TWI711907B - 調節計 - Google Patents

調節計 Download PDF

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Publication number
TWI711907B
TWI711907B TW108126333A TW108126333A TWI711907B TW I711907 B TWI711907 B TW I711907B TW 108126333 A TW108126333 A TW 108126333A TW 108126333 A TW108126333 A TW 108126333A TW I711907 B TWI711907 B TW I711907B
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TW
Taiwan
Prior art keywords
operation amount
cooling
switching point
area
heating
Prior art date
Application number
TW108126333A
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English (en)
Chinese (zh)
Other versions
TW202008084A (zh
Inventor
濱之園亮
菅原文仁
牧野豊
谷口直俊
Original Assignee
日商阿自倍爾股份有限公司
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Publication date
Application filed by 日商阿自倍爾股份有限公司 filed Critical 日商阿自倍爾股份有限公司
Publication of TW202008084A publication Critical patent/TW202008084A/zh
Application granted granted Critical
Publication of TWI711907B publication Critical patent/TWI711907B/zh

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    • GPHYSICS
    • G05CONTROLLING; REGULATING
    • G05BCONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B11/00Automatic controllers
    • G05B11/01Automatic controllers electric
    • G05B11/36Automatic controllers electric with provision for obtaining particular characteristics, e.g. proportional, integral, differential
    • G05B11/42Automatic controllers electric with provision for obtaining particular characteristics, e.g. proportional, integral, differential for obtaining a characteristic which is both proportional and time-dependent, e.g. P. I., P. I. D.
    • GPHYSICS
    • G05CONTROLLING; REGULATING
    • G05BCONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B13/00Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion
    • G05B13/02Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion electric
    • G05B13/0205Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion electric not using a model or a simulator of the controlled system
    • G05B13/024Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion electric not using a model or a simulator of the controlled system in which a parameter or coefficient is automatically adjusted to optimise the performance
    • GPHYSICS
    • G05CONTROLLING; REGULATING
    • G05DSYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D23/00Control of temperature
    • G05D23/19Control of temperature characterised by the use of electric means
    • G05D23/1919Control of temperature characterised by the use of electric means characterised by the type of controller

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • Health & Medical Sciences (AREA)
  • Artificial Intelligence (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Evolutionary Computation (AREA)
  • Medical Informatics (AREA)
  • Software Systems (AREA)
  • Feedback Control In General (AREA)
TW108126333A 2018-07-27 2019-07-25 調節計 TWI711907B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2018-141767 2018-07-27
JP2018141767A JP7164348B2 (ja) 2018-07-27 2018-07-27 調節計

Publications (2)

Publication Number Publication Date
TW202008084A TW202008084A (zh) 2020-02-16
TWI711907B true TWI711907B (zh) 2020-12-01

Family

ID=69383881

Family Applications (1)

Application Number Title Priority Date Filing Date
TW108126333A TWI711907B (zh) 2018-07-27 2019-07-25 調節計

Country Status (4)

Country Link
JP (1) JP7164348B2 (ja)
KR (1) KR20200012736A (ja)
CN (1) CN110780591B (ja)
TW (1) TWI711907B (ja)

Citations (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05289704A (ja) * 1992-04-11 1993-11-05 Rika Kogyo Kk 加熱冷却調節計
TW200538895A (en) * 2004-04-23 2005-12-01 Yamatake Corp Control method and apparatus
CN100384650C (zh) * 2002-10-15 2008-04-30 三电有限公司 车辆用空调装置
CN102109861A (zh) * 2010-12-15 2011-06-29 复旦大学 热分析仪高频pwm温度控制装置和控制方法
CN102654750A (zh) * 2011-02-16 2012-09-05 阿自倍尔株式会社 控制装置以及控制方法
CN102741028A (zh) * 2009-10-20 2012-10-17 表面制作有限公司 加工温度的分区控制
JP5289704B2 (ja) 2005-12-20 2013-09-11 ゼネラル・エレクトリック・カンパニイ 湾曲ハブ面を有する高圧タービンディスクハブ及び方法
CN103930843A (zh) * 2011-11-15 2014-07-16 东京毅力科创株式会社 温度控制系统、半导体制造装置及温度控制方法
TW201432398A (zh) * 2012-12-13 2014-08-16 Omron Tateisi Electronics Co 調節器、操作量輸出方法、程式及記憶媒體
TW201435525A (zh) * 2012-12-07 2014-09-16 Omron Tateisi Electronics Co 調節器、控制方法及控制程式
TW201606871A (zh) * 2014-04-18 2016-02-16 荏原製作所股份有限公司 基板處理裝置、基板處理系統及基板處理方法
TW201608353A (zh) * 2014-08-22 2016-03-01 Azbil Corp 調節計
WO2018100821A1 (ja) * 2016-11-29 2018-06-07 株式会社神鋼環境ソリューション 蒸気温度制御装置及びそれを含む制御ユニット

