TWI646278B - Piping joint, fluid supply control device, and piping connection structure - Google Patents

Piping joint, fluid supply control device, and piping connection structure Download PDF

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Publication number
TWI646278B
TWI646278B TW103139399A TW103139399A TWI646278B TW I646278 B TWI646278 B TW I646278B TW 103139399 A TW103139399 A TW 103139399A TW 103139399 A TW103139399 A TW 103139399A TW I646278 B TWI646278 B TW I646278B
Authority
TW
Taiwan
Prior art keywords
flow path
connection
fluid
fluid control
passage
Prior art date
Application number
TW103139399A
Other languages
English (en)
Chinese (zh)
Other versions
TW201533365A (zh
Inventor
加藤啓介
板藤寬
三原由極
廣瀨克憲
三輪敏一
西田成伸
伊藤一壽
Original Assignee
Ｃｋｄ股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2013252101A external-priority patent/JP5982354B2/ja
Application filed by Ｃｋｄ股份有限公司 filed Critical Ｃｋｄ股份有限公司
Publication of TW201533365A publication Critical patent/TW201533365A/zh
Application granted granted Critical
Publication of TWI646278B publication Critical patent/TWI646278B/zh

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K27/00—Construction of housing; Use of materials therefor
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/12—Actuating devices; Operating means; Releasing devices actuated by fluid
    • F16K31/122—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston
    • F16K31/1225—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston with a plurality of pistons
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Valve Housings (AREA)
TW103139399A 2013-12-05 2014-11-13 Piping joint, fluid supply control device, and piping connection structure TWI646278B (zh)

Applications Claiming Priority (8)

Application Number Priority Date Filing Date Title
JP2013-252101 2013-12-05
JP2013-251810 2013-12-05
JP2013251810 2013-12-05
JP2013252101A JP5982354B2 (ja) 2013-12-05 2013-12-05 流体制御弁
JP2013-260125 2013-12-17
JP2013260125 2013-12-17
JP2014-037469 2014-02-27
JP2014037469 2014-02-27

Publications (2)

Publication Number Publication Date
TW201533365A TW201533365A (zh) 2015-09-01
TWI646278B true TWI646278B (zh) 2019-01-01

Family

ID=53343739

Family Applications (3)

Application Number Title Priority Date Filing Date
TW103139399A TWI646278B (zh) 2013-12-05 2014-11-13 Piping joint, fluid supply control device, and piping connection structure
TW103139407A TWI650499B (zh) 2013-12-05 2014-11-13 流路方塊及流體供給控制裝置
TW103139401A TWI651486B (zh) 2013-12-05 2014-11-13 流體供給控制裝置

Family Applications After (2)

Application Number Title Priority Date Filing Date
TW103139407A TWI650499B (zh) 2013-12-05 2014-11-13 流路方塊及流體供給控制裝置
TW103139401A TWI651486B (zh) 2013-12-05 2014-11-13 流體供給控制裝置

Country Status (3)

Country Link
KR (3) KR102187947B1 (ko)
CN (3) CN104699128B (ko)
TW (3) TWI646278B (ko)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI727508B (zh) * 2019-11-19 2021-05-11 時碩工業股份有限公司 齒輪製造方法及其結構
TWI796635B (zh) * 2019-11-19 2023-03-21 時碩工業股份有限公司 齒輪製造方法及其製品

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KR102177916B1 (ko) * 2016-09-12 2020-11-12 가부시키가이샤 후지킨 유체제어장치, 이것에 사용하는 베이스 블록 및 유체제어장치의 제조 방법
WO2018079288A1 (ja) * 2016-10-24 2018-05-03 株式会社フジキン 流体制御装置およびこの流体制御装置を用いた製品製造方法
WO2018168559A1 (ja) * 2017-03-15 2018-09-20 株式会社フジキン 継手および流体制御装置
KR20190122233A (ko) * 2017-03-28 2019-10-29 가부시키가이샤 후지킨 이음매 블록 및 이것을 사용한 유체제어장치
US20200248310A1 (en) * 2017-08-31 2020-08-06 Fujikin Incorporated Joint block and manufacturing method thereof
CN109027688B (zh) * 2018-10-26 2021-04-30 郑州大学 一种低压液路集成块及其加工工艺
WO2020085033A1 (ja) * 2018-10-26 2020-04-30 株式会社フジキン 流体供給システム、流体制御装置、及び半導体製造装置
JP2020094622A (ja) * 2018-12-12 2020-06-18 株式会社小糸製作所 車両用クリーナシステム
CN110195820B (zh) * 2019-07-04 2020-10-30 尚丹 天然气多向输送的控制方法
JP7425462B2 (ja) * 2019-10-31 2024-01-31 株式会社フジキン 流体制御装置および半導体製造装置
CN111945136B (zh) * 2020-08-13 2022-10-21 北京北方华创微电子装备有限公司 半导体工艺设备及其集成供气系统

