TWI691361B - 包含具薄膜電晶體及電容感測之雙基板的數位微流體裝置 - Google Patents

包含具薄膜電晶體及電容感測之雙基板的數位微流體裝置 Download PDF

Info

Publication number
TWI691361B
TWI691361B TW107136384A TW107136384A TWI691361B TW I691361 B TWI691361 B TW I691361B TW 107136384 A TW107136384 A TW 107136384A TW 107136384 A TW107136384 A TW 107136384A TW I691361 B TWI691361 B TW I691361B
Authority
TW
Taiwan
Prior art keywords
electrodes
digital microfluidic
microfluidic device
electrode
density
Prior art date
Application number
TW107136384A
Other languages
English (en)
Other versions
TW201922347A (zh
Inventor
伊恩 法蘭屈
Original Assignee
美商電子墨水股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 美商電子墨水股份有限公司 filed Critical 美商電子墨水股份有限公司
Publication of TW201922347A publication Critical patent/TW201922347A/zh
Application granted granted Critical
Publication of TWI691361B publication Critical patent/TWI691361B/zh

Links

Images

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
    • B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
    • B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
    • B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
    • B01L3/502769—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by multiphase flow arrangements
    • B01L3/502784—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by multiphase flow arrangements specially adapted for droplet or plug flow, e.g. digital microfluidics
    • B01L3/502792—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by multiphase flow arrangements specially adapted for droplet or plug flow, e.g. digital microfluidics for moving individual droplets on a plate, e.g. by locally altering surface tension
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
    • B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
    • B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
    • B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
    • B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
    • B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
    • B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
    • B01L3/502707—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by the manufacture of the container or its components
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
    • B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
    • B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
    • B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
    • B01L3/502715—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by interfacing components, e.g. fluidic, electrical, optical or mechanical interfaces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
    • B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
    • B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
    • B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
    • B01L3/50273—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by the means or forces applied to move the fluids
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
    • B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
    • B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
    • B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
    • B01L3/502769—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by multiphase flow arrangements
    • B01L3/502784—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by multiphase flow arrangements specially adapted for droplet or plug flow, e.g. digital microfluidics
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R27/00—Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
    • G01R27/02—Measuring real or complex resistance, reactance, impedance, or other two-pole characteristics derived therefrom, e.g. time constant
    • G01R27/26—Measuring inductance or capacitance; Measuring quality factor, e.g. by using the resonance method; Measuring loss factor; Measuring dielectric constants ; Measuring impedance or related variables
    • G01R27/2605—Measuring capacitance
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/002—Scanning microscopes
    • G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
    • G02B21/0052—Optical details of the image generation
    • G02B21/0076—Optical details of the image generation arrangements using fluorescence or luminescence
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/004—Optical devices or arrangements for the control of light using movable or deformable optical elements based on a displacement or a deformation of a fluid
    • G02B26/005—Optical devices or arrangements for the control of light using movable or deformable optical elements based on a displacement or a deformation of a fluid based on electrowetting
    • G—PHYSICS
    • G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
    • G09G3/00—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes
    • G09G3/20—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters
    • G09G3/34—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters by control of light from an independent source
    • G09G3/3433—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters by control of light from an independent source using light modulating elements actuated by an electric field and being other than liquid crystal devices and electrochromic devices
    • G09G3/348—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters by control of light from an independent source using light modulating elements actuated by an electric field and being other than liquid crystal devices and electrochromic devices based on the deformation of a fluid drop, e.g. electrowetting
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
    • H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
    • H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
    • H01L27/1248—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs with a particular composition or shape of the interlayer dielectric specially adapted to the circuit arrangement
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
    • H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
    • H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
    • H01L27/1251—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs comprising TFTs having a different architecture, e.g. top- and bottom gate TFTs
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
    • H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
    • H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
    • H01L27/1255—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs integrated with passive devices, e.g. auxiliary capacitors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2200/00—Solutions for specific problems relating to chemical or physical laboratory apparatus
    • B01L2200/06—Fluid handling related problems
    • B01L2200/0673—Handling of plugs of fluid surrounded by immiscible fluid
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2300/00—Additional constructional details
    • B01L2300/06—Auxiliary integrated devices, integrated components
    • B01L2300/0627—Sensor or part of a sensor is integrated
    • B01L2300/0636—Integrated biosensor, microarrays
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2300/00—Additional constructional details
    • B01L2300/06—Auxiliary integrated devices, integrated components
    • B01L2300/0627—Sensor or part of a sensor is integrated
    • B01L2300/0645—Electrodes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2300/00—Additional constructional details
    • B01L2300/16—Surface properties and coatings
    • B01L2300/161—Control and use of surface tension forces, e.g. hydrophobic, hydrophilic
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2300/00—Additional constructional details
    • B01L2300/16—Surface properties and coatings
    • B01L2300/161—Control and use of surface tension forces, e.g. hydrophobic, hydrophilic
    • B01L2300/165—Specific details about hydrophobic, oleophobic surfaces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2400/00—Moving or stopping fluids
    • B01L2400/04—Moving fluids with specific forces or mechanical means
    • B01L2400/0403—Moving fluids with specific forces or mechanical means specific forces
    • B01L2400/0415—Moving fluids with specific forces or mechanical means specific forces electrical forces, e.g. electrokinetic
    • B01L2400/0427—Electrowetting

Landscapes

  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Dispersion Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Analytical Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Clinical Laboratory Science (AREA)
  • Hematology (AREA)
  • General Health & Medical Sciences (AREA)
  • Power Engineering (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Optics & Photonics (AREA)
  • Theoretical Computer Science (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Thin Film Transistor (AREA)
  • Micromachines (AREA)
  • Electrochromic Elements, Electrophoresis, Or Variable Reflection Or Absorption Elements (AREA)

Abstract

一種介電質上電潤濕主動矩陣(AM-EWoD)裝置，其包含具薄膜電晶體(TFT)及電容感測之雙基板。此處所繪下基板包含第一複數個電極，用以推動各液滴穿過一微流體區域，而上基板包含第二複數個電極，其被構造成以電容感測詢問該等液滴。在一些實施例中，該上基板具高解析度感測區及低解析度感測區。

