TWI775977B - Transport vehicle - Google Patents

Abstract

The conveyance vehicle is installed in the conveyance facility to convey the storage container in which the object to be accommodated is conveyed to the conveyance target place provided in the conveyance facility. The storage container has a window portion through which light can be transmitted between the outside and the inside of the storage container. The transport vehicle includes: a container holding portion for holding the storage container; a lid portion for covering the storage container in a state held by the container holding portion; a posture changing portion for changing the posture of the container holding portion in a state where the storage container is held; and a detection portion , to detect the contents inside the container through the window. The detection part is provided in the cover part. The posture changing portion changes the posture of the container holding portion to an opposing state in which the detecting portion and the window portion face each other when the detecting portion and the window portion do not face each other during conveyance of the storage container.

Description

truck Field of Invention

The present invention relates to a transport vehicle provided in a transport facility for transporting a storage container for accommodating items to be accommodated to a transport target place provided in the transport facility.

Background of the Invention

As a conveyance facility provided with the above-mentioned conveyance vehicle, the semiconductor manufacturing facility for manufacturing a semiconductor substrate is mentioned, for example. Generally, a semiconductor manufacturing facility is equipped with a plurality of processing apparatuses for performing various processes on a semiconductor substrate. The transport vehicle is one of the places to be transported with such a processing apparatus, and is a storage container (for example, a reticle) for storing items to be stored (for example, a reticle). pod)) to the processing device.

For example, Patent Document 1 (Japanese Patent Laid-Open No. 10-154646) discloses the internal structure of a processing apparatus (exposure apparatus) used in a semiconductor manufacturing facility. In the technique of the patent document 1, the exposure process using the double mask (R) is performed in the inside of a processing apparatus. In addition, in the interior of the processing device, by arranging in the storage and separation unit A magnifying mask storage discriminating sensor (15) of the element (11) detects the presence or absence of a magnifying mask (R) in the storage container (30). In the technique of Patent Document 1, the presence or absence of the photoretractor (R) is detected, so as to prevent the storage container (30) in which the photoretractor (R) has already been accommodated from storing another photocontractor The case of the cover (R), in order to prevent the situation where the photomultipliers (R) collide with each other in the storage container (30). Thereby, in the technique of Patent Document 1, it is possible to suppress the damage of the photoreduction mask (R) in the container (30) caused by the collision of the photoreduction masks (R) with each other.

Summary of Invention

As described above, in the technique of Patent Document 1, the detection of the presence or absence of an object to be accommodated in the container can be performed inside the processing apparatus. However, if the object to be stored in the container can be detected even during the previous transfer process of such a processing apparatus, it can be effectively used for selection of a transfer destination, setting of a transfer speed, and the like. However, Patent Document 1 does not disclose a technique for detecting a to-be-contained object inside a storage container, for example, during conveyance by a conveyance vehicle outside the processing apparatus.

Therefore, it is desired to realize a technology that can detect the storage object stored in the storage container during the conveyance of the storage container.

In view of the fact that the above-mentioned transport vehicle is installed in the transport facility to transport the storage container containing the items to be accommodated to the transport target place provided in the aforementioned transport facility, the aforementioned transport vehicle is characterized in that: the aforementioned storage container is characterized in that: The container has a window portion through which light can transmit between the outside and the inside of the container, and the transport vehicle includes a container holding portion that holds the container, and a lid that covers the container held in the container holding portion. a storage container; a posture changing section for changing the posture of the container holding section holding the container; and a detection section for detecting the storage object inside the storage container through the window section, and the detection section is provided in The lid portion and the posture changing portion change the posture of the container holding portion so that the detection portion and the window portion face each other when the detection portion and the window portion do not face each other during conveyance of the container. state.

According to this configuration, while the storage container is being conveyed in a state of being held in the container holding portion, the detection portion provided in the lid portion can detect the object to be accommodated in the storage container through the window portion of the storage container. . In addition, when the detection part and the window part of the container do not face each other during the detection of the to-be-stored object, the posture of the container holding part is changed by the posture changing part, and the detection part and the container are changed. The window parts of the container are set to face each other, so that the detection part can detect the contents to be accommodated inside the container. Therefore, regardless of the direction of the container being conveyed, it is possible to detect the to-be-stored object inside the container.

Further features and advantages of the technology of the present disclosure will become more apparent from the following description of illustrative and non-limiting embodiments described with reference to the drawings.

1: Transporter

7: Received items

8: Storage container

11: Body walking part

11A: Walking wheel

11M: motor for walking

12: Links

13: Body body part

14: Container holding part

14A: Holding Claw

14M: holding motor

15: Posture Change Department

15A: Winding shaft

15M: Motor for winding

15S: Winding sensor

16: Lifting part

16A: Lifting belt

16B: Lifting winch

16M: Lifting motor

16S: Lift sensor

17: Cover

17A: Front

17B: Middle part

17C: Rear

17D: Side

17S: Inspection Department

71: The first item to be stored

81: The first storage container

81A, 82A: main body

81B, 82B: Flange

81C: Bottom cover

81D: Window

82: The second storage container

82C: Side cover

91: Processing device

91A: Lifting Table

91B: Departments

91C: Processing Department

92: Vault

93: Temporary storage place

99: conveying path

100: Conveying equipment

#1, #2, #3, #4, #5, #6, #7, #8, #9, #10, #101, #102, #103, #104, #105, #22, #23 , #24: Steps

C: Circumferential direction

DA: Detect pose

F: The starting point of transportation

Hm: individual control device

HP: starting position

Ht: Integrated control device

L: axis direction (the direction along the axis of rotation)

R: radial

Ra: walking track

St: Mounting table

St1: The first type of stage

St2: The second type of stage

T: place to be transferred

TA: Transfer posture

TAF: Transfer starting point transfer posture

TAT: Transfer destination transfer posture

TP: Transfer position

FIG. 1 is a plan view showing an example of the arrangement of the conveying equipment picture.

FIG. 2 is an explanatory diagram showing a state in which the storage container is transferred.

Fig. 3 is a side view of the transport vehicle.

Fig. 4 is a control block diagram of the conveying equipment.

5 is a schematic plan view showing the arrangement relationship between the window portion of the container and the detection portion.

FIG. 6 is a flowchart showing the operation process of the transport vehicle.

FIG. 7 is a flowchart showing confirmation processing.

FIG. 8 is a flowchart showing the determination process of the execution timing of the transfer destination posture change process in the second embodiment.

