TWI774260B - 超音波檢查裝置及超音波檢查方法 - Google Patents

超音波檢查裝置及超音波檢查方法 Download PDF

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Publication number
TWI774260B
TWI774260B TW110108267A TW110108267A TWI774260B TW I774260 B TWI774260 B TW I774260B TW 110108267 A TW110108267 A TW 110108267A TW 110108267 A TW110108267 A TW 110108267A TW I774260 B TWI774260 B TW I774260B
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TW
Taiwan
Prior art keywords
inspection
ultrasonic
inspection object
signal
reference signal
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TW110108267A
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English (en)
Chinese (zh)
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TW202141036A (zh
Inventor
小林昌幸
酒井薰
大野茂
菊池修
菊川耕太郎
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日商日立電力解決方案股份有限公司
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/44—Processing the detected response signal, e.g. electronic circuits specially adapted therefor
    • G01N29/50—Processing the detected response signal, e.g. electronic circuits specially adapted therefor using auto-correlation techniques or cross-correlation techniques
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/04—Analysing solids
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22—Details, e.g. general constructional or apparatus details
    • G01N29/24—Probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22—Details, e.g. general constructional or apparatus details
    • G01N29/30—Arrangements for calibrating or comparing, e.g. with standard objects
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/44—Processing the detected response signal, e.g. electronic circuits specially adapted therefor
    • G01N29/4463—Signal correction, e.g. distance amplitude correction [DAC], distance gain size [DGS], noise filtering
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/44—Processing the detected response signal, e.g. electronic circuits specially adapted therefor
    • G01N29/4472—Mathematical theories or simulation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/44—Processing the detected response signal, e.g. electronic circuits specially adapted therefor
    • G01N29/46—Processing the detected response signal, e.g. electronic circuits specially adapted therefor by spectral analysis, e.g. Fourier analysis or wavelet analysis
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/02—Indexing codes associated with the analysed material
    • G01N2291/028—Material parameters
    • G01N2291/0289—Internal structure, e.g. defects, grain size, texture
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/26—Scanned objects
    • G01N2291/269—Various geometry objects
    • G01N2291/2697—Wafer or (micro)electronic parts

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pathology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Engineering & Computer Science (AREA)
  • Signal Processing (AREA)
  • Mathematical Physics (AREA)
  • Acoustics & Sound (AREA)
  • Algebra (AREA)
  • Mathematical Analysis (AREA)
  • Mathematical Optimization (AREA)
  • Pure & Applied Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
  • Ultra Sonic Daignosis Equipment (AREA)
TW110108267A 2020-04-16 2021-03-09 超音波檢查裝置及超音波檢查方法 TWI774260B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2020-073255 2020-04-16
JP2020073255A JP7420632B2 (ja) 2020-04-16 2020-04-16 超音波検査装置及び超音波検査方法

Publications (2)

Publication Number Publication Date
TW202141036A TW202141036A (zh) 2021-11-01
TWI774260B true TWI774260B (zh) 2022-08-11

Family

ID=78084103

Family Applications (1)

Application Number Title Priority Date Filing Date
TW110108267A TWI774260B (zh) 2020-04-16 2021-03-09 超音波檢查裝置及超音波檢查方法

Country Status (5)

Country Link
JP (1) JP7420632B2 (ko)
KR (1) KR20220148277A (ko)
CN (1) CN115335693A (ko)
TW (1) TWI774260B (ko)
WO (1) WO2021210227A1 (ko)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW402687B (en) * 1999-11-05 2000-08-21 Weng Li Sheng Frequency-dependent amplitude attenuation characteristics technique
JP2006217943A (ja) * 2005-02-08 2006-08-24 Fuji Photo Film Co Ltd 超音波撮像装置

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005102988A (ja) 2003-09-30 2005-04-21 Fuji Photo Film Co Ltd 超音波診断装置
JP4405821B2 (ja) 2004-02-04 2010-01-27 甫 羽田野 超音波信号検出方法及び装置
JP4830100B2 (ja) 2005-08-26 2011-12-07 国立大学法人豊橋技術科学大学 被検査物の測定方法、及び被検査物の測定装置
US8562534B2 (en) 2006-04-28 2013-10-22 Panasonic Corporation Ultrasonic probe
JP2007309838A (ja) 2006-05-19 2007-11-29 Non-Destructive Inspection Co Ltd 管路検査方法及びこれに用いる管路検査装置
US8292817B2 (en) 2007-03-05 2012-10-23 Yamaguchi University Ultrasonograph
EP3803369A1 (en) 2018-05-25 2021-04-14 Electrolux Appliances Aktiebolag Method and device for monitoring polydisperse media
JP6602449B1 (ja) 2018-12-05 2019-11-06 株式会社日立パワーソリューションズ 超音波検査方法、超音波検査装置及び超音波検査プログラム

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW402687B (en) * 1999-11-05 2000-08-21 Weng Li Sheng Frequency-dependent amplitude attenuation characteristics technique
JP2006217943A (ja) * 2005-02-08 2006-08-24 Fuji Photo Film Co Ltd 超音波撮像装置

Also Published As

Publication number Publication date
JP7420632B2 (ja) 2024-01-23
WO2021210227A1 (ja) 2021-10-21
CN115335693A (zh) 2022-11-11
KR20220148277A (ko) 2022-11-04
JP2021169966A (ja) 2021-10-28
TW202141036A (zh) 2021-11-01

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