TWI573675B - 振動控制的基板傳送機械臂、系統及方法 - Google Patents

振動控制的基板傳送機械臂、系統及方法 Download PDF

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Publication number
TWI573675B
TWI573675B TW102142889A TW102142889A TWI573675B TW I573675 B TWI573675 B TW I573675B TW 102142889 A TW102142889 A TW 102142889A TW 102142889 A TW102142889 A TW 102142889A TW I573675 B TWI573675 B TW I573675B
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TW
Taiwan
Prior art keywords
vibration
substrate
end effector
sensor
arm
Prior art date
Application number
TW102142889A
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English (en)
Chinese (zh)
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TW201429653A (zh
Inventor
馬利尼爾
明柯維奇艾力克斯
哈德俊傑佛利Ｃ
堤爾布藍登
Original Assignee
應用材料股份有限公司
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Application filed by 應用材料股份有限公司 filed Critical 應用材料股份有限公司
Publication of TW201429653A publication Critical patent/TW201429653A/zh
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Publication of TWI573675B publication Critical patent/TWI573675B/zh

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Program-controlled manipulators
    • B25J9/16—Program controls
    • B25J9/1628—Program controls characterised by the control loop
    • B25J9/1653—Program controls characterised by the control loop parameters identification, estimation, stiffness, accuracy, error analysis
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J19/00—Accessories fitted to manipulators, e.g. for monitoring, for viewing; Safety devices combined with or specially adapted for use in connection with manipulators
    • B25J19/02—Sensing devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations

Landscapes

  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Manipulator (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
TW102142889A 2012-11-30 2013-11-25 振動控制的基板傳送機械臂、系統及方法 TWI573675B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US201261731816P 2012-11-30 2012-11-30

Publications (2)

Publication Number Publication Date
TW201429653A TW201429653A (zh) 2014-08-01
TWI573675B true TWI573675B (zh) 2017-03-11

Family

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TW102142889A TWI573675B (zh) 2012-11-30 2013-11-25 振動控制的基板傳送機械臂、系統及方法

Country Status (6)

Country Link
US (1) US9296105B2 (enExample)
JP (1) JP6254180B2 (enExample)
KR (2) KR101859441B1 (enExample)
CN (1) CN104813462B (enExample)
TW (1) TWI573675B (enExample)
WO (1) WO2014085163A1 (enExample)

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Also Published As

Publication number Publication date
WO2014085163A1 (en) 2014-06-05
CN104813462B (zh) 2017-04-26
US9296105B2 (en) 2016-03-29
KR20150091346A (ko) 2015-08-10
JP2015536253A (ja) 2015-12-21
TW201429653A (zh) 2014-08-01
KR101859441B1 (ko) 2018-05-21
JP6254180B2 (ja) 2017-12-27
CN104813462A (zh) 2015-07-29
KR20170038107A (ko) 2017-04-05
US20140156070A1 (en) 2014-06-05

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