Form for carrying out the invention

1. The first embodiment

The transport vehicle of the first embodiment will be described with reference to the drawings. As shown in FIGS. 1 and 2 , the transport vehicle 1 is arranged in the transport facility 100 . The transport vehicle 1 transports the storage container 8 in which the object to be stored 7 is accommodated to the transport target place T provided in the transport facility 100 .

In the present embodiment, in addition to the first type of storage container 81 serving as the storage container 8 , the transport vehicle 1 transports a second type of storage container 82 having a different shape from the first type of storage container 81 . In addition, the second type of storage container 82 can accommodate the storage object 7 of the second type, which is different from the storage object 71 of the first type. In this way, the transport vehicle 1 transports the first-type storage container 81 for storing the first-type storage object 71 and the second-type storage container 82 for storing the second-type storage object. The transfer facility 100 can be applied as an example Such as semiconductor manufacturing equipment used to manufacture semiconductor substrates. In this case, the transport vehicle 1 is used for transporting various articles in the semiconductor manufacturing facility. Hereinafter, the case where the transport vehicle 1 and the transport facility 100 are applied to a semiconductor manufacturing facility will be described as an example.

1-1. Mechanical structure of conveying equipment and conveying vehicle

As shown in FIG. 1 , the conveying facility 100 is provided with a plurality of processing apparatuses 91 for performing various processes such as exposure processing and etching processing. In the conveyance apparatus 100, a wafer which is a material of a semiconductor substrate, a photomask used for exposure processing of a wafer in a manufacturing process of a semiconductor substrate, or the like can be conveyed. For example, the reticle is transported in a state of being accommodated in a dedicated container called a reticle transfer box. In addition, the wafer is conveyed in a state of being accommodated in a dedicated container called a so-called FOUP (Front Opening Unified Pod). In the present embodiment, the reticle is equivalent to the "first type of storage object", and the reticle transfer case for accommodating the reticle corresponds to the "first type of storage container as a storage container". In addition, the wafer corresponds to the "second type of storage object", and the FOUP corresponds to the "second type of storage container". In addition, depending on the situation, the transport vehicle 1 may transport the first type of storage container 81 in which the first type of storage object 71 is accommodated, and may transport the first type of storage container 81 in which the first type of storage object 71 is not stored. A storage container 81 is provided. Similarly, depending on the situation, the transport vehicle 1 may transport the second type storage container 82 in which the second type of storage object is stored, and may transport the second type storage container 82 in which the second type of storage object is not stored. container 82.

As shown in FIG. 1 , the transfer facility 100 is provided with a vault 92 and a temporary storage place 93, wherein the aforementioned vault 92 is used for storing the first The storage container of the first type of storage container 81 (the first type of storage object 71) or the second type of storage container 82 (the second type of storage object), and the temporary storage place 93 is used to temporarily store the first type of storage container 81 and A storage place for the second type of storage container 82 . In the storage room 92, for example, the first storage container 81 storing the first storage object 71 before or after use, or the second storage container 82 storing the second storage object in the middle of production can be stored. . Moreover, as shown in FIG. 1, the temporary storage place 93 is provided in the vicinity of the processing apparatus 91, for example. For example, while another second type of storage object is being processed by the processing device 91, the second type of storage object waiting to be processed next is temporarily stored in the temporary storage in a state of being stored in the second type storage container 82 Venue 93. Alternatively, the second type of storage container 82 that is vacant pending completion of the processing of the second type of storage object is temporarily stored. In addition, there is a first type of storage container 81 that temporarily stores the empty first type storage container 81 waiting for the completion of the processing of the first type of storage object 71 . In the present embodiment, any one of the processing device 91, the storage warehouse 92, and the temporary storage place 93 becomes the "transfer origin", and any one other than the transfer origin becomes the transfer object place T as the "transfer destination". That is, in the transport vehicle 1, the first type of storage container 81 (the first type of storage object 71) or the second type of storage container 82 (the second type of storage object) is stored from the processing device 91 serving as the transport starting point F. Any one of the warehouse 92 and the temporary storage place 93 is transferred to any one of the other processing apparatuses 91 , the storage warehouse 92 , and the temporary storage place 93 serving as the transfer target place T.

The transport vehicle 1 transfers (receives) the first type of storage container 81 or the second type of storage container 82 between the transport starting point F, and performs the first type of storage container 81 or the second type of storage container 81 or the second type between the transport object place T. Transfer (handover) of the two types of storage containers 82 . Here, in the present embodiment, "transferring" refers to transferring The delivery of the first type of storage container 81 or the second type of storage container 82 is performed between the delivery vehicle 1 and the conveyance origin F or the conveyance target place T. In addition, in this embodiment, "transfer" means moving the first-type storage container 81 or the second-type storage container 82 from the position corresponding to the transfer starting point F to the position corresponding to the transfer target place T. For example, the transport vehicle 1 starts transporting the first-type storage container 81 or the second-type storage container 82 at the position corresponding to the transport starting point F (after receiving it), and then moves toward the position corresponding to the transport target place T. Then, when the transport vehicle 1 reaches the position corresponding to the transport target place T, the transport is completed, and the first type of storage container 81 or the second type of storage container 82 is transferred (handed over).

As shown in FIGS. 1 to 3 , the transport vehicle 1 is configured to travel along a transport path 99 that passes through a plurality of transport target locations T ( Or the route of the transfer starting point F). In this embodiment, the conveyance path 99 is comprised by the running rail Ra suspended by the ceiling of a facility, and the conveyance vehicle 1 is comprised as a ceiling conveyance vehicle.

Each of the processing device 91 , the storage warehouse 92 , and the temporary storage place 93 serving as the transfer origin F or the transfer target place T has a mounting table St (workstation) on which the first type of storage container 81 or the second type of storage container 82 is mounted. . Here, each mounting table St is arrange|positioned so that it may overlap with the conveyance path 99 (travel rail Ra) in a planar view. For example, in the case where exposure processing using a zoom mask (the first type of storage object 71 ) is performed in the processing device 91 , as shown in FIG. The first type stage St1 of the cover (the first type of storage object 71 ), and the second type of stage St2 for mounting the wafer (the second type of storage object). Below the first type of stage St1 A lift table 91A that can be raised and lowered in the processing apparatus 91 is provided. Moreover, in the processing part 91C of the processing apparatus 91, the part adjacent to the 2nd type stage St2 is provided with the door part 91B which communicates with the inside of this processing part 91C.

