TW201934295A - Resin molding mold and resin molding method efficiently supplies the film and the molded resin and shorten the manufacturing time - Google Patents

Resin molding mold and resin molding method efficiently supplies the film and the molded resin and shorten the manufacturing time Download PDF

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Publication number
TW201934295A
TW201934295A TW107144278A TW107144278A TW201934295A TW 201934295 A TW201934295 A TW 201934295A TW 107144278 A TW107144278 A TW 107144278A TW 107144278 A TW107144278 A TW 107144278A TW 201934295 A TW201934295 A TW 201934295A
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Taiwan
Prior art keywords
film
resin
workpiece
molding
holding
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TW107144278A
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Chinese (zh)
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TWI787411B (en
Inventor
鈴木和廣
齊藤高志
轟良尙
安藤修治
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日商山田尖端科技股份有限公司
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Priority claimed from JP2018025728A external-priority patent/JP6989410B2/en
Priority claimed from JP2018025724A external-priority patent/JP6989409B2/en
Priority claimed from JP2018025730A external-priority patent/JP7088687B2/en
Application filed by 日商山田尖端科技股份有限公司 filed Critical 日商山田尖端科技股份有限公司
Publication of TW201934295A publication Critical patent/TW201934295A/en
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Publication of TWI787411B publication Critical patent/TWI787411B/en

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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C43/00Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
    • B29C43/02Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles
    • B29C43/18Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles incorporating preformed parts or layers, e.g. compression moulding around inserts or for coating articles
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C43/00Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
    • B29C43/32Component parts, details or accessories; Auxiliary operations
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C43/00Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
    • B29C43/32Component parts, details or accessories; Auxiliary operations
    • B29C43/34Feeding the material to the mould or the compression means
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C43/00Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
    • B29C43/32Component parts, details or accessories; Auxiliary operations
    • B29C43/36Moulds for making articles of definite length, i.e. discrete articles
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C43/00Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
    • B29C43/32Component parts, details or accessories; Auxiliary operations
    • B29C43/50Removing moulded articles
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C43/00Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
    • B29C43/32Component parts, details or accessories; Auxiliary operations
    • B29C43/52Heating or cooling
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C43/00Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
    • B29C43/32Component parts, details or accessories; Auxiliary operations
    • B29C43/58Measuring, controlling or regulating
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C43/00Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
    • B29C43/32Component parts, details or accessories; Auxiliary operations
    • B29C43/36Moulds for making articles of definite length, i.e. discrete articles
    • B29C2043/3602Moulds for making articles of definite length, i.e. discrete articles with means for positioning, fastening or clamping the material to be formed or preforms inside the mould
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C43/00Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
    • B29C43/32Component parts, details or accessories; Auxiliary operations
    • B29C43/58Measuring, controlling or regulating
    • B29C2043/5825Measuring, controlling or regulating dimensions or shape, e.g. size, thickness

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
  • Casting Or Compression Moulding Of Plastics Or The Like (AREA)
  • Moulds For Moulding Plastics Or The Like (AREA)

Abstract

The film and the molded resin are efficiently supplied according to the invention. The resin molding mold (1) is provided with a conveying tool (400) that belongs to an apparatus that holds the molded resin (R) and is conveyed together with the film (F) in the through holes (400a, 400b) formed in the shape of the mold cavity (209) corresponding to the lower mold 206. A first stage (308) is for holding the film (F) which is fed from the fil roll (306) and cut into a predetermined length, so that the cut film (F) and the conveying tool are combined. A second stage (310) is for loading the conveying tool (400) in which the film (F) is held on the lower side, and is configured to be movable. A conveying tool picker (304) holds the conveying tool (400) in a state in which the film (F) is held on the lower side, and then is transported from the first stage (308) to the second stage (310). A dispenser (312) places the molding resin (R) into the inner side of the through-holes (400a, 400b) of the conveying tool (400) on the second stage (310).

Description

樹脂模製裝置及樹脂模製方法 Resin molding device and resin molding method

本發明係關於對基材中搭載有電子零件之工件進行樹脂模製的樹脂模製裝置及樹脂模製方法。 The present invention relates to a resin molding apparatus and a resin molding method for resin-molding a workpiece having electronic components mounted on a substrate.

藉樹脂模製製造半導體裝置等電子裝置的方法中,已知有將基材中搭載複數個電子零件的工件進行總括地樹脂模製,再將成形品切割成各片而成為各個電子裝置的方法。這種樹脂模製方式之一有壓縮成形方式。 A method of manufacturing an electronic device such as a semiconductor device by resin molding is known as a method of collectively resin-molding a workpiece on which a plurality of electronic components are mounted in a base material, and then cutting the molded product into individual pieces to form individual electronic devices . One such resin molding method is a compression molding method.

概略而言,壓縮成形方式係為對具備上模與下模所構成的模製用模具中所設置的模製區域(模窩)供給預定量的樹脂,並且在該模製區域配置工件,藉由用上模與下模夾緊的操作來進行樹脂模製的方法。此時,在使用上模中設置模窩的模製用模具的情形中,一般是使用在工件上將高黏度樹脂總括地供給到中心位置進行成形的作法。在此情況中,為了將要供給到工件上的樹脂充填於模窩內,由於必須使模製樹脂流動到模窩的邊端,而有產生流痕(flow mark)的情形。 In general, the compression molding method is to supply a predetermined amount of resin to a molding area (mold) provided in a molding mold including an upper mold and a lower mold, and to arrange a workpiece in the molding area, and borrow A method of performing resin molding by clamping the upper mold and the lower mold. At this time, in the case of using a mold for molding provided with a cavity in the upper mold, a method of generally supplying a high-viscosity resin to a center position on a workpiece to perform molding is generally used. In this case, in order to fill the mold cavity with the resin to be supplied to the workpiece, it is necessary to cause the mold resin to flow to the edge of the mold cavity, and a flow mark may be generated.

另一方面,在使用下模中設置模窩的模製用模具時,一般通行的作法是以薄膜覆蓋包含該模窩的模具面,以均等的厚度供給模製樹脂,並將保持在上模 的工件浸漬在熔融的模製樹脂中施行樹脂模製。例如專利文獻1(日本特開2010-247429號公報)、專利文獻2(日本特開2004-148621號公報)、專利文獻3(日本特開2017-024398號公報)等所載的裝置即已有揭露。 On the other hand, in the case of using a mold for molding in which a mold cavity is provided in a lower mold, it is common practice to cover the mold surface including the mold cavity with a film, supply the molding resin with an equal thickness, and keep it in the upper mold. Resin molding was performed by immersing the workpiece in the molten molding resin. For example, the devices described in Patent Document 1 (Japanese Patent Laid-Open No. 2010-247429), Patent Document 2 (Japanese Patent Laid-Open No. 2004-148621), and Patent Document 3 (Japanese Patent Laid-Open No. 2017-024398) are already available. Expose.

先前技術文獻Prior art literature 專利文獻Patent literature

專利文獻1 日本特開2010-247429號公報 Patent Document 1 Japanese Patent Application Publication No. 2010-247429

專利文獻2 日本特開2004-148621號公報 Patent Document 2 Japanese Patent Laid-Open No. 2004-148621

專利文獻3 日本特開2017-024398號公報 Patent Document 3 Japanese Patent Laid-Open No. 2017-024398

上述專利文獻等所例示的傳統壓縮成形方式的樹脂模製裝置中,進行工件之供給或成形品之收納的機構、工件、執行成形品之厚度量測的機構、或者進行搬送的機構等以平面方式排列配置的構成係屬一般的作法。因此,有樹脂模製裝置的設置面積容易變大的課題。 In the conventional resin molding apparatus of the compression molding method exemplified in the above-mentioned patent documents, a mechanism for supplying a workpiece or storing a molded product, a workpiece, a mechanism for measuring a thickness of a molded product, or a mechanism for conveying a flat surface The arrangement of the arrangement is common practice. Therefore, there is a problem that the installation area of the resin molding apparatus tends to increase.

再者,工件的厚度量測或所搭載的電子零件的計數,或者成形品的厚度量測,進而逐一(一片)實施工件、成形品的搬送等製程時,製程時間會拉長而造成瓶頸,有裝置整體的生產性難以提高的課題。 In addition, when measuring the thickness of a workpiece or counting the mounted electronic components, or measuring the thickness of a molded product, and then one-by-one (one piece) of the manufacturing process such as the transfer of the workpiece and the molded product, the processing time will be prolonged and cause a bottleneck. There is a problem that it is difficult to improve the productivity of the entire device.

此外,上述專利文獻等所例示的傳統壓縮成形方式的樹脂模製裝置中,模製用模具的上模具有模窩之構成的情況中,由於可以模製樹脂搭載於一個工件 上的狀態進行搬送及樹脂模製,故有裝置構成或製程得以簡化的優點。但,在模製用模具的下模具有模窩之構成時,由於工件搬入後會產生必須依所需數量搬入薄膜(脫模用薄膜)或模製樹脂的情形,故成形的工件增多時,有裝置構成或製程複雜化的課題。 Furthermore, in the conventional resin molding apparatus of the compression molding method exemplified in the above-mentioned patent documents, in the case where the upper mold of the molding mold has a cavity structure, the molding resin can be mounted on one workpiece. Since the conveyance and resin molding are performed in the above state, there is an advantage that the device configuration or the manufacturing process can be simplified. However, when the lower mold of the mold for molding has a mold cavity structure, there may be cases where the film (release film) or molding resin must be carried in as many quantities as necessary after the workpiece is carried in. There is a problem that the device configuration or the manufacturing process is complicated.

依此方式,特別是在下模具有模窩的樹脂模製裝置中,能夠有效率地供給工件及成形品、薄膜及模製樹脂,且構成或製程能夠簡化的裝置實為眾所期望。 In this way, especially in a resin molding apparatus having a mold cavity in a lower mold, a device capable of efficiently supplying a workpiece and a molded article, a film, and a molding resin and having a simplified structure or manufacturing process is desired.

本發明係有鑑於上述情形而研發者,目的在於提供一種樹脂模製裝置,其可透過謀求對工件、成形品進行供給、收納、厚度量測及搬送等的機構朝上下方向作階層式配置之構成的實現,相較於傳統裝置可減少設置面積,並且透過謀求將工件、成形品以二個排列狀態作處理、搬送之構成的實現,能夠較傳統裝置縮短製程時間。 The present invention has been developed in view of the above circumstances, and an object thereof is to provide a resin molding device which can be arranged in a hierarchical manner in a vertical direction by a mechanism for supplying, storing, measuring, and transporting a workpiece or a molded product. The realization of the structure can reduce the installation area compared with the conventional device, and by realizing the structure of processing and transporting the workpiece and the molded product in two alignment states, the process time can be shortened compared with the conventional device.

再者,本發明係有鑑於上述情形而研發者,目的在於提供能夠有效率地供給樹脂模製所用的工件及成形品、薄膜及模製樹脂,且其構成或製程能夠簡化的樹脂模製裝置及樹脂模製方法。 Furthermore, the present invention has been developed in view of the above circumstances, and an object thereof is to provide a resin molding apparatus capable of efficiently supplying a workpiece, a molded article, a film, and a molding resin used for resin molding and having a simplified structure or process. And resin molding method.

本發明係藉由如以下所載的解決手段作為一實施形態來解決前述課題。 The present invention solves the aforementioned problems by using a solution as described below as an embodiment.

本發明的樹脂模製裝置係為使用:模製用模具;及將基材中搭載有電子零件的工件搬送到前述模製用模具並且將以該模製用模具進行樹脂模製所得的成 形品搬出的搬送部,將前述工件進行樹脂模製的樹脂模製裝置,其要件為具備:供給匣升降機,使供收納前述工件的供給匣升降;收納匣升降機,配置在對前述供給匣升降機在上下方向相異的位置,使供收納前述成形品的收納匣升降;供給軌道,配設在前述供給匣升降機的前方,供載置從前述供給匣的預定位置取出的前述工件;收納軌道,一面載置前述成形品,一面使其向前述收納匣通過;工件量測器,配設在前述供給軌道的下方,對前述供給軌道上的前述工件從下面側量測前述工件的厚度;供給拾取器,保持前述供給軌道上的前述工件,並搬送到前述搬送部;及收納拾取器,保持前述搬送部上的前述成形品,並搬送到前述收納軌道;且以前述供給軌道、前述工件量測器、及前述收納軌道係朝上下方向重複並設。 The resin molding apparatus of the present invention uses: a mold for molding; and a product obtained by transferring a workpiece having electronic components mounted on a base material to the aforementioned mold for molding and resin-molding the mold using the mold for molding. The conveying unit for carrying out the shaped article is a resin molding device for resin-molding the workpiece, and the main requirements are: a supply cassette lifter for lifting the supply cassette for storing the workpiece; and a storage cassette lifter disposed on the supply cassette elevator The storage box for storing the molded product is raised and lowered at a position different from the vertical direction; the supply track is arranged in front of the supply box elevator for loading the workpiece taken out from the predetermined position of the supply box; the storage track, The molded product is placed while passing through the storage box; a work measuring device is disposed below the supply rail, and measures the thickness of the work from the lower side of the work on the supply rail; A holder that holds the workpiece on the supply rail and transfers it to the transfer unit; and a storage picker that holds the molded product on the transfer unit and transfers it to the storage track; and uses the supply rail and the workpiece to measure The device and the storage rail are repeatedly arranged in the vertical direction.

若依據此種構成,可謀求對工件、成形品進行供給、收納、厚度測定、及搬送等的機構朝上下方向階層式配置之構成的實現。因而,和各構成以平面式並設的傳統裝置相較,裝置的設置面積能大幅減少。 According to this configuration, it is possible to realize a configuration in which the mechanisms for supplying, storing, measuring thickness, and conveying the workpiece and the molded product are arranged in a stepwise manner in the vertical direction. Therefore, compared with a conventional device in which each configuration is juxtaposed, a device installation area can be greatly reduced.

再者,較佳為,前述供給軌道係以可將二個前述工件朝左右方向排列載置的方式構成為二列,且前述工件量測器具有將二列前述供給軌道上的二個前述工件的各厚度以預定的一次掃描進行量測的一台或者二台厚度感測器。若依據此種構成,可將二個工件W的相同對應位置藉一台或二台厚度感測器同時掃描。因而,由於可以掃描距離及掃描時間達最短的一次掃描量測二個工件W,故製程時間可大幅縮短。 Furthermore, it is preferable that the supply rail is configured in two rows so that the two workpieces can be placed in the left-right direction, and the workpiece measuring device has two workpieces on the two supply rails. Each thickness is measured by one or two thickness sensors with a predetermined scan. According to this structure, the same corresponding position of two workpieces W can be scanned simultaneously by one or two thickness sensors. Therefore, since two workpieces W can be measured in one scan with the shortest scanning distance and scanning time, the process time can be greatly shortened.

而且,較佳為,更具備從下面側將前述工件加熱的工件加熱器,且前述工件加熱器係在前述供給軌道的上方,可在對保持於前述供給拾取器之狀態的前述工件較外周更外側的位置、與和下面相對的位置之間進退移動地配設。若依據此種構成,可將藉供給拾取器保持之狀態的工件W在向上方移動的路徑中途藉工件加熱器進行加熱(預熱)。因而,和各構成以平面式並設的傳統裝置相較,裝置的設置面積可大幅減少。 Further, it is preferable to further include a work heater for heating the work from a lower surface side, and the work heater is located above the supply rail, and the work can be held in the state of being held in the supply picker more than an outer periphery. The outer position and the position opposite to the lower side are arranged to move forward and backward. According to this configuration, the workpiece W held by the supply picker can be heated (preheated) by the workpiece heater in the middle of the upward movement path. Therefore, compared with a conventional device in which each configuration is juxtaposed in a planar manner, the installation area of the device can be greatly reduced.

此外,較佳為,前述供給拾取器向前述搬送部搬送前述工件的左右方向搬入路、與前述收納拾取器從前述搬送部搬送前述成形品的左右方向搬出路係設定為朝前後方向並設。若依據此種構成,由於藉供給拾取器進行的工件搬入動作、與藉收納拾取器進行的成形品搬出動作可以同時併行方式進行,故和搬入路與搬出路重疊構成的傳統裝置相較,製程時間可大幅縮短。 In addition, it is preferable that the supply picker conveys the workpiece in the left-right direction into the conveying section, and the left-right conveyance path in which the storage picker conveys the molded product from the conveying section is set to be juxtaposed in the front-rear direction. According to this configuration, since the workpiece loading operation by the supply picker and the molded product loading operation by the storage picker can be performed simultaneously and in parallel, the manufacturing process is compared with the conventional device in which the loading path and the loading path are overlapped. Time can be drastically reduced.

再者,本發明的樹脂模製裝置係屬於使用具備將基材中搭載有電子零件之工件保持的上模、及形成有隔介著薄膜供給模製樹脂之模窩凹部的下模的模製用模具,將前述工件進行樹脂模製並加工為成形品的樹脂模製裝置,其要件為具備:搬送具,形成有和前述模窩凹部之形狀對應的貫通孔,屬於在前述貫通孔內保持前述模製樹脂且和前述薄膜一起搬送的器具;第1臺,供保持從薄膜捲筒送出且裁切成預定長度的前述薄膜,使前述經裁切的薄膜與前述搬送具組合;第2臺,載置前述薄膜保持在下面側之狀態的前述搬送具,且構成為 可移動;搬送具拾取器,保持前述薄膜保持在下面側之狀態的前述搬送具,並從前述第1臺搬送到前述第2臺;及分配器,將前述模製樹脂投入到前述第2臺上所載置的前述搬送具的前述貫通孔之內側。 In addition, the resin molding apparatus of the present invention is a molding method that uses an upper mold that holds a workpiece having electronic components mounted on a base material, and a lower mold that has a recessed cavity formed by supplying a mold resin through a film. A resin molding device for resin-molding the workpiece with a mold and processing the molded product into a molded article includes a conveyer having a through-hole corresponding to the shape of the recess in the die-hole, and is held in the through-hole. The aforementioned device for molding the resin and carrying it with the aforementioned film; the first unit for holding the aforementioned film which is fed out from the film roll and cut to a predetermined length, so that the cut film is combined with the aforementioned transporter; the second unit And the aforementioned conveyer in a state where the film is held on the lower side is placed, and is configured to Movable; a transporter picker, which holds the aforementioned transporter in a state where the film is held on the lower side, and transports it from the first station to the second station; and a dispenser, which feeds the molding resin to the second station The inside of the said through-hole of the said conveyance tool mounted on it.

若依據此種構成,透過謀求用於薄膜之供給的第1臺、及用於模製樹脂之供給的第2臺各別設置之構成的實現,將薄膜及模製樹脂保持在搬送具時所需的薄膜之準備或模製樹脂之準備等處理可併行地進行。因而,和藉相同臺進行這些處理的傳統裝置相較,製程時間可大幅縮短。 According to such a structure, the film and the molded resin are held at the time of the conveyance by realizing the configuration of the first unit for the supply of the film and the second unit for the supply of the molded resin. Preparations such as required film preparation or molding resin preparation can be performed in parallel. Therefore, compared with a conventional device that performs these processes on the same station, the process time can be greatly reduced.

而且,較佳為,前述搬送具具有以可將二片前述薄膜朝左右方向排列保持的方式具有二列薄膜保持部,並且在各前述薄膜保持部具有和各前述薄膜對應的樹脂投入孔作為前述貫通孔。若依據此種構成,可藉一台搬送具保持分別搭載有模製樹脂的二片薄膜,並向模製用模具搬送。因而,和藉一台搬送具逐一搬送薄膜的傳統裝置相較,製程時間可大幅縮短。 Further, it is preferable that the conveyer has two rows of film holding portions so that the two pieces of the film can be aligned and held in the left-right direction, and each of the film holding portions has a resin input hole corresponding to each of the films as the foregoing Through-hole. According to this configuration, two pieces of the film each having the molding resin mounted thereon can be held by one conveyer and conveyed to the mold for molding. Therefore, compared with the conventional device that uses one conveyer to convey the film one by one, the process time can be greatly shortened.

此外,較佳為,前述第1臺與前述薄膜捲筒係朝上下方向並設成階層狀。若依據此種構成,和各構成以平面式並設的傳統裝置相較,可減少裝置的設置面積。 In addition, it is preferable that the first stage and the film roll are arranged in a stepwise manner in a vertical direction. According to such a configuration, compared with a conventional device in which each configuration is juxtaposed, a device installation area can be reduced.

而且,較佳為,更具備從保持有前述薄膜及前述模製樹脂之狀態的前述搬送具之上面側進行加熱的樹脂加熱器。若依據此種構成,由於可在模製樹脂剛搭載於薄膜上後馬上加熱俾進行搭載表面液化,特別是 在使用顆粒狀、粉末狀的模製樹脂得情況中,可防止塵埃(樹脂的微細粉末等)的發生,以抑制發生製品不良的情形。 Further, it is preferable to further include a resin heater that heats from the upper surface side of the conveyer in a state where the film and the molded resin are held. According to this structure, since the molding resin can be heated immediately after being mounted on the film, the mounting surface can be liquefied, especially In the case of using a granular or powdery molding resin, the occurrence of dust (fine powder of resin, etc.) can be prevented to prevent the occurrence of product defects.

再者,本發明的樹脂模製裝置係屬於使用具備上模及下模的模製用模具,將基材中搭載有電子零件的工件進行樹脂模製並加工成成形品的樹脂模製裝置,其要件為具有:第1搬送部,在上面具備保持前述工件的第1保持部、及保持經樹脂模製所得的前述成形品的第2保持部,並保持前述工件向前述上模的預定保持位置搬送,且將前述成形品向前述模製用模具外的預定位置搬送;及第2搬送部,在下面具備:保持薄膜及模製樹脂的搬送具的第3保持部、及保持已用過薄膜的第4保持部,將前述薄膜及前述模製樹脂向前述下模的預定保持位置搬送,並保持前述薄膜及前述模製樹脂的保持狀態已解除的前述搬送具且向前述模製用模具外的預定位置搬送,並且保持樹脂模製所得的前述成形品已取出之狀態的前述下模中所殘留的前述已用過薄膜且向前述模製用模具外的預定位置搬送。 Furthermore, the resin molding device of the present invention is a resin molding device that resin-molds a workpiece on which electronic components are mounted on a base material and processes it into a molded product using a molding mold having an upper mold and a lower mold. The requirements are as follows: a first conveying section including a first holding section for holding the workpiece and a second holding section for holding the molded product obtained by resin molding, and holding the workpiece to a predetermined holding position on the upper mold. Position conveyance, and conveying the molded product to a predetermined position outside the mold for molding; and a second conveying section including a third holding section of a conveyer for holding a film and a molding resin, and holding used The fourth holding portion of the film transports the film and the molding resin to a predetermined holding position of the lower mold, and holds the transporter in which the holding state of the film and the molding resin has been released and moves the mold to the molding mold. The resin is transported to a predetermined position outside, and the used film remaining in the lower mold is kept in a state where the molded product obtained by resin molding is taken out, and is moved out of the mold for molding. Conveying the predetermined position.

若依據此種構成,由於可將樹脂模製所用的工件及成形品、以及薄膜及模製樹脂有效率地搬送,故相較於傳統裝置,可縮短製程時間。而且,裝置構成或製程也可簡化。 According to this configuration, since the workpieces and molded articles used for resin molding, and the films and molded resins can be efficiently conveyed, the processing time can be shortened compared to conventional devices. Moreover, the device configuration or manufacturing process can be simplified.

而且,較佳為,前述工件為狹條形的狹條形工件;前述薄膜為和前述狹條形工件對應的狹條形的狹條形薄膜; 前述第1保持部係以可將二個前述狹條形工件以令該狹條形工件的長邊方向平行的方式排列保持地具有二列工件保持部;前述第2保持部係以可將前述狹條形工件加工所得的二個前述成形品以令該成形品的長邊方向平行的方式排列保持地具有二列成形品保持部;前述搬送具係以可將二片前述狹條形薄膜以令該狹條形薄膜的長邊方向平行的方式排列保持地具有二列搬入薄膜保持部;前述第3保持部具有保持前述搬送具的搬送具保持部;前述第4保持部係以可將用畢的二片前述狹條形薄膜以令該狹條形薄膜的長邊方向平行的方式排列保持地具有二列搬出薄膜保持部。若依據此種構成,由於可實現工件及成形品、以及薄膜及模製樹脂各二個同時搬送的構成,故和逐一搬送的傳統裝置比較,製程時間可大幅縮短。 Furthermore, it is preferred that the workpiece is a narrow strip-shaped workpiece; the film is a narrow strip-shaped film corresponding to the narrow strip-shaped workpiece; The first holding portion is provided with two rows of workpiece holding portions so that the two strip-shaped workpieces can be aligned and held so that the longitudinal directions of the strip-shaped pieces are parallel. The two aforementioned molded products obtained by processing a strip-shaped workpiece have two rows of molded product holding portions arranged in such a manner that the longitudinal directions of the molded products are parallel; the transporter is configured to be capable of transferring two pieces of the aforementioned strip-shaped film to The strip-shaped film has two rows of carry-in film holding portions arranged in parallel so that the longitudinal directions thereof are parallel; the third holding portion includes a carrying device holding portion that holds the carrying device; and the fourth holding portion is provided for use. The two pieces of the narrow strip film have two rows of carry-out film holding portions so that the longitudinal directions of the narrow strip films are parallel to each other. According to this structure, since the workpiece and the molded product, and the film and the molded resin can be transferred simultaneously, the manufacturing time can be greatly shortened compared with the conventional device that transfers one by one.

此外,較佳為,前述工件為狹條形的狹條形工件、或較該狹條形工件更寬的寬幅工件;前述薄膜為和前述狹條形工件對應之狹條形的狹條形薄膜、或較該狹條形薄膜更寬的寬幅薄膜;前述第3保持部具有搬送具保持部作為前述搬送具,其係以可將二片前述狹條形薄膜以令該狹條形薄膜的長邊方向平行的方式排列保持地具有二列搬入薄膜保持部的一台狹條形薄膜搬送具、或共通保持具有保持一片前述寬幅薄膜的一個搬入薄膜保持部的寬幅薄膜搬送具。若依據此種構成,由於可依照要加工成成形品的工件是狹條形工件、或寬幅工件的哪一種工件,故可藉共通的搬送具保持部保持不同 的搬送具並搬入薄膜,故可設成以簡易的切換供給薄膜的構成。 In addition, it is preferable that the workpiece is a narrow strip-shaped workpiece, or a wide workpiece that is wider than the narrow strip-shaped workpiece; and the film is a narrow strip-shaped strip corresponding to the narrow strip-shaped workpiece. Film, or a wide film that is wider than the strip film; the third holding section has a transporter holding section as the transporting device, which can be used to make two strip films to make the strip film A strip-shaped film conveyer having two rows of carry-in film holders aligned in parallel with its long side direction, or a wide-film conveyer having one carry-in film holder that holds one of the wide-format films in common. According to this configuration, since the workpiece to be processed into a molded product is a narrow-shaped workpiece or a wide-shaped workpiece, it can be held different by a common conveyer holding portion. It can be configured to feed the film with a simple changeover by carrying the film into the conveyor.

