TWI668422B - 用於處理從靶材的雷射剝蝕位置被移除的靶材材料之裝置 - Google Patents

用於處理從靶材的雷射剝蝕位置被移除的靶材材料之裝置 Download PDF

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Publication number
TWI668422B
TWI668422B TW107125366A TW107125366A TWI668422B TW I668422 B TWI668422 B TW I668422B TW 107125366 A TW107125366 A TW 107125366A TW 107125366 A TW107125366 A TW 107125366A TW I668422 B TWI668422 B TW I668422B
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TW
Taiwan
Prior art keywords
target
sample
inlet
capture
capture unit
Prior art date
Application number
TW107125366A
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English (en)
Chinese (zh)
Other versions
TW201840962A (zh
Inventor
貝利Ｌ 沙普
大衛Ｎ 道格拉斯
艾咪Ｊ 瑪那
Original Assignee
美商元素科學雷射公司
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Publication date
Application filed by 美商元素科學雷射公司 filed Critical 美商元素科學雷射公司
Publication of TW201840962A publication Critical patent/TW201840962A/zh
Application granted granted Critical
Publication of TWI668422B publication Critical patent/TWI668422B/zh

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/04—Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locks; Arrangements for external adjustment of electron- or ion-optical components
    • H01J49/0459—Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locks; Arrangements for external adjustment of electron- or ion-optical components for solid samples
    • H01J49/0463—Desorption by laser or particle beam, followed by ionisation as a separate step
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00—Sampling; Preparing specimens for investigation
    • G01N1/28—Preparing specimens for investigation including physical details of (bio-)chemical methods covered elsewhere, e.g. G01N33/50, C12Q
    • G01N1/38—Diluting, dispersing or mixing samples
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00—Sampling; Preparing specimens for investigation
    • G01N1/02—Devices for withdrawing samples
    • G01N1/04—Devices for withdrawing samples in the solid state, e.g. by cutting
    • G01N2001/045—Laser ablation; Microwave vaporisation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00—Sampling; Preparing specimens for investigation
    • G01N1/28—Preparing specimens for investigation including physical details of (bio-)chemical methods covered elsewhere, e.g. G01N33/50, C12Q
    • G01N1/38—Diluting, dispersing or mixing samples
    • G01N2001/383—Diluting, dispersing or mixing samples collecting and diluting in a flow of liquid
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/10—Ion sources; Ion guns
    • H01J49/105—Ion sources; Ion guns using high-frequency excitation, e.g. microwave excitation, Inductively Coupled Plasma [ICP]

Landscapes

  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Analytical Chemistry (AREA)
  • Immunology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Pathology (AREA)
  • Optics & Photonics (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Sampling And Sample Adjustment (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Plasma Technology (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
TW107125366A 2013-02-14 2014-02-12 用於處理從靶材的雷射剝蝕位置被移除的靶材材料之裝置 TWI668422B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US201361764976P 2013-02-14 2013-02-14
US61/764,976 2013-02-14

Publications (2)

Publication Number Publication Date
TW201840962A TW201840962A (zh) 2018-11-16
TWI668422B true TWI668422B (zh) 2019-08-11

Family

ID=51354519

Family Applications (4)

Application Number Title Priority Date Filing Date
TW107125366A TWI668422B (zh) 2013-02-14 2014-02-12 用於處理從靶材的雷射剝蝕位置被移除的靶材材料之裝置
TW107110312A TWI667462B (zh) 2013-02-14 2014-02-12 用於處理靶材之裝置
TW103104709A TW201447259A (zh) 2013-02-14 2014-02-12 用於組成分析系統的雷射剝蝕單元和火炬系統
TW103104712A TWI614488B (zh) 2013-02-14 2014-02-12 注入器、注入器裝置、樣本準備裝置以及將氣溶膠樣本注入電漿火炬的方法

Family Applications After (3)

Application Number Title Priority Date Filing Date
TW107110312A TWI667462B (zh) 2013-02-14 2014-02-12 用於處理靶材之裝置
TW103104709A TW201447259A (zh) 2013-02-14 2014-02-12 用於組成分析系統的雷射剝蝕單元和火炬系統
TW103104712A TWI614488B (zh) 2013-02-14 2014-02-12 注入器、注入器裝置、樣本準備裝置以及將氣溶膠樣本注入電漿火炬的方法

Country Status (6)

