JP4909825B2 - Resin sealing device - Google Patents

Description

  The present invention relates to a technical field of a resin sealing device that seals a semiconductor chip or the like with a resin.

  Patented as a resin sealing device equipped with a transport mechanism such as a loader or unloader that transports workpieces such as molded products before resin sealing, resin, and molded products after resin sealing from one place to another. The resin sealing device described in Document 1 is known.

  In this resin sealing device, a mold can be added in units, and a loader or an unloader conveys a work to a mold unit that is appropriately increased or decreased.

Japanese Patent Application Laid-Open No. 2001-300975

  In the resin sealing device described in Patent Document 1, each one loader carries a workpiece into a plurality of dies, and one unloader carries out the workpiece from a plurality of dies.

  However, as the number of work delivery locations by the transport mechanism increases, there is a problem that adjustment work at each delivery location becomes difficult. For example, a mold configured in unit units may have a slightly different inclination for each unit. It is very difficult and troublesome to unify all of these inclinations (for example, to adjust all of them at the same height horizontally). On the other hand, if the mold side is adjusted to some extent and the remaining error is adjusted to the neutral position so as to be absorbed by the transfer mechanism side such as a loader or unloader, the adjustment time and labor can be reduced to some extent. From the viewpoint of "high-precision workpiece delivery", the level was not always satisfactory.

  The present invention has been made to solve such problems. In the resin sealing apparatus, the workpiece is transferred with high accuracy and the adjustment work of the inclination between the transfer locations (for example, a plurality of molds). The problem is to enable both simplification.

The present invention is a resin sealing device including a transport mechanism that holds a predetermined workpiece and transports it from a first place to a second place, and the transport mechanism includes an arm part and an arm part. A holding portion that is supported and capable of holding the workpiece, and the first location and the second location are defined in order to manage a position in the height direction of the holding portion when the workpiece is delivered. A plurality of reference surfaces managed at different heights are provided, and the holding portion includes a plurality of contact portions that contact the reference surfaces when the workpiece is transferred, and is inclined with respect to the arm portion. By solving this problem, the above-mentioned problems are solved.

  In addition, the present invention holds a predetermined workpiece and moves from the first and second places (for example, the first and second molds) to another place (for example, a cooling unit) or to another place (for example, preheat). Part) to a first and second place (for example, first and second molds), a resin sealing device provided with a transport mechanism, the transport mechanism comprising an arm part and the arm part And a holding portion capable of holding the workpiece, and managing the position in the height direction of the holding portion at the time of delivery of the workpiece in the first place and the second place. A plurality of reference surfaces managed at a specified height are provided, and the holding portion includes a plurality of contact portions that contact the reference surfaces when the workpiece is transferred, and is inclined with respect to the arm portion. The above-mentioned problem is solved by making it possible.

  By adopting such a configuration, even when the inclination of the workpiece delivery location is not adjusted so strictly, the workpiece can be delivered with high accuracy. In other words, instead of simply adjusting the transport mechanism side to the “neutral position” of the error, the holding part capable of holding the workpiece positively tilts to absorb the tilt error and It is possible to deliver the workpiece (catch and release of the workpiece) by the holding unit while always maintaining the determined posture.

  In addition, if the holding unit is configured to be supported by a lifting unit that is suspended from the arm unit and can be moved up and down with respect to the arm unit, for example, a delivery place side such as a mold does not move up and down In this case, the conveyance by the conveyance mechanism is possible.

  In addition, the inclination of the holding part can be realized by, for example, float-supporting the holding part with respect to the elevating part or by coupling the elevating part with a ball joint.

  In addition, the first place includes a preheating part where the work before resin sealing is preheated, a mold where sealing is performed, a cooling part where the work after resin sealing is cooled, and after the resin sealing. Either the gate break portion where unnecessary portions of the workpiece are removed or the workpiece storage portion where the workpiece after resin sealing is stored, and the second location is preheated before the resin sealing. A preheating part, a mold for sealing, a cooling part for cooling the work after resin sealing, a gate break part for removing unnecessary parts of the work after resin sealing, and the work after resin sealing If it is configured to be one of the workpiece storage parts to be stored, the work of adjusting the place where the workpiece is transferred within the resin sealing device can be reduced over a wide range, and high precision can be achieved at all these locations. Delivery of the work is made possible such.

