CN104699128B - 流体供给控制装置 - Google Patents

流体供给控制装置 Download PDF

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Publication number
CN104699128B
CN104699128B CN201410737793.5A CN201410737793A CN104699128B CN 104699128 B CN104699128 B CN 104699128B CN 201410737793 A CN201410737793 A CN 201410737793A CN 104699128 B CN104699128 B CN 104699128B
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China
Prior art keywords
flow path
fluid
valve
connection
fluid control
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CN201410737793.5A
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English (en)
Chinese (zh)
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CN104699128A (zh
Inventor
加藤启介
板藤宽
三原由极
广濑克宪
三轮敏一
西田成伸
伊藤一寿
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CKD Corp
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CKD Corp
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Priority claimed from JP2013252101A external-priority patent/JP5982354B2/ja
Application filed by CKD Corp filed Critical CKD Corp
Publication of CN104699128A publication Critical patent/CN104699128A/zh
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K27/00—Construction of housing; Use of materials therefor
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/12—Actuating devices; Operating means; Releasing devices actuated by fluid
    • F16K31/122—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston
    • F16K31/1225—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston with a plurality of pistons
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Valve Housings (AREA)
CN201410737793.5A 2013-12-05 2014-12-04 流体供给控制装置 Active CN104699128B (zh)

Applications Claiming Priority (8)

Application Number Priority Date Filing Date Title
JP2013-252101 2013-12-05
JP2013251810 2013-12-05
JP2013-251810 2013-12-05
JP2013252101A JP5982354B2 (ja) 2013-12-05 2013-12-05 流体制御弁
JP2013260125 2013-12-17
JP2013-260125 2013-12-17
JP2014037469 2014-02-27
JP2014-037469 2014-02-27

Publications (2)

Publication Number Publication Date
CN104699128A CN104699128A (zh) 2015-06-10
CN104699128B true CN104699128B (zh) 2020-03-03

Family

ID=53343739

Family Applications (3)

Application Number Title Priority Date Filing Date
CN201410737793.5A Active CN104699128B (zh) 2013-12-05 2014-12-04 流体供给控制装置
CN201410730209.3A Active CN104696569B (zh) 2013-12-05 2014-12-04 流路块和流体供给控制装置
CN201410730207.4A Active CN104696299B (zh) 2013-12-05 2014-12-04 配管接头、流体供给控制装置以及配管连接结构

Family Applications After (2)

Application Number Title Priority Date Filing Date
CN201410730209.3A Active CN104696569B (zh) 2013-12-05 2014-12-04 流路块和流体供给控制装置
CN201410730207.4A Active CN104696299B (zh) 2013-12-05 2014-12-04 配管接头、流体供给控制装置以及配管连接结构

Country Status (3)

Country Link
KR (3) KR102256934B1 (ko)
CN (3) CN104699128B (ko)
TW (3) TWI650499B (ko)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
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US10895329B2 (en) * 2016-09-12 2021-01-19 Fujikin Incorporated Fluid control system, base block used for same, and method for manufacturing fluid control system
JP6917068B2 (ja) 2016-10-24 2021-08-11 株式会社フジキン 流体制御装置およびこの流体制御装置を用いた製品製造方法
WO2018168559A1 (ja) * 2017-03-15 2018-09-20 株式会社フジキン 継手および流体制御装置
JP7030342B2 (ja) * 2017-03-28 2022-03-07 株式会社フジキン 継手ブロックおよびこれを用いた流体制御装置
US20200248310A1 (en) * 2017-08-31 2020-08-06 Fujikin Incorporated Joint block and manufacturing method thereof
US11346505B2 (en) * 2018-10-26 2022-05-31 Fujikin Incorporated Fluid supply system, fluid control device, and semiconductor manufacturing device
CN109027688B (zh) * 2018-10-26 2021-04-30 郑州大学 一种低压液路集成块及其加工工艺
JP2020094622A (ja) * 2018-12-12 2020-06-18 株式会社小糸製作所 車両用クリーナシステム
CN110195820B (zh) * 2019-07-04 2020-10-30 尚丹 天然气多向输送的控制方法
JP7425462B2 (ja) * 2019-10-31 2024-01-31 株式会社フジキン 流体制御装置および半導体製造装置
TWI796635B (zh) * 2019-11-19 2023-03-21 時碩工業股份有限公司 齒輪製造方法及其製品
TWI727508B (zh) * 2019-11-19 2021-05-11 時碩工業股份有限公司 齒輪製造方法及其結構
CN111945136B (zh) * 2020-08-13 2022-10-21 北京北方华创微电子装备有限公司 半导体工艺设备及其集成供气系统

Citations (5)

