TWI623475B - 處置器、及零件檢查裝置 - Google Patents

處置器、及零件檢查裝置 Download PDF

Info

Publication number
TWI623475B
TWI623475B TW105109894A TW105109894A TWI623475B TW I623475 B TWI623475 B TW I623475B TW 105109894 A TW105109894 A TW 105109894A TW 105109894 A TW105109894 A TW 105109894A TW I623475 B TWI623475 B TW I623475B
Authority
TW
Taiwan
Prior art keywords
pressing
motor
inspection
shuttle
pressure
Prior art date
Application number
TW105109894A
Other languages
English (en)
Chinese (zh)
Other versions
TW201627216A (zh
Inventor
Toshioki Shimojima
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Publication of TW201627216A publication Critical patent/TW201627216A/zh
Application granted granted Critical
Publication of TWI623475B publication Critical patent/TWI623475B/zh

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2855—Environmental, reliability or burn-in testing
    • G01R31/286—External aspects, e.g. related to chambers, contacting devices or handlers
    • G01R31/2865—Holding devices, e.g. chucks; Handlers or transport devices
    • G01R31/2867—Handlers or transport devices, e.g. loaders, carriers, trays
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26—Testing of individual semiconductor devices
    • G01R31/2601—Apparatus or methods therefor

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Environmental & Geological Engineering (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Engineering & Computer Science (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
TW105109894A 2011-08-25 2012-08-21 處置器、及零件檢查裝置 TWI623475B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2011184058A JP2013044684A (ja) 2011-08-25 2011-08-25 ハンドラー、及び部品検査装置

Publications (2)

Publication Number Publication Date
TW201627216A TW201627216A (zh) 2016-08-01
TWI623475B true TWI623475B (zh) 2018-05-11

Family

ID=47759835

Family Applications (3)

Application Number Title Priority Date Filing Date
TW105109894A TWI623475B (zh) 2011-08-25 2012-08-21 處置器、及零件檢查裝置
TW103145832A TWI592673B (zh) 2011-08-25 2012-08-21 Disposer, and parts inspection device
TW101130289A TWI470244B (zh) 2011-08-25 2012-08-21 Disposers, and parts inspection devices

Family Applications After (2)

Application Number Title Priority Date Filing Date
TW103145832A TWI592673B (zh) 2011-08-25 2012-08-21 Disposer, and parts inspection device
TW101130289A TWI470244B (zh) 2011-08-25 2012-08-21 Disposers, and parts inspection devices

Country Status (4)

Country Link
JP (1) JP2013044684A (ko)
KR (2) KR101384928B1 (ko)
CN (2) CN102950114B (ko)
TW (3) TWI623475B (ko)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5796104B1 (ja) * 2014-05-07 2015-10-21 株式会社 Ｓｙｎａｘ 電子部品測定用のコンタクトモジュール
TWI668174B (zh) * 2015-05-27 2019-08-11 日商精工愛普生股份有限公司 電子零件搬送裝置及電子零件檢查裝置
JP2017116369A (ja) * 2015-12-24 2017-06-29 セイコーエプソン株式会社 電子部品搬送装置および電子部品検査装置
JP2017151011A (ja) * 2016-02-26 2017-08-31 セイコーエプソン株式会社 電子部品搬送装置および電子部品検査装置
CN107176450A (zh) * 2016-03-09 2017-09-19 精工爱普生株式会社 电子部件运送装置、以及电子部件检查装置
JP2017173075A (ja) * 2016-03-23 2017-09-28 セイコーエプソン株式会社 電子部品搬送装置および電子部品検査装置
CN106583275B (zh) * 2016-10-17 2019-06-07 珠海格力电器股份有限公司 一种被测板流向控制装置、方法及视觉检测设备
KR200488182Y1 (ko) * 2017-07-24 2018-12-24 주식회사 아이에스시 검사용 가압장치
CN109709463A (zh) * 2017-10-25 2019-05-03 泰克元有限公司 机械手
CN107953338B (zh) * 2017-12-29 2023-04-11 深圳市越疆科技有限公司 一种机器人分拣物品的方法、装置及机械臂
CN110244141B (zh) * 2018-03-09 2021-10-08 泰克元有限公司 电子部件测试用分选机
JP6976892B2 (ja) * 2018-03-29 2021-12-08 日本電産コパル電子株式会社 トルクセンサ

