JP2013044684A - ハンドラー、及び部品検査装置 - Google Patents

ハンドラー、及び部品検査装置 Download PDF

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Publication number
JP2013044684A
JP2013044684A JP2011184058A JP2011184058A JP2013044684A JP 2013044684 A JP2013044684 A JP 2013044684A JP 2011184058 A JP2011184058 A JP 2011184058A JP 2011184058 A JP2011184058 A JP 2011184058A JP 2013044684 A JP2013044684 A JP 2013044684A
Authority
JP
Japan
Prior art keywords
pressing
motor
unit
pressure receiving
transport
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2011184058A
Other languages
English (en)
Japanese (ja)
Inventor
Soko Shimojima
聡興 下島
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Priority to JP2011184058A priority Critical patent/JP2013044684A/ja
Priority to CN201410112653.9A priority patent/CN103894347B/zh
Priority to CN201210265172.2A priority patent/CN102950114B/zh
Priority to TW101130289A priority patent/TWI470244B/zh
Priority to TW105109894A priority patent/TWI623475B/zh
Priority to TW103145832A priority patent/TWI592673B/zh
Priority to KR1020120092953A priority patent/KR101384928B1/ko
Publication of JP2013044684A publication Critical patent/JP2013044684A/ja
Priority to KR1020130147608A priority patent/KR101776360B1/ko
Withdrawn legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2855—Environmental, reliability or burn-in testing
    • G01R31/286—External aspects, e.g. related to chambers, contacting devices or handlers
    • G01R31/2865—Holding devices, e.g. chucks; Handlers or transport devices
    • G01R31/2867—Handlers or transport devices, e.g. loaders, carriers, trays
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26—Testing of individual semiconductor devices
    • G01R31/2601—Apparatus or methods therefor

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Environmental & Geological Engineering (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Engineering & Computer Science (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
JP2011184058A 2011-08-25 2011-08-25 ハンドラー、及び部品検査装置 Withdrawn JP2013044684A (ja)

Priority Applications (8)

Application Number Priority Date Filing Date Title
JP2011184058A JP2013044684A (ja) 2011-08-25 2011-08-25 ハンドラー、及び部品検査装置
CN201410112653.9A CN103894347B (zh) 2011-08-25 2012-07-27 分选机以及部件检查装置
CN201210265172.2A CN102950114B (zh) 2011-08-25 2012-07-27 分选机以及部件检查装置
TW101130289A TWI470244B (zh) 2011-08-25 2012-08-21 Disposers, and parts inspection devices
TW105109894A TWI623475B (zh) 2011-08-25 2012-08-21 處置器、及零件檢查裝置
TW103145832A TWI592673B (zh) 2011-08-25 2012-08-21 Disposer, and parts inspection device
KR1020120092953A KR101384928B1 (ko) 2011-08-25 2012-08-24 핸들러 및 부품 검사 장치
KR1020130147608A KR101776360B1 (ko) 2011-08-25 2013-11-29 핸들러 및 부품 검사 장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2011184058A JP2013044684A (ja) 2011-08-25 2011-08-25 ハンドラー、及び部品検査装置

Publications (1)

Publication Number Publication Date
JP2013044684A true JP2013044684A (ja) 2013-03-04

Family

ID=47759835

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011184058A Withdrawn JP2013044684A (ja) 2011-08-25 2011-08-25 ハンドラー、及び部品検査装置

Country Status (4)

Country Link
JP (1) JP2013044684A (ko)
KR (2) KR101384928B1 (ko)
CN (2) CN102950114B (ko)
TW (3) TWI623475B (ko)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015212676A (ja) * 2014-05-07 2015-11-26 株式会社 Ｓｙｎａｘ 電子部品測定用のコンタクトモジュール
CN106583275A (zh) * 2016-10-17 2017-04-26 珠海格力电器股份有限公司 一种被测板流向控制装置、方法及视觉检测设备

