TWI700261B - Ｓn－Ｚn－Ｏ系氧化物燒結體及其製造方法 - Google Patents

Ｓn－Ｚn－Ｏ系氧化物燒結體及其製造方法 Download PDF

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TWI700261B
TWI700261B TW105131183A TW105131183A TWI700261B TW I700261 B TWI700261 B TW I700261B TW 105131183 A TW105131183 A TW 105131183A TW 105131183 A TW105131183 A TW 105131183A TW I700261 B TWI700261 B TW I700261B
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sno
sintered body
degrees
oxide sintered
powder
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TW105131183A
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Chinese (zh)
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TW201728554A (zh
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小澤誠
五十嵐茂
安東勳雄
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日商住友金屬鑛山股份有限公司
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JP2018199861A (ja) * 2017-05-25 2018-12-20 日立金属株式会社 酸化物ターゲット材およびその製造方法
WO2019054489A1 (ja) * 2017-09-14 2019-03-21 三菱マテリアル株式会社 スパッタリングターゲット
JP2019073747A (ja) * 2017-10-12 2019-05-16 住友金属鉱山株式会社 非晶質の透明酸化物膜、Ｓｎ−Ｚｎ−Ｏ系酸化物焼結体、非晶質の透明酸化物膜の製造方法、及びＳｎ−Ｚｎ−Ｏ系酸化物焼結体の製造方法
JP2019131866A (ja) * 2018-01-31 2019-08-08 住友金属鉱山株式会社 酸化物スパッタ膜、酸化物スパッタ膜の製造方法、酸化物焼結体及び透明樹脂基板
JP2019163493A (ja) * 2018-03-19 2019-09-26 住友金属鉱山株式会社 透明酸化物積層膜、透明酸化物積層膜の製造方法、及び透明樹脂基板
JP2019163494A (ja) * 2018-03-19 2019-09-26 住友金属鉱山株式会社 透明酸化物膜、透明酸化物膜の製造方法、酸化物焼結体及び透明樹脂基板
JP2019183244A (ja) * 2018-04-16 2019-10-24 住友金属鉱山株式会社 透明酸化物積層膜、透明酸化物積層膜の製造方法、スパッタリングターゲット及び透明樹脂基板
JP2019189473A (ja) * 2018-04-19 2019-10-31 住友金属鉱山株式会社 Ｓｎ−Ｚｎ−Ｏ系酸化物焼結体とその製造方法
JP2021021122A (ja) * 2019-07-30 2021-02-18 住友金属鉱山株式会社 蒸着用タブレットと酸化物透明導電膜および酸化錫系焼結体の製造方法
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