TWI622715B - Hydrostatic gas bearing unit - Google Patents

Hydrostatic gas bearing unit Download PDF

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Publication number
TWI622715B
TWI622715B TW102123628A TW102123628A TWI622715B TW I622715 B TWI622715 B TW I622715B TW 102123628 A TW102123628 A TW 102123628A TW 102123628 A TW102123628 A TW 102123628A TW I622715 B TWI622715 B TW I622715B
Authority
TW
Taiwan
Prior art keywords
bearing
shaft
axial
radial bearing
radial
Prior art date
Application number
TW102123628A
Other languages
English (en)
Chinese (zh)
Other versions
TW201420907A (zh
Inventor
Satoshi Ueda
Original Assignee
Oiles Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oiles Industry Co Ltd filed Critical Oiles Industry Co Ltd
Publication of TW201420907A publication Critical patent/TW201420907A/zh
Application granted granted Critical
Publication of TWI622715B publication Critical patent/TWI622715B/zh

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
    • F16C32/0603—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion
    • F16C32/0614—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion the gas being supplied under pressure, e.g. aerostatic bearings
    • F16C32/0618—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion the gas being supplied under pressure, e.g. aerostatic bearings via porous material
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
    • F16C32/0603—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion
    • F16C32/0614—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion the gas being supplied under pressure, e.g. aerostatic bearings
    • F16C32/0622—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion the gas being supplied under pressure, e.g. aerostatic bearings via nozzles, restrictors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
    • F16C32/0681—Construction or mounting aspects of hydrostatic bearings, for exclusively rotary movement, related to the direction of load
    • F16C32/0685—Construction or mounting aspects of hydrostatic bearings, for exclusively rotary movement, related to the direction of load for radial load only
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
    • F16C32/0681—Construction or mounting aspects of hydrostatic bearings, for exclusively rotary movement, related to the direction of load
    • F16C32/0696—Construction or mounting aspects of hydrostatic bearings, for exclusively rotary movement, related to the direction of load for both radial and axial load

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Dispersion Chemistry (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)
TW102123628A 2012-08-10 2013-07-02 Hydrostatic gas bearing unit TWI622715B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012178123A JP2014035054A (ja) 2012-08-10 2012-08-10 静圧気体軸受ユニット

Publications (2)

Publication Number Publication Date
TW201420907A TW201420907A (zh) 2014-06-01
TWI622715B true TWI622715B (zh) 2018-05-01

Family

ID=50067900

Family Applications (1)

Application Number Title Priority Date Filing Date
TW102123628A TWI622715B (zh) 2012-08-10 2013-07-02 Hydrostatic gas bearing unit

Country Status (5)

Country Link
JP (1) JP2014035054A (enExample)
KR (1) KR20150038502A (enExample)
CN (1) CN104541077B (enExample)
TW (1) TWI622715B (enExample)
WO (1) WO2014024666A1 (enExample)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104614137B (zh) * 2015-01-15 2016-08-31 浙江大学 基于静压气浮解耦装置的三分量标准振动台
DE102015010875B9 (de) * 2015-08-25 2016-12-29 Thermo Electron (Karlsruhe) Gmbh Rheometer mit Gaslager
DE112016007136T8 (de) 2016-08-10 2019-05-09 Kokusai Keisokuki Kabushiki Kaisha Dynamische Auswuchtprüfvorrichtung
CN109955097B (zh) * 2017-12-22 2020-09-01 上海理工大学 一种静压半球体轴承轴系及精密机床
US11067124B2 (en) * 2018-07-23 2021-07-20 Alio Industries, Inc. Planar rotary air bearing stage
CN111285031B (zh) * 2020-03-11 2021-09-14 上海精测半导体技术有限公司 一种旋转台
CN111637159A (zh) * 2020-05-18 2020-09-08 哈尔滨工程大学 一种带有加压孔的自适应强制润滑轴承
CN111637160B (zh) * 2020-05-18 2021-11-05 哈尔滨工程大学 一种带有不均匀孔径的强制润滑轴承
CN111637161B (zh) * 2020-05-18 2021-11-09 哈尔滨工程大学 一种带有分布式孔隙的强制润滑轴承

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03292413A (ja) * 1990-04-06 1991-12-24 Nippon Seiko Kk 多孔質体軸受ユニット
JPH11257467A (ja) * 1998-03-06 1999-09-21 Fujiwara:Kk プーリー
JP2000072330A (ja) * 1998-08-31 2000-03-07 Kyocera Corp 糸状体のガイドローラ
US20060182374A1 (en) * 2005-02-17 2006-08-17 Stefan Schwamberger Fluid dynamic air bearing system to rotatably support a motor

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5026251U (enExample) * 1973-07-02 1975-03-26
JPH0547543U (ja) * 1991-11-29 1993-06-25 豊田工機株式会社 回転装置
JP3653832B2 (ja) * 1995-12-06 2005-06-02 日本精工株式会社 静圧気体軸受式回転案内装置
JP5812316B2 (ja) * 2010-10-29 2015-11-11 オイレス工業株式会社 ロール装置
JP5851780B2 (ja) * 2011-09-26 2016-02-03 オイレス工業株式会社 エアベアリングユニット

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03292413A (ja) * 1990-04-06 1991-12-24 Nippon Seiko Kk 多孔質体軸受ユニット
JPH11257467A (ja) * 1998-03-06 1999-09-21 Fujiwara:Kk プーリー
JP2000072330A (ja) * 1998-08-31 2000-03-07 Kyocera Corp 糸状体のガイドローラ
US20060182374A1 (en) * 2005-02-17 2006-08-17 Stefan Schwamberger Fluid dynamic air bearing system to rotatably support a motor

Also Published As

Publication number Publication date
KR20150038502A (ko) 2015-04-08
JP2014035054A (ja) 2014-02-24
CN104541077A (zh) 2015-04-22
CN104541077B (zh) 2018-05-08
WO2014024666A1 (ja) 2014-02-13
TW201420907A (zh) 2014-06-01

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