Description

包含具薄膜電晶體及電容感測之雙基板的數位微流體裝置 【相關申請案】
本申請案主張對2017.10.18申請之美國臨時專利申請案第62/573,846號的優先權。本說明書中參照之所有專利及專利申請案之全部內容均以參照的方式併入本文。
本發明係關於一種介電質上電潤濕主動矩陣(AM-EWoD)裝置，其包含具薄膜電晶體(TFT)及電容感測之雙基板。
數位微流體裝置利用獨立電極於受限環境下推進、分流及加入液滴，藉此提供「晶片實驗室(lab-on-a-chip)」。數位微流體裝置另稱之為介電質上電潤濕或「EWoD」，以進一步區隔此方法與仰賴電泳流動及/或微泵浦之競爭性微流體系統。Wheeler在2012年Annu.Rev.Anal.Chem(5：413-40)之「Digital Microfluidics」中提出2012電潤濕技術回顧，茲以參照 方式將其全文併入本文。該技術允許以少量樣本及試劑實行樣本製備、分析及合成化學。近年來利用電潤濕之微流體單元中受控液滴操縱業具市場性；現已可自大型生命科學公司如Oxford Nanopore取得產品。
大部分的EWoD文獻報告涉及所謂的「被動矩陣」裝置(亦稱「分段」裝置)，藉此可以一控制器直接驅動十至二十個電極。雖然分段裝置易於製造，但是電極的數量受限於空間和驅動限制。因此，可於被動矩陣裝置中實行大量平行分析、反應等。相較於此，「主動矩陣」裝置(亦稱主動矩陣EWoD，或稱AM-EWoD)裝置可具有數千、數十萬甚或數百萬個可定址電極。該等電極一般係由薄膜電晶體(TFTs)切換，且液滴移動可經程式化使得AM-EWoD陣列可作為通用裝置，允許控制多液滴及執行同時分析處理之高自由度。
由於電場洩漏之限制性需求，大部分的先進AM-EWoD裝置係自多晶矽(polycrystalline silicon)(亦稱polysilicon，或稱poly-Si)建構。但多晶矽製造遠較非晶矽製造(即用於LCD顯示器業界之大量生產的主動矩陣TFT中使用的類型)價昂。多晶矽製程價昂之因在於用於伴隨多晶矽之獨特處理與製造步驟。全世界經構造來製造多晶矽裝置的設施亦較少。但由於多晶矽功能性之改良，Sharp公司已能達成在單一主動矩陣上含括推進、感測及加熱能力之AM-EWoD裝置。參見例如美國專利第8,419,273號、第8,547,111號、第8,654,571號、第8,828,336號及第9,458,543號，茲以參照方式將其等全 文併入本文。一複雜的多晶矽AM-EWoD示例示如圖1。
雖然多晶矽製造技術允許實現複雜的AM-EWoD裝置，多晶矽裝置製造的成本加上全球合適的製造設施之短缺，使得AM-EWoD技術難以廣泛運用。需要有可利用既有非晶矽製造容量優點的不同設計。此等裝置可以較低成本大量生產，使其成為常見診斷測試如免疫分析的理想選擇。
本發明藉由提供AM-EwoD用之一替代架構來解決先前技術的缺點，AM-EwoD極適於自非晶矽基板建構。在一例項中，本發明提供一種數位微流體裝置，其包括一第一基板、一第二基板、一間隔體及第一與第二控制器。該第一基板包括第一複數個電極，其耦合至一第一組薄膜電晶體，及包含覆蓋該第一複數個電極及該第一組薄膜電晶體兩者之一第一介電層。該第二基板包括第二複數個電極，其耦合至一第二組薄膜電晶體，及包含覆蓋該第二複數個電極及該第二組薄膜電晶體兩者之一第二介電層。該間隔體隔離該等第一及第二基板，及產生在該等第一及第二基板間之一微流體區域。該第一控制器操作耦合至該第一組薄膜電晶體及被構造成提供推進電壓至該第一複數個電極之至少一部分，而該第二控制器操作耦合至該第二組薄膜電晶體及被構造成判定在該第二複數個電極之至少一個電極與一驅動電極間之電容。在一些實施例中，該第一介電層係疏水性的，而在其他實施例中，該第二介電層係疏水性的。在較佳實施例中，該第一複數個電極配置成一陣列，例如包含每線性公分至少25個電極。在一些實施例中，該第二複數個電極與該驅動電極成交叉指形(interdigitated)。在一些實施例中，一信號源耦合至該驅動電極及被構造成提供一時變電壓至該驅動電極。在一些實施例中，該第二基板包含至少一個透光區域，其面積可為例如至少10mm2。該數位微流體裝置可係自非晶或多晶矽建構。
在一些實施例中，一數位微流體裝置將具有不同電極密度之兩區域，亦即感測電極側用之一高密度(亦稱「高解析度(high-res)」)區及一低密度(亦稱「低解析度(low-res)」)區。此設計將允許使用者實行粒子詢問(亦即電容感測)以判定在裝置之一部分中的組成或尺寸，及接著簡單監測在裝置之另一部分中的粒子位置或存在。整體而言，此構造簡化了裝置製造，同時亦簡化了感測功能相關資料處理。
200‧‧‧介電質上電潤濕
202‧‧‧油
204‧‧‧液滴
205‧‧‧推進電極
206‧‧‧上電極
207‧‧‧疏水塗層
208‧‧‧介電層
405‧‧‧電極
407‧‧‧疏水層
408‧‧‧介電層
505‧‧‧感測電極
506‧‧‧驅動電極
507‧‧‧疏水層
508‧‧‧介電層
905‧‧‧感測電極
910‧‧‧間隙
915‧‧‧光
920‧‧‧物件
930‧‧‧液滴
圖1顯示一先前技術EwoD裝置，其包含在相同主動矩陣上的推進及感測兩者；圖2繪示藉由在相鄰電極上提供不同電荷狀態而在相鄰電極間移動水相液滴。在圖2中，在(下)電極接收AC信號上方的液體/介電質介面處之液體中感應負電荷，而當施加負電荷至相對(上)電極時感應正電荷。(此圖顯示在AC循環期間最左邊的電極立即充正電。)如圖2所示，像素總是具有與在液滴介面處之感應電荷相反的電荷；圖3顯示本發明之一EwoD裝置之複數個推進電極 用的一TFT架構；圖4係第一基板的一部分之簡圖，其包含一推進電極、一薄膜電晶體、一儲存電容器、一介電層及一疏水層。圖4描繪典型的下TFT陣列；圖5係第二基板的一部分之簡圖，其包含一感測電極、一驅動電極、一薄膜電晶體、一介電層及一疏水層。圖5描繪典型的上TFT陣列；圖6顯示一感測電極及一驅動電極用之一TFT架構，其構造成用於電容感測及評估微流體液滴；圖7例示一實施例，其中該感測電極及該驅動電極呈交叉指形為第二電極的一部分；圖8例示一數位微流體裝置頂視圖，其中感測電極配置成具有高低密度的變化區。在圖8中所示電極配置提供許多分析功能所需功能性(液滴尺寸判定及移動追蹤)，同時降低裝置複雜性及生產成本。圖8的像素提供下板上的液滴移動。圖8的清除區是在上感測陣列中且允許對液滴之光學測量；圖9例示一替代實施例，其包含一透光區域，在該處可以電磁輻射(亦及光)詢問液滴。可以理解的是，探測光及所得信號兩者可進入/離開通過相同透光區域；圖10顯示感測電極之一替代配置，其配置成具有高低密度變化區；圖11顯示感測電極之一替代配置，其配置成具有高低密度變化區；圖12顯示一替代配置，其包含配置成具有高低密度變化區之長型感測電極；圖13顯示一替代配置，其包含配置成具有高低密度變化區之長型感測電極。
如上述，本發明提供一種介電質上電潤濕主動矩陣(AM-EWoD)裝置，其包含具薄膜電晶體(TFT)及電容感測之雙基板。此處所繪「下」基板包含複數個電極，用以推動各液滴穿過一微流體區域。「上」基板包含複數個電極，用以提供一信號及以電容感測偵測液滴之存在及/或尺寸及/或成分。使用「上」及「下」僅係依慣例，兩基板的位置可切換，且裝置可以多種方式定向，例如上下板可概略平行，而整體裝置經定向使得基板垂直於工作表面(相對於如圖所示的平行於工作表面)。上或下基板可包含額外功能如電阻性加熱及/或溫度感測。由於該等裝置併入基於TFT之感測器，故與已知被動裝置相較，該等裝置之敏感度與解析度高得多。此外，可以多晶矽進行設計，藉此降低生產成本至裝置係可拋式的程度。亦可下板採用a-Si TFT以取其較高操作電壓的優點，及poly-Si TFT為上板而具較高靈敏度感測。
一EWoD裝置之基本操作例示如圖2剖面影像。EWoD 200包含填充有油202及至少一個水溶液滴204之單元。單元間隙一般範圍在50至200μm，但間隙可更大些。在如圖2所示之一基本構造中，複數個推進電極205配置於一基板上，及單一上電極206配置於相對表面上。該單元另包含在接觸油層之表面上之疏水塗層207，及在推進電極205與疏水塗層207間之介電層208。(上基板亦可包含介電層，但未示於圖2中)。疏水層防止液滴潤濕表面。當相鄰電極間無施加電壓差時，液滴將維持球狀使得與疏水表面(油及疏水層)的接觸最小化。由於液滴不會潤濕表面，故除非需要該行為，較 不可能汙染表面或與其他液滴交互作用。
雖然可以單一層針對介電及疏水功能兩者，但此等層一般需要厚的無機層(以避免針孔)，造成低介電常數，因而需要高於100V造成液滴移動。為達成低壓致動，較佳具有高電容且無針孔之薄的無機層，頂部是薄的有機疏水層。利用此組合可以具有電壓範圍在+/-10至+/-50V之(習知TFT陣列可供應範圍內)電潤濕操作。
當在相鄰電極間施加電壓差時，一電極上的電壓吸引在介電質對液滴介面處之液滴中的相反電荷，且該液滴移向此電極，如圖2所例示。可接受的液滴推進所需之電壓端視介電質與疏水層性質而定。AC驅動係用以降低液滴、介電質及電極因各種電化學而劣化。EWoD操作頻率範圍可在100Hz至1MHz，但較低頻之1kHZ或更低對於具操作速度限制之TFT之使用較佳。
如圖2所示，上電極206係單一導電層，一般設定為0伏特或共用電壓值(VCOM)，其考量推進電極205上因用以切換電極上電壓之TFT之電容回踢(kickback)造成的偏移電壓(見圖3)。上電極亦可具有經施加以增加液體兩端電壓之方波。此配置允許對TFT連接之推進電極205使用較低推進電壓，因為上板電壓206係TFT供應之電壓外之額外電壓。
如圖3所示，推進電極之一主動矩陣可經配置而以資料與閘極(選擇)線驅動，非常類似於液晶顯示器中之主動矩陣。閘極(選擇)線係以一次一線定址方式掃描，而資料線攜載待傳送至推進電極用於電濕潤操作 之電壓。若無需移動，或若液滴會自一推動電極遠離，則將施加0V至該(非標定)推進電極。若液滴會移向推進電極，則將施加一AC電壓至該(標定)推進電極。
非晶矽、TFT切換之推動電極之架構示如圖4。介電質408須夠薄且介電常數與低壓AC驅動相容，諸如自LCD顯示器用之習知影像控制器可得者。例如介電層可包括一層上塗布有200-400nm電漿沉積矽氮化物之近乎20-40nm SiO2。或者，介電質可包括介於2與100nm厚之原子層沉積之Al2O3，較佳介於20與60nm厚。TFT係藉由沿著各電極線產生不同摻雜之a-Si結構之交替層而建構，其方法係熟悉此技術者所週知。疏水層407可自材料如Teflon® AF(Sigma-Aldrich,Milwaukee,WI)及Cytonix(Beltsville,MD)之FlurorPelTM塗布建構，其等可經旋塗布於介電層408上。
在本發明中，具TFT功能之第二基板經建構以提供電容感測能力，且以一間隔體分離兩層，在該兩層間產生微流體區。液滴之電容感測利用兩電極，示如圖6。AC信號一般施加於驅動電極506，藉此AC信號在相鄰感測電極505上產生電容耦合電壓。電容耦合信號係由外部電路測量，且信號改變指示驅動電極506與感測電極505間的材料。例如，耦合電壓將因油202或水溶液滴204是否介於電極間而顯著不同，此係因材料間相對介電常數不同所致。(矽油之相對介電常數係εr=2.5，乙醇之相對介電常數係εr=24，及水之相對介電常數係εr=80。)
非晶矽感測層的架構，包含TFT切換之感測電極505與驅動電極506，示如圖5。驅動電極用之AC信號水平移動，且一次僅一線被啟動以將對讀取線及「關閉(OFF)」感測電極之電容耦合最小化。TFT並非完美開關，即使在「關閉」狀態下仍具有小量導電性。亦即大量的關閉線會具有與一「導通(ON)」像素類似的信號。因此較佳係藉由僅在被驅動之列上具有ac電壓而將來自其上下列的ac電壓之電容信號降至最低。
如圖6所示，感測與驅動電極產生一共面間隙單元。一主要優點在於兩板無需精確對齊，或甚至具有相同的像素間隔，因而簡化了兩板系統之製造。利用交叉指形間隙單元之液滴用電容感測的額外細節見於例如「Capacitance Variation Induced by Microfluidic Two-Phase Flow across Insulated Interdigital Electrodes in Lab-On-Chip Devices」(T.Dong,C Barbosa, Sensors,15,2694-2708,(2015))，茲以參照方式將其全文併入本文。用於偵測電容信號之電路可包含各種電器組件，包含放大器、多工開關等。先進設計可包含耦合至多通道電荷感測器之a-Si TFT陣列，諸如用於數位x射線成像。見於G.De Geronimo等人在Nuclear Instruments and Methods in Physics Research A(471 pp.192-199,(2001))中之「Front-end electronics for imaging detectors」，茲以參照方式將其全文併入本文。
在一些實施例中，無需針對AC信號提供多個獨立驅動電極。如圖7所示，驅動電極可經配置為連 續，但與感測電極呈交叉指形。(圖7中所示之所有電極均在同一金屬層中，但以不同顏色展示以彰顯其功能。)在圖7中，提供跨越表面以水平傳輸之AC信號至單一驅動電極，同時跨越陣列「讀取」各感測電極。一般一次僅啟動一感測器線，以將來自驅動電極之AC信號與處於「關閉」模式之感測電極間的電容耦合降至最低。沒有此類逐線讀取，來自多個感測電極之具「空」狀態(例如耦合至油)之信號將較適當者大，降低正確感測電極之信雜比。在一替代實施例中，上基板可包含驅動電極、感測電極及一接地閘極。驅動與感測電極可用於液滴感測，如上述，而接地閘極提供相對於推進電極之一電極表面區域，其具有對電氣接地之低阻抗。
本發明將利用耦合至上驅動與感測電極之電路提供電容感測，藉此允許裝置追蹤由裝置操縱之液滴位置。但來自液滴之電容感測之透過一小感測電極之信號亦相當小，因此可能需要一至三百條感測電極線來獲得可接受的信雜比。提供跨越整個裝置之此高密度感測電極將係價昂且非必要的。因此，對於較大陣列而言(諸如組合化學)，較佳係在用於微粒尺寸調整之上板上具有具高密度感測像素之小局部化區域，而其他用於移動感測處則係低密度。
如圖8所示，可由在上板上各位置處具不同密度的感測電極產生AM-EWoD裝置。在圖8之實施例中，在用於液滴尺寸測量之陣列上具有200dpi高解析度區域，及用於追蹤液滴移動之10dpi解析度區域。在圖 8中，對於100條測量線，感測器將係181.61mm寬。若感測板下之TFT EWoD推進基板具有200dpi之均勻解析度(每英寸的電極數)，則將具有1430列推進電極用於控制液滴之移動、混合等。相對地，受限於跨越整個裝置具180dpi解析度的一百個感測列之裝置，將僅係14.1mm寬，造成僅111列推進電極；對於複雜陣列可能過小。因此，藉由提供不同密度，一較大裝置可由所有的需求感測容量產生。概言之，低解析度區域每線性公分將包含1到15個電極，而高解析度區域每線性公分將包含20到200個電極。一般具較低密度(亦稱「低解析度」)之感測電極的總面積(長x寬)大於具較高密度(亦稱「高解析度」)之感測電極的總面積。例如相較於高解析度面積s，低解析度面積可為三倍以上。例如可具5倍以上的低解析度面積。例如相較於高解析度面積，低解析度面積可為十倍以上。
利同密度感測電極的額外優點在於部分上板可具可穿透或可透光區域，以允許進一步液滴詢問。例如可藉由以一光源透過上基板照射液滴而觀察到螢光標記，及接著利用一偵測器及彩色濾波器(選用)透過上基板觀察所得螢光。在其他實施例中，光可穿過上與下基板兩者，以允許在IR、UV或可見光波長之吸收測量。或者，可利用經衰減(經擾動)之總體內反射光譜探測系統中液滴內含物或位置。
此系統之一實施例示如圖9，其中在感測電極905間的間隙910係約2mm，允許光915自物件920穿過以照射一通過中的液滴930。在一實施例中，液滴 930包含螢光分子，且所得螢光信號經收集回穿物件920並利用雙色濾波器(未顯示)分波而以偵測器偵測之(未顯示)。因此，該設計允許不同類型資訊如電容及光譜資訊在液滴移動穿過系統時，被液滴收集。
如參考圖8所述，用以達成低解析度感測的最簡單方式將係具有如高解析度區域之感測像素設計。此概念例示如圖10中的不同實施例。利用圖10的設計，液滴將可通過低解析度感測像素間，而可將液滴控制演算法寫入以確保液滴恆定穿過感測像素，允許監視液滴尺寸與成分。如圖10所例示，低解析度像素的均勻分布使其得以大幅增加可感測區域，同時允許使用市售驅動器。替代地，在任一垂直感測線上的感測像素數量可為定值，而感測像素交錯，示如圖11。亦可採用其他圖案如虛擬隨機式，將與液滴之交互作用最大化，同時降低須製造及稍後定址之實際感測TFT數量。
亦可利用不同外形電極產生低解析度與高解析度感測區域，示如圖12與13。圖12顯示在高解析度感測區域中的正方形像素及在低解析度感測區域之較大的矩形感測像素。此設計將可有效率地感測上下移動陣列，亦即在長型電極間移動。可實行與此相同技術製作水平與垂直長型電極兩者，提供以低解析度追蹤之液滴。圖13顯示具垂直與水平矩形感測像素之低解析度區域，以偵測液滴的垂直與水平移動。其他幾何形狀設計如螺旋狀，亦可用以促進以較少電極及較少TFT進行位置感測。如圖12與13所示，易於自低密度區域(在該處 發生液滴產生、分開或混合)將液滴移動至高密度區域(在該處可評估液滴的尺寸及成分)。
自前述可知本發明可提供低成本晶片上實驗功能。尤其是藉由使用上述架構，可利用非晶矽製造設施及較低成本驅動電子元件產生介電系統上的電潤濕。本發明可有效利用EWoD裝置上下兩者之可用表面，但無需在上下表面上對齊電極。
熟悉此技術者將知可在不背離本發明的範疇下，對上述本發明的特定實施利進行多種改變與修改。因此，前述之整體應解譯為例示性而無限制之意。
200‧‧‧介電質上電潤濕
202‧‧‧油
204‧‧‧液滴
205‧‧‧推進電極
206‧‧‧上電極
207‧‧‧疏水塗層
208‧‧‧介電層

