TWI593839B - 用於晶體生長裝置之加熱器組件 - Google Patents
用於晶體生長裝置之加熱器組件 Download PDFInfo
- Publication number
- TWI593839B TWI593839B TW101117525A TW101117525A TWI593839B TW I593839 B TWI593839 B TW I593839B TW 101117525 A TW101117525 A TW 101117525A TW 101117525 A TW101117525 A TW 101117525A TW I593839 B TWI593839 B TW I593839B
- Authority
- TW
- Taiwan
- Prior art keywords
- heating element
- heating
- crucible
- crystal growth
- growth apparatus
- Prior art date
Links
- 239000013078 crystal Substances 0.000 title claims description 50
- 238000010438 heat treatment Methods 0.000 claims description 195
- 239000000463 material Substances 0.000 claims description 59
- 239000002994 raw material Substances 0.000 claims description 20
- 238000002844 melting Methods 0.000 claims description 8
- 238000000034 method Methods 0.000 claims description 8
- 230000008018 melting Effects 0.000 claims description 7
- 239000000203 mixture Substances 0.000 claims description 2
- 238000009826 distribution Methods 0.000 description 22
- 229910052715 tantalum Inorganic materials 0.000 description 10
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 10
- 230000007246 mechanism Effects 0.000 description 9
- 238000007711 solidification Methods 0.000 description 8
- 230000008023 solidification Effects 0.000 description 8
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 7
- 229910002804 graphite Inorganic materials 0.000 description 7
- 239000010439 graphite Substances 0.000 description 7
- 238000004519 manufacturing process Methods 0.000 description 6
- 239000007787 solid Substances 0.000 description 6
- NFFIWVVINABMKP-UHFFFAOYSA-N methylidynetantalum Chemical compound [Ta]#C NFFIWVVINABMKP-UHFFFAOYSA-N 0.000 description 5
- 229910003468 tantalcarbide Inorganic materials 0.000 description 5
- MZLGASXMSKOWSE-UHFFFAOYSA-N tantalum nitride Chemical compound [Ta]#N MZLGASXMSKOWSE-UHFFFAOYSA-N 0.000 description 5
- 238000006243 chemical reaction Methods 0.000 description 4
- 229910052734 helium Inorganic materials 0.000 description 4
- 239000001307 helium Substances 0.000 description 4
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 4
- 230000008569 process Effects 0.000 description 4
- 229910000420 cerium oxide Inorganic materials 0.000 description 3
- 239000002178 crystalline material Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 239000003779 heat-resistant material Substances 0.000 description 3
- 230000001939 inductive effect Effects 0.000 description 3
- 238000009413 insulation Methods 0.000 description 3
- BMMGVYCKOGBVEV-UHFFFAOYSA-N oxo(oxoceriooxy)cerium Chemical compound [Ce]=O.O=[Ce]=O BMMGVYCKOGBVEV-UHFFFAOYSA-N 0.000 description 3
- 230000001737 promoting effect Effects 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 229910052582 BN Inorganic materials 0.000 description 2
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 description 2
- 229910052684 Cerium Inorganic materials 0.000 description 2
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 description 2
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
- GWXLDORMOJMVQZ-UHFFFAOYSA-N cerium Chemical compound [Ce] GWXLDORMOJMVQZ-UHFFFAOYSA-N 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 238000005336 cracking Methods 0.000 description 2
- 230000009977 dual effect Effects 0.000 description 2
- -1 for example Substances 0.000 description 2
- 239000011810 insulating material Substances 0.000 description 2
- 239000000155 melt Substances 0.000 description 2
- 229910052750 molybdenum Inorganic materials 0.000 description 2
- 239000011733 molybdenum Substances 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- 229910052707 ruthenium Inorganic materials 0.000 description 2
- WOCIAKWEIIZHES-UHFFFAOYSA-N ruthenium(iv) oxide Chemical compound O=[Ru]=O WOCIAKWEIIZHES-UHFFFAOYSA-N 0.000 description 2
- 239000007858 starting material Substances 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000005266 casting Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 239000000109 continuous material Substances 0.000 description 1
- 239000000110 cooling liquid Substances 0.000 description 1
- 238000002425 crystallisation Methods 0.000 description 1
- 230000008025 crystallization Effects 0.000 description 1
- 238000013500 data storage Methods 0.000 description 1
- NQKXFODBPINZFK-UHFFFAOYSA-N dioxotantalum Chemical group O=[Ta]=O NQKXFODBPINZFK-UHFFFAOYSA-N 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000010309 melting process Methods 0.000 description 1
- 229910001092 metal group alloy Inorganic materials 0.000 description 1
- 239000012768 molten material Substances 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B11/00—Single-crystal growth by normal freezing or freezing under temperature gradient, e.g. Bridgman-Stockbarger method
- C30B11/003—Heating or cooling of the melt or the crystallised material
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/14—Heating of the melt or the crystallised materials
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27B—FURNACES, KILNS, OVENS OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
- F27B14/00—Crucible or pot furnaces
- F27B14/08—Details specially adapted for crucible or pot furnaces
- F27B14/14—Arrangements of heating devices
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D11/00—Arrangement of elements for electric heating in or on furnaces
- F27D11/02—Ohmic resistance heating
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D99/00—Subject matter not provided for in other groups of this subclass
- F27D99/0001—Heating elements or systems
- F27D99/0006—Electric heating elements or system
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Metallurgy (AREA)
- Materials Engineering (AREA)
- Crystallography & Structural Chemistry (AREA)
- Organic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Silicon Compounds (AREA)
- Furnace Details (AREA)
- Crucibles And Fluidized-Bed Furnaces (AREA)
- Waste-Gas Treatment And Other Accessory Devices For Furnaces (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201161493804P | 2011-06-06 | 2011-06-06 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW201305399A TW201305399A (zh) | 2013-02-01 |
| TWI593839B true TWI593839B (zh) | 2017-08-01 |
Family
ID=47292263
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW101117525A TWI593839B (zh) | 2011-06-06 | 2012-05-17 | 用於晶體生長裝置之加熱器組件 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US9303331B2 (enExample) |
| JP (1) | JP6013467B2 (enExample) |
| KR (1) | KR101909439B1 (enExample) |
| CN (1) | CN103703170B (enExample) |
| TW (1) | TWI593839B (enExample) |
| WO (1) | WO2012170124A2 (enExample) |
Families Citing this family (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101070608B (zh) * | 2006-12-29 | 2010-06-23 | 嘉兴学院 | 旋转多坩埚下降法晶体生长系统 |
| KR101263082B1 (ko) * | 2010-11-15 | 2013-05-09 | 주식회사 엘지실트론 | 사파이어 잉곳 성장장치 |
| CN103374758B (zh) * | 2012-04-25 | 2016-03-02 | 志圣科技（广州）有限公司 | 晶体生长加热系统 |
| KR20160000956U (ko) * | 2013-07-15 | 2016-03-23 | 그라프텍 인터내셔널 홀딩스 인코포레이티드 | 실리콘 결정 생산 장치 |
| CN105379415A (zh) * | 2013-07-15 | 2016-03-02 | 莫门蒂夫性能材料股份有限公司 | 带涂层的石墨加热器构造 |
| CN103741212A (zh) * | 2013-12-19 | 2014-04-23 | 镇江环太硅科技有限公司 | 长晶炉及长晶炉热场的控制方法 |
| US10658222B2 (en) | 2015-01-16 | 2020-05-19 | Lam Research Corporation | Moveable edge coupling ring for edge process control during semiconductor wafer processing |
| CN104880069B (zh) * | 2015-05-27 | 2016-10-26 | 海南大学 | 一种防热散失烧结炉 |
| CN104962864B (zh) * | 2015-07-23 | 2017-11-10 | 京东方科技集团股份有限公司 | 坩埚装置和蒸镀设备 |
| KR101639627B1 (ko) * | 2015-09-07 | 2016-07-14 | 에스엠엔티 주식회사 | 도가니 지지체를 이용한 사파이어 단결정 성장장치 및 이를 이용한 사파이어 단결정 성장방법 |
| US10237921B2 (en) | 2016-03-18 | 2019-03-19 | Momentive Performance Materials Inc. | Cylindrical heater |