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JPH04248085A (ja) * 1991-01-22 1992-09-03 Fujikura Rubber Ltd 開閉弁
CN1386987A (zh) * 2001-05-23 2002-12-25 株式会社富士金 流体控制装置
CN1918417A (zh) * 2004-02-06 2007-02-21 旭有机材工业株式会社 阀以及具有该阀的流体系统
CN101198815A (zh) * 2005-08-10 2008-06-11 株式会社富士金 流体控制装置

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US5992463A (en) * 1996-10-30 1999-11-30 Unit Instruments, Inc. Gas panel
JP3522535B2 (ja) * 1998-05-29 2004-04-26 忠弘 大見 圧力式流量制御装置を備えたガス供給設備
US6125887A (en) 1999-09-20 2000-10-03 Pinto; James V. Welded interconnection modules for high purity fluid flow control applications
JP2001208014A (ja) * 2000-01-31 2001-08-03 Fujikura Rubber Ltd 多段シリンダ装置
JP2001227657A (ja) 2000-02-14 2001-08-24 Ckd Corp プロセスガス供給ユニット
JP2002089798A (ja) * 2000-09-11 2002-03-27 Ulvac Japan Ltd 流体制御装置およびこれを用いたガス処理装置
JP3553526B2 (ja) * 2001-06-27 2004-08-11 株式会社キッツエスシーティー 可変流量バルブ
JP4554853B2 (ja) * 2001-09-17 2010-09-29 シーケーディ株式会社 ガス供給集積弁
US6874538B2 (en) * 2003-03-26 2005-04-05 Kevin S. Bennett Fluid delivery system
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JP2006009969A (ja) * 2004-06-25 2006-01-12 Kitz Sct:Kk 集積化ガス制御装置用流路ブロックとその製造方法並びに集積化ガス制御装置
JP4296138B2 (ja) 2004-08-04 2009-07-15 シーケーディ株式会社 ガス供給集積ユニット
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JP5183935B2 (ja) * 2007-02-26 2013-04-17 Ｃｋｄ株式会社 流路ブロックの製造方法
JP5125228B2 (ja) * 2007-05-31 2013-01-23 株式会社フジキン 流体制御装置およびその組立方法
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JP4700095B2 (ja) 2008-11-03 2011-06-15 シーケーディ株式会社 ガス供給装置、ブロック状フランジ
JP5274518B2 (ja) 2009-06-30 2013-08-28 Ｃｋｄ株式会社 ガス供給ユニット及びガス供給装置
KR101366019B1 (ko) * 2010-02-22 2014-02-21 가부시키가이샤 후지킨 혼합 가스 공급 장치
US8544500B2 (en) * 2010-05-18 2013-10-01 Ckd Corporation Coupling apparatus for chemical fluid flow channel
JP5430621B2 (ja) * 2011-08-10 2014-03-05 Ｃｋｄ株式会社 ガス流量検定システム及びガス流量検定ユニット

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04248085A (ja) * 1991-01-22 1992-09-03 Fujikura Rubber Ltd 開閉弁
CN1386987A (zh) * 2001-05-23 2002-12-25 株式会社富士金 流体控制装置
CN1918417A (zh) * 2004-02-06 2007-02-21 旭有机材工业株式会社 阀以及具有该阀的流体系统
CN101198815A (zh) * 2005-08-10 2008-06-11 株式会社富士金 流体控制装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI727508B (zh) * 2019-11-19 2021-05-11 時碩工業股份有限公司 齒輪製造方法及其結構
TWI796635B (zh) * 2019-11-19 2023-03-21 時碩工業股份有限公司 齒輪製造方法及其製品

Also Published As

Publication number Publication date
KR102187947B1 (ko) 2020-12-07
TW201533356A (zh) 2015-09-01
CN104696299A (zh) 2015-06-10
KR20150065587A (ko) 2015-06-15
CN104696569B (zh) 2018-05-25
TWI650499B (zh) 2019-02-11
KR20150065586A (ko) 2015-06-15
CN104696299B (zh) 2018-05-01
TWI651486B (zh) 2019-02-21
TW201533355A (zh) 2015-09-01
CN104699128A (zh) 2015-06-10
CN104696569A (zh) 2015-06-10
CN104699128B (zh) 2020-03-03
KR102256901B1 (ko) 2021-05-26
TW201533365A (zh) 2015-09-01
KR20150065585A (ko) 2015-06-15
KR102256934B1 (ko) 2021-05-26

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