TWI712464B - 不良檢測方法 - Google Patents

不良檢測方法 Download PDF

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Publication number
TWI712464B
TWI712464B TW106104797A TW106104797A TWI712464B TW I712464 B TWI712464 B TW I712464B TW 106104797 A TW106104797 A TW 106104797A TW 106104797 A TW106104797 A TW 106104797A TW I712464 B TWI712464 B TW I712464B
Authority
TW
Taiwan
Prior art keywords
additive
transfer pump
injection
concentration
liquid
Prior art date
Application number
TW106104797A
Other languages
English (en)
Chinese (zh)
Other versions
TW201731627A (zh
Inventor
新井賢
吉田幹
內田正喜
Original Assignee
日商迪思科股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日商迪思科股份有限公司 filed Critical 日商迪思科股份有限公司
Publication of TW201731627A publication Critical patent/TW201731627A/zh
Application granted granted Critical
Publication of TWI712464B publication Critical patent/TWI712464B/zh

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/02—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by rotary tools, e.g. drills
    • B28D5/022—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by rotary tools, e.g. drills by cutting with discs or wheels
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/20—Investigating the presence of flaws
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
    • B28D5/0076—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for removing dust, e.g. by spraying liquids; for lubricating, cooling or cleaning tool or work
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
    • B28D5/0082—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for supporting, holding, feeding, conveying or discharging work
    • B28D5/0094—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for supporting, holding, feeding, conveying or discharging work the supporting or holding device being of the vacuum type
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F23/00—Indicating or measuring liquid level or level of fluent solid material, e.g. indicating in terms of volume or indicating by means of an alarm
    • G01F23/22—Indicating or measuring liquid level or level of fluent solid material, e.g. indicating in terms of volume or indicating by means of an alarm by measuring physical variables, other than linear dimensions, pressure or weight, dependent on the level to be measured, e.g. by difference of heat transfer of steam or water
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/06—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a liquid
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R27/00—Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
    • G01R27/02—Measuring real or complex resistance, reactance, impedance, or other two-pole characteristics derived therefrom, e.g. time constant
    • G01R27/22—Measuring resistance of fluids

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Engineering & Computer Science (AREA)
  • Immunology (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Pathology (AREA)
  • Analytical Chemistry (AREA)
  • Electrochemistry (AREA)
  • Fluid Mechanics (AREA)
  • Thermal Sciences (AREA)
  • Auxiliary Devices For Machine Tools (AREA)
  • Machine Tool Sensing Apparatuses (AREA)
  • Grinding-Machine Dressing And Accessory Apparatuses (AREA)
  • Dicing (AREA)
  • Control Of Positive-Displacement Pumps (AREA)
TW106104797A 2016-03-14 2017-02-14 不良檢測方法 TWI712464B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2016-049644 2016-03-14
JP2016049644A JP6639283B2 (ja) 2016-03-14 2016-03-14 不良検出方法

Publications (2)

Publication Number Publication Date
TW201731627A TW201731627A (zh) 2017-09-16
TWI712464B true TWI712464B (zh) 2020-12-11

Family

ID=59871309

Family Applications (1)

Application Number Title Priority Date Filing Date
TW106104797A TWI712464B (zh) 2016-03-14 2017-02-14 不良檢測方法

Country Status (4)

Country Link
JP (1) JP6639283B2 (ko)
KR (1) KR102251264B1 (ko)
CN (1) CN107186900B (ko)
TW (1) TWI712464B (ko)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7046632B2 (ja) * 2018-02-14 2022-04-04 株式会社ディスコ 切削装置
JP7162513B2 (ja) * 2018-12-07 2022-10-28 株式会社ディスコ 加工装置
JP7349260B2 (ja) * 2019-05-23 2023-09-22 株式会社ディスコ 加工装置
EP4063851A4 (en) * 2019-11-18 2023-12-20 Shimadzu Corporation METHOD FOR MEASURING TOTAL ORGANIC CARBON AND DEVICE FOR MEASURING TOTAL ORGANIC CARBON

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11317386A (ja) * 1998-05-07 1999-11-16 Dainippon Screen Mfg Co Ltd 処理液供給装置
JP2008030153A (ja) * 2006-07-28 2008-02-14 Disco Abrasive Syst Ltd 切削装置
CN101489660A (zh) * 2006-05-19 2009-07-22 乔治洛德方法研究和开发液化空气有限公司 处理环境中的液体环式泵及回收系统
CN103391992A (zh) * 2011-02-23 2013-11-13 尤希路化学工业有限公司 固结磨料线锯用水溶性加工液
US20160070274A1 (en) * 2014-09-08 2016-03-10 Haas Automation, Inc. Automatic machine tool coolant mixer

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0732902B2 (ja) * 1990-06-25 1995-04-12 栗田工業株式会社 薬注装置の監視装置
KR970063435A (ko) * 1996-02-13 1997-09-12 김광호 반도체 제조 장치
JP2002016030A (ja) * 2000-06-27 2002-01-18 Mitsubishi Chemical Engineering Corp 研磨液の調製方法および調製装置
JP2002184744A (ja) * 2001-10-09 2002-06-28 Seiko Epson Corp 薬液処理装置および半導体装置の製造方法
JP4819523B2 (ja) 2006-02-21 2011-11-24 株式会社ディスコ 加工液供給装置
US20100226835A1 (en) * 2009-03-03 2010-09-09 Ecolab Inc. Method and apparatus for dispensing solid product
CN102033037A (zh) * 2009-09-28 2011-04-27 无锡江南计算技术研究所 冷却液的质量控制方法
KR101450965B1 (ko) 2011-09-29 2014-10-15 다이닛뽕스크린 세이조오 가부시키가이샤 기판처리장치 및 기판처리방법

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11317386A (ja) * 1998-05-07 1999-11-16 Dainippon Screen Mfg Co Ltd 処理液供給装置
CN101489660A (zh) * 2006-05-19 2009-07-22 乔治洛德方法研究和开发液化空气有限公司 处理环境中的液体环式泵及回收系统
JP2008030153A (ja) * 2006-07-28 2008-02-14 Disco Abrasive Syst Ltd 切削装置
CN103391992A (zh) * 2011-02-23 2013-11-13 尤希路化学工业有限公司 固结磨料线锯用水溶性加工液
US20160070274A1 (en) * 2014-09-08 2016-03-10 Haas Automation, Inc. Automatic machine tool coolant mixer

Also Published As

Publication number Publication date
KR20170106924A (ko) 2017-09-22
JP2017164826A (ja) 2017-09-21
CN107186900A (zh) 2017-09-22
CN107186900B (zh) 2020-10-09
TW201731627A (zh) 2017-09-16
KR102251264B1 (ko) 2021-05-11
JP6639283B2 (ja) 2020-02-05

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