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6184675B1 (en) * 1996-11-18 2001-02-06 Advantest Corp. Horizontal transfer test handler
US6590383B2 (en) * 2000-06-23 2003-07-08 Advantest Corporation Contact arm and electronic device testing apparatus using the same

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100362528B1 (ko) * 1997-02-05 2002-11-23 에스엠씨 가부시키 가이샤 액츄에이터 및 그 제어장치
JP2000193716A (ja) * 1998-12-25 2000-07-14 Shinano Electronics:Kk Ｉｃテストハンドラ
JP2001133515A (ja) * 1999-11-09 2001-05-18 Nec Corp 半導体装置のテスト治具
JP4173306B2 (ja) * 2001-11-30 2008-10-29 東京エレクトロン株式会社 信頼性評価試験装置、信頼性評価試験システム及び信頼性評価試験方法
CN101258415B (zh) * 2006-10-04 2011-01-19 株式会社爱德万测试 电子部件试验装置
JP4803006B2 (ja) * 2006-11-29 2011-10-26 セイコーエプソン株式会社 Ｉｃハンドラ
KR20070121022A (ko) * 2007-10-26 2007-12-26 가부시키가이샤 아드반테스트 전자부품의 픽 ＆ 플레이스 기구, 전자부품 핸들링 장치 및전자부품의 흡착방법
KR20100061570A (ko) * 2007-11-26 2010-06-07 가부시키가이샤 아드반테스트 인서트, 트레이 및 전자부품 시험장치

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6184675B1 (en) * 1996-11-18 2001-02-06 Advantest Corp. Horizontal transfer test handler
US6590383B2 (en) * 2000-06-23 2003-07-08 Advantest Corporation Contact arm and electronic device testing apparatus using the same

Also Published As

Publication number Publication date
KR20130139814A (ko) 2013-12-23
TWI470244B (zh) 2015-01-21
KR20130023152A (ko) 2013-03-07
JP2013044684A (ja) 2013-03-04
CN102950114A (zh) 2013-03-06
CN102950114B (zh) 2015-09-09
TWI592673B (zh) 2017-07-21
CN103894347A (zh) 2014-07-02
KR101776360B1 (ko) 2017-09-07
TW201309575A (zh) 2013-03-01
CN103894347B (zh) 2016-06-22
KR101384928B1 (ko) 2014-04-14
TW201512065A (zh) 2015-04-01
TW201627216A (zh) 2016-08-01

Similar Documents

Publication Publication Date Title
TWI623475B (zh) 處置器、及零件檢查裝置
US9394128B2 (en) Transfer method, holding apparatus, and transfer system
TWI559008B (zh) 處理器及零件檢查裝置
JP6026340B2 (ja) 組付装置及び制御方法
KR20140100399A (ko) 기판 고정 장치, 기판 작업 장치 및 기판 고정 방법
JP5746440B2 (ja) 作業装置及び制御方法
KR101910354B1 (ko) 반도체 패키지의 트레이 자동교체장치
TWI460442B (zh) 處理器及零件檢查裝置
JP2008135577A (ja) プリント基板保持装置
TWI593980B (zh) Electronic components operating device and its application test classification equipment
CN111717674A (zh) 托盘输送装置及面板输送系统
JP2013044683A (ja) ハンドラー、及び部品検査装置
KR101642659B1 (ko) 반도체 칩 다이 본딩 장치
JP5223819B2 (ja) 基板固定装置及び電子部品実装装置
CN110018412B (zh) 搬运机构可调的基板检查装置
TW201714804A (zh) 吸夾式電子元件拾取器及其應用之作業設備
CN114604483B (zh) 上纸机
TWI575646B (zh) The monitoring unit of the electronic component moving mechanism and the operating equipment for its application
JP5178050B2 (ja) ワーク搬送方法及びワーク搬送装置。
KR20180087480A (ko) Pinted Circuit Board 검사 공정의 효율성 향상 장치
JPH08244949A (ja) 位置決め装置及びこれを含む作業ロボット装置

Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees