TWI800174B - 具埋入式感測器之機械手臂承載裝置 - Google Patents

具埋入式感測器之機械手臂承載裝置 Download PDF

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Publication number
TWI800174B
TWI800174B TW110148168A TW110148168A TWI800174B TW I800174 B TWI800174 B TW I800174B TW 110148168 A TW110148168 A TW 110148168A TW 110148168 A TW110148168 A TW 110148168A TW I800174 B TWI800174 B TW I800174B
Authority
TW
Taiwan
Prior art keywords
supporting device
robotic arm
arm supporting
embedded sensor
embedded
Prior art date
Application number
TW110148168A
Other languages
English (en)
Other versions
TW202326090A (zh
Inventor
吳騰彥
劉家維
Original Assignee
微程式資訊股份有限公司
長智貿易股份有限公司
盛詮科技股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 微程式資訊股份有限公司, 長智貿易股份有限公司, 盛詮科技股份有限公司 filed Critical 微程式資訊股份有限公司
Priority to TW110148168A priority Critical patent/TWI800174B/zh
Priority to JP2022196852A priority patent/JP7479018B2/ja
Priority to US18/064,164 priority patent/US20230191624A1/en
Priority to KR1020220174168A priority patent/KR20230095818A/ko
Priority to IL299159A priority patent/IL299159A/en
Priority to DE102022133539.9A priority patent/DE102022133539A1/de
Application granted granted Critical
Publication of TWI800174B publication Critical patent/TWI800174B/zh
Publication of TW202326090A publication Critical patent/TW202326090A/zh

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J15/00—Gripping heads and other end effectors
    • B25J15/0014—Gripping heads and other end effectors having fork, comb or plate shaped means for engaging the lower surface on a object to be transported
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J15/00—Gripping heads and other end effectors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J11/00—Manipulators not otherwise provided for
    • B25J11/0095—Manipulators transporting wafers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J15/00—Gripping heads and other end effectors
    • B25J15/06—Gripping heads and other end effectors with vacuum or magnetic holding means
    • B25J15/0616—Gripping heads and other end effectors with vacuum or magnetic holding means with vacuum
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J19/00—Accessories fitted to manipulators, e.g. for monitoring, for viewing; Safety devices combined with or specially adapted for use in connection with manipulators
    • B25J19/02—Sensing devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
    • B65G47/90—Devices for picking-up and depositing articles or materials

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Robotics (AREA)
  • Manipulator (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
TW110148168A 2021-12-22 2021-12-22 具埋入式感測器之機械手臂承載裝置 TWI800174B (zh)

Priority Applications (6)

Application Number Priority Date Filing Date Title
TW110148168A TWI800174B (zh) 2021-12-22 2021-12-22 具埋入式感測器之機械手臂承載裝置
JP2022196852A JP7479018B2 (ja) 2021-12-22 2022-12-09 埋め込みセンサーを有するロボットアーム支持装置
US18/064,164 US20230191624A1 (en) 2021-12-22 2022-12-09 End Effector Of Wafer Transfer Robot With Embedded Sensors
KR1020220174168A KR20230095818A (ko) 2021-12-22 2022-12-13 내장형 센서를 갖춘 로봇 팔 지지 장치
IL299159A IL299159A (en) 2021-12-22 2022-12-15 Edge effect of a wafer transfer robot with embedded sensors
DE102022133539.9A DE102022133539A1 (de) 2021-12-22 2022-12-15 Roboterarm-Tragevorrichtung mit eingebettetem Sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW110148168A TWI800174B (zh) 2021-12-22 2021-12-22 具埋入式感測器之機械手臂承載裝置

Publications (2)

Publication Number Publication Date
TWI800174B true TWI800174B (zh) 2023-04-21
TW202326090A TW202326090A (zh) 2023-07-01

Family

ID=86606595

Family Applications (1)

Application Number Title Priority Date Filing Date
TW110148168A TWI800174B (zh) 2021-12-22 2021-12-22 具埋入式感測器之機械手臂承載裝置

Country Status (6)

Country Link
US (1) US20230191624A1 (zh)
JP (1) JP7479018B2 (zh)
KR (1) KR20230095818A (zh)
DE (1) DE102022133539A1 (zh)
IL (1) IL299159A (zh)
TW (1) TWI800174B (zh)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108428642A (zh) * 2017-02-15 2018-08-21 台湾积体电路制造股份有限公司 机台诊断工具、晶圆处理机台载入端口诊断工具及其方法
TW201831919A (zh) * 2017-02-15 2018-09-01 台灣積體電路製造股份有限公司 機台診斷工具、晶圓處理機台載入埠診斷工具及其診斷方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20070001638A1 (en) 2005-07-01 2007-01-04 Fsi International, Inc. Robot with vibration sensor device
JP2021122925A (ja) 2020-02-10 2021-08-30 豊田合成株式会社 ロボットハンド

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108428642A (zh) * 2017-02-15 2018-08-21 台湾积体电路制造股份有限公司 机台诊断工具、晶圆处理机台载入端口诊断工具及其方法
TW201831919A (zh) * 2017-02-15 2018-09-01 台灣積體電路製造股份有限公司 機台診斷工具、晶圓處理機台載入埠診斷工具及其診斷方法

Also Published As

Publication number Publication date
DE102022133539A1 (de) 2023-06-22
TW202326090A (zh) 2023-07-01
IL299159A (en) 2024-07-01
JP7479018B2 (ja) 2024-05-08
JP2023093356A (ja) 2023-07-04
KR20230095818A (ko) 2023-06-29
US20230191624A1 (en) 2023-06-22

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