再者,較佳為,前述第1保持部係將以可將二個前述狹條形工件以令該狹條形工件的長邊方向平行的方式排列保持地具有二列工件保持部的構成、與具有保持一個前述寬幅工件的一個工件保持部的構成設成可置換;前述第2保持部係將以可將前述狹條形工件加工所得的二個前述成形品以令該成形品的長邊方向平行的方式排列保持地具有二列成形品保持部的構成、與具有保持一個由前述寬幅工件加工所得的一個前述成形品的一個成形品保持部的構成設成可置換。若依據此種構成,即使是狹條形工件與寬幅工件的任一種工件,也可設成以第1保持部與第2保持部的簡易構成置換就可搬送工件與成形品的的構成。 Furthermore, it is preferable that the first holding portion has a structure having two rows of workpiece holding portions in which the two pieces of the strip-shaped workpieces can be aligned and held so that the longitudinal directions of the strip-shaped workpieces are parallel. It is replaceable with a structure having a workpiece holding portion that holds one of the wide workpieces; the second holding portion is formed by two of the molded products that can be obtained by processing the strip-shaped workpiece to make the molded product long. A configuration having two rows of molded product holding portions arranged side by side so as to be parallel to each other and a configuration having one molded product holding portion configured to hold one of the foregoing molded products obtained by processing the wide workpiece are replaceable. According to this structure, even if it is a workpiece of either a narrow strip shape or a wide width, it is possible to provide a structure that can transfer the workpiece and the molded product by replacing the simple structure of the first holding portion and the second holding portion.

而且,較佳為,前述薄膜為和前述狹條形工件對應之狹條形的狹條形薄膜、或較該狹條形薄膜更寬的寬幅薄膜;前述第4保持部具有薄膜保持部,其係在將二片前述狹條形薄膜令該狹條形薄膜的長邊方向平行地朝左右方向排列保持的二個狹條形區域、與保持一片前述寬幅薄膜的寬幅區域重複的區域配置有吸附並保持薄膜的複數個吸附部。若依據此種構成,透過複數個吸附部配置在不論是吸附保持狹條形薄膜的情況或吸附保持寬幅薄膜的情況均可保持薄膜的位置,而設成可搬出狹條形薄膜與寬幅薄膜的任一種薄膜而不用進行構成之置換等的構成。 Further, it is preferable that the thin film is a narrow narrow strip film corresponding to the narrow strip workpiece, or a wide film that is wider than the narrow strip film; the fourth holding portion includes a thin film holding portion, It is an area in which two strip-shaped films are arranged so that the long-side direction of the strip-shaped film is parallel to the left-right direction, and the area overlaps with the wide-area area holding one of the wide-format films. A plurality of suction sections are arranged to suck and hold the film. According to this configuration, the plurality of adsorption sections are arranged at positions where the thin film can be held regardless of whether the thin film is adsorbed and held or the wide film is adsorbed and held, and the narrow film and the wide film can be carried out. Any type of thin film is not required to be replaced or replaced.

此外,較佳為,前述搬送具設有複數台,俾在清理前述搬送具的清理製程、使前述薄膜組合於前述搬送具的薄膜設置製程、對已和前述薄膜組合的前述搬送具投下前述模製樹脂的樹脂投下製程、及對前述模製用模具供給前述薄膜及前述模製樹脂的樹脂供給製程等不同的製程進行處理。若依據此種構成,透過使各搬送具在用於進行樹脂模製的各製程內循環,可縮短搬送具在各製程的等待時間,使生產性提升。 In addition, it is preferable that the transfer tool is provided with a plurality of sets, and the cleaning process of cleaning the transfer tool, the film setting process of combining the film with the transfer tool, and dropping the mold on the transfer tool that has been combined with the film. Resin casting processes and different processes, such as a resin supply process for supplying the film and the molding resin, to the mold for molding are processed. According to such a structure, by circulating each conveyer in each process for resin molding, the waiting time of the conveyer in each process can be shortened, and productivity can be improved.

而且,較佳為,前述搬送具具有產生吸附力俾保持前述薄膜的第1吸附孔;前述第3保持部具有以前述搬送具保持在預定位置的狀態配設於和前述第1吸附孔連通的位置俾產生吸附力的第2吸附孔。若依據此種構成,可在薄膜吸附於搬送具下面的狀態下,藉第3保持部搬送該搬送具。 Further, it is preferable that the transporter has a first adsorption hole that generates an adsorption force to hold the film, and the third holding portion has a state that the transporter is held at a predetermined position and is disposed in communication with the first adsorption hole. Position 吸附 is the second suction hole where the suction force is generated. According to this configuration, the transporter can be transported by the third holding unit while the film is adsorbed on the lower surface of the transporter.

再者,本發明的樹脂模製方法係為使用前述的樹脂模製裝置進行樹脂模製的樹脂模製方法,其要件為:前述搬送具設有複數台;在清理前述搬送具的清理製程、使前述薄膜組合在前述搬送具的薄膜設置製程、對已和前述薄膜組合的前述搬送具投下前述模製樹脂的樹脂投下製程、與對前述模製用模具供給前述薄膜及前述模製樹脂的樹脂供給製程之間,使前述複數台搬送具進行不同製程的處理。若依據此種構成,透過使各搬送具在用於進行樹脂模製的各製程內循環,可縮短各製程的搬送具等待時間,使生產性提升。 In addition, the resin molding method of the present invention is a resin molding method for resin molding using the aforementioned resin molding apparatus, and its essentials are: the transporter is provided with a plurality of units; the cleaning process for cleaning the transporter, The film installation process of combining the film on the conveyor, the resin casting process of casting the molding resin onto the conveyor combined with the film, and the resin of supplying the film and the molding resin to the molding die. During the supply process, the plurality of carriers are processed in different processes. According to this configuration, by circulating each conveyer in each process for resin molding, the conveyer waiting time in each process can be shortened, and productivity can be improved.

若依據本發明,透過謀求對工件、成形品進行供給、收納、厚度量測、及搬送等的機構朝上下方向階層式配置之構成的實現,設置面積可較傳統裝置減少。再者,透過謀求將工件、成形品以二個排列的狀態施行處理、搬送之構成的實現,可較傳統裝置縮短製程時間。 According to the present invention, by realizing a structure in which a mechanism for supplying, storing, measuring thickness, and conveying a workpiece or a molded product is arranged in a vertical direction, the installation area can be reduced compared to a conventional device. In addition, by realizing a structure in which workpieces and molded products are processed and transported in two aligned states, the processing time can be shortened compared to conventional devices.

此外,若依據本發明,能夠謀求在一具下模中設置二個或二個以上模窩並且在各模窩分別配置工件同時進行樹脂模製之構成的實現。特別是由於可有效率地供給樹脂模製所用的工件及成形品、以及薄膜及模製樹脂,故可較傳統裝置縮短製程時間。而且,可將裝置構成或製程簡化。 In addition, according to the present invention, it is possible to realize a configuration in which two or more mold cavities are provided in a lower mold, and workpieces are respectively disposed in each mold cavity to perform resin molding. In particular, since workpieces and molded articles for use in resin molding, as well as films and molded resins can be efficiently supplied, the process time can be shortened compared to conventional devices. Moreover, the device configuration or manufacturing process can be simplified.

1、2‧‧‧樹脂模製裝置 1, 2‧‧‧ resin molding device

100A、500A‧‧‧工件處理單元 100A, 500A‧‧‧ Workpiece processing unit

100B、500B‧‧‧壓製單元 100B, 500B‧‧‧pressing unit

100C、500C‧‧‧分料單元 100C, 500C‧‧‧Distributing unit

103‧‧‧供給匣升降機 103‧‧‧Supply Box Lift

104、104A、104B‧‧‧供給軌道 104, 104A, 104B‧‧‧ Supply Track

108、108A、108B‧‧‧收納軌道 108, 108A, 108B‧‧‧Storage rail

113‧‧‧收納匣升降機 113‧‧‧Storage Box Lift

114‧‧‧工件量測器 114‧‧‧ Workpiece measuring device

116‧‧‧工件加熱器 116‧‧‧Workpiece heater

118‧‧‧成形品量測器 118‧‧‧formed product measuring device

120‧‧‧供給拾取器 120‧‧‧ supply picker

122‧‧‧第1收納拾取器 122‧‧‧The first storage picker

124‧‧‧第2收納拾取器 124‧‧‧ 2nd storage picker

202‧‧‧模製用模具 202‧‧‧mould

204‧‧‧上模 204‧‧‧Mould

206‧‧‧下模 206‧‧‧ lower mold

210‧‧‧第1裝載器(第1搬送部) 210‧‧‧The first loader (the first transfer section)

212‧‧‧第2裝載器(第2搬送部) 212‧‧‧Second Loader (Second Transfer Section)

302‧‧‧準備臺 302‧‧‧ Preparation Desk

304‧‧‧搬送具拾取器 304‧‧‧Conveyor Pickup

306、306A、306B‧‧‧薄膜捲筒 306, 306A, 306B‧‧‧ film roll

308‧‧‧薄膜臺(第1臺) 308‧‧‧Film stage (1st stage)

310‧‧‧樹脂投下臺(第2臺) 310‧‧‧ Resin dropped (2nd)

312‧‧‧分配器 312‧‧‧Distributor

314‧‧‧樹脂加熱器 314‧‧‧Resin heater

400‧‧‧搬送具 400‧‧‧ transport

F‧‧‧薄膜 F‧‧‧ film

Fd‧‧‧已用過薄膜 Fd‧‧‧ Has used film

R‧‧‧模製樹脂 R‧‧‧moulding resin

W‧‧‧工件 W‧‧‧ Workpiece

Wp‧‧‧成形品 Wp‧‧‧shaped products

圖1為本發明實施形態的樹脂模製裝置例的平面圖。 FIG. 1 is a plan view of an example of a resin molding apparatus according to an embodiment of the present invention.

圖2為圖1的II-II位置的左側視圖。 FIG. 2 is a left side view of the position II-II in FIG. 1.

圖3為圖1的樹脂模製裝置之供給軌道例的平面圖。 3 is a plan view of an example of a supply rail of the resin molding apparatus of FIG. 1.

圖4為圖1的樹脂模製裝置之收納軌道例的平面圖。 FIG. 4 is a plan view of an example of a storage rail of the resin molding apparatus of FIG. 1.

圖5為圖1的V-V位置的左側視圖。 Fig. 5 is a left side view of the V-V position in Fig. 1.

圖6為圖1的VI-VI位置的左側視圖。 FIG. 6 is a left side view of the VI-VI position in FIG. 1.

圖7為圖1的VII-VII位置的左側視圖。 FIG. 7 is a left side view of the position VII-VII in FIG. 1.

圖8為圖1的VIII-VIII位置的前視圖。 FIG. 8 is a front view of the VIII-VIII position of FIG. 1.

圖9為圖1的樹脂模製裝置之搬送具例的平面圖。 FIG. 9 is a plan view of an example of a carrier of the resin molding apparatus of FIG. 1. FIG.

圖10為圖1的樹脂模製裝置之模製用模具例的平面圖。 FIG. 10 is a plan view of an example of a mold for molding the resin molding apparatus of FIG. 1.

圖11為本發明實施形態的樹脂模製裝置的動作說明圖。 FIG. 11 is an operation explanatory diagram of the resin molding apparatus according to the embodiment of the present invention.

圖12為繼圖11的動作說明圖。 FIG. 12 is an explanatory diagram of an operation subsequent to FIG. 11.

圖13為繼圖12的動作說明圖。 FIG. 13 is an explanatory diagram of an operation subsequent to FIG. 12.

圖14為繼圖13的動作說明圖。 FIG. 14 is an explanatory diagram of an operation subsequent to FIG. 13.

圖15為繼圖14的動作說明圖。 FIG. 15 is an explanatory diagram of an operation subsequent to FIG. 14.

圖16為繼圖15的動作說明圖。 FIG. 16 is an explanatory diagram of an operation subsequent to FIG. 15.

圖17為繼圖16的動作說明圖。 FIG. 17 is an explanatory diagram of an operation subsequent to FIG. 16.

圖18為繼圖17的動作說明圖。 FIG. 18 is an explanatory diagram of an operation subsequent to FIG. 17.

圖19為繼圖18的動作說明圖。 FIG. 19 is an explanatory diagram of an operation subsequent to FIG. 18.

圖20為繼圖19的動作說明圖。 FIG. 20 is an explanatory diagram of an operation subsequent to FIG. 19.

圖21為繼圖20的動作說明圖。 FIG. 21 is an explanatory diagram of the operation following FIG. 20.

圖22為繼圖21的動作說明圖。 FIG. 22 is an explanatory diagram of an operation subsequent to FIG. 21.

圖23為繼圖22的動作說明圖。 FIG. 23 is an explanatory diagram of an operation subsequent to FIG. 22.

圖24為繼圖23的動作說明圖。 FIG. 24 is an explanatory diagram of the operation subsequent to FIG. 23.

圖25為繼圖24的動作說明圖。 FIG. 25 is an explanatory diagram of an operation subsequent to FIG. 24.

圖26為繼圖25的動作說明圖。 FIG. 26 is an explanatory diagram of the operation subsequent to FIG. 25.

圖27為繼圖26的動作說明圖。 FIG. 27 is an explanatory diagram of an operation subsequent to FIG. 26.

圖28為本發明實施形態的樹脂模製裝置之變化例的平面圖。 Fig. 28 is a plan view showing a modification of the resin molding apparatus according to the embodiment of the present invention.

圖29為本發明實施形態的控制構成例的方塊圖。 FIG. 29 is a block diagram showing an example of a control structure according to the embodiment of the present invention.

圖30為本發明實施形態的樹脂供給動作例的流程圖。 Fig. 30 is a flowchart of an example of a resin supply operation according to the embodiment of the present invention.

發明的實施形態Embodiment of the invention (整體構成) (Overall composition)

以下,參照附圖,針對本發明的實施形態作詳細說明。圖1為本發明實施形態之樹脂模製裝置1的例子的概略圖(平面圖)。再者,圖2至圖10為顯示樹脂模製裝置1的各構成之詳細的概略圖。另外,在說明的權宜上,各圖中,有藉箭號說明樹脂模製裝置1的前後、左右、上下方向的情形。此外,用以說明各實施形態的全部圖示中,具有相同機能的構件均附註相同的符號,其有省略重複說明的情形。 Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. FIG. 1 is a schematic view (plan view) of an example of a resin molding apparatus 1 according to an embodiment of the present invention. In addition, FIGS. 2 to 10 are detailed schematic diagrams showing respective configurations of the resin molding apparatus 1. In addition, in the expediency of description, the front-back, left-right, and up-down directions of the resin molding apparatus 1 may be described by arrows in each drawing. In addition, in all the drawings for explaining each embodiment, members having the same function are denoted by the same reference numerals, and repeated description may be omitted.

本實施形態的樹脂模製裝置1係為使用具備上模204及下模206的模製用模具202來進行工件(被成形品)W之樹脂模製成形的裝置。以下,樹脂模製裝置1以上模204保持工件W,以薄膜(脫模薄膜)F覆蓋設在下模206的模窩(cavity)208(包含一部分模具面206a)並供給模製樹脂R,進行上模204與下模206的夾緊動作,且使工件W浸漬於熔融的模製樹脂R,進行樹脂模製的壓縮成形裝置作為主要例子來說明。另外,模窩208係藉在下模206的上面凹陷成預定形狀的模窩凹部209來界定形狀,且透過介著薄膜F供給模製樹脂R即可壓縮成形。 The resin molding apparatus 1 of this embodiment is a device for molding a resin (workpiece) W using a molding die 202 including an upper mold 204 and a lower mold 206. Hereinafter, the resin molding apparatus 1 holds the workpiece W in the upper mold 204, covers the cavity 208 (including a part of the mold surface 206a) provided in the lower mold 206 with a film (release film) F, and supplies the molding resin R to the upper part. A description will be given as a main example of a compression molding apparatus in which the mold 204 and the lower mold 206 are clamped, and the workpiece W is immersed in the molten molding resin R to perform resin molding. In addition, the mold nest 208 is defined by a mold recess 209 recessed into a predetermined shape on the upper surface of the lower mold 206, and the molding resin R can be compressed by supplying the molding resin R through the film F.

首先,作為成形對象的工件W具備有複數個電子零件Wb以行列狀搭載於基材Wa的構成。更具體 而言,基材Wa的例子可舉出有形成狹條形的樹脂基板、陶瓷基板、金屬基板、托載板(carrier plate)、導線框架、晶圓等板狀構件(條帶狀的矩形工件)。再者,電子零件Wb的例子可舉出有半導體晶片、MEMS晶片、被動元件、散熱板、導電構件、間隔片等。另外,如後所述,特別是可和使用正方形、圓形者的情況對應的裝置變化例也可考慮作為基材Wa。 First, the workpiece W as a molding object has a configuration in which a plurality of electronic components Wb are mounted in a matrix on the substrate Wa. more detail Examples of the substrate Wa include plate-shaped members (strip-shaped rectangular workpieces) such as resin substrates, ceramic substrates, metal substrates, carrier plates, lead frames, and wafers that are formed into narrow strips. ). Examples of the electronic component Wb include a semiconductor wafer, a MEMS wafer, a passive element, a heat sink, a conductive member, and a spacer. In addition, as will be described later, particularly, a device variation that can be used when a square or a circle is used can be considered as the base material Wa.

將電子零件Wb搭載於基材Wa的方法例有利用倒裝晶片實裝、導線接合實裝等搭載方法。或者,在樹脂模製後將基材(玻璃製或金屬製托載板)Wa從成形品剝離的構成時,也有使用具熱剝離性的黏膠帶或藉紫外線照射硬化的紫外線硬化性樹脂來貼設電子零件Wb的方法。 Examples of the method of mounting the electronic component Wb on the substrate Wa include mounting methods such as flip chip mounting and wire bonding mounting. Alternatively, when the base material (glass or metal support plate) Wa is peeled off from the molded product after resin molding, there is also a method using a heat-adhesive adhesive tape or an ultraviolet-curable resin hardened by ultraviolet irradiation. A method of setting the electronic component Wb.

另一方面,模製樹脂R的例子可使用顆粒狀的熱硬化性樹脂(例如,含充填料的環氧系樹脂)。另外,並不限定於上述的狀態,也可為液狀、粉末狀、圓柱狀、板狀、片狀等其他狀態(形狀)。 On the other hand, as an example of the molding resin R, a particulate thermosetting resin (for example, a filled epoxy resin) can be used. In addition, it is not limited to the above-mentioned state, and may be other states (shapes) such as a liquid state, a powder state, a columnar state, a plate state, and a sheet state.

此外,薄膜F的例子中,耐熱性、剝離容易性、柔軟性、伸展性優異的薄膜材,例如,PTFE(聚四氟乙烯)、ETFE(聚四氟乙烯聚合物)、PET、FEP、氟含浸玻璃纖維布、聚丙烯、聚偏二氯乙烯等均甚合用。該薄膜F可用例如和狹條形工件W對應的狹條形式狹條形薄膜。 In the case of the film F, a film material having excellent heat resistance, ease of peeling, flexibility, and stretchability, such as PTFE (polytetrafluoroethylene), ETFE (polytetrafluoroethylene polymer), PET, FEP, fluorine Impregnated glass fiber cloth, polypropylene, polyvinylidene chloride, etc. are very suitable. The film F can be, for example, a strip-shaped thin film corresponding to the strip-shaped workpiece W.

接著,就本實施形態的樹脂模製裝置1的概要加以說明。如圖1所示,樹脂模製裝置1具備有: 工件處理單元100A,主要進行工件W之供給、及樹脂模製後成形品Wp之收納;壓製單元100B,主要進行將工件W進行樹脂模製成為成形品Wp之加工;及分料單元100C,主要進行薄膜F及模製樹脂R之供給、及樹脂模製後已用過薄膜Fd之收納(廢棄)等,作為主要構成。另外,本實施形態中,係舉在一具下模中設有二個模窩並且配置二個工件W總括地進行樹脂模製而同時製得二個成形品Wp之壓縮成形方式的樹脂模製裝置為例加以說明。 Next, the outline of the resin molding apparatus 1 of this embodiment is demonstrated. As shown in FIG. 1, the resin molding apparatus 1 includes: The workpiece processing unit 100A mainly supplies the workpiece W and the storage of the molded product Wp after the resin molding; the pressing unit 100B mainly performs the resin molding of the workpiece W into the molded product Wp; and the dispensing unit 100C, mainly The main components are the supply of the film F and the molded resin R, and the storage (disposal) of the used film Fd after the resin molding. In addition, in this embodiment, a resin molding method of a compression molding method in which two mold cavities are provided in one lower mold and two workpieces W are arranged to perform resin molding collectively to simultaneously produce two molded products Wp is provided. The device is described as an example.

本實施形態中,如工件處理單元100A、壓製單元100B及分料單元100C等單元係經予以連結並組裝。在一個例子中,工件處理單元100A、壓製單元100B及分料單元100C係在左右方向上自左方依序並設。另外,還有任意數量的導軌(未圖示)係跨越各單元之間設置成直線狀,搬送工件W等的第1裝載器(第1搬送部)210、及搬送薄膜F等的第2裝載器(第2搬送部)212係設置成可沿著任意的導軌移動在預定的單元間。另外,由於這些裝載器210、212並非僅執行例如工件W對模製用模具202的搬入動作,也執行成形品Wp從模製用模具202的搬出動作,故亦兼有作為卸載器(off loader)的功能。 In this embodiment, units such as the workpiece processing unit 100A, the pressing unit 100B, and the dispensing unit 100C are connected and assembled. In one example, the workpiece processing unit 100A, the pressing unit 100B, and the material distribution unit 100C are sequentially arranged in the left-right direction from the left. In addition, an arbitrary number of guide rails (not shown) are provided in a linear shape across the units, and the first loader (first conveying unit) 210 for conveying workpieces W and the like, and the second load for conveying films F, etc. The device (second conveying section) 212 is provided so as to be movable between predetermined units along an arbitrary guide rail. In addition, these loaders 210 and 212 perform not only the loading operation of, for example, the workpiece W into the molding die 202, but also the loading operation of the molded product Wp from the molding die 202, and therefore also serve as an off loader (off loader). ) Function.

從而,藉由改變單元的構成,即可變更樹脂模製裝置1的構成樣態。例如,圖1所示的構成雖為設置三台壓製單元100B的例子,但也可構成為壓製單元100B只設置一台,或者由二台或四台以上連結設置的樹 脂模製裝置(未圖示)。此外,也可設置其他的單元。例如,設置供給異於分料單元100C之模製樹脂R的單元,或供給在模具內和工件W組裝之構件的單元(未圖示)。在一個例子中,該構件也可為產生散熱板或遮蔽板功能的板狀構件。在此情況中,也可在將板狀構件重疊於薄膜F上之後,將模製樹脂R供給到板狀構件上再進行搬送。 Therefore, the configuration of the resin molding apparatus 1 can be changed by changing the configuration of the unit. For example, although the configuration shown in FIG. 1 is an example in which three pressing units 100B are provided, it may be configured such that only one pressing unit 100B is provided, or two or more trees are connected to each other. Fat molding device (not shown). In addition, other units may be provided. For example, a unit that supplies a molding resin R different from the dispensing unit 100C or a unit (not shown) that supplies a component assembled with the workpiece W in the mold is provided. In one example, the member may also be a plate-like member that functions as a heat sink or a shield. In this case, after the plate-shaped member is superposed on the film F, the mold resin R may be supplied to the plate-shaped member and then conveyed.

(工件處理單元) (Workpiece processing unit)

接著,以樹脂模製裝置1具備的工件處理單元100A的構成為主,詳細說明有關工件W及成形品Wp的搬送動作。 Next, the configuration of the workpiece processing unit 100A included in the resin molding apparatus 1 will be described in detail, and the transport operation of the workpiece W and the molded product Wp will be described in detail.

首先,工件處理單元100A具備:供給匣升降機103,使收納有複數個工件W的供給匣102升降;及收納匣升降機113,使收納有複數個成形品Wp的收納匣112升降。該收納匣升降機113係配置在對供給匣升降機103在上下方向上不同的位置。例如,這些升降機103、113可以在平面視圖上具有重疊的狀態朝上下方向並設成階層狀。此處,供給匣102、收納匣112可使用公知的堆疊匣、狹口匣(slit magazin)等。本實施形態中,電子零件Wb的搭載面均以向下的狀態分別收納工件W及成形品Wp。另外,從保護電子零件Wb的觀點,較佳為使用將工件W插入並保持在匣框的內側彼此相向之凹部的狹口匣,將工件W彼此間分離保持。此外,供給匣升降機103係構成為可透過保持著供給匣102升降的方 式將工件W從預定的位置取出。收納匣升降機113則構成為可透過保持著收納匣112升降的方式將成形品Wp收納在預定的位置。 First, the workpiece processing unit 100A includes a supply cassette lifter 103 that raises and lowers a supply cassette 102 that stores a plurality of workpieces W, and a storage cassette lifter 113 that raises and lowers a storage cassette 112 that stores a plurality of molded products Wp. The storage box elevator 113 is arranged at different positions in the vertical direction to the supply box elevator 103. For example, the elevators 103 and 113 may be arranged in a layered manner in a vertical direction with a state of overlapping in a plan view. Here, the supply cassette 102 and the storage cassette 112 can use a well-known stacking cassette, a slit magazin, etc. In the present embodiment, the mounting surfaces of the electronic components Wb each accommodate the workpiece W and the molded product Wp in a downward state. In addition, from the viewpoint of protecting the electronic component Wb, it is preferable to use a narrow box that inserts and holds the workpieces W in the recessed portions facing each other inside the cassette frame to separate and hold the workpieces W from each other. In addition, the supply cassette lifter 103 is configured to be capable of being raised and lowered by holding the supply cassette 102. The workpiece W is taken out from a predetermined position. The storage box elevator 113 is configured to store the molded product Wp at a predetermined position by holding the storage box 112 up and down.

接著,工件處理單元100A具備供給軌道104,其係配設在供給匣102的前方,供載置自供給匣102取出之工件W。本實施形態中,在供給匣102與供給軌道104之間具備有讓工件W通過的中繼軌道106,但也可設成將其省略的構成。另外,工件W從供給匣102向供給軌道104上的移動可用公知的推動器等(未圖示)。 Next, the workpiece processing unit 100A includes a supply rail 104 which is disposed in front of the supply cassette 102 and mounts the workpiece W taken out from the supply cassette 102. In the present embodiment, a relay rail 106 is provided between the supply cassette 102 and the supply rail 104 to allow the workpiece W to pass therethrough, but a configuration in which it is omitted may be provided. The movement of the workpiece W from the supply cassette 102 to the supply rail 104 can be performed by a known pusher or the like (not shown).

此處,供給軌道104係避開電子零件Wb的搭載位置,藉一對軌道從下方支持工件W的縱長邊,在側方將工件W朝前後方向引導。再者,供給軌道104係以可將二個工件W在短邊方向朝左右方向排列載置的方式構成為二列(圖中104A、104B),並且具有可朝左右方向移動的移動機構(未圖示)。藉此構成,從供給匣102取出的工件W載置於一方的列(例如,104A)之後,使供給軌道104A、104B朝左右任一方的預定方向(例如,右方)移動,即可將下一個工件W載置於另一方的列(例如、104B)。此外,供給軌道104A、104B的各軌道係配合工件W的寬度而將軌道間的寬度構成為可變。 Here, the supply rail 104 avoids the mounting position of the electronic component Wb, supports the longitudinal side of the workpiece W from below by a pair of rails, and guides the workpiece W in the front-rear direction from the side. In addition, the supply rail 104 is configured in two rows (104A, 104B in the figure) so that two workpieces W can be arranged in the short-side direction and left-right direction, and has a moving mechanism (not shown) Icon). With this configuration, after the workpieces W taken out from the supply cassette 102 are placed in one row (for example, 104A), the supply rails 104A and 104B are moved in a predetermined direction (for example, right) of the left and right, and the bottom One workpiece W is placed in the other column (for example, 104B). In addition, each of the supply rails 104A and 104B has a variable width between the rails in accordance with the width of the workpiece W.

其次,工件處理單元100A具備工件量測器114,其係配設在供給軌道104的下方,並且構成為可朝前後及左右方向移動,俾對供給軌道104上的工件W從下面側(電子零件Wb的搭載面側)量測工件W之厚度。該工件量測器114係以雷射位移計或攝像機(單眼攝像機 或複眼攝像機)構成,並根據這些量測器的輸出資料量測工件W之厚度。另外,此處所稱的「厚度量測」係包含基材Wa中搭載電子零件Wb的有無、電子零件Wb搭載高度的量測、搭載位置偏移的量測、搭載數的量測等所需的量測。根據此處之「厚度量測」的結果,例如電子零件Wb搭載的有無或搭載高度等,計算出工件W中所搭載的電子零件Wb的容積,並透過調整模製樹脂R的供給量,就可高精確度地控制成形品的成形厚度。 Next, the workpiece processing unit 100A includes a workpiece measuring device 114, which is disposed below the supply rail 104 and is configured to be movable in the front-rear and left-right directions. The workpiece W on the supply rail 104 is moved from the lower side (electronic parts). Wb mounting surface side) The thickness of the workpiece W is measured. The workpiece measuring device 114 is a laser displacement meter or a camera (monocular camera). Or a compound eye camera), and measure the thickness of the workpiece W based on the output data of these measuring devices. In addition, the "thickness measurement" referred to here includes the presence or absence of the electronic component Wb mounted on the base material Wa, the measurement of the mounting height of the electronic component Wb, the measurement of the mounting position deviation, and the measurement of the number of mountings. Measure. Based on the results of "thickness measurement" here, such as the presence or absence of the mounting of the electronic component Wb, the volume of the electronic component Wb mounted in the workpiece W is calculated, and the supply amount of the molding resin R is adjusted by adjusting It is possible to control the molding thickness of a molded product with high accuracy.

此處,工件量測器114具有用於量測二列供給軌道104A、104B上的二個工件W之各個厚度的二台厚度感測器114a、114b。在一個例子中,在和右側列工件W對應的位置配設有厚度感測器114a,並且在和左側列工件W對應的位置配設有厚度感測器114b。藉此構成,即可同時將各個工件W的相同對應位置加以掃描,並以掃描距離及掃描時間達到最短的一次掃描量測二個工件W。因而,製程時間可大幅縮短。一次掃描的工件W量測動作,只要沿著將工件W縱向或橫向作n分割(n為2以上的整數)之直線的接近端部彼此間之連結線所構成的模式(pattern),使工件W對厚度感測器114a、114b一面移動,一面以預定間隔量測工件W即可。藉此方式,即可以按照預定模式的「一個掃描動作(一次掃描)」任意量測工件W的基材Wa之厚度或電子零件Wb之高度等。此外,本實施形態的構成中,可將掃描動作(往前後左右方向的移動)藉由使載置工件W用的供給軌道104A、104B朝左右方向移動動作的機構、及使工件量測 器114朝前後方向移動動作的機構以簡易的構成來實施。另外,和供給軌道104A、104B同樣的,係配合工件W的寬度將厚度感測器114a、114b的間隔構成為可變。藉此方式,即使工件W的大小(寬度)改變,也可以於一次掃描量測二個工件W。 Here, the workpiece measuring device 114 includes two thickness sensors 114a and 114b for measuring each thickness of the two workpieces W on the two-row supply rails 104A and 104B. In one example, a thickness sensor 114a is disposed at a position corresponding to the workpiece W in the right column, and a thickness sensor 114b is disposed at a position corresponding to the workpiece W in the left column. With this configuration, the same corresponding positions of the respective workpieces W can be scanned at the same time, and two workpieces W can be measured in one scan with the shortest scanning distance and scanning time. Therefore, the process time can be greatly reduced. The measurement of the workpiece W in one scan only requires a pattern consisting of connecting lines between the close ends of a straight line that divides the workpiece W longitudinally or horizontally by n (n is an integer of 2 or more), so that the workpiece W may measure the workpiece W at predetermined intervals while moving the thickness sensors 114a and 114b. In this way, the thickness of the base material Wa of the workpiece W or the height of the electronic component Wb can be arbitrarily measured in accordance with the "one scanning operation (one scanning)" of the predetermined pattern. In addition, in the configuration of this embodiment, a scanning operation (moving forward, backward, leftward, rightward, and rightward) can be performed by moving the supply rails 104A, 104B for placing the workpiece W in the leftward and rightward direction, and measuring the workpiece. The mechanism that moves the actuator 114 in the front-back direction is implemented with a simple structure. In addition, similarly to the supply rails 104A and 104B, the interval between the thickness sensors 114a and 114b is made variable in accordance with the width of the workpiece W. In this way, even if the size (width) of the workpiece W is changed, two workpieces W can be measured in one scan.

另外,作為變化例,也可在一次掃描的工件W量測動作中,以作為厚度感測器114a、114b的攝像機在一次朝前後方向的移動中將預定的寬度總括地拍攝而進行工件W整面厚度的量測。而且,也可使工件量測器114向前後左右移動,俾實施掃描動作。此外,也可設為具有一台厚度感測器,且以預定的一次掃描將二個工件W依序量測的構成(未圖示)。 In addition, as a modification, the workpiece W may be collectively photographed with a camera that is a thickness sensor 114a, 114b in a single movement in the forward and backward direction during a workpiece W measurement operation in one scan. Measurement of surface thickness. In addition, the workpiece measuring device 114 may be moved forward, backward, leftward, and rightward to perform a scanning operation. In addition, it is also possible to have a structure (not shown) having one thickness sensor and sequentially measuring two workpieces W with a predetermined one scan.

再者,工件量測器114雖以和後述工件W的供給動作的關係對供給軌道104上的工件W從下面側量測工件W之厚度較佳;但也可設為從上面側對工件W量測工件W厚度的構成。在此情況中,工件量測器114也可設在讓工件W通過的中繼軌道106的上下任一面或者兩方。另外,工件量測器114也可採用不僅讀取工件W的厚度,也讀取工件W上所附設的識別資訊(例如二維碼)的構成。再者,也可將可讀取工件W之二維碼的讀碼器115設在中繼軌道106的上下任一面。這種工件W的識別資訊可透過附設成例如連號或不重複碼,而辨別是哪一工件W。藉由將樹脂模製的詳細條件等對該識別資訊建立關聯並加以記錄,即可實現如後述的提高追蹤能力的程序。 In addition, although the workpiece measuring device 114 measures the thickness of the workpiece W from the lower side of the workpiece W on the supply rail 104 in a relationship with the feeding operation of the workpiece W described later, it may be set to the workpiece W from the upper side. The thickness of the workpiece W is measured. In this case, the workpiece measuring device 114 may be provided on either or both of the upper and lower surfaces of the relay rail 106 through which the workpiece W passes. The workpiece measuring device 114 may be configured to read not only the thickness of the workpiece W but also identification information (for example, a two-dimensional code) attached to the workpiece W. Furthermore, a code reader 115 capable of reading the two-dimensional code of the workpiece W may be provided on either the upper or lower surface of the relay rail 106. The identification information of the workpiece W can be identified by a serial number or a non-repeating code to identify which workpiece W is. By associating and recording the identification information with detailed conditions such as resin molding, a procedure for improving the tracking ability as described later can be realized.

接著,工件處理單元100A具備將供給軌道104上所載置的工件W保持並向預定位置搬送的供給拾取器120。另外,下文中所稱的「拾取器(pickup)」係相當於將預定的對象物在任意的位置間移送的拾取並放置(pick and place)機構的構成。該供給拾取器120中,在保持工件W的機構方面已有公知的保持機構(例如,具有保持爪並進行挾持的構成、具有連通於吸附裝置的吸附孔並進行吸附的構成等)(未圖示)。另外,吸附裝置可用真空泵等公知的機構(以下相同)。此處,供給拾取器120係構成為可朝左右及上下方向移動。藉此構成,透過將供給軌道104上所載置的工件W保持並進行上升動作,最終都能向後述第1保持部210A進行搬送(供給)。 Next, the workpiece processing unit 100A includes a supply picker 120 that holds the workpiece W placed on the supply rail 104 and transfers the workpiece W to a predetermined position. In addition, the "pickup" mentioned below is a structure equivalent to the pick-and-place mechanism which moves a predetermined target object between arbitrary positions. In this supply picker 120, a known holding mechanism (for example, a structure having a holding claw and holding it, a structure having a suction hole communicating with an adsorption device and performing suction, etc.) is known for a mechanism for holding the workpiece W (not shown)示). In addition, as the adsorption device, a known mechanism such as a vacuum pump (the same applies hereinafter). Here, the supply picker 120 is configured to be movable in the left-right and up-down directions. With this configuration, by holding and raising the workpiece W placed on the supply rail 104, the workpiece W can be finally transported (supply) to the first holding portion 210A described later.

再者,本實施形態的供給拾取器120的構成係使上述的保持機構朝左右方向二列並設在和二列供給軌道104A、104B上的二個工件W對應的位置。藉此構成,就可將二列供給軌道104A、104B上的二個工件W以朝左右方向排列狀態同時保持並進行搬送。換言之,可將工件W令其長邊方向平行地排列保持。 In addition, the configuration of the supply picker 120 of this embodiment is such that the above-mentioned holding mechanisms are arranged in two rows in the left-right direction and are provided at positions corresponding to the two workpieces W on the two-row supply rails 104A and 104B. With this configuration, the two workpieces W on the two-row supply rails 104A and 104B can be held and transported while being aligned in the left-right direction. In other words, the workpieces W can be aligned and held in parallel in the longitudinal direction.

其次,工件處理單元100A具有將工件W從下面側加熱的工件加熱器116。此處,作為將工件W加熱的構成,係在工件加熱器116的上面配設公知的加熱機構(例如,電熱線加熱器、紅外線加熱器等)(未圖示)。藉此構成,透過在工件W搬入模製用模具202進行加熱前先予預熱,工件W在模製用模具202內的伸展即可受到抑制。另外,作為變化例,也可考量不具備工 件加熱器116的構成。此時,可在第1保持部210A(第1裝載器210)設置加熱器。在此情況中,可在以第1保持部210A保持工件W期間進行預熱。此外,也可在第1裝載器210設置加熱器。在此情況中,交接工件W時,可從第1保持部210A的位置先避開,而在工件W的搬送時進行預熱。 Next, the workpiece processing unit 100A includes a workpiece heater 116 that heats the workpiece W from the lower surface side. Here, as a structure for heating the workpiece W, a well-known heating mechanism (for example, an electric heater, an infrared heater, etc.) (not shown) is provided on the upper surface of the workpiece heater 116. With this configuration, by preheating the workpiece W before it is carried into the mold 202 for heating, the workpiece W can be restrained from being stretched in the mold 202. In addition, as a variation, it can also be considered The structure of the piece heater 116. In this case, a heater may be provided in the first holding portion 210A (the first loader 210). In this case, preheating may be performed while the workpiece W is held by the first holding portion 210A. A heater may be provided in the first loader 210. In this case, when the workpiece W is transferred, it can be avoided from the position of the first holding portion 210A, and the workpiece W can be preheated during the transfer.

本實施形態的工件加熱器116係配設成在供給軌道104的上方可對保持在供給拾取器120之狀態的工件W的下面側進退移動(參照圖2)。亦即,工件加熱器116可說是配設成可在較工件W之外周更外方的位置、與工件W之下面正下方的位置間移動。藉此構成,即可進行將樹脂模製前的工件W加熱的預熱製程。另外,使工件加熱器116向工件W之下面正下方位置移動之際,藉由令保持工件W之狀態的供給拾取器120向下方移動,執行使工件W接近工件加熱器116的動作,即可成為更有效率的加熱。 The workpiece heater 116 of this embodiment is arranged above the supply rail 104 so as to be able to move forward and backward on the lower side of the workpiece W held in the supply picker 120 (see FIG. 2). That is, the workpiece heater 116 can be said to be disposed so as to be movable between a position outside the periphery of the workpiece W and a position directly below the workpiece W. With this configuration, a preheating process for heating the workpiece W before the resin molding can be performed. In addition, when the workpiece heater 116 is moved to a position directly below the workpiece W, the supply picker 120 holding the state of the workpiece W is moved downward to execute the operation of bringing the workpiece W close to the workpiece heater 116. Become more efficient heating.

另外,本實施形態的工件加熱器116的構成係使上述的加熱機構在和供給拾取器120所保持的二個工件W對應的位置朝左右方向並設二列。藉此構成,即可將藉供給拾取器120朝左右方向排列保持的二個工件W同時均等地加熱。 In addition, the workpiece heater 116 of this embodiment is configured such that the above-mentioned heating mechanism is arranged in two rows in the left-right direction at positions corresponding to the two workpieces W held by the supply picker 120. With this configuration, the two workpieces W held in the left-right direction by the supply picker 120 can be uniformly heated at the same time.

依此方式,將藉供給拾取器保持之狀態的工件W在供給軌道104的上方,亦即在藉供給拾取器而朝上下方向的移動中,藉工件加熱器116進行加熱(預熱製程)的構成可予實現。因而,相較於各構成以平面方式並設的傳統裝置,裝置的設置面積可大幅減少。 In this manner, the workpiece W held in the state held by the supply picker is above the supply rail 104, that is, the workpiece W is heated (pre-heated) by the workpiece heater 116 during the upward and downward movement by the supply picker. The composition is achievable. Therefore, the installation area of the device can be greatly reduced compared to a conventional device in which the components are juxtaposed in a planar manner.

其次,和工件處理單元100A的各機構協同動作的第1裝載器210係在其上面具備將該工件W往上模204的預定保持位置搬送的第1保持部210A。該第1保持部210A係在對供給軌道104向側方(在一個例中為右方)位置移動時供載置藉供給拾取器120搬送的工件W。在進行工件W的交接時,供給拾取器120會在供給軌道104上經過預熱製程並再行上升,接著透過向右方移動,而移動到可交送至位在供給軌道104之右方的第1保持部210A的位置。第1保持部210A中,作為保持所載置的工件W的工件保持部已有公知的保持機構(例如,具有保持爪俾進行挾持的構成、具有連通於吸附裝置的吸附孔俾進行吸附的構成等)(圖中的符號210a、210b)。 Next, the first loader 210 that operates in cooperation with each mechanism of the workpiece processing unit 100A is provided with a first holding portion 210A on which the workpiece W is transferred to a predetermined holding position of the upper die 204. This first holding portion 210A is used to load the workpiece W transferred by the supply picker 120 when the supply rail 104 is moved to the side (right side in one example) position. When the workpiece W is transferred, the supply picker 120 goes through a preheating process on the supply track 104 and rises again, and then moves to the right by being moved to the position where it can be delivered to the right of the supply track 104. The position of the first holding portion 210A. In the first holding section 210A, a known holding mechanism (for example, a structure having a holding claw 挟 for holding, and a structure having a suction hole 连通 communicating with an adsorption device for holding 作为) is known as a workpiece holding section for holding the workpiece W to be placed. Etc.) (symbols 210a, 210b in the figure).

本實施形態中,上述的工件保持部210a、210b係設成在和供給拾取器120所保持的二個工件W對應的位置朝左右方向並設二列的構成。意即,可將工件W令其長邊方向地排列保持。藉此構成,藉供給拾取器120將朝左右方向排列保持的二個工件W不用重新排列就可以其現有的配置同時載置,並朝左右方向排列保持及搬送。 In this embodiment, the above-mentioned workpiece holding portions 210 a and 210 b are arranged in two rows in the left-right direction at positions corresponding to the two workpieces W held by the supply picker 120. That is, the workpieces W can be aligned and held in the longitudinal direction. With this configuration, the two workpieces W that are aligned and held in the left-right direction by the supply picker 120 can be simultaneously placed in their existing arrangement without being rearranged, and held and transported in the left-right direction.

此外,以第1保持部210A保持工件W的第1裝載器210係構成為可朝前後、左右及上下方向移動。藉由左右方向的移動,可將工件W從工件處理單元100A向壓製單元100B搬送。另一方面,藉由前後方向的移動,可將工件W從模製用模具202的外部向內部(亦 即,向開模狀態的上模204與下模206之間)搬送。再者,藉由上下方向的移動,可將工件W在模製用模具202的內部向上模204的預定保持位置搬送(交接)。另外,作為變化例,也可考量替代第1保持部210A左右移動的構成,改採藉供給拾取器120置換該移動範圍之移動的構成。此外,也可考慮替代第1保持部210A上下移動的構成,改用藉模製用模具202的開閉模機構置換該移動範圍之移動的構成(均未圖示)。 The first loader 210 holding the workpiece W by the first holding portion 210A is configured to be movable in the front-rear, left-right, and up-down directions. By moving in the left-right direction, the workpiece W can be transferred from the workpiece processing unit 100A to the pressing unit 100B. On the other hand, the workpiece W can be moved from the outside to the inside (also That is, it is conveyed between the upper mold 204 and the lower mold 206 in the opened state. In addition, by moving in the vertical direction, the workpiece W can be transported (transferred) to a predetermined holding position of the upper mold 204 inside the mold 202 for molding. In addition, as a modification example, a configuration in which the first holding portion 210A moves left and right may be considered, and a configuration in which the movement of the moving range is replaced by the supply pickup 120 may be considered. In addition, instead of the structure in which the first holding portion 210A moves up and down, a structure in which the movement of the moving range is replaced by an opening / closing mechanism of the mold 202 for molding (both not shown) may be considered.

其次,第1裝載器210具備有第2保持部210B,樹脂模製所得的成形品Wp從模製用模具202(此處為上模204)取下並載置於其上面,並將該成形品Wp向模製用模具202外的預定位置搬送。另外,第2保持部210B具有公知的保持機構(例如,具有保持爪俾進行挾持的構成、具有連通於吸附裝置的吸附孔俾進行吸附的構成等)(圖中,符號210c、210d)作為保持所載置的成形品Wp的成形品保持部。 Next, the first loader 210 includes a second holding portion 210B, and a molded product Wp obtained by resin molding is removed from the molding die 202 (here, the upper mold 204) and placed thereon, and the molding is performed. The product Wp is conveyed to a predetermined position outside the mold 202 for molding. In addition, the second holding portion 210B has a known holding mechanism (for example, a structure having a holding claw 俾 for holding, a structure having a suction hole 连通 communicating with an adsorption device for holding, etc.) (in the figure, symbols 210c and 210d) as holding The molded product holding portion of the placed molded product Wp.

再者,本實施形態的第2保持部210B係設成使上述成形品保持部210c、210d朝左右方向並設二列在和樹脂模製後模製用模具202(上模204)所保持的二個成形品Wp對應的位置的構成。意即,可將成形品Wp令其長邊方向平行地排列保持。藉此構成,將藉模製用模具202(上模204)朝左右方向排列保持的二個成形品Wp依其原狀的配置同時載置,不用變換排列,即可朝左右方向排列保持及進行搬送。 In addition, the second holding portion 210B of this embodiment is provided so that the above-mentioned molded product holding portions 210c and 210d are arranged in two rows in the left-right direction and are held by the mold 202 (upper mold 204) for molding after resin molding. The configuration of the positions corresponding to the two molded products Wp. In other words, the molded products Wp can be aligned and held in parallel in the longitudinal direction. With this configuration, the two molded products Wp that are borrowed from the molding die 202 (upper mold 204) and aligned in the left-right direction are simultaneously placed in their original configuration, and can be aligned and held in the left-right direction and transported without changing the arrangement. .

此處,本實施形態中,第2保持部210B與上述的第1保持部210A係構成為一體當作第1裝載器210。在一個例子中,第1裝載器210係在前方側配設具有左右二列之工件保持部210a、210b的第1保持部210A,在後方側配設具有左右二列之成形品保持部210c、210d的第2保持部210B。因而,第1保持部210A及第2保持部210B係成為可作為第1裝載器210以一體方式朝前後、左右及上下方向移動的構成。藉此構成,由於不僅裝置構成可簡化及小型化,且能夠實現工件W、成形品Wp皆各二個同時搬送的構成,故製程時間也能縮短。 Here, in this embodiment, the second holding portion 210B and the above-mentioned first holding portion 210A are integrally configured as the first loader 210. In one example, the first loader 210 is provided with a first holding portion 210A having workpiece holding portions 210a and 210b in two rows on the front side, and a molded product holding portion 210c having two columns in left and right on the rear side. The second holding portion 210B of 210d. Therefore, the first holding portion 210A and the second holding portion 210B are configured to be movable as a first loader 210 in an integrated manner in the front-back, left-right, and up-down directions. With this configuration, not only the device configuration can be simplified and miniaturized, but also a configuration in which both the workpiece W and the molded product Wp can be transported simultaneously can be shortened.

另外,作為變化例,也可考量將具備第2保持部210B的裝載器和上述具備第1保持部210A的裝載器構成為各別件體(未圖示)。在此情況中,只要設成可和上述第1保持部210A同樣地移動的構成即可。 In addition, as a modification, it may be considered that the loader having the second holding portion 210B and the loader having the first holding portion 210A are configured as separate pieces (not shown). In this case, what is necessary is just to provide the structure which can move similarly to the said 1st holding part 210A.

其次,工件處理單元100A具備有第1收納拾取器122,其係保持第2保持部210B上所載置的成形品Wp並向預定位置搬送。再者,工件處理單元100A還具備第2收納拾取器124,其係載置第1收納拾取器122所保持的成形品Wp並向單元內的預定位置搬送。這些作為保持成形品Wp的機構,均已具有公知的保持機構(例如,具有保持爪俾進行挾持的構成、具有連通於吸附裝置的吸附孔俾進行吸附的構成、單純供載置的機構等)(未圖示)。本實施形態中,係將第1收納拾取器122與第2收納拾取器124組合而構成為從第1裝載器210搬送成形品Wp的收納拾取器。 Next, the workpiece processing unit 100A is provided with a first storage picker 122 that holds the molded product Wp placed on the second holding portion 210B and transfers it to a predetermined position. In addition, the workpiece processing unit 100A further includes a second storage picker 124 that carries the molded product Wp held by the first storage picker 122 and transfers it to a predetermined position in the unit. As the means for holding the molded product Wp, there are already known holding means (for example, a structure having a holding claw 俾 for holding, a structure having an adsorption hole 连通 communicating with an adsorption device for holding, a mechanism for simply mounting, etc.) (Not shown). In the present embodiment, the first storage picker 122 and the second storage picker 124 are combined to form a storage picker that transports the molded product Wp from the first loader 210.

此處,本實施形態的第1收納拾取器122係構成為可朝左右方向移動。藉此構成,即可保持第2保持部210B上所載置的成形品Wp,並向第2收納拾取器124上搬送。此處,在第1收納拾取器122與第2收納拾取器124的交接中,也可透過將成形品Wp挾住並待機,使其平坦化同時使其冷卻,藉以防止成形品Wp的翹曲或變形。另外,也可設成不僅朝左右方向也可朝上下方向移動的構成(收納拾取器)作為第1收納拾取器122的變化例。藉此方式,省略第2保持部210B之上下方向移動機構的構成即得以實現。 Here, the first storage pickup 122 of the present embodiment is configured to be movable in the left-right direction. With this configuration, the molded product Wp placed on the second holding portion 210B can be held and transported to the second storage picker 124. Here, during the transfer of the first storage picker 122 and the second storage picker 124, it is also possible to prevent the warpage of the molded product Wp by holding the molded product Wp on standby and flattening it while cooling it. Or deformed. In addition, a configuration (storage pickup) that can be moved not only in the left-right direction but also in the up-down direction may be provided as a modification of the first storage pickup 122. In this way, it is possible to realize a configuration in which the vertical movement mechanism of the second holding portion 210B is omitted.

而且,本實施形態的第1收納拾取器122係設成上述保持機構在和第2保持部210B(二列成形品保持部210c、210d)上所載置的二個成形品Wp對應的位置朝左右方向並設二列的構成。藉此構成,即可將第2保持部210B上的二個成形品Wp以朝左右方向排列的狀態同時保持並搬送。 In addition, the first storage picker 122 of the present embodiment is provided such that the holding mechanism faces the position corresponding to the two molded products Wp placed on the second holding portion 210B (two-row molded product holding portions 210c, 210d). A structure with two columns arranged side by side. With this configuration, the two molded products Wp on the second holding portion 210B can be held and transported simultaneously in a state of being aligned in the left-right direction.

此外,本實施形態中,係設定為使供給拾取器120向第1保持部210A搬送工件W的左右方向搬入路、與收納拾取器(第1收納拾取器122)從第2保持部210B搬送成形品Wp的左右方向搬出路,朝前後方向並設。藉此方式,由於不會有工件W藉供給拾取器120進行的搬入動作、與成形品Wp藉收納拾取器(第1收納拾取器122)進行的搬出動作交叉、重疊的情形,故可抑制等待時間的發生。因而,由於複數個動作係以同時併行的方式進行,可有效率地執行各個動作,故可謀求處理的流暢化,使製程時間能夠縮短。 In addition, in this embodiment, the feeding picker 120 is set so that the feeding direction of the workpiece W is transported to the first holding section 210A, and the storage picker (first storage picker 122) is transported from the second holding section 210B. The product Wp is taken out in the left-right direction and juxtaposed in the front-rear direction. In this way, since the loading operation of the workpiece W by the supply picker 120 and the loading operation of the molded product Wp by the storage picker (first storage picker 122) do not overlap or overlap, waiting can be suppressed. The occurrence of time. Therefore, since a plurality of actions are performed in a parallel manner at the same time, each action can be performed efficiently, so that the processing can be smoothed, and the process time can be shortened.

另一方面,本實施形態的第2收納拾取器124係構成為可朝上下方向移動。藉此構成,可將第2收納拾取器124上所載置的成形品Wp加以保持,並向後述的收納軌道108上搬送。 On the other hand, the second storage pickup 124 in this embodiment is configured to be movable in the vertical direction. With this configuration, the molded product Wp placed on the second storage picker 124 can be held and transported to a storage rail 108 described later.

再者,本實施形態的第2收納拾取器124係設成為使上述的保持機構在和第1收納拾取器122所保持的二個成形品Wp對應的位置朝左右方向並設二列的構成。藉此構成,可將第1收納拾取器122所保持的二個成形品Wp以朝左右方向排列的狀態同時保持並搬送。 In addition, the second storage picker 124 of the present embodiment has a configuration in which the above-mentioned holding mechanism is arranged in two rows in the left-right direction at positions corresponding to the two molded products Wp held by the first storage picker 122. With this configuration, the two molded products Wp held by the first storage picker 122 can be held and transported simultaneously in a state of being aligned in the left-right direction.