  By applying the present invention, it is possible to simplify the work of adjusting the tilt of the workpiece delivery location and to deliver the workpiece with high accuracy.

  Hereinafter, an example of an embodiment of the present invention will be described in detail with reference to the accompanying drawings.

  FIG. 1 is a schematic configuration diagram of a resin sealing device 100 which is an example of an embodiment of the present invention. FIG. 2 is a side sectional view of the unloader 140. FIG. 3 is a cross-sectional view taken along line IV-IV in FIG. FIG. 4 is an enlarged view of the chuck portion (holding portion). FIG. 5 is a side sectional view of the unloader 140 with the arm portion extended. FIG. 6 is a side sectional view of the unloader 140 with the arm portion extended to the maximum. FIG. 7 is a plan view of the mold.

  For convenience of explanation, the left-right direction in FIG. 1 will be described as the X direction, the up-and-down direction as the Y direction, and the direction perpendicular to both the X direction and the Y direction will be described as the Z direction (height direction).

<Configuration of resin sealing device>
The resin sealing device 100 includes a substrate supply unit (work supply unit) 102 to which a molded product (for example, a substrate or a lead frame: a workpiece) before resin sealing is supplied on a base unit 101 serving as a base of the device. Two molds 106 arranged side by side between the molded product storage unit 104 that stores the molded product after resin sealing, and the substrate supply unit 102 and the molded product storage unit (work storage unit) 104. (The lower mold 106B appears in FIG. 1) is linearly arranged. Further, in the vicinity of the substrate supply unit 102, a swivel table 103 that turns the molding product taken out from the substrate supply unit 102 to adjust the orientation, and after the orientation is adjusted by the turning table 103, the molding product is brought to a predetermined temperature. A pre-heater unit 105 that heats and maintains the temperature is disposed. Further, along with the turning table 103 and the preheater unit 105, a resin tablet supply unit 109 to which a resin tablet as a sealing material is supplied is arranged. On the other hand, in the vicinity of the molded product storage unit 104, there are a cooling stage (cooling unit) 107 that cools the molded product (workpiece) after resin sealing, and an unnecessary portion of the molded product that is cooled by the cooling stage 107 (cal part). ) Is taken out.

  Further, an X-direction guide 120 is installed on the base portion 101 in parallel with the arrangement of the substrate supply unit 102, the molded product storage unit 104, and the mold 106. On this X direction guide 120, the loader 130 and the unloader 140 are arrange | positioned so that it can move freely along the said guide. These loader 130 and unloader 140 function as a transport mechanism for a plurality of molds 106 arranged. That is, the loader 130 carries the molded product before resin sealing supplied from the substrate supply unit 102 into the mold 106 at a predetermined timing. On the other hand, the unloader 140 has a function of carrying out a molded product resin-sealed by each mold 106 and storing it in the molded product storage unit 104.

  The substantially rectangular lower mold 106B is provided with a convex portion 106C at the center of each side. The upper surface of the convex portion 106C is managed at a specified height and functions as a reference surface 106D.

  In the present embodiment, two molds 106 are arranged as described above. However, the number of molds 106 is not necessarily limited to two, and one or three or more molds may be arranged. Good. Furthermore, the substrate supply unit 102 and the molded product storage unit 104 may be disposed on the same side, and the loader 130 and the unloader 140 may be realized by a single transport mechanism.

  Next, the unloader 140 as a transport mechanism will be described in detail with reference to FIGS. Although the unloader 140 will be described here, a similar mechanism is adopted for the loader 130 as well.

  The unloader 140 is disposed on the two X direction guides 120 provided on the base portion 101. That is, the unloader 140 can freely move on the base portion 101 along the X direction guide 120. The unloader main body (main body portion) 141 of the unloader 140 has a substantially L shape when viewed from the side surface (X direction). A slide rail (guide portion) 144 is provided on the unloader main body 141 along the long side portion (left and right direction in FIG. 2) of the L shape. Two slide bodies 143 are fitted to the slide rail 144 with respect to one slide rail 144. Further, the two slide bodies 143 are connected and fixed to the arm portion 142. That is, the arm part 142 accommodated in the unloader main body 141 is supported so as to be slidable with respect to the unloader main body 141 via the slide rail 144 and the slide body 143. In the present embodiment, the arm portion 142 is configured to be slidable with respect to the unloader main body 141, but sliding itself is not an essential component of the present invention. Further, four support rollers 145 are provided for one slide rail 144 so as to abut on the slide rail 144 closer to the mold 106 (that is, the slide tip side) than the connecting position of the slide body 143 in the arm portion 142. It has been. Further, a chuck portion (holding portion) 146 is suspended from the support roller 145 via a vertical mechanism 147 on the mold 106 side (that is, on the slide tip side). 2 and 3, the chuck portion 146 is shown in a simplified manner, and the structure thereof will be described in detail with reference to FIG.

