TWI775977B - 搬送車 - Google Patents

搬送車 Download PDF

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Publication number
TWI775977B
TWI775977B TW107138996A TW107138996A TWI775977B TW I775977 B TWI775977 B TW I775977B TW 107138996 A TW107138996 A TW 107138996A TW 107138996 A TW107138996 A TW 107138996A TW I775977 B TWI775977 B TW I775977B
Authority
TW
Taiwan
Prior art keywords
storage container
container
type
posture
storage
Prior art date
Application number
TW107138996A
Other languages
English (en)
Chinese (zh)
Other versions
TW201934441A (zh
Inventor
森本雄一
松尾研介
和田吉成
Original Assignee
日商大福股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日商大福股份有限公司 filed Critical 日商大福股份有限公司
Publication of TW201934441A publication Critical patent/TW201934441A/zh
Application granted granted Critical
Publication of TWI775977B publication Critical patent/TWI775977B/zh

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67724—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations by means of a cart or a vehicule
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67259—Position monitoring, e.g. misposition detection or presence detection
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67733—Overhead conveying

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Warehouses Or Storage Devices (AREA)
  • Seal Device For Vehicle (AREA)
  • Transition And Organic Metals Composition Catalysts For Addition Polymerization (AREA)
  • Pharmaceuticals Containing Other Organic And Inorganic Compounds (AREA)
TW107138996A 2017-11-27 2018-11-02 搬送車 TWI775977B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2017227200A JP6888529B2 (ja) 2017-11-27 2017-11-27 搬送車
JP2017-227200 2017-11-27

Publications (2)

Publication Number Publication Date
TW201934441A TW201934441A (zh) 2019-09-01
TWI775977B true TWI775977B (zh) 2022-09-01

Family

ID=66844972

Family Applications (1)

Application Number Title Priority Date Filing Date
TW107138996A TWI775977B (zh) 2017-11-27 2018-11-02 搬送車

Country Status (3)

Country Link
JP (1) JP6888529B2 (ja)
KR (1) KR102589952B1 (ja)
TW (1) TWI775977B (ja)

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004114833A (ja) * 2002-09-26 2004-04-15 Toyota Industries Corp 搬送台車及び搬送台車の扉体開閉方法
JP2009051623A (ja) * 2007-08-27 2009-03-12 Asyst Technologies Japan Inc 搬送システム
TW200938458A (en) * 2007-11-15 2009-09-16 Nikon Corp Mask case, transfer apparatus, exposure apparatus, mask transfer method and device manufacturing method
TW201140735A (en) * 2010-01-06 2011-11-16 Muratec Automation Co Ltd Conveying vehicle system
TW201404686A (zh) * 2012-04-16 2014-02-01 Rorze Corp 晶圓自動倉儲
TW201641392A (zh) * 2015-04-09 2016-12-01 大福股份有限公司 物品搬送設備及物品搬送設備之維護作業方法

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004114833A (ja) * 2002-09-26 2004-04-15 Toyota Industries Corp 搬送台車及び搬送台車の扉体開閉方法
JP2009051623A (ja) * 2007-08-27 2009-03-12 Asyst Technologies Japan Inc 搬送システム
TW200938458A (en) * 2007-11-15 2009-09-16 Nikon Corp Mask case, transfer apparatus, exposure apparatus, mask transfer method and device manufacturing method
TW201140735A (en) * 2010-01-06 2011-11-16 Muratec Automation Co Ltd Conveying vehicle system
TW201404686A (zh) * 2012-04-16 2014-02-01 Rorze Corp 晶圓自動倉儲
TW201641392A (zh) * 2015-04-09 2016-12-01 大福股份有限公司 物品搬送設備及物品搬送設備之維護作業方法

Also Published As

Publication number Publication date
KR102589952B1 (ko) 2023-10-13
JP6888529B2 (ja) 2021-06-16
JP2019094201A (ja) 2019-06-20
TW201934441A (zh) 2019-09-01
KR20190062230A (ko) 2019-06-05

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