CN104813462B - 振动控制的基板传送机械手、系统及方法 - Google Patents

振动控制的基板传送机械手、系统及方法 Download PDF

Info

Publication number
CN104813462B
CN104813462B CN201380061393.0A CN201380061393A CN104813462B CN 104813462 B CN104813462 B CN 104813462B CN 201380061393 A CN201380061393 A CN 201380061393A CN 104813462 B CN104813462 B CN 104813462B
Authority
CN
China
Prior art keywords
vibration
substrate
mechanical hand
end effector
manipulator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN201380061393.0A
Other languages
English (en)
Chinese (zh)
Other versions
CN104813462A (zh
Inventor
尼尔·玛利
杰弗里·C·赫金斯
亚历克斯·明科维奇
布伦丹·蒂尔
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Applied Materials Inc
Original Assignee
Applied Materials Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Applied Materials Inc filed Critical Applied Materials Inc
Publication of CN104813462A publication Critical patent/CN104813462A/zh
Application granted granted Critical
Publication of CN104813462B publication Critical patent/CN104813462B/zh
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/16—Programme controls
    • B25J9/1628—Programme controls characterised by the control loop
    • B25J9/1653—Programme controls characterised by the control loop parameters identification, estimation, stiffness, accuracy, error analysis

Landscapes

  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Manipulator (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
CN201380061393.0A 2012-11-30 2013-11-20 振动控制的基板传送机械手、系统及方法 Expired - Fee Related CN104813462B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201261731816P 2012-11-30 2012-11-30
US61/731,816 2012-11-30
PCT/US2013/071037 WO2014085163A1 (en) 2012-11-30 2013-11-20 Vibration-controlled substrate handling robot, systems, and methods

Publications (2)

Publication Number Publication Date
CN104813462A CN104813462A (zh) 2015-07-29
CN104813462B true CN104813462B (zh) 2017-04-26

Family

ID=50826195

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201380061393.0A Expired - Fee Related CN104813462B (zh) 2012-11-30 2013-11-20 振动控制的基板传送机械手、系统及方法

Country Status (6)

Country Link
US (1) US9296105B2 (enExample)
JP (1) JP6254180B2 (enExample)
KR (2) KR20150091346A (enExample)
CN (1) CN104813462B (enExample)
TW (1) TWI573675B (enExample)
WO (1) WO2014085163A1 (enExample)

Families Citing this family (32)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20160020338A (ko) * 2014-08-13 2016-02-23 박호석 매니플레이터용 진동 모니터링 장치
US10014198B2 (en) * 2015-08-21 2018-07-03 Lam Research Corporation Wear detection of consumable part in semiconductor manufacturing equipment
NL2016330B1 (en) * 2016-02-26 2017-09-20 Mecal Intellectual Property And Standards B V Active inertial damper system and method
JP6739258B2 (ja) * 2016-07-06 2020-08-12 株式会社ダイヘン 振動低減制御装置、及びロボット
DE102017104335A1 (de) * 2017-03-02 2018-09-06 Physik Instrumente (Pi) Gmbh & Co. Kg Vorrichtung zur Bewegungsanalyse und Antriebsvorrichtung
JP7106816B2 (ja) * 2017-03-31 2022-07-27 セイコーエプソン株式会社 制御装置、制御システム、およびロボットシステム
JP6870433B2 (ja) * 2017-03-31 2021-05-12 セイコーエプソン株式会社 制御装置、およびロボットシステム
JP6939024B2 (ja) 2017-03-31 2021-09-22 セイコーエプソン株式会社 ロボット制御装置、ロボットおよびロボットシステム
JP2018171668A (ja) * 2017-03-31 2018-11-08 セイコーエプソン株式会社 制御装置、ロボット、およびロボットシステム
US10406562B2 (en) * 2017-07-21 2019-09-10 Applied Materials, Inc. Automation for rotary sorters
US10695907B2 (en) * 2017-09-29 2020-06-30 Intel Corporation Methods and apparatus for monitoring robot health in manufacturing environments
JP7051045B2 (ja) * 2017-11-08 2022-04-11 オムロン株式会社 移動式マニピュレータ、移動式マニピュレータの制御方法及びプログラム
DE102018207826A1 (de) * 2018-05-18 2019-11-21 Kuka Deutschland Gmbh Handhabung, insbesondere, Transport von Gütern, insbesondere Wafern, durch einen Roboter
US10533852B1 (en) * 2018-09-27 2020-01-14 Taiwan Semiconductor Manufacturing Company, Ltd. Leveling sensor, load port including the same, and method of leveling a load port
CN109240087B (zh) * 2018-10-23 2022-03-01 固高科技股份有限公司 实时改变指令规划频率抑制振动的方法和系统
JP7181055B2 (ja) * 2018-11-02 2022-11-30 ファナック株式会社 ロボット装置
JP2020157402A (ja) * 2019-03-26 2020-10-01 セイコーエプソン株式会社 ロボット制御装置、ロボットの制御方法、およびロボットシステム
CN110154057B (zh) * 2019-06-14 2023-08-01 中国计量大学 能够实现变位加工的减振末端执行器及变位加工制孔方法
JP7045353B2 (ja) * 2019-10-02 2022-03-31 株式会社アルバック 基板搬送装置、および、基板搬送方法
JP7705388B2 (ja) * 2019-11-01 2025-07-09 ラム リサーチ コーポレーション 重力場センサを備えたウエハハンドリングロボット
CN110757463B (zh) * 2019-11-20 2023-06-27 贵州大学 一种机械手抓取力度控制方法及装置
TWI728762B (zh) 2020-03-27 2021-05-21 財團法人工業技術研究院 減低機械手臂振動之方法
US20210407837A1 (en) * 2020-06-30 2021-12-30 Applied Materials, Inc. Robot apparatus and systems, and methods for transporting substrates in electronic device manufacturing
JP7460800B2 (ja) * 2020-12-21 2024-04-02 ファナック株式会社 ロボット制御装置及びロボットシステム
CN115338903A (zh) * 2021-04-28 2022-11-15 三和技研股份有限公司 具薄型脆性基材擦碰震荡传感器的入匣机械臂及传感器
DE102021204935A1 (de) 2021-05-17 2022-11-17 Kuka Deutschland Gmbh Verfahren und System zum Betreiben einer Maschine
WO2023083573A1 (en) * 2021-11-15 2023-05-19 Asml Netherlands B.V. Method and system of reducing chamber vibration
CN116476102A (zh) * 2021-12-22 2023-07-25 微程式资讯股份有限公司 具埋入式感测器的机械手臂承载装置
US20240203767A1 (en) * 2022-12-15 2024-06-20 Applied Materials, Inc. Vibration sensor assembly
KR102607486B1 (ko) * 2023-03-24 2023-11-29 주식회사 아임토리 로봇팔의 진동 노이즈 제거 방법 및 장치
US20240393761A1 (en) * 2023-05-25 2024-11-28 Applied Materials, Inc. Vibration determination in substrate processing systems
TWI870230B (zh) * 2024-02-06 2025-01-11 三和技研股份有限公司 振動分析系統及包含其之工業自動化系統

