TWI571637B - Electronic parts conveyor and electronic parts inspection device - Google Patents

Electronic parts conveyor and electronic parts inspection device Download PDF

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Publication number
TWI571637B
TWI571637B TW104122624A TW104122624A TWI571637B TW I571637 B TWI571637 B TW I571637B TW 104122624 A TW104122624 A TW 104122624A TW 104122624 A TW104122624 A TW 104122624A TW I571637 B TWI571637 B TW I571637B
Authority
TW
Taiwan
Prior art keywords
electronic component
space
baffle
shutter
opening
Prior art date
Application number
TW104122624A
Other languages
English (en)
Chinese (zh)
Other versions
TW201604551A (zh
Inventor
Daisuke Kirihara
Masami Maeda
Toshioki Shimojima
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Publication of TW201604551A publication Critical patent/TW201604551A/zh
Application granted granted Critical
Publication of TWI571637B publication Critical patent/TWI571637B/zh

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26—Testing of individual semiconductor devices
    • G01R31/2601—Apparatus or methods therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2853—Electrical testing of internal connections or -isolation, e.g. latch-up or chip-to-lead connections
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2893—Handling, conveying or loading, e.g. belts, boats, vacuum fingers

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Engineering & Computer Science (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
TW104122624A 2014-07-16 2015-07-13 Electronic parts conveyor and electronic parts inspection device TWI571637B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2014146291A JP2016023961A (ja) 2014-07-16 2014-07-16 電子部品搬送装置および電子部品検査装置

Publications (2)

Publication Number Publication Date
TW201604551A TW201604551A (zh) 2016-02-01
TWI571637B true TWI571637B (zh) 2017-02-21

Family

ID=55147224

Family Applications (2)

Application Number Title Priority Date Filing Date
TW105143464A TWI635284B (zh) 2014-07-16 2015-07-13 電子零件搬送裝置及電子零件檢查裝置
TW104122624A TWI571637B (zh) 2014-07-16 2015-07-13 Electronic parts conveyor and electronic parts inspection device

Family Applications Before (1)

Application Number Title Priority Date Filing Date
TW105143464A TWI635284B (zh) 2014-07-16 2015-07-13 電子零件搬送裝置及電子零件檢查裝置

Country Status (4)

Country Link
JP (1) JP2016023961A (ja)
KR (1) KR101652003B1 (ja)
CN (1) CN105277870B (ja)
TW (2) TWI635284B (ja)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2018054463A (ja) * 2016-09-29 2018-04-05 セイコーエプソン株式会社 電子部品搬送装置および電子部品検査装置
JP2018141700A (ja) * 2017-02-28 2018-09-13 セイコーエプソン株式会社 電子部品搬送装置および電子部品検査装置
TWI692644B (zh) * 2019-06-18 2020-05-01 旺矽科技股份有限公司 電子元件針測裝置

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW201036894A (en) * 2009-04-02 2010-10-16 Daishin Co Ltd Pneumatic action system for parts to be conveyed and parts conveyor apparatus
TWM401777U (en) * 2010-10-13 2011-04-11 Advanced Electronics Co Ltd High-power electronic device tester capable of providing constant temperature and humidity testing environment
TW201315310A (zh) * 2011-05-26 2013-04-01 Juki Kk 電子零件安裝裝置
JP2013236112A (ja) * 2006-02-17 2013-11-21 Nikon Corp 基板処理方法、基板処理装置、露光装置、測定検査装置、処理装置、コンピュータ・システム、プログラム及び情報記録媒体
CN103792485A (zh) * 2014-02-17 2014-05-14 大唐微电子技术有限公司 自动化测试设备和测试方法

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10227828A (ja) * 1997-02-13 1998-08-25 Advantest Corp Ｉｃ試験装置
JPH11344530A (ja) * 1998-05-29 1999-12-14 Advantest Corp Ｉｃ搬送媒体
JP4041594B2 (ja) 1998-09-02 2008-01-30 株式会社アドバンテスト 部品試験装置およびチャンバ入り口の開閉方法
US6607071B1 (en) 1998-10-19 2003-08-19 Mirae Corporation Sealed test chamber for module IC handler
JP2004347329A (ja) * 2003-05-20 2004-12-09 Yac Co Ltd ハンドラの低温条件試験装置及びその方法
JP4767896B2 (ja) * 2007-03-29 2011-09-07 東京エレクトロン株式会社 被検査体の搬送装置及び検査装置
CN102171581B (zh) * 2008-10-09 2013-09-18 株式会社爱德万测试 接口构件、测试部单元以及电子元件测试装置
JP5938932B2 (ja) * 2012-02-14 2016-06-22 セイコーエプソン株式会社 ハンドラー、及び部品検査装置
JP5874427B2 (ja) * 2012-02-14 2016-03-02 セイコーエプソン株式会社 部品検査装置、及び、ハンドラー

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013236112A (ja) * 2006-02-17 2013-11-21 Nikon Corp 基板処理方法、基板処理装置、露光装置、測定検査装置、処理装置、コンピュータ・システム、プログラム及び情報記録媒体
TW201036894A (en) * 2009-04-02 2010-10-16 Daishin Co Ltd Pneumatic action system for parts to be conveyed and parts conveyor apparatus
TWM401777U (en) * 2010-10-13 2011-04-11 Advanced Electronics Co Ltd High-power electronic device tester capable of providing constant temperature and humidity testing environment
TW201315310A (zh) * 2011-05-26 2013-04-01 Juki Kk 電子零件安裝裝置
CN103792485A (zh) * 2014-02-17 2014-05-14 大唐微电子技术有限公司 自动化测试设备和测试方法

Also Published As

Publication number Publication date
KR20160009480A (ko) 2016-01-26
KR101652003B1 (ko) 2016-08-29
JP2016023961A (ja) 2016-02-08
TW201604551A (zh) 2016-02-01
TW201727244A (zh) 2017-08-01
CN105277870A (zh) 2016-01-27
TWI635284B (zh) 2018-09-11
CN105277870B (zh) 2019-01-01

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MM4A Annulment or lapse of patent due to non-payment of fees