CN105277870B - 电子部件搬运装置以及电子部件检查装置 - Google Patents

电子部件搬运装置以及电子部件检查装置 Download PDF

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Publication number
CN105277870B
CN105277870B CN201510144163.1A CN201510144163A CN105277870B CN 105277870 B CN105277870 B CN 105277870B CN 201510144163 A CN201510144163 A CN 201510144163A CN 105277870 B CN105277870 B CN 105277870B
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CN
China
Prior art keywords
gate
electronic component
space
conveying device
mentioned
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN201510144163.1A
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English (en)
Chinese (zh)
Other versions
CN105277870A (zh
Inventor
桐原大辅
前田政己
下岛聪兴
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
North Star Technology Co ltd
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Publication of CN105277870A publication Critical patent/CN105277870A/zh
Application granted granted Critical
Publication of CN105277870B publication Critical patent/CN105277870B/zh
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26—Testing of individual semiconductor devices
    • G01R31/2601—Apparatus or methods therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2853—Electrical testing of internal connections or -isolation, e.g. latch-up or chip-to-lead connections
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2893—Handling, conveying or loading, e.g. belts, boats, vacuum fingers

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Engineering & Computer Science (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
CN201510144163.1A 2014-07-16 2015-03-30 电子部件搬运装置以及电子部件检查装置 Expired - Fee Related CN105277870B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2014146291A JP2016023961A (ja) 2014-07-16 2014-07-16 電子部品搬送装置および電子部品検査装置
JP2014-146291 2014-07-16

Publications (2)

Publication Number Publication Date
CN105277870A CN105277870A (zh) 2016-01-27
CN105277870B true CN105277870B (zh) 2019-01-01

Family

ID=55147224

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201510144163.1A Expired - Fee Related CN105277870B (zh) 2014-07-16 2015-03-30 电子部件搬运装置以及电子部件检查装置

Country Status (4)

Country Link
JP (1) JP2016023961A (ja)
KR (1) KR101652003B1 (ja)
CN (1) CN105277870B (ja)
TW (2) TWI635284B (ja)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2018054463A (ja) * 2016-09-29 2018-04-05 セイコーエプソン株式会社 電子部品搬送装置および電子部品検査装置
JP2018141700A (ja) * 2017-02-28 2018-09-13 セイコーエプソン株式会社 電子部品搬送装置および電子部品検査装置
TWI692644B (zh) * 2019-06-18 2020-05-01 旺矽科技股份有限公司 電子元件針測裝置

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10227828A (ja) * 1997-02-13 1998-08-25 Advantest Corp Ｉｃ試験装置
JPH11344530A (ja) * 1998-05-29 1999-12-14 Advantest Corp Ｉｃ搬送媒体
JP4041594B2 (ja) 1998-09-02 2008-01-30 株式会社アドバンテスト 部品試験装置およびチャンバ入り口の開閉方法
US6607071B1 (en) 1998-10-19 2003-08-19 Mirae Corporation Sealed test chamber for module IC handler
JP2004347329A (ja) * 2003-05-20 2004-12-09 Yac Co Ltd ハンドラの低温条件試験装置及びその方法
TW200745771A (en) * 2006-02-17 2007-12-16 Nikon Corp Adjustment method, substrate processing method, substrate processing apparatus, exposure apparatus, inspection apparatus, measurement and/or inspection system, processing apparatus, computer system, program and information recording medium
JP4767896B2 (ja) * 2007-03-29 2011-09-07 東京エレクトロン株式会社 被検査体の搬送装置及び検査装置
KR101104288B1 (ko) * 2008-10-09 2012-01-11 가부시키가이샤 아드반테스트 인터페이스 부재, 테스트부 유닛 및 전자 부품 시험 장치
JP4555383B1 (ja) * 2009-04-02 2010-09-29 株式会社ダイシン 搬送部品の空圧作用システム及び部品搬送装置
TWM401777U (en) * 2010-10-13 2011-04-11 Advanced Electronics Co Ltd High-power electronic device tester capable of providing constant temperature and humidity testing environment
JP5715881B2 (ja) * 2011-05-26 2015-05-13 Juki株式会社 電子部品実装装置
JP5938932B2 (ja) * 2012-02-14 2016-06-22 セイコーエプソン株式会社 ハンドラー、及び部品検査装置
JP5874427B2 (ja) * 2012-02-14 2016-03-02 セイコーエプソン株式会社 部品検査装置、及び、ハンドラー
CN103792485B (zh) * 2014-02-17 2016-12-07 大唐微电子技术有限公司 自动化测试设备和测试方法

Also Published As

Publication number Publication date
JP2016023961A (ja) 2016-02-08
TWI571637B (zh) 2017-02-21
TW201604551A (zh) 2016-02-01
KR101652003B1 (ko) 2016-08-29
TWI635284B (zh) 2018-09-11
CN105277870A (zh) 2016-01-27
TW201727244A (zh) 2017-08-01
KR20160009480A (ko) 2016-01-26

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Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
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SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant
TR01 Transfer of patent right
TR01 Transfer of patent right

Effective date of registration: 20210701

Address after: Nagano, Japan

Patentee after: North Star Technology Co.,Ltd.

Address before: Tokyo, Japan

Patentee before: Seiko Epson Corp.

CF01 Termination of patent right due to non-payment of annual fee
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20190101