另外,本實施形態中,係如上述方式設成具備二個收納拾取器(第1收納拾取器122、及第2收納拾取器124)的構成,但也可設成具備可朝左右及上下方向移動可能的一台收納拾取器的構成作為變化例(未圖示)。藉此構成,即可將第2保持部210B上所載置的成形品Wp加以保持並直接向收納軌道108上搬送。而且,供給拾取器120與收納拾取器也可藉多關節機器人(搬送機器人來構成。在此情況中,若依據例如由水平多關節機器人及升降機構所組合的搬送機構,可使工件W及成形品Wp朝左右及上下方向移動,且具備和上述構成同樣的功能。 In addition, in the present embodiment, as described above, the configuration is provided with two storage pickups (the first storage pickup 122 and the second storage pickup 124), but it may also be provided with a configuration capable of facing left and right and up and down The configuration of one storage picker that can be moved is a modification (not shown). With this configuration, the molded product Wp placed on the second holding portion 210B can be held and directly transferred onto the storage rail 108. Further, the supply picker 120 and the storage picker may be constituted by a multi-joint robot (transport robot). In this case, the workpiece can be formed and formed according to a transfer mechanism composed of, for example, a horizontal multi-joint robot and a lifting mechanism. The product Wp moves in the left-right and up-down directions and has the same function as the above configuration.

另外,上述構成中,只要第1裝載器210移動到可與第1收納拾取器122之間交接成形品Wp的位置(和圖1的第1收納拾取器122重複的位置),上述的動作即得以實施。然而,透過將第1裝載器210作成 可移動到裝置側面,作業人員就能夠容易地存取第1裝載器210所保持的工件W或成形品Wp。在此情況下,工件處理單元100A中即可採用使供第1裝載器210移動的軌道本身移動於左右方向的構成。若依據此種構成,第2收納拾取器124上下動作時,可先使該軌道從第2收納拾取器124的移動範圍退開。結果,在進行一般的生產時,藉由第1裝載器210與2台收納拾取器122、124的協同運作,就可搬送成形品Wp,在進行保養維護時,可藉第1裝載器210使工件W或成形品Wp直接移動到作業人員容易操作的位置(裝置側面位置)。 In the above configuration, as long as the first loader 210 is moved to a position where the molded product Wp can be transferred to and from the first storage picker 122 (a position overlapping the first storage picker 122 of FIG. 1), the above-mentioned operation is Implemented. However, by making the first loader 210 It can be moved to the side of the apparatus, and the worker can easily access the workpiece W or the molded product Wp held by the first loader 210. In this case, the workpiece processing unit 100A may be configured to move the rail itself for moving the first loader 210 in the left-right direction. According to this configuration, when the second storage pickup 124 is moved up and down, the track can be retracted from the moving range of the second storage pickup 124 first. As a result, during normal production, the cooperative operation of the first loader 210 and the two storage pickers 122 and 124 enables the conveyance of the molded product Wp, and the first loader 210 can be used for maintenance. The workpiece W or the molded product Wp is directly moved to a position (device side position) where the operator can easily operate.

其次,工件處理單元100A具備有收納軌道108,其係配設在工件量測器114的下方,供載置藉收納拾取器(此處為第2收納拾取器124)搬送的成形品Wp。另外,收納軌道108上所載置的成形品Wp係在該收納軌道108上通過(滑動移動),並往收納匣112收納。另外,收納軌道108因在其構成上與供給軌道104基本上相同,只有工件W或成形品Wp的移動方向不同,故有將已在供給軌道104中說明的部分省略的情形(有關處理成形品Wp的其他構成亦相同)。 Next, the workpiece processing unit 100A includes a storage rail 108, which is disposed below the workpiece measuring device 114 and is used to mount a molded product Wp transferred by the storage picker (here, the second storage picker 124). In addition, the molded product Wp placed on the storage rail 108 passes (slides) on the storage rail 108 and is stored in the storage box 112. In addition, the storage rail 108 is basically the same in structure as the supply rail 104, and only the moving direction of the workpiece W or the molded product Wp is different. Therefore, the parts described in the supply rail 104 may be omitted (related to processing of the molded product). The other components of Wp are the same).

本實施形態中,在收納軌道108與收納匣112之間具備讓成形品Wp通過的中繼軌道110,但也可作成將其省略的構成。另外,成形品Wp從收納軌道108上往收納匣112的移動可使用公知的推動器等(未圖示)。 In the present embodiment, the relay rail 110 is provided between the storage rail 108 and the storage box 112 to allow the molded product Wp to pass, but a configuration in which it is omitted may be used. In addition, for the movement of the molded product Wp from the storage rail 108 to the storage cassette 112, a known pusher or the like (not shown) can be used.

此處,收納軌道108係避開電子零件Wb的搭載位置,從下方支持成形品Wp的縱長邊,並以側 方引導工件W。再者,收納軌道108係以可將二個成形品Wp在短邊方向朝左右方向排列載置的方式構成為二列(圖中108A、108B),並且具有可朝左右方向移動的移動機構(未圖示)。藉此構成,將保持在收納拾取器(此處為第2收納拾取器124)的二個成形品Wp以朝左右方向排列的狀態同時載置後,即可使成形品Wp依序向收納匣112移動。例如,可使一方列(例如,108B)上的成形品Wp向收納匣112移動,接著,使收納軌道108A、108B朝左右任意預定方向(例如,左方)移動,且令另一方列(例如,108A)上的成形品Wp向收納匣112移動。 Here, the storage rail 108 avoids the mounting position of the electronic component Wb, supports the longitudinal side of the molded product Wp from below, Party guides the workpiece W. In addition, the storage rail 108 is configured in two rows (108A, 108B in the figure) so that the two molded products Wp can be arranged in the short-side direction and left-right direction, and has a moving mechanism that can move in the left-right direction ( (Not shown). With this configuration, after the two molded products Wp held in the storage picker (here, the second storage pickup 124) are placed in the left-right direction at the same time, the molded products Wp can be sequentially directed to the storage box. 112 moves. For example, the formed article Wp on one row (for example, 108B) may be moved toward the storage box 112, and then the storage rails 108A, 108B may be moved in any predetermined direction (for example, left) and the other row (for example, left) (108A), the molded product Wp is moved to the storage box 112.

接著,工件處理單元100A具備成形品量測器118,其係配設在收納軌道108的下方,從下面側(電子零件Wb的搭載面側)對收納軌道108上的成形品Wp進行檢查。在一個例子中,該成形品量測器118可配置在使成形品Wp向收納匣112移動之際收納軌道108A、108B到達預定位置時的下方位置。該成形品量測器118係由雷射位移計或攝像機(單眼攝像機或複眼攝像機)構成,並使用在和根據這些量測器之輸出資料的基準值的比較、或用模式匹配等手法量測成形品Wp的厚度、檢測出成形品Wp之成形部位的外觀缺失。另外,「收納軌道的下方」也包含設置中繼軌道110時的中繼軌道的下方。再者,此處所稱的「檢查」係包含基材Wa上的樹脂模製部分(樹脂成形部分)的厚度、樹脂模製的外觀(導線的露出)、樹脂模製的缺失(充填不良等)的量測等必要的量測。也可根據此處「檢查」的結果,例如根據樹 脂成形部分的實際厚度和目標厚度的值差來調整模製樹脂R的供給量,俾能高精確度地控制成形品Wp的成形厚度。 Next, the workpiece processing unit 100A includes a molded product measuring device 118 that is disposed below the storage rail 108 and inspects the molded product Wp on the storage rail 108 from the lower surface side (the mounting surface side of the electronic component Wb). In one example, the molded product measuring device 118 may be disposed at a lower position when the storage rails 108A and 108B reach a predetermined position when the molded product Wp is moved toward the storage cassette 112. The molded product measuring device 118 is composed of a laser displacement meter or a camera (a monocular camera or a compound eye camera), and is used for comparison with a reference value based on the output data of these measuring devices, or for measurement using methods such as pattern matching. The thickness of the molded product Wp and the appearance of the molded part where the molded product Wp was detected were missing. In addition, "below the storage track" includes below the relay track when the relay track 110 is provided. The "inspection" referred to here includes the thickness of the resin molded portion (resin molded portion) on the substrate Wa, the appearance of the resin molding (exposure of the lead), and the lack of resin molding (poor filling, etc.). Necessary measurements. You can also "check" the results here, such as from a tree The difference between the actual thickness and the target thickness of the fat-molded portion is used to adjust the supply amount of the molding resin R, so that the molding thickness of the molded product Wp can be controlled with high accuracy.

本實施形態的成形品量測器118固定配設有一台厚度感測器118a。藉此即可量測通過收納軌道108上的成形品Wp的預定位置(例如,樹脂成形部分的中央位置或外周位置)的厚度。 The molded product measuring device 118 of this embodiment is fixedly provided with one thickness sensor 118a. Thereby, the thickness which passed the predetermined position (for example, the center position or the outer peripheral position of the resin molding part) of the molded article Wp on the storage rail 108 can be measured.

如以上所說明,本實施形態中,供給軌道104、工件量測器114、收納軌道108、及成形品量測器118係成為在上下方向中重複並設,且從上方依序以階層狀並設的構成(包含前後左右方向的偏位(offset)設置)。同時,供給匣升降機103及收納匣升降機113也具備配置在上下方向相異的位置,且從上方依序以階層狀並設的構成。若依據這些構成,和各構成以平面方式並設的傳統裝置比較,裝置的設置面積可大幅減少。 As described above, in the present embodiment, the supply rail 104, the work measuring device 114, the storage rail 108, and the molded product measuring device 118 are repeatedly arranged in the up-down direction, and are sequentially arranged in a hierarchical manner from above. Structure (including offset settings in the front-back, left-right, and left-right directions). At the same time, the supply cassette elevator 103 and the storage cassette elevator 113 also have a configuration in which the supply cassette elevator 103 and the storage cassette elevator 113 are arranged at different positions in the vertical direction and are arranged in a hierarchical manner in order from above. According to these structures, the installation area of the device can be greatly reduced compared with a conventional device in which the structures are juxtaposed in a planar manner.

而且,上述實施形態係在將工件W搬送到模製用模具202的同時,使用將以該模製用模具202進行樹脂模製所得的成形品Wp搬出的第1裝載器210進行樹脂模製工件W的樹脂模製裝置1中,透過設成使量測工件W之厚度的工件量測器114與進行成形品Wp之檢查的成形品量測器118重複配置的構成,即可較傳統裝置減少設置面積。在此情況中,工件W在以工件量測器114進行厚度量測後,藉第1裝載器210搬送到模製用模具202,而藉第1裝載器210從模製用模具202搬送的成形品Wp則用成形品量測器118予以檢查。 In the above-mentioned embodiment, the workpiece W is transferred to the mold 202 for molding, and the resin is molded using the first loader 210 for carrying out the molded product Wp obtained by resin molding using the mold 202 for molding. In the resin molding apparatus 1 of W, a configuration in which the workpiece measuring device 114 for measuring the thickness of the workpiece W and the molded product measuring device 118 for inspecting the molded product Wp are repeatedly arranged can be reduced compared to the conventional device. Set the area. In this case, after the workpiece W is thickness-measured by the workpiece measuring device 114, the workpiece W is transferred to the molding die 202 by the first loader 210, and the molding is transferred from the molding die 202 by the first loader 210. The product Wp is inspected by the molded product measuring device 118.

此外,藉第2收納拾取器124進行的上下方向移動中,由於例如在第1收納拾取器122與第2收納拾取器124的交接中一邊挾住使之平坦化一邊進行成形品Wp的散熱製程的構成可獲得實現,故不必另外設置散熱單元,也可謀求裝置的設置面積的減少。 In addition, during the vertical movement by the second storage pickup 124, for example, during the transfer of the first storage pickup 122 and the second storage pickup 124, the heat dissipation process of the molded product Wp is performed while holding and flattening it. The structure can be realized, so it is not necessary to provide a heat dissipation unit separately, and the installation area of the device can be reduced.

再者,若依據上述的構成,從在供給軌道104上載置二個例如狹條形工件W的狀態到在收納軌道108上載置二個加工後成形品Wp的狀態的製程,全部皆以朝左右方向排列二個工件W或成形品Wp的狀態進行。因此,和因為包含中途依序逐一進行處理的製程而含有局部性耗時製程的傳統裝置相比較,製程時間即可大幅縮短。 In addition, according to the above-mentioned configuration, the processes from the state where two, for example, a strip-shaped workpiece W are placed on the supply rail 104 to the state where two processed molded products Wp are placed on the storage rail 108 are all oriented to the left and right. This is performed in a state in which two workpieces W or molded products Wp are aligned in the direction. Therefore, compared with a conventional device that contains a local time-consuming process because it includes a process that processes one by one in order, the process time can be greatly reduced.

再者,若依據上述的構成,就能實現從供給匣102取出工件W後到加工為成形品Wp再收納於收納匣112的整個製程中,在工件W及成形品Wp移動之際,工件W及成形品Wp的朝向(保持、載置的方向)一概不用變換即朝前後、左右、上下方向移動的構成。因而,相較於製程中要執行工件W及成形品Wp的朝向變換的傳統裝置,可縮短製程時間,裝置構成也可簡化。 Furthermore, according to the above configuration, the entire process from the removal of the workpiece W from the supply cassette 102 to the processing into a molded product Wp and storage in the storage cassette 112 can be realized. As the workpiece W and the molded product Wp move, the workpiece W And the structure (direction of holding and placing) of the molded product Wp can be moved in the front-back, left-right, and up-down directions without changing. Therefore, compared with the conventional apparatus which performs the orientation change of the workpiece | work W and the molded article Wp in a manufacturing process, a process time can be shortened and a device structure can also be simplified.

另外,作為上述樹脂模製裝置1的變化例,也可構成為在一具下模中設置一個模窩,同時配置一個工件W(可設想為使用例如圓形的晶圓、或正方形、長方形的基板等作為基材Wa的情況)進行樹脂模製,而獲得一個成形品的壓縮成形方式的樹脂模製裝置2(參照圖28)。在此情況中,工件W可設成對較上述狹條形工件 式的工件W更寬的寬幅工件(大面積型工件)進行加工的構成。該寬幅工件也可使用較狹條形工件更寬的正方形或長方形或多角形的工件W、或直徑(寬度)比狹條形工件相對較寬的圓形晶圓或作為托載板的工件W。在該情況中,可考量用如下述的工件處理單元500A構成來替代工件處理單元100A。 In addition, as a modified example of the resin molding apparatus 1 described above, it is also possible to provide a mold cavity in a lower mold and to arrange a workpiece W (a conceivable use of, for example, a circular wafer, or a square or rectangular In the case where a substrate or the like is used as the base material Wa), resin molding is performed to obtain a resin molding apparatus 2 of a compression molding method of a molded product (see FIG. 28). In this case, the workpiece W may be set to be a Workpiece W is structured to process a wider and wider workpiece (large-area workpiece). This wide workpiece can also be a square or rectangular or polygonal workpiece W that is wider than a narrow strip workpiece, or a circular wafer with a diameter (width) that is relatively wider than a narrow strip workpiece, or a workpiece that is a carrier plate. W. In this case, it can be considered that the workpiece processing unit 100A is replaced with the workpiece processing unit 500A as described below.

在一個例子中,工件處理單元500A也可設置具備進行工件W自供給匣之取出、或者成形品Wp向收納匣之收納等的機械手504的搬送機器人,以替代上述的供給軌道104或收納軌道108。此處,該機械手504可在公知的多關節機器人等的前端使用在符合工件W之形狀的叉狀構件具備吸附機構的機構。另外,也可設成具備複數隻機械手的構成(未圖示)。而且,不僅是上述的供給拾取器120與收納拾取器,也可設置在供給軌道104或收納軌道108進行工件W及成形品Wp之搬送的搬送機器人。 In one example, the workpiece processing unit 500A may be provided with a transfer robot including a robot 504 for taking out the workpiece W from the supply cassette, or storing the molded product Wp into the storage cassette, instead of the supply rail 104 or the storage rail described above. 108. Here, the manipulator 504 can be used at the tip of a known multi-joint robot or the like with a mechanism including a suction mechanism on a fork-shaped member conforming to the shape of the workpiece W. It is also possible to provide a configuration (not shown) including a plurality of robots. Furthermore, not only the above-mentioned supply picker 120 and storage picker, but also a transfer robot which can be provided on the supply rail 104 or the storage rail 108 to carry the workpiece W and the molded product Wp.

再者,第1保持部210A中,可設成可將前述二列工件保持部210a、210b、與保持一個工件W(寬幅工件)的寬幅工件保持部506置換設置的構成。而且,第2保持部210B中,也可設成可將前述的二列成形品保持部210c、210d、與保持一個成形品Wp(和寬幅工件W對應的成形品Wp)的寬幅成形品保持部508置換設置的構成。 The first holding portion 210A may be configured to replace the two-row workpiece holding portions 210a and 210b and the wide workpiece holding portion 506 that holds one workpiece W (wide workpiece). Further, the second holding portion 210B may be provided as a wide-shaped molded product capable of holding the aforementioned two-row molded product holding portions 210c and 210d and holding one molded product Wp (the molded product Wp corresponding to the wide workpiece W). The holding unit 508 is configured to be replaced.

依此方式,有關可將狹條形工件與寬幅工件切換的構成,可考量例如可將第1保持部210A作成為 可將二個屬於狹條形工件的工件W以令其長邊方向平行排列保持的方式具有二列工件保持部210a、210b之構成、與具有保持一個屬於寬幅工件之工件W的一個工件保持部506之構成置換的構成。再者,也可考量將第2保持部210B構成為可將屬於狹條形工件的工件W加工所得的二個成形品Wp以令其長邊方向平行地排列保持的方式具有二列成形品保持部210c、210d的構成、與具有保持由一個該工件W加工所得的一個成形品Wp的一個工件保持部508的構成置換。透過設成這種構成,可作成即使是狹條形工件與寬幅工件的任一種工件W也可藉第1保持部210A與第2保持部210B的簡易構成置換即可搬送工件W及成形品Wp的構成。 In this way, regarding the configuration that can switch the narrow-shaped workpiece and the wide-shaped workpiece, for example, the first holding portion 210A can be considered as The two workpieces W belonging to the strip-shaped workpiece can be held in parallel in the longitudinal direction so as to have two rows of workpiece holding portions 210a and 210b, and one workpiece holding one workpiece W belonging to a wide workpiece can be held. The configuration of the unit 506 is a replacement configuration. In addition, it may be considered that the second holding portion 210B may be configured to have two rows of formed product holdings so that the two formed products Wp obtained by processing the workpieces W belonging to the strip-shaped workpiece are aligned and held in parallel in the longitudinal direction. The structure of the parts 210c and 210d is replaced with the structure of the one workpiece holding part 508 which holds one molded product Wp obtained by processing one workpiece W. By adopting such a structure, even a narrow-shaped workpiece and a wide-shaped workpiece W can be produced. The workpiece W and the molded product can be transferred by simply replacing the first holding portion 210A and the second holding portion 210B. The composition of Wp.

(壓製單元) (Pressing unit)

接著,就樹脂模製裝置1所具備的壓製單元100B之構成作詳細說明。 Next, the configuration of the pressing unit 100B included in the resin molding apparatus 1 will be described in detail.

壓製單元100B首先具備模製用模具202,其具有可開閉的一對模具(例如,由合金工具鋼製成的複數個模塊、模板、模柱等或其他構件組裝而成的模具)。本實施形態中,係將一對模具中位於鉛直方向上方側的一方模具作為上模204,下方側的另一方模具作為下模206。該模製用模具202可藉由上模204與下模206相互接近、離開而進行閉模、開模。亦即,鉛直方向即為模具開閉方向。 The pressing unit 100B first includes a mold 202 for molding, which has a pair of molds that can be opened and closed (for example, a mold assembled from a plurality of modules, templates, mold columns, or other members made of alloy tool steel). In this embodiment, one of the molds on the upper side in the vertical direction of the pair of molds is used as the upper mold 204, and the other mold on the lower side is used as the lower mold 206. The mold 202 for molding can be closed and opened by the upper mold 204 and the lower mold 206 approaching and leaving each other. That is, the vertical direction is the mold opening and closing direction.

另外,模製用模具202係藉由公知的模具開閉機構(未圖示)進行模具的開閉。例如,模具開閉機構係由具備:一對模板;供架設一對模板的複數個連結機構(連結桿(tie-bar)或柱部);及使模板可動(升降)的驅動源(例如,電動馬達)與驅動傳達機構(例如,肘節連桿)等所構成(有關驅動用機構皆未圖示)。 The mold 202 is opened and closed by a known mold opening and closing mechanism (not shown). For example, the mold opening and closing mechanism is provided with: a pair of templates; a plurality of connection mechanisms (tie-bar or column) for setting up a pair of templates; and a driving source (for example, electric A motor) and a drive transmission mechanism (for example, a toggle link), etc. (the drive mechanisms are not shown).

此處,模製用模具202係配設於該模具開閉機構的一對模板之間。本實施形態中,作為固定模的上模204係組裝於固定模板(固定於連結機構的模板),作為活動模的下模206則組裝於可動模板(沿著連結機構升降的模板)。但,並非限定於這種構成,也可將上模204作為活動模,下模206作為固定模;或者,也可將上模204、下模206皆作為活動模。或者,也可作成設置兩片可動模板,且設置二組上模204及下模206的構成。 Here, the mold 202 is disposed between a pair of mold plates of the mold opening and closing mechanism. In this embodiment, the upper mold 204 as a fixed mold is assembled on a fixed template (a template fixed to a coupling mechanism), and the lower mold 206 as a movable mold is assembled on a movable template (a template that moves up and down along the coupling mechanism). However, it is not limited to this configuration, and the upper mold 204 may be used as a movable mold and the lower mold 206 may be used as a fixed mold. Alternatively, both the upper mold 204 and the lower mold 206 may be used as movable molds. Alternatively, a configuration in which two movable templates are provided and two sets of an upper mold 204 and a lower mold 206 are provided can also be made.

接著,具體說明有關模製用模具202的下模206。下模206具備下板224、模窩件226、及箝位件228等,並由這些單元組裝所構成(參照圖10)。 Next, the lower mold 206 of the molding mold 202 will be specifically described. The lower mold 206 includes a lower plate 224, a die socket 226, a clamper 228, and the like, and is configured by assembling these units (see FIG. 10).

此處,模窩件226係固定組裝在下板224的上面(上模204側的表面)。箝位件228係以圍繞模窩件226的方式構成環狀6,且和模窩件226鄰接地分離(浮動)組裝在下板224的上面。 Here, the die socket 226 is fixedly assembled on the upper surface of the lower plate 224 (surface on the upper die 204 side). The clamp member 228 forms a ring 6 so as to surround the die socket member 226, and is separated (floating) from the die socket member 226 and assembled on the upper plate 224.

本實施形態中,下模206雖具有從模具面(分模面)206a凹陷的模窩208,但係由模窩件226構成模窩208的內裡部(底部),由箝位件228構成模窩208的側部。換言之,係藉由該模窩件226的上面及箝位件228的內周壁面形成凹陷成預定形狀的模窩凹部209。 In this embodiment, although the lower mold 206 has a mold cavity 208 recessed from the mold surface (parting surface) 206a, the inner part (bottom) of the mold cavity 208 is formed by the mold cavity 226, and the mold is formed by the clamp 228 The side of the nest 208. In other words, a recessed part 209 recessed into a predetermined shape is formed by the upper surface of the recessed part 226 and the inner peripheral wall surface of the clamped part 228.

另外,本實施形態中,如圖21等所示,模窩208具備朝左右方向並設二個的構成(圖中,符號208A、208B),而且具備分別對應的模窩件226A、226B。藉此構成,即可將二片薄膜F(搭載模製樹脂R的部分)同時分別收容於模窩208A、208B內。因此,由於能夠實現同時樹脂模製各二個工件W的構成,故可縮短製程時間。另外,也可採取在下模206中作成將箝位件228按每個模窩208A、208B切開的構成,俾能各別地升降,且在上模204中具備以彈性體吸收二個工件W之板厚差的板厚調整機構的構成。若依據此種構成,即使同時壓縮成形的二個工件W有厚度差也不會發生傾斜,可一邊減少樹脂量供給偏差等的影響一邊成形。另外,本實施形態中,係以模窩208A、208B朝左右方向橫向排列的方式配置模具構件。因此,將構成模窩208A、208B的模窩件226A、226B及箝位件228作成左右分開的模套(chase)構造,故可對收容這些構件的基座朝裝置的前後方向各別插拔,俾進行保養維護。 In addition, in this embodiment, as shown in FIG. 21 and the like, the die socket 208 is provided with two structures (reference numerals 208A and 208B in the figure) provided in the left-right direction, and further includes corresponding die sockets 226A and 226B. With this configuration, the two films F (the portion on which the molding resin R is mounted) can be simultaneously housed in the mold sockets 208A and 208B, respectively. Therefore, since it is possible to realize a configuration in which two workpieces W are each resin-molded simultaneously, the process time can be shortened. In addition, it is also possible to adopt a configuration in which the clamping member 228 is cut in each of the die sockets 208A and 208B in the lower mold 206, which can be raised and lowered separately, and the upper mold 204 is provided with an elastic body to absorb two workpieces. The structure of a plate thickness adjustment mechanism with a plate thickness difference. According to such a configuration, even if the two workpieces W that are compression-molded at the same time have a difference in thickness, the tilt does not occur, and the molding can be performed while reducing the influence of the resin supply variation and the like. In addition, in this embodiment, the mold members are arranged so that the mold sockets 208A and 208B are arranged laterally in the left-right direction. Therefore, the mold sockets 226A, 226B and the clamp 228 constituting the mold sockets 208A and 208B are made into left and right separate chase structures, so that the base accommodating these components can be inserted and removed in the front-back direction of the device. , 俾 for maintenance.

此處,在相對於箝位件228的上模204之模具面設有吸附溝(未圖示),並使其連通於吸附裝置(未圖示)。再者,藉由透過設置圍繞這些部位的密封構造,並驅動吸附裝置進行減壓,即可以閉模的狀態進行模窩208內的脫氣。 Here, a suction groove (not shown) is provided on a mold surface of the upper die 204 opposite to the clamper 228 and communicates with a suction device (not shown). In addition, by providing a sealing structure surrounding these parts and driving the adsorption device to reduce the pressure, degassing in the mold cavity 208 can be performed while the mold is closed.