Claims (17)

  1. 一種數位微流體裝置，其包括：一第一基板，其包括第一複數個電極，其耦合至一第一組薄膜電晶體，及包含覆蓋該第一複數個電極及該第一組薄膜電晶體兩者之一第一介電層；一第二基板，其包括一驅動電極及第二複數個電極，該第二複數個電極耦合至一第二組薄膜電晶體，該第二基板包含覆蓋該驅動電極、該第二複數個電極及該第二組薄膜電晶體之一第二介電層；一間隔體，其隔離該等第一及第二基板，及產生在該等第一及第二基板間之一微流體區域；一第一控制器，其操作耦合至該第一組薄膜電晶體及被構造成提供推進電壓至該第一複數個電極之至少一部分；及一第二控制器，其操作耦合至該第二組薄膜電晶體及被構造成判定在該第二複數個電極之至少一個電極與該驅動電極間之電容。
  2. 如請求項1之數位微流體裝置，其中該第一介電層係疏水性的。
  3. 如請求項1之數位微流體裝置，其中該第二介電層係疏水性的。
  4. 如請求項1之數位微流體裝置，其進一步包括覆蓋該第一介電層之一第一疏水層及覆蓋該第二介電層之一第二疏水層。
  5. 如請求項1之數位微流體裝置，其中該第一複數個薄 膜電晶體或該第二複數個薄膜電晶體包括非晶矽。
  6. 如請求項1之數位微流體裝置，其中該第一複數個電極配置成一陣列。
  7. 如請求項6之數位微流體裝置，其中該第一複數個電極之該陣列包含每線性公分至少25個電極。
  8. 如請求項1之數位微流體裝置，其中該第二複數個電極之每個電極與該驅動電極成交叉指形(interdigitated)。
  9. 如請求項8之數位微流體裝置，其進一步包括一信號源，其耦合至該驅動電極及被構造成提供一時變電壓至該驅動電極。
  10. 如請求項8之數位微流體裝置，其中該第二複數個電極之寬度介於0.01與5mm間。
  11. 如請求項1之數位微流體裝置，其中該第二基板包含至少一個透光區域。
  12. 如請求項11之數位微流體裝置，其中該透光區域之面積至少為10mm2。
  13. 如請求項1之數位微流體裝置，其中該第二複數個電極係以一第一密度及一第二密度配置，及該第一密度包含每100mm2至少三倍於該第二密度之電極。
  14. 如請求項13之數位微流體裝置，其中該第二複數個電極之該第一密度包含每線性公分20至200個電極。
  15. 如請求項13之數位微流體裝置，其中該第二複數個電極之該第二密度包含每線性公分1至15個電極。
  16. 如請求項13之數位微流體裝置，其中對應於該第一 密度之該裝置之面積小於對應於該第二密度之該裝置之面積。
  17. 如請求項16之數位微流體裝置，其中該裝置之對應於該第二密度的面積係該裝置之對應於該第一密度的面積的至少三倍。
TW107136384A 2017-10-18 2018-10-16 包含具薄膜電晶體及電容感測之雙基板的數位微流體裝置 TWI691361B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US201762573846P 2017-10-18 2017-10-18
US62/573,846 2017-10-18

Publications (2)

Publication Number Publication Date
TW201922347A TW201922347A (zh) 2019-06-16
TWI691361B true TWI691361B (zh) 2020-04-21

Family

ID=66097311

Family Applications (2)

Application Number Title Priority Date Filing Date
TW109110971A TWI744848B (zh) 2017-10-18 2018-10-16 包含具薄膜電晶體及電容感測之雙基板的數位微流體裝置
TW107136384A TWI691361B (zh) 2017-10-18 2018-10-16 包含具薄膜電晶體及電容感測之雙基板的數位微流體裝置

Family Applications Before (1)

Application Number Title Priority Date Filing Date
TW109110971A TWI744848B (zh) 2017-10-18 2018-10-16 包含具薄膜電晶體及電容感測之雙基板的數位微流體裝置

Country Status (8)

Country Link
US (2) US10882042B2 (zh)
EP (1) EP3697535B1 (zh)
JP (1) JP7064007B2 (zh)
KR (1) KR102417289B1 (zh)
CN (2) CN115007233B (zh)
CA (1) CA3075408C (zh)
TW (2) TWI744848B (zh)
WO (1) WO2019079267A1 (zh)