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EP1191265A2 (en) * 2000-09-11 2002-03-27 Fujikin Inc. Fluid control apparatus and gas treatment system comprising same
CN101093034A (zh) * 2006-06-20 2007-12-26 喜开理株式会社 气动阀
CN101784828A (zh) * 2007-08-23 2010-07-21 伊格尔工业股份有限公司 控制阀
CN102934202A (zh) * 2010-02-22 2013-02-13 株式会社富士金 混合气体供给装置
CN102954819A (zh) * 2011-08-10 2013-03-06 喜开理株式会社 气体流量检定系统及气体流量检定单元

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JP2801420B2 (ja) * 1991-01-22 1998-09-21 藤倉ゴム工業株式会社 開閉弁
JP2940292B2 (ja) 1992-02-25 1999-08-25 日立プラント建設株式会社 管フランジの締付方法
US5992463A (en) * 1996-10-30 1999-11-30 Unit Instruments, Inc. Gas panel
JP3522535B2 (ja) * 1998-05-29 2004-04-26 忠弘 大見 圧力式流量制御装置を備えたガス供給設備
US6125887A (en) 1999-09-20 2000-10-03 Pinto; James V. Welded interconnection modules for high purity fluid flow control applications
JP2001208014A (ja) * 2000-01-31 2001-08-03 Fujikura Rubber Ltd 多段シリンダ装置
JP2001227657A (ja) 2000-02-14 2001-08-24 Ckd Corp プロセスガス供給ユニット
JP2002349797A (ja) * 2001-05-23 2002-12-04 Fujikin Inc 流体制御装置
JP3553526B2 (ja) * 2001-06-27 2004-08-11 株式会社キッツエスシーティー 可変流量バルブ
JP4554853B2 (ja) * 2001-09-17 2010-09-29 シーケーディ株式会社 ガス供給集積弁
US6874538B2 (en) * 2003-03-26 2005-04-05 Kevin S. Bennett Fluid delivery system
JP4502651B2 (ja) * 2003-09-26 2010-07-14 旭有機材工業株式会社 弁およびその弁を有する流体システム
KR101272169B1 (ko) * 2004-02-06 2013-06-07 아사히 유키자이 고교 가부시키가이샤 밸브 및 그 밸브를 가지는 유체시스템
JP2006009969A (ja) * 2004-06-25 2006-01-12 Kitz Sct:Kk 集積化ガス制御装置用流路ブロックとその製造方法並びに集積化ガス制御装置
JP4296138B2 (ja) 2004-08-04 2009-07-15 シーケーディ株式会社 ガス供給集積ユニット
EP1895214A1 (en) * 2005-08-10 2008-03-05 Fujikin Incorporated Fluid control device
JP5183935B2 (ja) * 2007-02-26 2013-04-17 Ｃｋｄ株式会社 流路ブロックの製造方法
JP5125228B2 (ja) * 2007-05-31 2013-01-23 株式会社フジキン 流体制御装置およびその組立方法
JP2010084854A (ja) * 2008-09-30 2010-04-15 Tokyo Electron Ltd ガス供給装置
JP4700095B2 (ja) 2008-11-03 2011-06-15 シーケーディ株式会社 ガス供給装置、ブロック状フランジ
JP5274518B2 (ja) 2009-06-30 2013-08-28 Ｃｋｄ株式会社 ガス供給ユニット及びガス供給装置
US8544500B2 (en) * 2010-05-18 2013-10-01 Ckd Corporation Coupling apparatus for chemical fluid flow channel

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1191265A2 (en) * 2000-09-11 2002-03-27 Fujikin Inc. Fluid control apparatus and gas treatment system comprising same
CN101093034A (zh) * 2006-06-20 2007-12-26 喜开理株式会社 气动阀
CN101784828A (zh) * 2007-08-23 2010-07-21 伊格尔工业股份有限公司 控制阀
CN102934202A (zh) * 2010-02-22 2013-02-13 株式会社富士金 混合气体供给装置
CN102954819A (zh) * 2011-08-10 2013-03-06 喜开理株式会社 气体流量检定系统及气体流量检定单元

Also Published As

Publication number Publication date
CN104696299B (zh) 2018-05-01
TW201533356A (zh) 2015-09-01
CN104696569A (zh) 2015-06-10
CN104696299A (zh) 2015-06-10
KR20150065585A (ko) 2015-06-15
KR102187947B1 (ko) 2020-12-07
KR102256901B1 (ko) 2021-05-26
CN104696569B (zh) 2018-05-25
CN104699128A (zh) 2015-06-10
TW201533355A (zh) 2015-09-01
TWI651486B (zh) 2019-02-21
TW201533365A (zh) 2015-09-01
KR102256934B1 (ko) 2021-05-26
TWI646278B (zh) 2019-01-01
KR20150065586A (ko) 2015-06-15
TWI650499B (zh) 2019-02-11
KR20150065587A (ko) 2015-06-15

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