再者,模製用模具202具備從下模206的模具面206a側吸附薄膜F的薄膜吸附機構。在一個例子中,該薄膜吸附機構係經由貫通箝位件228地配設的吸 附路230a、230b而連通到吸附裝置(未圖示)。具體而言,吸附路230a、230b的一端係通到下模206的模具面206a,另一端則和配設於下模206外的吸附裝置連接。藉此構成,即可驅動吸附裝置從吸附路230a、230b吸附薄膜F,俾將薄膜F吸附保持在包含模窩208之內面的模具面206a。更具體而言,能夠從吸附路230b吸附薄膜F,將薄膜F吸附保持在模窩208之外側的模具面206a,且透過從吸附路230a吸附薄膜F,能夠使薄膜F吸附於模具面206a並保持在模窩208之內面(模窩凹部209的模具面)。 The mold 202 for molding includes a film adsorption mechanism that adsorbs the film F from the mold surface 206 a side of the lower mold 206. In one example, the film adsorption mechanism is a suction mechanism provided through the clamp 228. The auxiliary lines 230a and 230b communicate with an adsorption device (not shown). Specifically, one end of the adsorption paths 230 a and 230 b is connected to the mold surface 206 a of the lower mold 206, and the other end is connected to an adsorption device disposed outside the lower mold 206. With this configuration, the adsorption device can be driven to adsorb the film F from the adsorption paths 230 a and 230 b, and the film F can be adsorbed and held on the mold surface 206 a including the inner surface of the mold cavity 208. More specifically, the film F can be adsorbed from the adsorption path 230b, the film F can be adsorbed and held on the mold surface 206a outside the die cavity 208, and the film F can be adsorbed on the mold surface 206a by adsorbing the film F from the adsorption path 230a. It is held on the inner surface of the die cavity 208 (the die surface of the die cavity recess 209).

依此方式,由於透過設置覆蓋模窩208之內面及下模206之模具面206a(一部)的薄膜F,可使成形品Wp下面的模製樹脂R部分容易剝離,故能容易地將成形品Wp從模製用模具202取出。 In this way, since the film F covering the inner surface of the mold cavity 208 and the mold surface 206a (a portion) of the lower mold 206 is provided, the portion of the molding resin R under the molded product Wp can be easily peeled off, so that the molding resin R can be easily removed. The molded product Wp is taken out from the mold 202 for molding.

而且,模製用模具202在下板224與箝位件228之間具備勢能賦予構件(例如,線圈彈簧等彈簧)232。經由該勢能賦予構件232,可使箝位件228可動地組裝在下板224。藉此構成,模窩件226會被箝位件228圍繞,使模窩件226與箝位件228可朝模具開閉方向相對地往復動作。依此方式,在下模206中,模窩件226係固定並保持在下板224,另一方面,箝位件228則以可動方式經由勢能賦予構件232保持分離(浮動)狀態。此時,即成為箝位件228之內周面與模窩件226之外周面的間隙確保在預定尺寸的構成。因而,箝位件228可順暢地動作。 Further, the mold 202 for molding includes a potential energy imparting member (for example, a spring such as a coil spring) 232 between the lower plate 224 and the clamp 228. Via the potential energy imparting member 232, the clamper 228 can be movably assembled to the lower plate 224. With this configuration, the die nest member 226 is surrounded by the clamping member 228, so that the die nest member 226 and the clamping member 228 can reciprocate relative to each other in the mold opening and closing direction. In this way, in the lower mold 206, the die nest member 226 is fixed and held on the lower plate 224, and on the other hand, the clamp member 228 is maintained in a separated (floating) state via the potential energy imparting member 232 in a movable manner. At this time, the gap between the inner peripheral surface of the clamper 228 and the outer peripheral surface of the socket member 226 is secured to a predetermined size. Therefore, the clamper 228 can operate smoothly.

不過,上述的間隙係包含在前述薄膜吸附機構的吸附路230a,且以模窩件226與箝位件228的交界處(模窩208的隅角部)吸附薄膜F。因此,薄膜吸附機構具備密封構件234(例如,O型環)。密封構件234係以上述的間隙作為吸附路230a而設於模窩件226於箝位件228(的下部)之間產生密封作用,使空氣不致漏出。 However, the above-mentioned gap is included in the adsorption path 230a of the film adsorption mechanism, and the film F is adsorbed at the boundary (the corner portion of the mold socket 208) of the mold socket 226 and the clamp 228. Therefore, the thin film adsorption mechanism includes a sealing member 234 (for example, an O-ring). The sealing member 234 uses the above-mentioned gap as the suction path 230a and is provided between the die socket member 226 and the (lower portion) of the clamping member 228 to prevent the air from leaking out.

此外,下模206具備:加熱器(例如,電熱線加熱器)、輔助加熱器(例如,電熱線加熱器)、溫度感測器、控制部、及電源等(皆未圖示),俾進行加熱及其控制。在一個例子中,下模206的加熱器係內建於下板224或收容這些元件的模具底座(未圖示),主要對下模206整體及工件W進行加熱。藉由這些下模206的加熱器,下模206即可加熱並調整到預定溫度(例如,120℃至180℃)。 In addition, the lower mold 206 includes a heater (for example, an electric heating wire heater), an auxiliary heater (for example, an electric heating wire heater), a temperature sensor, a control unit, and a power source (all not shown). Heating and its control. In one example, the heater of the lower mold 206 is built in the lower plate 224 or a mold base (not shown) that houses these components, and mainly heats the entire lower mold 206 and the workpiece W. With these heaters of the lower mold 206, the lower mold 206 can be heated and adjusted to a predetermined temperature (for example, 120 ° C to 180 ° C).

接著,具體說明有關模製用模具202的上模204。上模204具備:上板222、及模窩板236等,並由這些元件組裝構成。此處,模窩板236係固定組裝在上板222的下面(下模206側的表面)。 Next, the upper mold 204 of the molding mold 202 will be specifically described. The upper mold 204 includes an upper plate 222, a die plate 236, and the like, and is configured by assembling these elements. Here, the die socket plate 236 is fixedly assembled under the upper plate 222 (the surface on the lower die 206 side).

此外,上模204具備:加熱器(例如,電熱線加熱器)、溫度感測器、控制部、及電源等(皆未圖示),藉以進行加熱及其控制。在一個例子中,上模204的加熱器係內建於上板222,主要對上模204整體及模製樹脂R進行加熱。藉由該上模204的加熱器,上模204可被加熱並調整到預定溫度(例如,120℃至180℃)。 In addition, the upper mold 204 includes a heater (for example, an electric heating wire heater), a temperature sensor, a control unit, and a power source (none of which are shown) to perform heating and control thereof. In one example, the heater of the upper mold 204 is built in the upper plate 222 and mainly heats the entire upper mold 204 and the molding resin R. With the heater of the upper mold 204, the upper mold 204 can be heated and adjusted to a predetermined temperature (for example, 120 ° C to 180 ° C).

再者,上模204具備用以將工件W保持於模窩板236下面之預定位置的工件保持機構240。在一個例子中,該工件保持機構240係經由配設在模窩板236的吸附路240a而連通於吸附裝置(未圖示)。具體而言,吸附路240a之一端係通到上模204的模具面204a,另一端則和配設於上模204外的吸附裝置連接。藉此構成,即可驅動吸附裝置俾從吸附路240a吸附工件W,且可使工件W吸附並保持在模具面204a(此處為模窩板236的下面)。而且,也可和具備吸附路240a的構成並設地作成具有挾持工件W外周之保持爪的構成。 The upper die 204 includes a work holding mechanism 240 for holding the work W at a predetermined position under the die plate 236. In one example, the workpiece holding mechanism 240 is connected to an adsorption device (not shown) via an adsorption channel 240 a arranged on the die plate 236. Specifically, one end of the adsorption path 240 a is connected to the mold surface 204 a of the upper mold 204, and the other end is connected to an adsorption device disposed outside the upper mold 204. With this configuration, the adsorption device 驱动 can be driven to adsorb the workpiece W from the adsorption path 240a, and the workpiece W can be adsorbed and held on the mold surface 204a (here, the lower surface of the die plate 236). In addition, a configuration having a holding claw for holding the outer periphery of the workpiece W may be provided in parallel with the configuration including the suction path 240a.

另外,本實施形態中,如圖21等所示,工件保持機構240具備朝左右方向並設二組的構成(圖中的符號240A、240B)。藉此構成,可將二個工件W同時分別用工件保持機構240A、240B保持。因而,由於能夠實現同時樹脂模製二個工件W的構成,故可縮短製程時間。另外,前述的板壓調整機構中,透過將保持工件W的模窩板236按每個模窩208A、208B分開各別地升降,即使同時壓縮成形的二個工件W有厚度差,也能成形而不會產生傾斜。 In the present embodiment, as shown in FIG. 21 and the like, the workpiece holding mechanism 240 has a configuration in which two sets are provided in the left-right direction (reference numerals 240A and 240B in the figure). With this configuration, the two workpieces W can be simultaneously held by the workpiece holding mechanisms 240A and 240B, respectively. Therefore, since two workpieces W can be resin-molded simultaneously, the processing time can be shortened. In addition, in the aforementioned plate pressure adjustment mechanism, the die nest plate 236 holding the workpiece W is lifted separately for each die nest 208A, 208B, so that even if two workpieces W are compression-molded at the same time, there is a difference in thickness, it can be formed. Without tilting.

如前所述,作為上述樹脂模製裝置1的變化例,也可構成為在一具下模中設置一個模窩,並且配置一個工件W來進行樹脂模製,而製得一個成形品的壓縮成形方式的樹脂模製裝置2(參照圖28)。在該情況中,可以考量以如下述的壓製單元500B的構成來替代壓製單元100B。 As described above, as a modified example of the resin molding apparatus 1 described above, a mold cavity may be provided in a lower mold, and a workpiece W may be disposed to perform resin molding to obtain a compression of a molded product. A resin molding apparatus 2 of a molding method (see FIG. 28). In this case, it is possible to consider replacing the pressing unit 100B with a configuration of the pressing unit 500B as described below.

在一個例子中,壓製單元500B只要作成在下模206中具備介由一片薄膜收容模製樹脂的模窩208以替代收容前述二片薄膜及模製樹脂的二列模窩208A、208B的構成即可。而且,只要作成在上模204中將保持前述二個工件的工件保持機構240A、240B一併使用作保持一個工件W的工件保持機構240的構成即可。 In one example, the pressing unit 500B only needs to have a structure in which the lower mold 206 is provided with a mold cavity 208 for storing the molding resin through one sheet of film instead of the two-row mold cavity 208A, 208B for storing the two films and the molding resin. . Further, it is only necessary to have a configuration in which the workpiece holding mechanism 240A, 240B that holds the two workpieces in the upper mold 204 is used as the workpiece holding mechanism 240 that holds one workpiece W.

(分料單元) (Dispensing unit)

接著,以樹脂模製裝置1所具備的分料單元100C的構成為主,就薄膜F及模製樹脂R的供給動作詳加說明。 Next, the feeding operation of the film F and the molding resin R will be described in detail with the configuration of the dispensing unit 100C included in the resin molding apparatus 1 as a main component.

如前所述,分料單元100C為進行薄膜F及模製樹脂R之供給等的單元。本實施形態中,係在將薄膜F及模製樹脂R向模製用模具202搬送時,使用搬送具400作為保持並搬送這些物料的器具。亦即,透過使用該搬送具400作為器具,將模製樹脂R保持且和薄膜F一起搬送。此外,搬送具400係可將薄膜F令其長邊方向平行地排列保持(詳細容後述)。 As described above, the dispensing unit 100C is a unit that performs supply of the film F, the molding resin R, and the like. In the present embodiment, when the film F and the molding resin R are transferred to the molding die 202, the transfer tool 400 is used as a device for holding and transferring these materials. That is, by using the transfer tool 400 as a tool, the mold resin R is held and transferred together with the film F. In addition, the conveyer 400 is capable of arranging and holding the film F in parallel with its longitudinal direction (the details will be described later).

首先,分料單元100C具備準備臺302,其係供載置尚未保持薄膜F及模製樹脂R狀態的搬送具400,且經進行適當清理。例如,從模製用模具202搬出的搬送具400會附著有模製樹脂R而成為動作不良的原因。因此,藉由用刷子或吸附機構(皆未圖示)將表面連同後述的貫通孔進行清理即可防止動作不良。 First, the sorting unit 100C is provided with a preparation table 302 for placing a conveyer 400 that has not maintained the state of the film F and the molded resin R, and has been properly cleaned. For example, the conveyance tool 400 carried out from the molding die 202 adheres to the molding resin R, and causes a malfunction. Therefore, by cleaning the surface together with a through-hole described later with a brush or an adsorption mechanism (none of which is shown), malfunctions can be prevented.

其次,裝設保持搬送具400並將其在複數個預定位置(臺)間進行搬送的搬送具拾取器304。另外,保持搬送具400的機構已有公知的保持機構(例如,具有保持爪俾進行挾持的構成、具有連通於吸附裝置的吸附孔俾進行吸取的構成等)(未圖示)。例如,可採用在搬送具400的外周部分設置凹凸部,將凹凸部勾掛保持在從搬送具拾取器304的下面向下立設的保持爪,而進行搬送的構成。 Next, a transporter picker 304 is installed to hold the transporter 400 and transport it between a plurality of predetermined positions (stations). In addition, a known holding mechanism (for example, a structure having a holding claw 俾 for holding, a structure having a suction hole 连通 communicating with an adsorption device for sucking, etc.) has been known (not shown). For example, it is possible to adopt a configuration in which a concave-convex portion is provided on the outer peripheral portion of the conveyer 400, and the concave-convex portion is hung and held by a holding claw standing downward from the lower surface of the conveyer picker 304, and the conveyance is performed.

此處,搬送具拾取器304係構成為可朝前後、左右及上下方向移動。藉此構成,可將準備臺302上所載置的搬送具400保持,且朝後述的薄膜臺308及樹脂投下臺310搬送。 Here, the carrier picker 304 is configured to be movable in the front-back, left-right, and up-down directions. With this configuration, the transporter 400 placed on the preparation table 302 can be held, and can be transported to a film table 308 and a resin dropping table 310 described later.

接著,分料單元100C係在位於準備臺302後方的位置處具備:薄膜捲筒306,由長帶狀薄膜F捲成捲筒狀;及薄膜臺(第1臺)308,配設於薄膜捲筒306之上方(本實施形態中為斜上方),供從薄膜捲筒306送出的薄膜F裁切成預定長度的狹條形並加以保持。 Next, the distribution unit 100C is provided at a position behind the preparation table 302: a film roll 306, which is rolled into a roll shape from a long strip film F; and a film table (first station) 308, which is disposed on the film roll Above the tube 306 (inclined upward in this embodiment), the film F sent from the film roll 306 is cut into a narrow strip having a predetermined length and held.

在一個例子中,薄膜臺308及薄膜捲筒306具備朝上下方向從上方依序並設成階層狀的構成(包含前後左右方向的偏位)。藉此構成,和各構成以平面方式並設的傳統裝置比較,可減少裝置的設置面積。 In one example, the film stage 308 and the film roll 306 have a structure (including offset in the front-back, left-right, and left-right directions) that is sequentially arranged from above in the vertical direction. With this configuration, the installation area of the device can be reduced as compared with a conventional device in which the components are juxtaposed in a planar manner.

本實施形態中,薄膜捲筒306係使二個薄膜捲筒306A、306B朝左右方向排列配設。藉此構成,二片同形的薄膜F即可同時供給在薄膜臺308上。此處,薄膜捲筒306A、306B可以其中心軸307a支持設置,也 可用較薄膜捲筒306A、306B之外形更小的間隔設有複數個的輥307b從下方支持設置。在此情況中,透過以輥307b從下方支持薄膜捲筒306A、306B的構成,可將2個排列的薄膜捲筒306A、306B簡易地更換,而不需插拔中心軸307a。此外,薄膜捲筒306向薄膜臺308的送出,也可作成將端部挾住拉出的構成、或以設在薄膜臺308前面的驅動式輥送出的構成。 In this embodiment, the film roll 306 is arranged in such a manner that two film rolls 306A and 306B are aligned in the left-right direction. With this configuration, two pieces of the same-shaped film F can be simultaneously supplied on the film stage 308. Here, the film rolls 306A, 306B can be supported by their central axis 307a, and A plurality of rollers 307b may be provided at a smaller interval than the outer shape of the film rolls 306A and 306B to support the rolls 307b from below. In this case, by supporting the film rolls 306A and 306B from below with the roller 307b, the two film rolls 306A and 306B can be easily replaced without inserting or removing the central shaft 307a. In addition, the feeding of the film roll 306 to the film table 308 may be a configuration in which the ends are clamped and pulled out, or a configuration in which the film roll 306 is driven by a driving roller provided in front of the film table 308 may be used.

另一方面,薄膜臺308具有公知的裁切機構(例如,固定刃刀具、熱熔融刀具等)(未圖示)作為裁切長帶狀薄膜F的機構。此外,保持二片薄膜F的機構則具有公知的保持機構(例如,具有連通於吸附裝置的吸附孔執行吸取的構成等)(未圖示)。此處所裁切的薄膜F與搬送具400係在該薄膜臺308組合。 On the other hand, the film table 308 has a known cutting mechanism (for example, a fixed-blade cutter, a hot-melt cutter, etc.) (not shown) as a mechanism for cutting the long strip-shaped film F. The mechanism for holding the two sheets of film F includes a known holding mechanism (for example, a structure for performing suction by communicating with a suction hole of the suction device) (not shown). The film F cut out here is combined with the conveyor 400 on the film table 308.

此處,本實施形態的搬送具400係如圖9所示,具有形成在上面與下面成為平行之平面的概略平板形狀,且具有保持薄膜F的二列搬入薄膜保持部(圖中,400A、400B)。此外,各搬入薄膜保持部400A、400B在對應各薄膜F的位置(保持各薄膜F的位置),配設有以從上面觀看時會露出各薄膜F之方式形成為貫通孔的樹脂投入孔400a、400b。透過該樹脂投入孔400a、400b形成為對應前述的模窩凹部209的形狀,在模製樹脂R投下並保持在樹脂投入孔400a、400b內時,可以適當的狀態準備模製樹脂R。 Here, as shown in FIG. 9, the conveyer 400 of this embodiment has a roughly flat plate shape formed on a plane parallel to the upper surface and the lower surface, and has two rows of carrying film holding portions (holding film 400A, 400B). In addition, each carrying-in film holding portion 400A, 400B is provided with a resin input hole 400a formed as a through hole so that each film F is exposed when viewed from above, at a position corresponding to each film F (a position where each film F is held). , 400b. The resin insertion holes 400a and 400b are formed through the resin insertion holes 400a and 400b in a shape corresponding to the aforementioned cavity recesses 209. When the molding resin R is dropped and held in the resin insertion holes 400a and 400b, the molding resin R can be prepared in an appropriate state.

再者,樹脂投入孔400a、400b的周圍配設有產生吸附力並保持薄膜的複數個第1吸附孔400c。另 外,第1吸附孔400c係成為後述經由設於第3保持部212A的第2吸附孔212b、或經由(連通)後述設於搬送具拾取器304的第3吸附孔(未圖示)傳達吸附裝置(未圖示)所產生之吸附力的構成。若依據上述構成,即可在藉搬送具拾取器304搬送到薄膜臺308上的搬送具400的下面,將二片薄膜F以朝左右方向排列吸附的狀態加以保持。另外,也可設成以保持爪挾住並保持薄膜F之外周的構成。 Further, a plurality of first adsorption holes 400c are provided around the resin insertion holes 400a and 400b to generate an adsorption force and hold the film. another In addition, the first suction hole 400c serves to convey suction through a second suction hole 212b provided in the third holding portion 212A or a third suction hole (not shown) provided in the transporter picker 304 described later (communication). The structure of the adsorption force generated by the device (not shown). According to the above configuration, the two films F can be held in a state of being aligned and sucked in the left-right direction under the conveyer 400 that is conveyed to the film table 308 by the conveyer picker 304. It is also possible to provide a configuration in which the holding claws hold and hold the outer periphery of the film F.

其次,具備有樹脂投下臺(第2臺)310,其係相對於薄膜臺308配設在側方(在一個例子中為右方),並且構成為可朝前後左右方向移動,供載置藉搬送具拾取器304搬送的搬送具400(下面保持有二片薄膜F的狀態)。另外,樹脂投下臺310具有公知的保持機構(例如,具有保持爪俾進行挾持的構成、具有連通於吸附裝置的吸附孔俾進行吸附的構成等)(未圖示)作為保持所載置之搬送具400的機構。 Secondly, it is provided with a resin dropping stage (second stage) 310, which is disposed on the side (right side in one example) with respect to the film stage 308, and is configured to be movable in the forward, backward, leftward, and rightward direction for placement and borrowing. The transporter 400 transported by the transporter picker 304 (a state where two films F are held on the lower surface). In addition, the resin dropping table 310 has a known holding mechanism (for example, a structure having a holding claw 俾 for holding, a structure having a suction hole 连通 communicating with an adsorption device for holding, etc.) (not shown) as a transport for holding the placement With 400 institutions.

再者,圖1中,係相對於薄膜臺308以上述的樹脂投下臺310夾在中間的配置在側方(在一個例子中為右方)較樹脂投下臺310更高的位置具備有分配器312。該分配器312係將模製樹脂R投入到樹脂投下臺310所載置之搬送具400的樹脂投入孔400a、400b,並將該模製樹脂R搭載(投下)於露出的薄膜F上(樹脂投入孔400a、400b之內側)。該分配器312係以具備例如貯留模製樹脂R的料斗312a、秤量所投下之樹脂重量的重量計312b、將所秤量的模製樹脂R以振動給料器(未圖 示)送出的料槽312c、規範從料槽312c送出並投下之模製樹脂R的投下位置的注口(nozzle)312d等所構成。 Further, in FIG. 1, a dispenser is provided on the side (in the example, the right side) of the film dropping table 308 with the resin dropping table 310 interposed therebetween. 312. The dispenser 312 is configured to insert the molded resin R into the resin insertion holes 400 a and 400 b of the carrier 400 placed on the resin dropping table 310, and mount (drop) the molded resin R on the exposed film F (resin (Inside the insertion holes 400a, 400b). The dispenser 312 is provided with, for example, a hopper 312a for storing the molded resin R, a weight meter 312b that weighs the weight of the resin dropped, and a vibrating feeder (not shown) for weighing the molded resin R. (Shown) a feed chute 312c, a nozzle 312d for regulating the dropping position of the molding resin R to be sent from the chute 312c, and the like.

此處,本實施形態的樹脂投下臺310係構成為可朝前後及左右方向移動(圖1中,係圖示在三個的位置)。藉由朝左右方向的移動,即可在保持有薄膜F的狀態下將載置於樹脂投下臺310上的搬送具400向分配器312的下方進退移動。藉此構成,搬送具400即可在分配器312與薄膜臺308的中間位置、與分配器312之注口312d的正下方位置間移動。而且,藉由前後方向的移動,可將保持有已搭載模製樹脂R之薄膜F的狀態的搬送具400向預定位置(藉後述的第3保持部212A進行搬送具400之保持的位置)搬送。另外,作為變化例,也可考量設成藉分配器312置換該移動範圍之移動的構成來替代樹脂投下臺310左右移動的構成。而且,也可考量設成藉第3保持部212A(後述)置換該移動範圍之移動的構成來替代樹脂投下臺310前後移動的構成(皆未圖示)。 Here, the resin dropping base 310 of this embodiment is configured to be movable in the front-rear and left-right directions (in FIG. 1, three positions are shown). By moving in the left-right direction, the conveyer 400 placed on the resin dropping table 310 can be moved forward and backward under the dispenser 312 while the film F is held. With this configuration, the transfer tool 400 can move between the intermediate position between the dispenser 312 and the film stage 308 and the position directly below the nozzle 312d of the dispenser 312. Furthermore, by moving in the front-rear direction, the conveyer 400 in a state where the film F of the molded resin R is mounted can be conveyed to a predetermined position (a position where the conveyer 400 is held by the third holding section 212A described later). . In addition, as a modification, a configuration in which the movement of the moving range is replaced by the dispenser 312 may be considered instead of a configuration in which the resin dropping table 310 moves left and right. In addition, a configuration in which the movement of the moving range is replaced by a third holding portion 212A (described later) may be considered instead of a configuration in which the resin dropping table 310 moves back and forth (both not shown).

再者,透過使樹脂投下臺310在前後及左右方向的預定路徑一面移動一面從二個注口312d向樹脂投入孔400a、400b送出模製樹脂R,即可在露出於樹脂投入孔400a、400b內的薄膜F上將模製樹脂R以預定厚度均勻不偏倚地填鋪。藉此方式,可防止因薄膜F上的模製樹脂R偏倚所引起的不良品產生。 In addition, by moving the resin dropping table 310 along the predetermined path in the front-rear and left-right directions while feeding the molded resin R from the two nozzles 312d to the resin insertion holes 400a and 400b, the resin injection holes 400a and 400b can be exposed. The inner film F is filled with the molding resin R uniformly and without bias at a predetermined thickness. In this way, the occurrence of defective products due to the bias of the molding resin R on the film F can be prevented.

此處,本實施形態的分配器312在搬送具400的二列樹脂投入孔400a、400b分別具有投入模製樹 脂的二個注口312d。在一個例子中,在對應右側樹脂投入孔400a的位置配設有一方注口312d,並且在對應左側樹脂投入孔400b的位置配設有另一方注口312d。換言之,二個注口312d各自的中心間距離、與樹脂投入孔400a、400b各自的中心間距離係構成為相同。藉此方式,可一邊同時通過各個樹脂投入孔400a、400b的相同對應位置,一邊投入模製樹脂R,故可藉移動距離及移動時間最短的一條路徑將模製樹脂R填鋪在二片薄膜F上。因而,能夠大幅縮短製程時間。另外,也可設成具有一個注口,並藉預定的一條路徑在二片薄膜F上依序填鋪模製樹脂R(未圖示)的構成,作為變化例。 Here, the dispenser 312 of the present embodiment has an injection molding tree in each of the two rows of resin insertion holes 400 a and 400 b of the conveyer 400. Two nozzles 312d for fat. In one example, one injection port 312d is provided at a position corresponding to the right resin input hole 400a, and the other injection port 312d is provided at a position corresponding to the left resin input hole 400b. In other words, the distance between the centers of the two nozzles 312d and the distance between the centers of the resin insertion holes 400a and 400b are the same. In this way, the molding resin R can be injected while passing through the same corresponding positions of the respective resin input holes 400a and 400b at the same time, so the molding resin R can be filled in two films by a path with the shortest distance and time. F on. Therefore, the process time can be shortened significantly. In addition, it is also possible to provide a configuration in which a molding resin R (not shown) is sequentially laminated on the two films F by a predetermined path, as a modification.

其次,具備有樹脂加熱器314,其係透過從保持有已搭載模製樹脂R之薄膜F的搬送具400的上面側進行加熱,俾將該模製樹脂R加熱。另外,加熱搬送具400(模製樹脂R)的構成,係在樹脂加熱器314下面配設公知的加熱機構(例如,電熱線加熱器、紅外線加熱器等)(未圖示)。藉此方式,可藉搬送具400將以搭載於二片薄膜F上的狀態保持的模製樹脂R同時加熱。 Next, a resin heater 314 is provided, which is heated from the upper side of the conveyer 400 holding the film F on which the molded resin R is mounted, and the molded resin R is heated. In addition, the configuration of the heating conveyor 400 (molded resin R) is such that a well-known heating mechanism (for example, a heating wire heater, an infrared heater, etc.) (not shown) is disposed below the resin heater 314. In this way, the mold resin R held in the state of being mounted on the two sheets of film F can be simultaneously heated by the carrier 400.