Families Citing this family (38)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3962651A4 (en) * 2019-04-30 2022-11-23 Nuclera Nucleics Ltd MICROFLUIDIC DEVICES AND METHODS OF MAKING THEIR
CN113767329B (zh) * 2019-05-03 2024-07-02 伊英克公司 用于有源矩阵背板的具有高介电常数的层状结构
US11224877B2 (en) * 2019-07-23 2022-01-18 a.u. Vista Inc. Systems and methods for analyzing droplets
EP3812042A1 (en) * 2019-10-25 2021-04-28 Sharp Life Science (EU) Limited Ewod device with sensing apparatus
CN112791753B (zh) * 2019-11-13 2022-05-24 京东方科技集团股份有限公司 微流控芯片及其制造方法、微流控器件
US11927740B2 (en) 2019-11-20 2024-03-12 Nuclera Ltd Spatially variable hydrophobic layers for digital microfluidics
US20210170413A1 (en) * 2019-12-04 2021-06-10 E Ink Corporation Variable electrode size area arrays on thin-film transistor based digital microfluidic devices for fine droplet manipulation
WO2021146573A1 (en) * 2020-01-17 2021-07-22 E Ink Corporation Spatially variable dielectric layers for digital microfluidics
US11946901B2 (en) 2020-01-27 2024-04-02 Nuclera Ltd Method for degassing liquid droplets by electrical actuation at higher temperatures
US11821018B2 (en) 2020-02-14 2023-11-21 Nuclera Ltd. Methods for cell-free protein expression
CN115175764A (zh) 2020-02-18 2022-10-11 核酸有限公司 用于EWoD阵列的高频AC驱动的自适应栅极驱动
JP2023514278A (ja) 2020-02-19 2023-04-05 ヌークレラ ヌクリークス， リミテッド ＥＷｏＤアレイの高周波数ＡＣ駆動のためのラッチ付きトランジスタ駆動
GB202005399D0 (en) 2020-04-14 2020-05-27 Nuclera Nucleics Ltd A method of electrowetting
WO2021222061A1 (en) 2020-04-27 2021-11-04 Nuclera Nucleics Ltd. Segmented top plate for variable driving and short protection for digital microfluidics
TW202201003A (zh) * 2020-05-28 2022-01-01 英商核酸有限公司 用於在高電極密度電子濕潤陣列上穩健多尺寸液體施配之空間與時間頸縮部
GB202013063D0 (en) 2020-08-21 2020-10-07 Nuclera Nucleics Ltd Real-time monitoring of in vitro protein synthesis
EP4200612A1 (en) * 2020-08-21 2023-06-28 Nuclera Nucleics Ltd Monitoring of in vitro protein synthesis
US20220314216A1 (en) * 2020-09-29 2022-10-06 Beijing Boe Sensor Technology Co., Ltd. Micro-fluidic chip, library preparation chip and method for controlling and driving droplet
US20240139743A1 (en) * 2021-03-08 2024-05-02 Nuclera Ltd Digital microfluidic device with capacitive sensing
GB202110125D0 (en) 2021-07-14 2021-08-25 Nuclera Nucleics Ltd A method of forming arrays of droplets
EP4387768A2 (en) 2021-08-18 2024-06-26 Nuclera Ltd Methods and compositions for improved biomolecule assays on digital microfluidic devices
GB202111840D0 (en) 2021-08-18 2021-09-29 Nuclera Nucleics Ltd Methods and compositions for improved biomolecule assays on digital microfluidic devices
GB202112070D0 (en) 2021-08-23 2021-10-06 Nuclera Nucleics Ltd Methods of biomolecule capture and use
WO2023079310A1 (en) 2021-11-05 2023-05-11 Nuclera Nucleics Ltd Protein purification using a digital microfluidic device
WO2023152519A2 (en) 2022-02-14 2023-08-17 Nuclera Ltd Protein expression reagents for post-translational modifications
GB202202476D0 (en) 2022-02-23 2022-04-06 Nuclera Nucleics Ltd Monitoring of an in vitro protein synthesis
GB202207818D0 (en) 2022-05-27 2022-07-13 Nuclera Nucleics Ltd Linear nucleic acid expression constructs
GB202207816D0 (en) 2022-05-27 2022-07-13 Nuclera Nucleics Ltd Creating nucleic acids for protein synthesis
TWI810990B (zh) * 2022-06-27 2023-08-01 友達光電股份有限公司 微流體晶片及其使用方法
GB202209358D0 (en) 2022-06-27 2022-08-10 Nuclera Nucleics Ltd Protein binding assays
WO2024013487A1 (en) 2022-07-11 2024-01-18 Nuclera Ltd Improved fluorescent proteins
GB202211204D0 (en) 2022-08-01 2022-09-14 Nuclera Nucleics Ltd A method of forming arrays of droplets
TWI823525B (zh) * 2022-08-18 2023-11-21 友達光電股份有限公司 液滴驅動裝置及其驅動暨液滴位置偵測單元電路
GB202219012D0 (en) 2022-12-16 2023-02-01 Nuclera Nucleics Ltd Prevention of hypoxia during electrowetting operations
WO2024149996A1 (en) 2023-01-10 2024-07-18 Nuclera Ltd Protein expression systems
GB202302182D0 (en) 2023-02-16 2023-04-05 Nuclera Nucleics Ltd Use of tandem facial amphiphiles for protein expression
GB202303808D0 (en) 2023-03-15 2023-04-26 Nuclera Nucleics Ltd System and method for protein sequence screening
GB202304982D0 (en) 2023-04-04 2023-05-17 Nuclera Nucleics Ltd Protein expression systems