Country Link
EP (1) EP2956756B1 (enExample)
JP (3) JP6463279B2 (enExample)
KR (1) KR20150114963A (enExample)
CN (1) CN105074419B (enExample)
TW (4) TWI668422B (enExample)
WO (1) WO2014127034A1 (enExample)

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EP3240014A1 (en) 2016-04-29 2017-11-01 ETH Zurich Laser ablation cell
WO2018026898A1 (en) 2016-08-02 2018-02-08 Fluidigm Canada Inc. Laser ablation system
WO2018026910A1 (en) 2016-08-02 2018-02-08 Fluidigm Canada Inc. Sample imaging apparatus and method
AT519146B1 (de) 2016-10-05 2020-03-15 Univ Wien Tech Vorrichtung zur Analyse eines Feststoff-Probenmaterials
CN110678730A (zh) * 2017-04-20 2020-01-10 元素科学雷射公司 用于极快速信号清除的可调整样本底面
KR102814025B1 (ko) * 2018-06-05 2025-05-27 엘레멘탈 사이언티픽 레이저스 엘엘씨 레이저 보조 분광에서 샘플 챔버를 바이패스하는 장치 및 방법
EP3807922A4 (en) 2018-06-18 2022-03-23 Fluidigm Canada Inc. HIGH RESOLUTION IMAGING DEVICE AND METHOD
CN113167691B (zh) 2018-09-10 2024-07-02 富鲁达加拿大公司 自动聚焦样本成像设备和方法
CN109444248B (zh) * 2018-11-20 2020-10-30 中国地质大学（武汉） 一种基于激光的溶液剥蚀进样分析方法
GB2582751B (en) * 2019-03-29 2021-07-07 Thermo Fisher Scient Ecublens Sarl Improved spark stand for optical emission spectrometry
JP6652212B2 (ja) * 2019-04-15 2020-02-19 株式会社島津製作所 サンプルプレート移動機構及びそれを備えたレーザ脱離イオン化質量分析装置
CA3140663A1 (en) 2019-06-18 2020-12-24 Paul Corkum Improved mass cytometry
JP7349632B2 (ja) * 2019-06-28 2023-09-25 株式会社エス・テイ・ジャパン レーザーアブレーション用のセルおよび分析装置
KR102229252B1 (ko) * 2019-08-19 2021-03-18 한국과학기술연구원 에어로졸 발생 장치
DE112022001795T5 (de) * 2021-04-26 2024-02-29 Elemental Scientific, Inc. Induktiv gekoppelter Plasmabrenneraufbau mit aufgebördeltem Auslass
WO2024224612A1 (ja) * 2023-04-28 2024-10-31 株式会社 イアス レーザーアブレーションｉｃｐ分析方法及び分析装置
WO2026022960A1 (ja) * 2024-07-24 2026-01-29 ロ－ツェイアス株式会社 試料吸引エジェクター

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US5537206A (en) * 1993-11-02 1996-07-16 Nkk Corporation Method for analyzing steel and apparatus therefor
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US4220414A (en) * 1976-05-06 1980-09-02 Barringer Research Limited Laser spectrochemical analysis
US5537206A (en) * 1993-11-02 1996-07-16 Nkk Corporation Method for analyzing steel and apparatus therefor
WO1995017656A1 (fr) * 1993-12-23 1995-06-29 Compagnie Generale Des Matieres Nucleaires Procede de controle de la contamination surfacique d'un solide et dispositif de mise en ×uvre
TW200837863A (en) * 2006-12-22 2008-09-16 Samsung Electronics Co Ltd Apparatus and method for analyzing contaminants on wafer
US20100207038A1 (en) * 2009-02-13 2010-08-19 Loughborough University Apparatus and method for laser irradiation

Also Published As

Publication number Publication date
JP2016513254A (ja) 2016-05-12
EP2956756A4 (en) 2016-10-12
EP2956756A1 (en) 2015-12-23
TW201447259A (zh) 2014-12-16
CN105074419A (zh) 2015-11-18
TW201447261A (zh) 2014-12-16
JP6463279B2 (ja) 2019-01-30
CN105074419B (zh) 2019-02-01
TW201840962A (zh) 2018-11-16
KR20150114963A (ko) 2015-10-13
TWI667462B (zh) 2019-08-01
WO2014127034A1 (en) 2014-08-21
TW201827806A (zh) 2018-08-01
JP6776323B2 (ja) 2020-10-28
EP2956756B1 (en) 2024-09-04
JP2019082483A (ja) 2019-05-30
TWI614488B (zh) 2018-02-11
JP2021039107A (ja) 2021-03-11

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