TWI656630B - 成像元件及成像裝置 - Google Patents
成像元件及成像裝置 Download PDFInfo
- Publication number
- TWI656630B TWI656630B TW104104823A TW104104823A TWI656630B TW I656630 B TWI656630 B TW I656630B TW 104104823 A TW104104823 A TW 104104823A TW 104104823 A TW104104823 A TW 104104823A TW I656630 B TWI656630 B TW I656630B
- Authority
- TW
- Taiwan
- Prior art keywords
- potential
- transistor
- pixel
- unit
- negative
- Prior art date
Links
- 238000003384 imaging method Methods 0.000 title claims abstract description 151
- 238000006243 chemical reaction Methods 0.000 claims abstract description 66
- 230000002093 peripheral effect Effects 0.000 claims description 51
- 238000009792 diffusion process Methods 0.000 claims description 48
- 238000007667 floating Methods 0.000 claims description 48
- 239000000758 substrate Substances 0.000 claims description 18
- 239000004065 semiconductor Substances 0.000 claims description 17
- 230000003287 optical effect Effects 0.000 claims description 8
- 239000011159 matrix material Substances 0.000 claims description 7
- 238000012546 transfer Methods 0.000 abstract description 14
- 238000012545 processing Methods 0.000 description 33
- 235000012431 wafers Nutrition 0.000 description 25
- 230000015556 catabolic process Effects 0.000 description 12
- 238000006731 degradation reaction Methods 0.000 description 12
- 238000013461 design Methods 0.000 description 11
- 229920006395 saturated elastomer Polymers 0.000 description 8
- 230000006866 deterioration Effects 0.000 description 6
- 238000000034 method Methods 0.000 description 5
- 238000011161 development Methods 0.000 description 4
- 238000012937 correction Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 230000010365 information processing Effects 0.000 description 3
- 238000009825 accumulation Methods 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 230000008859 change Effects 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 230000005622 photoelectricity Effects 0.000 description 1
- 210000004508 polar body Anatomy 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
- H10F39/80—Constructional details of image sensors
- H10F39/803—Pixels having integrated switching, control, storage or amplification elements
- H10F39/8037—Pixels having integrated switching, control, storage or amplification elements the integrated elements comprising a transistor
- H10F39/80373—Pixels having integrated switching, control, storage or amplification elements the integrated elements comprising a transistor characterised by the gate of the transistor
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
- H10F39/80—Constructional details of image sensors
- H10F39/809—Constructional details of image sensors of hybrid image sensors
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N25/00—Circuitry of solid-state image sensors [SSIS]; Control thereof
- H04N25/60—Noise processing, e.g. detecting, correcting, reducing or removing noise
- H04N25/65—Noise processing, e.g. detecting, correcting, reducing or removing noise applied to reset noise, e.g. KTC noise related to CMOS structures by techniques other than CDS
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N25/00—Circuitry of solid-state image sensors [SSIS]; Control thereof
- H04N25/70—SSIS architectures; Circuits associated therewith