  The chuck portion 146 is suspended from the arm portion 147 via a vertical mechanism 147 such as a cylinder, and can be moved up and down with respect to the arm portion 142 at a predetermined timing by the operation of the vertical mechanism 147. Yes. The chuck portion 146 includes an upper and lower plate 150 fixed to the vertical mechanism 147 and an inclination plate 157 that is instructed to float with respect to the upper and lower plate 150. The upper and lower plates 150 are fitted into a slide pole 151 that is suspended from the arm portion 142, and move up and down along the slide pole 151. A first stopper 152 is provided on the upper and lower plates 150 to restrict the movement of the upper and lower plates 150. A second stopper 153 is provided near the tip of the slide pole 151 to prevent the upper and lower plates 150 from falling off.

  A plurality of pins 154 are suspended from the upper and lower plates 150. The pin 154 is arranged in such a manner that the through hole 157A provided in the inclined plate 157 is loosely fitted. A third stopper 156 is provided at the tip of the pin 154 to prevent the tilt plate 157 from falling off. Further, a spring 155 is disposed so as to contain the pin 154, and the spring 155 urges the upper and lower plates 150 and the inclined plate 157 in a direction in which they are always pulled apart. With such a configuration, the tilt plate 157 can be tilted with respect to the upper and lower plates 150 and the arm portion 142.

  Further, a chuck claw 158 is formed on the lower surface of the tilt plate 157 so that it can be opened and closed at a predetermined timing to catch and release the workpiece 180. Further, the tilt plate 157 has a substantially rectangular shape in plan view, and a pair of chuck rollers 148 (that is, a total of four pairs) are provided on the lower surface side of the substantially central portion of each side (see FIG. 9). ). Further, the pair of chuck rollers 148 can be fitted to the convex portion 106C provided in the lower mold 106B, and the upper surface (reference surface) of the convex portion 106C is formed between the rollers of the pair of rollers 148. 106D) can be contacted. That is, a total of four pairs of rollers 148 are fitted into the four convex portions 106C provided in the lower die 106B, thereby enabling the chuck portion 146 to be positioned (positioning in the XY direction) with respect to the die 106. .

  In addition, a cleaner portion 149 that can clean the surface of the mold 106 is provided at the foremost end of the arm portion 142. The cleaner 149 is realized by a rotating brush in this embodiment.

<Operation of the entire resin sealing device>
Next, the operation of the resin sealing device 100 will be described.

  First, a single workpiece (substrate or lead frame) before resin sealing is conveyed from the substrate supply unit 102 to the turning table 103. This conveyance is performed by a conveyance hand (not shown). When one workpiece is conveyed to the turning table 103, the turning table 103 rotates. Thereafter, another workpiece is conveyed to the turning table 103, and a total of two workpieces are arranged on the turning table 103. Thereafter, the two workpieces are simultaneously conveyed to the preheater 105 by the loader 130. Here, the work is heated to a predetermined temperature and kept warm. Two preheaters 105 are provided in the present embodiment, and the preheater 105 is conveyed to one of them (the vacant side). On the other hand, a resin tablet as a sealing material is supplied from the resin tablet supply unit 109. Thereafter, the work and the resin tablet kept warm in the preheater unit 105 are conveyed to the mold 106 by the loader 130.

  When the resin sealing in the mold 106 is completed, the work after the resin sealing is transferred to the cooling stage 107 by the unloader 140 in the future. In the cooling stage 107, the workpiece after resin sealing is cooled to a predetermined temperature. Thereafter, the work is again transferred from the cooling stage 107 to the gate break unit 108 by the unloader 140. Here, an unnecessary portion of the work, that is, a resin corresponding to the cull portion is removed by gate break. Unnecessary parts are discarded, and the remaining work is conveyed to the product storage unit 104 by the unloader 140.

