the molded product A resin molded part that resin-molds the molded product supplied with the liquid resin using a sealing mold, and a molded product measuring unit that measures the thickness of the resin-sealed part of the resin-molded molded product, In a resin sealing device including a molded product storage unit and a control unit that controls the operation of each unit,
The molded product is a substrate on which a plurality of semiconductor chips are mounted,
A pair of measuring parts for the molded product is provided as a sensor unit for measuring the thickness of the semiconductor chip mounted on the substrate so as to face the arrangement sandwiching the molded product in the thickness direction, and a laser is applied to the molded product. A sensor that irradiates light and measures the thickness of the semiconductor chip from the reflected light, and an XY table that supports the molded article and moves the molded article so that the semiconductor chip is positioned at the measurement position of the sensor And
The measurement part of the molded product is provided as a pair facing the top and bottom in an arrangement that sandwiches the molded product in the thickness direction as a sensor unit that measures the thickness of the resin sealing portion of the semiconductor chip mounted on the substrate, A sensor that irradiates the molded product with laser light and measures the thickness of the resin sealing portion from the reflected light, and a molded product that supports the molded product and that the resin sealing portion is positioned at the measurement position of the sensor. An XY table to be moved,
The control unit adjusts a resin amount supplied to the molded product in the resin supply unit based on a measurement result of the thickness of the semiconductor chip by the measurement unit of the molded product, and measures the molded product A resin sealing device, comprising: an adjustment unit that adjusts the amount of resin supplied to the molded product in the resin supply unit based on a measurement result of the thickness of the resin sealing unit by the unit. The control unit, based on the measurement result of the thickness of each semiconductor chip mounted on the substrate, adjusting means for controlling the amount of resin supplied to each semiconductor chip in the resin supply unit;
Adjusting means for adjusting the resin supply amount in the resin supply unit based on the measurement result of the thickness of each resin seal portion of the molded product so that the resin seal portion falls within a predetermined thickness tolerance; The resin sealing device according to claim 1, wherein the resin sealing device is provided.   3. The resin sealing device according to claim 1, wherein an image processing camera is disposed in the measurement unit of the molded product and the measurement unit of the molded product.

Images