KR20150038502A - 정압 기체 베어링 유닛 - Google Patents

정압 기체 베어링 유닛 Download PDF

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Publication number
KR20150038502A
KR20150038502A KR20157005284A KR20157005284A KR20150038502A KR 20150038502 A KR20150038502 A KR 20150038502A KR 20157005284 A KR20157005284 A KR 20157005284A KR 20157005284 A KR20157005284 A KR 20157005284A KR 20150038502 A KR20150038502 A KR 20150038502A
Authority
KR
South Korea
Prior art keywords
shaft
radial bearing
thrust
bearing
air
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
KR20157005284A
Other languages
English (en)
Korean (ko)
Inventor
사토시 우에다
Original Assignee
오일레스고교 가부시키가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 오일레스고교 가부시키가이샤 filed Critical 오일레스고교 가부시키가이샤
Publication of KR20150038502A publication Critical patent/KR20150038502A/ko
Ceased legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
    • F16C32/0603—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion
    • F16C32/0614—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion the gas being supplied under pressure, e.g. aerostatic bearings
    • F16C32/0618—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion the gas being supplied under pressure, e.g. aerostatic bearings via porous material
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
    • F16C32/0603—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion
    • F16C32/0614—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion the gas being supplied under pressure, e.g. aerostatic bearings
    • F16C32/0622—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion the gas being supplied under pressure, e.g. aerostatic bearings via nozzles, restrictors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
    • F16C32/0681—Construction or mounting aspects of hydrostatic bearings, for exclusively rotary movement, related to the direction of load
    • F16C32/0685—Construction or mounting aspects of hydrostatic bearings, for exclusively rotary movement, related to the direction of load for radial load only
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
    • F16C32/0681—Construction or mounting aspects of hydrostatic bearings, for exclusively rotary movement, related to the direction of load
    • F16C32/0696—Construction or mounting aspects of hydrostatic bearings, for exclusively rotary movement, related to the direction of load for both radial and axial load
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2300/00—Application independent of particular apparatuses
    • F16C2300/20—Application independent of particular apparatuses related to type of movement
    • F16C2300/22—High-speed rotation

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Dispersion Chemistry (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)
KR20157005284A 2012-08-10 2013-07-22 정압 기체 베어링 유닛 Ceased KR20150038502A (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2012178123A JP2014035054A (ja) 2012-08-10 2012-08-10 静圧気体軸受ユニット
JPJP-P-2012-178123 2012-08-10
PCT/JP2013/069767 WO2014024666A1 (ja) 2012-08-10 2013-07-22 静圧気体軸受ユニット

Publications (1)

Publication Number Publication Date
KR20150038502A true KR20150038502A (ko) 2015-04-08

Family

ID=50067900

Family Applications (1)

Application Number Title Priority Date Filing Date
KR20157005284A Ceased KR20150038502A (ko) 2012-08-10 2013-07-22 정압 기체 베어링 유닛

Country Status (5)

Country Link
JP (1) JP2014035054A (enExample)
KR (1) KR20150038502A (enExample)
CN (1) CN104541077B (enExample)
TW (1) TWI622715B (enExample)
WO (1) WO2014024666A1 (enExample)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104614137B (zh) * 2015-01-15 2016-08-31 浙江大学 基于静压气浮解耦装置的三分量标准振动台
DE102015010875B9 (de) * 2015-08-25 2016-12-29 Thermo Electron (Karlsruhe) Gmbh Rheometer mit Gaslager
CN113176037B (zh) 2016-08-10 2024-12-24 国际计测器株式会社 动平衡测试机
CN109955097B (zh) * 2017-12-22 2020-09-01 上海理工大学 一种静压半球体轴承轴系及精密机床
US11067124B2 (en) * 2018-07-23 2021-07-20 Alio Industries, Inc. Planar rotary air bearing stage
CN111285031B (zh) * 2020-03-11 2021-09-14 上海精测半导体技术有限公司 一种旋转台
CN111637161B (zh) * 2020-05-18 2021-11-09 哈尔滨工程大学 一种带有分布式孔隙的强制润滑轴承
CN111637160B (zh) * 2020-05-18 2021-11-05 哈尔滨工程大学 一种带有不均匀孔径的强制润滑轴承
CN111637159A (zh) * 2020-05-18 2020-09-08 哈尔滨工程大学 一种带有加压孔的自适应强制润滑轴承

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5026251U (enExample) * 1973-07-02 1975-03-26
JPH03292413A (ja) * 1990-04-06 1991-12-24 Nippon Seiko Kk 多孔質体軸受ユニット
JPH0547543U (ja) * 1991-11-29 1993-06-25 豊田工機株式会社 回転装置
JP3653832B2 (ja) * 1995-12-06 2005-06-02 日本精工株式会社 静圧気体軸受式回転案内装置
JPH11257467A (ja) * 1998-03-06 1999-09-21 Fujiwara:Kk プーリー
JP3667108B2 (ja) * 1998-08-31 2005-07-06 京セラ株式会社 糸状体のガイドローラ
DE102005007297B4 (de) * 2005-02-17 2007-05-31 Minebea Co., Ltd. Fluiddynamisches Luftlagersystem zur Drehlagerung eines Motors
JP5812316B2 (ja) * 2010-10-29 2015-11-11 オイレス工業株式会社 ロール装置
JP5851780B2 (ja) * 2011-09-26 2016-02-03 オイレス工業株式会社 エアベアリングユニット

Also Published As

Publication number Publication date
JP2014035054A (ja) 2014-02-24
CN104541077B (zh) 2018-05-08
TW201420907A (zh) 2014-06-01
TWI622715B (zh) 2018-05-01
WO2014024666A1 (ja) 2014-02-13
CN104541077A (zh) 2015-04-22

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