Here, as shown in FIGS. 2 and 3 , the first type of storage container 81 (shrinkage cover transfer case) has a main body portion 81A, a flange portion 81B protruding upward from the main body portion 81A, and constitutes the first type The bottom part of the storage container 81 is also a bottom cover part 81C that is detachably attached to the main body part 81A. The first-type storage object 71 is accommodated in the first-type storage container 81 in a state of being placed on the bottom cover portion 81C. When the first-type storage container 81 in which the first-type storage object 71 is accommodated has been placed on the first-type stage St1 of the processing device 91 , the bottom is moved by a cover attaching and detaching device (not shown). The lid portion 81C is removed together with the first type of storage object 71 . Then, the bottom cover portion 81C and the first type of storage object 71 placed thereon are placed on the lift table 91A, lowered, and transported into the processing portion 91C of the processing apparatus 91 . In addition, the first type of storage object 71 (magnification mask) is used in the processing of the second type of storage object (wafer) in the processing section 91C of the processing apparatus 91 .

Also, as shown in FIG. 2 , the second type of storage container 82 (FOUP) has a main body portion 82A, a flange portion 82B protruding upward from the main body portion 82A, and a side wall portion constituting the second type of storage container 82 and opposed to The main body portion 82A is a detachable side cover portion 82C. When the second-type storage container 82 in which the second-type storage object is accommodated has been placed on the second-type stage St2 of the processing device 91, the removal side is performed by a cover attaching and detaching device not shown. Cover 82C. Then, the second-type storage object is taken out from the second-type storage container 82, and is transported into the processing section 91C of the processing apparatus 91 through the door section 91B. Also, the second The storage object (wafer) is processed in the processing section 91C of the processing apparatus 91 .

When the processing in the processing device 91 is completed, the first type of storage object 71 (reduced photomask) is returned to the first type of storage container 81 (reduced optical mask transfer box), and the second type of storage object ( wafers) are returned to the second type of storage container 82 (FOUP). In addition, the first type of storage container 81 and the second type of storage container 82 are transported to the next transport target place T by the transport vehicle 1 .

As shown in FIG. 3 , the transport vehicle 1 includes a vehicle body running portion 11 , a vehicle body main body portion 13 , and a connecting portion 12 that connects these vehicle body running portions 11 and the vehicle body main body portion 13 . The vehicle body running portion 11 is arranged on the upper side of the running rail Ra. The vehicle body main portion 13 is connected to the vehicle body traveling portion 11 via the connecting portion 12 , and is disposed on the lower side of the traveling rail Ra.

The vehicle body running portion 11 has a plurality of running wheels 11A that roll on the running rail Ra. At least one of the plurality of traveling wheels 11A is driven by the traveling motor 11M to roll on the traveling rail Ra.

Further, the transport vehicle 1 is provided with: a container holding part 14 for holding the first type of storage container 81; a cover part 17 for covering the first type of storage container 81 held in the container holding part 14; and a posture changing part 15 for The posture of the container holding portion 14 in which the first type of storage container 81 is held is changed. In addition, in this embodiment, the conveyance vehicle 1 is provided with the raising/lowering part 16 which raises and lowers the container holding|maintenance part 14.

Moreover, the container holding|maintenance part 14 is comprised so that the to-be-grip part of the 1st type of storage container 81 may hold|maintain the said 1st type of storage container 81. The container holding portion 14 has a flange that is a gripped portion that grips the first type of storage container 81 . The part 81B includes a pair of gripping claws 14A, and a gripping motor 14M (see FIG. 4 ) that drives the pair of gripping claws 14A. The pair of gripping claws 14A are driven by the gripping motor 14M, and are configured so as to be freely changeable between a gripping posture and a releasing posture, wherein the gripping posture is a posture in which the flange portion 81B is moved in the direction of approaching each other, and the aforementioned The release posture is a posture in which the grip of the flange portion 81B is released by moving in a direction away from each other.

The raising/lowering part 16 raises and lowers the container holding part 14 and the first type of storage container 81 held by the container holding part 14 . The raising/lowering part 16 is comprised so that the container holding part 14 can be raised/lowered between the home position HP shown in FIG. 3, and the transfer position TP shown in FIG. The home position HP is an upper position in the elevating range, and is a position where the first-type storage container 81 or the second-type storage container 82 held by the container holding portion 14 is covered by the lid portion 17 . The transfer position TP is a lower position in the elevating range, and is a position where the bottom of the first-type storage container 81 or the second-type storage container 82 held by the container holding portion 14 is in contact with the height of the mounting table St. In the present embodiment, the elevating portion 16 includes an elevating belt 16A coupled to the container holding portion 14 , an elevating winch 16B winding the elevating belt 16A, and an elevating motor 16M that rotationally drives the elevating winch 16B. By driving the elevating winch 16B with the elevating motor 16M, the elevating belt 16A can be wound up or unwound, and the container holding portion 14 can be moved up and down. Moreover, in this embodiment, the raising/lowering part 16 further has the raising/lowering amount sensor 16S (refer FIG. 4) which can detect the raising/lowering amount of the container holding|maintenance part 14. FIG. The raising/lowering amount sensor 16S is configured to detect the raising/lowering amount of the container holding portion 14 based on, for example, the number of rotations of the raising/lowering winch 16B, the time of rotation, and the like. The transport vehicle 1 can grasp the vertical direction by the lift sensor 16S The position of the container holder 14 in the . Thereby, the conveyance vehicle 1 can grasp whether the container holding|maintenance part 14 is located in the home position HP, or is located in the transfer position TP.

The cover part 17 has the front side front part 17A provided in the traveling direction of the conveyance vehicle 1, the rear part 17C provided in the rear side, and the intermediate part 17B which connects the front part 17A and the rear part 17C. The front part 17A covers the container holding part 14 existing at the home position HP from the front side in the traveling direction. The rear portion 17C covers the container holding portion 14 existing at the home position HP from the rear side in the traveling direction. The intermediate portion 17B covers the container holding portion 14 existing at the home position HP from the upper side. In the present embodiment, the lid portion 17 further includes a side portion 17D that covers the container holding portion 14 present at the home position HP from one side in the width direction orthogonal to the running direction in a plan view. The front end portion of the side portion 17D is connected to the front portion 17A on the front side of the lid portion 17 . The rear end portion of the side portion 17D is connected to the rear portion 17C on the rear side of the cover portion 17 . The upper end portion of the side portion 17D is connected to the intermediate portion 17B on the upper side of the lid portion 17 . In other words, the cover portion 17 has a shape in which one side and the bottom in the width direction orthogonal to the running direction are open in a plan view.