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20060222480A1 (en) * 2005-03-30 2006-10-05 Duhamel Michael A Substrate transport apparatus with active edge gripper
US20070001638A1 (en) * 2005-07-01 2007-01-04 Fsi International, Inc. Robot with vibration sensor device
CN1300928C (zh) * 2003-12-04 2007-02-14 松下电器产业株式会社 电动机控制装置
CN102642202A (zh) * 2011-02-22 2012-08-22 精工爱普生株式会社 水平多关节机械手

Family Cites Families (30)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5699145A (en) * 1993-07-14 1997-12-16 Nikon Corporation Scanning type exposure apparatus
JP4269129B2 (ja) * 1998-10-19 2009-05-27 株式会社安川電機 干渉検出装置を備えたクリーンロボット
JP2002134583A (ja) * 2000-10-24 2002-05-10 Tokyo Electron Ltd 基板搬送装置
JP2002305140A (ja) * 2001-04-06 2002-10-18 Nikon Corp 露光装置及び基板処理システム
US6956268B2 (en) * 2001-05-18 2005-10-18 Reveo, Inc. MEMS and method of manufacturing MEMS
JP2003228422A (ja) * 2002-02-04 2003-08-15 Canon Inc ステージ制御装置及び露光装置並びにデバイスの製造方法
US7204669B2 (en) * 2002-07-17 2007-04-17 Applied Materials, Inc. Semiconductor substrate damage protection system
CN101263499B (zh) * 2005-07-11 2013-03-27 布鲁克斯自动化公司 智能状态监测和故障诊断系统
US20070097340A1 (en) * 2005-10-31 2007-05-03 Nikon Corporation Active damper with counter mass to compensate for structural vibrations of a lithographic system
JP2007251088A (ja) * 2006-03-20 2007-09-27 Tokyo Electron Ltd 縦型熱処理装置及び縦型熱処理装置における移載機構の制御方法
JP4606388B2 (ja) * 2006-06-12 2011-01-05 川崎重工業株式会社 基板移載装置の搬送系ユニット
US7498759B2 (en) * 2006-08-17 2009-03-03 Micron Technology, Inc. Semiconductor wafer processing accelerometer
DE502006008851D1 (de) * 2006-11-08 2011-03-17 Integrated Dynamics Eng Gmbh Kombiniertes Motion-Control-System
US7778793B2 (en) * 2007-03-12 2010-08-17 Cyberoptics Semiconductor, Inc. Wireless sensor for semiconductor processing systems
US7861593B2 (en) * 2008-07-03 2011-01-04 Oracle America, Inc. Rotational vibration measurements in computer systems
US20100129940A1 (en) * 2008-11-24 2010-05-27 Texas Instruments Incorporated Vibration monitoring of electronic substrate handling systems
US8760629B2 (en) * 2008-12-19 2014-06-24 Nikon Corporation Exposure apparatus including positional measurement system of movable body, exposure method of exposing object including measuring positional information of movable body, and device manufacturing method that includes exposure method of exposing object, including measuring positional information of movable body
US8777547B2 (en) * 2009-01-11 2014-07-15 Applied Materials, Inc. Systems, apparatus and methods for transporting substrates
CN102326244B (zh) * 2009-01-11 2014-12-17 应用材料公司 用于在电子器件制造中传输基板的机械手系统、装置及方法
US8451431B2 (en) * 2009-01-27 2013-05-28 Nikon Corporation Control systems and methods applying iterative feedback tuning for feed-forward and synchronization control of microlithography stages and the like
US20100222898A1 (en) * 2009-01-27 2010-09-02 Nikon Corporation Stage-control systems and methods including inverse closed loop with adaptive controller
JP5549129B2 (ja) * 2009-07-06 2014-07-16 セイコーエプソン株式会社 位置制御方法、ロボット
JP2011152621A (ja) * 2010-01-28 2011-08-11 Yaskawa Electric Corp 基板搬送用装置
JP2011161562A (ja) * 2010-02-09 2011-08-25 Yaskawa Electric Corp 無線伝送装置とそれを用いたロボットの振動抑制制御装置およびロボット制御装置
US8318094B1 (en) * 2010-06-18 2012-11-27 Pacific Biosciences Of California, Inc. Substrate analysis systems
JP2012044014A (ja) * 2010-08-20 2012-03-01 Canon Inc 除振装置、それを用いた露光装置及びデバイスの製造方法
JP5645564B2 (ja) * 2010-09-14 2014-12-24 キヤノン株式会社 センサ装置及びロボット装置
JP5118785B2 (ja) * 2011-04-12 2013-01-16 パナソニック株式会社 Ｍｅｍｓ圧力センサ
US8874258B2 (en) * 2011-09-13 2014-10-28 Persimmon Technologies Corporation Method for transporting a substrate with a substrate support
US8983660B1 (en) * 2012-10-01 2015-03-17 Kla-Tencor Corporation Substrate transporter