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI668174B (zh) * 2015-05-27 2019-08-11 日商精工愛普生股份有限公司 電子零件搬送裝置及電子零件檢查裝置
JP2017116369A (ja) * 2015-12-24 2017-06-29 セイコーエプソン株式会社 電子部品搬送装置および電子部品検査装置
JP2017151011A (ja) * 2016-02-26 2017-08-31 セイコーエプソン株式会社 電子部品搬送装置および電子部品検査装置
CN107176450A (zh) * 2016-03-09 2017-09-19 精工爱普生株式会社 电子部件运送装置、以及电子部件检查装置
JP2017173075A (ja) * 2016-03-23 2017-09-28 セイコーエプソン株式会社 電子部品搬送装置および電子部品検査装置
KR200488182Y1 (ko) * 2017-07-24 2018-12-24 주식회사 아이에스시 검사용 가압장치
CN109709463A (zh) * 2017-10-25 2019-05-03 泰克元有限公司 机械手
CN107953338B (zh) * 2017-12-29 2023-04-11 深圳市越疆科技有限公司 一种机器人分拣物品的方法、装置及机械臂
CN110244141B (zh) * 2018-03-09 2021-10-08 泰克元有限公司 电子部件测试用分选机
JP6976892B2 (ja) * 2018-03-29 2021-12-08 日本電産コパル電子株式会社 トルクセンサ

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3494828B2 (ja) * 1996-11-18 2004-02-09 株式会社アドバンテスト 水平搬送テストハンドラ
KR100362528B1 (ko) * 1997-02-05 2002-11-23 에스엠씨 가부시키 가이샤 액츄에이터 및 그 제어장치
JP2000193716A (ja) * 1998-12-25 2000-07-14 Shinano Electronics:Kk Ｉｃテストハンドラ
JP2001133515A (ja) * 1999-11-09 2001-05-18 Nec Corp 半導体装置のテスト治具
JP4327335B2 (ja) * 2000-06-23 2009-09-09 株式会社アドバンテスト コンタクトアームおよびこれを用いた電子部品試験装置
JP4173306B2 (ja) * 2001-11-30 2008-10-29 東京エレクトロン株式会社 信頼性評価試験装置、信頼性評価試験システム及び信頼性評価試験方法
CN101258415B (zh) * 2006-10-04 2011-01-19 株式会社爱德万测试 电子部件试验装置
JP4803006B2 (ja) * 2006-11-29 2011-10-26 セイコーエプソン株式会社 Ｉｃハンドラ
KR20070121022A (ko) * 2007-10-26 2007-12-26 가부시키가이샤 아드반테스트 전자부품의 픽 ＆ 플레이스 기구, 전자부품 핸들링 장치 및전자부품의 흡착방법
KR20100061570A (ko) * 2007-11-26 2010-06-07 가부시키가이샤 아드반테스트 인서트, 트레이 및 전자부품 시험장치

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015212676A (ja) * 2014-05-07 2015-11-26 株式会社 Ｓｙｎａｘ 電子部品測定用のコンタクトモジュール
TWI553322B (zh) * 2014-05-07 2016-10-11 賽納克股份有限公司 電子組件測量接觸模組
US10041996B2 (en) 2014-05-07 2018-08-07 Synax Co., Ltd. Contact module for electronic components measurement
CN106583275A (zh) * 2016-10-17 2017-04-26 珠海格力电器股份有限公司 一种被测板流向控制装置、方法及视觉检测设备

Also Published As

Publication number Publication date
KR20130139814A (ko) 2013-12-23
TWI470244B (zh) 2015-01-21
KR20130023152A (ko) 2013-03-07
CN102950114A (zh) 2013-03-06
CN102950114B (zh) 2015-09-09
TWI592673B (zh) 2017-07-21
CN103894347A (zh) 2014-07-02
KR101776360B1 (ko) 2017-09-07
TW201309575A (zh) 2013-03-01
CN103894347B (zh) 2016-06-22
TWI623475B (zh) 2018-05-11
KR101384928B1 (ko) 2014-04-14
TW201512065A (zh) 2015-04-01
TW201627216A (zh) 2016-08-01

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