In the present embodiment, the container holding portion 14 and the lid portion 17 also correspond to the second type of storage container 82 which is different in shape from the first type of storage container 81 in addition to the first type of storage container 81 . That is, the container holding portion 14 is configured to hold the second type of storage container 82 in addition to the first type of storage container 81 . More specifically, the container holding portion 14 is configured to be able to hold the flange portion 82B of the second-type storage container 82 by the pair of holding claws 14A (see FIG. 2 ). Moreover, the cover part 17 is comprised so that in addition to the 1st type of storage container 81, the 2nd type of storage container 82 may be covered. More specifically, the cover portion 17 is configured to cover The second type of storage container 82 in which the lid exists in the state held by the container holding portion 14 at the home position HP.

Here, in each transfer starting point F or each transfer target place T, the posture of the first type of storage container 81 when transferred to each of these places is set in advance. For example, with respect to each processing apparatus 91 , as shown in FIG. 2 , according to the direction of the first type of storage object 71 when used in the processing section 91C of the processing apparatus 91 , the first type of storage is set to be transferred. The posture of the container 81 . Thereby, appropriate processing can be performed in each processing device 91 . In addition, about each storage box 92 and each temporary storage place 93 similarly, the attitude|position at the time of transferring the 1st type storage container 81 is set. Hereinafter, the posture corresponding to each transfer starting point F or each transfer target place T at the time of transferring the first type of storage container 81 is referred to as "transfer posture TA". In addition, when distinguishing the transfer position TA in the transfer origin F and the transfer target place T, the posture corresponding to the transfer point F is called "transfer point transfer attitude TAF", and the position corresponding to the transfer target is referred to as the "transfer position TAF". The posture of the transfer target place T of the ground is referred to as the "transfer destination transfer posture TAT", and will be described.

The posture changing unit 15 changes the posture of the container holding unit 14 in which the first type of storage container 81 is held. In other words, the posture changing unit 15 changes the posture of the first type of storage container 81 through the container holding unit 14 . As shown in FIG. 3 , in the present embodiment, the posture changing unit 15 includes a winding shaft 15A and a winding motor 15M that drives the winding shaft 15A. The posture changing portion 15 is configured to revolve the container holding portion 14 around the reeling shaft 15A. Here, the posture changing portion 15 is configured to pass through the container holding portion 14 to surround the container holding portion 14 in a state where the container holding portion 14 holds the first type of storage container 81 . The posture of the first type of storage container 81 is changed so as to revolve around the shaft 15A. In this example, the winding shaft 15A is arranged along the vertical direction. That is, in the present embodiment, the direction L along the revolving axis 15A (or also referred to as the axial direction L) is equivalent to the vertical direction, and in other words, it can also be referred to as the height direction. However, it is not limited to such a structure, and 15 A of winding shafts may be arrange|positioned along the direction which cross|intersects with respect to an up-down direction. Moreover, in this embodiment, the attitude|position change part 15 further has the winding amount sensor 15S (refer FIG. 4) which can detect the winding amount of the container holding|maintenance part 14. FIG. The winding amount sensor 15S is configured to detect the amount of winding of the container holding portion 14 based on, for example, the number of rotations of the winding shaft 15A, the time of rotation, and the like.

Here, as shown in FIG. 3 , the first-type storage container 81 further includes a window portion 81D that allows light to pass between the outside and the inside of the first-type storage container 81 . The window part 81D is provided in order to make the inside of the 1st type storage container 81 (shrinkage cover conveyance box) visible to an operator, for example.

The transport vehicle 1 is provided with the detection part 17S which is provided in the cover part 17, and detects the to-be-stored object 71 of the first type inside the storage container 81 of the first type through the window part 81D. The detection part 17S is provided in the cover part 17 so as to face the inside of the cover part 17 (in the example of the figure, the space surrounded by the front part 17A, the middle part 17B, the rear part 17C, and the side part 17D). In this embodiment, the detection part 17S is attached to the front part 17A of the cover part 17, and is arrange|positioned toward the rear part 17C side. However, it is not limited to such a structure, The detection part 17S may be attached to the rear part 17C of the cover part 17. In this case, it is preferable to arrange|position the detection part 17S so that it may face the front part 17A side.

Furthermore, in this case, "detecting the stored object" is used as including the following meaning: by detecting the existence of the stored object 7, such as the presence or absence, position, or number of the stored object 7, to detect the existence of the stored object 7. Various information on Object 7. However, in the present embodiment, the detection unit 17S is configured to detect at least the presence or absence of the first type of storage object 71 in the first type of storage container 81 among such various pieces of information.

In the present embodiment, the detection unit 17S is an optical sensor including a light projecting unit that projects light and a light receiving unit that receives light. The detection unit 17S is configured to project light onto the first type of storage container 81 through the window 81D by the light projection unit in a state where the container holding section 14 holding the first type of storage container 81 exists at the home position HP. internal. In addition, when the first type of storage container 81 contains the first type of storage object 71 , the light receiving unit is configured to receive the reflected light reflected by the first type of storage object 71 . Thereby, the detection unit 17S can detect the presence or absence of the first type of storage object 71 inside the first type of storage container 81 . However, it is not limited to such a configuration, and the detection unit 17S may be configured as, for example, an imaging device. In this case, the detection unit 17S does not include a light projecting unit, but includes a two-dimensionally arranged light receiving unit. Then, the detection unit 17S detects the presence or absence of the first type of storage object 71 in the first type of storage container 81 based on the captured image.

In the present embodiment, the detection unit 17S corresponds to the first type of storage container 81 , but does not correspond to the second type of storage container 82 . That is, in this example, the second-type storage container 82 does not have a structure that allows light to pass between the outside and the inside of the container, as the first-type storage container 81 has the window 81D. Therefore, the detection unit 17S cannot detect the inside of the second type of storage container 82 The second kind of storage.