- H04N25/709—Circuitry for control of the power supply
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N25/00—Circuitry of solid-state image sensors [SSIS]; Control thereof
- H04N25/70—SSIS architectures; Circuits associated therewith
- H04N25/76—Addressed sensors, e.g. MOS or CMOS sensors
- H04N25/77—Pixel circuitry, e.g. memories, A/D converters, pixel amplifiers, shared circuits or shared components
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N25/00—Circuitry of solid-state image sensors [SSIS]; Control thereof
- H04N25/70—SSIS architectures; Circuits associated therewith
- H04N25/76—Addressed sensors, e.g. MOS or CMOS sensors
- H04N25/78—Readout circuits for addressed sensors, e.g. output amplifiers or A/D converters
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
- H10F39/80—Constructional details of image sensors
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
- H10F39/80—Constructional details of image sensors
- H10F39/803—Pixels having integrated switching, control, storage or amplification elements
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
- H10F39/80—Constructional details of image sensors
- H10F39/803—Pixels having integrated switching, control, storage or amplification elements
- H10F39/8037—Pixels having integrated switching, control, storage or amplification elements the integrated elements comprising a transistor
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
- H10F39/80—Constructional details of image sensors
- H10F39/806—Optical elements or arrangements associated with the image sensors
- H10F39/8063—Microlenses
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
- H10F39/10—Integrated devices
- H10F39/12—Image sensors
- H10F39/18—Complementary metal-oxide-semiconductor [CMOS] image sensors; Photodiode array image sensors
Landscapes
- Engineering & Computer Science (AREA)
- Multimedia (AREA)
- Signal Processing (AREA)
- Solid State Image Pick-Up Elements (AREA)
- Transforming Light Signals Into Electric Signals (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2014-034369 | 2014-02-25 | ||
| JP2014034369A JP6094511B2 (ja) | 2014-02-25 | 2014-02-25 | 撮像素子および撮像装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW201535702A TW201535702A (zh) | 2015-09-16 |
| TWI656630B true TWI656630B (zh) | 2019-04-11 |
Family
ID=52669640
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW104104823A TWI656630B (zh) | 2014-02-25 | 2015-02-12 | 成像元件及成像裝置 |
Country Status (7)
| Country | Link |
|---|---|
| US (3) | US10008525B2 (enExample) |
| EP (3) | EP3111479B1 (enExample) |
| JP (1) | JP6094511B2 (enExample) |
| KR (3) | KR102503871B1 (enExample) |
| CN (3) | CN110248122B (enExample) |
| TW (1) | TWI656630B (enExample) |
| WO (1) | WO2015129197A1 (enExample) |
Families Citing this family (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6094511B2 (ja) * | 2014-02-25 | 2017-03-15 | ソニー株式会社 | 撮像素子および撮像装置 |
| US9960783B2 (en) * | 2015-09-18 | 2018-05-01 | Taiwan Semiconductor Manufacturing Company Ltd. | Conditional correlated multiple sampling single slope analog-to-digital converter, and associated image sensor system and method |
| CN113099141B (zh) * | 2015-09-30 | 2024-06-11 | 株式会社尼康 | 摄像元件 |
| JP6646824B2 (ja) * | 2016-01-22 | 2020-02-14 | パナソニックIpマネジメント株式会社 | 撮像装置 |