Family Cites Families (338)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4708716A (en) 1983-08-18 1987-11-24 Drug Delivery Systems Inc. Transdermal drug applicator
US4573995A (en) 1984-10-09 1986-03-04 Alza Corporation Transdermal therapeutic systems for the administration of naloxone, naltrexone and nalbuphine
US5080646A (en) 1988-10-03 1992-01-14 Alza Corporation Membrane for electrotransport transdermal drug delivery
US5311337A (en) 1992-09-23 1994-05-10 Honeywell Inc. Color mosaic matrix display having expanded or reduced hexagonal dot pattern
JP2572702B2 (ja) 1992-10-26 1997-01-16 セイコーエプソン株式会社 表示体装置
US6710540B1 (en) 1995-07-20 2004-03-23 E Ink Corporation Electrostatically-addressable electrophoretic display
US8139050B2 (en) 1995-07-20 2012-03-20 E Ink Corporation Addressing schemes for electronic displays
US7583251B2 (en) 1995-07-20 2009-09-01 E Ink Corporation Dielectrophoretic displays
US8089453B2 (en) 1995-07-20 2012-01-03 E Ink Corporation Stylus-based addressing structures for displays
US7411719B2 (en) 1995-07-20 2008-08-12 E Ink Corporation Electrophoretic medium and process for the production thereof
US7106296B1 (en) 1995-07-20 2006-09-12 E Ink Corporation Electronic book with multiple page displays
US6118426A (en) 1995-07-20 2000-09-12 E Ink Corporation Transducers and indicators having printed displays
US7999787B2 (en) 1995-07-20 2011-08-16 E Ink Corporation Methods for driving electrophoretic displays using dielectrophoretic forces
US7956841B2 (en) 1995-07-20 2011-06-07 E Ink Corporation Stylus-based addressing structures for displays
US6639578B1 (en) 1995-07-20 2003-10-28 E Ink Corporation Flexible displays
US6124851A (en) 1995-07-20 2000-09-26 E Ink Corporation Electronic book with multiple page displays
US7327511B2 (en) 2004-03-23 2008-02-05 E Ink Corporation Light modulators
US6664944B1 (en) 1995-07-20 2003-12-16 E-Ink Corporation Rear electrode structures for electrophoretic displays
US7259744B2 (en) 1995-07-20 2007-08-21 E Ink Corporation Dielectrophoretic displays
US7193625B2 (en) 1999-04-30 2007-03-20 E Ink Corporation Methods for driving electro-optic displays, and apparatus for use therein
US7167155B1 (en) 1995-07-20 2007-01-23 E Ink Corporation Color electrophoretic displays
US7352353B2 (en) 1995-07-20 2008-04-01 E Ink Corporation Electrostatically addressable electrophoretic display
US6120588A (en) 1996-07-19 2000-09-19 E Ink Corporation Electronically addressable microencapsulated ink and display thereof
CA2260947A1 (en) 1996-07-19 1998-01-29 E Ink Corporation Electronically addressable microencapsulated ink and display thereof
US5930026A (en) 1996-10-25 1999-07-27 Massachusetts Institute Of Technology Nonemissive displays and piezoelectric power supplies therefor
US6980196B1 (en) 1997-03-18 2005-12-27 Massachusetts Institute Of Technology Printable electronic display
US6825829B1 (en) 1997-08-28 2004-11-30 E Ink Corporation Adhesive backed displays
US7002728B2 (en) 1997-08-28 2006-02-21 E Ink Corporation Electrophoretic particles, and processes for the production thereof
US6232950B1 (en) 1997-08-28 2001-05-15 E Ink Corporation Rear electrode structures for displays
US6252564B1 (en) 1997-08-28 2001-06-26 E Ink Corporation Tiled displays
US6177921B1 (en) 1997-08-28 2001-01-23 E Ink Corporation Printable electrode structures for displays
US6753999B2 (en) 1998-03-18 2004-06-22 E Ink Corporation Electrophoretic displays in portable devices and systems for addressing such displays
DE69917441T2 (de) 1998-03-18 2004-09-23 E-Ink Corp., Cambridge Elektrophoretische anzeige
US6704133B2 (en) 1998-03-18 2004-03-09 E-Ink Corporation Electro-optic display overlays and systems for addressing such displays
WO1999053371A1 (en) 1998-04-10 1999-10-21 E-Ink Corporation Electronic displays using organic-based field effect transistors
US7075502B1 (en) 1998-04-10 2006-07-11 E Ink Corporation Full color reflective display with multichromatic sub-pixels
JP4651193B2 (ja) 1998-05-12 2011-03-16 イー インク コーポレイション ドローイングデバイス用途のためのマイクロカプセル化した電気泳動性の静電的にアドレスした媒体
US6241921B1 (en) 1998-05-15 2001-06-05 Massachusetts Institute Of Technology Heterogeneous display elements and methods for their fabrication
AU4703999A (en) 1998-06-22 2000-01-10 E-Ink Corporation Means of addressing microencapsulated display media
WO2000003349A1 (en) 1998-07-08 2000-01-20 E Ink Corporation Method and apparatus for sensing the state of an electrophoretic display
US20030102858A1 (en) 1998-07-08 2003-06-05 E Ink Corporation Method and apparatus for determining properties of an electrophoretic display
EP1099207B1 (en) 1998-07-22 2002-03-27 E-Ink Corporation Electronic display
USD485294S1 (en) 1998-07-22 2004-01-13 E Ink Corporation Electrode structure for an electronic display
US7256766B2 (en) 1998-08-27 2007-08-14 E Ink Corporation Electrophoretic display comprising optical biasing element
JP4679726B2 (ja) 1998-10-07 2011-04-27 イー インク コーポレイション 非発光性電子ディスプレイ用照明システム
EP1127309A1 (en) 1998-11-02 2001-08-29 E Ink Corporation Broadcast system for display devices made of electronic ink
US20070285385A1 (en) 1998-11-02 2007-12-13 E Ink Corporation Broadcast system for electronic ink signs
US6506438B2 (en) 1998-12-15 2003-01-14 E Ink Corporation Method for printing of transistor arrays on plastic substrates
US6312304B1 (en) 1998-12-15 2001-11-06 E Ink Corporation Assembly of microencapsulated electronic displays
WO2000036560A1 (en) 1998-12-18 2000-06-22 E Ink Corporation Electronic ink display media for security and authentication
US6724519B1 (en) 1998-12-21 2004-04-20 E-Ink Corporation Protective electrodes for electrophoretic displays
AU2591400A (en) 1998-12-22 2000-07-12 E-Ink Corporation Method of manufacturing of a discrete electronic device
US6498114B1 (en) 1999-04-09 2002-12-24 E Ink Corporation Method for forming a patterned semiconductor film
US6842657B1 (en) 1999-04-09 2005-01-11 E Ink Corporation Reactive formation of dielectric layers and protection of organic layers in organic semiconductor device fabrication
US6531997B1 (en) 1999-04-30 2003-03-11 E Ink Corporation Methods for addressing electrophoretic displays
US7119772B2 (en) 1999-04-30 2006-10-10 E Ink Corporation Methods for driving bistable electro-optic displays, and apparatus for use therein
US7012600B2 (en) 1999-04-30 2006-03-14 E Ink Corporation Methods for driving bistable electro-optic displays, and apparatus for use therein
US6504524B1 (en) 2000-03-08 2003-01-07 E Ink Corporation Addressing methods for displays having zero time-average field
US8009348B2 (en) 1999-05-03 2011-08-30 E Ink Corporation Machine-readable displays
US7119759B2 (en) 1999-05-03 2006-10-10 E Ink Corporation Machine-readable displays
US7030412B1 (en) 1999-05-05 2006-04-18 E Ink Corporation Minimally-patterned semiconductor devices for display applications
EP1192504B1 (en) 1999-07-01 2011-03-16 E Ink Corporation Electrophoretic medium provided with spacers
JP4744757B2 (ja) 1999-07-21 2011-08-10 イー インク コーポレイション アクティブマトリクス駆動電子ディスプレイの性能を高めるための蓄電キャパシタの使用
WO2001008242A1 (en) 1999-07-21 2001-02-01 E Ink Corporation Preferred methods for producing electrical circuit elements used to control an electronic display
US6312971B1 (en) 1999-08-31 2001-11-06 E Ink Corporation Solvent annealing process for forming a thin semiconductor film with advantageous properties
AU7091400A (en) 1999-08-31 2001-03-26 E-Ink Corporation Transistor for an electronically driven display
JP4521920B2 (ja) 2000-03-03 2010-08-11 キヤノン株式会社 光学素子の静電容量検出装置、および静電容量検出装置を備えた光学装置
US7893435B2 (en) 2000-04-18 2011-02-22 E Ink Corporation Flexible electronic circuits and displays including a backplane comprising a patterned metal foil having a plurality of apertures extending therethrough
AU2001253575A1 (en) 2000-04-18 2001-10-30 E-Ink Corporation Process for fabricating thin film transistors
US20020060321A1 (en) 2000-07-14 2002-05-23 Kazlas Peter T. Minimally- patterned, thin-film semiconductor devices for display applications
US8529743B2 (en) 2000-07-25 2013-09-10 The Regents Of The University Of California Electrowetting-driven micropumping
US6816147B2 (en) 2000-08-17 2004-11-09 E Ink Corporation Bistable electro-optic display, and method for addressing same
EP1340216A2 (en) 2000-11-29 2003-09-03 E Ink Corporation Addressing circuitry for large electronic displays
US20020090980A1 (en) 2000-12-05 2002-07-11 Wilcox Russell J. Displays for portable electronic apparatus
US7030854B2 (en) 2001-03-13 2006-04-18 E Ink Corporation Apparatus for displaying drawings
US7679814B2 (en) 2001-04-02 2010-03-16 E Ink Corporation Materials for use in electrophoretic displays
KR100824249B1 (ko) 2001-04-02 2008-04-24 이 잉크 코포레이션 화상 안정도가 개선된 전기영동 매체를 포함하는 전기영동 디스플레이
US7535624B2 (en) 2001-07-09 2009-05-19 E Ink Corporation Electro-optic display and materials for use therein
DE60216924T2 (de) 2001-07-09 2007-04-05 E Ink Corp., Cambridge Elektrooptische anzeige und kleberzusammensetzung
US7110163B2 (en) 2001-07-09 2006-09-19 E Ink Corporation Electro-optic display and lamination adhesive for use therein
AU2002354672A1 (en) 2001-07-09 2003-01-29 E Ink Corporation Electro-optical display having a lamination adhesive layer
US6982178B2 (en) 2002-06-10 2006-01-03 E Ink Corporation Components and methods for use in electro-optic displays
US6967640B2 (en) 2001-07-27 2005-11-22 E Ink Corporation Microencapsulated electrophoretic display with integrated driver
US6819471B2 (en) 2001-08-16 2004-11-16 E Ink Corporation Light modulation by frustration of total internal reflection
US7038670B2 (en) 2002-08-16 2006-05-02 Sipix Imaging, Inc. Electrophoretic display with dual mode switching
US6825970B2 (en) 2001-09-14 2004-11-30 E Ink Corporation Methods for addressing electro-optic materials
US8593396B2 (en) 2001-11-20 2013-11-26 E Ink Corporation Methods and apparatus for driving electro-optic displays
US7952557B2 (en) 2001-11-20 2011-05-31 E Ink Corporation Methods and apparatus for driving electro-optic displays
US9412314B2 (en) 2001-11-20 2016-08-09 E Ink Corporation Methods for driving electro-optic displays
US7202847B2 (en) 2002-06-28 2007-04-10 E Ink Corporation Voltage modulated driver circuits for electro-optic displays
US8558783B2 (en) 2001-11-20 2013-10-15 E Ink Corporation Electro-optic displays with reduced remnant voltage
US7528822B2 (en) 2001-11-20 2009-05-05 E Ink Corporation Methods for driving electro-optic displays
US8125501B2 (en) 2001-11-20 2012-02-28 E Ink Corporation Voltage modulated driver circuits for electro-optic displays
CA2472029C (en) * 2001-11-26 2014-04-15 Keck Graduate Institute Method, apparatus and article for microfluidic control via electrowetting, for chemical, biochemical and biological assays and the like
WO2003050607A1 (en) 2001-12-13 2003-06-19 E Ink Corporation Electrophoretic electronic displays with films having a low index of refraction
US6900851B2 (en) 2002-02-08 2005-05-31 E Ink Corporation Electro-optic displays and optical systems for addressing such displays
US6950220B2 (en) 2002-03-18 2005-09-27 E Ink Corporation Electro-optic displays, and methods for driving same
US7116318B2 (en) 2002-04-24 2006-10-03 E Ink Corporation Backplanes for display applications, and components for use therein
US7223672B2 (en) 2002-04-24 2007-05-29 E Ink Corporation Processes for forming backplanes for electro-optic displays
TW574538B (en) 2002-04-24 2004-02-01 Sipix Imaging Inc Compositions and processes for format flexible roll-to-roll manufacturing of electrophoretic displays
US7190008B2 (en) 2002-04-24 2007-03-13 E Ink Corporation Electro-optic displays, and components for use therein
TWI240842B (en) 2002-04-24 2005-10-01 Sipix Imaging Inc Matrix driven electrophoretic display with multilayer back plane
TW583497B (en) 2002-05-29 2004-04-11 Sipix Imaging Inc Electrode and connecting designs for roll-to-roll format flexible display manufacturing
US7554712B2 (en) 2005-06-23 2009-06-30 E Ink Corporation Edge seals for, and processes for assembly of, electro-optic displays
US7583427B2 (en) 2002-06-10 2009-09-01 E Ink Corporation Components and methods for use in electro-optic displays