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS603705A (ja) * 1983-06-21 1985-01-10 Matsushita Electric Ind Co Ltd 制御弁装置
JP2004126732A (ja) * 2002-09-30 2004-04-22 Yamatake Corp 温度調節計
CN101275774A (zh) * 2007-03-30 2008-10-01 朱殿臣 电动比例阀自动分段防冻恒温燃气热水器
CN103513860B (zh) * 2012-06-29 2016-12-21 联想(北京)有限公司 一种状态切换的方法及电子设备
CN103116371B (zh) * 2013-01-15 2014-09-24 富通集团有限公司 一种用于反应釜的温度控制方法
CN104374036B (zh) * 2013-08-14 2018-08-17 浙江盾安人工环境股份有限公司 空调的控制方法和空调机组
JP6346582B2 (ja) * 2015-03-26 2018-06-20 アズビル株式会社 制御装置および制御方法

Patent Citations (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05289704A (ja) * 1992-04-11 1993-11-05 Rika Kogyo Kk 加熱冷却調節計
CN100384650C (zh) * 2002-10-15 2008-04-30 三电有限公司 车辆用空调装置
TW200538895A (en) * 2004-04-23 2005-12-01 Yamatake Corp Control method and apparatus
JP5289704B2 (ja) 2005-12-20 2013-09-11 ゼネラル・エレクトリック・カンパニイ 湾曲ハブ面を有する高圧タービンディスクハブ及び方法
CN102741028A (zh) * 2009-10-20 2012-10-17 表面制作有限公司 加工温度的分区控制
CN102109861A (zh) * 2010-12-15 2011-06-29 复旦大学 热分析仪高频pwm温度控制装置和控制方法
CN102654750A (zh) * 2011-02-16 2012-09-05 阿自倍尔株式会社 控制装置以及控制方法
CN103930843A (zh) * 2011-11-15 2014-07-16 东京毅力科创株式会社 温度控制系统、半导体制造装置及温度控制方法
TW201435525A (zh) * 2012-12-07 2014-09-16 Omron Tateisi Electronics Co 調節器、控制方法及控制程式
CN104813244A (zh) * 2012-12-07 2015-07-29 欧姆龙株式会社 调节器、控制方法以及控制程序
JP2016170806A (ja) * 2012-12-07 2016-09-23 オムロン株式会社 調節器、制御方法および制御プログラム
TW201432398A (zh) * 2012-12-13 2014-08-16 Omron Tateisi Electronics Co 調節器、操作量輸出方法、程式及記憶媒體
TW201606871A (zh) * 2014-04-18 2016-02-16 荏原製作所股份有限公司 基板處理裝置、基板處理系統及基板處理方法
TW201608353A (zh) * 2014-08-22 2016-03-01 Azbil Corp 調節計
WO2018100821A1 (ja) * 2016-11-29 2018-06-07 株式会社神鋼環境ソリューション 蒸気温度制御装置及びそれを含む制御ユニット

Also Published As

Publication number Publication date
TW202008084A (zh) 2020-02-16
CN110780591B (zh) 2023-08-11
JP7164348B2 (ja) 2022-11-01
KR20200012736A (ko) 2020-02-05
JP2020017231A (ja) 2020-01-30
CN110780591A (zh) 2020-02-11

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