As described above, the detection section 17S detects the first type of storage object 71 through the window section 81D through which light can pass. Therefore, when detecting the first-type storage object 71 , the detection portion 17S must face the window portion 81D of the first-type storage container 81 . Then, as described above, the transport vehicle 1 is provided with the posture changing unit 15 that can change the posture of the container holding unit 14 in which the first type of storage container 81 is held. Moreover, the transfer posture TA (conveyance origin transfer posture TAF) corresponding to each of the transport origins F is set. Therefore, when the transport vehicle 1 receives the first type of storage container 81 at the transport starting point F, and moves the container holding portion 14 holding the first type of storage container 81 up to the home position HP, the following occurs: Case: The window part 81D and the detection part 17S do not face each other during the conveyance of the first type of storage container 81 due to the difference in the conveyance origin transfer posture TAF. Then, when the detection portion 17S and the window portion 81D do not face each other during the conveyance of the first type of storage container 81 , the posture changing portion 15 changes the posture of the container holding portion 14 so that the detection portion 17S and the window portion 81D face each other. the opposite state. Thereby, when the first type of storage container 81 is received, even when the container holding portion 14 holding the first type of storage container 81 is moved to the home position HP, the attitude of the first type of storage container 81 is the window portion The posture of the 81D and the detection part 17S not facing each other can still change the posture of the first type of storage container 81 during the conveyance of the first type of storage container 81, and detect the first type of storage object inside the first type of storage container 81 71. Hereinafter, when the container holding portion 14 holding the first type of storage container 81 is present at the home position HP, the posture of the first type of storage container 81 in which the window portion 81D and the detection portion 17S face the opposing state will be referred to as " Detect posture DA" to illustrate.

Here, the arrangement relationship between the window portion 81D and the detection portion 17S in a state in which the container holding portion 14 holding the first-type storage container 81 is present at the home position HP will be described with reference to FIG. 5 . In FIG. 5 , the arrangement relationship between the window portion 81D and the detection portion 17S in a plan view is schematically shown. The upper diagram of FIG. 5 shows the arrangement relationship with the detection unit 17S when the posture of the first type of storage container 81 is the posture A. The lower diagram of FIG. 5 shows the arrangement relationship with the detection unit 17S when the posture of the first type of storage container 81 is posture B. As shown in FIG.

As shown in FIG. 5 , in the present embodiment, the window portion 81D is provided in the first-type storage container 81 in a state held by the container holding portion 14 (see FIG. 3 and the like) based on the revolving axis 15A. A part of the area in the circumferential direction C. In this example, the window portion 81D is provided on one side surface of the rectangular first-type storage container 81 in a plan view. 5, the detection portion 17S and the window portion 81D facing the opposite state is the detection portion 17S and the window portion 81D in the radial direction R with reference to the revolving axis 15A as a reference state facing each other. That is, the attitude|position A shown in the upper figure of FIG. 5 shows the detection attitude|position DA which can detect the to-be-stored object 71 of the 1st type by the detection part 17S. On the other hand, in the posture B shown in the lower figure of FIG. 5 , the detection portion 17S and the window portion 81D do not face each other in the radial direction R, and the detection portion 17S cannot detect the first type of storage object 71 . A pose B like this does not match the detection pose DA. In addition, the attitude|position A and attitude|position B shown in FIG. 5 can correspond to the transfer attitude|position TA according to the transfer origin F or the transfer object place T.

As shown in FIG. 3 , in the present embodiment, the detection unit 17S is arranged in such a way that the detection unit 17S is arranged in the direction L (axial direction) along the revolving axis 15A. The position of L) corresponds to the position of the window portion 81D of the first type of storage container 81 in the state held by the container holding portion 14 . More specifically, the detection part 17S is arranged so as to be in a positional relationship with the window part 81D in a state where the container holding part 14 holding the first type of storage container 81 exists at the home position HP. In this example, the first type of storage container 81 is provided so that the window portion 81D faces the direction orthogonal to the axial direction L. As shown in FIG. Therefore, the detection portion 17S is arranged at the same position in the axial direction L as the window portion 81D (position in the vertical direction), and is configured to project light in a direction orthogonal to the axial direction L (here, the horizontal direction). . However, it is not limited to such a configuration, and the detection portion 17S may be located in a positional relationship opposite to the window portion 81D, and may be arranged so that the position in the axial direction L is different from that of the window portion 81D (different from the window portion 81D). high).

1-2. Control structure of conveying equipment and conveying vehicle

Next, the control structure of the conveyance apparatus 100 is demonstrated with reference to FIG. 4. FIG. The conveyance facility 100 includes an integrated control device Ht that controls the entire facility, and an individual control device Hm that controls the operation of the conveyance vehicle 1 . The individual control device Hm is installed in each of the plurality of transport vehicles 1 . These control devices include, for example, a processor such as a microcomputer, a peripheral circuit such as a memory, and the like. Furthermore, each function can be realized by the cooperation of programs executable on these hardwares and processors of a computer or the like.

The integrated control device Ht is configured to be able to communicate with each of the plurality of transport vehicles 1 (individual control devices Hm). The integrated control device Ht is configured to give various commands to the transport vehicle 1, and the transport vehicle 1 performs various operations in accordance with the commands from the integrated control device Ht. example For example, when the integrated control device Ht issues a transfer command, the transfer vehicle 1 that has received the transfer command transfers the first-type storage container 81 or the second-type storage container 82 from the designated transfer starting point F to the designated transfer point F. The transfer target site T.

The individual control device Hm controls the traveling of the transport vehicle 1 by controlling the traveling motor 11M, controls the elevating and descending of the container holder 14 by controlling the elevating motor 16M, and controls the gripping motor 14M to move the pair of gripping claws 14A. The posture of the container holder 14 is controlled into a grasping posture and a releasing posture, and the amount of winding (posture) of the container holding portion 14 is controlled by controlling the winding motor 15M. In addition, the individual control device Hm controls the light projection by the light projection unit by controlling the detection unit 17S, and can detect the presence or absence of received light by the light reception unit.

The individual control device Hm can control the height (position in the axial direction L) of the first type of storage container 81 held in the container holding portion 14 by controlling the lifting and lowering of the container holding portion 14 . At this time, the height of the first type of storage container 81 can be controlled based on the detection value of the lift amount sensor 16S. In addition, the individual control device Hm can change the posture of the first type of storage container 81 held in the container holding section 14 to the detection posture DA and the transfer posture by controlling the amount of rotation (posture) of the container holding section 14 ta. At this time, the amount of winding of the first type of storage container 81 can be controlled according to the detection value of the winding amount sensor 15S.

1-3. Handling of the movement of the transport vehicle

Next, a description will be given with reference to FIG. 6 from the transport vehicle 1 (individual control device Hm) after receiving the transport command from the integrated control device Ht to the process of placing the first type of storage container 81 The operation processing executed until the transfer (transfer) to the transfer target place T is performed.

