TWI581472B - 壓電材料、壓電元件、及電子裝置 - Google Patents
壓電材料、壓電元件、及電子裝置 Download PDFInfo
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- TWI581472B TWI581472B TW102137323A TW102137323A TWI581472B TW I581472 B TWI581472 B TW I581472B TW 102137323 A TW102137323 A TW 102137323A TW 102137323 A TW102137323 A TW 102137323A TW I581472 B TWI581472 B TW I581472B
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- piezoelectric
- piezoelectric material
- piezoelectric element
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- 239000012780 transparent material Substances 0.000 description 1
- 238000003826 uniaxial pressing Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/85—Piezoelectric or electrostrictive active materials
- H10N30/853—Ceramic compositions
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
- B08B7/02—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by distortion, beating, or vibration of the surface to be cleaned
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14201—Structure of print heads with piezoelectric elements
- B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
-
- B—PERFORMING OPERATIONS; TRANSPORTING
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- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14201—Structure of print heads with piezoelectric elements
- B41J2/14274—Structure of print heads with piezoelectric elements of stacked structure type, deformed by compression/extension and disposed on a diaphragm
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/01—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
- C04B35/46—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on titanium oxides or titanates
- C04B35/462—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on titanium oxides or titanates based on titanates
- C04B35/465—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on titanium oxides or titanates based on titanates based on alkaline earth metal titanates
- C04B35/468—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on titanium oxides or titanates based on titanates based on alkaline earth metal titanates based on barium titanates
- C04B35/4682—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on titanium oxides or titanates based on titanates based on alkaline earth metal titanates based on barium titanates based on BaTiO3 perovskite phase
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/0006—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 with means to keep optical surfaces clean, e.g. by preventing or removing dirt, stains, contamination, condensation
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
- H02N2/106—Langevin motors
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
- H02N2/16—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors using travelling waves, i.e. Rayleigh surface waves
- H02N2/163—Motors with ring stator
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N23/00—Cameras or camera modules comprising electronic image sensors; Control thereof
- H04N23/50—Constructional details
- H04N23/55—Optical parts specially adapted for electronic image sensors; Mounting thereof
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/01—Manufacture or treatment
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
- H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
- H10N30/2047—Membrane type
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- H—ELECTRICITY
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- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/85—Piezoelectric or electrostrictive active materials
- H10N30/853—Ceramic compositions
- H10N30/8536—Alkaline earth metal based oxides, e.g. barium titanates
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
- B41J2202/01—Embodiments of or processes related to ink-jet heads
- B41J2202/03—Specific materials used
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/30—Constituents and secondary phases not being of a fibrous nature
- C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
- C04B2235/3205—Alkaline earth oxides or oxide forming salts thereof, e.g. beryllium oxide
- C04B2235/3206—Magnesium oxides or oxide-forming salts thereof
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- C04B2235/5418—Particle size related information expressed by the size of the particles or aggregates thereof
- C04B2235/5445—Particle size related information expressed by the size of the particles or aggregates thereof submicron sized, i.e. from 0,1 to 1 micron
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- Signal Processing (AREA)
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- Compositions Of Oxide Ceramics (AREA)
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
- Lens Barrels (AREA)
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- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Applications Claiming Priority (1)