| JP2018019335A (ja) * | 2016-07-29 | 2018-02-01 | ソニー株式会社 | 撮像素子および撮像装置 |
| WO2019167551A1 (ja) * | 2018-02-28 | 2019-09-06 | パナソニックIpマネジメント株式会社 | 撮像装置 |
| WO2020183809A1 (ja) * | 2019-03-13 | 2020-09-17 | ソニーセミコンダクタソリューションズ株式会社 | 固体撮像装置、電子機器、および、固体撮像装置の制御方法 |
| KR20210034918A (ko) * | 2019-09-23 | 2021-03-31 | 삼성전자주식회사 | 전하 펌프 회로 및 이를 포함하는 이미지 센서 |
| EP3828846B1 (en) * | 2019-11-26 | 2022-07-13 | Axis AB | Camera device |
| US12137297B2 (en) | 2019-12-02 | 2024-11-05 | Sony Semiconductor Solutions Corporation | Imaging devices and imaging apparatuses, and methods for the same |
| US11095843B2 (en) * | 2019-12-02 | 2021-08-17 | Sony Semiconductor Solutions Corporation | Imaging devices and imaging apparatuses, and methods for the same |
| WO2021153428A1 (ja) | 2020-01-29 | 2021-08-05 | ソニーセミコンダクタソリューションズ株式会社 | 撮像装置、電子機器及び撮像方法 |
| WO2021161791A1 (ja) * | 2020-02-13 | 2021-08-19 | ソニーセミコンダクタソリューションズ株式会社 | 固体撮像装置および撮像装置 |
| WO2023002566A1 (ja) | 2021-07-20 | 2023-01-26 | オリンパスメディカルシステムズ株式会社 | 撮像装置、スコープ、および内視鏡システム |
| JP2023142256A (ja) * | 2022-03-24 | 2023-10-05 | ソニーセミコンダクタソリューションズ株式会社 | 固体撮像装置及び半導体装置の製造方法 |
| US20230411431A1 (en) * | 2022-05-17 | 2023-12-21 | Taiwan Semiconductor Manufacturing Company, Ltd. | Stacked cmos image sensor and method of manufacturing the same |
| JPWO2024176641A1 (enExample) | 2023-02-24 | 2024-08-29 |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20070051988A1 (en) * | 2005-09-02 | 2007-03-08 | Fumihiko Koga | Solid-state imaging device, drive method of solid-state imaging device, and imaging apparatus |
| US20090128224A1 (en) * | 2007-11-06 | 2009-05-21 | Kabushiki Kaisha Toshiba | Semiconductor device |
| TW201002057A (en) * | 2008-04-03 | 2010-01-01 | Sony Corp | Solid state imaging device, driving method of the solid state imaging device, and electronic equipment |
| US20130248954A1 (en) * | 2012-03-21 | 2013-09-26 | Samsung Electronics Co., Ltd. | Unit Pixel of Image Sensor and Image Sensor Including the Same |
Family Cites Families (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3618248B2 (ja) * | 1999-03-26 | 2005-02-09 | シャープ株式会社 | 増幅型固体撮像装置用出力回路 |
| JP2003023573A (ja) * | 2001-07-11 | 2003-01-24 | Asahi Kasei Corp | ビジョンチップ |
| JP3951879B2 (ja) * | 2002-10-04 | 2007-08-01 | ソニー株式会社 | 固体撮像素子及びその駆動方法 |
| JP4848739B2 (ja) * | 2005-11-01 | 2011-12-28 | ソニー株式会社 | 物理量検出装置および撮像装置 |
| US20070129067A1 (en) | 2005-11-04 | 2007-06-07 | Summer Robert D | Ring-tone system and methodology |
| KR100871714B1 (ko) | 2005-12-05 | 2008-12-05 | 한국전자통신연구원 | 트랜스퍼 트랜지스터 및 이를 구비한 저잡음 이미지 센서 |
| TWI479887B (zh) * | 2007-05-24 | 2015-04-01 | Sony Corp | 背向照明固態成像裝置及照相機 |
| JP2009253559A (ja) * | 2008-04-03 | 2009-10-29 | Sharp Corp | 固体撮像装置および電子情報機器 |
| JP2013090127A (ja) * | 2011-10-18 | 2013-05-13 | Olympus Corp | 固体撮像装置および撮像装置 |
| JP6018376B2 (ja) * | 2011-12-05 | 2016-11-02 | キヤノン株式会社 | 固体撮像装置およびカメラ |
| JP5973758B2 (ja) * | 2012-03-22 | 2016-08-23 | オリンパス株式会社 | 固体撮像装置 |
| JP5421475B2 (ja) * | 2012-07-04 | 2014-02-19 | 誠 雫石 | 撮像素子、半導体集積回路及び撮像装置 |
| JP6083977B2 (ja) * | 2012-08-23 | 2017-02-22 | オリンパス株式会社 | 固体撮像装置および撮像装置 |
| JP6176990B2 (ja) * | 2013-04-25 | 2017-08-09 | オリンパス株式会社 | 固体撮像装置および撮像装置 |
| JP6094511B2 (ja) * | 2014-02-25 | 2017-03-15 | ソニー株式会社 | 撮像素子および撮像装置 |
-
2014
- 2014-02-25 JP JP2014034369A patent/JP6094511B2/ja active Active