When there is a conveyance command from the integrated control device Ht (#1: Yes), the individual control device Hm drives the conveyance vehicle 1 to the conveyance origin F and receives the first type of storage container 81 from the conveyance origin F (#2 ). Then, the individual control device Hm starts the travel of the transport vehicle 1 toward the transport target place T (transport destination), in other words, starts the transport of the first type of storage container 81 (#3).

Next, the individual control device Hm determines whether the current position of the container 81 of the first type, that is, the transfer position TAF corresponding to the transfer point F is the same as the detection position DA (#4). When the transport origin transfer posture TAF is different from the detection posture DA (#4: No), the posture of the first type of storage container 81 is changed from the transport origin transfer posture TAF to the detection posture DA (#5). When the transfer starting point transfer posture TAF is the same as the detection posture DA (#4: Yes), or when the posture of the first type of storage container 81 has been changed to the detection posture DA (#5), the individual control device Hm The detection part 17S performs the storage object detection process (#6) which detects the presence or absence of the first type storage object 71 in the first type storage container 81 . Furthermore, it is preferable that the individual control device Hm immediately changes the posture of the first type of storage container 81 from the transport origin when it has determined that the transfer position TAF and the detection position DA are different (#4: No). The transfer posture TAF is changed to the detection posture DA (#5) to execute the storage object detection process (#6) as early as possible.

Then, after executing the storage object detection process (#6), the individual control device Hm executes the confirmation process (#7). Confirmation processing (#7) is based on Depending on whether or not the first type of storage object 71 is accommodated in the first type of storage container 81 , a process of confirming the transfer object place T (transfer destination) is performed as necessary. The content of this confirmation process (#7) will be described later. Next, the individual control device Hm determines whether or not the transfer destination transfer posture TAT corresponding to the transport target place T (transport destination) is the same as the detection posture DA (#8). When the destination transfer posture TAT is different from the detection posture DA (#8: NO), the posture of the first type of storage container 81 is changed from the detection posture DA to the destination transfer posture TAT (#9). In the present embodiment, the individual control device Hm controls the posture changing unit 15 and basically maintains the posture of the first type of storage container 81 as the detection posture DA during the conveyance of the first type of storage container 81 . Then, when the first type of storage container 81 is transferred between the transfer object place T (transfer destination), a process of changing the posture of the first type of storage container 81 from the detection posture DA to the transfer destination transfer posture TAT is executed. (hereinafter referred to as "transport destination posture change processing") (#9). The timing of executing this transfer destination posture change process (#9) may be during the travel of the transfer vehicle 1 or after the transfer vehicle 1 arrives at the transfer target place T, and then the first handover (#10) in the transfer target place T may be performed. before the seed storage container 81 . When the conveyance destination posture change process (#9) is performed while the conveyance vehicle 1 is traveling, it is basically executed just before the conveyance vehicle 1 arrives at the conveyance target place T. After the transfer destination posture change process (#9) is executed, or after it is determined in step #8 that the transfer destination transfer posture TAT and the detection posture DA are the same (#8: Yes), the transport vehicle 1 is in The first type of storage container 81 is handed over to the designated transfer target place T (#10).

1-3-1. Confirmation processing

Here, the confirmation process (#7) performed immediately after the to-be-stored object detection process (#6) is demonstrated. As shown in FIG. 7 , in the confirmation process (#7), it is determined that the first type of storage container 81 contains the first type of storage object 71 by the execution of the storage object detection process (#6). In this case (#101; Yes), the individual control device Hm determines whether or not the transfer object place T (transfer destination) designated by the integrated control device Ht is the temporary storage place 93 (#102). In addition, when it is determined that the transfer object place T (transfer destination) is the temporary storage place 93 (#102; Yes), the individual control device Hm notifies the integrated control device Ht of its intention (#103), and requests again Transport command (#104). Thereby, the integrated control device Ht instructs the conveyance vehicle 1 to convey the conveyance target place T other than the temporary storage place 93 in the past. That is, the individual control device Hm is instructed by the integrated control device Ht to transfer to a new transfer target place T other than the temporary storage place 93 in the past. Then, the individual control device Hm changes the destination to a new transfer target place T (transfer destination) (#105), and executes the first type of storage container 81 toward the new transfer target place T (transfer destination). of transportation. In addition, when it is determined in step #101 that the first type of storage container 81 does not contain the first type of storage object 71 (#101; No), and in step #102, it is determined that the place T to be transported is determined. When the (transfer destination) is not the temporary storage place 93 (#102; NO), the individual control device Hm continues the transfer of the first type of storage container 81 to the originally designated transfer target place T. After that, the individual control device Hm executes the processes after step #8 described above.

In this way, when the detection unit 17S detects that the first type of storage container 81 contains the first type of storage object 71, the transport vehicle 1 will limit the The temporary storage place 93 for temporarily storing the first type of storage container 81 is limited to be the transfer target place T. As shown in the present embodiment, when the first type of storage object 71 is a reticle that needs to be managed in a cleaner environment, even if it is only temporarily, it is not suitable to be stored in the temporary storage place 93 . According to the above configuration, such a situation can be avoided.

2. Second Embodiment

Next, the second embodiment of the transport vehicle 1 will be described. The transport vehicle 1 of the present embodiment is different from the above-described first embodiment in the operation process. In addition, it is the same as that of the said 1st Embodiment about the point which is not especially demonstrated.

In the present embodiment, the timing at which the transfer destination attitude changing process is performed is varied according to the relationship between the transfer origin transfer attitude TAF, the transfer destination transfer attitude TAT, and the detection attitude DA.

Also in the present embodiment, the individual control device Hm basically maintains the attitude of the first type of storage container 81 as the detection attitude DA during the conveyance of the first type of storage container 81 . Then, when the first type of storage container 81 is transferred to the transfer target place T (transfer destination), the transfer destination posture change process is executed. However, in this embodiment, as an exception, when the transfer position TAF corresponding to the transfer point F and the transfer position TAT corresponding to the transfer target place T are the same, and the transfer point When the transfer posture TAF and the transfer destination transfer posture TAT are different from the detection posture DA, the individual control device Hm controls the posture changing unit 15 and changes the posture of the container holding unit 14 so that the first type of storage container is The posture of 81 temporarily becomes an opposing state (detection posture DA) in which the window portion 81D and the detection portion 17S face each other during the conveyance of the first type of storage container 81 . That is, in this case, control is performed to set the posture of the first type of storage container 81 to the detection posture DA only for a period necessary for the execution of the object detection process (#6), and to set the posture of the first type of storage container 81 to the detection posture DA in other cases. During the period, the same transfer origin transfer posture TAF and transfer destination transfer posture TAT are maintained.