US7649674B2 (en) 2002-06-10 2010-01-19 E Ink Corporation Electro-optic display with edge seal
US8049947B2 (en) 2002-06-10 2011-11-01 E Ink Corporation Components and methods for use in electro-optic displays
US20110199671A1 (en) 2002-06-13 2011-08-18 E Ink Corporation Methods for driving electrophoretic displays using dielectrophoretic forces
US20080024482A1 (en) 2002-06-13 2008-01-31 E Ink Corporation Methods for driving electro-optic displays
US6842279B2 (en) 2002-06-27 2005-01-11 E Ink Corporation Illumination system for nonemissive electronic displays
US7347957B2 (en) 2003-07-10 2008-03-25 Sipix Imaging, Inc. Methods and compositions for improved electrophoretic display performance
US20060255322A1 (en) 2002-07-17 2006-11-16 Wu Zarng-Arh G Methods and compositions for improved electrophoretic display performance
TWI314237B (en) 2002-07-17 2009-09-01 Sipix Imaging Inc Novel methods and compositions for improved electrophoretic display performance
US8547628B2 (en) 2002-07-17 2013-10-01 Sipix Imaging, Inc. Methods and compositions for improved electrophoretic display performance
EP1527371B1 (en) 2002-08-06 2012-10-03 E Ink Corporation Protection of electro-optic displays against thermal effects
US7839564B2 (en) 2002-09-03 2010-11-23 E Ink Corporation Components and methods for use in electro-optic displays
TW575646B (en) 2002-09-04 2004-02-11 Sipix Imaging Inc Novel adhesive and sealing layers for electrophoretic displays
US6911132B2 (en) * 2002-09-24 2005-06-28 Duke University Apparatus for manipulating droplets by electrowetting-based techniques
US20130063333A1 (en) 2002-10-16 2013-03-14 E Ink Corporation Electrophoretic displays
US7217542B2 (en) * 2002-10-31 2007-05-15 Hewlett-Packard Development Company, L.P. Microfluidic system for analyzing nucleic acids
KR20050086917A (ko) 2002-12-16 2005-08-30 이 잉크 코포레이션 전기-광학 디스플레이용 백플레인
US6922276B2 (en) 2002-12-23 2005-07-26 E Ink Corporation Flexible electro-optic displays
US7012735B2 (en) 2003-03-27 2006-03-14 E Ink Corporaiton Electro-optic assemblies, and materials for use therein
US20040246562A1 (en) 2003-05-16 2004-12-09 Sipix Imaging, Inc. Passive matrix electrophoretic display driving scheme
JP2004356206A (ja) 2003-05-27 2004-12-16 Fuji Photo Film Co Ltd 積層構造体及びその製造方法
EP1631857B1 (en) 2003-06-06 2007-03-07 Sipix Imaging, Inc. In mold manufacture of an object with embedded display panel
US8174490B2 (en) 2003-06-30 2012-05-08 E Ink Corporation Methods for driving electrophoretic displays
US20050122563A1 (en) 2003-07-24 2005-06-09 E Ink Corporation Electro-optic displays
WO2005020199A2 (en) 2003-08-19 2005-03-03 E Ink Corporation Methods for controlling electro-optic displays
CN102709143B (zh) 2003-09-05 2016-03-09 卡尔蔡司Smt有限责任公司 电子光学排布结构、多电子分束检验系统和方法
WO2005029458A1 (en) 2003-09-19 2005-03-31 E Ink Corporation Methods for reducing edge effects in electro-optic displays
KR20060090681A (ko) 2003-10-03 2006-08-14 코닌클리케 필립스 일렉트로닉스 엔.브이. 전기영동 디스플레이 유닛
US8514168B2 (en) 2003-10-07 2013-08-20 Sipix Imaging, Inc. Electrophoretic display with thermal control
US7061662B2 (en) 2003-10-07 2006-06-13 Sipix Imaging, Inc. Electrophoretic display with thermal control
US7420549B2 (en) 2003-10-08 2008-09-02 E Ink Corporation Electro-wetting displays
US8319759B2 (en) 2003-10-08 2012-11-27 E Ink Corporation Electrowetting displays
US7177066B2 (en) 2003-10-24 2007-02-13 Sipix Imaging, Inc. Electrophoretic display driving scheme
US20050122306A1 (en) 2003-10-29 2005-06-09 E Ink Corporation Electro-optic displays with single edge addressing and removable driver circuitry
US20110187683A1 (en) 2003-10-30 2011-08-04 E Ink Corporation Electro-optic displays with single edge addressing and removable driver circuitry
US20110164301A1 (en) 2003-11-05 2011-07-07 E Ink Corporation Electro-optic displays, and materials for use therein
US7551346B2 (en) 2003-11-05 2009-06-23 E Ink Corporation Electro-optic displays, and materials for use therein
EP1680774B9 (en) 2003-11-05 2018-05-16 E Ink Corporation Electrophoretic medium for electro-optic displays
US8177942B2 (en) 2003-11-05 2012-05-15 E Ink Corporation Electro-optic displays, and materials for use therein
US7672040B2 (en) 2003-11-05 2010-03-02 E Ink Corporation Electro-optic displays, and materials for use therein
KR100689311B1 (ko) 2003-11-10 2007-03-08 엘지.필립스 엘시디 주식회사 액정표시장치 및 그 구동방법
US8928562B2 (en) 2003-11-25 2015-01-06 E Ink Corporation Electro-optic displays, and methods for driving same
WO2005052905A1 (en) 2003-11-25 2005-06-09 Koninklijke Philips Electronics N.V. A display apparatus with a display device and a cyclic rail-stabilized method of driving the display device
US7206119B2 (en) 2003-12-31 2007-04-17 E Ink Corporation Electro-optic displays, and method for driving same
US7075703B2 (en) 2004-01-16 2006-07-11 E Ink Corporation Process for sealing electro-optic displays
US7388572B2 (en) 2004-02-27 2008-06-17 E Ink Corporation Backplanes for electro-optic displays
US7492339B2 (en) 2004-03-26 2009-02-17 E Ink Corporation Methods for driving bistable electro-optic displays
US8289250B2 (en) 2004-03-31 2012-10-16 E Ink Corporation Methods for driving electro-optic displays
US20050253777A1 (en) 2004-05-12 2005-11-17 E Ink Corporation Tiled displays and methods for driving same
GB0411281D0 (en) * 2004-05-20 2004-06-23 Inverness Medical Switzerland A device and method for detecting blood coagulation
US20080136774A1 (en) 2004-07-27 2008-06-12 E Ink Corporation Methods for driving electrophoretic displays using dielectrophoretic forces
WO2006015044A1 (en) 2004-07-27 2006-02-09 E Ink Corporation Electro-optic displays
US7301693B2 (en) 2004-08-13 2007-11-27 Sipix Imaging, Inc. Direct drive display with a multi-layer backplane and process for its manufacture
US7453445B2 (en) 2004-08-13 2008-11-18 E Ink Corproation Methods for driving electro-optic displays
US8643595B2 (en) 2004-10-25 2014-02-04 Sipix Imaging, Inc. Electrophoretic display driving approaches
US7304780B2 (en) 2004-12-17 2007-12-04 Sipix Imaging, Inc. Backplane design for display panels and processes for their manufacture
JP2008521065A (ja) 2005-01-26 2008-06-19 イー インク コーポレイション ガス状流体を用いる電気泳動ディスプレイ
JP4718859B2 (ja) 2005-02-17 2011-07-06 セイコーエプソン株式会社 電気泳動装置とその駆動方法、及び電子機器
JP4690079B2 (ja) 2005-03-04 2011-06-01 セイコーエプソン株式会社 電気泳動装置とその駆動方法、及び電子機器
US8576162B2 (en) 2005-03-14 2013-11-05 Sipix Imaging, Inc. Manufacturing processes of backplane for segment displays
US8159636B2 (en) 2005-04-08 2012-04-17 Sipix Imaging, Inc. Reflective displays and processes for their manufacture
WO2006133102A2 (en) 2005-06-03 2006-12-14 Trans-Dermal Patents Company, Llc Agent delivery system and uses of the same
US7880958B2 (en) 2005-09-23 2011-02-01 Sipix Imaging, Inc. Display cell structure and electrode protecting layer compositions
US7408699B2 (en) 2005-09-28 2008-08-05 Sipix Imaging, Inc. Electrophoretic display and methods of addressing such display
TWI274221B (en) 2005-09-29 2007-02-21 Au Optronics Corp Active device matrix substrate
KR20070041934A (ko) 2005-10-17 2007-04-20 삼성전자주식회사 액정 표시 장치
US20070176912A1 (en) 2005-12-09 2007-08-02 Beames Michael H Portable memory devices with polymeric displays
US8610988B2 (en) 2006-03-09 2013-12-17 E Ink Corporation Electro-optic display with edge seal
US7982479B2 (en) 2006-04-07 2011-07-19 Sipix Imaging, Inc. Inspection methods for defects in electrophoretic display and related devices
ITTO20060278A1 (it) * 2006-04-13 2007-10-14 Silicon Biosystem S P A Metodo per la selezione e/o il processamento di particelle, in particolare cellule
US7683606B2 (en) 2006-05-26 2010-03-23 Sipix Imaging, Inc. Flexible display testing and inspection
US20080024429A1 (en) 2006-07-25 2008-01-31 E Ink Corporation Electrophoretic displays using gaseous fluids
US7492497B2 (en) 2006-08-02 2009-02-17 E Ink Corporation Multi-layer light modulator
JP2010502346A (ja) * 2006-09-08 2010-01-28 コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ 所定量の物質の制御放出のための装置
US8362488B2 (en) 2006-09-12 2013-01-29 Sipix Imaging, Inc. Flexible backplane and methods for its manufacture
US7986450B2 (en) 2006-09-22 2011-07-26 E Ink Corporation Electro-optic display and materials for use therein
JP5046660B2 (ja) 2006-11-15 2012-10-10 株式会社ブリヂストン 情報表示装置
US7905977B2 (en) 2006-11-17 2011-03-15 Sipix Imaging, Inc. Post conversion methods for display devices
EP2111562B1 (en) 2007-01-22 2018-09-19 E Ink Corporation Multi-layer sheet for use in electro-optic displays
US7688497B2 (en) 2007-01-22 2010-03-30 E Ink Corporation Multi-layer sheet for use in electro-optic displays
US7826129B2 (en) 2007-03-06 2010-11-02 E Ink Corporation Materials for use in electrophoretic displays
US8274472B1 (en) 2007-03-12 2012-09-25 Sipix Imaging, Inc. Driving methods for bistable displays
EP1974814A1 (en) * 2007-03-23 2008-10-01 Koninklijke Philips Electronics N.V. A micro-fluidic device based upon active matrix principles
US8243013B1 (en) 2007-05-03 2012-08-14 Sipix Imaging, Inc. Driving bistable displays
US7959261B2 (en) * 2007-05-08 2011-06-14 Lexmark International, Inc. Micro-fluid ejection devices having reduced input/output addressable heaters
KR101369709B1 (ko) 2007-05-21 2014-03-04 이 잉크 코포레이션 비디오 전기 광학 디스플레이를 구동하는 방법
US20080303780A1 (en) 2007-06-07 2008-12-11 Sipix Imaging, Inc. Driving methods and circuit for bi-stable displays
WO2009006248A1 (en) 2007-06-29 2009-01-08 E Ink Corporation Electro-optic displays, and materials and methods for production thereof
US8743077B1 (en) 2007-08-01 2014-06-03 Sipix Imaging, Inc. Front light system for reflective displays
WO2009019658A2 (en) * 2007-08-09 2009-02-12 Koninklijke Philips Electronics N.V. Integrated microfluidic device with local temperature control
JP5090835B2 (ja) * 2007-09-11 2012-12-05 株式会社リコー 情報処理装置及び認証制御プログラム
TWI375023B (en) * 2007-10-05 2012-10-21 Univ Nat Taiwan A cellular microarray and its microfabrication method
US9224342B2 (en) 2007-10-12 2015-12-29 E Ink California, Llc Approach to adjust driving waveforms for a display device
TWI364553B (en) 2007-10-12 2012-05-21 Chimei Innolux Corp Electro-wetting display
US20090122389A1 (en) 2007-11-14 2009-05-14 E Ink Corporation Electro-optic assemblies, and adhesives and binders for use therein
US7830592B1 (en) 2007-11-30 2010-11-09 Sipix Imaging, Inc. Display devices having micro-reflectors
US8237892B1 (en) 2007-11-30 2012-08-07 Sipix Imaging, Inc. Display device with a brightness enhancement structure
CN101216497A (zh) * 2008-01-08 2008-07-09 西安交通大学 对灌水器迷宫微流道进行测量的粒子图像测速装置及方法
CN105137643A (zh) 2008-03-11 2015-12-09 希毕克斯影像有限公司 用于反射型显示器的辉度增强结构
US8437069B2 (en) 2008-03-11 2013-05-07 Sipix Imaging, Inc. Luminance enhancement structure for reflective display devices
ES2823736T3 (es) 2008-04-11 2021-05-10 E Ink Corp Procedimientos para excitar dispositivos de visualización electroópticos
US8373649B2 (en) 2008-04-11 2013-02-12 Seiko Epson Corporation Time-overlapping partial-panel updating of a bistable electro-optic display
JP2011520137A (ja) 2008-04-14 2011-07-14 イー インク コーポレイション 電気光学ディスプレイを駆動する方法
US8462102B2 (en) 2008-04-25 2013-06-11 Sipix Imaging, Inc. Driving methods for bistable displays
US8072675B2 (en) 2008-05-01 2011-12-06 Sipix Imaging, Inc. Color display devices
US8159644B2 (en) 2008-05-11 2012-04-17 Nlt Technologies, Ltd. Non-rectangular pixel array and display device having same
CN102113046B (zh) 2008-08-01 2014-01-22 希毕克斯影像有限公司 用于电泳显示器的带有误差扩散的伽马调节
US8558855B2 (en) 2008-10-24 2013-10-15 Sipix Imaging, Inc. Driving methods for electrophoretic displays
US9019318B2 (en) 2008-10-24 2015-04-28 E Ink California, Llc Driving methods for electrophoretic displays employing grey level waveforms
US8441414B2 (en) 2008-12-05 2013-05-14 Sipix Imaging, Inc. Luminance enhancement structure with Moiré reducing design
US8797258B2 (en) 2008-12-30 2014-08-05 Sipix Imaging, Inc. Highlight color display architecture using enhanced dark state
US20100177396A1 (en) 2009-01-13 2010-07-15 Craig Lin Asymmetrical luminance enhancement structure for reflective display devices