此處,本實施形態的樹脂加熱器314係配設在樹脂投下臺310的移動路徑上,更具體而言,從分配器312的注口312d的正下方位置移動到藉後述的第3保持部212A進行搬送具400之保持的位置間的路徑中途。藉此方式,在模製樹脂R剛藉分配器312的注口312d投入到搬送具400所保持的薄膜F後,隨即進行將該模製樹脂R加熱的製程。因而,特別是在使用顆粒狀、粉 末狀等的樹脂作為模製樹脂R時,可在搭載於薄膜F上後隨即加熱,將位於表面的粉末狀等樹脂加熱熔融而使之一體化。藉此方式,可防止塵埃(樹脂的微細粉末等)的產生,且防止因塵埃在裝置內擴散而發生動作不良或製品不良。 Here, the resin heater 314 of the present embodiment is arranged on the moving path of the resin dropping table 310, and more specifically, moves from a position directly below the nozzle 312d of the dispenser 312 to a third holding section described later. 212A is in the middle of the path between the positions held by the conveyor 400. In this way, immediately after the molding resin R is fed into the film F held by the carrier 400 through the nozzle 312d of the dispenser 312, the process of heating the molding resin R is performed. Therefore, especially in the use of granular, powder When a resin such as a pellet is used as the molding resin R, it can be heated immediately after being mounted on the film F, and the powdery resin on the surface can be heated and melted to integrate it. In this way, generation of dust (fine powder of resin, etc.) can be prevented, and malfunction or product failure due to the diffusion of dust in the device can be prevented.

另外,樹脂加熱器314的前後位置中,也可具備供給樹脂量測器315,藉以在量測樹脂投入孔400a、400b內投下供給到薄膜F上的模製樹脂R的外觀。該供給樹脂檢查器315可藉由在樹脂投下臺310的移動路徑上方裝設攝像機(單眼攝像機或複眼攝像機),並使用這些裝置的輸出值或拍攝影像利用在記錄所投下的模製樹脂R的厚度或形狀。藉此構成,例如,透過將成形品Wp的成形厚度與實際資訊建立關聯並保存資料,就可由作業人員將這些資料作比較,並選定模製樹脂R的投下條件。藉此方式,可確保有關模製樹脂R供給的追蹤能力(tracerablity),以維持成形品質。 In addition, the resin heater 314 may be provided with a resin supply measuring device 315 at the front and rear positions so that the appearance of the molded resin R supplied to the film F can be measured in the resin input holes 400a and 400b. The supply resin checker 315 can be provided with a camera (single-eye camera or compound-eye camera) above the moving path of the resin dropping stage 310, and the output value or captured image of these devices can be used to record the molding resin R dropped. Thickness or shape. With this configuration, for example, by correlating the molding thickness of the molded product Wp with actual information and storing the data, the operator can compare these data and select the conditions for dropping the molding resin R. In this way, the tracerablity of the supply of the molding resin R can be ensured to maintain the molding quality.

接著,和分料單元100C的各機構協同運作的第2裝載器212具備第3保持部212A。該第3保持部212A係在其下面接受樹脂投下臺310上所載置的搬送具400,向下模206的預定保持位置搬送,並且將已解除薄膜F及模製樹脂R之保持的搬送具400向前述準備臺302上搬送。另外,第3保持部212A具有公知的保持機構(例如,具有保持爪俾進行挾持的構成、具有連通於吸附裝置的吸附孔俾進行吸附的構成等)作為用以保持該搬送具400的搬送具保持部212a。再者,具有第2吸附孔 212b,其係配設在和保持於預定位置的搬送具400的第1吸附孔400c連通的位置,藉以產生(傳遞)由吸附裝置(未圖示)所提供的吸附力。藉此構成,可一面將二片薄膜F(分別搭載有模製樹脂R的狀態)朝左右方向排列吸附在搬送具400之下面的狀態加以維持,一面向下模206的預定保持位置(配設有模窩208的位置)搬送。另外,也可作成在搬送具400的下面具有挾持並保持二片薄膜F外周之保持爪的第3保持部212A。 Next, the second loader 212 operating in cooperation with each mechanism of the sorting unit 100C includes a third holding unit 212A. The third holding portion 212A is a conveying device that receives the conveyer 400 placed on the resin dropping table 310 underneath, and conveys the lower holding position of the mold 206, and releases the holding of the film F and the molded resin R. 400 is transferred onto the preparation table 302. In addition, the third holding unit 212A has a known holding mechanism (for example, a structure having a holding claw 俾 for holding, a structure having an adsorption hole 连通 communicating with an adsorption device for holding, and the like) as a carrier for holding the carrier 400. Holding section 212a. Furthermore, it has a second adsorption hole 212b is disposed at a position communicating with the first suction hole 400c of the conveyer 400 held at a predetermined position, thereby generating (transmitting) the suction force provided by the suction device (not shown). With this configuration, the two films F (in a state in which the molding resin R is mounted) can be aligned and adsorbed under the conveyer 400 in the left-right direction while being maintained, and can be maintained at a predetermined holding position facing the lower mold 206 (arranged). There is a die nest 208) for transportation. In addition, a third holding portion 212A having a holding claw for holding and holding the outer periphery of the two sheets of film F on the lower surface of the conveyer 400 may be prepared.

此處,具備本實施形態之第3保持部212A的第2裝載器212係構成為可朝前後、左右及上下方向移動。藉由左右方向的移動,能夠進行將搬送具400(保持有已分別搭載模製樹脂R之二片薄膜F的狀態)從分料單元100C向壓製單元100B搬送的動作。再者,藉由前後方向的移動,能夠進行將搬送具400(保持分別搭載有模製樹脂R的二片薄膜F的狀態)從模製用模具202的外部向內部(亦即,向開模狀態的上模204與下模206之間)搬送的動作。 Here, the second loader 212 including the third holding portion 212A of this embodiment is configured to be movable in the front-back, left-right, and up-down directions. By moving in the left-right direction, it is possible to carry out the operation of conveying the conveyer 400 (in a state in which the two films F of the molded resin R are each mounted) from the dispensing unit 100C to the pressing unit 100B. In addition, by moving in the front-rear direction, it is possible to carry out the conveyer 400 (in a state in which the two sheets of the film F on which the molding resin R is mounted) are kept from the outside to the inside of the molding die 202 (that is, toward the mold opening). Between the upper die 204 and the lower die 206).

再者,藉由上下方向的移動(也有使前後、或者左右方向的移動組合的情形),即可進行將載置於樹脂投下臺310上的搬送具400(保持分別搭載有模製樹脂R的二片薄膜F的狀態)保持的動作。在此情況中,即可進行在下模206的預定保持位置(配設模窩208的位置)一面保持搬送具400一面將分別搭載有模製樹脂R之二片薄膜F的保持解除,且分別(一對一)載置於二個模窩208A、208B(包含一部分模具面206a)的動作。再者,也 可進行將已解除薄膜F及模製樹脂R之保持的狀態的搬送具400載置到前述的準備臺302上的動作。另外,作為變化例,也可考量將第3保持部212A的一部分移動範圍藉其他機構(樹脂投下臺310、下模206等)的移動進行置換之構成(未圖示)。 In addition, by moving in the up-down direction (the front-back or left-right movement may be combined), it is possible to carry the carrier 400 placed on the resin dropping table 310 (holding each of the molded resin R State of the two thin films F). In this case, the holding of the conveyer 400 at the predetermined holding position of the lower die 206 (the position where the die nest 208 is provided) can be performed while the holding of the two sheets of the film F respectively equipped with the molding resin R is released, and ( One-to-one) operation of placing on two mold sockets 208A, 208B (including a part of the mold surface 206a). Moreover, also The operation of placing the transporter 400 in which the holding of the film F and the molding resin R is released on the aforementioned preparation table 302 can be performed. In addition, as a modification example, a configuration (not shown) in which a part of the moving range of the third holding portion 212A is replaced by the movement of another mechanism (the resin dropping table 310, the lower mold 206, etc.) may be considered.

接著,第2裝載器212具備第4保持部212B,其係用以保持該樹脂模製所得的成形品Wp從模製用模具202(此處為上模204)取出後殘留在下模206的薄膜(已用過薄膜)Fd,並向預定位置(後述的薄膜殘料處理器(film disposer)316)搬送。另外,第4保持部212B具有公知的保持機構(例如,具有連通於吸附裝置的吸附孔俾進行吸附的構成等)作為保持已用過薄膜Fd的搬出薄膜保持部(圖中的符號212c、212d)。 Next, the second loader 212 includes a fourth holding portion 212B, which is a film remaining on the lower mold 206 after the molded product Wp obtained by the resin molding is removed from the molding mold 202 (here, the upper mold 204). The (used film) Fd is transported to a predetermined position (film disposer 316 described later). In addition, the fourth holding portion 212B has a known holding mechanism (for example, a structure having an adsorption hole communicating with the adsorption device to perform adsorption), as a carry-out film holding portion that holds the used film Fd (reference numerals 212c and 212d in the figure). ).

而且,本實施形態的第4保持部212B係作成在上述搬出薄膜保持部212c、212d和模製用模具202(下模206)的二個模窩208A、208B對應的位置朝左右方向並設二列的構成。意即,可將薄膜F令其長邊方向平行地排列保持。藉此方式,可在樹脂模製後藉模製用模具202(下模206)將左右方向排列保持的二片已用過薄膜Fd同時朝左右方向排列保持及搬送。 In addition, the fourth holding portion 212B of the present embodiment is configured such that two positions corresponding to the two die pockets 208A and 208B of the carrying-out film holding portions 212c and 212d and the molding die 202 (lower die 206) are arranged side by side in the left-right direction. The composition of the columns. In other words, the film F can be held in parallel with its longitudinal direction aligned. In this way, after the resin molding, the two used films Fd aligned in the left-right direction can be aligned and held in the left-right direction and transported by the mold 202 (lower mold 206) for molding.

此處,本實施形態中,第4保持部212B與上述的第3保持部212A係一體地構成作為第2裝載器212。在一個例子中,第2裝載器212配設有在前方側具有搬送具保持部212a的第3保持部212A,且配設有在後方側具有左右二列搬出薄膜保持部212c、212d的第4 保持部212B。因而,第3保持部212A及第4保持部212B係設成可作為第2裝載器212以一體方式朝前後、左右及上下方向移動的構成。藉此方式,可實現不僅裝置構成可簡化及小型化,且搭載有模製樹脂R的薄膜F、已用過薄膜Fd皆可各二片同時搬送的構成,製程時間也能縮短。 Here, in the present embodiment, the fourth holding portion 212B and the third holding portion 212A described above are integrally configured as the second loader 212. In one example, the second loader 212 is provided with a third holding portion 212A having a conveyer holding portion 212a on the front side, and a fourth holding portion 212A with two left and right rows of film holding portions 212c and 212d on the rear side. Holding section 212B. Therefore, the 3rd holding part 212A and the 4th holding part 212B are provided as a structure which can be moved integrally as a 2nd loader 212 to a front-back, left-right, and up-down direction. In this way, not only the device configuration can be simplified and miniaturized, but also the film F and the used film Fd on which the molding resin R is mounted can be conveyed simultaneously, and the process time can be shortened.

另外,作為變化例,也可考量將具備第4保持部212B的裝載器和具備上述第3保持部212A的裝載器構成為各別件體(未圖示)。在該情況中,只要構成為可和上述第3保持部212A相同地移動即可。 In addition, as a modification, it is also possible to consider that the loader including the fourth holding portion 212B and the loader including the third holding portion 212A are configured as separate pieces (not shown). In this case, what is necessary is just to be comprised so that it can move similarly to the said 3rd holding part 212A.

接著,分料單元100C具備有薄膜殘料處理器316供收納藉第4保持部212B搬送的已用過薄膜Fd。在一個例子中,薄膜殘料處理器316係形成為上部(上面部分)設有開口的箱狀。藉此構成,在搬送已用過薄膜Fd的第4保持部212B到達薄膜殘料處理器316正上方位置時,即停止第4保持部212B的搬送動作,並且可藉由解除已用過薄膜Fd的保持,使該已用過薄膜Fd落下並收納到薄膜殘料處理器316內。 Next, the sorting unit 100C is provided with a film residue processor 316 for storing the used film Fd transferred by the fourth holding section 212B. In one example, the film residue processor 316 is formed in a box shape having an opening (an upper portion). With this configuration, when the fourth holding portion 212B carrying the used film Fd reaches a position directly above the film residue processor 316, the conveying operation of the fourth holding portion 212B is stopped, and the used film Fd can be released by Keep the used film Fd down and store it in the film residue processor 316.

如以上所說明,若依據本實施形態的構成,供給二個狹條形工件W,且在(樹脂模製)加工後取出二個成形品Wp之動作可有效率地進行的裝置得以實現。特別是,在一具下模中設置二個模窩208A、208B,並且配置二個工件W總括地進行樹脂模製時,可一邊維持在二片薄膜F分別搭載模製樹脂R的狀態,一邊向下模206的模窩208A、208B搬送。因而,和傳統裝置比較,可 抑制製程或裝置構造的複雜化,同時大幅提升生產性。再者,和在一具下模206中設置二個模窩208A、208B的並且配置二個工件W,並以一片(一張)薄膜F覆蓋全部的構成比較,也可謀求薄膜使用量的減少。 As described above, according to the configuration of this embodiment, an apparatus that efficiently supplies two narrow strip-shaped workpieces W and takes out two molded products Wp after (resin molding) processing is performed. In particular, when two mold sockets 208A and 208B are provided in one lower mold, and two workpieces W are collectively disposed for resin molding, it is possible to maintain the state where the two films F respectively carry the molding resin R while maintaining the state It is conveyed to the die sockets 208A and 208B of the lower die 206. Therefore, compared with conventional devices, While suppressing the complication of process or device structure, the productivity is greatly improved. In addition, compared with a configuration in which two die sockets 208A and 208B are provided in one lower die 206, two workpieces W are arranged, and one piece (sheet) of film F covers all, a reduction in the amount of film used can also be achieved .

再者,由於將用於薄膜F之供給的薄膜臺308、與用於模製樹脂R之供給的樹脂投下臺310可作成各別的構成,且併行地進行處理,故相較於傳統裝置,可縮短製程時間。 In addition, since the film stage 308 for supplying the film F and the resin dropping stage 310 for supplying the molding resin R can be separately formed and processed in parallel, compared with the conventional device, Can shorten the process time.

如前所述,作為上述樹脂模製裝置1的變化例,也可構成為在一具下模設置一個模窩,並且配置一個工件W進行樹脂模製,而製得一個成形品之壓縮成形方式的樹脂模製裝置2(參照圖28)。在此情況中,可設成能使用較作成上述狹條形薄膜的薄膜F更寬的寬幅薄膜來作為薄膜F的構成。而且,使用寬度較狹條形薄膜更寬的正方形或長方形的單片形薄膜F作為該寬幅薄膜甚為簡易。但,作為寬幅薄膜,只要寬度較狹條形薄膜更大,也可使用剪切成圓形的單片形薄膜F。在此情況中,可考量如下述分料單元500C的構成來替代分料單元100C。 As described above, as a modified example of the resin molding apparatus 1 described above, a compression molding method for forming a molded article by forming a mold cavity in a lower mold and arranging a workpiece W for resin molding may be adopted. Resin molding device 2 (see FIG. 28). In this case, a film having a wider width than the film F made of the above-mentioned strip-shaped film can be used as the configuration of the film F. Moreover, it is very simple to use a square or rectangular monolithic film F having a wider width than the narrow strip film as the wide film. However, as the wide film, as long as the width is larger than that of the narrow strip film, a single sheet film F cut into a circle may be used. In this case, the configuration of the distribution unit 500C as described below may be considered instead of the distribution unit 100C.

在一個例子中,分料單元500C只要作成能將前述搬送具400的二列搬入薄膜保持部400A、400B、與保持一片薄膜F(寬幅薄膜)的大型搬入薄膜保持部516置換設置的構成即可。再者,前述二列搬出薄膜保持部212c、212d只要設成不論是二片狹條形薄膜的已用過薄膜Fd、或是一片寬幅薄膜的已用過薄膜Fd皆可吸附保持的構成即可。 In one example, the material distribution unit 500C may be configured to replace the two rows of the conveyance device 400 into the film holding sections 400A and 400B and replace the large-sized carrying film holding section 516 that holds one film F (wide film). can. In addition, as long as the two rows of carrying-out film holding portions 212c and 212d are configured to be capable of adsorbing and holding both the used film Fd of two narrow strip films or the used film Fd of one wide film, that is, can.

依此方式,有關可將狹條形薄膜與寬幅薄膜切換使用的構成,可考量例如第3保持部212A設為具有將狹條形用與寬幅用的2種搬送具400共通地保持的搬送具保持部212a的構成。以搬送具保持部212a保持的第一搬送具400,係為以可將屬於狹條形薄膜的二片薄膜F以令其長邊方向平行地排列保持的方式具有二列搬入薄膜保持部400A、400B的一個狹條形薄膜搬送具400。作為以搬送具保持部212a保持的第二搬送具400,則可考量將具有保持屬於一片寬幅薄膜的薄膜F的一個搬入薄膜保持部516的搬送具400共通地保持的搬送具保持部212a的構成。 In this way, regarding the configuration in which the narrow strip film and the wide width film can be switched, for example, the third holding portion 212A may be configured to have two types of conveyers 400 for narrow strip and wide width. The structure of the carrier holding part 212a. The first conveyer 400 held by the conveyer holding section 212a has two rows of the film holding sections 400A so that the two films F belonging to the strip-shaped film can be aligned and held in parallel in the longitudinal direction. A strip-shaped film carrier 400 of 400B. As the second transporter 400 held by the transporter holding section 212a, consideration can be given to the common use of the transporter holding section 212a of the transporter 400 having one of the transporting film 400 holding the film F belonging to one wide film into the film holding section 516. Make up.

透過設成此種構成,由於可按照要加工為成形品Wp的工件W屬於狹條形工件或寬幅工件的任一種工件W,而藉共通的搬送具保持部212a保持不同的搬送具400,將薄膜F和模製樹脂R一起搬入,故可設成能夠以簡易的切換供給薄膜F的構成。 With such a configuration, since the workpiece W to be processed into the molded product Wp belongs to any one of the narrow-shaped workpiece and the wide-shaped workpiece W, the different conveyor 400 is held by the common conveyor holding unit 212a. Since the film F is carried in together with the mold resin R, it can be set as the structure which can supply the film F with simple switching.

再者,有關可將狹條形薄膜與寬幅薄膜切換使用的構成,由於第4保持部212B可設成在將屬於二片狹條形薄膜的已用過薄膜Fd令其長邊方向平行地朝左右方向排列保持的二個狹條形區域、與保持一片屬於寬幅薄膜的已用過薄膜Fd的寬幅區域重複的區域,具有配置有吸附保持已用過薄膜Fd的複數個吸附部的搬出薄膜保持部212c、212d的構成。在此情況中,例如由於應吸附的位置重疊,故不論是屬於狹條形工件用的狹條形薄膜的已用過薄膜Fd、或屬於一片寬幅薄膜的已用過薄膜Fd,皆可用相同的吸附部吸附保持。 In addition, regarding the configuration in which the narrow strip film and the wide film can be switched, the fourth holding portion 212B can be provided so that the long sides of the used film Fd belonging to the two narrow strip films are parallel to each other. The two narrow stripe areas that are aligned and held in the left-right direction and the area that overlaps the wide area that holds a used film Fd belonging to a wide film are provided with a plurality of adsorption sections that are configured to adsorb and hold the used film Fd. The structure of carrying out the film holding parts 212c and 212d. In this case, for example, because the positions to be adsorbed overlap, the same used film Fd, which is a thin strip film for a narrow strip workpiece, or used film Fd, which is a wide film, may be the same. The adsorption section is held by adsorption.

若依據此種構成,不論是保持屬於狹條形薄膜的已用過薄膜Fd的情形、或吸附保持屬於寬幅薄膜的已用過薄膜Fd的情形,透過在可保持已用過薄膜Fd的位置配置吸附部,對於狹條形薄膜與寬幅薄膜的任一種已用過薄膜Fd,均可進行搬出,而不需進行構成的置換等。 According to such a configuration, whether the used film Fd belonging to the narrow film or the used film Fd belonging to the wide film is adsorbed and held, the used film Fd can be held at a position where the used film Fd can be held. The adsorption unit is arranged, and the used film Fd of any of the narrow strip film and the wide film can be carried out without replacement of the structure or the like.

另外,分料單元500C的平面配置可作成使薄膜臺308與樹脂投下臺310調換的配置,以代替圖1及圖8所示的構造。在此情況中,透過配合此項調換而使準備臺302也移動到裝置側面位置,對於搬送具400的設置或清理用的刷子,皆可從裝置側面進出,使這些調換作業也變得容易。 In addition, the plane arrangement of the material distribution unit 500C may be an arrangement in which the film stage 308 and the resin dropping stage 310 are replaced, instead of the structure shown in FIGS. 1 and 8. In this case, the preparation table 302 is also moved to the side of the device by cooperating with this replacement, and the brushes for setting or cleaning the conveyer 400 can be accessed from the side of the device, making these replacement operations easier.

(樹脂模製動作) (Resin molding operation)

接著,就使用本發明實施形態的樹脂模製裝置1進行樹脂模製的動作,一面參照圖5至圖27,一面以壓製單元100B及分料單元100C的動作為中心進行說明。 Next, the resin molding operation using the resin molding apparatus 1 according to the embodiment of the present invention will be described with reference to FIGS. 5 to 27 while focusing on the operations of the pressing unit 100B and the dispensing unit 100C.

首先,藉搬送具拾取器304保持已在準備臺302上清理過的搬送具400(未保持薄膜F及模製樹脂R的狀態),且如圖11所示地向薄膜臺308上搬送。在此情況中,搬送具400可在以搬送具拾取器304的保持爪保持的狀態搬送。另一方面,從二個薄膜捲筒306A、306B送出的二片薄膜F則分別裁切成預定長度的狹條形,並保持於薄膜臺308上。 First, the conveyer 400 which has been cleaned on the preparation table 302 is held by the conveyer picker 304 (in a state where the film F and the molding resin R are not held), and is conveyed onto the film table 308 as shown in FIG. 11. In this case, the conveyance tool 400 can be conveyed in the state hold | maintained by the holding claw of the conveyance tool picker 304. On the other hand, the two films F sent from the two film rolls 306A and 306B are respectively cut into narrow strips of a predetermined length and held on a film table 308.

接著,如圖12所示,藉由使搬送具拾取器304向下方移動(下降),令搬送具400的下面抵接於薄膜臺308上的二片薄膜F。 Next, as shown in FIG. 12, by moving (falling) the conveyer picker 304 downward, the lower surface of the conveyer 400 is brought into contact with the two films F on the film table 308.

其次,如圖13所示,經由搬送具拾取器304使搬送具400的第1吸附孔400c產生吸附力,且以二片薄膜F吸附保持於搬送具400之下面的狀態,使搬送具拾取器304向上方移動(上升)。 Next, as shown in FIG. 13, the first suction hole 400c of the conveyer 400 is attracted via the conveyer picker 304, and the two films F are adsorbed and held below the conveyer 400, so that the conveyer picker is made. 304 moves upward (up).

然後,如圖14所示,藉由使搬送具拾取器304向側方(右方)移動,使藉搬送具拾取器304保持的搬送具400(保持有二片薄膜F的狀態)向樹脂投下臺310上搬送。 Then, as shown in FIG. 14, by moving the transporter picker 304 to the side (right side), the transporter 400 (in a state where the two films F are held) held by the transporter picker 304 is dropped onto the resin. Transported on stage 310.

接著,如圖15所示,藉由使搬送具拾取器304向下方移動(下降),搬送具400下面的二片薄膜F會抵接在樹脂投下臺310上。在該狀態下,使藉搬送具拾取器304之保持機構對搬送具400的保持解除(停止),令搬送具400(保持有二片薄膜F的狀態)載置於樹脂投下臺310上。藉此動作,搬送具拾取器304會將下面側保持有薄膜F之狀態的搬送具400保持,從薄膜臺308搬送到樹脂投下臺310的一系列動作就結束。 Next, as shown in FIG. 15, by moving (falling) the transporter picker 304 downward, the two films F under the transporter 400 abut on the resin dropping table 310. In this state, the holding mechanism of the carrier picker 304 is released (stopped) from the holding of the carrier 400, and the carrier 400 (in a state where the two films F are held) is placed on the resin dropping table 310. With this operation, the transporter picker 304 holds the transporter 400 in a state where the film F is held on the lower side, and the series of operations of transporting from the film table 308 to the resin dropping table 310 is completed.

其次,藉由使樹脂投下臺310向側方(右方)移動,如圖16所示,載置於樹脂投下臺310上的搬送具400(保持有二片薄膜F的狀態)即可朝分配器312的注口312d正下方的位置搬送。 Next, by moving the resin dropping table 310 to the side (right side), as shown in FIG. 16, the carrier 400 (the state where the two films F are held) placed on the resin dropping table 310 can be distributed toward The nozzle 312d of the device 312 is conveyed at a position directly below the nozzle 312d.

然後,如圖17所示,使用二個注口312d將模製樹脂R向搬送具400的二列樹脂投入孔400a、 400b內側同時投入。此時,由於透過預先量測工件W的厚度,可將向各樹脂投入孔400a、400b內投下供給的模製樹脂R量進行調整,故可將供給到模窩208的模製樹脂R量最佳化。例如,將從二個注口312d投下的模製樹脂R在分配器312側預先各別量測,在對應注口312d之一方的既定量模製樹脂已經投下的時刻,即停止該模製樹脂R的投下,另一方則繼續進行投下動作,直到已投下既定量的模製樹脂。 Then, as shown in FIG. 17, using two nozzles 312 d, the molding resin R is introduced into the two rows of resin insertion holes 400 a, At the same time, the inner side of 400b is put in. At this time, since the thickness of the workpiece W can be measured in advance, the amount of the molding resin R supplied into each of the resin insertion holes 400a and 400b can be adjusted, so that the amount of the molding resin R supplied to the mold cavity 208 can be maximized. Optimization. For example, the molding resin R dropped from the two nozzles 312d is measured in advance on the dispenser 312 side, and when the predetermined amount of molding resin corresponding to one of the nozzles 312d has been dropped, the molding resin is stopped. When R is dropped, the other party continues to drop until a predetermined amount of molding resin has been dropped.

再者,在從二個注口312d投下模製樹脂R之際,係使已搭載搬送具400的樹脂投下臺310沿著任意的模式移動。藉此動作,即可在各樹脂投入孔400a、400b內使模製樹脂R供給成對應的模式(將前述的任意模式旋轉180度後的模式)。此處,透過使樹脂投下臺310沿著無間隙的模式移動,模製樹脂R即可以預定厚度均勻而不偏倚地分別鋪填到二片薄膜F上。例如,藉由使樹脂投下臺310沿著將樹脂投入孔400a、400b朝縱向或橫向作n分割(n為2以上的整數)之直線的接近端部彼此間的連結直線所構成的模式移動,即可在樹脂投入孔400a、400b內整體平均地供給模製樹脂R。另外,此處所稱的「直線」,其間隔不必一定要均等,也可在中途折曲。 When the molding resin R is dropped from the two nozzles 312d, the resin dropping table 310 on which the transfer tool 400 is mounted is moved in an arbitrary pattern. With this operation, it is possible to supply the molded resin R into a corresponding pattern (a pattern in which the aforementioned arbitrary pattern is rotated by 180 degrees) in each of the resin insertion holes 400a and 400b. Here, by moving the resin dropping table 310 in a gap-free mode, the molding resin R can be separately filled on the two films F with a predetermined thickness uniformly and without bias. For example, the resin dropping stage 310 is moved along a pattern formed by connecting straight lines near the ends of a straight line that divides the resin dropping holes 400a and 400b in the vertical or horizontal direction by n divisions (n is an integer of 2 or more). That is, the entire molding resin R can be supplied uniformly in the resin insertion holes 400a and 400b. In addition, the "straight line" referred to here does not have to be evenly spaced, and may be bent halfway.