The determination process of the execution timing of the transfer destination posture change process in this embodiment will be described with reference to the flowchart shown in FIG. 8 . 8 shows the operation processing after step #7 in FIG. 6 , and the operation processing before step #7 is the same as that of the first embodiment, so it is omitted. Also in this determination, first, the individual control device Hm determines whether or not the transfer destination transfer posture TAT corresponding to the transfer object place T (transport destination) is the same as the detection posture DA (#8). Here, when the transfer destination transfer posture TAT is the same as the detection posture DA (#8: Yes), the individual control device Hm does not perform the posture change by the posture changing unit 15, and the individual control device Hm changes the posture at the transport target location. In T (transfer destination), the first type of storage container 81 (#10) is handed over.

On the other hand, when the transfer destination transfer posture TAT is different from the detection posture DA (#8: No), next, it is determined whether the transfer origin transfer posture TAF corresponding to the transfer origin F is different from the transfer destination transfer posture The TAT is the same (#22). Then, when the transfer origin transfer posture TAF and the transfer destination transfer posture TAT are the same (#22: YES), the individual control device Hm controls the posture changer 15 and completes the storage object detection process (#6 ), immediately execute the transfer destination posture change process (#23). On the other hand, when the transfer origin transfer posture TAF and the transfer destination transfer posture TAT are different (#22: No), the individual control device Hm is the control posture The changing unit 15 executes the transfer destination posture change process (#24) just before the transfer vehicle 1 arrives at the transfer target place T, or immediately after arriving at the transfer target place T.

3. Other Embodiments

Next, another embodiment of the transport vehicle 1 or the transport facility 100 will be described.

(1) In the above-described embodiment, it has been described that the posture changing portion 15 is configured to revolve the container holding portion 14 around a single reeling axis 15A, thereby changing the container holding portion 14 and the first holding portion 14 held by it. An example of the posture of the storage container 81. However, it is not limited to such an example, and the posture changing portion 15 may be configured to have, for example, a plurality of reeling shafts arranged in different directions, and the container holding portion 14 may be wound around the plurality of reeling shafts. Thereby, the attitude|position of the container holding|maintenance part 14 and the 1st storage container 81 hold|maintained is changed.

(2) In the above-mentioned embodiment, when the detection unit 17S has detected that the first type of storage container 81 has the first type of storage object 71 inside the first type of storage container 81, it has been described that the use for temporary storage is limited. The temporary storage place 93 in which the first type of storage container 81 is stored is taken as an example of the place T to be transported. However, it is not limited to such an example, and even when the detection unit 17S detects the presence of the first type of storage object 71 in the first type of storage container 81, it may be configured to respond to the situation. On the other hand, the case where the temporary storage place 93 is used as the transfer object place T is permitted.

(3) In the above-mentioned embodiment, the window portion 81D is provided in the first type of storage container 81 and the circumference based on the revolving axis 15A has been described. An example of a region that is part of direction C. However, the window portion 81D is not limited to such an example, and the window portion 81D may be provided in a plurality of regions in the circumferential direction C with reference to the revolving axis 15A or the entire region in the circumferential direction C in the first type of storage container 81 .

(4) In the above-mentioned embodiment, the example in which the conveyance vehicle 1 was comprised so that the 2nd type of storage container 82 in addition to the 1st type of storage container 81 may be conveyed was demonstrated. However, the transport vehicle 1 is not limited to such an example, and the transport vehicle 1 may be configured as a transport vehicle dedicated to transporting only the first-type storage container 81 of the first-type storage container 81 . In other words, the container holding portion 14 and the lid portion 17 included in the transport vehicle 1 may be configured to correspond only to the first type of storage container 81 , and may be configured to correspond to the second type of storage container 81 having a different shape from the first type of storage container 81 . Container 82 does not correspond. Alternatively, the transport vehicle may be configured so that three or more types of storage containers 8 including the first type of storage container 81 can be transported.

(5) In the above-described embodiment, the example in which the transport vehicle 1 is configured as a ceiling transport vehicle that travels along the running rail Ra suspended from the ceiling has been described. However, it is not limited to such an example, The conveyance vehicle 1 may be comprised as an unmanned conveyance vehicle which walks on a floor surface.

(6) Furthermore, the configurations disclosed in the above-described embodiments may be applied in combination with the configurations disclosed in other embodiments as long as there is no conflict. Regarding other configurations, the embodiments disclosed in this specification are merely examples in all respects. Therefore, various changes can be suitably made in the range which does not deviate from the summary of this invention.

4. Outline of the above-mentioned embodiment

Hereinafter, the outline of the transport vehicle described above will be described.

A transport vehicle is provided in a transport facility for transporting a storage container for accommodating objects to be transported to a transport target place provided in the transport facility, the storage container having a light-transmitting ability between the outside and the inside of the storage container the window part, the transport vehicle includes: a container holding part for holding the storage container; a lid part for covering the storage container in the state held in the container holding part; and a posture changing part for changing the storage container in the state held a posture of a container holding part; and a detection part for detecting the object to be accommodated inside the container through the window part, the detection part is provided on the cover part, and the posture changing part is used for the conveyance of the container. When the detection portion and the window portion do not face each other, the posture of the container holding portion is changed to be in an opposing state in which the detection portion and the window portion face each other.

According to this configuration, while the storage container is being conveyed in a state of being held in the container holding portion, the detection portion provided in the lid portion can detect the object to be accommodated in the storage container through the window portion of the storage container. . In addition, when the detection part and the window part of the container do not face each other during the detection of the to-be-stored object, the posture of the container holding part is changed by the posture changing part, and the detection part and the container are changed. The window parts of the container are set to face each other, so that the detection part can detect the contents to be accommodated inside the container. Therefore, regardless of the direction of the container being conveyed, it is possible to detect the to-be-stored object inside the container.

Here, preferably, the posture changing portion is configured such that the container holding portion is wound around a winding axis, and the window portion is configured such that It is an area provided in a part of the circumferential direction of the container in the state of being held by the container holding part with the revolving axis as a reference, and the detection part is arranged so that the part of the detection part is located along the revolving axis. The position of the direction corresponds to the position of the window portion of the container held in the container holding portion, and the facing state is a state in which the detection portion and the window portion face each other in the radial direction with respect to the revolving axis.

