TWI717422B - 多點量測用之應變感測器及其製造方法 - Google Patents

多點量測用之應變感測器及其製造方法 Download PDF

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Publication number
TWI717422B
TWI717422B TW105139165A TW105139165A TWI717422B TW I717422 B TWI717422 B TW I717422B TW 105139165 A TW105139165 A TW 105139165A TW 105139165 A TW105139165 A TW 105139165A TW I717422 B TWI717422 B TW I717422B
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TW
Taiwan
Prior art keywords
strain
strain sensing
base film
wiring circuit
main surface
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Application number
TW105139165A
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English (en)
Chinese (zh)
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TW201732218A (zh
Inventor
中村一登
坂田喜博
川島永嗣
竹村六佑
岡本好司
永井宏之
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日商日寫股份有限公司
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Publication of TW201732218A publication Critical patent/TW201732218A/zh
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Publication of TWI717422B publication Critical patent/TWI717422B/zh

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/16—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring the deformation in a solid, e.g. by resistance strain gauge
    • G01B7/18—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring the deformation in a solid, e.g. by resistance strain gauge using change in resistance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/16—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring the deformation in a solid, e.g. by resistance strain gauge
    • G01B7/18—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring the deformation in a solid, e.g. by resistance strain gauge using change in resistance
    • G01B7/20—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring the deformation in a solid, e.g. by resistance strain gauge using change in resistance formed by printed-circuit technique
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/16—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring the deformation in a solid, e.g. by resistance strain gauge
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
    • G01L1/205—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using distributed sensing elements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
    • G01L1/22—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges
    • G01L1/2287—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges constructional details of the strain gauges

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
TW105139165A 2015-12-01 2016-11-29 多點量測用之應變感測器及其製造方法 TWI717422B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2015-234431 2015-12-01
JP2015234431A JP6198804B2 (ja) 2015-12-01 2015-12-01 多点計測用のひずみセンサとその製造方法

Publications (2)

Publication Number Publication Date
TW201732218A TW201732218A (zh) 2017-09-16
TWI717422B true TWI717422B (zh) 2021-02-01

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TW105139165A TWI717422B (zh) 2015-12-01 2016-11-29 多點量測用之應變感測器及其製造方法

Country Status (5)

Country Link
US (1) US10190864B2 (enExample)
JP (1) JP6198804B2 (enExample)
CN (1) CN108291798B (enExample)
TW (1) TWI717422B (enExample)
WO (1) WO2017094365A1 (enExample)

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JP2019066453A (ja) * 2017-09-29 2019-04-25 ミネベアミツミ株式会社 ひずみゲージ
WO2019064529A1 (ja) * 2017-09-29 2019-04-04 日立化成株式会社 電極の保護膜の形成方法
WO2019064535A1 (ja) * 2017-09-29 2019-04-04 日立化成株式会社 保護膜、フォースセンサ及び感光性フィルム
US20190107380A1 (en) * 2017-10-11 2019-04-11 Sikorsky Aircraft Corporation Strain measurement assembly
CN109959358B (zh) * 2017-12-22 2020-10-23 深圳光启超材料技术有限公司 测量薄膜、测量薄膜的制造方法、平面应变场测量方法
CN110132464A (zh) * 2018-02-09 2019-08-16 南昌欧菲显示科技有限公司 导电薄膜及薄膜电阻应变式压力传感器
JP2020085613A (ja) * 2018-11-22 2020-06-04 ムネカタインダストリアルマシナリー株式会社 歪みセンサアレイおよびその製造方法
CN109855687B (zh) * 2019-02-27 2021-05-11 中国工程物理研究院化工材料研究所 一种柔性温度-应变集成传感器阵列及制备方法
JP7246706B2 (ja) * 2019-03-26 2023-03-28 ムネカタインダストリアルマシナリー株式会社 建設構造物用の歪み検知システム
JP2022008026A (ja) * 2020-04-08 2022-01-13 ミネベアミツミ株式会社 ひずみゲージ
US20230175831A1 (en) * 2020-04-08 2023-06-08 Minebea Mitsumi Inc. Strain gauge
JP7438837B2 (ja) * 2020-04-23 2024-02-27 株式会社シマノ 人力駆動車用のコンポーネント
IT202000018331A1 (it) * 2020-07-28 2022-01-28 Koyre S R L Sistema di rilevamento delle sollecitazioni in una struttura flessibile bidimensionale
CN112188759B (zh) 2020-09-22 2021-11-16 江南大学 一种应变片阵列电路的直书写打印方法
CN116529575A (zh) * 2020-12-18 2023-08-01 松下知识产权经营株式会社 负荷传感器
CN118575064A (zh) * 2022-01-25 2024-08-30 国立研究开发法人产业技术综合研究所 柔性传感器以及柔性传感器的制造方法
CN115183731B (zh) * 2022-06-20 2024-12-13 成都飞机工业（集团）有限责任公司 一种机翼表面监测系统及其传感器布置方法

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US6993982B2 (en) * 2001-01-22 2006-02-07 Elantech Devices Corporation Stress sensor for electronic devices
US7055365B2 (en) * 2002-12-26 2006-06-06 Takata Corporation Load sensor and seat weight measuring apparatus with a plurality of strain gauges
JP2009079976A (ja) * 2007-09-26 2009-04-16 Natl Inst For Land & Infrastructure Management Mlit 路面のひずみ測定装置
TW201522928A (zh) * 2013-09-20 2015-06-16 Toshiba Kk 應變感測元件、壓力感測器、麥克風、血壓感測器及觸控面板

Also Published As

Publication number Publication date
CN108291798A (zh) 2018-07-17
TW201732218A (zh) 2017-09-16
US10190864B2 (en) 2019-01-29
WO2017094365A1 (ja) 2017-06-08
JP2017101982A (ja) 2017-06-08
CN108291798B (zh) 2019-11-12
US20180259315A1 (en) 2018-09-13
JP6198804B2 (ja) 2017-09-20

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