接著,透過使樹脂投下臺310向前方移動,而如圖18所示,載置於樹脂投下臺310上的搬送具400可一邊通過樹脂加熱器314正下方的位置一邊搬送。藉此動作,保持在搬送具400之狀態的薄膜F上的模製樹 脂R的加熱就可進行。然後,透過使樹脂投下臺310再向前方移動,如圖19所示,載置於樹脂投下臺310上的搬送具400即可向預定位置(藉第3保持部212A進行搬送具400之保持的位置)搬送。 Next, by moving the resin dropping table 310 forward, as shown in FIG. 18, the conveyer 400 placed on the resin dropping table 310 can be transferred while passing through the position directly below the resin heater 314. With this operation, the molding tree held on the film F in the state of the carrier 400 Heating of the lipid R can be performed. Then, by moving the resin dropping table 310 forward, as shown in FIG. 19, the carrier 400 placed on the resin dropping table 310 can be moved to a predetermined position (the holding of the carrier 400 by the third holding section 212A) Location).

接著,從圖19所示的狀態,藉由使第3保持部212A向下方移動(下降),第3保持部212A之下面即抵接於樹脂投下臺310上的搬送具400。然後,第3保持部212A會以保持爪保持搬送具400。而且,經由第3保持部212A使搬送具400的第1吸附孔400c產生吸附力,使二片薄膜F吸附在搬送具400的下面。在維持該狀態的同時,藉第3保持部212A保持搬送具400,如圖20所示地,令第3保持部212A及搬送具400向上方移動(上升)。 Next, from the state shown in FIG. 19, by moving (lowering) the third holding portion 212A downward, the lower surface of the third holding portion 212A comes into contact with the conveyer 400 on the resin dropping table 310. Then, the third holding portion 212A holds the transporter 400 with the holding claw. Then, the first suction hole 400c of the conveyor 400 is caused to generate an adsorption force via the third holding portion 212A, and the two films F are adsorbed to the lower surface of the conveyor 400. While maintaining this state, the transporter 400 is held by the third holding portion 212A, and as shown in FIG. 20, the third holding portion 212A and the transporting device 400 are moved (raised) upward.

接著,藉由使第2裝載器212移動,如圖21所示地,保持於第3保持部212A的搬送具400即從模製用模具202外部向內部(亦即,向開模狀態的上模204與下模206之間)搬送。另一方面,在搬送具400被搬送到模製用模具202之前,保持在第1裝載器210的第1保持部210A的二個工件W會先被搬入上模204。此時,首先,第1裝載器210會向模製用模具的內側退入(進入),在第2保持部210B先行樹脂模製,並從上模204接收所成形的成形品Wp(參照圖5)。接著,第1裝載器210會在模製用模具內側前進,保持在保持部210A的二個工件W則被交接到上模204。藉此動作,如圖21所示,成為藉第1保持部210A搬入的二個工件W被保 持在上模204的狀態,而在搬送具400的搬送前,工件W已經充分加熱。 Next, by moving the second loader 212, as shown in FIG. 21, the conveyer 400 held by the third holding portion 212A is moved from the outside to the inside of the molding die 202 (that is, upward in the opened state). Between the die 204 and the lower die 206). On the other hand, before the transfer tool 400 is transferred to the molding die 202, the two workpieces W held in the first holding section 210A of the first loader 210 are first transferred into the upper die 204. At this time, first, the first loader 210 is retracted (entered) to the inside of the mold, and the second holding portion 210B is first resin-molded, and then receives the molded product Wp from the upper mold 204 (see FIG. 5). Next, the first loader 210 advances inside the mold for molding, and the two workpieces W held in the holding portion 210A are delivered to the upper mold 204. With this operation, as shown in FIG. 21, the two workpieces W that have been carried in by the first holding section 210A are secured. While being held in the upper mold 204, the workpiece W has been sufficiently heated before being transported by the carrier 400.

再者,在搬送具400被搬送到模製用模具202之前,先以第2裝載器212之第4保持部212B將已用過薄膜Fd保持並從下模206搬出。此時,首先,第2裝載器212會向模製用模具的內側退入(進入),以第4保持部212B吸附並接收先前在樹脂模製時所使用並保持於下模206的已用過薄膜Fd(參照圖6)。藉此方式,即可對模製用模具202搬入搬送具400。 Before the transfer tool 400 is transferred to the molding die 202, the used film Fd is held by the fourth holding portion 212B of the second loader 212 and is carried out from the lower die 206. At this time, first, the second loader 212 is retracted (entered) into the inside of the mold for molding, and the fourth holding part 212B is used to absorb and receive the used material which was previously used in the resin molding and held in the lower mold 206. Through the film Fd (see FIG. 6). In this way, the transfer mold 400 can be carried into the mold 202 for molding.

接著,如圖22所示,透過使第3保持部212A向下方移動(下降),搬送具400下面的二片薄膜F(搭載有模製樹脂R的狀態)會抵接在下模206上。此時,各薄膜F(搭載有模製樹脂R的部分)就收納載置於模窩208A、208B內。 Next, as shown in FIG. 22, by moving (lowering) the third holding portion 212A downward, the two films F (in a state where the molding resin R is mounted) under the conveyer 400 abut on the lower mold 206. At this time, each film F (the part on which the molding resin R is mounted) is housed and placed in the mold pockets 208A and 208B.

其次,令經由第3保持部212A產生的搬送具400之第1吸附孔400c的吸附力停止,從搬送具400解除對二片薄膜F(搭載有模製樹脂R的狀態)的保持。此時,各薄膜F的外緣部分係分別在模窩208A、208B外的模具面206a載置成附掛在吸附路230b的一端部位。此處,係從吸附路230b吸引薄膜F,使薄膜F吸附保持在模窩208外側的模具面206a。然後,透過從吸附路230a吸引薄膜F,如圖23所示地,令薄膜F吸附於模具面206a並保持在模窩208內面(模窩凹部209的模具面)。藉此動作,模製樹脂R即介著薄膜F供給到模窩208內(模窩凹部209上)。 Next, the suction force of the first suction hole 400c of the transporter 400 generated through the third holding section 212A is stopped, and the holding of the two films F (in a state where the molding resin R is mounted) is released from the transporter 400. At this time, the outer edge portion of each film F is placed on the mold surface 206a outside the mold sockets 208A and 208B so as to be attached to one end portion of the suction path 230b. Here, the film F is sucked from the suction path 230b, and the film F is sucked and held on the mold surface 206a outside the die cavity 208. Then, the film F is sucked through the suction path 230a, and as shown in FIG. 23, the film F is adsorbed on the mold surface 206a and held on the inner surface of the mold cavity 208 (mold surface of the mold cavity recessed portion 209). With this operation, the molding resin R is supplied into the cavity 208 (on the cavity recess 209) through the film F.

接著,如圖24所示地,藉由使第3保持部212A移動而取出搬送具400。此時,保持在第3保持部212A的搬送具400(未保持有薄膜F及模製樹脂R的狀態)即被從模製用模具202的內部向外部(亦即,從開模狀態的上模204與下模206之間向外部)取出,並向準備臺302上搬送。此處,搬送具400可加以清理再使用。 Next, as shown in FIG. 24, the conveyance tool 400 is taken out by moving the 3rd holding part 212A. At this time, the conveyer 400 (in a state where the film F and the molding resin R are not held) held in the third holding portion 212A is moved from the inside of the molding die 202 to the outside (that is, from the top of the opened state). The mold 204 and the lower mold 206 are taken out to the outside, and transferred to the preparation table 302. Here, the transfer tool 400 can be cleaned and reused.

然後,如圖25所示,進行模製用模具202的閉模,並藉上模204及下模206夾住二個工件W。 Then, as shown in FIG. 25, the mold 202 is closed, and the two workpieces W are clamped by the upper mold 204 and the lower mold 206.

接著,如圖26所示,藉由使各模窩208A、208B的模窩件226A、226B相對地上升,即可對二個工件W藉由模製樹脂R受到加熱加壓而熱硬化,同時進行樹脂模製(壓縮成形)。藉此動作,即可製成二個成形品Wp。 Next, as shown in FIG. 26, by relatively raising the die nest pieces 226A, 226B of each die nest 208A, 208B, the two workpieces W can be thermally hardened by being heated and pressurized by the molding resin R, and at the same time, Resin molding (compression molding) is performed. With this operation, two molded products Wp can be produced.

其次,如圖27所示,進行模製用模具202的開模。此時,成形品Wp及已用過薄膜Fd會被分離,成為二個成形品Wp保持在上模204,並且,二片已用過薄膜Fd保持在下模206的狀態。在此狀態下,如上所述,透過成形品Wp與已用過薄膜Fd被分別取出及搬送,一組的模製動作即告結束。 Next, as shown in FIG. 27, the mold 202 for mold opening is performed. At this time, the molded product Wp and the used film Fd are separated, and the two molded products Wp are held in the upper mold 204, and the two used films Fd are held in the lower mold 206. In this state, as described above, the through-molded product Wp and the used film Fd are taken out and transported separately, and one set of molding operations is completed.

另外,有關如上所述的模製動作,為了動作的效率化,較佳為使用複數個搬送具400同時併行各製程。在此情況中,在樹脂模製裝置1的內部,較佳為設成具備複數個搬送具400,且使搬送具400在上述的各製程內循環的構成。亦即,只要在:於準備臺302清理搬送具400的清理製程、薄膜F組合於搬送具400的 薄膜設置製程、對已和薄膜F組合的搬送具400投下模製樹脂R的樹脂投下製程、及對模製用模具202供給薄膜F及模製樹脂R的樹脂供給製程之間,以使複數個搬送具400進行不同製程之處理的方式,在樹脂模製裝置1對控制各部動作的控制部(未圖示)進行控制即可。 In addition, regarding the above-mentioned molding operation, in order to make the operation more efficient, it is preferable to use a plurality of conveyers 400 to perform the processes in parallel at the same time. In this case, it is preferable that the inside of the resin molding apparatus 1 is provided with a plurality of conveyance tools 400 and the conveyance tools 400 are circulated in each of the processes described above. That is, as long as: the cleaning process of cleaning the conveyer 400 at the preparation table 302, The film setting process, the resin casting process of dropping the molding resin R onto the conveyor 400 that has been combined with the film F, and the resin supplying process of supplying the film F and the molding resin R to the molding die 202, so that a plurality of For the manner in which the conveyer 400 performs processing in different processes, the resin molding apparatus 1 may control a control unit (not shown) that controls the operation of each unit.

藉此方式,可縮短各製程中搬送具400的等待時間,且可提升生產性。例如,藉由使一般情況下容易耗時的對薄膜F供給模製樹脂R的製程、與其它製程同時併行,即可有效率地進行裝置內的製程,並能提高生產性。 In this way, the waiting time of the carrier 400 in each process can be shortened, and productivity can be improved. For example, by making the process of supplying the molding resin R to the film F easy and time-consuming in general, and simultaneously with other processes, the process in the apparatus can be efficiently performed, and productivity can be improved.

另外,使用作為變化例的樹脂模製裝置2進行樹脂模製時的動作,基本上係和使用上述樹脂模製裝置1進行樹脂模製時的動作相同。在此情況中,只要對於二個工件W、二個薄膜F(及所搭載的模製樹脂R)、二個成形品Wp使裝置構成等分別和一個工件W、一個薄膜F(及所搭載的模製樹脂R)、一個成形品Wp對應即可。 In addition, the operation at the time of resin molding using the resin molding device 2 as a modification is basically the same as the operation at the time of resin molding using the resin molding device 1 described above. In this case, as long as the two workpieces W, the two films F (and the molded resin R mounted thereon), the two molded products Wp constitute the device configuration, etc., and the one workpiece W and the one film F (and the mounted film W) The molding resin R) and one molded product Wp may correspond.

如以上所說明,若依據本發明的樹脂模製裝置及樹脂模製方法,可謀求對工件、成形品進行供給、收納、測量厚度、及搬送等的機構朝上下方向階層式配置之構成的實現。因而,相較於傳統裝置,可減少設置面積。 As described above, according to the resin molding apparatus and the resin molding method of the present invention, it is possible to realize a structure in which the mechanisms for supplying, storing, measuring thickness, and conveying the workpiece and the molded product are arranged in a vertical direction in a vertical direction. . Therefore, compared with the conventional device, the installation area can be reduced.

再者,可謀求將工件、成形品以二個排列狀態進行處理、搬送之構成、及在一個下模設置二個模窩並且分別對各模窩配置工件同時進行樹脂模製之構成 的實現。依此方式,由於可同時搬送各二個工件與成形品、以及薄膜與模製樹脂,並且可同時樹脂模製二個工件,故相較於傳統裝置,可大幅縮短製程時間。而且,裝置構成或製程都可簡化。 In addition, it is possible to obtain a structure in which workpieces and molded products are processed and transported in two aligned states, and a structure in which two mold cavities are provided in a lower mold, and workpieces are disposed in each mold cavity and resin molding is performed simultaneously. Implementation. In this way, since two workpieces and a molded article, and a film and a molded resin can be transported simultaneously, and two workpieces can be resin-molded at the same time, compared with the conventional device, the process time can be greatly reduced. Moreover, the device configuration or manufacturing process can be simplified.

另外,本發明並不限定於以上說明的實施例,在不逸離本發明的範圍內,可進行各種變更。特別是,雖例舉了下模中具備模窩的壓縮成形方式的樹脂模製裝置來說明,但也可應用在上模中具備模窩的構成等。 The present invention is not limited to the embodiments described above, and various changes can be made without departing from the scope of the present invention. In particular, although a resin molding apparatus of a compression molding method including a die cavity in the lower mold has been described as an example, it can also be applied to a configuration including a die cavity in the upper mold.

此外,以上說明的樹脂模製裝置的整體動作中,也可透過一面進行以下所說明的樹脂供給控制一面依序進行樹脂模製來謀求壓縮成形中對維持成形品質(成形厚度的均勻化)甚為重要的樹脂供給均勻化。 In addition, in the overall operation of the resin molding apparatus described above, it is also possible to perform resin molding sequentially while performing resin supply control described below to maintain the molding quality (uniformity of the molding thickness) during compression molding. Uniformity of important resin supply.

(樹脂供給控制) (Resin Supply Control)

以下,參照圖面就本實施形態中用於控制樹脂供給的構成或動作詳細說明。圖29為本發明實施形態的樹脂模製裝置的控制構成例的方塊圖。控制部CTR係以CPU等構成,並和控制上述工件處理單元100A或分料單元100C內之各部協同動作,俾進行模製樹脂R的供給控制。再者,控制部CTR會執行用於作業人員操作之顯示部DIS的顯示控制,從輸入部INP受理輸入,將必要的資訊從記憶部MEM讀出或記憶。 Hereinafter, the configuration or operation for controlling the resin supply in this embodiment will be described in detail with reference to the drawings. FIG. 29 is a block diagram showing a control configuration example of a resin molding apparatus according to an embodiment of the present invention. The control unit CTR is constituted by a CPU or the like, and cooperates with each unit that controls the workpiece processing unit 100A or the dispensing unit 100C to perform supply control of the molding resin R. In addition, the control unit CTR performs display control of the display unit DIS for operator operation, receives input from the input unit INP, and reads or memorizes necessary information from the memory unit MEM.

圖30為本發明實施形態的樹脂模製裝置的樹脂供給動作例的流程圖。此處說明的動作係相當於用以對一個工件W樹脂模製所需的一組動作(一系列動 作)。此外,實際的樹脂模製裝置1內,因為要對複數個工件W併行施行各個動作,故會針對這些一系列動作中必要的部分在局部性重複的時間軸上進行。 FIG. 30 is a flowchart of an example of a resin supply operation of the resin molding apparatus according to the embodiment of the present invention. The actions described here correspond to a set of actions (a series of actions required for resin molding a workpiece W). 作). In addition, in the actual resin molding apparatus 1, each operation is performed on a plurality of workpieces W in parallel, and therefore, necessary portions of these series of operations are performed on a time axis that is locally repeated.

該圖所示的樹脂供給動作中,首先,控制部CTR會從記憶部MEM取得成形條件資訊Dc(步驟S1)。此處,控制部CTR係從記憶部MEM讀出例如成形品Wp的樹脂部分成形厚度(目標值)、或在搬送具400內投下模製樹脂R的模式作為成形條件資訊Dc。該模製樹脂R的投下模式雖係當作樹脂投下臺310的動作控制模式預行記憶,但不是只有以移動目標點構成的樹脂投下臺310的移動位置,也包含各點間的樹脂投下臺310的移動速度。此外,模製樹脂R的投下模式也包含從注口312d投下模製樹脂R的速度(每單位時間的投下量)。 In the resin supply operation shown in this figure, first, the control unit CTR obtains the molding condition information Dc from the memory unit MEM (step S1). Here, the control unit CTR reads, as the molding condition information Dc, a mode in which, for example, the resin part molding thickness (target value) of the molded product Wp, or a pattern in which the molding resin R is dropped in the conveyer 400 is read from the memory MEM. Although the casting mode of the molded resin R is memorized in advance as the operation control mode of the resin dropping stage 310, it is not only the moving position of the resin dropping stage 310 that is formed by moving the target point, but also the resin dropping stage between the points. 310 movement speed. In addition, the dropping mode of the molding resin R also includes a speed (dropping amount per unit time) for dropping the molding resin R from the nozzle 312d.

另一方面,控制部CTR會取得此後要樹脂模製之工件W的工件資訊Dw(步驟S2)。此處,工件處理單元100A中,讀碼器115係藉由將從供給匣102取出之工件W所附的二維碼讀取,並輸出至控制部CTR,讓控制部CTR取得各個工件W的工件資訊Dw(例如連續編號等)。接著,控制部CTR會取得厚度資訊Dt(步驟S3)。此處,工件量測器114係量測工件W的厚度(詳細如上述),並透過向控制部CTR輸出,讓控制部CTR取得作為各個工件W之基材Wa或電子零件Wb的厚度等的厚度資訊Dt。 On the other hand, the control unit CTR obtains the workpiece information Dw of the workpiece W to be resin-molded thereafter (step S2). Here, in the workpiece processing unit 100A, the code reader 115 reads the two-dimensional code attached to the workpiece W taken from the supply cassette 102 and outputs it to the control unit CTR, so that the control unit CTR obtains the respective workpiece W Work piece information Dw (for example, serial number, etc.). Next, the control unit CTR obtains the thickness information Dt (step S3). Here, the workpiece measuring device 114 measures the thickness of the workpiece W (as described above in detail), and outputs it to the control unit CTR, so that the control unit CTR obtains the thickness of the base material Wa or the electronic component Wb of each workpiece W. Thickness information Dt.

接著,控制部CTR會輸出樹脂供給設定資訊Dd1(步驟S4)。此處,控制部CTR係計算從分配器312 投下供給的模製樹脂R之量(重量)。該動作可藉由從作為目標值的樹脂部分成形厚度及模窩208的外形(俯視的形狀)求得成形時的模窩208之容積中,扣除藉量測工件W的厚度取得的電子零件Wb之體積所得的容積、及成形後(硬化狀態)的模製樹脂R的比重而算出。然後,控制部CTR會將先前讀出的模製樹脂R的投下模式和該計算值一起輸出到分配器312作為樹脂供給設定資訊Dd1。 Next, the control unit CTR outputs the resin supply setting information Dd1 (step S4). Here, the control unit CTR calculates the slave distributor 312 The amount (weight) of the supplied molding resin R was dropped. In this operation, the electronic part Wb obtained by measuring the thickness of the workpiece W is subtracted from the volume of the mold cavity 208 at the time of molding from the thickness of the resin portion molding thickness and the shape of the mold cavity 208 (planar shape) as the target value. The volume obtained from the volume and the specific gravity of the molding resin R after molding (hardened state) were calculated. Then, the control unit CTR outputs the previously read casting mode of the molded resin R and the calculated value to the dispenser 312 as the resin supply setting information Dd1.

接著,分配器312會根據樹脂供給設定資訊Dd1將模製樹脂R向薄膜F上的樹脂投入孔400a、400b內側投下。此處,在分配器312中,會將預定量的模製樹脂R以重量計312b計量,並介由料槽312c以振動方式送出,並從注口312d投下。在此種模製樹脂R的投下動作中,會有模製樹脂R經常難以均勻地從分配器312投下的情況。 Then, the dispenser 312 drops the molded resin R into the resin insertion holes 400a and 400b on the film F according to the resin supply setting information Dd1. Here, in the dispenser 312, a predetermined amount of the molding resin R is measured by the weight 312b, and is sent out through the hopper 312c in a vibration manner, and is dropped from the nozzle 312d. In such a dropping operation of the molding resin R, it is often difficult to drop the molding resin R uniformly from the dispenser 312.

例如,在分配器312的貯留模製樹脂R的料斗(hopper)312a中,其內部之上側與下側所含的粒度大小容易產生不同,會發生因投下的時機而讓模製樹脂R的粒度改變的情形。而且,藉振動給料器在料槽312c上送出時,也會因模製樹脂R的粒度而使送出速度不同,故即使想以相同的投下模式進行投下動作,也有難以將實際投下的模製樹脂R均一化的情形。因此,在分配器312中,會發生無法按照從控制部CTR輸出的樹脂供給設定資訊Dd1(供給的模製樹脂R的重量)投下模製樹脂R的情況。對於此點,藉由分配器312將作為實際供給的模製樹脂R量(重量)的實供給量資訊Dd2輸出到 控制部CTR,控制部CTR即可取得實供給量資訊Dd2(步驟S5)。 For example, in the hopper 312a of the dispenser 312 that stores the molding resin R, the particle sizes contained in the upper side and the lower side of the inside are likely to be different, and the particle size of the molding resin R may occur depending on the timing of dropping. Changing situation. In addition, when feeding by the vibrating feeder on the hopper 312c, the feeding speed is also different due to the particle size of the molding resin R. Therefore, even if it is desired to perform the dropping operation in the same dropping mode, it is difficult to actually drop the molded resin. Case of R homogenization. Therefore, in the dispenser 312, there is a case where the molding resin R cannot be dropped in accordance with the resin supply setting information Dd1 (the weight of the molding resin R supplied) output from the control unit CTR. At this point, the actual supply amount information Dd2, which is the amount (weight) of the molded resin R actually supplied, is output to the dispenser 312 to The control unit CTR and the control unit CTR can obtain the actual supply amount information Dd2 (step S5).

接著,控制部CTR會取得供給樹脂形狀資訊Dr(步驟S6)。此處,供給樹脂檢查器315係針對已投下到薄膜F上的模製樹脂R的外觀進行量測。例如,作為供給樹脂檢查器315的攝像機會將載置於樹脂投下臺310上的搬送具400中搭載於薄膜F上的模製樹脂R進行拍攝,並將拍攝影像作為供給樹脂形狀資訊Dr輸出到控制部CTR。 Next, the control unit CTR obtains the supplied resin shape information Dr (step S6). Here, the supply resin inspector 315 measures the appearance of the molded resin R that has been dropped onto the film F. For example, a camera serving as the resin supply inspector 315 captures the molded resin R mounted on the film F in the carrier 400 mounted on the resin dropping table 310, and outputs the captured image as the supply resin shape information Dr to Control section CTR.

其次,控制部CTR會取得成形品資訊Dp(步驟S7)。此處,係針對使用如以上方式準備的模製樹脂R進行樹脂模製所得的成形品Wp,以成形品量測器118量測成形品Wp的厚度。接著,藉由將該量測值輸出到控制部CTR,控制部CTR即可取得作成各個成形品Wp之(樹脂成形部分)厚度的成形品資訊Dp。 Next, the control unit CTR obtains the molded product information Dp (step S7). Here, the thickness of the molded product Wp is measured with the molded product measuring device 118 about the molded product Wp obtained by resin molding using the molded resin R prepared as described above. Then, by outputting the measured value to the control unit CTR, the control unit CTR can obtain the molded product information Dp of the thickness (resin molded portion) of each molded product Wp.

接著,控制部CTR會針對依上述方式取得的複數筆資訊,和工件資訊Dw建立關聯並保存於記憶部MEM(步驟S8),作為有關一個工件W之樹脂模製的取得資訊。藉由將依此方式取得的資訊保存於記憶部MEM,作業人員即可使用顯示部DIS裝置內實際進行的樹脂模製的狀態進行確認,從輸入部INP進行必要的變更,或傳送到製造工場的上位系統,利用於品質管理等。另外,也可只進行以上的步驟作為樹脂供給控制,俾確保追蹤能力。 Next, the control unit CTR will associate the plurality of pieces of information obtained in the above manner with the workpiece information Dw and store them in the memory MEM (step S8), as the acquisition information about the resin molding of one workpiece W. By storing the information obtained in this way in the memory section MEM, the operator can confirm the actual state of the resin molding in the DIS device of the display section, make necessary changes from the input section INP, or transmit it to the manufacturing plant. High-level system for quality management. In addition, only the above steps can be performed as a resin supply control to ensure the tracking ability.

在裝置內實施進一步控制的情況中,控制部CTR會使用依以上方式取得的資訊來判斷樹脂供給是否正確(步驟S9)。此處,控制部CTR係例如將作為樹脂部分之成形厚度目標值的成形條件資訊Dc、和作為成形品Wp的(樹脂成形部分)厚度的成形品資訊Dp作比較。只要依據此種方式,在目標值與成形品Wp的實際厚度差超過預定值(容許值)時,即可判斷為樹脂供給不恰當。 In the case where further control is performed in the device, the control unit CTR uses the information obtained in the above manner to determine whether the resin supply is correct (step S9). Here, the control unit CTR compares, for example, the molding condition information Dc as the target thickness value of the resin portion and the molded product information Dp as the thickness of the (resin molded portion) of the molded product Wp. According to this method, if the difference between the target thickness and the actual thickness of the molded product Wp exceeds a predetermined value (allowable value), it can be determined that the resin supply is inappropriate.

其次,控制部CTR會調整下一個工件W的樹脂供給設定資訊Dd1(步驟S10)。此處,係在例如計算從分配器312投下供給的模製樹脂R的重量時,藉由依上述目標值與成形品Wp的厚度差為正值或負值,將要供給的模製樹脂R的重量進行修正的修正值設定為正負相反值,就可使後續工件W的成形厚度接近目標值。 Next, the control unit CTR adjusts the resin supply setting information Dd1 of the next workpiece W (step S10). Here, for example, when the weight of the molded resin R supplied from the dispenser 312 is calculated, the weight of the molded resin R to be supplied is a positive or negative value based on the difference between the target value and the thickness of the molded product Wp. When the correction value to be corrected is set to the opposite value, the forming thickness of the subsequent workpiece W can be brought closer to the target value.