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| JP2012242894 | 2012-11-02 |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| EP2936576B1 (en) * | 2012-12-21 | 2017-03-15 | Canon Kabushiki Kaisha | Vibration wave driving device, image pickup device, optical apparatus, liquid discharge device, and electronic apparatus |
| EP2953177B1 (en) | 2014-05-30 | 2017-01-25 | Canon Kabushiki Kaisha | Piezoelectric material, piezoelectric element, and electronic device |
| JP6700793B2 (ja) * | 2015-01-09 | 2020-05-27 | キヤノン株式会社 | 圧電材料、圧電素子、およびこれを用いた装置 |
| JP6643089B2 (ja) * | 2015-01-09 | 2020-02-12 | キヤノン株式会社 | 圧電材料、圧電素子、およびこれを用いた装置 |
| WO2017082049A1 (ja) * | 2015-11-11 | 2017-05-18 | コニカミノルタ株式会社 | インクジェットヘッドおよびその製造方法、ならびにインクジェット記録装置 |
| WO2017164413A1 (en) * | 2016-03-25 | 2017-09-28 | Canon Kabushiki Kaisha | Method of manufacturing an oscillator, method of manufacturing an oscillatory wave driving apparatus, and method of manufacturing an optical apparatus |
| JP7012430B2 (ja) * | 2016-12-21 | 2022-01-28 | 東芝テック株式会社 | 薬液吐出装置と薬液滴下装置 |
| CN120652647B (zh) * | 2024-12-05 | 2025-10-17 | 宁波舜宇光电信息有限公司 | 一种驱动装置及其摄像模组 |
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| US4988468A (en) * | 1987-01-08 | 1991-01-29 | Murata Manufacturing Co., Ltd. | Method for producing non-reducible dielectric ceramic composition |
| US20090128989A1 (en) * | 2006-07-07 | 2009-05-21 | Murata Manufacturing Co., Ltd. | Dielectric ceramic, ceramic electronic element, and multilayer ceramic capacitor |
| TW201038505A (en) * | 2009-03-12 | 2010-11-01 | Hanwha Chemical Corp | Fine barium titanate based composite oxide |
| TW201217301A (en) * | 2010-03-23 | 2012-05-01 | Tdk Corp | Piezoelectric ceramic composition, piezoelectric device and resonator |
| WO2012070667A1 (en) * | 2010-11-26 | 2012-05-31 | Canon Kabushiki Kaisha | Piezoelectric ceramic, method for making the same, piezoelectric element, liquid discharge head, ultrasonic motor, and dust cleaner |
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| EP1378922B1 (en) | 2001-04-12 | 2009-07-15 | TDK Corporation | Production method of multilayer ceramic electronic device |
| JP4967964B2 (ja) * | 2007-09-28 | 2012-07-04 | Ｔｄｋ株式会社 | 誘電体磁器組成物および積層型電子部品 |
| JP5344456B2 (ja) | 2008-03-11 | 2013-11-20 | 独立行政法人物質・材料研究機構 | 非鉛系圧電材料 |
| JP5217997B2 (ja) * | 2008-10-20 | 2013-06-19 | Ｔｄｋ株式会社 | 圧電磁器、振動子及び超音波モータ |
| JP2011032111A (ja) | 2009-07-30 | 2011-02-17 | Seiko Epson Corp | セラミックス組成物およびその製造方法、圧電アクチュエーター、液体噴射ヘッドならびに液体噴射装置 |
| JP2011181828A (ja) | 2010-03-03 | 2011-09-15 | Fujifilm Corp | 圧電体膜とその製造方法、圧電素子および液体吐出装置 |
| JP5418323B2 (ja) * | 2010-03-15 | 2014-02-19 | Ｔｄｋ株式会社 | 誘電体磁器組成物および電子部品 |
| CN101935212A (zh) | 2010-09-09 | 2011-01-05 | 西北工业大学 | 一种锆钛酸钡钙无铅压电陶瓷及其制备方法 |
| JP6004640B2 (ja) * | 2011-01-07 | 2016-10-12 | キヤノン株式会社 | 圧電素子、液体吐出ヘッド、超音波モータ、塵埃除去装置、およびデバイス |
| EP2730020B1 (en) * | 2011-07-05 | 2017-11-01 | Canon Kabushiki Kaisha | Piezoelectric element, multilayered piezoelectric element, liquid discharge head, liquid discharge apparatus, ultrasonic motor, optical apparatus, and electronic apparatus |
| US9515249B2 (en) * | 2011-07-05 | 2016-12-06 | Canon Kabushiki Kaisha | Piezoelectric material |
| JP6381294B2 (ja) * | 2013-07-12 | 2018-08-29 | キヤノン株式会社 | 圧電材料、圧電素子、および電子機器 |
| JP2015135957A (ja) * | 2013-12-18 | 2015-07-27 | キヤノン株式会社 | 圧電素子、積層圧電素子、液体吐出装置、超音波モータ |
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2013
- 2013-10-16 TW TW102137323A patent/TWI581472B/zh not_active IP Right Cessation
- 2013-10-17 EP EP13004974.5A patent/EP2728634B1/en active Active
- 2013-10-30 US US14/066,992 patent/US9755136B2/en not_active Expired - Fee Related
- 2013-10-30 JP JP2013225498A patent/JP6271949B2/ja active Active
- 2013-11-01 KR KR1020130131959A patent/KR20140057178A/ko not_active Ceased
- 2013-11-01 CN CN201310533629.8A patent/CN103803975A/zh active Pending
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| US4988468A (en) * | 1987-01-08 | 1991-01-29 | Murata Manufacturing Co., Ltd. | Method for producing non-reducible dielectric ceramic composition |
| US20090128989A1 (en) * | 2006-07-07 | 2009-05-21 | Murata Manufacturing Co., Ltd. | Dielectric ceramic, ceramic electronic element, and multilayer ceramic capacitor |
| TW201038505A (en) * | 2009-03-12 | 2010-11-01 | Hanwha Chemical Corp | Fine barium titanate based composite oxide |
| TW201217301A (en) * | 2010-03-23 | 2012-05-01 | Tdk Corp | Piezoelectric ceramic composition, piezoelectric device and resonator |
| WO2012070667A1 (en) * | 2010-11-26 | 2012-05-31 | Canon Kabushiki Kaisha | Piezoelectric ceramic, method for making the same, piezoelectric element, liquid discharge head, ultrasonic motor, and dust cleaner |
Also Published As
| Publication number | Publication date |
|---|---|
| CN103803975A (zh) | 2014-05-21 |
| JP2014111522A (ja) | 2014-06-19 |
| EP2728634A3 (en) | 2017-08-02 |
| KR20140057178A (ko) | 2014-05-12 |
| TW201419595A (zh) | 2014-05-16 |
| US20140124695A1 (en) | 2014-05-08 |
| US9755136B2 (en) | 2017-09-05 |
| JP6271949B2 (ja) | 2018-01-31 |
| EP2728634B1 (en) | 2018-10-03 |
| EP2728634A2 (en) | 2014-05-07 |
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