  Resin sealing is continuously performed by repeating such a procedure.

  Here, the operation of the unloader 140 will be described in detail with a focus on the action.

  When the resin sealing is completed in the mold 106, the upper mold 106A and the lower mold 106B are opened by a press mechanism (not shown) (see FIG. 5). At this timing, the arm portion 142 of the unloader 140 serving as a transport mechanism slides and enters between the upper mold 106A and the lower mold 106B. The arm portion 142 slides toward the mold 106 along the slide rail 144 due to the presence of the slide body 143 and the support roller 145 connected to the arm portion 142. Since the slide slides while being supported by the two slide bodies 143 and the four support rollers 145, the slide reliably supports the arm portion 142 in a state of protruding from the unloader main body 141 (overhanging state). It is possible to do.

  Next, as shown in FIG. 6, the arm portion 142 further slides, and the slide of the arm portion 142 stops when the chuck portion 146 comes directly above the lower mold 106 </ b> B.

  Subsequently, the chuck unit 146 is moved (lowered) to the lower mold 106B side by the action of the vertical mechanism 147 that supports the chuck unit 146 from the arm unit 142. At this time, a pair (four pairs in total) of the chuck rollers 148 provided on the central lower surface side of each of the four sides of the substantially rectangular inclined plate 157 are respectively fitted to the four convex portions 106C provided on the surface of the lower mold 106B. As a result, the chuck portion 146 is accurately positioned with respect to the lower die 106B (positioning in the XY directions) (see FIG. 9). Due to the presence of the chuck roller 148 serving as a positioning mechanism, the position of the unloader 140 itself on the X-direction guide 120 and the sliding amount of the arm portion 142 are not excessively precisely controlled. It is possible to accurately hold and carry out the subsequent molded product. Further, since the tilt plate 157 is supported in a so-called “float” state, even if an error in the height direction of the lower mold 106B exists, the error can be absorbed. That is, even when the operating range of the vertical mechanism 147 is fixed, it is possible to cope with an error in the height direction.

  Further, the upper surface (reference surface 106D) of the convex portion 106C comes into contact with the contact portion 157B (the portion between the rollers of the pair of chuck rollers 148) of the inclined plate 157. Since the upper surface (reference surface 106D) of the convex portion 106C is managed at a specified height, the position of the inclined plate 157 in the height direction (Z direction) with respect to the lower mold 106B is determined by this contact. Further, as shown in FIG. 8, even when the entire lower die 106B is not horizontal but has an inclination θ, the inclination plate 157 is inclined to maintain the posture of the inclination plate 157 with respect to the lower die 106B. As a result, it is possible to reliably hold the workpiece. Thereafter, the work is held by the holding claws 158.

  After the work after resin sealing is held by the holding claws 148, the chuck part 146 is raised by the vertical mechanism 147, and the arm part 142 is returned to the unloader main body 141 side. When the arm portion 142 returns to the unloader main body 141 side, the surfaces of the upper die 106A and the lower die 106B are cleaned by the cleaner portion 149 disposed at the tip of the arm portion 142.

  The unloader 140 needs to take out the workpiece from the two molds 106 (the first place and the second place) and transport it to another place, and these two molds 106 have different inclinations. Even in this case, the tilting plate 157 is tilted in accordance with the tilt of each mold 106, so that the workpiece can be accurately held.

  Note that the loader 130 also carries the workpiece from the turning stage 103 to the preheater unit 105 and the workpiece from the preheater unit 105 to the mold 106 by substantially the same operation as the unloader 140 described above.

  Also in the turning stage 103, the preheater unit 105, the cooling stage 107, the gate break unit 109, and the molded product storage unit 104, similarly to the mold 106, a plurality of convex portions controlled to a prescribed height are provided, and the chuck unit The positioning of 146 in the XY direction and the tilt of the tilt plate 157 may be adjustable. With such a configuration, not only the mold 106 but also the loader 130 and the unloader 140 as the transfer mechanism can simplify the work of adjusting the inclination in all places where the workpiece is transferred, and further improve the workpiece transfer accuracy. It is also possible to make it.