作為步驟9之動作的其他例子,控制部CTR係例如將作為要供給的模製樹脂R之重量的樹脂供給設定資訊Dd1、與作為實際供給的模製樹脂量(重量)的實供給量資訊Dd2作比較。若依據此種構成,在設定值與實際值之差超過預定值(容許值)時,即判斷為樹脂供給不恰當。此時,步驟10中,控制部CTR能夠使為了供給用於後續工件W而以重量計312b計量並投下的模製樹脂R之量增減。 As another example of the operation of step 9, the control unit CTR is, for example, the resin supply setting information Dd1 which is the weight of the molding resin R to be supplied, and the actual supply amount information Dd2 which is the amount (weight) of the molding resin actually supplied. compared to. According to this configuration, if the difference between the set value and the actual value exceeds a predetermined value (allowable value), it is determined that the resin supply is inappropriate. At this time, in step 10, the control unit CTR can increase or decrease the amount of the molding resin R that is measured and dropped by weight 312b in order to supply for the subsequent work W.

作為步驟9之動作的另一其他例子,控制部CTR會例如根據屬於薄膜F上所搭載之模製樹脂R的拍攝影像的供給樹脂形狀資訊Dr,來判斷樹脂供給是否恰當。此處,係將模製樹脂R的拍攝影像分割為預定的 劃分區域(n行m列),將該拍攝影像的劃分區域間加以比較,並計算出其偏差程度,再根據該偏差程度來判斷樹脂供給是否恰當。例如,取得構成各劃分區域之影像的顏色或亮度分布(顏色的深度與畫素數的乘積),並根據每個劃分區域之顏色濃度所表示的樹脂投下量偏差程度大小來判斷樹脂供給是否恰當。 As another example of the operation of step 9, the control unit CTR determines whether the resin supply is appropriate based on the supplied resin shape information Dr of the captured image belonging to the molded resin R mounted on the film F, for example. Here, the captured image of the molding resin R is divided into predetermined Divide the area (n rows and m columns), compare the divided areas of the captured image, calculate the degree of deviation, and then determine whether the resin supply is appropriate based on the degree of deviation. For example, obtain the color or brightness distribution (the product of the depth of the color and the number of pixels) constituting the images of each divided area, and judge whether the resin supply is appropriate according to the degree of deviation of the resin drop amount represented by the color density of each divided area. .

例如,若為一般使用於樹脂模製的黑色環氧樹脂,供給到預定區域內的模製樹脂R量越多,模製樹脂R會變密而使模製樹脂R的間隙越少。在此情況中,由於位在模製樹脂R下面的薄膜F(例如乳白色)變得難以拍攝,會使影像接近模製樹脂R的顏色(黑色)。因此,例如在模製樹脂R投下偏倚的情況中,多拍攝薄膜F而使影像的顏色變淺的區間、與未拍攝薄膜F而使影像的顏色變深的區間會混合存在。像這樣,影像的深度在各區間有大幅不同時(偏差大時),即判斷為樹脂供給不恰當。此時,即在步驟10中,將此後工件W的樹脂供給的指示加以調整。例如,控制部CTR可以在影像變淺的劃分區域投下更多模製樹脂R的方式,將樹脂投下臺310的移動速度降低、或將從注口312d的模製樹脂R投下速度增加。另一方面,控制部CTR可以在影像變深的劃分區域投下的模製樹脂R減少的方式,使樹脂投下臺310的移動速度加快、或將從注口312d的模製樹脂R的投下速度降低。 For example, in the case of a black epoxy resin generally used for resin molding, the larger the amount of the molding resin R supplied into a predetermined area, the denser the molding resin R becomes, and the smaller the gap of the molding resin R becomes. In this case, since the film F (e.g., milky white) located under the molding resin R becomes difficult to shoot, the image is brought closer to the color (black) of the molding resin R. Therefore, for example, in a case where the molding resin R is biased, a section in which the film F is photographed frequently to lighten the color of the image and a section in which the film F is not photographed to darken the color of the image are mixed. In this way, when the depth of the image is significantly different in each section (when the deviation is large), it is determined that the resin supply is inappropriate. At this time, that is, in step 10, the instruction of the resin supply of the subsequent work W is adjusted. For example, the control unit CTR may drop more molding resin R in a divided area where the image becomes lighter, reduce the moving speed of the resin dropping table 310, or increase the dropping speed of the molding resin R from the nozzle 312d. On the other hand, the control unit CTR can reduce the molding resin R dropped in the image-divided area, so that the moving speed of the resin dropping table 310 can be increased, or the molding resin R can be dropped from the nozzle 312d. .

如上所述,藉由控制部CTR根據取得資訊對下一個工件W的樹脂供給設定資訊Dd1進行調整,即 可使對壓縮成形的品質維持甚為重要的模製樹脂R之供給均勻化。 As described above, the control unit CTR adjusts the resin supply setting information Dd1 of the next workpiece W based on the acquired information, that is, The supply of the molding resin R, which is important for maintaining the quality of compression molding, can be made uniform.

再者,以上雖係就模製裝置的各單元說明其特徵,但係屬於對共通的工件進行加工或處理的單元,而有關在任一單元進行的構成或動作,也可在其他單元同樣進行而不會妨礙。此外,在本案中,這些單元的機能在單元單位中也有各別的功效,而屬於包含有作為單體單元的發明。例如,在分料單元中,可準備由薄膜與搬送具組合以供給模製樹脂的機組。因此,會有另外準備及利用分料單元與壓製單元也可獲得相同效果的情形。 In addition, although the above describes the characteristics of each unit of the molding device, it belongs to a unit that processes or processes a common workpiece, and the configuration or operation performed in any unit can be performed in the same manner in other units. Will not hinder. In addition, in this case, the functions of these units also have their respective functions in the unit, and belong to the invention that includes the unit as a single unit. For example, in a dispensing unit, a unit that combines a film and a conveyer to supply a molding resin may be prepared. Therefore, there may be cases where the preparation unit and the pressing unit are separately prepared and used to obtain the same effect.

此外,上文主要是就將屬於狹條形工件的二個工件W以令其長邊方向平行地排列的狀態在模製裝置1內進行搬送並成形的例子作說明。然而,也可作成將屬於狹條形工件的三個工件W以令其長邊方向平行地排列的狀態在模製裝置1內進行搬送並成形的構成。再者,為考慮到模具更換的便利性,雖係就屬於狹條形工件的工件W以成為朝裝置的前後方向平行地排列的狀態在模製裝置1內進行搬送並成形的例子為主作說明,但也可作成將該工件W以成為朝裝置的左右方向平行地排列的狀態在模製裝置1內進行搬送並成形的構成。在此情況中,只要將供給匣升降機103或收納匣升降機113配置在工件處理單元100A的左側,即可有效率地搬送,而不用使工件W的朝向旋轉。 In addition, the above has mainly described the example in which the two workpieces W belonging to the strip-shaped workpiece are transported and formed in the molding apparatus 1 in a state in which the longitudinal directions thereof are arranged in parallel. However, a configuration may also be adopted in which three workpieces W belonging to the strip-shaped workpiece are transported and formed in the molding apparatus 1 in a state in which the longitudinal directions thereof are arranged in parallel. In addition, in order to consider the convenience of mold replacement, although the workpieces W which belong to the narrow-shaped workpiece are transported and formed in the molding device 1 in a state of being arranged in parallel in the front-rear direction of the device, the main work is an example. Although described, it is also possible to adopt a configuration in which the workpieces W are transported and molded in the molding apparatus 1 in a state in which the workpieces W are aligned in parallel in the left-right direction of the apparatus. In this case, as long as the supply cassette lifter 103 or the storage cassette lifter 113 is disposed on the left side of the workpiece processing unit 100A, it is possible to efficiently transfer without rotating the workpiece W in the direction.

此外,上文雖是就從捲筒薄膜裁取並準備狹條形或寬幅的薄膜F進行搬送的例子作說明,但對於前述實施形態的發明中不涉及薄膜F的部分,在利用不使用薄膜F的模製用模具202進行壓縮成形時,也可加以實施。在此情況中,係使用僅搬送模製樹脂R的專用搬送具。而且,也可作成不使用狹條形或寬幅的薄膜F,但將捲筒薄膜設置在壓製單元100B、500B供給薄膜F,僅搬送模製樹脂R的專用搬送具的構成。該搬送具中,可透過將收容模製樹脂R的位置下方設成可開閉,而以關閉狀態搬送模製樹脂R,以開啟狀態供給到模窩208的構成。 In addition, although the above description is an example of cutting and preparing a narrow or wide film F from a roll film for conveyance, the part of the invention of the aforementioned embodiment that does not involve the film F is not used during use. When the mold 202 for molding the film F is subjected to compression molding, it may be performed. In this case, a dedicated conveyer for conveying only the molding resin R is used. Furthermore, it is also possible to construct a dedicated conveyer that does not use the narrow strip or wide film F, but roll film is provided in the pressing units 100B and 500B to supply the film F, and only the molding resin R is conveyed. In this conveyer, the structure in which the molding resin R is accommodated can be opened and closed below, and the molding resin R can be conveyed in a closed state and supplied to the mold nest 208 in an opened state.

再者,以上雖係以基材Wa的電子零件Wb搭載面反轉成向下後供給到裝置內的情形為前提作說明,但也可設成樹脂在裝置內模製前就使工件W反轉的構成。在此情況中,也可在成形後再度使成形品Wp或收納匣112反轉。而且,也可以工件W或成形品Wp的單位反轉,也可以供給匣102或收納匣112的單位反轉。作為達成此目的的構成,可在例如挾持工件W或成形品Wp的外周或吸附保持預定位置的狀態下進行移送或交接時,透過以對工件W或成形品Wp的外周邊成平行的旋轉軸為基準旋轉180度,就能夠反轉。若依據此種構成,在成形面朝上進行作業的前後製程(接合製程或檢查製程)的前後施行的反轉作業即不必要,故可防止因作業疏失使生產停止等。 The above description is based on the premise that the mounting surface of the electronic component Wb of the base material Wa is reversed and then supplied into the device. However, it can also be provided that the resin W reverses the workpiece W before molding in the device. The composition of the turn. In this case, the molded product Wp or the storage box 112 may be reversed again after molding. Moreover, the unit of the workpiece W or the molded product Wp may be reversed, and the unit of the supply cassette 102 or the storage cassette 112 may be reversed. As a configuration for achieving this, for example, when transferring or transferring the workpiece W or the molded product Wp while holding or holding the outer periphery of the workpiece W or the molded product at a predetermined position, the workpiece W or the molded product Wp can be rotated parallel to the outer axis of the workpiece. It can be reversed by rotating it 180 degrees for the reference. According to such a configuration, the reversing operation performed before and after the front-to-back process (joining process or inspection process) in which the forming surface is faced up is unnecessary, so production can be prevented from being stopped due to work failure.

此外,因作業疏失而未進行工件W或成形品Wp之反轉的情況中,亦即,工件W以相對於預想的朝向反轉的錯誤朝向供給時,也可對作業人員發出警報,俾修正為正確的朝向。在此情況中,在工件量測器114量測工件W之厚度時,也可檢測半導體晶片等的實裝方向作為工件W的厚度。 In addition, in the case where the work W or the molded product Wp is not reversed due to a work error, that is, when the work W is supplied in the wrong direction reversed from the intended direction, the operator may be alerted and corrected. For the right direction. In this case, when the workpiece measuring device 114 measures the thickness of the workpiece W, the mounting direction of a semiconductor wafer or the like can be detected as the thickness of the workpiece W.

Claims (16)

一種樹脂模製裝置,係為使用:模製用模具;及將基材中搭載有電子零件的工件搬送到前述模製用模具並且將以該模製用模具進行樹脂模製所得的成形品搬出的搬送部,將前述工件進行樹脂模製的樹脂模製裝置,其特徵在,具備:供給匣升降機,使供收納前述工件的供給匣升降;收納匣升降機,配置在對前述供給匣升降機在上下方向相異的位置,使供收納前述成形品的收納匣升降;供給軌道,配設在前述供給匣升降機的前方,供載置從前述供給匣的預定位置取出的前述工件;收納軌道,一面載置前述成形品,一面使其向前述收納匣通過;工件量測器,配設在前述供給軌道的下方,對前述供給軌道上的前述工件從下面側量測前述工件的厚度;供給拾取器,保持前述供給軌道上的前述工件,並搬送到前述搬送部;及收納拾取器,保持前述搬送部上的前述成形品,並搬送到前述收納軌道,前述供給軌道、前述工件量測器、及前述收納軌道係朝上下方向重複並設。 A resin molding apparatus is used for: a mold for molding; and a workpiece obtained by carrying an electronic component mounted on a base material to the aforementioned mold for molding and carrying out resin molding using the mold for molding The conveying section of the resin molding apparatus for resin-molding the workpiece includes a supply cassette lifter for lifting the supply cassette for storing the workpiece, and a storage cassette lifter disposed above and below the supply cassette lifter. Positions in different directions raise and lower the storage box for storing the molded product; a supply rail is arranged in front of the supply box elevator for loading the workpiece taken out from a predetermined position of the supply box; the storage track is loaded on one side The molded product is placed while passing through the storage box; a work measuring device is disposed below the supply rail, and measures the thickness of the work from the lower side of the work on the supply rail; and a picker, Holding the workpiece on the supply rail and carrying it to the carrying section; and storing a picker to hold the front part on the carrying section Molded product, and conveyed to the storage track, the feed track, the workpiece measuring device, and repeating the housing and the rail system is provided in the vertical direction. 如請求項1之樹脂模製裝置,其中前述供給軌道係以可將二個前述工件朝左右方向排列載置的方式構成為二列,前述工件量測器具有將二列前述供給軌道上的二個前述工件的各厚度以預定的一次掃描進行量測的一台或者二台厚度感測器。 For example, the resin molding device of claim 1, wherein the supply rail is configured in two rows so that the two workpieces can be placed in the left-right direction, and the workpiece measuring device has two One or two thickness sensors for measuring the thickness of each of the foregoing workpieces with a predetermined scan. 如請求項1或2之樹脂模製裝置,其中更具備從下面側將前述工件加熱的工件加熱器,前述工件加熱器係在前述供給軌道的上方,可在對保持於前述供給拾取器之狀態的前述工件較外周更外側的位置、與和下面相對的位置之間進退移動地配設。 If the resin molding device of claim 1 or 2 further includes a workpiece heater for heating the workpiece from below, the workpiece heater is above the supply rail and can be held in the state of the supply picker. The above-mentioned workpiece is arranged to move forward and backward between a position outside the periphery and a position opposed to the lower side. 如請求項1至3中任一項之樹脂模製裝置,其中,前述供給拾取器向前述搬送部搬送前述工件的左右方向搬入路、與前述收納拾取器從前述搬送部搬送前述成形品的左右方向搬出路係設定為朝前後方向並設。 The resin molding apparatus according to any one of claims 1 to 3, wherein the supply picker transports the workpiece in the left-right direction into the transport section, and the storage picker transports the molded product from the transport section in the left-right direction. The direction carrying system is set in parallel to the front-back direction. 一種樹脂模製裝置,係屬於使用具備將基材中搭載有電子零件之工件保持的上模、及形成有介著薄膜供給模製樹脂之模窩凹部的下模的模製用模具,將前述工件進行樹脂模製並加工為成形品的樹脂模製裝置,其特徵在,具備:搬送具,形成有和前述模窩凹部之形狀對應的貫通孔,屬於在前述貫通孔內保持前述模製樹脂且和前述薄膜一起搬送的器具; 第1臺,供保持從薄膜捲筒送出且裁切成預定長度的前述薄膜,使前述經裁切的薄膜與前述搬送具組合;第2臺,載置前述薄膜保持在下面側之狀態的前述搬送具,且構成為可移動;搬送具拾取器,保持前述薄膜保持在下面側之狀態的前述搬送具,並從前述第1臺搬送到前述第2臺;及分配器,將前述模製樹脂投入到前述第2臺上所載置的前述搬送具的前述貫通孔之內側。 A resin molding apparatus belongs to a mold for molding using an upper mold for holding a workpiece having an electronic component mounted on a base material, and a lower mold formed with a recess for a mold cavity through which a mold resin is supplied through a film. A resin molding apparatus for resin-molding a workpiece and processing it into a molded article is characterized in that it is provided with a conveyer formed with a through hole corresponding to the shape of the recess of the die cavity, and belongs to holding the molded resin in the through hole. And a device to be transported together with the aforementioned film; The first station is for holding the film that is fed out from the film roll and cut to a predetermined length, so that the cut film is combined with the conveyer; and the second station is for holding the film in a state where the film is held on the lower side. A conveyer, which is configured to be movable; a conveyer picker, which holds the film conveyer in a state where the film is held on the lower side, and conveys the first film to the second film; and a dispenser, which molds the resin It is put into the inside of the said through-hole of the said conveyance tool mounted on the said 2nd stage. 如請求項5之樹脂模製裝置,其中,前述搬送具具有以可將二片前述薄膜朝左右方向排列保持的方式具有二列薄膜保持部,並且在各前述薄膜保持部具有和各前述薄膜對應的樹脂投入孔作為前述貫通孔。 The resin molding apparatus according to claim 5, wherein the conveyance device has two rows of film holding portions so that the two pieces of the film can be aligned and held in the left-right direction, and each of the film holding portions has a correspondence with the respective films The resin insertion hole is used as the aforementioned through hole. 如請求項5或6之樹脂模製裝置,其中,前述第1臺與前述薄膜捲筒係朝上下方向並設成階層狀。 The resin molding apparatus according to claim 5 or 6, wherein the first unit and the film roll are arranged in a stepwise manner in a vertical direction. 如請求項5至7中任一項之樹脂模製裝置,其中,更具備從保持有前述薄膜及前述模製樹脂之狀態的前述搬送具之上面側進行加熱的樹脂加熱器。 The resin molding apparatus according to any one of claims 5 to 7, further comprising a resin heater that heats from the upper surface side of the conveyer in a state where the film and the molded resin are held. 一種樹脂模製裝置,係屬於使用具備上模及下模的模製用模具,將基材中搭載有電子零件的工件進行樹脂模製並加工成成形品的樹脂模製裝置,其特徵在,具備:第1搬送部,在上面具備保持前述工件的第1保持部、及保持經樹脂模製所得的前述成形品的第2保 持部,並保持前述工件向前述上模的預定保持位置搬送,且將前述成形品向前述模製用模具外的預定位置搬送;及第2搬送部,在下面具備:保持薄膜及模製樹脂的搬送具的第3保持部、及保持已用過薄膜的第4保持部,將前述薄膜及前述模製樹脂向前述下模的預定保持位置搬送,並保持前述薄膜及前述模製樹脂的保持狀態已解除的前述搬送具且向前述模製用模具外的預定位置搬送,並且保持樹脂模製所得的前述成形品已取出之狀態的前述下模中所殘留的前述已用過薄膜且向前述模製用模具外的預定位置搬送。 A resin molding device belongs to a resin molding device that uses a mold for molding with an upper mold and a lower mold to resin-mold a workpiece having electronic components mounted on a base material and process the molded product into a molded product. It is provided with a 1st conveying part provided with the 1st holding | maintenance part which hold | maintains the said workpiece | work, and the 2nd holding | maintenance which holds the said molded product obtained by resin molding. A holding portion that holds the workpiece to a predetermined holding position of the upper mold and transfers the molded product to a predetermined position outside the molding die; and a second transportation portion including a holding film and a molding resin below The third holding part of the conveyer and the fourth holding part holding the used film, the film and the molding resin are conveyed to a predetermined holding position of the lower mold, and the holding of the film and the molding resin is held The transporter whose state has been released is transported to a predetermined position outside the mold for molding, and the used film remaining in the lower mold in a state where the molded product obtained by resin molding is taken out is transferred to the aforementioned mold. Transported at a predetermined position outside the mold for molding. 如請求項9之樹脂模製裝置,其中前述工件為狹條形的狹條形工件,前述薄膜為和前述狹條形工件對應的狹條形的狹條形薄膜,前述第1保持部係以可將二個前述狹條形主件以令該狹條形工件的長邊方向平行地排列保持的方式具有二列工件保持部,前述第2保持部係以可將前述狹條形工件加工所得的二個前述成形品以令該成形品的長邊方向平行的方式排列保持地具有二列成形品保持部,前述搬送具係以可將二片前述狹條形薄膜以令該狹條形薄膜的長邊方向平行的方式排列保持地具有二列搬入薄膜保持部, 前述第3保持部具有保持前述搬送具的搬送具保持部,前述第4保持部係以可將用畢的二片前述狹條形薄膜以令該狹條形薄膜的長邊方向平行的方式排列保持地具有二列搬出薄膜保持部。 According to the resin molding device of claim 9, wherein the workpiece is a narrow strip-shaped workpiece, the film is a narrow strip-shaped film corresponding to the narrow strip-shaped workpiece, and the first holding portion is formed by The two main strip-shaped pieces can have two rows of workpiece holding portions so that the longitudinal direction of the narrow-shaped pieces are aligned and held in parallel. The second holding portion is obtained by processing the narrow-shaped pieces. Two of the aforementioned molded products have two rows of molded product holding portions arranged in such a manner that the longitudinal sides of the molded products are parallel to each other, and the transporter is configured so that the two strip-shaped films can make the strip-shaped films. The long-side direction is arranged in parallel so as to have two rows of carrying-in film holding portions, The third holding portion has a conveyer holding portion that holds the conveying device, and the fourth holding portion is arranged so that the used two pieces of the strip-shaped film can be aligned so that the longitudinal directions of the strip-shaped films are parallel to each other. The holding place has two rows of carrying-out film holding portions. 如請求項9之樹脂模製裝置,其中前述工件為狹條形的狹條形工件、或較該狹條形工件更寬的寬幅工件,前述薄膜為和前述狹條形工件對應之狹條形的狹條形薄膜、或較該狹條形薄膜更寬的寬幅薄膜,前述第3保持部具有搬送具保持部作為前述搬送具,其係以可將二片前述狹條形薄膜以令該狹條形薄膜的長邊方向平行的方式排列保持地具有二列搬入薄膜保持部的一台狹條形薄膜搬送具、或共通保持具有保持一片前述寬幅薄膜的一個搬入薄膜保持部的寬幅薄膜搬送具。 If the resin molding device of claim 9, wherein the workpiece is a narrow strip-shaped workpiece, or a wide workpiece wider than the narrow-shaped workpiece, the film is a narrow strip corresponding to the narrow-shaped workpiece. The third holding portion has a conveyer holding portion as the conveying device, which can be used to make two pieces of the foregoing thin film to make the One narrow film conveyer having two rows of the film holding section arranged in parallel so that the longitudinal directions of the narrow film are parallel to each other, or the width of the single film holding section having a single film holding section for holding one sheet of the wide film is held in common. Web film conveyer. 如請求項11之樹脂模製裝置,其中前述第1保持部係將以可將二個前述狹條形工件以令該狹條形工件的長邊方向平行的方式排列保持地具有二列工件保持部的構成、與具有保持一個前述寬幅工件的一個工件保持部的構成設成可置換,前述第2保持部係將以可將前述狹條形工件加工所得的二個前述成形品以令該成形品的長邊方向平行地排列保持的方式具有二列成形品保持部的構成、與具有保持一個由前述寬幅工件加工所得的一個前述成形品的一個成形品保持部的構成設成可置換。 As described in the resin molding device of claim 11, wherein the first holding portion is provided with two rows of workpiece holding so that the two pieces of the strip-shaped workpiece can be aligned and held so that the long-side directions of the strip-shaped workpiece are parallel to each other. The structure of the part is replaceable with the structure of one work holding part that holds one of the wide workpieces. The second holding part is formed by two pieces of the molded product that can be obtained by processing the strip-shaped work. The structure in which the longitudinal directions of the molded products are aligned and held in parallel has a configuration including two rows of molded product holding portions, and a configuration with one molded product holding portion that holds one of the foregoing molded products obtained by processing the wide workpiece, so as to be replaceable. . 如請求項11或12之樹脂模製裝置,其中前述薄膜為和前述狹條形工件對應之狹條形的狹條形薄膜、或較該狹條形薄膜更寬的寬幅薄膜,前述第4保持部具有薄膜保持部,其係在將二片前述狹條形薄膜令該狹條形薄膜的長邊方向平行地朝左右方向排列保持的二個狹條形區域、與保持一片前述寬幅薄膜的寬幅區域重複的區域配置有吸附並保持薄膜的複數個吸附部。 For example, the resin molding apparatus of claim 11 or 12, wherein the film is a strip film having a strip shape corresponding to the strip-shaped workpiece, or a wide-width film wider than the strip film, The holding portion includes a thin film holding portion, which is formed by holding two narrow strips in which the two strips of thin film are aligned in parallel to the left and right directions of the long side of the thin film, and holding one of the wide film A plurality of adsorption portions that adsorb and hold the thin film are arranged in a region where the wide-area region is repeated. 如請求項9至13中任一項之樹脂模製裝置,其中,前述搬送具設有複數台,俾在清理前述搬送具的清理製程、使前述薄膜組合於前述搬送具的薄膜設置製程、對已和前述薄膜組合的前述搬送具投下前述模製樹脂的樹脂投下製程、對前述模製用模具供給前述薄膜及前述模製樹脂的樹脂供給製程的不同製程進行處理。 The resin molding device according to any one of claims 9 to 13, wherein the conveyance device is provided with a plurality of units, and the cleaning process of cleaning the conveyance device, the film setting process of combining the film with the conveyance device, The resin transfer process for dropping the molding resin by the transporter combined with the film, and processing the different processes of supplying the film to the molding mold and the resin supplying process for the molding resin are processed. 如請求項9至14中任一項之樹脂模製裝置,其中前述搬送具具有產生吸附力俾保持前述薄膜的第1吸附孔,前述第3保持部具有以前述搬送具保持在預定位置的狀態配設於和前述第1吸附孔連通的位置俾產生吸附力的第2吸附孔。 The resin molding device according to any one of claims 9 to 14, wherein the transporter has a first suction hole that generates an adsorption force to hold the film, and the third holding portion has a state in which the transporter is held at a predetermined position by the transporter. The second suction hole is disposed at a position communicating with the first suction hole, and generates a second suction hole. 一種樹脂模製方法,係為使用請求項5至15中任一項之樹脂模製裝置進行樹脂模製的樹脂模製方法,其特徵在:前述搬送具設有複數台; 在清理前述搬送具的清理製程、使前述薄膜組合在前述搬送具的薄膜設置製程、對已和前述薄膜組合的前述搬送具投下前述模製樹脂的樹脂投下製程、與對前述模製用模具供給前述薄膜及前述模製樹脂的樹脂供給製程之間,使前述複數台搬送具進行不同製程的處理。 A resin molding method, which is a resin molding method for resin molding using the resin molding apparatus of any one of claims 5 to 15, characterized in that: the aforementioned conveyer is provided with a plurality of sets; A cleaning process for cleaning the transporter, a process for setting the film assembly on the film of the transporter, a resin casting process for casting the molding resin on the transporter combined with the film, and supplying the mold for the molding Between the film and the resin supply process of the molded resin, the plurality of carriers are processed in different processes.
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