-
2015
- 2015-02-12 TW TW104104823A patent/TWI656630B/zh active
- 2015-02-17 CN CN201910504668.2A patent/CN110248122B/zh active Active
- 2015-02-17 EP EP15709558.9A patent/EP3111479B1/en active Active
- 2015-02-17 KR KR1020227004827A patent/KR102503871B1/ko active Active
- 2015-02-17 WO PCT/JP2015/000720 patent/WO2015129197A1/en not_active Ceased
- 2015-02-17 US US15/118,956 patent/US10008525B2/en active Active
- 2015-02-17 CN CN201910504605.7A patent/CN110190081B/zh active Active
- 2015-02-17 KR KR1020237005817A patent/KR102551950B1/ko active Active
- 2015-02-17 CN CN201580007518.0A patent/CN106030803B/zh active Active
- 2015-02-17 KR KR1020167021504A patent/KR102369400B1/ko active Active
- 2015-02-17 EP EP22215435.3A patent/EP4181204A1/en active Pending
- 2015-02-17 EP EP19174781.5A patent/EP3547370B1/en active Active
-
2018
- 2018-05-17 US US15/982,717 patent/US10529756B2/en active Active
-
2019
- 2019-11-27 US US16/698,615 patent/US10840283B2/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20070051988A1 (en) * | 2005-09-02 | 2007-03-08 | Fumihiko Koga | Solid-state imaging device, drive method of solid-state imaging device, and imaging apparatus |
| US20090128224A1 (en) * | 2007-11-06 | 2009-05-21 | Kabushiki Kaisha Toshiba | Semiconductor device |
| TW201002057A (en) * | 2008-04-03 | 2010-01-01 | Sony Corp | Solid state imaging device, driving method of the solid state imaging device, and electronic equipment |
| US20130248954A1 (en) * | 2012-03-21 | 2013-09-26 | Samsung Electronics Co., Ltd. | Unit Pixel of Image Sensor and Image Sensor Including the Same |
Also Published As
| Publication number | Publication date |
|---|---|
| TW201535702A (zh) | 2015-09-16 |
| KR102503871B1 (ko) | 2023-02-27 |
| EP3547370A1 (en) | 2019-10-02 |
| US10529756B2 (en) | 2020-01-07 |
| EP3111479A1 (en) | 2017-01-04 |
| JP2015159501A (ja) | 2015-09-03 |
| EP3111479B1 (en) | 2019-05-22 |
| US20170053957A1 (en) | 2017-02-23 |
| KR102551950B1 (ko) | 2023-07-06 |
| CN106030803B (zh) | 2019-07-12 |
| US20180269243A1 (en) | 2018-09-20 |
| CN106030803A (zh) | 2016-10-12 |
| KR102369400B1 (ko) | 2022-03-04 |
| CN110190081A (zh) | 2019-08-30 |
| CN110190081B (zh) | 2020-12-18 |
| CN110248122B (zh) | 2021-09-17 |
| WO2015129197A1 (en) | 2015-09-03 |
| JP6094511B2 (ja) | 2017-03-15 |
| US10008525B2 (en) | 2018-06-26 |
| CN110248122A (zh) | 2019-09-17 |
| US20200098805A1 (en) | 2020-03-26 |
| EP4181204A1 (en) | 2023-05-17 |
| EP3547370B1 (en) | 2023-06-28 |
| KR20160125954A (ko) | 2016-11-01 |
| KR20220025915A (ko) | 2022-03-03 |
| US10840283B2 (en) | 2020-11-17 |
| KR20230030034A (ko) | 2023-03-03 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| TWI656630B (zh) | 成像元件及成像裝置 | |
| US9973700B2 (en) | Solid-state imaging device, method for driving solid-state imaging device, and electronic apparatus | |
| US7839439B2 (en) | Solid-state imaging device and imaging device | |
| US9117728B2 (en) | Solid-state imaging device, method of manufacturing same, and electronic apparatus | |
| CN106464819B (zh) | 信号处理器件、控制方法、图像传感器件和电子设备 | |
| JP7162251B2 (ja) | 撮像装置 | |
| CN109983583B (zh) | 成像元件和电子设备 | |
| JP2016015680A (ja) | 固体撮像素子および撮像装置 | |
| JP2023067988A (ja) | 撮像素子 | |
| JP6375613B2 (ja) | 固体撮像素子及び撮像装置 | |
| JP2015100004A (ja) | 固体撮像素子及び撮像装置 |