US20160077375A1 (en) 2009-01-13 2016-03-17 E Ink California, Llc Asymmetrical luminance enhancement structure for reflective display devices
US9025234B2 (en) 2009-01-22 2015-05-05 E Ink California, Llc Luminance enhancement structure with varying pitches
US20100194789A1 (en) 2009-01-30 2010-08-05 Craig Lin Partial image update for electrophoretic displays
US20100194733A1 (en) 2009-01-30 2010-08-05 Craig Lin Multiple voltage level driving for electrophoretic displays
US9251736B2 (en) 2009-01-30 2016-02-02 E Ink California, Llc Multiple voltage level driving for electrophoretic displays
TW201033640A (en) 2009-03-03 2010-09-16 Ind Tech Res Inst Electrowetting display devices
US8120836B2 (en) 2009-03-09 2012-02-21 Sipix Imaging, Inc. Luminance enhancement structure for reflective display devices
US20120273702A1 (en) 2009-04-20 2012-11-01 Kansas State University Research Foundation Electroactive Polymer Actuators and their use on Microfluidic Devices
US8714780B2 (en) 2009-04-22 2014-05-06 Sipix Imaging, Inc. Display devices with grooved luminance enhancement film
US8576259B2 (en) 2009-04-22 2013-11-05 Sipix Imaging, Inc. Partial update driving methods for electrophoretic displays
US9460666B2 (en) 2009-05-11 2016-10-04 E Ink California, Llc Driving methods and waveforms for electrophoretic displays
US20130146459A1 (en) 2009-06-16 2013-06-13 Massachusetts Institute Of Technology Multiphase non-linear electrokinetic devices
US8797633B1 (en) 2009-07-23 2014-08-05 Sipix Imaging, Inc. Display device assembly and manufacture thereof
US8456589B1 (en) 2009-07-27 2013-06-04 Sipix Imaging, Inc. Display device assembly
US8810882B2 (en) * 2009-08-14 2014-08-19 University Of Cincinnati Display pixels, displays, and methods of operating display pixels
US20110063314A1 (en) 2009-09-15 2011-03-17 Wen-Pin Chiu Display controller system
US9390661B2 (en) 2009-09-15 2016-07-12 E Ink California, Llc Display controller system
US8810525B2 (en) 2009-10-05 2014-08-19 E Ink California, Llc Electronic information displays
US8576164B2 (en) 2009-10-26 2013-11-05 Sipix Imaging, Inc. Spatially combined waveforms for electrophoretic displays
CN102687103B (zh) 2009-10-28 2016-04-20 伊英克公司 具有触摸传感器的电光显示器
WO2011060145A1 (en) 2009-11-12 2011-05-19 Paul Reed Smith Guitars Limited Partnership A precision measurement of waveforms using deconvolution and windowing
US9216414B2 (en) * 2009-11-25 2015-12-22 Gen9, Inc. Microfluidic devices and methods for gene synthesis
US7859742B1 (en) 2009-12-02 2010-12-28 Sipix Technology, Inc. Frequency conversion correction circuit for electrophoretic displays
US8928641B2 (en) 2009-12-02 2015-01-06 Sipix Technology Inc. Multiplex electrophoretic display driver circuit
US11049463B2 (en) 2010-01-15 2021-06-29 E Ink California, Llc Driving methods with variable frame time
US8558786B2 (en) 2010-01-20 2013-10-15 Sipix Imaging, Inc. Driving methods for electrophoretic displays
CN101773814B (zh) * 2010-01-21 2012-03-14 高婧 多稳态微流控器件
WO2011097228A2 (en) 2010-02-02 2011-08-11 E Ink Corporation Method for driving electro-optic displays
US9224338B2 (en) 2010-03-08 2015-12-29 E Ink California, Llc Driving methods for electrophoretic displays
US8815070B2 (en) 2010-03-09 2014-08-26 Sparkle Power, Inc. Microelectrode array architecture
TWI409767B (zh) 2010-03-12 2013-09-21 Sipix Technology Inc 電泳顯示器的驅動方法
KR101533490B1 (ko) 2010-04-09 2015-07-02 이 잉크 코포레이션 전기광학 디스플레이의 구동 방법
US9140952B2 (en) 2010-04-22 2015-09-22 E Ink California, Llc Electrophoretic display with enhanced contrast
US8419273B2 (en) 2010-05-03 2013-04-16 Sharp Kabushiki Kaisha Array element for temperature sensor array circuit, temperature sensor array circuit utilizing such array element, and AM-EWOD device including such a temperature sensor array circuit
US9030374B2 (en) 2010-05-06 2015-05-12 E Ink California, Llc Composite display modules
WO2011150151A2 (en) 2010-05-27 2011-12-01 E Ink Corporation Dual mode electro-optic displays
US9013394B2 (en) 2010-06-04 2015-04-21 E Ink California, Llc Driving method for electrophoretic displays
TWI436337B (zh) 2010-06-30 2014-05-01 Sipix Technology Inc 電泳顯示器及其驅動方法
TWI444975B (zh) 2010-06-30 2014-07-11 Sipix Technology Inc 電泳顯示器及其驅動方法
US8654571B2 (en) 2010-07-06 2014-02-18 Sharp Kabushiki Kaisha Static random-access cell, active matrix device and array element circuit
US8653832B2 (en) * 2010-07-06 2014-02-18 Sharp Kabushiki Kaisha Array element circuit and active matrix device
US8547111B2 (en) 2010-07-06 2013-10-01 Sharp Kabushiki Kaisha Array element circuit and active matrix device
US8681191B2 (en) 2010-07-08 2014-03-25 Sipix Imaging, Inc. Three dimensional driving scheme for electrophoretic display devices
US8665206B2 (en) 2010-08-10 2014-03-04 Sipix Imaging, Inc. Driving method to neutralize grey level shift for electrophoretic displays
KR101273239B1 (ko) * 2010-09-20 2013-06-11 엘지디스플레이 주식회사 터치 스크린이 내장된 액정 표시장치와 이의 제조방법
TWI518652B (zh) 2010-10-20 2016-01-21 達意科技股份有限公司 電泳式顯示裝置
TWI493520B (zh) 2010-10-20 2015-07-21 Sipix Technology Inc 電泳顯示裝置及其驅動方法
TWI409563B (zh) 2010-10-21 2013-09-21 Sipix Technology Inc 電泳式顯示裝置
US20160180777A1 (en) 2010-11-11 2016-06-23 E Ink California, Inc. Driving method for electrophoretic displays
TWI598672B (zh) 2010-11-11 2017-09-11 希畢克斯幻像有限公司 電泳顯示器的驅動方法
US8173000B1 (en) 2011-01-18 2012-05-08 Sharp Kabushiki Kaisha Active matrix device and method of driving the same
US8828336B2 (en) 2011-02-02 2014-09-09 Sharp Kabushiki Kaisha Active matrix device
TWI510296B (zh) * 2011-02-17 2015-12-01 Gary Wang 介質上電潤濕微電極陣列結構上的液滴處理方法
US8339711B2 (en) * 2011-04-22 2012-12-25 Sharp Kabushiki Kaisha Active matrix device and method of driving the same
WO2012162095A2 (en) 2011-05-21 2012-11-29 E Ink Corporation Electro-optic displays
WO2013066441A2 (en) 2011-07-29 2013-05-10 The Texas A&M University System Digital microfluidic platform for actuating and heating individual liquid droplets
US8605354B2 (en) 2011-09-02 2013-12-10 Sipix Imaging, Inc. Color display devices
US9514667B2 (en) 2011-09-12 2016-12-06 E Ink California, Llc Driving system for electrophoretic displays
US9019197B2 (en) 2011-09-12 2015-04-28 E Ink California, Llc Driving system for electrophoretic displays
JP5990889B2 (ja) 2011-09-29 2016-09-14 凸版印刷株式会社 電気泳動ディスプレイ及びその製造方法
US20130161193A1 (en) 2011-12-21 2013-06-27 Sharp Kabushiki Kaisha Microfluidic system with metered fluid loading system for microfluidic device
JP5430642B2 (ja) 2011-12-22 2014-03-05 富士フイルム株式会社 放射線画像検出器、放射線画像撮像装置、及び放射線画像撮像システム
CA3066614C (en) 2012-02-01 2022-03-15 E Ink Corporation Methods for driving electro-optic displays
TWI582509B (zh) 2012-03-26 2017-05-11 達意科技股份有限公司 一種電泳式顯示面板及其結構
TWI537661B (zh) 2012-03-26 2016-06-11 達意科技股份有限公司 電泳式顯示系統
WO2013159093A1 (en) 2012-04-20 2013-10-24 E Ink Corporation Illumination systems for reflective displays
US9513743B2 (en) 2012-06-01 2016-12-06 E Ink Corporation Methods for driving electro-optic displays
EP2864836B1 (en) 2012-06-20 2017-05-24 E Ink California, LLC Piezo electrophoretic display
TWI470606B (zh) 2012-07-05 2015-01-21 Sipix Technology Inc 被動式顯示面板的驅動方法與顯示裝置
US8797636B2 (en) 2012-07-17 2014-08-05 Sipix Imaging, Inc. Light-enhancing structure for electrophoretic display
WO2014018745A1 (en) 2012-07-27 2014-01-30 E Ink Corporation Processes for the production of electro-optic displays
US8764958B2 (en) * 2012-08-24 2014-07-01 Gary Chorng-Jyh Wang High-voltage microfluidic droplets actuation by low-voltage fabrication technologies
CN102866193B (zh) * 2012-09-04 2015-04-01 吴传勇 基于介电泳来操控液体中的粒子的器件及方法
TWI550580B (zh) 2012-09-26 2016-09-21 達意科技股份有限公司 電泳式顯示器及其驅動方法
TWI478327B (zh) 2012-11-01 2015-03-21 Sipix Technology Inc 顯示裝置
US10037735B2 (en) 2012-11-16 2018-07-31 E Ink Corporation Active matrix display with dual driving modes
US9458543B2 (en) * 2012-12-04 2016-10-04 Sharp Kabushiki Kaisha Active matrix electrowetting-on-dielectric device
TW201423544A (zh) * 2012-12-07 2014-06-16 Wintek Corp 電容式觸控面板及其製作方法
TW201428569A (zh) 2013-01-10 2014-07-16 Sipix Technology Inc 包含電泳觸控面板之顯示系統
US9792862B2 (en) 2013-01-17 2017-10-17 E Ink Holdings Inc. Method and driving apparatus for outputting driving signal to drive electro-phoretic display
US9218773B2 (en) 2013-01-17 2015-12-22 Sipix Technology Inc. Method and driving apparatus for outputting driving signal to drive electro-phoretic display
TWI600959B (zh) 2013-01-24 2017-10-01 達意科技股份有限公司 電泳顯示器及其面板的驅動方法
TWI502265B (zh) 2013-01-25 2015-10-01 Sipix Technology Inc 電泳顯示器
TWI490839B (zh) 2013-02-07 2015-07-01 Sipix Technology Inc 電泳顯示器和操作電泳顯示器的方法
TWI502266B (zh) 2013-02-20 2015-10-01 Sipix Technology Inc 降低被動式矩陣耦合效應的電泳顯示器
US9666142B2 (en) 2013-02-20 2017-05-30 Sipix Technology, Inc. Display capable of reducing passive matrix coupling effect
TWI490619B (zh) 2013-02-25 2015-07-01 Sipix Technology Inc 電泳顯示器
US9721495B2 (en) 2013-02-27 2017-08-01 E Ink Corporation Methods for driving electro-optic displays
WO2014134504A1 (en) 2013-03-01 2014-09-04 E Ink Corporation Methods for driving electro-optic displays
WO2014138630A1 (en) 2013-03-07 2014-09-12 E Ink Corporation Method and apparatus for driving electro-optic displays
TWI502573B (zh) 2013-03-13 2015-10-01 Sipix Technology Inc 降低被動式矩陣耦合效應的電泳顯示器及其方法
US20140293398A1 (en) 2013-03-29 2014-10-02 Sipix Imaging, Inc. Electrophoretic display device
CN103170384B (zh) * 2013-05-06 2015-03-04 复旦大学 一种基于大小液滴操控的数字微流芯片
EP2997567B1 (en) 2013-05-17 2022-03-23 E Ink California, LLC Driving methods for color display devices
TWI502429B (zh) 2013-06-13 2015-10-01 Sipix Technology Inc 觸控式顯示裝置及其製作方法
TWI526765B (zh) 2013-06-20 2016-03-21 達意科技股份有限公司 電泳顯示器及操作電泳顯示器的方法
TWI532599B (zh) 2013-06-21 2016-05-11 達意科技股份有限公司 顯示面板以及顯示面板的製作方法
US9620048B2 (en) 2013-07-30 2017-04-11 E Ink Corporation Methods for driving electro-optic displays
US9223164B2 (en) 2013-08-02 2015-12-29 Sipix Technology, Inc. Display
TWI550332B (zh) 2013-10-07 2016-09-21 電子墨水加利福尼亞有限責任公司 用於彩色顯示裝置的驅動方法
TWI502574B (zh) 2013-10-09 2015-10-01 Sipix Technology Inc 光電裝置及其驅動方法
KR102023860B1 (ko) 2014-01-17 2019-09-20 이 잉크 코포레이션 2상의 전극층을 갖는 전기광학 디스플레이
US9671635B2 (en) 2014-02-07 2017-06-06 E Ink Corporation Electro-optic display backplane structures with drive components and pixel electrodes on opposed surfaces
US20150262255A1 (en) 2014-03-12 2015-09-17 Netseer, Inc. Search monetization of images embedded in text
US10446585B2 (en) 2014-03-17 2019-10-15 E Ink Corporation Multi-layer expanding electrode structures for backplane assemblies
TWI613498B (zh) 2014-06-27 2018-02-01 電子墨水加利福尼亞有限責任公司 用於電泳顯示器的各向異性傳導介電層
TWM493114U (zh) * 2014-08-06 2015-01-01 Superc Touch Corp 具有多重連接選擇的感應電極之生物辨識裝置
PL3191892T3 (pl) 2014-09-10 2020-06-29 E Ink Corporation Kolorowe wyświetlacze elektroforetyczne
US9815056B2 (en) 2014-12-05 2017-11-14 The Regents Of The University Of California Single sided light-actuated microfluidic device with integrated mesh ground
JP6431990B2 (ja) 2014-12-22 2018-11-28 アマゾン テクノロジーズ インコーポレイテッド 安定な表示状態を有するエレクトロウェッティング表示装置
US10018828B2 (en) * 2014-12-22 2018-07-10 Amazon Technologies, Inc. Electrowetting display device with stable display states
CN105825804A (zh) * 2015-01-04 2016-08-03 昆山国显光电有限公司 具有触摸功能的oled面板，显示装置及其制作方法
SG10202100281RA (en) 2015-04-22 2021-02-25 Berkeley Lights Inc Microfluidic cell culture
JP2016206119A (ja) 2015-04-28 2016-12-08 パナソニックＩｐマネジメント株式会社 液滴駆動装置、およびそれを用いて液滴を駆動する方法
US11420047B2 (en) 2015-05-08 2022-08-23 Athena E. Ivanoff Wireless patch system for transdermal, transmucosal and dental electrical drug delivery
CN104883181B (zh) * 2015-06-10 2018-03-16 京东方科技集团股份有限公司 或非门电路、移位寄存器、阵列基板及显示装置
CN106571371B (zh) * 2015-10-09 2019-08-09 群创光电股份有限公司 阵列基板及其应用装置与组装方法
EP3377885A4 (en) 2015-11-17 2019-05-08 Illumina, Inc. ELECTRODE DRIVE AND SENSOR CIRCUITS AND METHOD
US9791689B1 (en) * 2015-12-18 2017-10-17 Amazon Technologies, Inc. Joining of pixel wall and photospacers in an electrowetting display
CN105665043B (zh) 2016-01-29 2017-10-10 复旦大学 一种基于ewod的二维蜂窝状电极阵列数字微流控芯片
JP6701835B2 (ja) * 2016-03-11 2020-05-27 株式会社リコー 電界効果型トランジスタ、表示素子、画像表示装置、及びシステム
JP6832456B2 (ja) 2017-03-24 2021-02-24 イー インク カリフォルニア， エルエルシー 活性分子の投与率を調整するための荷電または磁気粒子を含むマイクロセル送達システム