  Further, in the chuck portion 146 described above, the structure in which the tilt plate is tilted is a so-called “float structure”. However, it is not limited to this structure. For example, as shown in FIG. 10, even if a structure in which the upper and lower plates 250 and the inclination plate 257 are connected by a ball joint 259 is adopted, the same effect can be exhibited in that the inclination is absorbed. .

  Regardless of the sealing type such as transfer molding or compression molding, it can be widely used in a resin sealing device. In particular, it is suitable for a multi-press type resin sealing apparatus in which a plurality of dies are arranged in parallel.

1 is a schematic configuration diagram of a resin sealing device 100 including a transport mechanism that is an example of an embodiment of the present invention. Side sectional view of unloader 140 as a transport mechanism Sectional view along arrow IV-IV in Fig. 2 Enlarged view of chuck part (holding part) Side sectional view of the unloader 140 with the arm portion extended. Side sectional view of the arm portion of the unloader 140 extended to the maximum Top view of mold State diagram when the workpiece is transferred to the mold by the chuck The figure which showed the contact state of the convex part (reference member) with which a chuck | zipper part and a metal mold | die are equipped The figure which showed the other structural example of the chuck | zipper part

Explanation of symbols

DESCRIPTION OF SYMBOLS 100 ... Resin sealing apparatus 101 ... Base part 102 ... Substrate supply part 103 ... Turning table 104 ... Molded product storage part 105 ... Preheater 106 ... Mold 106A ... Upper mold 106B ... Lower mold 106C ... Projection part 106D ... Reference surface 107 ... Cooling stage 108 ... Gate break 109 ... Resin tablet supply part 120 ... X direction guide 130 ... Loader 140 ... Unloader 141 ... Unloader body 142 ... Arm part 143 ... Slide body 144 ... Slide rail 145 ... Roller 146 ... Chuck part 147 ... Vertical mechanism 148 ... Chuck roller 149 ... Cleaner part 150 ... Upper and lower plates 151 ... Slide pole 152 ... First stopper 153 ... Second stopper 154 ... Pin 155 ... Spring 156 ... Third stopper 157 ... Tilt plate 157A ... Through hole 157B ... Contact portion 158 ... chuck claws 160 ... cavity 170A ... upper platen 170B ... lower platen 180 ... work

Claims (6)

A resin sealing device including a transport mechanism that holds a predetermined workpiece and transports the workpiece from a first place to a second place,
The transport mechanism includes an arm part, and a holding part supported by the arm part and capable of holding the workpiece,
The first place and the second place are each provided with a plurality of reference planes managed at a prescribed height in order to manage the position in the height direction of the holding part at the time of delivery of the workpiece,
The resin sealing device, wherein the holding portion includes a plurality of abutting portions that abut on the reference surface when the workpiece is transferred, and can be inclined with respect to the arm portion. A resin sealing device including a transport mechanism that holds a predetermined workpiece and transports from a first or second location to another location or from another location to a first or second location. ,
The transport mechanism includes an arm part, and a holding part supported by the arm part and capable of holding the workpiece,
The first place and the second place are each provided with a plurality of reference planes managed at a prescribed height in order to manage the position in the height direction of the holding part at the time of delivery of the workpiece,
The resin sealing device, wherein the holding portion includes a plurality of abutting portions that abut on the reference surface when the workpiece is transferred, and can be inclined with respect to the arm portion. In claim 1 or 2,
The resin-sealing device, wherein the holding unit is supported via an elevating unit that is suspended from the arm unit and is movable up and down with respect to the arm unit. In claim 3,
The resin sealing device, wherein the holding portion is float-supported with respect to the elevating portion, so that the holding portion can be inclined with respect to the arm portion. In claim 3,
The resin sealing device, wherein the holding portion is tilted with respect to the arm portion by being coupled to the elevating portion by a ball joint. In any one of Claims 1 thru | or 5,
The first place is a preheating part in which the work before resin sealing is preheated, a mold in which sealing is performed, a cooling part in which the work after resin sealing is cooled, and the work after resin sealing. Is a gate break part where unnecessary parts are removed, or a work storage part in which the work after resin sealing is stored,
The second place is a preheating part where the work before resin sealing is preheated, a mold where sealing is performed, a cooling part where the work after resin sealing is cooled, and the work after resin sealing. A resin sealing device, wherein the unnecessary part is a gate break part from which an unnecessary part is removed, or a work storage part in which the work after resin sealing is stored.