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1300928C (zh) * 2003-12-04 2007-02-14 松下电器产业株式会社 电动机控制装置
US20060222480A1 (en) * 2005-03-30 2006-10-05 Duhamel Michael A Substrate transport apparatus with active edge gripper
US20070001638A1 (en) * 2005-07-01 2007-01-04 Fsi International, Inc. Robot with vibration sensor device
CN102642202A (zh) * 2011-02-22 2012-08-22 精工爱普生株式会社 水平多关节机械手

Also Published As

Publication number Publication date
CN104813462A (zh) 2015-07-29
KR20170038107A (ko) 2017-04-05
US9296105B2 (en) 2016-03-29
KR101859441B1 (ko) 2018-05-21
JP6254180B2 (ja) 2017-12-27
TWI573675B (zh) 2017-03-11
JP2015536253A (ja) 2015-12-21
WO2014085163A1 (en) 2014-06-05
US20140156070A1 (en) 2014-06-05
TW201429653A (zh) 2014-08-01
KR20150091346A (ko) 2015-08-10

Similar Documents

Publication Publication Date Title
CN104813462B (zh) 振动控制的基板传送机械手、系统及方法
JP4269129B2 (ja) 干渉検出装置を備えたクリーンロボット
CN104124189B (zh) 监控晶圆处理的系统及方法以及晶圆处理机
JP2015536253A5 (enExample)
CN110733035B (zh) 控制装置、水平多关节机器人和机器人系统
CN103313828B (zh) 机械手以及机械手的噪声消除方法
JPWO2000024053A1 (ja) クリーンロボットの安全保護装置
US20140309778A1 (en) Robot, robot control device, and robot system
US10916451B2 (en) Systems and methods of gap calibration via direct component contact in electronic device manufacturing systems
CN110640719B (zh) 机器人及机器人系统
TWI648209B (zh) 自動化物料處理方法與系統
JP2011152621A (ja) 基板搬送用装置
JP2015177110A (ja) ダイボンダ及びボンディング方法
TWI449117B (zh) A stop detection method for a conveyance device
JP5353581B2 (ja) ロボット
KR102325282B1 (ko) 반도체 장치 제조 설비를 위한 로봇 제어 시스템 및 방법, 이를 위한 컴퓨터 프로그램
CN113442128B (zh) 减低机械手臂振动的方法
TW202228960A (zh) 機器人
JP2022054911A (ja) 波形解析装置、及び波形解析方法
CN115962931A (zh) 传动装置的异常检测方法及异常检测装置
JP2005103649A (ja) 搬送用ハンド、およびその制御装置
US20240355654A1 (en) Substrate processing system
Li et al. Vibration Analysis and Mitigation in Semiconductor Motion Stages Using DMAIC Methodology-A Case Study
WO2025239244A1 (ja) モータ制御システム、ロボットシステム、および、モータ制御方法
JP2006007347A (ja) 駆動装置及びその駆動方法

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20170426