| CN118380374A (zh) | 2017-11-21 | 2024-07-23 | 朗姆研究公司 | 底部边缘环和中部边缘环 |
| US10724796B2 (en) | 2018-05-24 | 2020-07-28 | Silfex, Inc | Furnace for casting near-net shape (NNS) silicon |
| US11127572B2 (en) | 2018-08-07 | 2021-09-21 | Silfex, Inc. | L-shaped plasma confinement ring for plasma chambers |
| CN115315775A (zh) | 2020-03-23 | 2022-11-08 | 朗姆研究公司 | 衬底处理系统中的中环腐蚀补偿 |
| CN112279260B (zh) * | 2020-10-30 | 2024-08-16 | 江苏先导微电子科技有限公司 | 一种高纯硼晶体和高纯硼粉的制备装置 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6652649B1 (en) * | 1999-06-29 | 2003-11-25 | Act Optics & Engineering, Inc. | Supplemental heating unit for crystal growth furnace |
Family Cites Families (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2599482B1 (fr) * | 1986-06-03 | 1988-07-29 | Commissariat Energie Atomique | Four de fusion a induction haute frequence |
| JPH02116696A (ja) * | 1988-10-19 | 1990-05-01 | Gos N I I Proekt Inst Redkometallicheskoj Prom | 石英るつぼを強化するためのシェル |
| JP2987799B2 (ja) * | 1996-03-01 | 1999-12-06 | 住友金属工業株式会社 | 単結晶引上げ装置 |
| JP2956575B2 (ja) * | 1996-03-01 | 1999-10-04 | 住友金属工業株式会社 | 単結晶育成用抵抗発熱体 |
| JPH10167876A (ja) * | 1996-11-29 | 1998-06-23 | Super Silicon Kenkyusho:Kk | Ｃｚ結晶製造装置 |
| JP3775776B2 (ja) * | 1999-09-20 | 2006-05-17 | ユニオンマテリアル株式会社 | 単結晶の製造方法 |
| US6285011B1 (en) * | 1999-10-12 | 2001-09-04 | Memc Electronic Materials, Inc. | Electrical resistance heater for crystal growing apparatus |
| JP3861548B2 (ja) * | 2000-02-15 | 2006-12-20 | 株式会社Ｓｕｍｃｏ | カーボンヒータ |
| WO2002027076A1 (fr) * | 2000-09-26 | 2002-04-04 | Shin-Etsu Handotai Co.,Ltd. | Appareil et procede de production d'un mono-cristal semi-conducteur |
| JP2005053722A (ja) * | 2003-08-01 | 2005-03-03 | Shin Etsu Handotai Co Ltd | 単結晶製造装置及び単結晶の製造方法 |
| US20050061804A1 (en) * | 2003-09-22 | 2005-03-24 | Norman Golm | Induction flux concentrator utilized for forming heat exchangers |
| CN2848884Y (zh) * | 2005-12-21 | 2006-12-20 | 北京有色金属研究总院 | 一种热场中心轴线对称的装置 |
| DE102006017621B4 (de) * | 2006-04-12 | 2008-12-24 | Schott Ag | Vorrichtung und Verfahren zur Herstellung von multikristallinem Silizium |
| TW200932963A (en) * | 2008-01-29 | 2009-08-01 | Green Energy Technology Inc | Crystal growing furnace with heating improvement structure |
| CN101498038B (zh) * | 2008-01-31 | 2011-11-02 | 绿能科技股份有限公司 | 具有加热改良构造的长晶炉 |
| TW200949027A (en) * | 2008-03-19 | 2009-12-01 | Gt Solar Inc | System and method for arranging heating element in crystal growth apparatus |
| JP5167960B2 (ja) * | 2008-06-04 | 2013-03-21 | 株式会社Ｓｕｍｃｏ | シリコン単結晶の育成装置 |
| TW201012978A (en) * | 2008-08-27 | 2010-04-01 | Bp Corp North America Inc | Apparatus and method of use for a casting system with independent melting and solidification |
-
2012
- 2012-05-01 KR KR1020147000249A patent/KR101909439B1/ko active Active
- 2012-05-01 CN CN201280034180.4A patent/CN103703170B/zh active Active
- 2012-05-01 WO PCT/US2012/035970 patent/WO2012170124A2/en not_active Ceased
- 2012-05-01 JP JP2014514457A patent/JP6013467B2/ja not_active Expired - Fee Related
- 2012-05-17 TW TW101117525A patent/TWI593839B/zh active
- 2012-06-06 US US13/489,675 patent/US9303331B2/en active Active
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6652649B1 (en) * | 1999-06-29 | 2003-11-25 | Act Optics & Engineering, Inc. | Supplemental heating unit for crystal growth furnace |
Also Published As
| Publication number | Publication date |
|---|---|
| KR20140039031A (ko) | 2014-03-31 |
| WO2012170124A3 (en) | 2013-05-02 |
| WO2012170124A2 (en) | 2012-12-13 |
| CN103703170B (zh) | 2017-04-26 |
| JP6013467B2 (ja) | 2016-10-25 |
| JP2014522371A (ja) | 2014-09-04 |
| TW201305399A (zh) | 2013-02-01 |
| US9303331B2 (en) | 2016-04-05 |
| US20120312800A1 (en) | 2012-12-13 |
| CN103703170A (zh) | 2014-04-02 |
| KR101909439B1 (ko) | 2018-10-18 |
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