Also Published As

Publication number Publication date
CN115007233A (zh) 2022-09-06
EP3697535A1 (en) 2020-08-26
EP3697535B1 (en) 2023-04-26
TWI744848B (zh) 2021-11-01
JP7064007B2 (ja) 2022-05-09
TW202026061A (zh) 2020-07-16
CN111107937A (zh) 2020-05-05
JP2021501331A (ja) 2021-01-14
CN115007233B (zh) 2023-11-10
CA3075408C (en) 2022-06-28
US20210129150A1 (en) 2021-05-06
WO2019079267A1 (en) 2019-04-25
TW201922347A (zh) 2019-06-16
US10882042B2 (en) 2021-01-05
EP3697535A4 (en) 2021-07-21
CN111107937B (zh) 2022-08-02
KR102417289B1 (ko) 2022-07-06
KR20200036052A (ko) 2020-04-06
CA3075408A1 (en) 2019-04-25
US20190111433A1 (en) 2019-04-18

Similar Documents

Publication Publication Date Title
TWI691361B (zh) 包含具薄膜電晶體及電容感測之雙基板的數位微流體裝置
EP3350584B1 (en) Active matrix device and method of driving
US8764958B2 (en) High-voltage microfluidic droplets actuation by low-voltage fabrication technologies
US10576470B2 (en) Active matrix EWOD device and method of driving thereof
WO2012113277A1 (zh) 液滴测量方法及液滴控制方法
EP3662998A1 (en) Am-ewod circuit configuration with sensing column detection circuit
CN101405409A (zh) 具有加热电极的微电子器件
US20190329259A1 (en) Digital microfluidic devices
KR20220110517A (ko) 정밀 액적 조작을 위한 박막 트랜지스터 기반 디지털 미세유체 디바이스들 상의 가변 전극 사이즈 영역 어레이들
TW202306647A (zh) 具有電容性感測之數位微流體裝置
EP3662999B1 (en) Am-ewod array element circuitry with high sensitivity for small capacitance