According to this structure, it becomes possible to change the attitude|position of the storage container in the state hold|maintained by the container holding part by comparatively simple operation|movement, such as turning the container holding part. In addition, since the arrangement position of the detection portion in the direction along the revolving axis corresponds to the position of the window portion of the container that has been held in the container holding portion, it is possible to rotate the container holding portion by rotating the container holding portion. The detection part and the window part are set to face each other. Therefore, with a relatively simple configuration, during conveyance of the storage container, it is possible to detect the object to be stored in the inside of the storage container.

Furthermore, it is preferable that the posture changing unit maintains the posture of the container holding unit so that the detection unit and the window unit are in the opposite state during the transportation of the storage container, and moves between the transportation object place and the detection unit. When the storage container is loaded, the attitude of the container holding portion is changed so that the attitude of the storage container corresponds to the position to be conveyed.

According to this structure, the detection of the to-be-stored object can be performed using the comparatively long time in conveyance of a container. Therefore, the to-be-stored object inside the container can be detected with high reliability. In addition, when the destination of the conveyance has been reached, it is possible to correspond to the conveyance pair Move the storage container in a position like a place.

Furthermore, it is preferable that when the storage container is conveyed from the conveyance origin to the conveyance target place, the posture of the storage container corresponding to the conveyance origin and the posture of the storage container corresponding to the conveyance target place In the same case, and when the posture of the container is a posture that does not become the opposite state, the posture changing portion changes the posture of the container holding portion so that the container temporarily faces the opposite state during conveyance of the container. state.

When the posture of the container corresponding to the transfer origin and the posture of the container corresponding to the transfer target place are the same, it is usually not necessary to change the posture of the container during the transfer. However, when the posture of the container is not in the aforementioned facing state, the detection unit cannot perform the detection operation of the object to be contained in the container without changing the posture of the container. According to this configuration, even in the above case, since the posture of the container holding portion can be changed so that the detection portion and the window portion are temporarily facing each other, it is possible to appropriately detect the contents in the container. In addition, since the change of the posture of the container holding portion is only temporary, it is possible to restore the posture of the storage container to the original posture corresponding to the transfer target place after the detection of the storage object. Thereby, it becomes possible to perform a suitable detection of the to-be-stored object inside a container, and to perform a smooth transfer to and from a conveyance object place.

Moreover, it is preferable that the said container holding part and the said cover part correspond to the storage container of the first type other than the storage container of the first type. In a second type of storage container having a different shape from the aforementioned first type of storage container, a second type of storage object different from the first type of storage object as the aforementioned storage object is accommodated in the second type of storage container , the detection unit corresponds to the first type of storage container, but does not correspond to the second type of storage container.

According to this configuration, the first type of storage container and the second type of storage container can be distinguished, and the detection of the first type of storage object inside the first type of storage container can be appropriately performed. Therefore, even when the transport vehicle is configured to transport a plurality of types of storage containers and storage objects, a specific type of storage container and storage objects can be appropriately detected during transport.

In addition, preferably, in the above-mentioned configuration, when the detection unit detects that the first type of storage container has the first type of storage container, the use for temporary storage of the aforementioned storage container is limited. The temporary storage place of the storage container is the above-mentioned transfer object place.

Depending on the type of items to be stored, there may be cases where it is not appropriate to temporarily store them in a temporary storage place. For example, when the storage container is a reticle transfer box, most of the items stored in the container are very easily damaged items (shrinkers), so it is desirable to avoid storing images in a temporary storage place as much as possible. The case of such a storage container. According to this configuration, when there is the first type of storage object inside the first type of storage container, it is possible to suppress the situation in which the first type of storage container is transported to a temporary storage place for storage. Thereby, it becomes possible to convey the 1st type of to-be-stored object to a suitable conveyance object place other than a temporary storage place, for example.

industrial availability

The technology of the present disclosure can be applied to a transport vehicle, and the aforementioned transport The cart is installed in the conveyance facility to convey the storage container in which the items to be accommodated are conveyed to the conveyance target place provided in the conveyance facility.

#1, #2, #3, #4, #5, #6, #7, #8, #9, #10‧‧‧Steps

Claims (6)

A transport vehicle is provided in a transport facility for transporting a storage container containing objects to be accommodated to a transport target place provided in the transport facility, wherein the transport vehicle has the following characteristics: A window portion for transmitting light between the outside and the inside, and the transport vehicle includes a container holding portion for holding the storage container, a lid portion for covering the storage container in a state held in the container holding portion, and a posture changing portion for changing a posture of the container holding part holding the container; and a detection part for detecting the to-be-contained object inside the container through the window part, and the posture changing part is configured so that the container holding part can be wound around the container holding part. The window part is provided in a part of the area in the circumferential direction with the revolving axis as a reference in the storage container in the state held by the container holding part, and the detection part is arranged so that The position of the detection portion along the direction of the revolving axis corresponds to the position of the window portion of the storage container in the state held by the container holding portion, the detection portion is provided on the cover portion, and the posture changing portion It is during the conveyance of the storage container that the aforementioned inspection When the detection portion and the window portion do not face each other, the posture of the container holding portion is changed to a facing state in which the detection portion and the window portion face each other. The state in which the axes face each other in the radial direction. The transport vehicle according to claim 1, wherein the posture changing portion includes a winding amount sensor capable of detecting a winding amount of the container holding portion. The transport vehicle according to claim 1 or 2, wherein the posture changing section maintains the posture of the container holding section so that the detection section and the window section are in the opposite state during transport of the storage container, and is in a state of being opposite to the transport. When the container is transferred between target places, the posture of the container holding portion is changed so that the posture of the container is a posture corresponding to the transfer target place. The transport vehicle according to claim 1 or 2, wherein when the storage container is transported from the transport origin to the transport target place, when the posture of the storage container corresponding to the transport origin and the position corresponding to the transport target place When the postures of the containers are the same, and when the postures of the containers are not in the facing state, the posture changing section changes the posture of the container holding section to temporarily change the posture of the container holding section during the conveyance of the containers. into the aforementioned opposite state. The transport vehicle according to claim 1 or 2, wherein the container holding portion and the cover portion correspond to a second type of storage container having a shape different from that of the first type of storage container in addition to the first type of storage container as the aforementioned storage container. kind of storage container, in the above-mentioned second kind of storage container, and as the above-mentioned object to be accommodated The first type of storage object is a different second type of storage object, and the detection unit corresponds to the first type of storage container, but does not correspond to the second type of storage container. According to the transport vehicle of claim 5, when the detection unit detects that the first type of storage container has the first type of storage container, the transport vehicle for temporarily storing the storage container is restricted. The temporary storage place is the aforementioned transfer object place.

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